Aberration estimating method, aberration estimating apparatus, and storage medium
a technology of aberration estimation and estimating method, applied in the direction of measuring devices, instruments, structural/machine measurement, etc., can solve the problems of significant variation in the initial value at which optimization starts, high cost and large estimation of dedicated optical modules, etc., and achieve high accuracy
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[0045]A description will now be given through simulation of an aberration estimating method according to a first embodiment. This embodiment is realized by the aberration estimating apparatus 100 in FIG. 1. The image sensor 103 is installed on the driver 104 and moves to a position designated by the computer 105. In this embodiment, the light intensity distribution is acquired at each position where the focus position of the target optical system 102 is set to the origin and the defocus amounts are set to −70 μm, −60 μm, −50 μm, 50 μm, 60 μm, and 70 μm. It is assumed that the pinhole 101 is located at a sufficiently long distance, and light incident on the target optical system 102 is substantially parallel light. Assume that the target optical system 102 has an F-number of 1.4, and an aberration in which the coefficient of the fifth term in the Zernike polynomial is −2λ, the coefficient of the seventh term is 4λ, and the coefficient of the ninth term is 2λ. There are various defini...
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