Gas flow divider and semiconductor processing equipment

Abstract

A gas diverter and semiconductor processing equipment, the gas diverter supplies gas to a reaction chamber in the semiconductor processing equipment, the gas diverter comprises a controller and at least two gas branching modules arranged on a branching gas pipeline, the gas branching modules comprise signal transfer units, and the signal transfer units are connected with the controller. The control valves and the flow sensors are arranged on the branch gas pipelines in series, the signal switching unit is electrically connected with the controller, the control valves and the flow sensors respectively, and the controller receives measurement signals of the flow sensors through the signal switching unit and controls opening and closing of the control valves through the signal switching unit. According to the utility model, all parts are modularly arranged, so that the degree of freedom of product application is improved, the equipment maintenance cost is reduced, the assembly difficulty is reduced, and the signal response speed is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor processing equipment, in particular to a gas splitter and semiconductor processing equipment. Background Art

[0002] In semiconductor processing equipment, reaction gases from a gas source are introduced into a reaction chamber through gas pipelines to process substrates. Gas splitters are usually provided on the gas pipelines to achieve precise control and regulation of the gas flow in each gas pipeline.

[0003] However, existing gas distributors have problems such as high maintenance and use costs and slow response feedback. Utility Model Content

[0004] The purpose of the utility model is to provide a gas diverter and semiconductor processing equipment, which, through modular settings, allows a single module to be replaced without affecting the overall functional use, thereby reducing the equipment maintenance and use costs, and improving the response speed by simplifying the control electrical connection circuit.

[0005] In order to achieve the above-mentioned purpose, the utility model provides a gas diverter, comprising: a controller and at least two gas branching modules; the gas branching module is arranged on a branch gas pipeline; the gas diverter comprises an inlet end and an outlet end, and the number of the outlet ends is greater than the inlet ends; the branch gas pipeline is connected to the inlet end through a manifold, and is correspondingly connected to the outlet end; the gas branching module comprises a signal switching unit, and a control valve and a flow sensor arranged in series on the branch gas pipeline; the controller is electrically connected to the signal switching unit, and the signal switching unit is electrically connected to the control valve and the flow sensor respectively, so that the controller receives the measurement signal of the flow sensor through the signal switching unit, and controls the opening and closing of the control valve through the signal switching unit.

[0006] Optionally, the number of the controllers is less than the gas branching modules, each of the gas branching modules includes a first data interface and a second data interface, the first data interface and the second data interface form an electrical circuit, the controller is electrically connected to the first data interface on the first gas branching module, and the second data interface on the gas branching module is electrically connected to the first data interface on the second gas branching module to form an electrically controlled series path.

[0007] Optionally, the electrical circuit is located on the signal switching unit.

[0008] Optionally, the controller has an uplink data interface and a downlink data interface, the uplink data interface is connected to an external host computer via a data line, and the downlink data interface is connected to the first data interface on the first gas branch module via a data line.

[0009] Optionally, the downlink data interface, and the first data interface and the second data interface all adopt EtherCAT interfaces.

[0010] Optionally, the gas branching modules are encapsulated by a shell, and the gas branching modules are arranged in parallel.

[0011] Optionally, the controller is fixed to the manifold.

[0012] Optionally, the controller is arranged perpendicular to the arrangement direction of the branch gas pipelines, and the controller is arranged at the end of the gas branch module.

[0013] Optionally, the controller is fixed between two gas branch modules.

[0014] Optionally, the gas diverter has a base, and the branch gas pipeline is located in the base.

[0015] Optionally, the manifold is located within the base.

[0016] Optionally, the base is integrally provided.

[0017] Optionally, a hollow hole groove is provided on the base.

[0018] Optionally, the gas diverter is encapsulated by a cover body, and the cover body is provided with heat dissipation holes.

[0019] Optionally, a mounting groove is provided on the base, and connectors are provided on the controller and the gas branch module, so that the controller and the gas branch module can be plugged and installed on the base.

[0020] Optionally, the gas diverter further comprises a mounting frame, and the base is detachably fixed on the mounting frame.

[0021] The utility model also provides a semiconductor processing device, comprising: a reaction chamber; and the gas splitter, wherein the gas splitter is connected to the reaction chamber to supply gas.

[0022] The gas diverter provided by the utility model modularizes the various components. The number of branch gas pipelines and gas diverter modules can be increased or decreased according to actual needs. It can adapt to various types of semiconductor processing equipment and various flow ratio control conditions. Modular assembly improves the freedom of product application. When a component in the gas diverter is damaged or reaches its service life, only the component that needs to be repaired or replaced can be replaced. Other components can still operate normally without overall replacement, which greatly reduces the equipment maintenance cost. The modular assembly method simplifies the installation steps, reduces the difficulty of assembly, and increases the speed of assembly. The logic control unit is omitted in the gas diverter module, and only the signal transfer unit is used to achieve electrical connection. The input and output are both voltage signals, with fast response, low delay, and low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 The utility model is a structural schematic diagram of a semiconductor processing device provided by the utility model.

[0024] Figure 2 It is a front view of a gas diverter in one embodiment of the utility model.

[0025] Figure 3 yes Figure 2 Bottom view of .

[0026] Figure 4 yes Figure 2 Side view from the center A.

[0027] Figure 5 yes Figure 2 sectional view of .

[0028] Figure 6 yes Figure 2 Side view from the middle B direction.

[0029] Figure 7 It is a bottom view of a gas diverter in another embodiment of the utility model.

[0030] Figure 8 It is a front view of a gas diverter in another embodiment of the utility model.

[0031] Fig. 9 yes Figure 8 Side view from the center A. DETAILED DESCRIPTION

[0032] The following is based on Figures 1 to 9 , specifically describe the preferred embodiments of the present utility model.

[0033] like Figure 1As shown, the utility model provides a semiconductor processing device, which can be an etching device or a deposition device, comprising a reaction chamber 1, a base 2 is arranged in the reaction chamber 1, a substrate 3 to be processed is placed on the base 2, and an air inlet device 4 is arranged on the top of the reaction chamber 1 (in other embodiments, the air inlet device can also be arranged on the side wall of the reaction chamber 1), which is used to introduce the reaction gas into the reaction chamber 1 to process the substrate 3. After the substrate is processed, the remaining gas and reaction by-products in the reaction chamber 1 are discharged from the reaction chamber 1 by a vacuum pump (not shown in the figure), and after the processed substrate 3 is transferred out of the reaction chamber 1, a clean gas is introduced to clean the reaction chamber 1. After the cleaning is completed, the reaction chamber 1 is vacuumed again to wait for the subsequent process. When processing the substrate 3, in order to obtain a more uniform process effect, a heating device and a cooling device are usually arranged in the base 2, and the temperature of the substrate 3 is adjusted to a preset value by adjusting the temperature of the base 2. The cooling device can adopt a water cooling system or an air cooling system. When the air cooling system is adopted, the cooling gas needs to be introduced into the cooling device.

[0034] A gas delivery pipeline is usually used to deliver reaction gas, cleaning gas, cooling gas, etc. from a gas source into the reaction chamber 1. Multiple gas inlets can be set on the air intake device 4 or the cooling device. Each gas inlet is connected to a different gas pipeline. A flow control device is usually set on the gas pipeline to achieve precise control and regulation of the gas flow in each gas pipeline, so as to deliver a precise flow of gas into the reaction chamber 1 to complete the semiconductor process.

[0035] A comparative example provides a gas splitter (gas splitter) with an integrated packaging structure, which includes multiple mass flow control units (MFCs), each of which controls the gas flow on the pipeline where it is located, and each of which has a logic control unit, a flow meter and a control valve. The gas splitter has a master controller for sending target flow instruction information to the logic control unit in the mass flow control unit, and the logic control unit uses the measurement information of the flow meter in it to self-feedback control the opening and closing of the control valve to obtain the desired flow on each flow path.

[0036] However, the self-feedback control process in this logic control unit has a slow response speed to the master controller, and it is difficult for the master controller to obtain feedback information on the progress of a certain flow control in a timely manner, and thus it is impossible to timely adjust the flow distribution of each flow path. In addition, a logic control unit needs to be set up in each mass flow control unit, which is costly.

[0037] In addition, this type of gas diverter generally adopts an integral packaging setting, with multiple mass flow control units fixed on a substrate to make the gas diversion number relatively fixed, and the flow sensor, logic control unit and control valve are solidified into an integrated structure. Once a key component is damaged or fails, the entire gas diverter needs to be repaired and replaced, and the equipment use and maintenance costs are high. At the same time, the gas diverter lacks scalability and is difficult to meet some application requirements that require changes in gas path settings.

[0038] Based on this, the utility model provides a gas splitter 10, which can be used to supply gas to the reaction chamber 1 of the semiconductor processing equipment. Figure 2 to Figure 4 As shown, the gas diverter 10 has an inlet end 101, a branch gas pipeline 102 and an outlet end 103. The inlet end 101 is connected to a gas source (not shown) through a pipeline. The inlet end 101 generally corresponds to the number of gas sources, and multiple gas sources may share one inlet end 101. The number of branch gas pipelines 102 is set according to actual needs, and the number of branch gas pipelines 102 can be freely increased or decreased. One end of the branch gas pipeline 102 is connected to the inlet end 101 through a manifold 104, and the other end of the branch gas pipeline 102 is respectively connected to each outlet end 103. The number of branch gas pipelines 102 and the number of outlet ends 103 are generally greater than the number of inlet ends 101 to achieve the function of gas diversion.

[0039] The gas diverter 10 includes a controller 105 and a gas branch module 106. The gas branch module 106 is arranged on the branch gas pipeline 102. The number of the gas branch modules 106 matches the number of the branch gas pipelines 102. The number of the gas branch modules 106 can also be freely increased or decreased according to actual needs, thereby improving the degree of freedom of product application. The controller 105 is used to control the operation of each gas branch module 106. The same controller 105 can control multiple gas branch modules 106 at the same time. The number of controllers 105 is less than the number of gas branch modules 106. Generally, one controller 105 is set to realize the control function, so as to save the installation space and cost of the gas diverter 10. If there are a large number of branch gas pipelines 102 and gas branch modules 106, the number of controllers 105 can be increased as appropriate to reduce the working pressure of a single controller 105 and improve control reliability and rapid response.

[0040] like Figure 5As shown, the gas branch module 106 includes a signal adapter unit 1061, and a control valve 1062 and a flow sensor 1063 which are arranged in series on the branch gas pipeline 102. The signal adapter unit 1061 is electrically connected to the control valve 1062 and the flow sensor 1063 respectively, and the signal adapter unit 1061 is further electrically connected to the controller 105, so that the controller 105 can receive the flow measurement signal obtained by the flow sensor 1063 through the signal adapter unit 1061, and directly control the opening and closing of the control valve 1062 by transmitting the control signal through the signal adapter unit 1061. It can be understood that "opening and closing" can represent a state or a process, that is, the action of opening and closing, and the desired flow can be obtained by making the control valve 1062 stagnate in a semi-open and semi-closed state after reaching the target flow. In this embodiment, the signal transfer unit 1061 adopts a PCB (printed circuit board) board or a signal transmission line such as a bus, thereby realizing that the controller 105 can directly receive the flow measurement signal obtained by the flow sensor 1063, and realizes the direct control of the control valve 1062 by the controller 105. The logic control unit is omitted, and only the signal transfer unit 1061 is used to realize electrical signal transfer. Both input and output are voltage signals, with fast response, low delay and low cost.

[0041] In particular, the controller 105 can thereby obtain the flow changes in a timely manner, and then the controller 105 can uniformly and timely regulate the gas branch modules 106 on multiple branch gas pipelines 102. Compared with the signal feedback delay problem to the master controller that exists in the self-feedback control of the logic control unit in the mass flow control unit in the comparative example, it is conducive to low-latency global control and is particularly suitable for application scenarios where process gases are frequently switched or pulsed gas supply is used.

[0042] like Figure 5 As shown, the controller 105 has an uplink data interface 1051 and a downlink data interface 1052. Each gas branch module 106 includes a first data interface 1064 and a second data interface 1065, which form an electrical circuit located on the signal switching unit 1061. Figure 5 and Figure 6 As shown, the uplink data interface 1051 on the controller 105 is connected to an external host computer (not shown) through a data line, the downlink data interface 1052 on the controller 105 is connected to the first data interface 1064' on the first gas branch module 106-1 through a data line, the second data interface 1065' on the first gas branch module 106-1 is connected to the first data interface 1064' on the second gas branch module 106-2 through a data line, and so on, until the second data interface 1065' on the n-1th gas branch module 106-(n-1) n-1Connected to the first data interface 1064 on the nth gas branch module 106-n via a data line n , thereby forming an electrically controlled series path between the controller 105 and all the gas branch modules 106, which is equivalent to connecting the controller 105 and all the gas branch modules 106 in series using a data bus. In each gas branch module 106, there is a branch line to realize the signal exchange between the control valve 1062 and the flow sensor 1063 and the controller 105. The branch line routing inside the module saves the number of wiring and wiring space outside the module, and can realize a tighter arrangement of the controller 105 and each gas branch module 106, thereby improving the stability of the electrical connection. In addition, since there is no need to reserve a port for an external control bus, it is convenient for modular assembly and expansion. In this embodiment, the downlink data interface 1052, the first data interface 1064 and the second data interface 1065 all use an Ether CAT interface. The Ether CAT interface can shorten the control response time to less than one second, further improving the control speed of the gas diverter 10.

[0043] In the present invention, the EtherCAT interface used is a known technology. In order to facilitate the explanation of the technical superiority of its application to the present invention, the EtherCAT technology is briefly introduced below. However, it can be understood that the technical introduction itself does not constitute a limitation of the embodiment scheme of the present invention.

[0044] EtherCAT (Ethernet Control Automation Technology) is an open architecture, Ethernet-based fieldbus system. The CAT in its name is the abbreviation of the first letter of Control Automation Technology. EtherCAT is a deterministic industrial Ethernet. The length of data transmitted by each node in the general industrial communication network is not long, and most of them are smaller than the minimum length of the Ethernet frame. And each node has to send a frame every time it updates data, resulting in low bandwidth utilization and the overall performance of the network. EtherCAT uses a technology called "processing on the fly" to improve the above problems. In the EtherCAT network, when a data frame passes through an EtherCAT node, the node will copy the data and then transmit it to the next node. At the same time, it will identify the data corresponding to this node and perform corresponding processing. If the node needs to send data, it will also insert the data to be sent into the data sent to the next node. The time for each node to receive and transmit data is less than 1 microsecond. Generally speaking, only one frame of data is needed for all nodes on the network to transmit and receive data. The EtherCAT protocol is optimized for program data and uses standard IEEE 802.3 Ethernet frames with an Ethertype of 0x88a4. The order of data is independent of the physical order of the devices on the site, and there is no restriction on the order of addressing. The master can communicate with the slaves in broadcast and multicast mode. If IP routing is required, the EtherCAT protocol can be placed in UDP / IP packets. The short cycle time of EtherCAT is due to the fact that the microprocessor of the slave does not need to process Ethernet packets. All program data is processed by the hardware of the slave controller. This feature, combined with the functional principle of EtherCAT, makes EtherCAT a high-performance distributed I / O system: program data exchange involving one thousand distributed digital inputs / outputs takes only 30us, which is equivalent to transmitting 125 bytes of data on 100Mbit / s Ethernet. A system that reads and writes one hundred servo axes can update at a rate of 10kHz. The typical update rate is about 1-30kHz, but lower update rates can be used to avoid too frequent direct memory access affecting the operation of the master PC. EtherCAT uses the full-duplex Ethernet physical layer, and the slave may have two or more ports. If the device does not detect other devices downstream, the slave controller will automatically close the corresponding port and return the Ethernet frame. Due to the above characteristics, EtherCAT supports almost all network topologies, including bus, tree or star. The bus topology commonly used in fieldbus can also be used in Ethernet.

[0045] The topology of EtherCAT can be any combination of network cables, branches or stubs. Devices with three or more Ethernet interfaces can be used as taps. If the EtherCAT network uses a ring topology, the network also has cable redundancy.

[0046] In summary, it can be understood that the use of the Ether CAT interface can shorten the control response time and further improve the control speed of the gas splitter 10.

[0047] like Figure 2 and Figure 3 As shown, in one embodiment of the present invention, the controller 105 and each gas branch module 106 are encapsulated by a shell, and the gas branch module 106 is arranged on the branch gas pipeline 102. The branch gas pipelines 102 are arranged in parallel with each other, and the gas branch modules 106 are arranged in parallel with each other to save space and facilitate the electrical connection of each gas branch module 106, saving the length of the connecting line. There are many ways to realize the setting position of the controller 105: Figure 2 As shown, there is an installation space above the manifold 104, and the controller 105 can be fixed above the manifold 104 to make the structure of the gas splitter 10 compact; Figure 3 As shown, the controller 105 can usually be arranged perpendicular to the arrangement direction of the branch gas pipeline 102, so that the controller 105 is arranged at the end of the gas branch module 106. Since the first data interface 1064 and the second data interface 1065 are arranged at the end of the gas branch module 106, the controller 105 is arranged at the end of the gas branch module 106. The distance between the downlink data interface 1052 on the controller 105 and the first data interface 1064 on the gas branch module 106 can be shortened by arranging the controller 105 at the end of the gas branch module 106, thereby saving the length of the connecting line and the installation space. Figure 7 As shown, in another embodiment of the present invention, the controller 105 is disposed between two adjacent gas branching modules 106 , or attached to the gas branching module 106 , thereby further saving installation space.

[0048] like Figure 8 and Fig. 9As shown, in one embodiment of the present invention, a base 107 is provided in the gas splitter 10, and each branch gas pipeline 102 is wrapped in the base 107 to enhance the stability of the gas pipeline. Furthermore, multiple separate bases 107 can be provided as an integral base 107, and the integrated integral base 107 wraps all the branch gas pipelines 102 and the manifold 104, ensuring that all gas pipelines (manifold 104 and branch gas pipelines 102) connecting the gas inlet end 101 and the gas outlet end 103 in the gas splitter 10 are not easily displaced, thereby enhancing stability. Fig. 9 As shown, a plurality of hollow holes 1071 are provided on the base 107. The hollow holes 1071 avoid the location of the gas pipeline. The hollow holes 1071 can usually be arranged at the edge of the base 107. The hollow holes 1071 can reduce the weight of the base 107, thereby reducing the overall weight of the gas diverter 10. The hollow holes 1071 are beneficial to the heat dissipation of the device and prevent heat from accumulating in the gas pipeline.

[0049] In order to facilitate modular installation and disassembly, a mounting groove (not shown in the figure) can be provided at a corresponding position on the base 107. Accordingly, a plug-in component (not shown in the figure) matching the mounting groove is provided on the controller 105 and the gas branch module 106. The controller 105 and the gas branch module 106 are plugged and installed on the base 107 through the plug-in component and the mounting groove. The plug-in installation method simplifies the installation steps, reduces the difficulty of assembly, and improves the assembly speed. Figure 8 As shown, a mounting frame 109 is provided, and the base 107 is detachably fixedly mounted on the mounting frame 109. After the gas diverter 10 is installed on the gas delivery pipeline connecting the gas source and the reaction chamber, the gas diverter 10 can be fixed on the ground or other assembly parts through the mounting frame 109, thereby improving the stability of the assembly.

[0050] like Figure 8 As shown, in other embodiments, after the connection between the manifold 104 and the plurality of branch gas pipelines 102 is completed, and the modular assembly of the controller 105 and the gas branch module 106 is performed, the gas splitter 10 is packaged as a whole using a cover 108, and the controller 105, the gas branch module 106, and the base 107 are all packaged inside the cover 108, and the gas inlet end 101 and the gas outlet end 103 are exposed outside the cover 108, so as to facilitate the subsequent installation of the integrally packaged gas splitter 10 on the gas delivery pipeline connecting the gas source and the reaction chamber. Further, a plurality of heat dissipation holes 1081 are opened on the cover 108 to prevent heat from accumulating inside the cover 108.

[0051] The gas diverter provided by the utility model modularizes the various components. The number of branch gas pipelines and gas diverter modules can be increased or decreased according to actual needs. It can adapt to various types of semiconductor processing equipment and various flow ratio control conditions. Modular assembly improves the freedom of product application. When a component in the gas diverter is damaged or reaches its service life, only the component that needs to be repaired or replaced can be replaced. Other components can still operate normally without overall replacement, which greatly reduces the equipment maintenance cost. The modular assembly method simplifies the installation steps, reduces the difficulty of assembly, and increases the speed of assembly. The logic control unit is omitted in the gas diverter module, and only the signal transfer unit is used to achieve electrical connection. The input and output are both voltage signals, with fast response, low delay, and low cost.

[0052] It should be noted that, in the embodiments of the present invention, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limitations on the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0053] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] It should be understood that when used in this specification and the appended claims, the term "comprising" indicates the presence of described features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0055] It should also be understood that the terms used in this application specification are only for the purpose of describing specific embodiments and are not intended to limit the application. As used in this application specification and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include plural forms.

[0056] It should be further understood that the term “and / or” used in the specification and appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0057] Although the content of the utility model has been described in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation of the utility model. Obviously, the described embodiments are only a part of the embodiments of the utility model, not all of them. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the scope of protection of the utility model should be defined by the attached claims.

Claims

1. A gas splitter, characterized in that: Include: A controller and at least two gas branch modules; The gas branching module is arranged on the branching gas pipeline; The gas flow divider further comprises an inlet end and an outlet end, and the number of the outlet ends is greater than the number of the inlet ends; The branch gas pipeline is connected to the gas inlet end through the manifold and is correspondingly connected to the gas outlet end; The gas branch module comprises a signal switching unit, and a control valve and a flow sensor arranged in series on the branch gas pipeline; The controller is electrically connected to the signal conversion unit, and the signal conversion unit is electrically connected to the control valve and the flow sensor respectively, so that the controller receives the measurement signal of the flow sensor through the signal conversion unit and controls the opening and closing of the control valve.

2. The gas splitter according to claim 1, characterized in that: The number of the controllers is less than that of the gas branch modules, and each of the gas branch modules includes a first data interface and a second data interface, and the first data interface and the second data interface form an electrical circuit. The controller is electrically connected to the first data interface on the first gas branch module, and the second data interface on the gas branch module is electrically connected to the first data interface on the second gas branch module to form an electrically controlled series path.

3. The gas splitter according to claim 2, characterized in that: The electrical circuit is located on the signal switching unit.

4. The gas splitter according to claim 2, characterized in that: The controller has an uplink data interface and a downlink data interface. The uplink data interface is connected to an external host computer via a data line, and the downlink data interface is connected to the first data interface on the first gas branch module via a data line.

5. The gas splitter according to claim 4, characterized in that: The downlink data interface, the first data interface and the second data interface all adopt Ether CAT interfaces.

6. The gas splitter according to claim 1, characterized in that: The gas branching modules are encapsulated by a shell, and the gas branching modules are arranged in parallel.

7. The gas splitter according to claim 6, characterized in that: The controller is fixed to the manifold.

8. The gas splitter according to claim 6, characterized in that: The controller is arranged perpendicular to the arrangement direction of the branch gas pipelines, and the controller is arranged at the end of the gas branch module.

9. The gas splitter according to claim 6, characterized in that: The controller is fixed between two gas branch modules.

10. The gas splitter according to claim 6, characterized in that: The gas splitter has a base, and the split gas pipeline is located in the base.

11. The gas splitter according to claim 10, characterized in that: The manifold is located within the base.

12. The gas splitter according to claim 11, characterized in that The base is integrally arranged.

13. The gas splitter according to claim 10, characterized in that: The base is provided with a hollow hole groove.

14. The gas splitter according to claim 1, characterized in that: The gas diverter is packaged by a cover body, and the cover body is provided with heat dissipation holes.

15. The gas splitter according to claim 10, characterized in that: The base is provided with a mounting groove, and the controller and the gas branch module are both provided with plug-in connectors, so that the controller and the gas branch module can be plug-connected and installed on the base.

16. The gas splitter according to claim 10, characterized in that: The gas splitter further comprises a mounting frame, and the base is detachably fixed on the mounting frame.

17. A semiconductor processing device, characterized in that: Include: a reaction chamber; and The gas splitter according to any one of claims 1 to 16, wherein the gas splitter is connected to the reaction chamber for gas supply.

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