Ion chemical heat treating furnace having glow discharge-aided heating function

Abstract

The invention discloses an ion chemical heat treating furnace having a glow discharge-aided heating function. A steel cylinder (4) is arranged in the vacuum chamber of a furnace body (2), a workpiece (5) to be processed is arranged on a workbench (6), and the cylinder, the workbench and the furnace body are mutually insulated. Prior to an ion chemical heat treatment, the negative pole of a directcurrent (DC) power supply (1) of the ion chemical heat treating furnace is connected to the cylinder by a change-over switch (8), and the cylinder generates a glow discharge and is heated, so that the workpiece can be preheated by the heat radiation of the cylinder. When the workpiece reaches a preheating temperature, the negative pole of the DC power supply is switched to the workbench, and the workpiece starts glow-discharge heating and is subject to the ion chemical heat treatment, so that the sputter cleaning time of the workpiece can be shortened, thereby preventing the DC power supply from over-current damage. In the ion chemical heat treatment process, the cylinder and the workpiece can be simultaneously connected to the negative pole of the DC power supply, the temperature uniformity of the workpiece can be improved by the aided heating of the cylinder, and the problem that the temperature of the workpiece is difficult to measure is also solved.

Description

technical field

[0001] The invention belongs to a metal material surface ion chemical heat treatment device, more specifically it is an ion chemical heat treatment device with glow auxiliary heating function. Background technique

[0002] Ion chemical heat treatment includes ion nitriding, carburizing, nitrocarburizing, sulfurizing, metallizing, plasma chemical vapor deposition, etc. It places the workpiece to be processed in the vacuum chamber of the ion chemical heat treatment furnace, the workpiece is connected to the negative pole of the DC glow discharge power supply, and the furnace body is connected to the positive pole. Under the action of a DC electric field, the gas in the furnace undergoes glow discharge, and the positive ions generated bombard the surface of the cathode (workpiece), heating the workpiece to the required chemical heat treatment temperature (generally between 400 and 600°C), and the gas glows at the same time. Photodischarge activates the reactive...

Examples

Embodiment 1

[0015] Embodiment 1: the inner diameter of the ion chemical heat treatment furnace of the present invention is φ650 × 1200 millimeters, and a cylinder with a thickness of 1 millimeter is placed in the furnace, and the size is φ550 × 900 millimeters, and 200 kilograms are placed on the workbench For workpieces to be treated by ion nitriding, ammonia gas is used as the working gas for ion nitriding. In the initial stage of ion nitriding treatment, the negative electrode of the DC power supply is connected to the cylinder first, and the cylinder starts to be heated by glow discharge. At this time, the DC voltage is 750V, the DC current is 20A, and the gas pressure in the furnace is 200Pa. When the workpiece is heated to 400°C, switch the negative pole of the DC power supply to the workbench, and the workpiece starts to be heated by glow discharge. artifact.

Embodiment 2

[0016] Example 2: On the basis of Example 1, when the workpiece is heated to 400°C, both the cylinder and the workbench are connected to the negative pole of the DC power supply, and the cylinder and the workpiece simultaneously generate glow discharge and are heated , when the workpiece is heated to 520 ° C, it begins to enter the heat preservation stage of ion nitriding. After ion nitriding at this temperature for 1 hour, the space temperature in the cylinder is 510°C, which is close to the actual temperature of the workpiece, and is about 100°C higher than the space temperature without glow discharge auxiliary heating.

technical field

[0001] The invention belongs to a metal material surface ion chemical heat treatment device, more specifically it is an ion chemical heat treatment device with glow auxiliary heating function. Background technique

[0002] Ion chemical heat treatment includes ion nitriding, carburizing, nitrocarburizing, sulfurizing, metallizing, plasma chemical vapor deposition, etc. It places the workpiece to be processed in the vacuum chamber of the ion chemical heat treatment furnace, the workpiece is connected to the negative pole of the DC glow discharge power supply, and the furnace body is connected to the positive pole. Under the action of a DC electric field, the gas in the furnace undergoes glow discharge, and the positive ions generated bombard the surface of the cathode (workpiece), heating the workpiece to the required chemical heat treatment temperature (generally between 400 and 600°C), and the gas glows at the same time. Photodischarge activates the reactive...

Examples

Embodiment 1

[0015] Embodiment 1: the inner diameter of the ion chemical heat treatment furnace of the present invention is φ650 × 1200 millimeters, and a cylinder with a thickness of 1 millimeter is placed in the furnace, and the size is φ550 × 900 millimeters, and 200 kilograms are placed on the workbench For workpieces to be treated by ion nitriding, ammonia gas is used as the working gas for ion nitriding. In the initial stage of ion nitriding treatment, the negative electrode of the DC power supply is connected to the cylinder first, and the cylinder starts to be heated by glow discharge. At this time, the DC voltage is 750V, the DC current is 20A, and the gas pressure in the furnace is 200Pa. When the workpiece is heated to 400°C, switch the negative pole of the DC power supply to the workbench, and the workpiece starts to be heated by glow discharge. artifact.

Embodiment 2

[0016] Example 2: On the basis of Example 1, when the workpiece is heated to 400°C, both the cylinder and the workbench are connected to the negative pole of the DC power supply, and the cylinder and the workpiece simultaneously generate glow discharge and are heated , when the workpiece is heated to 520 ° C, it begins to enter the heat preservation stage of ion nitriding. After ion nitriding at this temperature for 1 hour, the space temperature in the cylinder is 510°C, which is close to the actual temperature of the workpiece, and is about 100°C higher than the space temperature without glow discharge auxiliary heating.

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