Crucible screening device for evaporation
By introducing X-ray detection and automated screening devices into the evaporation equipment, the problems of low efficiency and poor accuracy of crack screening of the evaporation crucible are solved, and efficient screening of the crucible and uniformity of the conductive metal film plating are achieved.
Patent Information
- Application Number
- CN202420494396.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-14
- Publication Date
- 2024-12-06
- Estimated Expiration
- 2034-03-14
AI Technical Summary
The existing evaporation crucibles are prone to cracks during use, resulting in uneven coating of conductive metal films and lack of effective screening equipment, resulting in low detection efficiency and poor accuracy.
A crucible screening device for evaporation including a conveyor belt and a detection box is designed, and fully automated inspection is performed using an X-ray tube and a detector, and the qualified and unqualified crucibles are output separately through the detection component and the defective screening component.
It realizes efficient screening of crucible cracks, improves screening efficiency and accuracy, prevents crack crucibles from entering the evaporation equipment, and ensures the uniformity of the conductive metal film plating layer.
Smart Images
Figure CN222112663U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of conductive metal film production, in particular to a crucible screening device for evaporation. Background Art
[0002] Conductive metal film is a polymer material with copper or aluminum layers plated on the top and bottom surfaces of substrates such as PET and PP. It has a sandwich structure and is also called a composite thin film current collector. It is a type of material with many good properties and is widely used in lithium-ion batteries, mainly as a battery current collector in lithium-ion batteries.
[0003] Existing conductive metal films can be produced by vacuum coating. Vacuum coating is to heat the evaporation material in a vacuum environment to make it evaporate, so that it is deposited on the surface of the coating object to form a thin film. The commonly used vacuum coating methods currently include vacuum evaporation, molecular beam deposition and ion plating. Among them, the method of heating the evaporation material in the vacuum coating method includes methods such as resistance heating, electron beam heating, laser beam heating, etc.
[0004] The existing evaporation source mainly places an evaporation crucible in the evaporation tank to heat the evaporation material. For example, the Chinese invention patent application with publication number CN116037587A discloses a high-temperature resistant container cleaning device and method, and the relevant technology of crucible cleaning is recorded in the specification. However, simply cleaning the crucible cannot completely solve the existing problems. During use, not only will the evaporation material remain in the crucible, but cracks will also appear inside it. Once the crucible with cracks enters the evaporation equipment for use, it is easy to cause uneven coating of the conductive metal film and fail to meet the requirements. In addition, the existing equipment lacks relevant equipment specifically for detecting and screening qualified crucibles. On-site personnel can only observe with the naked eye based on experience, but it is difficult to detect crucibles with cracks inside, which not only leads to low efficiency in crucible detection and screening, but also extremely poor accuracy.
[0005] The above defects need to be solved urgently. Utility Model Content
[0006] In order to solve the problems of low efficiency and poor accuracy in the existing crucible crack screening, the utility model provides a crucible screening device for evaporation.
[0007] The technical solution of the utility model is as follows:
[0008] A crucible screening device for evaporation, comprising a conveyor belt and a detection box, wherein the conveyor belt enters from one side of the detection box and exits from the other side opposite to the detection box, one side of the detection box is provided with a crucible inlet for crucibles to pass through, and the other side of the detection box is provided with a qualified crucible outlet for qualified crucibles to pass through and a defective crucible outlet for unqualified crucibles to pass through, and the crucible inlet and the qualified crucible outlet at least partially overlap to allow the crucibles to enter and exit;
[0009] A detection mechanism is provided inside the detection box, and the detection mechanism includes a detection component and a defective screening component. The conveyor belt conveys the crucible into the detection box, and the detection component detects the crucible in the detection box. If the detection component detects an unqualified crucible, the defective screening component aligns the crucible with the defective crucible outlet.
[0010] According to the utility model of the above scheme, the detection component includes an X-ray tube and a detector respectively arranged on the upper and lower sides of the conveyor belt, and the X-ray tube and the detector are both communicatively connected to the computer.
[0011] According to the above-mentioned solution of the utility model, the length directions of the X-ray tube and the detector are consistent with the conveying direction of the conveyor belt.
[0012] According to the utility model of the above solution, the qualified crucible outlet is spaced apart from the defective crucible outlet.
[0013] According to the utility model of the above scheme, the defective screening assembly includes a cylinder, a push plate is provided at the free end of the push rod of the cylinder, and the cylinder drives the push plate to move to push the unqualified crucible to align with the defective crucible outlet.
[0014] According to the utility model of the above scheme, the defective product screening component also includes a screw rod and a guide rail, and the cylinder is installed on the guide rail through the screw rod to adjust the position of the cylinder.
[0015] The utility model according to the above scheme also includes a guiding mechanism, which includes two inlet guide plates arranged at the inlet of the crucible, two outlet guide plates arranged at the outlet of the qualified crucible, and two defective guide plates arranged at the outlet of the defective crucible. The two inlet guide plates, the two outlet guide plates, and the two defective guide plates are all connected to the side walls of the detection box and are all suspended above the conveyor belt.
[0016] According to the utility model of the above solution, the two inlet guide plates are arranged opposite to each other, and the distance between the two inlet guide plates is greater than or equal to the width of the crucible inlet;
[0017] The two outlet guide plates are arranged opposite to each other, and the distance between the two outlet guide plates is greater than or equal to the width of the outlet of the qualified crucible.
[0018] According to the above-mentioned solution of the utility model, the two defective product guide plates are arranged opposite to each other, and the length direction of the two defective product guide plates forms an angle with the length direction of the conveyor belt.
[0019] According to the utility model of the above scheme, a conveyor belt inlet for the conveyor belt to pass through is provided on one side of the detection box, and a conveyor belt outlet for the conveyor belt to pass through is provided on the other side of the detection box, and the conveyor belt inlet is connected with the crucible inlet, and the conveyor belt outlet is connected with the qualified crucible outlet and the defective crucible outlet.
[0020] According to the above-mentioned solution of the utility model, the conveyor belt inlet and the conveyor belt outlet at least partially overlap to allow the conveyor belt to enter and exit.
[0021] The utility model according to the above scheme has the following beneficial effects:
[0022] In the above-mentioned crucible screening device for evaporation, the conveyor belt transports the crucible to the detection box, and the detection component detects the crucible. The utility model can realize a fully automated screening process for crucible cracks, and can screen out qualified crucibles and unqualified crucibles and output them separately, which greatly improves the screening efficiency of crucible cracks, and has high screening accuracy and stable operation, preventing crucibles with cracks from entering the evaporation equipment for use, which helps to improve the coating uniformity of the conductive metal film. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 This is one of the structural diagrams of the utility model;
[0024] Figure 2 for Figure 1 A magnified view of part A;
[0025] Figure 3 It is the front view of the utility model;
[0026] Figure 4 It is a top view of the utility model;
[0027] Figure 5 It is a rear view of the utility model;
[0028] Figure 6 It is a left view of the utility model;
[0029] Figure 7 It is the right view of the utility model.
[0030] In the figure, 1. conveyor belt; 2. inspection box; 21. crucible inlet; 22. qualified crucible outlet; 23. defective crucible outlet; 24. display screen; 25. hand control panel; 3. inspection mechanism; 31. inspection component; 311. X-ray tube; 312. detector; 32. defective screening component; 321. cylinder; 322. push plate; 323. screw rod; 324. guide rail; 4. guide mechanism; 41. inlet guide plate; 411. first inlet guide plate; 412. second inlet guide plate; 42. outlet guide plate; 421. first outlet guide plate; 422. second outlet guide plate; 43. defective guide plate. DETAILED DESCRIPTION
[0031] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.
[0032] like Figure 1 As shown, the utility model provides a crucible screening device for evaporation, comprising a conveyor belt 1, a detection box 2, and a detection mechanism 3. The conveyor belt 1 passes through one side of the detection box 2 and passes through the other side opposite to the detection box 2. The conveyor belt 1 is used to transport and convey the crucible, which is convenient for continuous detection and improves the detection efficiency. The detection mechanism 3 is arranged inside the detection box 2, and is used to detect and screen the crucibles transported into the detection box 2 by the conveyor belt 1.
[0033] like Figure 1 As shown, in this embodiment, the detection box 2 provides a special detection place for the crucible, the detection box 2 is hollow as a whole, and the material of the detection box 2 is designed to be lead material, which is a material with high density and good radiation protection ability. Of course, in actual design, the material of the detection box 2 can be designed according to actual needs. In addition, the wall thickness of the detection box 2 is 0.5mm to 2mm, and the wall thickness of the detection box 2 can be designed to be any value in the range of 0.5mm, 0.6mm, 0.8mm, 1mm, 1.2mm, 1.4mm, 1.5mm, 1.6mm, 1.8mm, 1.9mm, 2mm, etc. In actual design, the wall thickness of the detection box 2 can be designed according to actual needs.
[0034] like Figure 1 As shown, in the present embodiment, a conveyor belt inlet for the conveyor belt 1 to pass through and a crucible inlet 21 for the crucible to pass through are provided on one side of the detection box 2, and a conveyor belt outlet for the conveyor belt 1 to pass through and a crucible outlet for the crucible to pass through are provided on the other side of the detection box 2, and the conveyor belt inlet is connected with the crucible inlet 21, and the conveyor belt outlet is connected with the crucible outlet, so as to facilitate the crucible to enter and exit the detection box 2 and realize the detection and screening of the crucible.
[0035] like Figure 1 As shown, in this embodiment, the crucible outlet includes a qualified crucible outlet 22 and a defective crucible outlet 23, and the conveyor belt outlet is connected to the qualified crucible outlet 22 and the defective crucible outlet 23. The qualified crucible outlet 22 is used for passing the qualified crucible, and the defective crucible outlet 23 is used for passing the unqualified crucible, and the qualified crucible outlet and the defective crucible outlet 23 are arranged at intervals, so as to facilitate the output of the qualified crucible and the unqualified crucible separately, and to facilitate the screening of the unqualified crucible. In addition, the conveyor belt inlet and the conveyor belt outlet at least partially overlap for the conveyor belt to enter and exit, and the crucible inlet 21 and the qualified crucible outlet at least partially overlap for the crucible to enter and exit, so as to ensure that the crucible and the conveyor belt 1 pass through the detection box 2 smoothly. The at least partial overlap mentioned in this application refers to the direction of travel of the conveyor belt or the direction of travel of the crucible. The at least partial overlap can be part, most or all, as long as it is convenient for the conveyor belt or the crucible to enter and exit.
[0036] like Figure 1 , Figure 2 As shown, in this embodiment, the detection mechanism 3 includes a detection component 31 and a defective screening component 32 which are connected to the computer for communication. The detection component 31 includes an X-ray tube 311 and a detector 312 which are respectively arranged on the upper and lower sides of the conveyor belt 1, and the X-ray tube 311 and the detector 312 are both connected to the computer for communication, so as to realize a complete scanning and detection process of the crucible in the detection box 2. The detector 312 includes an X-ray probe, a signal acquisition circuit, a low-voltage power supply combination, and a data collector. The X-ray probe and the signal acquisition circuit are packaged together in a rectangular aluminum alloy box, while the low-voltage power supply combination is separately packaged in a metal square box with good heat dissipation function; the data collector is a data card placed in the computer, which is used to receive image data from the detector 312. In addition, the length directions of the X-ray tube 311 and the detector 312 are consistent with the conveying direction of the conveyor belt 1, and the positions of the X-ray tube 311 and the detector 312 correspond to each other up and down. The conveyor belt 1 moves the crucible between the X-ray tube 311 and the detector 312, so that the X-ray tube 311 and the detector 312 can detect the crucible in the detection box 2.
[0037] like Figure 1 , Figure 2 , Figure 3As shown, in this embodiment, the defective screening component 32 includes a cylinder 321, and a push plate 322 is provided at the free end of the push rod of the cylinder 321, and the movement direction of the push plate 322 is perpendicular to the conveying direction of the conveyor belt 1, so that the push plate 322 can easily push the crucible. If the detection component 31 detects an unqualified crucible, the computer controls the cylinder 321 to drive the push plate 322 to move, so as to align the unqualified crucible with the defective crucible outlet 23, so that the conveyor belt 1 outputs the unqualified crucible from the defective crucible outlet 23. In addition, the bottom surface of the push plate 322 is slightly higher than the conveyor belt 1, so as to ensure that the push plate 322 pushes the crucible from the middle and lower part of the crucible to prevent the crucible from tipping over.
[0038] like Figure 1 , Figure 2 , Figure 3 As shown, in this embodiment, the defective screening component 32 also includes a screw rod 323 and a guide rail 324. The guide rail 324 is horizontally arranged on the inner wall of the detection box 2, and the length direction of the guide rail 324 is the same as the conveying direction of the conveyor belt 1. The cylinder 321 is installed on the guide rail 324 through the screw rod 323, so that the cylinder 321 can slide along the guide rail 324, that is, the horizontal relative position of the cylinder 321 and the conveyor belt 1 is adjustable, and the horizontal position of the cylinder 321 is determined by the screw rod 323. Of course, the screw rod 323 and the guide rail 324 can also be replaced by other linear modules that can enable the cylinder 321 to move horizontally. In actual design, the structure of the linear module that enables the cylinder 321 to move horizontally can be designed according to actual needs.
[0039] like Figure 5 , Figure 7 As shown, in this embodiment, a display screen 24 is provided on the side of the detection box 2 that is not passed by the conveyor belt 1, and the computer displays the detection results of the crucible cracks on the display screen 24, so that the staff can view the detection results. In addition, a manual control panel 25 is also provided on the side of the detection box 2 that is not passed by the conveyor belt 1. The staff can adjust the start, stop and movement direction of the conveyor belt 1 by manual buttons. Of course, the start, stop and movement direction of the conveyor belt 1 can also be controlled by remote control of the software on the computer. In actual design, the method of adjusting the start, stop and movement direction of the conveyor belt 1 can be designed according to actual needs. It should be noted that the manual control panel 25 and the remote control of the start, stop and movement direction of the conveyor belt 1 on the computer through software are prior arts, and the present utility model has not made any improvements to this part, so its working principle will not be described in detail.
[0040] like Figure 1 , Figure 4 , Figure 6 , Figure 7As shown, in this embodiment, the evaporation crucible screening device further includes a guide mechanism 4, which includes two inlet guide plates 41, two outlet guide plates 42, and two defective guide plates 43. The two inlet guide plates 41 are arranged at the crucible inlet 21, and the two inlet guide plates 41 are arranged opposite to each other; the two outlet guide plates 42 are arranged at the qualified crucible outlet 22, and the two outlet guide plates 42 are arranged opposite to each other; the two defective guide plates 43 are arranged at the defective crucible outlet 23, and the two defective guide plates 43 are arranged opposite to each other. The two inlet guide plates 41 guide the crucible to enter the detection box 2, so that the crucible can enter the detection box 2 from the crucible inlet 21; the two outlet guide plates 42 and the two defective guide plates 43 guide the crucible to exit the detection box 2, so that the crucible that has been tested can be transported from the qualified crucible outlet 22 or the defective crucible outlet 23 to the outside of the detection box 2. In addition, the two inlet guide plates 41, the two outlet guide plates 42, and the two defective product guide plates 43 are all connected to the side walls of the inspection box 2, and the two inlet guide plates 41, the two outlet guide plates 42, and the two defective product guide plates 43 are all suspended above the conveyor belt 1, and the three do not contact the conveyor belt 1, which facilitates the conveyor belt 1 to transport the crucible and prevents the inlet guide plates 41, the outlet guide plates 42, and the defective product guide plates 43 from affecting the running of the conveyor belt 1.
[0041] like Figure 1 , Figure 4 , Figure 6 , Figure 7 As shown, in this embodiment, two inlet guide plates 41 are arranged opposite to each other, and the spacing between the two inlet guide plates 41 is greater than or equal to the width of the crucible inlet 21. Each inlet guide plate 41 includes a first inlet guide plate 411 and a second inlet guide plate 412, and the spacing between the two first inlet guide plates 411 is greater than or equal to the spacing between the two second inlet guide plates 412, so as to facilitate the positioning of multiple crucibles between the two inlet guide plates 41 and facilitate the transportation of the crucibles. In addition, along the conveying direction of the conveyor belt 1, the gap between the two second feed guide plates gradually decreases from front to back until it is equal to the width of the crucible inlet 21, so as to facilitate the crucibles to be arranged in a row at intervals and enter the detection box 2, so that the X-ray tube 311 and the detector 312 can detect whether there are cracks in the crucibles entering the detection box 2.
[0042] like Figure 1 , Figure 4 , Figure 6 , Figure 7As shown, in this embodiment, two outlet guide plates 42 are arranged opposite to each other, and the spacing between the two outlet guide plates 42 is greater than or equal to the width of the qualified crucible outlet 22. Each outlet guide plate 42 includes a first outlet guide plate 421 and a second outlet guide plate 422, and the spacing between the two first outlet guide plates 421 is greater than or equal to the spacing between the two second outlet guide plates 422, so that the staff can collect and discharge the crucible after the inspection. In addition, along the conveying direction of the conveyor belt 1, the gap between the two second outlet guide plates 422 gradually increases from front to back, and the minimum spacing between the two second outlet guide plates 422 is equal to the width of the crucible outlet, so that the qualified crucibles can be output in a row from the qualified crucible outlet 22.
[0043] like Figure 1 , Figure 4 , Figure 6 , Figure 7 As shown, in this embodiment, two defective product guide plates 43 are arranged opposite to each other, and the length direction of the two defective product guide plates 43 forms an angle with the length direction of the conveyor belt 1, so as to facilitate guiding the unqualified crucibles at the defective product outlet away from the conveyor belt 1, and facilitate the subsequent collection and processing of the unqualified crucibles.
[0044] When the utility model is used, under the control of a computer, a driving mechanism (not shown in the figure) drives the conveyor belt 1 to move, thereby conveying the crucible into the detection box 2. When the conveyor belt 1 reaches a stable speed, a high-voltage generator (not shown in the figure) starts and supplies power to the X-ray tube 311, so that it can be continuously exposed. The X-ray tube 311 and the detector 312 are respectively fixed above and below the conveyor belt 1. The crucible is placed on the conveyor belt 1 and passes between the X-ray tube 311 and the detector 312 as the conveyor belt 1 moves. In this process, the X-ray forms a thin fan-shaped beam through the beam beamer, penetrates the crucible on the conveyor belt 1 and enters the incident window of the detector 312. Under the control of the computer, the detector 312 converts the X-ray signal into an electrical signal. The data acquisition device collects each line of electrical signals and transmits them to the electronic components, further converts them into digital signals, and then transmits them to the computer to form a dynamic scanning image. When the computer identifies that there are cracks on the crucible, the software in the computer will immediately alarm and save the corresponding freeze-frame image for identification. At the same time, the cylinder 321 drives the push rod and the push plate 322 to push the unqualified crucible to the defective crucible outlet 23, so that the conveyor belt 1 outputs the unqualified crucible from the defective crucible outlet 23. After the cylinder 321 is reset, the crucible inspection on the entire conveyor belt 1 continues normally; when the computer does not identify that there are cracks on the crucible, the conveyor belt 1 outputs the qualified crucible from the qualified crucible outlet 22. The utility model can realize the fully automated screening process for crucible cracks, can screen out qualified crucibles and unqualified crucibles and output them separately, greatly improving the screening efficiency of crucible cracks, and has high screening accuracy and stable operation, preventing the crucible with cracks from entering the evaporation equipment for use, which helps to improve the coating uniformity of the conductive metal film.
[0045] It should be noted that the X-ray tube 311 and the detector 312 are both connected to the computer for communication, the data acquisition device collects electrical signals, the high-voltage generator supplies power to the X-ray tube 311, and the detector 312 converts the X-ray signal into an electrical signal under the control of the computer, etc., which are all prior arts. The present utility model does not make improvements in this part, so its structure and working principle will not be described in detail.
[0046] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.
[0047] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.
Claims
1. A crucible screening device for evaporation, characterized in that: The invention comprises a conveyor belt and a detection box, wherein the conveyor belt passes through one side of the detection box and passes through the other side opposite to the detection box, a crucible inlet for crucibles to pass through is provided on one side of the detection box, and a qualified crucible outlet for qualified crucibles to pass through and a defective crucible outlet for unqualified crucibles to pass through are provided on the other side of the detection box, and the crucible inlet and the qualified crucible outlet at least partially overlap to allow the crucibles to enter and exit; A detection mechanism is provided inside the detection box, and the detection mechanism includes a detection component and a defective screening component. The conveyor belt conveys the crucible into the detection box, and the detection component detects the crucible in the detection box. If the detection component detects an unqualified crucible, the defective screening component aligns the crucible with the defective crucible outlet.
2. The crucible screening device for evaporation according to claim 1, characterized in that: The detection component comprises an X-ray tube and a detector respectively arranged on the upper and lower sides of the conveyor belt, and the X-ray tube and the detector are both connected to the computer for communication.
3. The crucible screening device for evaporation according to claim 2, characterized in that: The length directions of the X-ray tube and the detector are consistent with the conveying direction of the conveyor belt.
4. The crucible screening device for evaporation according to any one of claims 1 to 3, characterized in that: The qualified crucible outlet is spaced apart from the defective crucible outlet.
5. The crucible screening device for evaporation according to any one of claims 1 to 3, characterized in that: The defective screening assembly comprises a cylinder, a push plate is provided at the free end of a push rod of the cylinder, and the cylinder drives the push plate to move so as to push the unqualified crucible to align with the defective crucible outlet.
6. The crucible screening device for vapor deposition according to claim 5, characterized in that: The defective product screening assembly also includes a screw rod and a guide rail, and the cylinder is installed on the guide rail through the screw rod to adjust the position of the cylinder.
7. The crucible screening device for evaporation according to any one of claims 1 to 3 or 6, characterized in that: It also includes a guiding mechanism, which includes two inlet guide plates arranged at the inlet of the crucible, two outlet guide plates arranged at the outlet of the qualified crucible, and two defective guide plates arranged at the outlet of the defective crucible. The two inlet guide plates, the two outlet guide plates, and the two defective guide plates are all connected to the side walls of the detection box and are all suspended above the conveyor belt.
8. The crucible screening device for vapor deposition according to claim 7, characterized in that: The two inlet guide plates are arranged opposite to each other, and the distance between the two inlet guide plates is greater than or equal to the width of the crucible inlet; The two outlet guide plates are arranged opposite to each other, and the distance between the two outlet guide plates is greater than or equal to the width of the outlet of the qualified crucible.
9. The crucible screening device for vapor deposition according to claim 7, characterized in that: The two defective product guide plates are arranged opposite to each other, and the length directions of the two defective product guide plates form an angle with the length direction of the conveyor belt.
10. The crucible screening device for evaporation according to any one of claims 1 to 3, 6 or 8 to 9, characterized in that: A conveyor belt inlet for the conveyor belt to pass through is provided on one side of the detection box, and a conveyor belt outlet for the conveyor belt to pass through is provided on the other side of the detection box, and the conveyor belt inlet is connected to the crucible inlet, and the conveyor belt outlet is connected to the qualified crucible outlet and the defective crucible outlet.