Centrifugal turbofan resistant to ultralow temperature and high temperature

Abstract

The utility model relates to the technical field of semiconductor testing equipment, in particular to an ultralow-temperature-resistant and high-temperature-resistant centrifugal turbofan which comprises a motor, a centrifugal wind wheel, a fan cavity and a medium conveying pipeline. The two ends of the sealing cover plate are rotationally connected with a driving shaft and a driven shaft which extend into the draught fan cavity correspondingly, the two centrifugal wind wheels are connected with the lower end of the driving shaft and the lower end of the driven shaft correspondingly, and the end of the medium conveying pipeline communicates with the portion, between the two centrifugal wind wheels, of the draught fan cavity. A transmission part is arranged between the driving shaft and the driven shaft above the sealing cover plate, and the top end of the driving shaft is connected with a motor shaft of the motor; the centrifugal turbine resistant to the ultralow temperature and the high temperature is convenient to install and maintain, suitable for being used in the harsh environment, low in failure rate in the harsh environment and longer in service life.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor testing equipment, in particular to a centrifugal turbine fan resistant to ultra-low temperature and high temperature. Background Art

[0002] In the production process of some high-reliability and high-performance semiconductor devices, ultra-low temperature and high temperature testing experiments are required. When conducting such ultra-low temperature and high temperature testing experiments, a centrifugal fan is required to quickly and evenly disperse the liquid nitrogen or high temperature medium sprayed into the inner cavity of the testing equipment, so that the dispersed ultra-low temperature nitrogen or high temperature medium can perform ultra-low temperature or high temperature testing experiments on the semiconductor devices in the inner cavity of the testing equipment.

[0003] For example, the utility model patent with application number 2021217451954 discloses a cryogenic box, including a lower cold chamber and an upper cold chamber, a cavity is formed between the upper cold chamber and the lower cold chamber, a sample rack and a liquid nitrogen coil are arranged in the cavity, and at least one wind wheel mechanism is arranged on the upper cold chamber corresponding to the cavity, and the wind wheel mechanism includes a motor and a centrifugal wind wheel, the motor is vertically fixed to the upper part of the upper cold chamber, and the centrifugal wind wheel is located in the cavity. The wind wheel shaft of the centrifugal wind wheel is connected to the motor shaft of the motor. The cryogenic box disclosed in the utility model forces the air flow in the cryogenic box to circulate by using a centrifugal wind wheel, so that the temperature in each place of the cryogenic box is consistent, but the cryogenic box disclosed in the patent directly sets the motor in the upper part of the upper cold chamber, and then directly extends the motor shaft into the cavity and connects with the wind wheel shaft. Although the motor is also designed to be external during operation, the direct installation of the motor and the upper cold chamber will cause the motor to fail due to low temperature. Once the motor fails, the motor shaft of the motor is connected to the wind wheel shaft, and the entire cryogenic box needs to be disassembled for maintenance, resulting in a complicated maintenance process. In addition, each of the multiple wind wheel mechanisms on the cryogenic box is connected to a motor, which not only increases the equipment cost, but also consumes a lot of electricity during operation. Based on the above technical problems existing in the existing cryogenic boxes, this application proposes a centrifugal turbine fan that is resistant to ultra-low temperatures and high temperatures. Using it in conjunction with the detection equipment can effectively solve the problems existing in the prior art. Utility Model Content

[0004] The utility model aims at a centrifugal turbine fan resistant to ultra-low temperature and high temperature. The centrifugal turbine fan is used in conjunction with semiconductor low-temperature testing equipment to effectively improve its service life and the testing effect of semiconductor ultra-low temperature and high temperature.

[0005] The utility model is realized through the following technical solutions:

[0006] A centrifugal turbine fan resistant to ultra-low temperatures and high temperatures, comprising a motor, a centrifugal fan wheel, a fan cavity and a medium conveying pipeline, wherein the upper end opening of the fan cavity is provided with a sealing cover plate, and the two ends of the sealing cover plate are rotatably connected with a driving shaft and a driven shaft extending into the fan cavity, respectively, the two centrifugal fan wheels are respectively connected to the lower ends of the driving shaft and the driven shaft, the end of the medium conveying pipeline is connected to the fan cavity between the two centrifugal fan wheels, a transmission component is provided between the driving shaft and the driven shaft above the sealing cover plate, and the top end of the driving shaft is connected to the motor shaft of the motor.

[0007] As a further configuration of the above solution, a driving bearing and a driven bearing are respectively provided at both ends of the sealing cover plate, and the driving shaft and the driven shaft are respectively connected to the driving bearing and the driven bearing.

[0008] As a further configuration of the above solution, a motor bracket is arranged above the active bearing, the motor is fixedly arranged on the motor bracket, and the motor shaft of the motor is connected to the active shaft through a coupling.

[0009] As a further configuration of the above solution, the transmission component includes a driving pulley and a driven pulley respectively connected to the driving shaft and the driven shaft, and a transmission belt is arranged between the driving pulley and the driven pulley.

[0010] As a further configuration of the above solution, a protective cover assembly for protecting the driving pulley, the driven pulley and the transmission belt is provided on the upper surface of the sealing cover plate.

[0011] As a further configuration of the above solution, a tensioning wheel for adjusting the tension of the transmission belt is provided on the upper surface of the sealing cover plate.

[0012] As a further configuration of the above solution, a sensor for detecting the transmission component is provided on the upper surface of the sealing cover plate.

[0013] As a further arrangement of the above scheme, wind wheel cavities aligned with the driving shaft and the driven shaft are provided at both ends of the fan cavity, and guide channels extending toward the center of the fan cavity are provided at the upper ends of the two wind wheel cavities, and the two guide channels are spaced apart from each other in front and back, and a pipe cover is provided at the lower end of the partition between the two guide channels, and the end of the medium conveying pipe is connected to the pipe cover.

[0014] As a further configuration of the above solution, a heat insulating protective sleeve is provided on the medium conveying pipeline located outside the blower cavity.

[0015] Compared with the prior art, the beneficial effects are as follows:

[0016] The ultra-low temperature and high temperature resistant centrifugal turbine fan disclosed in this patent has the motor and transmission components externally arranged, which is not only easy to install and can be maintained daily without overall disassembly, but also has a lower failure rate in harsh environments, greatly improving the service life of the entire fan.

[0017] 2. The fan disclosed in this patent adopts an external motor shaft transmission to connect the centrifugal fan, and combines the structural design inside the fan cavity to increase the gas pressure. The wind pressure is high during operation, which can allow the injected liquid nitrogen or high-temperature medium to flow fully. At the same time, due to the external design of the motor and transmission components, the gas only contacts the centrifugal wind wheel through the internal cavity, so the entire motor does not have strict requirements on the gas flowing through it, and is suitable for use in some harsh environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 This is a schematic diagram of the three-dimensional structure of the utility model from a first angle;

[0020] Figure 2 This is a schematic diagram of the three-dimensional structure of the utility model from a second angle;

[0021] Figure 3 It is a three-dimensional structural schematic diagram of the blower cavity in the utility model;

[0022] Figure 4 It is a three-dimensional structural diagram of the sealing cover plate, motor, transmission mechanism, etc. in the utility model;

[0023] Figure 5 It is a three-dimensional structural schematic diagram of the medium conveying pipeline in the utility model. DETAILED DESCRIPTION

[0024] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0025] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. Figures 1 to 5 , and describes the application in detail with reference to embodiments. Example 1

[0026] Example 1 discloses a centrifugal turbine fan resistant to ultra-low temperature and high temperature. Figure 1 and attached Figure 2 The main body of the fan includes a fan cavity 1, a medium delivery pipeline 2 and a motor 3. A sealing cover plate 4 is arranged at the upper opening of the fan cavity 1, and a corresponding sealing ring (not shown in the figure) is arranged between the sealing cover plate 4 and the upper opening of the fan cavity 1, so as to effectively seal the upper opening of the fan cavity 1.

[0027] Reference Figure 3 , wind wheel chambers 101 are provided at both ends of the fan chamber 1, and a centrifugal wind wheel 5 is provided in each of the two wind wheel chambers 102. At the same time, a guide channel 102 extending toward the center of the fan chamber 1 is provided at the upper end of the two wind wheel chambers 101, and the two guide channels 102 are spaced apart from each other. An installation opening 103 is provided at the lower end of the partition between the two guide channels 102, and a pipe cover 6 is provided in the installation opening 103, and then the end of the medium conveying pipe 2 is connected to the pipe cover 6. Refer to the attached Figure 5 In addition, a layer of heat insulation protective cover 201 is coated on the surface of the medium conveying pipeline 2 located outside the wind wheel cavity 101, so as to protect and insulate the medium conveying pipeline 2.

[0028] Reference Figure 4 An active bearing 7 and a driven bearing 8 are respectively arranged on the sealing cover plate 4 located directly above the two fan chambers 1, and a driving shaft 9 and a driven shaft 10 are respectively arranged in the active bearing 7 and the driven bearing 8, and the lower ends of the active shaft 9 and the driven shaft 10 are respectively connected to the corresponding centrifugal wind wheel 5.

[0029] A motor bracket 11 is fixedly mounted on the upper surface of the sealing cover plate 4 at the position of the active bearing 7, and then the motor 3 is fixedly mounted on the upper end of the motor bracket 11, and at the same time, the lower end of the motor shaft of the motor 3 is connected to the active shaft 9 through a coupling 12. A driving pulley 13 and a driven pulley 14 are respectively arranged on the active shaft 9 and the driven shaft 10 located above the sealing cover plate 4, and then a transmission belt (not shown in the figure) is also arranged between the driving pulley 13 and the driven pulley 14. Of course, the driving pulley 13, the driven pulley 14 and the transmission belt in this embodiment can also be replaced by other forms of transmission components such as sprockets and transmission chains.

[0030] Finally, in order to protect the transmission components on the upper surface of the sealing cover plate 4, columnar protective covers 15 are provided at both left and right ends of the sealing cover plate 4, and circular holes for penetrating the driving shaft 9 and the driven shaft 10 are provided at the top of the columnar protective covers 15, and corresponding driving bearings 7 and driven bearings 8 are also provided on the circular holes on the two columnar protective covers 15. In addition, a long strip protective cover 16 covering the transmission belt is provided between the two columnar protective covers 15, and in this embodiment, the columnar protective cover 15 and the long strip protective cover 16 are detachably connected to the sealing cover plate 4 through screws and other connectors, so that they can protect and prevent dust from the transmission components without affecting daily maintenance.

[0031] The ultra-low temperature and high temperature resistant centrifugal turbine fan disclosed in this embodiment 1 is fixed on the semiconductor testing equipment, and the lower ends of the wind wheel cavity 101 and the guide channel 102 on the fan cavity 1 are connected to the internal cavity in the testing equipment. When performing ultra-low temperature or high temperature testing of semiconductors, the motor 3 is started and the two centrifugal wind wheels 5 in the fan cavity 1 are rotated synchronously through the action of the transmission component.

[0032] Next, liquid nitrogen or high-temperature medium is sprayed into the interior of the fan cavity 1 through the medium delivery pipe 2. When the liquid nitrogen or high-temperature medium is sprayed out from the inner end of the medium delivery pipe 2, it is subjected to the negative pressure of the two guide channels 102, and thus enters the centrifugal wind wheel 5 along the corresponding guide channel 102, and then changes to radial flow when flowing through the blades of the centrifugal wind wheel 5, and then is thrown out from the lower end of the wind wheel cavity 101 when entering the interior of the centrifugal wind wheel 5 and enters the internal cavity of the test equipment, thereby realizing gas flow. The low-temperature nitrogen or high-temperature medium entering the internal cavity can perform ultra-low temperature or high temperature detection on the semiconductor device to be tested. Example 2

[0033] Example 2 discloses a centrifugal turbine fan that is improved and designed based on Example 1 and is resistant to ultra-low temperature and high temperature. The same points as Example 1 will not be described again. The differences are shown in the attached figure. Figure 4 In this embodiment 2, a tensioning wheel 17 is also provided on the sealing cover plate 4 between the driving pulley 13 and the driven pulley 14. The tensioning wheel 17 acts on the inner side of the transmission belt, so that the tension between the transmission belt and the two pulleys can be adjusted by adjusting the tensioning wheel 17, thereby ensuring that the two centrifugal impellers 5 can rotate synchronously and stably at high speed.

[0034] In addition, in this embodiment 2, a detection sensor 18 is also provided on the sealing cover plate 4 near the driven pulley 14. The detection sensor 18 is used to detect whether the driven pulley 14 rotates with the transmission belt. When it is found that the driven pulley 14 has no rotation effect, the detection sensor 18 will promptly transmit the detected signal to the control module on the semiconductor testing equipment, and then the control module will promptly control the alarm on the semiconductor testing equipment to sound an alarm, thereby achieving the purpose of reminding the relevant personnel.

[0035] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A centrifugal turbine fan resistant to ultra-low temperature and high temperature, comprising a motor, a centrifugal wind wheel, a fan cavity and a medium conveying pipeline, characterized in that: The upper end opening of the fan cavity is provided with a sealing cover plate, and the two ends of the sealing cover plate are rotatably connected with a driving shaft and a driven shaft extending into the fan cavity, respectively. The two centrifugal wind wheels are respectively connected to the lower ends of the driving shaft and the driven shaft, and the end of the medium conveying pipeline is connected to the fan cavity between the two centrifugal wind wheels. A transmission component is provided between the driving shaft and the driven shaft above the sealing cover plate, and the top end of the driving shaft is connected to the motor shaft of the motor.

2. The ultra-low temperature and high temperature resistant centrifugal turbine fan according to claim 1, characterized in that: The two ends of the sealing cover plate are respectively provided with a driving bearing and a driven bearing, and the driving shaft and the driven shaft are respectively connected to the driving bearing and the driven bearing.

3. The ultra-low temperature and high temperature resistant centrifugal turbine fan according to claim 2, characterized in that: A motor bracket is arranged above the active bearing, the motor is fixedly arranged on the motor bracket, and the motor shaft of the motor is connected to the active shaft through a coupling.

4. The ultra-low temperature and high temperature resistant centrifugal turbine fan according to any one of claims 1 to 3, characterized in that: The transmission component comprises a driving pulley and a driven pulley respectively connected to the driving shaft and the driven shaft, and a transmission belt is arranged between the driving pulley and the driven pulley.

5. The ultra-low temperature and high temperature resistant centrifugal turbine fan according to claim 4, characterized in that: The upper surface of the sealing cover plate is provided with a protective cover assembly for protecting the driving pulley, the driven pulley and the transmission belt.

6. The ultra-low temperature and high temperature resistant centrifugal turbine fan according to claim 4, characterized in that: The upper surface of the sealing cover plate is provided with a tensioning wheel for adjusting the tension of the transmission belt.

7. The ultra-low temperature and high temperature resistant centrifugal turbine fan according to claim 1, characterized in that: A sensor for detecting the transmission component is arranged on the upper surface of the sealing cover plate.

8. The ultra-low temperature and high temperature resistant centrifugal turbine fan according to claim 1, characterized in that: Both ends of the fan cavity are provided with wind wheel cavities aligned with the driving shaft and the driven shaft, the upper ends of the two wind wheel cavities are provided with guide channels extending toward the center of the fan cavity, and the two guide channels are spaced apart from each other in front and back, a pipe cover is provided at the lower end of the partition between the two guide channels, and the end of the medium conveying pipe is connected to the pipe cover.

9. The ultra-low temperature and high temperature resistant centrifugal turbine fan according to claim 1, characterized in that: A heat insulation protective sleeve is arranged on the medium conveying pipeline outside the blower cavity.

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