Multistage degassing device based on membrane structure

Abstract

The utility model relates to a multi-stage degassing device based on a membrane structure, and belongs to the technical field of liquid degassing. The multi-stage degassing device based on the membrane type structure comprises a liquid path structure, a degassing membrane and a gas path structure, and the downstream of a gas path main path is connected with negative pressure equipment. The whole device is arranged to be of a gas-liquid separation structure with a gas path and a liquid path separated, grading routes with height difference are arranged in the liquid path structure and the gas path structure respectively, and a multi-stage efficient degassing method is formed. In a preferable scheme, the gas path structure forms a three-stage gas path structure, that is, the silk screen, the gas path branch and the gas path main path 1 form different grades of gas path structures, and the silk screen is in direct contact with the degassing film, so that the structure is more beneficial to the degassing process of the gas, the efficiency is improved, the gas path branch is close to the degassing film, and a multi-stage degassing method is formed; and the whole mobile phase is effectively degassed.

Description

Technical Field

[0001] The utility model relates to a multi-stage degassing device based on a membrane structure, in particular to a degassing device applied to a mobile phase in a liquid path of an equipment. Under the action of a vacuum pump system, bubbles in the mobile phase in the liquid path pass through a high-precision degassing membrane and are discharged, thereby achieving degassing of the mobile phase in the liquid path. Background Art

[0002] The gas dissolved in the mobile phase of the equipment often has a negative impact on the entire system, which is mainly manifested in the following aspects: the gas in the mobile phase of the liquid circuit will make the operation of the system unstable and cause the flow rate to be unstable, thus generating large pressure fluctuations; the bubbles in the mobile phase of the liquid circuit are inconsistent with the compression coefficient of the liquid, resulting in poor accuracy and precision of the pump suction volume, thereby affecting the pump's pipetting accuracy; the sample and the bubbles undergo oxidation reaction or degradation, etc. Therefore, it is very necessary to degas the entire liquid circuit system to reduce the negative impact of the dissolved gas in the mobile phase of the liquid circuit on the analysis and improve the precision and reliability of the entire system.

[0003] At present, degassing technology mainly relies on tubular structure degassing, and its technical feature is that the degassing structure is composed of multiple degassing tubes. The tubular structure of this structure is made of special materials. The gas in the mobile phase can pass through the pipeline under the action of the vacuum pump system, and the vacuum pump system discharges the bubbles out of the cavity to complete the degassing. However, this tubular degassing structure has an obvious disadvantage. The large bubbles exist in the state of cylinders. When the flow rate of the liquid path is high, the contact area between the bubbles and the degassing membrane per unit time is small, the degassing efficiency is low, and it is difficult to remove the bubbles completely, which seriously affects the degassing efficiency of the entire system.

[0004] For example, a Chinese patent with application number CN201822001848.2 discloses a membrane degassing device, which achieves degassing by setting up a first-stage degassing membrane assembly, a second-stage degassing membrane assembly, a vacuum pump and other components. However, the existing liquid degassing method is relatively traditional, and no good bubble aggregation and pressure difference are formed at the position of the degassing membrane, which makes the degassing efficiency low and it is difficult to remove the bubbles completely. Utility Model Content

[0005] Therefore, the technical problem to be solved by the utility model is to overcome the defects of the prior art that there is no pressure difference between the two sides of the degassing membrane, resulting in low degassing efficiency and difficulty in removing bubbles completely, thereby providing a multi-stage degassing device based on a membrane structure, which includes a liquid path structure, a degassing membrane and a gas path structure;

[0006] A liquid path structure, comprising a main liquid path and a branch liquid path;

[0007] A degassing membrane, wherein the liquid branch is arranged on one side of the degassing membrane;

[0008] The gas path structure is arranged on the other side of the degassing membrane, and the gas path structure has a gas path branch and a gas path main path, and the downstream of the gas path main path is connected to a negative pressure device.

[0009] Preferably, a thin layer cavity is arranged downstream of the main liquid path, and the liquid path grid boss arranged in the thin layer cavity is divided to form N liquid path branches.

[0010] Preferably, the cross-sectional height of the main liquid path is H1, the cross-sectional height of the branch liquid path is H2, and the height difference between H1 and H2 is △Ha, thereby forming a two-level liquid path layered structure with a height difference to form a uniform and flat thin layer liquid surface in the thin layer cavity.

[0011] Preferably, a wire mesh is provided between the degassing membrane and the gas path structure;

[0012] A sealing ring is arranged between the liquid path structure and the gas path structure so that the entire structure is sealed to prevent leakage.

[0013] Preferably, the air path structure is an open-loop structure at the head end and a closed structure at the tail end, that is, the head end is the air path outlet, and the tail end merges with the wire mesh to form a closed form; the air path outlet is connected to the negative pressure device, and the negative pressure device is a vacuum pump.

[0014] Preferably, the gas path structure has a dispersion cavity, and the dispersion cavity is divided into M gas path branches by the gas path grid boss.

[0015] Preferably, the gas path structure is divided into three levels, and there are two height differences ΔHb and ΔHc between the three levels, that is, the height difference between the main gas path and the gas path branch is ΔHb, and the height difference between the gas path branch and the wire mesh is ΔHc.

[0016] Preferably, the N liquid path branches in the liquid path structure and the M gas path branches in the gas path structure are attached to form a cross structure.

[0017] The utility model also provides a degassing method of a multi-stage degassing device based on a membrane structure, characterized in that a liquid composed of a mobile phase enters the liquid path structure through the main liquid path, the mobile phase contains a number of gas bubbles, and then the mobile phase is dispersed and flows into N liquid path branches, and the liquid in each branch is dispersed to form a thin layer of liquid surface, and the gas bubbles therein will expand into thin layer bubbles when passing through the thin layer channel to increase the contact area between the bubbles and the degassing membrane, and then enter the gas path structure after passing through the degassing membrane under the action of negative pressure, and pass through the gas path branches and the main gas path in sequence, and are discharged to the negative pressure equipment.

[0018] Preferably, the gas permeated through the degassing membrane first passes through the screen, then converges through M gas path branches, and finally is uniformly discharged from the main gas path; the preferred gases are O2 and N2. It should be noted that the gas is not limited to O2 and N2, O2 and N2 are just the most common types of bubbles, and can also be other types of gases such as air, H2, CO2, etc.

[0019] The beneficial effects of the technical solution of the utility model are:

[0020] (1) The entire device is configured as a gas-liquid separation structure in which a gas path and a liquid path are separated, and a graded route with a height difference is respectively arranged in the liquid path structure and the gas path structure to form a multi-stage efficient degassing method.

[0021] (2) Preferably, the liquid path structure of the utility model forms a two-level structure, so that the bubbles are more easily gathered and dispersed on the upstream side of the degassing membrane, and the gas path structure forms a three-level gas path structure, that is, the wire mesh, the gas path branch and the gas path main path form gas path structures of different levels. The wire mesh is in direct contact with the degassing membrane. Such a structure is more conducive to the gas degassing process and improves efficiency; the gas path branch is close to the degassing membrane. Such an organizational form allows the gas to pass through the high-precision degassing membrane for penetration filtration, forming a multi-stage degassing method, and effectively degassing the entire mobile phase.

[0022] (3) N liquid branch paths are set in the liquid path structure to fully ensure the uniformity and flatness of the liquid surface and effectively disperse the gas bubbles in the mobile phase to the entire liquid path.

[0023] (4) M gas path branches are arranged in the gas path structure to facilitate the uniform spreading of the vacuum gas path, so as to form a multi-stage gas path and improve the degassing efficiency.

[0024] (5) The high-precision degassing membrane in the degassing device is sandwiched between the liquid path structure and the gas path structure, and can only filter gas bubbles. The wire mesh is located between the high-precision degassing membrane and the gas path structure, and plays a role in supporting the high-precision degassing membrane.

[0025] (6) When the degassing device is assembled, the N liquid branches in the liquid path structure and the M gas branches in the gas path structure are fitted together to form a cross structure, which facilitates the uniform pressure distribution of the high-precision degassing membrane between the liquid path structure and the gas path structure, fully ensuring that the high-precision degassing membrane is flat and does not deform under the action of the vacuum pump system, effectively reducing the risk of deformation failure of the high-precision degassing membrane. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 This is a multi-stage degassing principle diagram of an embodiment of a multi-stage degassing device based on a membrane structure of the utility model;

[0028] Figure 2 It is a schematic diagram of the degassing principle of a tubular structure in the prior art;

[0029] Figure 3 It is a schematic diagram of the liquid circuit structure of an embodiment of a multi-stage degassing device based on a membrane structure of the utility model;

[0030] Figure 4 It is a cross-sectional view of the liquid path structure of an embodiment of a multi-stage degassing device based on a membrane structure of the utility model;

[0031] Figure 5 This is a schematic diagram of the gas circuit structure of an embodiment of a multi-stage degassing device based on a membrane structure of the utility model;

[0032] Figure 6 It is a cross-sectional view of the gas path structure of an embodiment of a multi-stage degassing device based on a membrane structure of the utility model;

[0033] Figure 7 It is a schematic diagram of the cross-combination of the liquid circuit structure and the gas circuit structure of an embodiment of the multi-stage degassing device based on a membrane structure of the utility model;

[0034] Description of reference numerals:

[0035] 1-Main gas circuit; 2-Main liquid circuit inlet; 3.-Main liquid circuit outlet; 4-Liquid circuit structure; 5-Gas circuit structure; 6-Degassing membrane; 7-Wire mesh; 8-Sealing ring; 9-Mobile phase S; 10-Gas bubbles; 11-Gas circuit outlet; 12-Liquid circuit inlet; 13-Liquid circuit outlet; 14-Tubular degassing structure; 15-Main liquid circuit; 16-Liquid circuit grid boss; 17-First liquid circuit branch; 18-Second liquid circuit branch; 19-Nth liquid circuit branch; 20-Liquid circuit branch; 21-Vacuum pump system interface; 22-Gas circuit grid boss; 23-First gas circuit branch; 24-Second gas circuit branch; 25-Nth gas circuit branch; 26-Closed end; 27-Gas circuit branch; 28-Vacuum pump system. DETAILED DESCRIPTION

[0036] The following embodiments are provided for a better understanding of the present invention, but are not limited to the best implementation mode described herein, and do not constitute limitations on the content and protection scope of the present invention. Any product identical or similar to the present invention obtained by anyone under the inspiration of the present invention or by combining the features of the present invention with other prior arts shall fall within the protection scope of the present invention.

[0037] If no specific experimental steps or conditions are specified in the examples, the conventional experimental steps or conditions described in the literature in the field can be used. If no manufacturer is specified for the reagents or instruments used, they are all conventional reagent products that can be obtained commercially.

[0038] Comparative Example 1:

[0039] like Figure 2 As shown, it is an existing degassing device, which has a mobile phase S-9, gas bubbles 10, a gas path outlet 11, a liquid path inlet 12, a liquid path outlet 13, and a tubular degassing structure 14. In actual application, the mobile phase S-9 enters from the liquid path inlet 12, moves in the tubular degassing structure 14 and gradually completes the permeation degassing. After the gas bubble 10 permeates, it is discharged from the gas path outlet 11 on one side. In this existing degassing method, when the liquid path flow rate is large, the contact area between the bubble and the degassing membrane per unit time is small, the degassing efficiency is low, and it is difficult to remove the bubbles completely, which seriously affects the degassing efficiency of the entire system.

[0040] Embodiment 1:

[0041] like Figure 1 As shown, this embodiment provides a multi-stage degassing device based on a membrane structure, which includes a liquid path structure 4, a degassing membrane 6 and a gas path structure 5;

[0042] The liquid path structure 4 has a main liquid path 15 and a branch liquid path 20; Figure 3 A first liquid branch 17, a second liquid branch 18 and an Nth liquid branch 19 are formed;

[0043] The liquid branch 20 is arranged on one side of the degassing membrane 6; due to the pressure difference between the liquid main path 15 and the liquid branch 20, the liquid branch 20 close to the degassing membrane 6 has a stronger pressure, so bubbles are more likely to gather near the position of the degassing membrane 6 for penetration.

[0044] The gas path structure 5 is arranged on the other side of the degassing membrane 6, and the gas path structure 5 has a gas path branch 27 and a gas path main path 1. The downstream of the gas path main path 1 is connected to a negative pressure device, such as a vacuum pump system 28. Specifically, Figure 5As shown, the air branch 27 has a first air branch 23, a second air branch 24 and an Nth air branch 25; a pressure difference is also formed between the air branch 27 and the main air path 1, and the air branch 27 close to the degassing membrane 6 has a stronger pressure, so bubbles are more likely to penetrate from the degassing membrane 6 and enter the air branch 27.

[0045] In the degassing method of the multi-stage degassing device based on the membrane structure of this embodiment, the liquid composed of the mobile phase enters the liquid path structure 4 through the main liquid path 15, and the mobile phase contains a number of gas bubbles. Then the mobile phase is dispersed and flows into N liquid path branches 20. The liquid in each branch is dispersed to form a thin layer of liquid surface. When the gas bubbles pass through the thin layer channel, the bubbles will be expanded into thin layers of bubbles to increase the contact area between the bubbles and the degassing membrane. Then, under the action of negative pressure, they pass through the degassing membrane and enter the gas path structure 5, and pass through the gas path branch 27 and the main gas path 1 in sequence. And discharged to the negative pressure equipment.

[0046] Embodiment 2:

[0047] Preferably, a thin layer cavity is arranged downstream of the main liquid path 15, and the liquid path grid boss 16 arranged in the thin layer cavity is divided to form N liquid path branches 20. The thin layer cavity is divided by the liquid path grid boss 16 arranged at intervals, thereby forming N liquid path branches 20 in multiple independent areas, so that the pressure at this position becomes larger, making it easier for bubbles to penetrate at the position of the degassing membrane.

[0048] Preferably, if Figure 4 As shown, the cross-sectional height of the main liquid path 15 is H1, the cross-sectional height of the branch liquid path 20 is H2, and the height difference between H1 and H2 is △Ha, thereby forming a two-level liquid path layered structure with a height difference to form a uniform and flat thin layer liquid surface in the thin layer cavity.

[0049] Preferably, if Figure 5 As shown, a wire mesh 7 is provided between the degassing membrane and the gas path structure 5; the high-precision degassing membrane 6 in the degassing device is clamped between the liquid path structure 4 and the gas path structure 5, and can only filter gas bubbles. The wire mesh 7 is located between the high-precision degassing membrane 6 and the gas path structure 5, and plays a role in supporting the high-precision degassing membrane 6. When the bubble infiltration is performed, the degassing membrane 6 is always in a unidirectional force state, that is, it is continuously compressed in the direction of the gas path structure 5. The wire mesh 7 provided here can stabilize the degassing membrane 6 and prevent the degassing membrane 6 from deformation and damage.

[0050] A sealing ring 8 is arranged between the liquid path structure 4 and the gas path structure 5 so that the entire structure is sealed to prevent leakage.

[0051] Preferably, the gas path structure 5 is a structure with an open loop at the head end and a closed end, that is, a closed end 26 is formed, that is, the head end is the gas path outlet, and the end merges with the wire mesh 7 to form a closed form; the gas path outlet is connected to the negative pressure device, and the negative pressure device is a vacuum pump system 28. The vacuum pump system 28 provides negative pressure, and then the air flow is sequentially carried out through the gas path main path 1, the gas path branch 27, the wire mesh 7, the degassing membrane 6, and the liquid path structure 4, and the bubble penetration is carried out at the position of the degassing membrane 6.

[0052] Preferably, the gas path structure 5 has a dispersion cavity, and the dispersion cavity is divided into M gas path branches 27 by the gas path grid boss 22 .

[0053] Preferably, if Figure 6 As shown, the gas path structure 5 is divided into three levels, and there are two height differences △Hb and △Hc between the three levels, that is, the height difference between the main gas path 1 and the gas path branch 27 is △Hb, and the height difference between the gas path branch 27 and the wire mesh 7 is △Hc. The wire mesh 7 not only stabilizes the degassing membrane, but also plays a role in pressure difference, that is, the wire mesh 7 forms a large local pressure through a plurality of densely distributed small holes, so a pressure difference is formed between the wire mesh 7 and the gas path branch 27, and a pressure difference is also formed between the gas path branch 27 and the main gas path 1, so a three-level pressure difference is formed, which plays a better bubble penetration filtration effect.

[0054] In this embodiment, the entire device is set as a gas-liquid separation structure in which the gas path and the liquid path are separated, and graded routes with height differences are set in the liquid path structure 4 and the gas path structure 5, respectively, to form a multi-stage efficient degassing method. N liquid path branches 20 are set in the liquid path structure 4 to fully ensure the uniformity and flatness of the liquid surface and effectively disperse the gas bubbles in the mobile phase to the entire liquid path. M gas path branches 27 are set in the gas path structure 5 to facilitate the uniform spreading of the vacuum gas path so as to form a multi-stage gas path and improve the degassing efficiency.

[0055] Preferably, if Figure 7 As shown, the N liquid branch paths 20 in the liquid path structure 4 and the M gas path branches 27 in the gas path structure 5 are fitted together to form a cross structure. When the degassing device is assembled, the N liquid branch paths 20 in the liquid path structure 4 and the M gas path branches 27 in the gas path structure 5 are fitted together to form a cross structure, which facilitates the uniform pressure distribution of the high-precision degassing membrane 6 between the liquid path structure 4 and the gas path structure 5, fully ensuring that the high-precision degassing membrane 6 is flat and does not deform under the action of the vacuum pump system 28, and effectively reducing the risk of deformation failure of the high-precision degassing membrane 6.

[0056] Preferably, the gas permeated through the degassing membrane first passes through the screen 7, then converges through the M gas path branches 27, and finally is uniformly discharged from the gas path main path 1; the gas is O2 and N2. It should be noted that the gas is not limited to O2 and N2, O2 and N2 are just the most common types of bubbles, and can also be other types of gas such as air, H2, CO2, etc.

[0057] The degassing method steps of the multi-stage degassing device of this embodiment are as follows:

[0058] Step 1: The liquid composed of the mobile phase enters the liquid path structure 4 through the main liquid path 15. The mobile phase contains a number of gas bubbles. Then the mobile phase is dispersed and flows into N liquid path branches 20. The liquid in each branch is dispersed to form a thin layer of liquid surface. The gas bubbles therein will expand into a thin layer of bubbles when passing through the thin layer channel to increase the contact area between the bubbles and the degassing membrane 6. Then, under the negative pressure of the vacuum pump system 28, the bubbles pass through the degassing membrane 6 and enter the gas path structure 5, and are discharged outside the degassing device.

[0059] Step 2: In the liquid path structure, the cross-sectional height of the main liquid path is defined as H1, the cross-sectional height of the liquid path branch 20 is defined as H2, the height difference between H1 and H2 is △Ha, and the entire liquid path branch 20 is divided into N liquid path branches by the liquid path grid boss 16. By the above division method, a two-level liquid path layered structure with a height difference is formed to form a uniform and flat thin layer of liquid surface.

[0060] Step 3: In the gas path structure 5, the cross-sectional height of the main gas path is defined as H3, the cross-sectional height of the gas path branch 27 is defined as H4, the height difference between H3 and H4 is △Hb, and the entire gas path branch 27 is divided into M gas path branches 25 by the gas path grid boss, so that the vacuum gas path is evenly spread. The thickness of the screen 7 is defined as H5, and the height difference between H4 and H5 is △Hc. By the above division method, a three-level gas path hierarchical structure with height difference is formed to form a multi-level gas path and improve the degassing efficiency.

[0061] Step 4: Define the mobile phase as S, and the gas bubbles 10 in the mobile phase as O2 and N2. Under the continuous operation of the vacuum pump system, degassing will be carried out along the following routes: thin layer liquid surface, breathable membrane, screen 7, M gas branch lines 27, main gas line 1, and the main gas line 1 is connected to the vacuum pump system, which provides power for degassing.

[0062] The principle of the multi-stage degassing device of the utility model is further described as follows:

[0063] The flow route of the entire liquid circuit is: the mobile phase S enters the liquid circuit structure from the main liquid circuit inlet 2, the mobile phase S is mixed with O2 and N2, and is dispersed from the main liquid circuit 15 into N thin-layer liquid circuit branches 20, at which time the mobile phase S is evenly flattened, and the O2 and N2 therein are also unfolded and dispersed into each liquid circuit branch 20. Under the action of the gas circuit structure 5 and the degassing membrane, after the mobile phase S passes through the N liquid circuit branches 20, O2 and N2 have been fully absorbed into the gas circuit structure 5 and discharged. Subsequently, the completely degassed mobile phase S is output from the main liquid circuit outlet 3.

[0064] The flow route of the entire gas circuit is: O2 and N2 filtered out by the high-precision degassing membrane first pass through the screen 7, then converge through M gas branch roads 27, and finally are uniformly discharged from the main gas road 1 to complete the degassing.

[0065] The liquid path structure 4 has an open-loop structure at both ends, that is, the first end is the main liquid path inlet 2, and the end is the main liquid path outlet 3. The liquid path structure 4 is divided into two levels, and there is a certain height difference △Ha between the two levels, that is, the height difference between the cross-sectional height of the main liquid path 15 and the cross-sectional height of the liquid path branch 20 is △Ha. After the entire liquid path branch 20 is divided into N liquid path branches 20 by the liquid path grid boss 16, and in view of the small cross-sectional height H2 of the liquid path branch 20, the liquid is dispersed and flattened from one main path into N liquid path branches 20, forming a thin layer of liquid surface, forming a two-level liquid path layered structure with a height difference. This setting is to convert the liquid path into a thin layer of flat liquid surface, and secondly, it is conducive to evenly distributing the gas bubbles in the liquid surface throughout the planar liquid path.

[0066] The gas path structure 1 is a structure with an open loop at the head end and a closed end, that is, the head end is the gas path outlet, and the end merges with the wire mesh 7 to form a closed form. The gas path structure 5 is divided into three-level layers, and there are two height differences △Hb and △Hc between the three levels, that is, the height difference between the main gas path 1 and the gas path branch 27 is △Hb, and the height difference between the gas path branch 27 and the wire mesh 7 is △Hc. The entire gas path branch 27 is divided into M gas path branches 27 by the gas path grid boss 16. Under the continuous action of the vacuum pump system, the gases O2 and N2 in the mobile phase S are dispersed into the M gas path branches 27 after passing through the wire mesh, so that the vacuum gas path is evenly spread out, forming a three-level gas path layered structure with a height difference to form a multi-level gas path, and then each gas path branch 27 merges into the main gas path 1 for exhaust and degassing.

[0067] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention of the utility model.

Claims

1. A multi-stage degassing device based on a membrane structure, characterized in that: include: A liquid path structure (4) having a main liquid path (15) and a branch liquid path (20); A degassing membrane (6), wherein the liquid branch (20) is arranged on one side of the degassing membrane (6); The gas path structure (5) is arranged on the other side of the degassing membrane (6), and the gas path structure (5) has a gas path branch (27) and a gas path main path (1), and the downstream of the gas path main path (1) is connected to a negative pressure device.

2. The multi-stage degassing device based on a membrane structure according to claim 1, characterized in that: A thin layer cavity is arranged downstream of the main liquid path (15), and a liquid path grid boss (16) arranged in the thin layer cavity is divided to form N liquid path branches (20).

3. The multi-stage degassing device based on a membrane structure according to claim 2, characterized in that: The cross-sectional height of the main liquid path (15) is H1, the cross-sectional height of the branch liquid path (20) is H2, and the height difference between H1 and H2 is ΔHa, thereby forming a two-level liquid path layered structure with a height difference, so as to form a uniform and flat thin layer liquid surface in the thin layer cavity.

4. The multi-stage degassing device based on a membrane structure according to claim 1, characterized in that: A wire mesh (7) is arranged between the degassing membrane (6) and the gas path structure (5); A sealing ring (8) is provided between the liquid path structure (4) and the gas path structure (5) so that the entire structure is sealed to prevent liquid leakage.

5. The multi-stage degassing device based on a membrane structure according to claim 4, characterized in that: The air path structure (5) is an open-loop structure at the front end and a closed structure at the rear end, that is, the front end is the air path outlet, and the rear end merges with the wire mesh (7) to form a closed form; the air path outlet is connected to a negative pressure device, and the negative pressure device is a vacuum pump system (28).

6. The multi-stage degassing device based on a membrane structure according to claim 5, characterized in that: The gas path structure (5) has a dispersion cavity, and the dispersion cavity is divided into M gas path branches (27) by a gas path grid boss (22).

7. The multi-stage degassing device based on a membrane structure according to claim 6, characterized in that: The gas path structure (5) is divided into three levels, and there are two height differences ΔHb and ΔHc between the three levels, that is, the height difference between the main gas path (1) and the gas path branch (27) is ΔHb, and the height difference between the gas path branch (27) and the wire mesh (7) is ΔHc.

8. The multi-stage degassing device based on a membrane structure according to claim 6, characterized in that: The N liquid path branches (20) in the liquid path structure (4) and the M gas path branches (27) in the gas path structure (5) are attached to form a cross structure.

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