Optical coating uniformity baffle adjusting device

Abstract

The utility model provides an optical coating uniformity baffle plate adjusting device, which is applied to the technical field of optical coating, and is characterized in that a support frame is used for being fixed on a coating machine, and the support frame is fixedly connected with an initial correction plate; the adjustable correction mechanism is movably arranged on the initial correction plate, and the adjustable correction mechanism is used for adjusting the adjustable correction mechanism part corresponding to the position where the thickness of the film layer is not uniform, and the adjustable correction mechanism moves to adjust the exposure size of the adjustable correction mechanism part corresponding to the position where the thickness of the film layer is not uniform relative to the initial correction plate; and changing the range of shielding deposited particles, and correcting the non-uniform thickness of the film layer. The baffle is corrected by moving and adjusting the adjustable correction mechanism, the baffle does not need to be cut, deformation of the baffle is avoided, the shape of the baffle can be accurately and rapidly adjusted and corrected, the uniformity of a film layer can be corrected, the correction precision and the production efficiency are improved, and the cost is low.

Description

Technical Field

[0001] The present application relates to the technical field of high-precision optical film preparation, and in particular to an optical coating uniformity baffle adjustment device, and in particular, preferably to an optical coating uniformity baffle rapid adjustment device. Background Art

[0002] Film thickness uniformity is an important indicator for measuring film quality. Its quality seriously affects the performance of optical films. How to effectively correct film thickness uniformity has become a technical difficulty in the thin film deposition process. Especially for the production and preparation of color filters, the purity and saturation of the color are related to the uniformity of the film. For color-sensitive filters, the uniformity of the film layer is required to be controlled within ±1nm, which poses a severe challenge to the correction of film uniformity. The correction quality must be good and the correction efficiency must be high. Film thickness uniformity correction is generally carried out by adjusting the correction baffle.

[0003] At present, the adjustment of the correction baffle on the market is mainly based on the feedback of the film thickness test results, and then mechanical cutting is used to correct the baffle. However, mechanical cutting has low precision, easily causes deformation of the correction baffle, and has low efficiency.

[0004] Based on this, a new technical solution is needed. Utility Model Content

[0005] In view of this, an embodiment of the present specification provides an optical coating uniformity baffle adjustment device.

[0006] The embodiments of this specification provide the following technical solutions:

[0007] The embodiment of this specification provides an optical coating uniformity baffle adjustment device, including a support frame, an initial correction plate, and an adjustable correction mechanism;

[0008] The support frame is used to be fixed on the coating machine, and the support frame is fixedly connected to the initial correction plate;

[0009] The adjustable correction mechanism is movably disposed on the initial correction plate, the adjustable correction mechanism is partially exposed relative to the initial correction plate, and is configured such that the adjustable correction mechanism and the initial correction plate are used to jointly shield the deposited particles;

[0010] The adjustable correction mechanism includes a plurality of slides, and the plurality of slides are movably arranged on the initial correction plate, and the slides are partially exposed relative to the initial correction plate. The adjustable correction mechanism is configured to adjust the slides corresponding to the uneven thickness of the film layer, and the adjustable correction mechanism moves to adjust the exposed size of the slides corresponding to the uneven thickness of the film layer relative to the initial correction plate, thereby changing the range of shielding deposited particles and correcting the uneven thickness of the film layer.

[0011] Preferably, the slide is located at the edge of the initial correction plate, and the slide is partially exposed outward relative to the edge of the initial correction plate. The slide is configured such that the slide moves outward relative to the initial correction plate to increase the exposed size of the slide relative to the initial correction plate and increase the shielding of deposited particles; the slide moves inward relative to the initial correction plate to reduce the exposed size of the slide relative to the initial correction plate and reduce the shielding of deposited particles.

[0012] Preferably, the slide is provided with a scale in the moving direction of the slide, and is configured so that the slide adjusts the exposed size relative to the initial correction plate according to the scale.

[0013] Preferably, the initial correction plate is detachably connected to the adjustable correction mechanism.

[0014] Preferably, the slide is provided with an adjustment slot, and the initial correction plate is provided with an adjustment member that cooperates with the adjustment slot to move, and is configured so that the slide moves in a directional manner.

[0015] Preferably, the support frame is a stainless steel frame; the initial correction plate is a stainless steel plate or an aluminum plate; and the sliding piece is a hard alloy.

[0016] Preferably, a fixing piece for fixing the slide is provided on the initial correction plate, and a fixing hole for cooperating with the fixing piece for fixing is provided on the initial correction plate.

[0017] Preferably, the fixing holes are arranged in plurality along the moving direction of the sliding sheet.

[0018] Preferably, the support frame is fixed to the side wall of the vacuum chamber of the coating machine through a coating machine lifting mechanism, and is configured such that the coating machine lifting mechanism is used for initial correction plate lifting.

[0019] Preferably, the initial correction plate is detachably connected to the support frame.

[0020] Compared with the prior art, the at least one technical solution adopted in the embodiments of this specification can achieve the following beneficial effects:

[0021] The present application corrects the baffle by adjusting the slide on the adjustable correction mechanism. There is no need to cut the baffle, and the baffle will not be deformed. The shape of the corrected baffle can be adjusted more accurately and quickly to correct the uniformity of the film layer, thereby improving the correction accuracy and production efficiency, and the cost is relatively low. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a schematic diagram of the optical coating uniformity baffle rapid adjustment device in the present application;

[0024] Figure 2 It is the initial revised plate diagram of the implementation case in this application;

[0025] Figure 3 It is a structural diagram of a slide in an implementation case of this application;

[0026] Figure 4 This is a graph of the film uniformity test results of the implementation case in this application.

[0027] Figure numerals: 1. support frame; 2. initial correction plate; 3. adjustable correction mechanism. DETAILED DESCRIPTION

[0028] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0029] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0030] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0031] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0032] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the examples can be practiced without these specific details.

[0033] In view of this, the applicant conducted in-depth research and improvement exploration on the uniformity of coating and the adjustment of optical coating baffles, and found that: the adjustment of the correction baffles on the market is mainly based on the feedback of the film thickness test results, and then the baffles are corrected by mechanical cutting or laser cutting. Among them, mechanical cutting has low precision, easily causes deformation of the correction baffles, and has low efficiency; although laser cutting has guaranteed precision, the price of laser cutting equipment is high. For coating companies, if it is only used to cut correction baffles, the cost is high and the waste is large. If it is outsourced, the efficiency is low.

[0034] Based on this, the technical solutions provided by the embodiments of the present application are described below in conjunction with the accompanying drawings.

[0035] The embodiment of this specification provides a device for quickly adjusting the uniformity baffle of an optical coating, such as Figure 1 and Figure 2As shown, it includes a support frame 1, an initial correction plate 2 and an adjustable correction mechanism 3. The support frame 1 is used to be fixed on the coating machine, and the support frame 1 is fixedly connected to the initial correction plate 2; the adjustable correction mechanism 3 is movably set on the initial correction plate 2, and the adjustable correction mechanism 3 is partially exposed relative to the initial correction plate 2, and the adjustable correction mechanism 3 is used to adjust the part of the adjustable correction mechanism 3 corresponding to the uneven thickness of the film layer, and is configured such that the adjustable correction mechanism 3 and the initial correction plate 2 are used to jointly block the deposited particles, and the adjustable correction mechanism 3 adjusts the exposed size of the part of the adjustable correction mechanism 3 corresponding to the uneven thickness of the film layer relative to the initial correction plate 2 by moving, changes the range of blocking the deposited particles, corrects the uneven thickness of the film layer, and maintains the uniformity of the film layer thickness. The present application can achieve rapid adjustment of the uniformity of the film layer and improve production efficiency.

[0036] Among them, the support frame 1 can be a stainless steel frame, which is processed from stainless steel and is used to fix the initial correction plate 2, and at the same time fix the entire correction baffle on the side wall of the coating machine. The initial correction plate 2 can be a stainless steel plate or an aluminum plate, which can be processed from metal materials such as stainless steel plates and aluminum plates, and is fixed on the support frame 1 to fix the adjustable correction mechanism 3. The adjustable correction mechanism 3 can be a hard alloy, which can be processed from hard alloys, such as steel, hard aluminum, etc., and is processed with scales and adjustment grooves, which can perform telescopic movements, and facilitate accurate and rapid adjustment of the telescopic amount. Initially, the adjustable correction mechanism 3 and the initial correction plate 2 can be used to jointly shield the deposited particles; the exposed size of the adjustable correction mechanism 3 relative to the initial correction plate 2 is the non-overlapping part of the adjustable correction mechanism 3 and the initial correction plate 2.

[0037] In one embodiment, if Figure 1 and Figure 3 As shown, the adjustable correction mechanism 3 includes a plurality of slides, and the plurality of slides are movably disposed on the initial correction plate 2, and the slides are partially exposed relative to the initial correction plate 2, and are configured such that the adjustable correction mechanism 3 changes the range of shielding deposited particles by moving and adjusting the exposed size of the slides corresponding to the uneven film thickness relative to the initial correction plate 2. That is, the adjustable correction mechanism 3 may be a slide, and the slides may be closely arranged, that is, there is basically no gap between adjacent slides, or the slides may be arranged with gaps, and there are gaps between adjacent slides.

[0038] In one embodiment, the sliding sheet is located at the edge of the initial correction plate 2, and the sliding sheet is partially exposed outward relative to the edge of the initial correction plate 2, that is, the exposed portion of the sliding sheet relative to the initial correction plate 2 is outside the edge of the initial correction plate 2, and is configured as follows: the sliding sheet moves outward relative to the initial correction plate 2 to increase the exposed size of the sliding sheet relative to the initial correction plate 2 and increase the shielding of deposited particles; the sliding sheet moves inward relative to the initial correction plate 2 to reduce the exposed size of the sliding sheet relative to the initial correction plate 2 and reduce the shielding of deposited particles.

[0039] In one embodiment, if Figure 1 and Figure 3 As shown, the slide is provided with a scale in the moving direction of the slide, and is configured so that the slide adjusts the exposed size relative to the initial correction plate 2 according to the scale. The moving direction of the slide is the direction in which the slide adjusts the exposed size relative to the initial correction plate 2, and the moving direction of the slider in this embodiment can be up and down sliding.

[0040] In one embodiment, the initial correction plate 2 is detachably connected to the adjustable correction mechanism 3. The initial correction plate 2 and the slide are detachably connected by threading the initial correction plate 2 with a bolt.

[0041] In one embodiment, the initial correction plate 2 is detachably connected to the support frame 1. The initial correction plate 2 is detachably connected to the support frame 1 by threading the initial correction plate 2 with a bolt.

[0042] In one embodiment, if Figure 1 and Figure 3 As shown, an adjustment groove is provided on the slide, and an adjustment member that cooperates with the adjustment groove to move is provided on the initial correction plate 2, and is configured so that the slide moves in a directional manner. The length direction of the adjustment groove is the moving direction of the slide. The adjustment groove of the slide is provided at the end of the slide that is inward relative to the initial correction plate 2, and the exposed end of the slide is located at the end that is outward relative to the initial correction plate 2, and the exposed end and the adjustment groove on the slide are in opposite directions. The adjustment groove is sleeved on the adjustment member, and the adjustment groove and the adjustment member move in coordination, and the length direction of the adjustment groove is the vertical direction. The adjustment member can be a bolt threadedly connected to the initial correction plate 2. The exposed end of the slide can be flat, arc-shaped, or the like.

[0043] In one embodiment, the initial size of the initial correction plate 2 is determined according to the actual coating film layer uniformity distribution.

[0044] In one embodiment, a fixing piece for fixing the slide is provided on the initial correction plate 2, and a fixing hole for fixing with the fixing piece is provided on the initial correction plate 2. The fixing piece can be a bolt, and the fixing hole is also a threaded hole. The fixing piece and the adjusting piece can be the same part, that is, a bolt.

[0045] In one embodiment, a plurality of fixing holes are arranged along the moving direction of the slide. The arrangement direction of the fixing holes is also the moving direction of the slide, that is, the vertical direction. The plurality of fixing holes corresponding to each fixing member are evenly arranged along the moving direction of the slide, and the plurality of fixing holes corresponding to each fixing member are evenly arranged on the slide in a group.

[0046] In one embodiment, the support frame 1 is fixed to the side wall of the vacuum chamber of the coating machine through the coating machine lifting mechanism, and is configured such that the coating machine lifting mechanism is used for lifting and lowering the initial correction plate 2.

[0047] The present application is used to correct the uniformity of the film layer, solve the problem of rapid adjustment and correction of the high uniformity requirements of optical films, and can achieve rapid adjustment of the uniformity of the film layer, improve production efficiency, and correct the uniformity of the film layer without removing the baffle, which can improve production efficiency and reduce costs.

[0048] The embodiment of this specification also provides a device for quickly adjusting the uniformity baffle of optical coating, which is completed on the OTFC-1550 coating machine. Figure 1 As shown, the support frame 1 is made of 304 stainless steel, with a length of 500mm and a cross-section of 15mm*15mm. One end is fixed to the side wall of the vacuum coating machine, and the other end is fixed to the initial correction plate 2. The initial correction plate 2 is made of 304 stainless steel plate with a thickness of 1.5mm. The initial size is determined according to the uniformity distribution of the actual coating film layer, such as Figure 2 The adjustable correction mechanism is composed of 126 slides with a thickness of 1.5 mm and a width of 10 mm. Each slide has a scale with a scale interval of 1 mm. A 2 mm adjustment slot is left in the middle. It is fixed to the initial correction plate 2 with M2 screws and can be extended and retracted along the slot. The slide structure is shown in the figure below. Figure 3 As shown, R1 represents a radius of 1 mm.

[0049] The working process is as follows: (1) According to the actual coating thickness distribution of the coating machine, determine the shape of the initial correction plate 2, such as Figure 2As shown. (2) Process the slide structure and fix it on the initial correction plate 2 in sequence with M2 stainless steel screws. (3) Use M5 stainless steel screws to fix the correction baffle on the support frame 1. The support frame 1 is connected to the coating machine lifting mechanism and fixed on the side wall of the coating machine vacuum chamber, which can control the lifting and lowering of the entire correction baffle. (4) According to the distribution of the thickness of the evaporated film layer, the expansion and contraction of the adjustable correction mechanism 3 can be used to quickly correct the uniformity of the film layer. If the deposited film layer is too thick, adjust the slide at the corresponding position to extend outward to increase the shielding of the deposited particles, so that the film layer at that location becomes thinner; on the contrary, if the deposited film layer is too thin, adjust the slide at the corresponding position to shrink inward to reduce the shielding of the deposited particles, so that the film layer at that location becomes thicker. Therefore, the uniformity of the film layer can be quickly corrected by the extension and contraction of the slide. The corresponding relationship between the adjustment amount of the slide and the change in the thickness of the film layer at the corresponding position is established through experiments. According to the scale on the slide, the expansion and contraction of the slide is accurately adjusted to accurately correct the uniformity of the film layer.

[0050] The optical film thickness uniformity baffle quick adjustment device of the present application is used to correct the uniformity of the purple color film, so that the film uniformity of the entire furnace product (inner circle, middle circle, outer circle) of the OTFC-1550 coating machine can reach within ±0.9nm. The test spectrum curve is as follows: Figure 4 As shown, Wavelength represents wavelength and Transmittance represents emittance.

[0051] The embodiment of this specification also provides a method for adjusting the uniformity baffle of an optical coating, such as Figure 1 and Figure 2 As shown, the optical coating uniformity baffle adjustment device of any of the above embodiments is applied to establish a relationship between the film thickness change and the adjustment amount of the adjustable correction mechanism 3 corresponding to the film thickness change; according to the change in the film thickness unevenness, the adjustment amount of the adjustable correction mechanism 3 corresponding to the film thickness unevenness is adjusted to change the range of shielding deposited particles, correct the film thickness unevenness, and maintain the uniformity of the film thickness. The film thickness unevenness is the film thickness change.

[0052] In this specification, the same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the embodiments described later, the description is relatively simple, and the relevant parts can be referred to the partial description of the previous embodiments.

[0053] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. An optical coating uniformity baffle adjustment device, characterized in that: It comprises a support frame (1), an initial correction plate (2) and an adjustable correction mechanism (3); The support frame (1) is used to be fixed on the coating machine, and the support frame (1) is fixedly connected to the initial correction plate (2); The adjustable correction mechanism (3) is movably arranged on the initial correction plate (2), and the adjustable correction mechanism (3) is partially exposed relative to the initial correction plate (2), and is configured so that the adjustable correction mechanism (3) and the initial correction plate (2) are used to jointly shield the deposited particles; The adjustable correction mechanism (3) comprises a plurality of slides, and the plurality of slides are movably arranged on the initial correction plate (2), respectively. The slides are partially exposed relative to the initial correction plate (2), and are configured such that the adjustable correction mechanism (3) is used to adjust the slides corresponding to the uneven film thickness. The adjustable correction mechanism (3) moves to adjust the exposed size of the slides corresponding to the uneven film thickness relative to the initial correction plate (2), thereby changing the range of shielding deposited particles and correcting the uneven film thickness.

2. The optical coating uniformity baffle adjustment device according to claim 1, characterized in that: The slide is located at the edge of the initial correction plate (2), and the slide is partially exposed outward relative to the edge of the initial correction plate (2). The slide is configured such that: the slide moves outward relative to the initial correction plate (2), thereby increasing the exposed size of the slide relative to the initial correction plate (2) and increasing the shielding of deposited particles; the slide moves inward relative to the initial correction plate (2), thereby decreasing the exposed size of the slide relative to the initial correction plate (2) and reducing the shielding of deposited particles.

3. The optical coating uniformity baffle adjustment device according to claim 1, characterized in that: The slide is provided with a scale in the moving direction of the slide, and is configured so that the slide adjusts the exposed size relative to the initial correction plate (2) according to the scale.

4. The optical coating uniformity baffle adjustment device according to claim 1, characterized in that: The initial correction plate (2) is detachably connected to the adjustable correction mechanism (3).

5. The optical coating uniformity baffle adjustment device according to claim 1, characterized in that: The slide is provided with an adjustment slot, and the initial correction plate (2) is provided with an adjustment member that moves in coordination with the adjustment slot, and is configured so that the slide moves in a directional manner.

6. The optical coating uniformity baffle adjustment device according to claim 1, characterized in that: The support frame (1) is a stainless steel frame; the initial correction plate (2) is a stainless steel plate or an aluminum plate; and the sliding sheet is a hard alloy.

7. The optical coating uniformity baffle adjustment device according to claim 1, characterized in that: The initial correction plate (2) is provided with a fixing piece for fixing the sliding sheet, and the initial correction plate (2) is provided with a fixing hole for cooperating with the fixing piece for fixing.

8. The optical coating uniformity baffle adjustment device according to claim 7, characterized in that: The fixing holes are arranged in plurality along the moving direction of the sliding sheet.

9. The optical coating uniformity baffle adjustment device according to claim 1, characterized in that: The support frame (1) is fixed to the side wall of the vacuum chamber of the coating machine through a coating machine lifting mechanism, and is configured such that the coating machine lifting mechanism is used for lifting the initial correction plate (2).

10. The optical coating uniformity baffle adjustment device according to claim 1, characterized in that: The initial correction plate (2) is detachably connected to the support frame (1).

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