Accurate position adjustment device and semiconductor on-line detection system with the device

An adjustment device and precise technology, applied in semiconductor/solid-state device testing/measurement, semiconductor/solid-state device manufacturing, electrical components, etc., can solve problems such as inconvenient maintenance and replacement, complicated processing and assembly, and inability to detect coatings in time. Achieve the effects of reducing the rate of unqualified products, saving energy and raw materials, and saving offline inspection time

CN101651114BInactive Publication Date: 2011-12-14DONGGUAN ANWELL DIGITAL MASCH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2011-12-14
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a precise position adjustment device, which comprises a mounting seat, a workbench, a transmission mechanism and a driving mechanism. One end of the shaft is fixedly connected to the workbench, and the other end is fixedly passed through the mounting plate and pivotally connected to the mounting seat. The plurality of transmission wheels are symmetrically distributed around the transmission shaft, and the drive wheels and the transmission wheels are located on the same plane. The radius of rotation of the workbench is greater than that of the drive wheel. The precise position adjustment device is easy to assemble and easy to maintain and replace. The drive wheel drives the mounting plate with the drive wheel fixed at the corner to rotate, thereby driving the workbench to rotate, so that the drive wheel and the workbench have the same linear speed and at the same time make the workbench It has a small angular velocity relative to the driving wheel, so that the table can run smoothly, accurately, and at a small angle. The invention also discloses a semiconductor on-line detection system with the device.
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Description

technical field

[0001] The invention relates to an accurate position adjustment device in a semiconductor process, in particular to an accurate position adjustment device in a vacuum chamber on a thin film semiconductor production line and a semiconductor on-line detection system with the device. Background technique

[0002] In recent years, the thin-film semiconductor market has developed vigorously, which has gradually deepened the application of thin-film semiconductors, and its trend is towards large-scale expansion. For example, thin-film solar cell devices using glass substrates have developed to a size of 1100mm×1400mm as the common size, and organic light-emitting display devices ( OLED) panels have also expanded from traditional mobile phone screens to large-area TVs and portable computer displays, and their size has reached more than 370mm×470mm. Such thin-film semiconductor products need to go through many different coating processes or integration, such as Chemi...

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Embodiment Construction

[0022]In order to describe the technical content and structural features of the present invention in detail, the following will be further described in conjunction with the embodiments and accompanying drawings, wherein the same reference numerals in different drawings represent the same components. As mentioned above, the present invention relates to a precise position adjustment device, including a mounting base, a workbench, a transmission mechanism and a driving mechanism. plate, the rotation radius of the worktable is larger than the rotation radius of the driving wheel. The precise position adjustment device is easy to assemble and easy to maintain and replace. The drive wheel is used to drive the mounting plate on which the drive wheel is fixed at the corner to rotate, thereby driving the workbench to rotate on the mount seat, so that the drive wheel and the workbench have the same alignment. At the same time, the worktable has a small angular velocity relative to the d...