Temperature adjusting device for substrate glass production and substrate glass production device
By combining layered heat homogenizers and heating parts, the temperature field of the substrate glass is accurately adjusted, the temperature inhomogeneity problem is solved, the quality and yield of the substrate glass are improved, and the safety and production efficiency of the equipment are ensured.
Patent Information
- Application Number
- CN202420664498.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-02
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-04-02
AI Technical Summary
During the production of substrate glass, local quality problems caused by uneven temperature adjustment, especially in the production of high-generation substrate glass, the requirements for temperature field control are getting higher and higher, but the existing temperature adjustment device affects the heating efficiency and It is prone to temperature floating deviations, resulting in temperature unevenness.
The temperature adjustment device of the layered heat homogenizer combined with the heating element and the cold air duct is adopted. Through the combined effect of the temperature field of the upper and lower cavity space of the layered heat homogenizer, the precise adjustment of the temperature of the specific position of the glass substrate is achieved, and the heating adjustment and Cooling adjustment solves the problem of temperature inhomogeneity.
The optimization and adjustment of quality specifications such as glass plate thickness, stress, shape specifications, etc. are achieved, the quality and yield of the finished glass products of the substrate are improved, the safety of equipment is ensured, and the device structure is stable, the installation is simple, and the adjustment effect is significant.
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Figure CN222159984U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of high-generation substrate glass production, and in particular relates to a temperature adjustment device for substrate glass production and a substrate glass production device. Background Art
[0002] In the modern electronics industry, substrate glass is widely used in flat panel displays, smart phones and other fields. As the base material of high-performance electronic components, product quality and performance are crucial, directly affecting the performance, clarity and reliability of the equipment. Good substrate glass has excellent physical and optical properties, and can provide high-resolution, high-brightness, and low-energy display effects, thereby improving user experience. In addition, substrate glass also has excellent mechanical strength and chemical stability, which can protect electronic components and extend the service life of the equipment. At present, the overflow method is a commonly used method for preparing substrate glass. By injecting glass liquid above the overflow device, the molten glass overflows the overflow device, and the molten glass liquid is pulled down into the forming area. Through a series of process adjustment processes, the temperature curve with a gradient that meets the requirements is set, and the quality parameters such as the thickness, stress, and warping of the substrate glass are adjusted to enter the qualified range, and products that meet the quality standards are produced, which has the advantages of high efficiency and high quality.
[0003] When the overflow method is used to produce high-generation substrate glass, the high-temperature molten glass flows out of the glass melting furnace and enters the platinum channel. After clarification and homogenization, it flows into the molding overflow device. The high-temperature molten glass converges at the bottom of the overflow brick. Through the pull-down traction device, the glass plate enters the molding furnace and annealing furnace. Through the temperature gradient curve set in the molding furnace and annealing furnace, it gradually solidifies and forms, and finally forms a glass plate with specifications and dimensions that meet the requirements, and quality parameters such as thickness, stress, and warping that meet the standards. Temperature affects the melting state of glass liquid and plays a vital role in the production process of substrate glass. By controlling the temperature, the glass can reach an appropriate melting state to ensure that it forms a substrate at a specific position. When the temperature is adjusted too high or too low, the glass will be insufficient or excessive in fluidity, which will affect the shape and quality of the substrate. Temperature regulation can also control the degree of crystallization, grain size, and physical properties of the glass to meet the requirements of specific applications. Improper temperature regulation may cause abnormal glass structure or performance defects. At the same time, temperature regulation is also very important for the internal stress distribution of the substrate. The temperature gradient will cause stress inside the substrate, and the uneven distribution of the temperature field will cause uneven stress distribution, thus affecting the mechanical stability and flexural strength of the substrate. However, in the production process of substrate glass, due to the influence and effect of various factors such as equipment aging and limited temperature regulation range, local quality problems caused by uneven process temperature often occur.
[0004] In this regard, providing a uniform temperature field required for cooling, forming, thickness adjustment, and stress and strain in the glass plate forming area is the key to ensuring that the substrate glass reaches the best process state during the overflow production process. With the continuous development of liquid crystal display technology, G8.5 and higher-generation substrate glass will gradually become the mainstream, and the corresponding requirements for the surface quality of glass such as thickness, stress, warping, etc. are getting higher and higher, which makes the control requirements for the temperature field of glass plate forming in production higher and higher. The existing temperature adjustment is generally to set a heat spreader, a cooling device, and a heating device on both sides of the glass from the inside to the outside. The cooling device is set before the heating device, which affects the heating efficiency of the heating device. At the same time, the temperature control process is prone to floating deviations, resulting in local temperature unevenness. Therefore, it is necessary to improve the temperature adjustment device used in substrate glass production to achieve more efficient and stable adjustment of the temperature field required for substrate glass forming. Utility Model Content
[0005] The purpose of the utility model is to solve the deficiencies of the prior art and to provide a temperature regulating device for substrate glass production and a substrate glass production device which can accurately regulate the temperature of a specific position of a glass substrate.
[0006] In order to achieve the above object, the technical solution of the utility model is implemented as follows:
[0007] Based on one aspect of the utility model, a temperature adjustment device for substrate glass production is provided, comprising a layered heat-scaling component, a thermal insulation bracket, a cold air duct and a heating component, the layered heat-scaling component comprising a heat-scaling component body with a cavity therein and an opening on one side, and a partition plate that divides the cavity into a first heat-scaling cavity and a second heat-scaling cavity along the downward pulling direction of the glass substrate, the thermal insulation bracket is installed in cooperation with the opening to close the layered heat-scaling component, a plurality of the cold air ducts and a plurality of the heating components are passed through the thermal insulation bracket to be respectively fixed in the first heat-scaling cavity and the second heat-scaling cavity, and an air outlet for air to flow out is provided on the cavity wall of the first heat-scaling cavity.
[0008] In one embodiment, the layered heat spreader is in the shape of a parallelepiped, the heat spreader body is surrounded by five heat spreaders, and the heat spreaders of the heat spreader body facing the substrate glass are directly opposite to the opening.
[0009] In one embodiment, the heating element is a U-shaped heating tube, which includes a U-shaped heating tube section located in the second heat equalizing chamber and two straight conductive tube sections respectively connected to two ends of the U-shaped heating tube section and located outside the second heat equalizing chamber.
[0010] In one embodiment, a plurality of the cold air pipes are evenly distributed in the first heat-averaging chamber.
[0011] In one embodiment, a plurality of the heating elements are evenly distributed in the second heat-absorbing chamber.
[0012] In one of the embodiments, it also includes a supporting frame, which includes a first supporting portion and a second supporting portion connected in an L shape, the first supporting portion is connected to the bottom of the heat equalizing element body to support the layered heat equalizing element, and the second supporting portion is provided with cold air duct supporting through holes and heating element supporting through holes corresponding to the plurality of cold air ducts and the plurality of heating elements to support each of the cold air ducts and each of the heating elements.
[0013] In one embodiment, the support frame is made of high temperature resistant metal material, and an insulating sleeve is provided between the surface of the heating element and the wall of the heating element supporting through hole.
[0014] In one embodiment, the thermal insulation support includes a first thermal insulation support enclosing the first heat-averaging chamber and a second thermal insulation support enclosing the second heat-averaging chamber.
[0015] In one embodiment, the layered heat spreader is an integrally formed silicon carbide heat spreader.
[0016] According to another aspect of the present invention, a substrate glass production device is provided, comprising a temperature adjustment device for substrate glass production as described in any one of the above items and symmetrically arranged with the substrate glass as a symmetry plane.
[0017] Compared with the prior art, the temperature adjustment device for substrate glass production and the substrate glass production device of the utility model integrate heating adjustment and cooling adjustment through a layered heat equalizing component, and based on the comprehensive effect of the temperature field of the upper and lower cavity spaces of the layered heat equalizing component, the temperature of a specific position of the glass substrate is adjusted, and the process temperature of the glass substrate can be accurately adjusted, and the temperature non-uniformity problem in the overflow production process can be solved, and the quality specifications of the glass plate such as thickness, stress, and shape specifications can be optimized and adjusted, thereby improving the quality and yield rate of the finished substrate glass and ensuring the safe use of the equipment; the layered heat equalizing component has high structural stability and overall reliability; the installation and debugging process of the device is simple; the adjustment effect on local temperature non-uniformity is obvious, and the overall quality adjustment effect on the glass substrate is good; the overall operation is reliable, stable and safe. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 This is a schematic structural diagram of an embodiment of a temperature adjustment device for substrate glass production according to the utility model;
[0019] Figure 2 for Figure 1 A structural cross-sectional view of a temperature adjustment device for producing substrate glass;
[0020] Figure 3 for Figure 1 The schematic diagram of the position of the temperature adjustment device for substrate glass production in the substrate glass production device is shown;
[0021] Figure 4 for Figure 1 The schematic diagram of the structure of the layered heat equalizing component in the temperature adjustment device for substrate glass production is shown;
[0022] Figure 5 for Figure 1 The schematic diagram of the structure of the heat preservation support in the temperature adjustment device for substrate glass production is shown;
[0023] Figure 6 for Figure 1 The structural schematic diagram of the support frame in the temperature adjustment device for substrate glass production is shown;
[0024] Figure 7 for Figure 1 The schematic diagram of the structure of the heating element in the temperature adjustment device for substrate glass production is shown.
[0025] Explanation of the reference numerals: 1 layered heat-averaging member, 11 heat-averaging member body, 12 first heat-averaging chamber, 13 second heat-averaging chamber, 14 partition plate, 15 heat-averaging surface, 2 thermal insulation bracket, 21 first thermal insulation bracket, 211 first support hole, 23 second thermal insulation bracket, 231 second support hole, 3 cold air duct, 4 heating member, 41 U-shaped heating pipe section, 43 straight conductive pipe section, 5 support frame, 51 first support portion, 52 second support portion, 521 cold air duct support through hole, 523 heating member support through hole, 6 insulating sleeve, 71 overflow brick, 72 glass plate, 73 temperature field. DETAILED DESCRIPTION
[0026] Combined with reference Figure 1-7The present embodiment provides a temperature adjustment device for high-generation substrate glass production, including a layered heat-saturating member 1, a heat-insulating support 2, a cold air pipe 3, a heating member 4 and a supporting frame 5. The layered heat-saturating member 1 includes a heat-saturating member body 11 with a cavity inside and an opening on one side and a partition plate 14 that divides the cavity into a first heat-saturating chamber 12 and a second heat-saturating chamber 13 along the pull-down direction of the glass substrate. The layered heat-saturating member 1 is an integrally formed silicon carbide heat-saturating plate structure with hot and cold uniformity characteristics. The heat-insulating support 2 includes a first heat-saturating support 21 that closes the first heat-saturating chamber 12 and a second heat-saturating support 23 that closes the second heat-saturating chamber 13. A plurality of cold air pipes 3 are arranged on the first heat-saturating support 21, and a plurality of heating members 4 are arranged on the second heat-saturating support 23, so as to be fixed in the first heat-saturating chamber 12 and the second heat-saturating chamber 13, respectively. A plurality of cold air pipes 3 and a plurality of heating members 4 are evenly distributed in the first heat-saturating chamber 12 and the second heat-saturating chamber 13, respectively. An air outlet for air to flow out is arranged on the cavity wall of the first heat-absorbing cavity 12, specifically on the first heat-insulating support 21. In addition, the cold air pipe of the first heat-insulating support 21 can also be selected to serve as the air outlet, and the cold air pipe serving as the air outlet is not used to receive cold air.
[0027] The cold air pipe 3 is led out from the support frame 5, and the outer end is located at the outer edge, connected to the cold air regulation system, and cold air with a certain flow, pressure and temperature is introduced to form a cold temperature field that meets the process regulation requirements in the upper cavity space of the layered heat equalizing element 1. Through the heat equalizing surface 15 of the layered heat equalizing element 1, it is uniformly radiated to the space area where the glass plate is located, and the temperature field of the glass substrate is subjected to specific process regulation. The heating element 4 is a U-shaped heating tube, which includes a U-shaped heating tube section 41 located in the second heat equalizing cavity 13 and two straight conductive tube sections 43 respectively connected to the two ends of the U-shaped heating tube section 41 and located outside the second heat equalizing cavity 13. The U-shaped heating tube is made of silicon molybdenum or silicon carbon. Compared with a spirally folded single heating tube, the U-shaped heating tube is partially heated by the U-shaped heating tube section 41 at the front end, which is more durable and has a longer service life. The U-shaped heating tube is led out from the support frame 5, and the outer straight conductive tube section 43 is installed on the support frame 5 through an insulating sleeve and connected to the electrical control system. The U-shaped heating pipe section 41 is located in the lower cavity space of the layered heat equalizer 1. Under the control of the electrical system, the U-shaped heating pipe inputs the process parameters to generate heat, and forms a thermal temperature field that meets the process adjustment requirements in the lower cavity space of the layered heat equalizer 1. Through the heat equalizer surface 15 of the layered heat equalizer 1, it is uniformly radiated to the space area where the glass plate is located, and the temperature field of the glass substrate is adjusted for specific process. The glass plate passes through the central axis plane of the furnace body at a uniform speed. According to the state data of the thickness, stress, warping, etc. of the glass plate detected on site, the temperature adjustment device is controlled to adjust the production temperature of the glass plate. Through the comprehensive effect of the temperature field of the upper and lower cavity spaces of the layered heat equalizer 1, the temperature of the specific position of the glass substrate is adjusted, thereby solving the problem of uneven temperature distribution, thereby realizing the optimization and adjustment of the quality specifications such as the thickness, stress, and shape specifications of the glass plate.
[0028] In this embodiment, the support frame 5 includes a first support portion 51 and a second support portion 52 connected in an L shape, the layered heat-equalizing element 1 is located on the first support portion 51 of the support frame 5, and the second support portion 52 is provided with a cold air pipe support through hole 521 and a heating element support through hole 523 corresponding to a plurality of cold air pipes 3 and a plurality of heating elements 4 to support each cold air pipe 3 and each heating element 4. The support frame 5 is made of high temperature resistant metal, and an insulating sleeve 6 is provided between the surface of the heating element 4 and the hole wall of the heating element support through hole 523. The layered heat-equalizing element 1, the heat-insulating bracket 2, the cold air pipe 3 and the heating element 4 are installed at a specific spatial position in the substrate glass production furnace through the support frame 5. The cold air pipe support through hole 521 on the second support portion 52 is a uniformly distributed circular hole structure, which supports the cold air pipe 3; the heating element support through hole 523 is located below the cold air pipe support through hole 521, and the adjacent upper and lower holes are a unit, which jointly supports a U-shaped heating pipe and is uniformly distributed on the second support portion 52.
[0029] In this embodiment, the layered heat-dissipating member 1 is a core component. Figure 2 As shown, its structure mainly includes a heat-equalizing element body 11, a first heat-equalizing cavity 12, a second heat-equalizing cavity 13 and a partition plate 14, wherein the side of the heat-equalizing element body 11 facing the glass substrate is a heat-equalizing surface 15. The heat-equalizing element body 11 is made of SIC, and the overall cross-section presents an "E"-shaped structure with higher structural strength. The upper part is the first heat-equalizing cavity 12, and the first insulation bracket 21 supports the cold air pipe 3 to be installed in this area. The first insulation bracket 21 insulates and seals the first heat-equalizing cavity 12. External cold air is blown into the first heat-equalizing cavity 12 through the cold air pipe 3, forming a certain cold temperature field in the cavity, and radiates heat evenly to the glass plate through the heat-equalizing surface 15 at the front end close to the glass substrate. The overall cross-section of the layered heat equalizing element 1 presents an "E"-shaped structure, which has higher structural strength, is not easy to damage, and is more durable. The inner cavity of the heat equalizing element body 11 is divided into a first heat equalizing cavity 12 and a second heat equalizing cavity 13 by a partition plate 14, so that the cold temperature field and the hot temperature field are distributed in layers up and down, which is beneficial to improving the temperature regulation efficiency.
[0030] The lower part is the second heat-averaging chamber 13. The first heat-averaging chamber 12 and the second heat-averaging chamber 13 are separated by a partition plate 14. The second insulation bracket 23 supports the U-shaped heating tube installed in this area. The second insulation bracket 23 insulates and seals the second heat-averaging chamber 13. The external straight conductive pipe segment 43 is the cold end of the U-shaped heating tube, and the U-shaped heating tube segment 41 is the hot end of the U-shaped heating tube. The straight conductive pipe segment 43 is connected to the electrical control system. According to the input control parameters, corresponding heat is generated in the U-shaped heating tube segment 41, and a certain thermal temperature field is formed in the cavity. Heat is radiated evenly to the glass plate through the heat-averaging surface 15 at the front end close to the glass substrate.
[0031] As attached Figure 5 As shown, the first insulation bracket 21 and the second insulation bracket 23 are made of high-strength insulation fiberboard, and their main function is to insulate the temperature fields of the first heat-averaging chamber 12 and the second heat-averaging chamber 13 respectively, while supporting the cold air duct 3 and the heating element 4 (U-shaped heating tube).
[0032] In this embodiment, the first heat-absorbing chamber 12 is introduced with cold air flow, and the temperature is relatively low, forming a cold temperature field. The second heat-absorbing chamber 13 is heated by the U-shaped heating tube, and the temperature is relatively high, forming a hot temperature field. The problem of uneven temperature distribution can be solved by simply installing the temperature adjustment device of this embodiment at the position where local temperature adjustment is required in the substrate glass production furnace.
[0033] In the space below the overflow brick and above the traction device, the molten glass enters the shaping temperature zone under the action of the traction device. When it is pulled down into a glass plate, when the flow rate fluctuates or the cooling amount of the traction device is too large or the equipment is aged, it will affect the temperature of the local area, resulting in uneven temperature distribution. When the regional temperature is low, the amount of cold air entering the first heat-averaging chamber 12 can be reduced, and the electrical parameters of the U-shaped heating tube of the second heat-averaging chamber 13 can be increased to generate more heat. Under the combined effect of the temperature field of the upper and lower cavity spaces, the lower temperature field is uniformly radiated from the heat-averaging surface 15 to the glass plate, which can improve the flow state of the molten glass and ensure the uniform pulling-down process of the glass plate.
[0034] Similarly, when the temperature is too high, the glass liquid flows too fast, or the shaping state of the glass plate is not good, the amount of cold air entering the first heat-averaging chamber 12 can be increased, and the electrical parameters of the U-shaped heating tube of the second heat-averaging chamber 13 can be reduced to reduce the heat generation. Under the combined effect of the temperature field in the upper and lower cavity spaces, a higher temperature field is evenly radiated from the heat-averaging surface 15 to the glass plate, which can improve the flow state of the glass liquid and confirm the shaping effect of the glass plate.
[0035] At the junction of the forming furnace and the annealing furnace, the temperature field needs to be adjusted to ensure temperature uniformity. The temperature in this area is particularly critical to the adjustment of quality specifications such as thickness, stress, and shape specifications of the glass plate. By symmetrically arranging the temperature adjustment device of this embodiment at this position, the temperature distribution unevenness can be eliminated by targeted adjustment of the cold air volume of the first heat-averaging chamber 12 and the heat of the U-shaped heating tube of the second heat-averaging chamber 13.
[0036] At the same time, the cold air duct 3 and the U-shaped heating tube uniformly distributed laterally along the horizontal plane can also adjust the temperature of different lateral positions of the glass substrate in the area. The cold air duct 3 and the U-shaped heating tube can be controlled in linkage or individually, and the local temperature can be adjusted in a targeted manner according to the needs of process adjustment. During the pull-down process of the glass substrate, the end of the glass substrate is close to the outside of the furnace body, and the heat loss is large, so the U-shaped heating tubes on both sides can be adjusted individually and in a targeted manner to improve the temperature distribution in the local area. When performing local thickness adjustment or local stress and warping adjustment at a specific lateral position of the glass substrate, the cold air duct 3 and the U-shaped heating tube in the local specific area can also be cross-adjusted individually to improve the uneven temperature distribution and improve the process quality of the glass, thereby achieving control of the thickness, stress, and warping quality specifications of the entire glass plate, further improving the yield rate of the glass substrate, and improving production efficiency.
[0037] like Figure 3 As shown, when making production adjustments, the temperature adjustment devices are symmetrically arranged inside the glass production furnace with the substrate glass as the symmetry plane. The positions are mainly in the space above the traction mechanism on the lower side of the overflow brick, and at the junction of the forming furnace and the annealing furnace, and are evenly distributed on both sides of the glass plate.
[0038] The temperature regulating device for substrate glass production of the utility model integrates heating regulation and cooling regulation through a layered heat-regulating member, and regulates the temperature of a specific position of a glass substrate based on the comprehensive effect of the temperature field of the upper and lower cavity spaces of the layered heat-regulating member, and can accurately regulate the process temperature of the glass substrate, solve the problem of temperature non-uniformity in the overflow production process, and optimize and adjust the quality specifications of the glass plate such as thickness, stress, and shape specifications, thereby improving the quality and yield rate of the finished substrate glass products and ensuring the safety of the equipment. The layered heat-regulating member has high structural stability and is reliable as a whole. The installation and debugging process of the device is simple. The regulating effect on the local temperature non-uniformity phenomenon is obvious, and the regulating effect on the overall quality of the glass substrate is good. The overall operation is reliable, stable, and safe.
[0039] A person skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of protection of the present application is limited to these examples. In line with the concept of the present application, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of different aspects of one or more embodiments of the present application as described above, which are not provided in detail for the sake of simplicity.
[0040] One or more embodiments of the present application are intended to cover all such substitutions, modifications and variations that fall within the broad scope of the present application. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of one or more embodiments of the present application should be included in the protection scope of the present application.
Claims
1. A temperature adjustment device for substrate glass production, characterized in that: The invention comprises a layered heat-saturating element (1), a heat-insulating support (2), a cold air pipe (3) and a heating element (4); the layered heat-saturating element (1) comprises a heat-saturating element body (11) with a cavity therein and an opening on one side, and a partition plate (14) for dividing the cavity into a first heat-saturating cavity (12) and a second heat-saturating cavity (13) along the downward pulling direction of the glass substrate; the heat-insulating support (2) is installed in cooperation with the opening to close the layered heat-saturating element (1); a plurality of cold air pipes (3) and a plurality of heating elements (4) are passed through the heat-insulating support (2) to be fixed in the first heat-saturating cavity (12) and the second heat-saturating cavity (13) respectively; an air outlet for air to flow out is provided on the cavity wall of the first heat-saturating cavity (12).
2. The temperature regulating device for producing substrate glass according to claim 1, characterized in that: The layered heat-spreading element (1) is in the shape of a parallelepiped; the heat-spreading element body (11) is surrounded by five heat-spreading plates; and the heat-spreading plates of the heat-spreading element body (11) facing the substrate glass are directly opposite to the opening.
3. The temperature regulating device for substrate glass production according to claim 1 or 2, characterized in that: The heating element (4) is a U-shaped heating tube, comprising a U-shaped heating tube section (41) located in the second heat-averaging chamber (13) and two straight conductive tube sections (43) respectively connected to two ends of the U-shaped heating tube section (41) and located outside the second heat-averaging chamber (13).
4. The temperature regulating device for substrate glass production according to claim 1 or 2, characterized in that: The plurality of cold air pipes (3) are evenly distributed in the first heat-averaging chamber (12).
5. The temperature regulating device for substrate glass production according to claim 1 or 2, characterized in that: The plurality of heating elements (4) are evenly distributed at intervals in the second heat-averaging chamber (13).
6. The temperature regulating device for substrate glass production according to claim 1 or 2, characterized in that: The invention also comprises a support frame (5), wherein the support frame (5) comprises a first support portion (51) and a second support portion (52) connected in an L-shape, wherein the first support portion (51) is connected to the bottom of the heat equalizing element body (11) to support the layered heat equalizing element (1), and the second support portion (52) is provided with a cold air duct support through hole (521) and a heating element support through hole (523) corresponding to the plurality of cold air ducts (3) and the plurality of heating elements (4) to support each of the cold air ducts (3) and each of the heating elements (4).
7. The temperature regulating device for producing substrate glass according to claim 6, characterized in that: The support frame (5) is made of high-temperature resistant metal material, and an insulating sleeve (6) is provided between the surface of the heating element (4) and the wall of the heating element support through hole (523).
8. The temperature regulating device for producing substrate glass according to claim 1 or 2, characterized in that: The heat-insulating support (2) comprises a first heat-insulating support (21) enclosing the first heat-averaging chamber (12) and a second heat-insulating support (23) enclosing the second heat-averaging chamber (13).
9. The temperature regulating device for substrate glass production according to claim 1 or 2, characterized in that: The layered heat-spreading element (1) is an integrally formed silicon carbide heat-spreading plate.
10. A substrate glass production device, characterized in that: The invention comprises a temperature regulating device for producing a substrate glass as claimed in any one of claims 1 to 9 which is symmetrically arranged with the substrate glass as a symmetry plane.
Citation Information
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