Silicon component jig

Abstract

The invention relates to the field of jigs, in particular to a silicon component jig which comprises a plurality of single plates, and the single plates are sequentially and detachably connected in the circumferential direction to form a jig body of an annular plate-shaped structure. The enclosure part is in a circular ring shape, protrudes out of the surface of one side of the jig main body and surrounds the jig main body in the circumferential direction of the jig main body so as to form an enclosure on the circumferential side of the jig main body; in the using state, on the projection in the axial direction, the projection of the telecentric end of the through groove to be machined of the silicon component is located in the projection range of the inner ring of the end, away from the jig body, of the enclosure part. According to the jig provided by the invention, the impact of water jet on the bottom wall of the exhaust fan main body during processing can be reduced, and the damage to the inner side wall of the side wall part of the exhaust fan main body caused by backwash generated when the jig body is impacted by the water jet can be reduced.

Description

Technical Field

[0001] This application relates to the field of jigs, and particularly to a jig for silicon components. Background Art

[0002] Integrated circuit capacitive coupling (CCP) chip etchers are the main equipment for chip processing, and multi-slot exhaust fans are key components connecting the showerhead and silicon wafers in chip etchers.

[0003] The exhaust fan body, as a silicon component, mainly presents a structure as Figure 1 shown. It has an overall circular ring structure, mainly including an upper ring part and a lower ring part on opposite sides, and a side wall part disposed between the upper and lower ring parts to form the exhaust fan body.

[0004] When processing the exhaust fan body, it is usually necessary to machine a number of through slots on the upper ring part that are evenly arranged along the circumferential direction of the upper ring part. Among them, the through slots basically extend along the radial direction of the upper ring part and axially penetrate the upper ring part.

[0005] For the machining of the through slots on the upper ring part, generally, two machining methods are mainly used: mechanical milling and high-pressure water jet (Water-Jet). Traditional mechanical milling requires selecting a specific tool to be machined into shape in one pass by numerical control machining, which is prone to problems such as chipping, cracking, large tool wear, and long machining time. When using the Water-Jet technology for machining, the machining time can be greatly shortened and the production efficiency can be improved; at the same time, problems such as chipping and cracking of the material caused by tool wear can also be avoided.

[0006] However, when using the Water-Jet machining method, since the water jet penetrates the upper ring part and directly impacts the lower ring part after that, it may injure or even penetrate the lower ring part. Therefore, in related technologies, during machining, a jig similar to a ring plate is usually placed on the side surface of the lower ring part facing the upper ring part to play a protective role and prevent the water jet from directly impacting the lower ring part.

[0007] However, this jig still has defects in use, that is, when the high-pressure water jet impacts the surface of the jig, sputtering will occur on the surface of the jig. When the sputtered jet impacts the inner side wall of the side wall part, it is easy to injure the inner side wall of the side wall part, so it still needs to be improved. Summary of the Invention

[0008] In order to solve at least one technical problem mentioned in the background art, the purpose of this application is to provide a jig for silicon components.

[0009] To achieve the above purpose, this application provides the following technical solutions.

[0010] A jig for silicon components, comprising: A fixture body, the fixture body comprising a plurality of monomer plates, wherein the plurality of monomer plates are sequentially and detachably connected along the circumferential direction to form a fixture body with a circular plate-like structure; The enclosure portion is in the shape of a circular ring, which protrudes from one side surface of the jig body and surrounds the jig body along the circumference of the jig body to form an enclosure for the circumference of the jig body; in the use state, in the axial projection, the projection of the distal end of the through groove to be processed in the silicon component is within the projection range of the inner circle of the enclosure portion away from one end of the jig body.

[0011] As an optional implementation of the present application, the inner side wall of the enclosure portion is in a slope structure, and an angle α is formed between the slope and the fixture body, wherein the angle α>90°.

[0012] As an optional implementation of the present application, 120°≤angle α≤160°.

[0013] As an optional embodiment of the present application, the enclosure portion includes a plurality of monomer portions corresponding one-to-one to the monomer plates of the fixture body, the monomer portions are fixed to the monomer plates, and in the assembled state, the plurality of monomer portions are sequentially connected along the circumferential direction to form the enclosure portion.

[0014] As an optional implementation of the present application, the single body plate and / or the single body part is made of tungsten steel material.

[0015] As an optional implementation of the present application, in the assembled state, the first surfaces of the individual panels are flush with each other, and / or the second surfaces of the individual panels are flush with each other.

[0016] As an optional embodiment of the present application, at one end of two adjacent single plates close to each other, an upper concave step is formed on one of them, and a lower concave step is formed on the other. In the assembled state, the upper concave step and the lower concave step are embedded in each other and connected by fasteners.

[0017] As an optional implementation of the present application, the fastener includes a bolt, and two adjacent single plates are connected to each other by the bolt, wherein the connection position of the bolt is within the inner circle of the lower ring portion of the silicon component.

[0018] As an optional embodiment of the present application, the fastener includes a magnet and a magnetic attraction member that can be attracted by the magnet, and one of the magnet and the magnetic attraction member is disposed on the upper concave step, and the other is disposed on the lower concave step.

[0019] As an optional implementation of the present application, the magnetic attraction member and the magnet form a chimeric relationship in the axial direction.

[0020] Compared with the prior art, this application has the following beneficial effects: The jig provided by this application can reduce the impact of the water jet on the bottom wall of the exhaust fan body during processing, and can also reduce the damage to the inner wall of the side enclosure of the exhaust fan body caused by the back splash generated when the water jet impacts the jig body.

[0021] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of this application, nor is it used to limit the scope of this application. Other features of this application will become easily understandable through the following description. Brief Description of the Drawings

[0022] By reading the following detailed description with reference to the drawings, the above and other objects, features, and advantages of the exemplary embodiments of this application will become easily understandable. In the drawings, several embodiments of this application are shown in an exemplary rather than restrictive manner, where: In the drawings, the same or corresponding reference numerals represent the same or corresponding parts.

[0023] Figure 1 Shows a schematic structural diagram of the exhaust fan body; Figure 2 Shows a schematic structural diagram of the jig of this application in the assembled state; Figure 3 Shows a schematic structural diagram of the jig of this application in the disassembled state; Figure 4 Shows a schematic structural diagram of two adjacent single plates of this application in the disassembled state; Figure 5 Shows a schematic structural diagram of this application in the state of being applied to the exhaust fan body; Figure 6 Is Figure 5 An axial partial sectional view; Figure 7 Shows a schematic structural diagram of the fasteners of the single plate in the magnetically attracted connection state; Figure 8 Shows a schematic diagram of the cross-section of the enclosure part being triangular.

[0024] Explanation of the reference numerals in the figures: L0, central axis; L1, first reference line; L2, second reference line; A, exhaust fan body; A1, upper ring part; A2, lower ring part; A3, side enclosure part; A4, through groove; 1, jig body, 11, single plate; 111, upper concave step; 112, lower concave step.

[0025] 2, enclosure part; 21, single part; 31, bolt; 32, magnetic attracting part; 33, magnet; 34, positioning hole; Detailed Description of the Embodiments To make the objectives, features, and advantages of the present application more obvious and understandable, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present application.

[0026] This embodiment provides a silicon component fixture, which is mainly applicable to the Water-Jet (i.e., high-pressure water jet) processing of the exhaust fan body of a chip etching machine.

[0027] To facilitate a better understanding of this embodiment, a brief description of the processing of the exhaust fan body A will be given first.

[0028] As Figure 1 shown, the overall shape of the exhaust fan body is a circular ring structure, mainly including an upper ring part A1 and a lower ring part A2 on opposite sides, and a side wall part A3 provided between the upper and lower ring parts A2 to form the exhaust fan body A. The axial cross-section of the exhaust fan body is basically C-shaped.

[0029] For the processing of the exhaust fan body, several through slots A4 are mainly processed on the upper ring part A1. The several through slots A4 are basically arranged in a circumferential array along the upper ring part A1, and a single through slot A4 basically extends radially along the upper ring part A1 and axially penetrates the upper ring part A1.

[0030] The general method of using a high-pressure water jet (hereinafter referred to as water jet) to open the through slot A4 is that the entire exhaust fan body A is horizontally arranged, and then the high-pressure water jet is vertically sprayed downward from above the exhaust fan body A to cut out the through slot A4. For the convenience of subsequent description, in this embodiment, the end of the through slot A4 close to the center of the exhaust fan body is denoted as the proximal end R1, and correspondingly, the end of the through slot A4 far from the center of the exhaust fan body is denoted as the distal end R0.

[0031] During the processing, when the high-pressure water jet penetrates the upper ring part A1, the water jet will continue to spray downward, thus easily damaging the lower ring part A2.

[0032] Based on this, the fixture provided in this embodiment is mainly used to be placed between the upper ring part A1 and the lower ring part A2 during processing to form a certain blocking and protective effect on the inner side walls of the lower ring part A2 and the side wall part A3. During processing, the fixture is directly placed on the upper surface of the lower ring part A2.

[0033] The fixture provided in this embodiment mainly includes a fixture body 1 and a surrounding part 2.

[0034] Among them, as Figure 2 and Figure 3As shown, the fixture body 1 is in a circular ring shape and includes a plurality of monomer plates 11. Each monomer plate 11 is basically in an arc shape, and each of the monomer plates 11 is detachably connected in sequence along the circumferential direction to form the fixture body 1 in a circular ring plate structure. In the assembled state, the first surfaces of the monomer plates 11 are flush with each other, and / or the second surfaces of the monomer plates 11 are flush with each other.

[0035] The enclosing part 2 is in a circular ring shape, protruding from one side surface of the fixture body 1 and surrounding the fixture body 1 along the circumferential direction of the fixture body 1 to form an enclosure for the circumferential side of the fixture body 1.

[0036] The function of the enclosing part 2 is to reduce the damage to the inner wall of the side enclosure part A3 caused by the back-splash after the water jet impacts the fixture body 1. Specifically, after the water jet penetrates the upper ring part A1 and impacts the upper surface of the fixture body 1, it will form a back-splash to the side. Among them, when the water jet towards the side enclosure part A3 splashes back to the inner wall of the side enclosure part A3, it will damage the inner wall of the side enclosure part A3. After the enclosing part 2 is provided, the enclosing part 2 can block the water jet back-splash towards the side enclosure part A3, which is equivalent to playing a role in blocking the back-splash, thereby reducing the damage to the inner wall of the side enclosure part A3 caused by the back-splash of the water jet.

[0037] In addition, as Figure 5 and Figure 6 shown, in the use state, that is, when the fixture is installed in the exhaust fan body A for use, in the projection along the axial direction, the projection of the centroid end R0 of the through groove A4 to be machined of the silicon component is within the projection range of the inner circle at the end of the enclosing part 2 away from the fixture body 1; it can also be understood that, as Figure 6 shown in the cross-sectional view, the centroid end R0 of the through groove A4 to be machined is on the first reference line L1 arranged vertically, and the inner circle at the end of the enclosing part 2 away from the fixture body 1 (i.e., the upper end) is on the second reference line L2 arranged vertically, where the second reference line L2 is farther from the central axis L0 of the exhaust fan body A than the first reference line L1, or rather, in the radial direction, the inner circle at the upper end of the enclosing part 2 is farther out than the centroid end R0 of the through groove A4.

[0038] The reason why the second reference line L2 needs to be farther from the central axis L0 of the exhaust fan body A than the first reference line L1 is that if the second reference line L2 is closer to the central axis L0 than the first reference line L1, at this time, it is equivalent that a part of the upper end surface of the side enclosure part A3 will extend to directly below the through groove A4 to form an extended surface. At this time, when the water jet is processed to the center end position of the through groove A4, some of the water jets will directly impact the extended surface, resulting in back-splash, so that the water jets splash through the extended surface and impact the inner wall of the side enclosure part A3, causing damage to its inner side surface.

[0039] In some alternative embodiments, the inner sidewall of the enclosing portion 2 has an inclined surface structure, such that the cross-section of the enclosing portion 2 with the inclined surface can specifically be Figure 6 the trapezoidal structure shown in Figure 8 or the triangular structure shown in. In addition, an angle α is formed between the inclined surface and the fixture main body 1, where the angle α > 90°, preferably, 120° ≤ angle α ≤ 160°. For example, angles such as 130° and 145° can be adopted, and specifically, it is selected according to actual needs.

[0040] The reason for designing the inner sidewall of the enclosing portion 2 as an inclined surface lies in: First, as described above, it is necessary to make the second reference line L2 farther from the central axis L0 of the exhaust fan main body A than the first reference line L1. After being designed as an inclined surface in this way, the enclosing portion 2 can present a structure that is wider at the top and narrower at the bottom, that is, the width of the upper end of the enclosing portion 2 is narrower, so as to meet the requirement that the second reference line L2 is farther from the central axis L0 of the exhaust fan main body A than the first reference line L1.

[0041] Conversely, if the inner sidewall of the enclosing portion 2 is designed as a vertical surface, at this time, if the second reference line L2 is to be farther from the central axis L0 of the exhaust fan main body A than the first reference line L1, the thickness of the enclosing portion 2 will inevitably need to be designed to be relatively narrow. In this way, obviously, it is not conducive to the strength of the enclosing portion 2.

[0042] In the embodiment, by designing it as an inclined surface structure, it can not only ensure that the second reference line L2 is farther from the central axis L0 of the exhaust fan main body A than the first reference line L1, but also ensure that the overall thickness of the enclosing portion 2 is not too narrow, thereby ensuring the strength of the enclosing portion 2 to a certain extent.

[0043] Secondly, for the water jet, when it is working, the lower the ejected water column, the more it will have a tendency to spread laterally. Taking the perspective shown in Figure 6 as an example, the lower part of the water column will have a tendency to spread to the left. When designing the inner sidewall of the enclosing portion 2 as an inclined surface in this way, it can better receive the water jet spreading to the left to play a protective role.

[0044] In addition, the reason for designing the fixture main body 1 in the form of being detachably connected by a plurality of single plates 11 in this embodiment lies in: The fixture main body 1 needs to be inserted into the upper ring portion A1 and the lower ring portion A2 through the annular hole in the middle of the exhaust fan main body A. If the fixture main body 1 is an integral structure that cannot be disassembled, it will not be able to be inserted into the upper ring portion A1 and the lower ring portion A2 due to its own diameter being larger than the aforementioned annular hole; after being designed as a detachable structure, the single plates 11 can be inserted into the exhaust fan main body A in a separated state and then assembled and connected, so that the fixture main body 1 can be inserted into the exhaust fan main body A.

[0045] In some embodiments, such as Figure 3As shown, the enclosure part 2 includes a number of single parts 21 corresponding one by one to the single plates 11 of the fixture main body 1, that is, one single plate 11 corresponds to one single part 21. The single part 21 is fixed to the single plate 11. Preferably, the single part 21 and the single plate 11 are of an integral structure, and the single part 21 is located at the edge of the single plate 11 and extends along the edge of the single plate 11. In the assembled state, a number of single parts 21 are connected in sequence along the circumference to form the enclosure part 2.

[0046] In order to ensure that both sides of each single plate 11 are flush in the assembled state, in some embodiments, among the adjacent ends of two adjacent single plates 11, one forms an upper concave step 111 and the other forms a lower concave step 112. For example, in this embodiment, it is shown that the fixture main body 1 is composed of 6 single plates 11, and both ends of 3 single plates 11 form lower concave steps 112, and both ends of the other 3 single plates 11 form upper concave steps 111. During assembly, the single plates 11 provided with lower concave steps 112 and the single plates 11 provided with upper concave steps 111 are arranged alternately along the axial direction and butt-jointed.

[0047] In the assembled state, as Figure 2 shown, the upper concave step 111 and the lower concave step 112 are mutually embedded and connected by fasteners. Setting fasteners to connect two adjacent single plates 11 can prevent the single plates 11 from separating and misaligning with each other when the fixture main body 1 is subjected to water jet impact.

[0048] The fastener can be one of the following two forms, or a combination of both: The first type: as Figure 2 shown, the fastener includes a bolt 31, and two adjacent single plates 11 are connected to each other by the bolt 31. Among them, the connection position of the bolt 31 is within the inner ring range of the lower ring part A2 of the silicon component. In this way, after connection, the protruding part of the bolt 31 is within the inner ring range of the lower ring part A2. At this time, the inner ring of the lower ring part A2 can play a role in avoiding the bolt 31 and prevent the lower ring part A2 from lifting the bolt 31.

[0049] The second type, as Figure 7 shown, two adjacent single plates 11 can be fixed by magnetic attraction. For example, the fastener includes a magnet 33 and a magnetic part 32 that can be adsorbed by the magnet 33, such as iron. One of the magnet 33 and the magnetic part 32 is arranged on the upper concave step 111, and the other is arranged on the lower concave step 112. Relying on the mutual magnetic attraction between the magnetic part 32 and the magnet 33, the two single plates 11 are adsorbed together to achieve fixation. Compared with the bolt 31 fixing method, the magnetic attraction method is more convenient for assembly.

[0050] In order to reduce the mutual offset of the two monomer plates 11 in the horizontal direction, the magnetic attracting member 32 and the magnet 33 form a fitting relationship in the axial direction. For example, the magnetic attracting member 32 is fixed on the upper concave step 111 and protrudes upward from the concave step surface of the upper concave step 111; and a positioning hole 34 for the vertical insertion of the magnetic attracting member 32 is formed on the concave step surface of the lower concave step 112, and the magnet 33 is fixed in the positioning hole 34. In the assembled state, after the magnetic attracting member 32 is inserted into the positioning hole 34, it adsorbs to the magnet 33. At this time, the fitting relationship between the magnetic attracting member 32 and the positioning hole 34 can play a role in horizontal limiting, reducing the problem of mutual offset of the two monomer plates 11 in the horizontal direction.

[0051] In addition, the monomer plate 11 and / or the monomer part 21 are made of tungsten steel material, so as to improve the strength of the fixture. The specific manufacturing method of the fixture is as follows: S1: Weigh, mix, crush and other operations are performed on the main raw materials for manufacturing the tungsten steel fixture to obtain uniform and dense metal powder. For example, the raw materials of W, Co, C and other rare earth elements are weighed and mixed respectively, and then crushed by relevant equipment to obtain uniformly mixed and dense metal powder.

[0052] S2: The sample in S1 is subjected to powder pressing and sintering to obtain a dense and uniform solid material; for example, the metal powder in step S1 is poured into the equipment, pressed to obtain uniform and dense powder, and then poured into the sintering furnace, and the sintering temperature, sintering time, and sintering pressure are set to obtain a uniform and dense irregular solid tungsten steel material.

[0053] S3: The solid material in S2 is machined to process a specific shape according to the drawing requirements. For example, the irregular solid tungsten steel material in step 2 is machined. Suitable cemented carbide tools or coated tools are selected, and parameters such as cutting speed, feed speed, and cutting depth are set to obtain tungsten steel material with a rough shape. Then, the tool and the tungsten steel material are fixed on the milling machine one by one, and rough milling is performed on the tungsten steel material, supplemented with coolant and lubricant, to obtain a roughly formed tungsten steel fixture. Then, finish milling is performed on the tungsten steel fixture after rough milling, and relevant parameters are set to process it to the required dimensions and surface quality of the drawing.

[0054] S4: The sample in S3 is heat-treated to improve the organizational structure performance of the tungsten steel fixture. Then, surface treatment is performed on the tungsten steel fixture to improve the service life and aesthetics of the fixture.

[0055] S5: Quality inspection is performed on the tungsten steel fixture processed in S4, such as key parameters such as dimensions required by the drawing, surface quality inspection, hardness, wear resistance, etc., to ensure that it meets the dimensional requirements of the drawing and also meets relevant quality requirements.

[0056] It should be understood that the various forms of processes shown above can be used, with steps reordered, added or deleted. For example, the steps described in this application can be executed in parallel, sequentially, or in different orders, as long as the desired results of the technical solutions disclosed in this application can be achieved, and no limitations are imposed herein.

[0057] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of this application, "a plurality" means two or more, unless otherwise specifically defined.

[0058] As described above, the above are only specific embodiments of this application, but the protection scope of this application is not limited thereto. Any person skilled in the art within the technical scope disclosed in this application can easily think of changes or substitutions, which should all be covered by the protection scope of this application. Therefore, the protection scope of this application should be subject to the protection scope of the claims.

Claims

1. A silicon component jig, characterized in that: include: A fixture body, the fixture body comprising a plurality of monomer plates, wherein the plurality of monomer plates are sequentially and detachably connected along the circumferential direction to form a fixture body with a circular plate-like structure; The enclosure portion is in the shape of a circular ring, which protrudes from one side surface of the jig body and surrounds the jig body along the circumference of the jig body to form an enclosure for the circumference of the jig body; in the use state, in the axial projection, the projection of the distal end of the through groove to be processed in the silicon component is within the projection range of the inner circle of the enclosure portion away from one end of the jig body.

2. A silicon component jig according to claim 1, characterized in that: The inner side wall of the enclosure portion is in a slope structure, and an angle α is formed between the slope and the fixture body, wherein the angle α>90°.

3. A silicon component jig according to claim 2, characterized in that: 120°≤angle α≤160°.

4. A silicon component jig according to claim 1, characterized in that: The enclosure portion includes a plurality of monomer portions corresponding one to one with the monomer plates of the fixture body, the monomer portions are fixed to the monomer plates, and in an assembled state, the plurality of monomer portions are sequentially connected along the circumferential direction to form the enclosure portion.

5. A silicon component jig according to claim 4, characterized in that: The monolithic plate and / or the monolithic portion are made of tungsten steel.

6. The silicon component jig according to claim 1, characterized in that: In the assembled state, the first surfaces of the individual panels are flush with each other, and / or the second surfaces of the individual panels are flush with each other.

7. A silicon component jig according to claim 6, characterized in that: At one end of two adjacent single plates close to each other, one of them is formed with an upper concave step, and the other is formed with a lower concave step. In the assembled state, the upper concave step and the lower concave step are embedded with each other and connected by fasteners.

8. The silicon component jig according to claim 7, characterized in that: The fasteners include bolts, and two adjacent single plates are connected to each other by bolts, wherein the connection position of the bolts is within the inner circle of the lower ring portion of the silicon component.

9. The silicon component jig according to claim 7, characterized in that: The fastener comprises a magnet and a magnetic attraction member that can be attracted by the magnet. One of the magnet and the magnetic attraction member is arranged on the upper concave step, and the other is arranged on the lower concave step.

10. The silicon component jig according to claim 8, characterized in that: The magnetic attraction member and the magnet form a fitting relationship in the axial direction.

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