Flow guide device of tail gas treatment equipment

Abstract

The utility model relates to the technical field of tail gas treatment, and discloses a flow guide device of tail gas treatment equipment. The flow guide device of the tail gas treatment equipment comprises a flow guide pipe, the dust scraping rod is located in the flow guide pipe and used for removing dust on the inner wall of the flow guide pipe; mounting rings located at the two ends of the flow guide pipe further drive a flow guide fan and a reduction gear set to rotate, the flow guide fan can guide tail gas spreading into the flow guide pipe out to the direction of a driving motor, a gear at the output end of the reduction gear set can drive an adapter block to rotate, and then ash scraping rods at the two ends of a connecting rod and the flow guide fan rotate at different rotating speeds; the dust scraping rods can scrape off dust attached to the inner wall of the flow guide pipe, so that the dust is guided out of the flow guide pipe along with high-speed flowing air, the multiple assemblies are matched with one another, large-particle dust carried when tail gas is drained cannot be attached to the inner wall of the flow guide pipe, then the flow guide pipe is prevented from being blocked, and the practicability of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, in particular to a flow guiding device for tail gas treatment equipment. Background Art

[0002] The EPI epitaxial process, or silicon epitaxial process, refers to the growth of a single crystalline semiconductor film on a suitable crystal substrate. During the silicon epitaxial process, a large amount of TCS gas will be discharged as process tail gas. These toxic and harmful gases must be properly treated and treated to meet standards before they can be discharged into the atmosphere.

[0003] When treating process tail gas, it is necessary to use tail gas diversion device to divert the gas;

[0004] First, since the process exhaust gas contains a large amount of solid particles such as silicon dioxide when it is discharged, these particles are very easy to adhere to the inner wall of the guide pipe, causing blockage of the inner wall of the guide pipe, thereby affecting the normal use of the guide pipe and reducing the practicality of the device.

[0005] Second, when loading and unloading the existing guide pipes, workers are required to align the bolt holes on adjacent guide pipes, and the alignment process takes a certain amount of time. In addition, the cleaning components inside some guide pipes are also connected by fasteners, resulting in low loading and unloading efficiency of the existing guide device. Utility Model Content

[0006] The purpose of the utility model is to provide a flow guiding device for tail gas treatment equipment to solve the problems raised in the above background technology.

[0007] In order to solve the above technical problems, the utility model provides the following technical solutions: a guide device for exhaust gas treatment equipment, comprising a guide pipe; a scraper rod located inside the guide pipe, the scraper rod is used to remove dust from the inner wall of the guide pipe; mounting rings located at both ends of the guide pipe, the mounting rings are used to assist the guide pipes to be connected to each other; the mounting rings are welded to the outside of both ends of the guide pipe, a guide fan is bolted inside one end of the guide pipe, a side of the guide fan away from the scraper rod is bolted to a drive motor, an output end of the drive motor is bolted to a drive rod, an end of the drive rod away from the drive motor is bolted to a reduction gear set, a side of the reduction gear set away from the guide fan is bolted to a transfer block, a connecting rod is clamped on the transfer block, a contraction groove is opened in the connecting rod, a card block is movably embedded in the contraction groove, a card slot is opened on the card block, an extension plate is welded on the side of the card block away from the transfer block, two extension plates are provided, and a baffle is welded on the side of the two extension plates away from each other.

[0008] Preferably, a positioning groove is formed on one of the mounting rings, and a positioning block is welded on the other mounting ring, and the positioning block has the same shape as the positioning groove.

[0009] Preferably, the blades of the guide fan are bolted to the outside of the driving rod, the reduction gear set includes a plurality of gears of different sizes, the outside of the reduction gear set is covered with a protective block, and the protective block is bolted to the inside of the guide pipe.

[0010] Preferably, two clamping blocks are provided, and one side of the two clamping blocks away from each other is bolted to an elastic member, and one end of the elastic member away from the clamping block is bolted to the shrinkage groove.

[0011] Preferably, one end of the card blocks close to each other is movably engaged in the card slot, and the connecting rod is provided with an engaging slot connected to the shrinking slot, and the upper and lower sides of the engaging slot are tightly attached to the upper and lower sides of the adapter block.

[0012] Preferably, the two scraping rods have sides away from each other that are in close contact with the inner wall of the guide tube, and a lifting groove is formed on the side of the connecting rod close to the extension plate, and the extension plate extends out of the lifting groove.

[0013] Preferably, limiting grooves are provided on both sides and the top of the lifting groove, and both sides and the top of the baffle are movably engaged in the limiting grooves.

[0014] Compared with the prior art, the beneficial effects achieved by the utility model are:

[0015] First, turn on the drive motor to rotate the drive rod, thereby driving the guide fan and the reduction gear set to rotate. The guide fan will guide the exhaust gas that has spread into the guide pipe toward the direction of the drive motor. The gear at the output end of the reduction gear set will drive the adapter block to rotate, thereby causing the scraping rods at both ends of the connecting rod and the guide fan to rotate at different speeds. The scraping rods will scrape off the dust attached to the inner wall of the guide pipe, allowing the dust to be guided out of the guide pipe along with the high-speed air flow. Multiple components work together to prevent large particles of dust carried by the exhaust gas when it is being guided from adhering to the inner wall of the guide pipe, thereby preventing the guide pipe from being blocked and improving the practicability of the device.

[0016] Second, push the extension plate in the direction away from each other. When the card block is removed from the card slot, the connecting rod can be removed from the adapter block, and then the scraper rod can be loaded and unloaded or cleaned. When installing adjacent guide pipes, align the positioning groove on one of the mounting rings with the positioning block on the other mounting ring, and embed the positioning block into the positioning groove. At this time, fasteners can be used to install the two adjacent guide pipes together. Both the scraper rod and the guide pipe can be connected and positioned by card connection, which greatly reduces the installation time of workers and improves installation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional diagram of the utility model;

[0018] Figure 2 It is a cross-sectional view of the utility model;

[0019] Figure 3 This is a structural diagram of the reduction gear set of the utility model;

[0020] Figure 4 This is a block structure diagram of the utility model.

[0021] Among them: 1. guide tube; 2. mounting ring; 3. positioning block; 4. positioning slot; 5. driving motor; 6. guide fan; 7. driving rod; 8. scraper rod; 9. connecting rod; 10. contraction slot; 11. fitting slot; 12. clamping block; 13. elastic part; 14. extension plate; 15. baffle; 16. lifting slot; 17. limiting slot; 18. adapter block; 19. clamping slot; 20. protective block; 21. reduction gear set. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-4A guide device for exhaust gas treatment equipment comprises a guide pipe 1; a scraper rod 8 located inside the guide pipe 1, the scraper rod 8 is used to remove dust from the inner wall of the guide pipe 1; mounting rings 2 located at both ends of the guide pipe 1, the mounting rings 2 are used to assist the guide pipes 1 to connect with each other; the mounting rings 2 are welded to the outside of the two ends of the guide pipe 1, one end of the guide pipe 1 is internally bolted with a guide fan 6, the side of the guide fan 6 away from the scraper rod 8 is bolted with a drive motor 5, the output end of the drive motor 5 is bolted with a drive rod 7, the end of the drive rod 7 away from the drive motor 5 is bolted with a reduction gear set 21, the side of the reduction gear set 21 away from the guide fan 6 is bolted with a transfer block 18, the transfer block 18 is clamped with a connecting rod 9, a contraction groove 10 is opened in the connecting rod 9, a card block 12 is movably embedded in the contraction groove 10, a card block 12 is opened on the card block 12, and a card slot 19 is opened on the card block 12. An extension plate 14 is welded on one side, and two extension plates 14 are provided. A baffle 15 is welded on the side where the two extension plates 14 are away from each other. The driving motor 5 is a DRS80M4BE2HF rotary motor. When the driving motor 5 is turned on, the driving rod 7 is rotated, thereby driving the guide fan 6 and the reduction gear set 21 to rotate. The guide fan 6 will guide the exhaust gas that has spread into the guide pipe 1 toward the direction of the driving motor 5. The gear at the output end of the reduction gear set 21 will drive the adapter block 18 to rotate, thereby causing the scraping rods 8 at both ends of the connecting rod 9 to rotate at different speeds than the guide fan 6. The scraping rods 8 will scrape off the dust attached to the inner wall of the guide pipe 1, so that the dust is guided out of the guide pipe 1 along with the high-speed air flow. The cooperation of multiple components can prevent the large particles of dust carried by the exhaust gas when it is guided from adhering to the inner wall of the guide pipe 1, thereby preventing the guide pipe 1 from being blocked, thereby improving the practicality of the device.

[0024] Specifically, a positioning groove 4 is formed on one of the mounting rings 2 , and a positioning block 3 is welded on the other mounting ring 2 . The positioning block 3 has the same shape as the positioning groove 4 .

[0025] Through the above technical solution, the use of the positioning block 3 and the positioning groove 4 that are movably engaged with each other can reduce the time for the installer to align the two guide pipes 1.

[0026] Specifically, the blades of the guide fan 6 are bolted to the outside of the driving rod 7 , the reduction gear set 21 includes a plurality of gears of different sizes, the outside of the reduction gear set 21 is covered with a protective block 20 , and the protective block 20 is bolted to the inside of the guide pipe 1 .

[0027] Through the above technical solution, the reduction gear group 21 contains four gears of different sizes. The different sizes of the gears gradually reduce the output speed of the drive rod 7, so that the speed of the scraper rod 8 is slower than that of the guide fan 6, and the shafts that keep the gears horizontal in the reduction gear group 21 are all rotatably connected to the protective block 20.

[0028] Specifically, two clamping blocks 12 are provided, and the elastic member 13 is bolted to one side of the two clamping blocks 12 away from each other, and the end of the elastic member 13 away from the clamping block 12 is bolted to the shrinkage groove 10 .

[0029] Through the above technical solution, the elastic member 13 is used to push the clamping block 12 into the clamping slot 19 when no external force is applied to it.

[0030] Specifically, one end of the clamping block 12 close to each other is movably engaged in the clamping groove 19 , and the connecting rod 9 is provided with an engaging groove 11 connected to the shrinking groove 10 , and the upper and lower sides of the engaging groove 11 are tightly attached to the upper and lower sides of the adapter block 18 .

[0031] Through the above technical solution, the adapter block 18 movably penetrates the protective block 20, and the connection method of the movable engagement between the clamping block 12 and the clamping groove 19 makes it more convenient for users to load and unload the connecting rod 9.

[0032] Specifically, the two scraping rods 8 are in close contact with the inner wall of the guide tube 1 at the sides away from each other, and a lifting groove 16 is formed on the side of the connecting rod 9 close to the extension plate 14 , and the extension plate 14 extends out from the lifting groove 16 .

[0033] Through the above technical solution, a silicone strip is provided at the position where the scraping rod 8 is in close contact with the inner wall of the guide tube 1, so that the dust attached to the inner wall of the guide tube 1 can be scraped off better.

[0034] Specifically, limiting grooves 17 are formed on both sides and the top of the lifting groove 16 , and both sides and the top of the baffle 15 are movably engaged in the limiting grooves 17 .

[0035] Through the above technical solution, the baffle 15 can prevent flowing dust from entering the shrinkage groove 10.

[0036] When in use, the drive motor 5 is turned on through the external control terminal to rotate the drive rod 7, thereby driving the guide fan 6 and the reduction gear set 21 to rotate. The guide fan 6 will guide the exhaust gas that has spread into the guide pipe 1 toward the direction of the drive motor 5, and one of the gears at one end of the reduction gear set 21 will maintain the same speed as the guide fan 6, and then the speed will be reduced by the meshing of gears of different sizes in the reduction gear set 21. The gear at the output end of the reduction gear set 21 will drive the adapter block 18 to rotate, thereby causing the scraping rods 8 at both ends of the connecting rod 9 to rotate at different speeds from the guide fan 6. The scraping rods 8 will scrape off the dust attached to the inner wall of the guide pipe 1, so that the dust is guided out of the guide pipe 1 along with the high-speed flowing air, and then discharged to the guide pipe 1. The extension plate 14 is pushed in the direction away from each other, so that the extension plate 14 drives the baffle plate 15 to slide in the lifting groove 16 and the limiting groove 17, and the moving block 12 will squeeze the elastic member 13 in the contraction groove 10. When the block 12 is moved out of the slot 19, the connecting rod 9 can be removed from the adapter block 18. The extension plate 14 can be loosened to push the block 12 back to the original position by the elasticity of the elastic member 13 itself, and then the plaster scraping rod 8 can be loaded and unloaded or cleaned. When installing adjacent guide pipes 1, align the positioning groove 4 on one of the mounting rings 2 with the positioning block 3 on the other mounting ring 2, and embed the positioning block 3 into the positioning groove 4. At this time, the two adjacent guide pipes 1 can be installed together using fasteners.

[0037] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0038] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A flow guide device for tail gas treatment equipment, characterized in that: include: A flow guide tube (1); A dust scraping rod (8) located inside the guide tube (1), the dust scraping rod (8) being used to remove dust from the inner wall of the guide tube (1); Mounting rings (2) located at both ends of the flow guide tube (1), the mounting rings (2) being used to assist the flow guide tubes (1) in being connected to each other; The mounting ring (2) is welded to the outside of both ends of the guide tube (1); a guide fan (6) is bolted to the inside of one end of the guide tube (1); a side of the guide fan (6) away from the scraper rod (8) is bolted to a drive motor (5); an output end of the drive motor (5) is bolted to a drive rod (7); an end of the drive rod (7) away from the drive motor (5) is bolted to a reduction gear set (21); a side of the reduction gear set (21) away from the guide fan (6) is bolted to the output end of the drive motor (5); A transfer block (18) is bolted, a connecting rod (9) is clamped on the transfer block (18), a contraction groove (10) is provided in the connecting rod (9), a clamping block (12) is movably engaged in the contraction groove (10), a clamping groove (19) is provided on the clamping block (12), an extension plate (14) is welded on the side of the clamping block (12) away from the transfer block (18), two extension plates (14) are provided, and a baffle (15) is welded on the sides of the two extension plates (14) away from each other.

2. The flow guide device of the exhaust gas treatment equipment according to claim 1, characterized in that: A positioning groove (4) is formed on one of the mounting rings (2), and a positioning block (3) is welded on the other mounting ring (2), wherein the positioning block (3) and the positioning groove (4) have the same shape.

3. The flow guide device of the exhaust gas treatment equipment according to claim 1, characterized in that: The blades of the guide fan (6) are bolted to the outside of the driving rod (7); the reduction gear set (21) comprises a plurality of gears of different sizes; the outside of the reduction gear set (21) is covered with a protective block (20); and the protective block (20) is bolted to the inside of the guide pipe (1).

4. The flow guide device of the exhaust gas treatment equipment according to claim 1, characterized in that: Two clamping blocks (12) are provided, and the two clamping blocks (12) are bolted to an elastic member (13) at one side away from each other, and the elastic member (13) is bolted to an end away from the clamping block (12) in the contraction groove (10).

5. The flow guide device of the exhaust gas treatment equipment according to claim 1, characterized in that: One end of the clamping block (12) that is close to each other is movably engaged in the clamping groove (19), and the connecting rod (9) is provided with an engaging groove (11) that is connected to the shrinking groove (10), and the upper and lower sides of the engaging groove (11) are tightly attached to the upper and lower sides of the adapter block (18).

6. The flow guide device of the exhaust gas treatment equipment according to claim 1, characterized in that: The two scraping rods (8) are in close contact with the inner wall of the guide tube (1) on their sides away from each other, and a lifting groove (16) is formed on the side of the connecting rod (9) close to the extension plate (14), and the extension plate (14) extends out from the lifting groove (16).

7. The flow guide device of the exhaust gas treatment equipment according to claim 6, characterized in that: Limiting grooves (17) are formed on both sides and the top of the lifting groove (16), and both sides and the top of the baffle (15) are movably engaged in the limiting grooves (17).

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