Radio frequency matcher

Abstract

The utility model relates to the technical field of radio frequency power supplies, in particular to a radio frequency matcher, which comprises a radio frequency input end, a radio frequency output end, a first variable capacitor, a second variable capacitor and an adjustable inductor with a tap, the radio frequency input end is electrically connected to a tap of the adjustable inductor, one end of the adjustable inductor is electrically connected with the first variable capacitor and is connected with the shell through the first variable capacitor, and the other end of the adjustable inductor is electrically connected with the second variable capacitor and the radio frequency output end in sequence. According to the radio frequency matcher, the radio frequency input end is connected to the tap of the adjustable inductor, the adjustable inductor serves as a grounding inductor and a series inductor at the same time to be connected into the matching circuit, one adjustable inductor is used for replacing two inductors in the prior art, the number of the inductors is reduced, and the internal structural layout of the radio frequency matcher is better facilitated. The taps are arranged on the adjustable inductor, and the inductance value of the matching circuit is adjusted by connecting different taps to the radio frequency input end.

Description

Technical Field

[0001] The utility model relates to the technical field of radio frequency power supply, in particular to a radio frequency matching device. Background Art

[0002] The RF matcher is a RF mechanism used to match the load impedance with the power supply impedance to reduce the reflected power and maximize the transmission power.

[0003] There are three types of RF matching circuits: π type, T type, and L type. In the process of load matching, different circuit forms need to be adjusted according to actual needs. In the prior art, some L-type RF matching circuits are Figure 1 and Figure 2 As shown in the figure, the RF matcher needs to have two inductors inside the structure, one inductor is used to connect a variable capacitor and ground, and the other inductor is used to connect another variable capacitor and output. Since there are two inductors in the RF matcher and the installation positions of the two inductors are relatively scattered, the internal structure layout of the RF matcher is relatively complex. At the same time, since the inductance of the two inductors cannot be adjusted, the range of its adaptive load is small and the usage scenarios are limited. Utility Model Content

[0004] The purpose of the utility model is to overcome the problems in the prior art that some radio frequency matching devices with two inductors have complex internal structure layout, small load range of adaptation, and limited use scenarios. The utility model proposes a radio frequency matching device, and its specific technical solution is as follows:

[0005] A radio frequency matcher includes a housing, a radio frequency input terminal, a radio frequency output terminal, a first variable capacitor, a second variable capacitor, and an adjustable inductor provided with a tap; the radio frequency input terminal is electrically connected to the tap of the adjustable inductor, one end of the adjustable inductor is electrically connected to the first variable capacitor and connected to the housing through the first variable capacitor, and the other end is electrically connected to the second variable capacitor and the radio frequency output terminal in sequence. In an L-type radio frequency matcher circuit, by providing a tap on the adjustable inductor and directly connecting the tap of the adjustable inductor using the radio frequency input terminal, an adjustable inductor is used as a ground inductor and a series inductor at the same time, thereby reducing the number of inductors of the radio frequency matcher and making the internal structure layout of the radio frequency matcher simpler. By connecting taps at different positions on the radio frequency input terminal, the inductance of the ground inductor and the series inductor can be changed, thereby expanding the range of the product's adaptive loads and increasing the versatility of the structure.

[0006] Furthermore, the adjustable inductor also includes a shorting piece that is detachably connected to the tap and is used to adjust the inductance; through holes for connecting the tap are provided at both ends of the shorting piece. The shorting piece is used to perform secondary adjustment on the inductance of the ground inductor and the series inductor. The tap of the adjustable inductor is connected by the shorting piece to reduce the corresponding inductance, so as to facilitate re-adjustment of the inductance of the ground inductor or the series inductor connected to the circuit.

[0007] Furthermore, the adjustable inductor is a spiral hollow inductor, and a plurality of protruding taps in the form of hollow cylinders are arranged on the outer side. The adjustable inductor can be made of copper material, such as a hollow copper tube, a copper rod or a silver-plated copper tube. The number and position of the taps can be determined by actual needs.

[0008] Further, the first variable capacitor is electrically connected to a tap at one end of the adjustable inductor, and the second variable capacitor is electrically connected to a tap at the other end of the adjustable inductor.

[0009] Furthermore, an inductor is connected in series between the RF input terminal and the adjustable inductor. This arrangement can further expand the range of loads that can be matched by the matcher.

[0010] Furthermore, a partition is provided inside the shell to separate the internal space of the shell, and the adjustable inductor, the first variable capacitor, and the second variable capacitor are all located on the same side of the partition. The shell is partitioned, and the RF input terminal, RF output terminal, adjustable inductor, first variable capacitor, and second variable capacitor located in the main circuit are arranged on one side of the partition, and other components of the control circuit are arranged on the other side of the partition, which is convenient for the overall structural layout of the RF matcher.

[0011] Furthermore, the adjustable inductor, the first variable capacitor, and the second variable capacitor are arranged side by side; the first variable capacitor and the second variable capacitor are both fixedly connected to the adjustable inductor through a copper busbar and the adjustable inductor is suspended inside the housing. The adjustable inductor, the first variable capacitor, and the second variable capacitor are arranged side by side, which is beneficial to the layout of the internal space of the RF matcher. At the same time, the adjustable inductor is suspended and fixed inside the housing through the copper busbar, and the insulating part of the adjustable inductor can be eliminated.

[0012] Furthermore, both ends of the first variable capacitor and the second variable capacitor are provided with conductive members, which are mainly used for electrical connection of the variable capacitor and provide structural connection with the variable capacitor to facilitate the fixing of the variable capacitor.

[0013] Furthermore, one end of the first variable capacitor and the second variable capacitor is connected to the partition through a support column, and the other end is connected to the housing through an insulating member. One end of the variable capacitor is positioned and fixed by a support column, and the other end is supported and fixed by an insulating member to enhance the overall stability of the RF matcher.

[0014] Furthermore, it also includes a switching power supply, a control mainboard and a motor; the switching power supply is electrically connected to the control mainboard and the motor, and the control mainboard sends a corresponding control signal to the motor. Other components of the control loop are mainly used to adjust the capacitance values ​​of the first variable capacitor and the second variable capacitor so that the load impedance matches the power supply impedance.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] By connecting the RF input end to the tap of the adjustable inductor, the adjustable inductor is connected to the circuit as a ground inductor and a series inductor at the same time, and one adjustable inductor replaces two inductors in the prior art, thereby reducing the number of inductors and being more conducive to the structural layout inside the RF matcher.

[0017] By setting taps on the adjustable inductor and connecting different taps to the RF input terminal to adjust the inductance of the connected circuit, and by configuring a detachable short-circuit and connecting the taps with the short-circuit to further adjust the inductance, the RF matcher can be adapted to a larger load range and have a wider range of usage scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 The invention is a circuit diagram of an L-type radio frequency matching circuit in the prior art.

[0019] Figure 2 It is another circuit diagram of an L-type radio frequency matching circuit in the prior art.

[0020] Figure 3 It is a circuit diagram of a radio frequency matching device of the utility model.

[0021] Figure 4 It is another circuit diagram of the radio frequency matching device of the utility model.

[0022] Figure 5 It is a connection diagram of the radio frequency matching device of the utility model.

[0023] Figure 6 It is a structural schematic diagram of the adjustable inductor of the utility model.

[0024] Figure 7 The utility model is a connection diagram of an adjustable inductor and a shorting piece.

[0025] Figure 8 The utility model is a schematic diagram of the internal structure connection of the radio frequency matching device.

[0026] Fig. 9 This is another schematic diagram of the internal structure connection of the radio frequency matching device of the utility model.

[0027] Fig.10 This is another internal structure connection schematic diagram of the radio frequency matching device of the utility model.

[0028] Fig.11 It is a connection diagram of the capacitor of the radio frequency matching device of the utility model.

[0029] Fig.12 It is a schematic diagram of the control structure of the radio frequency matching of the utility model.

[0030] Markings in the figure:

[0031] 100—RF input terminal; 200—RF output terminal; 300—adjustable inductor; 400—first variable capacitor;

[0032] 500—second variable capacitor; 600—housing;

[0033] 310—tap; 320—shorting piece; 321—through hole;

[0034] 410 - conductive member; 420 - support column; 430 - insulating member;

[0035] 610—partition;

[0036] 710—switching power supply; 720—control main board; 730—motor. DETAILED DESCRIPTION

[0037] The present invention is further described in detail below in conjunction with specific embodiments. However, this should not be understood as the scope of the above subject matter of the present invention being limited to the following embodiments, and all technologies realized based on the content of the present invention belong to the scope of the present invention.

[0038] In the description of the specific embodiments of the present invention, unless otherwise specified, the terms indicating the orientation or position relationship such as "upper", "lower", "left", "right", "center", "inside", "outside", etc. are all expressions based on the orientation or position relationship shown in the drawings, or the orientation or position relationship when the product / equipment / device of the utility model is usually used. These terms of orientation or position relationship are only for the convenience of describing the scheme of the utility model or simplifying the description in the specific embodiments, so that technicians can quickly understand the scheme, rather than indicating or implying that a specific device / component / element must have a specific orientation, or be constructed and operated in a specific position relationship, and therefore cannot be understood as a limitation on the present invention.

[0039] In addition, if the terms "horizontal", "vertical", "overhanging", "parallel" and the like appear, it does not mean that the corresponding devices / components / elements are required to be absolutely horizontal or vertical or overhanging or parallel, but may be slightly tilted or have deviations. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but may be slightly tilted. Alternatively, it can be simplified to mean that the corresponding devices / components / elements are set in directions such as "horizontal", "vertical", "overhanging", "parallel", etc., and can have an error / deviation of ±10% relative to the corresponding direction setting, more preferably an error / deviation within ±8%, more preferably an error / deviation within ±6%, more preferably an error / deviation within ±5%, and more preferably an error / deviation within ±4%. As long as the corresponding device / component / element is within the error / deviation range, it can still achieve its role in the solution of the utility model.

[0040] Example 1 Figure 1 and Figure 2 As shown, in some existing L-type RF matching circuits, an output inductor and a variable capacitor are connected in series between the RF input terminal and the RF output terminal of the RF matching device, and grounding is achieved by connecting a grounding inductor and another variable capacitor. In the internal structure of the RF matching device, two inductors are usually provided and connected to two variable capacitors respectively, one variable capacitor is connected to the RF output terminal, and the other variable capacitor is connected to the ground. Since two inductors need to be provided inside the RF matching device, and the installation positions of the two inductors are relatively dispersed, the internal layout of the RF matching device is relatively complicated. At the same time, since the two inductors cannot be adjusted, during use, there is a problem that the RF matching device has a small range of load adaptation and limited usage scenarios. Figure 1 — Figure 4 In the figure, RF in is the RF input terminal, RF out is the RF output terminal, Ls is the series inductor, Lp is the ground inductor, Cs is the series capacitor, Cp is the parallel capacitor, L is the adjustable inductor, and L1 is the fixed inductor.

[0041] In order to solve the above problems, the utility model proposes a radio frequency matching device, the structure of which is as follows Figure 5 As shown, it includes an RF input terminal 100, an RF output terminal 200, an adjustable inductor 300, a first variable capacitor 400, a second variable capacitor 500, and a shell 600. The RF input terminal 100 is electrically connected to a tap 310 of the adjustable inductor 300. One end of the adjustable inductor 300 is connected to the first variable capacitor 400 and is connected to the shell 600 through the first variable capacitor 400 to achieve grounding, and the other end is connected to the second variable capacitor 500 and is electrically connected to the RF output terminal 200.

[0042] More specifically, Figure 6As shown, the adjustable inductor 300 is a spiral hollow inductor, which can be made of copper material, and can be made of copper tubes or copper rods, preferably hollow copper tubes or silver-plated copper tubes. The adjustable inductor 300 is provided with a plurality of taps 310 protruding outward, and the taps 310 can adopt a hollow cylindrical structure. To facilitate the setting and connection of the taps 310, a plurality of taps 310 can be set at the same position of each turn of the adjustable inductor 300. The RF input terminal 100 can be connected to the tap of the adjustable inductor 300 through a wire or a copper bus, one end of the adjustable inductor 300 is connected to the first variable capacitor 400, and is grounded through the first variable capacitor 400, and the other end of the adjustable inductor 300 is connected to the second variable capacitor 500, and is connected to the RF output terminal 200 through the second variable capacitor 500. The adjustable inductor 300 also includes a shorting piece 320 detachably connected to the tap 310, and the shorting piece 320 is used to connect the two taps 310 of the adjustable inductor 300. The number of taps of the adjustable inductor 300 can be the same as the number of turns of the adjustable inductor 300, or the number of taps can be appropriately reduced under the premise of meeting the use requirements, such as setting the taps by using a spacer ring.

[0043] The connection between the shorting piece 320 and the inductor tap 310 is as follows: Figure 7 As shown, in Figure 7 In the embodiment, the shorting piece 320 is directly connected to the two taps 310 of the adjustable inductor 300, so that the inductance in the connected circuit is reduced, thereby achieving the purpose of adjusting the inductance. The shorting piece 320 can be a rectangular copper bar, and through holes 321 connected to the taps 310 are set at both ends.

[0044] In the present invention, the RF input terminal 100 is first connected to the tap of the adjustable inductor 300, and then the first variable capacitor 400 and the second variable capacitor 500 are respectively connected through the two ends of the adjustable inductor 300, the first variable capacitor 400 is grounded, and the second variable capacitor 500 is connected to the RF output terminal 200, replacing the design of setting two inductors to connect the variable capacitors respectively in the prior art. A part of the adjustable inductor 300 is used as a grounding inductor to connect the first variable capacitor 400, and the other part is used as a series inductor to connect the second variable capacitor 500, which effectively solves the problem that the installation positions of the two inductors are dispersed and the internal layout of the RF matcher is complicated.

[0045] In view of the fact that the inductance in the prior art cannot be adjusted, in the present invention, the tap design of the adjustable inductor 300 is used to realize the primary adjustment of the inductance of the ground inductance and the series inductance, and the shorting piece 320 is used to realize the secondary adjustment of the ground inductance and the series inductance. Figure 5 As shown, firstly, by adjusting the position of the tap 310 connected to the RF input terminal 100, the inductance connecting the first variable capacitor 400 and the second variable capacitor 500 can be adjusted, and then the inductance is adjusted for the second time by connecting the tap 310 of the adjustable inductor 300 through the short-circuit 320.

[0046] Furthermore, the tap 310 on the adjustable inductor 300 includes a first tap located at both ends of the adjustable inductor 300 and a second tap located between the first taps at both ends, depending on the location of the tap. The first tap is connected to the first variable capacitor 400 and the second variable capacitor 500 through a copper bus or a wire. Figure 8 As shown, when the RF input terminal 100 is connected to the first tap at the left end of the adjustable inductor 300, the inductance of the inductor connected to the first variable capacitor 400 is 0, and the adjustable inductor 300 is connected to the second variable capacitor 500 as a whole. Fig.10 As shown, when the RF input terminal 100 is connected to the first tap at the right end of the adjustable inductor 300, the inductance of the inductor connected to the second variable capacitor 500 is 0, and the adjustable inductor 300 is connected to the first variable capacitor 400 as a whole. Fig. 9 As shown, when the RF input terminal is connected to the second tap of the adjustable inductor 300, the inductance of the inductor connected to the first variable capacitor 400 and the second variable capacitor 500 is not 0. When the RF input terminal 100 is connected to different taps of the adjustable inductor 300, the inductance of the inductor connected to the first variable capacitor 400 or the second variable capacitor 500 can be adjusted.

[0047] The circuit diagram of the utility model is as follows Figure 3 As shown, in actual use, in order to further expand the matching load range of the matching device, an inductor can be connected between the adjustable inductor 300 and the RF input terminal 100, such as Figure 4 shown.

[0048] Furthermore, the adjustable inductor 300 can be flexibly connected to the RF input terminal 100, the first variable capacitor 400 or the second variable capacitor 500 through a soft wire or a copper braid. Since the RF input terminal 100 needs to be connected to the taps 310 at different positions of the adjustable inductor 300, the flexible connection can facilitate the adjustment of the electrical connection line.

[0049] Example 2 Figure 8-Figure 10 As shown, the RF matcher also includes a housing 600, and the adjustable inductor 300, the first variable capacitor 400 and the second variable capacitor 500 are all located inside the housing 600; the RF input terminal 100 and the RF output terminal 200 are fixed to the side of the housing 600. To facilitate the overall layout of the interior of the RF matcher, a partition 610 is provided inside the housing 600 to separate the internal space of the housing 600; the adjustable inductor 300, the first variable capacitor 400 and the second variable capacitor 500 located in the main circuit are all located on one side of the partition 610, and other components located in the control circuit are located on the other side of the partition 610.

[0050] To facilitate the structural layout of the RF matcher, the adjustable inductor 300, the first variable capacitor 400 and the second variable capacitor 500 are arranged side by side inside the housing 600. The two ends of the adjustable inductor 300 are connected to the first variable capacitor 400 and the second variable capacitor 500 respectively through copper bars, and the adjustable inductor 300 is fixed and suspended in the housing 600 by the copper bars at both ends. The adjustable inductor 300 is suspended by the copper bars at both ends, and the insulating member connected to the adjustable inductor 300 can no longer be separately arranged, and the stability of the connection at both ends of the adjustable inductor 300 can be ensured. In the present embodiment, the adjustable inductor 300 is arranged side by side with the first variable capacitor 400 and the second variable capacitor 500, and the first variable capacitor 400 and the second variable capacitor 500 can also be arranged side by side, and the axis of the adjustable inductor 300 is perpendicular to the axis of the first variable capacitor 400 and the second variable capacitor 500.

[0051] like Fig.11 As shown, both ends of the first variable capacitor 400 and the second variable capacitor 500 are provided with a conductive member 410. One end of the first variable capacitor 400 is connected to the adjustable inductor 300 through the conductive member 410 and the copper bar, and the other end is grounded through the conductive member 410 and the copper bar. One end of the second variable capacitor 500 is connected to the adjustable inductor 300 through the conductive member 410 and the copper bar, and the other end is connected to the RF output terminal 200 through the conductive member 410 and the copper bar.

[0052] One end of the first variable capacitor 400 and the second variable capacitor 500 is fixed to the partition 610 via a support column 420 , and the other end is supported and fixed by an insulating member 430 located in the housing 600 .

[0053] Furthermore, if Fig.12 As shown, the RF matching also includes a control structure located in the control loop, which mainly includes a switching power supply 710, a control mainboard 720 and a motor 730. The switching power supply 710 is electrically connected to the control mainboard 720 and the motor 730 to provide power for them. The control mainboard 720 is used to generate a control signal to control the movement of the motor 730 and thereby adjust the first variable capacitor 400 or the second variable capacitor 500.

[0054] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A radio frequency matching device, comprising a housing (600), a radio frequency input terminal (100), a radio frequency output terminal (200), a first variable capacitor (400) and a second variable capacitor (500), characterized in that: It also includes an adjustable inductor (300) provided with a tap (310); the radio frequency input end (100) is electrically connected to the tap (310) of the adjustable inductor (300); one end of the adjustable inductor is electrically connected to the first variable capacitor (400), and is connected to the housing through the first variable capacitor (400); the other end of the adjustable inductor is electrically connected to the second variable capacitor (500) and the radio frequency output end (200) in sequence.

2. The radio frequency matching device according to claim 1, characterized in that: The adjustable inductor (300) further comprises a shorting piece (320) which is detachably connected to the tap (310) and is used to adjust the inductance; through holes (321) connected to the tap (310) are provided at both ends of the shorting piece.

3. The radio frequency matching device according to claim 2, characterized in that: The adjustable inductor (300) is a spiral-shaped hollow inductor, with a plurality of protruding taps (310) arranged on the outer side surface.

4. The radio frequency matching device according to claim 1, characterized in that: The first variable capacitor (400) is electrically connected to a tap (310) at one end of the adjustable inductor (300), and the second variable capacitor (500) is electrically connected to a tap (310) at the other end of the adjustable inductor (300).

5. The radio frequency matching device according to claim 1, characterized in that: An inductor is connected in series between the radio frequency input terminal (100) and the adjustable inductor (300).

6. The radio frequency matching device according to any one of claims 1 to 5, characterized in that: A partition is provided inside the shell to separate the internal space of the shell, and the adjustable inductor (300), the first variable capacitor (400), and the second variable capacitor (500) are all located on the same side of the partition.

7. The radio frequency matching device according to claim 6, characterized in that: The adjustable inductor (300), the first variable capacitor (400), and the second variable capacitor (500) are arranged side by side; the first variable capacitor (400) and the second variable capacitor (500) are both fixedly connected to the adjustable inductor (300) via a copper busbar, and the adjustable inductor (300) is suspended inside the housing.

8. The radio frequency matching device according to claim 6, characterized in that: Conductive members are provided at both ends of the first variable capacitor (400) and the second variable capacitor (500).

9. The radio frequency matching device according to claim 6, characterized in that: One end of the first variable capacitor (400) and the second variable capacitor (500) is connected to the partition through a support column, and the other end is connected to the housing through an insulating member.

10. The radio frequency matching device according to claim 6, characterized in that: It also includes a switching power supply (710), a control mainboard (720) and a motor (730); the switching power supply (710) is electrically connected to the control mainboard (720), the control mainboard (720) is electrically connected to the motor (730), and the control mainboard (720) sends a corresponding control signal to the motor (730).

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