Purification pretreatment device for high-purity electronic rare gas

Abstract

The utility model relates to a purification pretreatment device for high-purity electronic rare gas. The purification pretreatment device comprises a filtering system and an adsorption system which are arranged in sequence, the filtering system comprises a filtering frame, a first air inlet pipe and a first air outlet pipe are arranged at the left and right ends of the filtering frame respectively, and a multi-stage filtering assembly is arranged in the filtering frame; the adsorption system comprises an adsorption tank, a second gas inlet pipe and a second gas outlet pipe are arranged on one side of the bottom and one side of the top of the adsorption tank respectively, a liquid outlet pipe is arranged in the center of the bottom of the adsorption tank, the second gas inlet pipe transversely extends into the adsorption tank, and the end, located in the adsorption tank, of the second gas inlet pipe communicates with a vertically-arranged buffer pipe; a baffle is arranged at the top of the buffer pipe, a first gas-liquid separation assembly is arranged in the buffer pipe, and an adsorption assembly is arranged above the baffle in the adsorption tank. The device has the beneficial effects of high purification efficiency, simplicity in operation and the like.

Description

Technical Field

[0001] The utility model relates to a gas purification pretreatment device, in particular to a high-purity electronic rare gas purification pretreatment device, belonging to the technical field of gas purification. Background Art

[0002] In semiconductor manufacturing, optical fiber production and other high-tech fields, extremely high-purity rare gases (such as argon, neon, helium, krypton, xenon, etc.) are required. For example, helium is used for leak detection, and argon is used for semiconductor manufacturing. These applications have extremely strict requirements on the impurity content in the gas. Rare gases may contain impurities such as moisture, oxygen, nitrogen, etc., which are difficult to meet the manufacturing needs of high-precision electronic products. Therefore, rare gases need to be purified before use.

[0003] The present application develops a purification pretreatment device for high-purity electronic rare gas to improve the purity of the rare gas and facilitate subsequent fine purification treatment, which has important practical application value. Utility Model Content

[0004] The utility model mainly aims at the above problems existing in the prior art and provides a purification pretreatment device for high-purity electronic rare gas.

[0005] The purpose of this utility model is mainly achieved through the following solutions:

[0006] A purification pretreatment device for high-purity electronic rare gas comprises a filtration system and an adsorption system which are arranged in sequence; the filtration system comprises a filter frame, a first air inlet pipe and a first air outlet pipe are respectively provided at the left and right ends of the filter frame, and a multi-stage filtration assembly is arranged in the filter frame; the adsorption system comprises an adsorption tank, a second air inlet pipe and a second air outlet pipe are respectively provided at the bottom side and the top side of the adsorption tank, and a liquid outlet pipe is provided at the bottom center of the adsorption tank, the second air inlet pipe extends horizontally into the adsorption tank, and the end of the second air inlet pipe located in the adsorption tank is connected to a vertically arranged buffer pipe, a baffle is provided at the top of the buffer pipe, and a first gas-liquid separation assembly is provided in the buffer pipe, and an adsorption assembly is provided above the baffle in the adsorption tank.

[0007] Preferably, one end of the first air inlet pipe is connected to the gas cylinder group, and an air inlet pipeline is connected between the first air outlet pipe and the second air inlet pipe, and a pump body is installed on the air inlet pipeline.

[0008] Preferably, the multi-stage filter assembly comprises a metal filter, a medium efficiency filter and a high efficiency filter which are sequentially arranged along the flow direction of the gas.

[0009] Preferably, the baffle is an arc-shaped plate, and the inner side of the baffle is connected to the outer side wall of the buffer tube through a support rod, and a gap for gas to pass through is provided between the baffle and the buffer tube.

[0010] Preferably, a cylinder is provided on the inner wall of one end of the second air inlet pipe communicating with the buffer tube, a through hole is provided in the middle of the cylinder, and a plurality of puncture needles are provided on the inner wall of the through hole.

[0011] Preferably, the first gas-liquid separation component comprises an inclined separation plate, and a plurality of first air holes are provided on the separation plate.

[0012] Preferably, the adsorption assembly comprises a first gas-liquid separation layer, an adsorption layer and a second gas-liquid separation layer arranged in sequence from bottom to top.

[0013] Preferably, the first gas-liquid separation layer and the second gas-liquid separation layer adopt a wire mesh demister and a fiber bed demister respectively.

[0014] Preferably, the adsorption layer includes a bottom plate, a top plate, a breathable tube and a filler layer, the edge of the bottom plate is fixedly connected to the inner wall of the adsorption tank, the bottom of the breathable tube is fixedly installed in the middle of the upper surface of the bottom plate, the middle of the lower surface of the top plate is fixedly connected to the upper surface of the breathable tube, and the filler layer is filled between the bottom plate and the top plate, and covers the outer wall of the breathable tube.

[0015] Preferably, the bottom of the adsorption tank is provided with supporting feet, and the top of the adsorption tank is provided with lifting ears.

[0016] Therefore, compared with the prior art, the utility model has the following advantages:

[0017] (1) The utility model adopts a multi-stage filtration system through the provided filtration system, which facilitates the step-by-step removal of particulate impurities;

[0018] (2) The utility model can adsorb moisture and some organic substances in the gas through the adsorption component, can effectively remove various impurities in the gas, improve the purity of the gas, and meet the demand of the electronics industry for high-purity rare gases. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the utility model;

[0020] Figure 2 It is a structural schematic diagram of the filtration system in the utility model;

[0021] Figure 3 It is a structural schematic diagram of the adsorption system in the utility model;

[0022] Figure 4 It is a structural schematic diagram of the second air intake pipe and the buffer pipe in the utility model;

[0023] Figure 5 yes Figure 4Enlarged view of point A in the middle.

[0024] Illustrations: 1-filtration system, 2-adsorption system, 3-filtration frame, 4-first air inlet pipe, 5-first air outlet pipe, 6-adsorption tank, 7-second air inlet pipe, 8-second air outlet pipe, 9-liquid outlet pipe, 10-buffer tube, 11-baffle, 12-air inlet pipe, 13-pump body, 14-metal filter, 15-medium efficiency filter, 16-high efficiency filter, 17-support rod, 18-cylinder body, 19-through hole, 20-puncture needle, 21-separation plate, 22-first air permeable hole, 23-first gas-liquid separation layer, 24-second gas-liquid separation layer, 25-bottom plate, 26-top plate, 27-air permeable cylinder, 28-packing layer, 29-support foot, 30-hanging ear, 31-demist net. DETAILED DESCRIPTION

[0025] The technical solution of the utility model is further described in detail below through specific embodiments and in combination with the accompanying drawings. It should be understood that the implementation of the utility model is not limited to the following embodiments, and any form of modification and / or change made to the utility model will fall within the protection scope of the utility model.

[0026] In the present invention, unless otherwise specified, all parts and percentages are weight units, and the equipment and raw materials used can be purchased from the market or are commonly used in the field. The methods in the following embodiments, unless otherwise specified, are conventional methods in the field. The components or equipment in the following embodiments, unless otherwise specified, are universal standard parts or components known to those skilled in the art, and their structures and principles are known to those skilled in the art through technical manuals or conventional experimental methods.

[0027] Embodiment 1:

[0028] like Figure 1 As shown, the utility model provides a technical solution, a purification pretreatment device for high-purity electronic rare gas, which is composed of a filtration system 1 and an adsorption system 2 arranged in sequence. The filtration system 1 adopts multi-stage filtration to remove particulate impurities step by step, and the adsorption system 2 can adsorb moisture and some organic matter in the gas to improve the purity of the gas.

[0029] The filter system 1 comprises a filter frame 3 , a first air inlet pipe 4 and a first air outlet pipe 5 are respectively disposed at the left and right ends of the filter frame 3 , and a multi-stage filter assembly is disposed inside the filter frame 3 .

[0030] The above-mentioned adsorption system 2 includes an adsorption tank 6, which is respectively provided with a second air inlet pipe 7 and a second air outlet pipe 8 on the bottom side and the top side of the adsorption tank 6, and a liquid outlet pipe 9 is provided in the center of the bottom of the adsorption tank 6. The second air inlet pipe 7 extends horizontally into the adsorption tank 6, and the connection between the second air inlet pipe 7 and the adsorption tank 6 should be sealed, and the end of the second air inlet pipe 7 located in the adsorption tank 6 is connected to a vertically arranged buffer pipe 10, a baffle 11 is provided on the top of the buffer pipe 10, and a first gas-liquid separation component is provided in the buffer pipe 10, and an adsorption component is provided above the baffle 11 in the adsorption tank 6.

[0031] Specifically, one end of the first air inlet pipe 4 is connected to a gas cylinder group, which is used to store the rare gas to be purified, and an air inlet pipe 12 is connected between the first air outlet pipe 5 and the second air inlet pipe 7, and a pump body 13 is installed on the air inlet pipe 12.

[0032] Specifically, support feet 29 are welded at the four corners of the bottom of the adsorption tank 6 to provide a good supporting effect, and a pair of lifting ears 30 are symmetrically welded at the top of the adsorption tank 6 to facilitate the lifting and transfer of the adsorption tank 6 .

[0033] Embodiment 2:

[0034] like Figure 1 , 2 As shown, the utility model provides another technical solution, a purification pretreatment device for high-purity electronic rare gas, which is different from Example 1 in that the multi-stage filtering component is composed of a metal filter 14, a medium-efficiency filter 15 and a high-efficiency filter 16 which are arranged in sequence along the flow direction of the gas.

[0035] The metal filter 14 is used as a pre-filter to initially intercept large dust particles and other impurities in the gas, reducing the burden on subsequent filters; the medium-efficiency filter 15 further filters out 1-5 μm dust particles and various suspended matter in the air, effectively protecting the downstream high-efficiency filter from large dust particles; the high-efficiency filter 16 is the last line of defense for filtration and can remove particles below 0.5 μm in the air, thereby removing particulate impurities step by step, thereby improving the filtering effect and service life.

[0036] Embodiment 3:

[0037] like Figure 1 , 4As shown in Figure 5, the utility model provides another technical solution, a purification pretreatment device for high-purity electronic rare gas, which is different from Example 1 in that the baffle 11 is an arc-shaped plate with its arc-shaped recess facing downward, and the inner side of the baffle 11 is bolted or welded to the outer wall of the buffer tube 10 through a support rod 17, four support rods 17 are evenly arranged along the axis of the buffer tube 10, and a gap for gas to pass through is provided between the baffle 11 and the buffer tube 10. The setting of the baffle 11 prevents the liquid of the upper adsorption component from flowing into the buffer tube 1.

[0038] Specifically, a cylinder 18 is fixedly installed on the inner wall of one end of the second air inlet pipe 7 connected to the buffer tube 10, and a through hole 19 is provided in the middle of the cylinder 18. In this embodiment, the through hole 19 is a truncated cone-shaped hole that is larger on the left and smaller on the right, and a plurality of puncture needles 20 are evenly provided on the inner wall of the through hole 19. When the gas flows through the cylinder 18, it will hit the side wall of the through hole 19, thereby separating the gas. In addition, the puncture needles 20 can puncture small bubbles in the gas, thereby further realizing the separation of the gas phase and the liquid phase.

[0039] Specifically, the first gas-liquid separation component includes an inclined separation plate 21, which corresponds to the gas outlet of the second air inlet pipe. The edge of the separation plate 21 is welded to the inner wall of the buffer tube 10, and the separation plate 21 gradually tilts downward from one end close to the second air inlet pipe to the end away from the second air inlet pipe. A plurality of first air holes 22 are evenly arranged on the separation plate 21. After the gas comes out of the second air inlet pipe, it hits the separation plate 21, so that larger droplets or particles in the gas are captured and fall to the bottom of the adsorption tank, and the gas phase flows out from the upper end of the buffer tube 1.

[0040] Embodiment 4:

[0041] like Figure 1 , 3 As shown, the utility model provides another technical solution, a purification pretreatment device for high-purity electronic rare gas, which is different from Example 1 in that the above-mentioned adsorption component is composed of a first gas-liquid separation layer 23, an adsorption layer and a second gas-liquid separation layer 24 arranged in sequence from bottom to top.

[0042] Specifically, the first gas-liquid separation layer 23 and the second gas-liquid separation layer 24 respectively use a wire mesh demister and a fiber bed demister; the wire mesh demister further intercepts tiny droplets and particles in the gas through a fine metal wire mesh to improve the purification effect; in addition, the gas enters the fiber bed demister, and utilizes the high specific surface area and adsorption properties of the fiber material to deeply purify the residual impurities in the gas, thereby ensuring that the outlet gas has a high purity.

[0043] Specifically, the adsorption layer is composed of a bottom plate 25, a top plate 26, a breathable cylinder 27 and a packing layer 28. The edge of the bottom plate 25 is fixedly connected to the inner wall of the adsorption tank 6. In this embodiment, the bottom plate 25 is an arc-shaped plate with a notch facing downward. The bottom of the breathable cylinder 27 is fixedly installed in the middle of the upper surface of the bottom plate 25, and a demisting net 31 is embedded in the middle of the bottom plate 25. The bottom of the breathable cylinder 27 is open and the top is closed. A plurality of second breathable holes are evenly opened on the side wall of the breathable cylinder 27. The middle of the lower surface of the top plate 26 is connected to the upper surface of the breathable cylinder 27. The top plate 26 is fixedly connected by bolts, and a circle of filter screen is provided on the edge of the lower surface. The packing layer 28 is filled between the bottom plate 25 and the top plate 26, and covers the outer wall of the air cylinder 27. The gas passes through the first gas-liquid separation layer 23, the demisting net 31, the air cylinder 27, the packing layer 28 and the filter screen, and then flows out from the gap between the filter screen and the inner wall of the adsorption tank and reaches the second gas-liquid separation layer 24. The above-mentioned packing layer 28 adopts one or a combination of activated carbon, molecular sieve or silica gel to adsorb moisture and some organic matter in the gas.

[0044] The utility model provides a purification pretreatment device for high-purity electronic rare gases. Through the provided filtering system, multi-stage filtering is adopted to facilitate the step-by-step removal of particulate impurities. Through the provided adsorption components, moisture and some organic substances in the gas can be adsorbed, various impurities in the gas can be removed efficiently, the purity of the gas can be improved, and the demand for high-purity rare gases in the electronics industry can be met.

[0045] It should be understood that this embodiment is only used to illustrate the present invention and is not used to limit the scope of the present invention. In addition, it should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the claims attached to this application.

Claims

1. A purification pretreatment device for high-purity electronic rare gas, characterized in that: It comprises a filtration system (1) and an adsorption system (2) which are arranged in sequence; The filter system (1) comprises a filter frame (3), a first air inlet pipe (4) and a first air outlet pipe (5) are respectively provided at the left and right ends of the filter frame (3), and a multi-stage filter assembly is provided inside the filter frame (3); The adsorption system (2) comprises an adsorption tank (6), wherein a second air inlet pipe (7) and a second air outlet pipe (8) are respectively provided on one side of the bottom and one side of the top of the adsorption tank (6), and a liquid outlet pipe (9) is provided at the center of the bottom of the adsorption tank (6), the second air inlet pipe (7) extends transversely into the adsorption tank (6), and the end of the second air inlet pipe (7) located in the adsorption tank (6) is connected to a vertically arranged buffer pipe (10), a baffle plate (11) is provided on the top of the buffer pipe (10), and a first gas-liquid separation component is provided in the buffer pipe (10), and an adsorption component is provided above the baffle plate (11) in the adsorption tank (6).

2. The purification pretreatment device for high-purity electronic rare gas according to claim 1, characterized in that: One end of the first air inlet pipe (4) is connected to the gas cylinder group, and an air inlet pipeline (12) is connected between the first air outlet pipe (5) and the second air inlet pipe (7), and a pump body (13) is installed on the air inlet pipeline (12).

3. The purification pretreatment device for high-purity electronic rare gas according to claim 1, characterized in that: The multi-stage filter assembly comprises a metal filter (14), a medium-efficiency filter (15) and a high-efficiency filter (16) which are sequentially arranged along the flow direction of the gas.

4. The purification pretreatment device for high-purity electronic rare gas according to claim 1, characterized in that: The baffle plate (11) is an arc-shaped plate, and the inner side of the baffle plate (11) is connected to the outer side wall of the buffer tube (10) via a support rod (17), and a gap for gas to pass through is provided between the baffle plate (11) and the buffer tube (10).

5. The purification pretreatment device for high-purity electronic rare gas according to claim 4, characterized in that: A cylinder (18) is provided on the inner wall of one end of the second air inlet pipe (7) communicating with the buffer tube (10), a through hole (19) is provided in the middle of the cylinder (18), and a plurality of puncture needles (20) are provided on the inner wall of the through hole (19).

6. The purification pretreatment device for high-purity electronic rare gas according to claim 5, characterized in that: The first gas-liquid separation component comprises a separation plate (21) arranged obliquely, and a plurality of first air holes (22) are provided on the separation plate (21).

7. The purification pretreatment device for high-purity electronic rare gas according to claim 1, characterized in that: The adsorption assembly comprises a first gas-liquid separation layer (23), an adsorption layer and a second gas-liquid separation layer (24) which are arranged in sequence from bottom to top.

8. The purification pretreatment device for high-purity electronic rare gas according to claim 7, characterized in that: The first gas-liquid separation layer (23) and the second gas-liquid separation layer (24) respectively adopt a wire mesh demister and a fiber bed demister.

9. The purification pretreatment device for high-purity electronic rare gas according to claim 8, characterized in that: The adsorption layer comprises a bottom plate (25), a top plate (26), a breathable tube (27) and a packing layer (28); the edge of the bottom plate (25) is fixedly connected to the inner wall of the adsorption tank (6); the bottom of the breathable tube (27) is fixedly installed in the middle of the upper surface of the bottom plate (25); the middle of the lower surface of the top plate (26) is fixedly connected to the upper surface of the breathable tube (27); the packing layer (28) is filled between the bottom plate (25) and the top plate (26), and covers the outer wall of the breathable tube (27).

10. The purification pretreatment device for high-purity electronic rare gas according to claim 1, characterized in that: The bottom of the adsorption tank (6) is provided with a supporting foot (29), and the top of the adsorption tank (6) is provided with a lifting ear (30).

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