Scroll vacuum pump with magnetic fluid translational sliding thrust bearing and sealing structure

Abstract

The invention discloses a scroll vacuum pump with a magnetofluid horizontal moving sliding thrust bearing and a sealing structure. The pump comprises a magnetofluid sealing device; the magnetofluid sealing device comprises a permanent magnet and a magnetizer; the permanent magnet is placed inside a piston rear support; the magnetizer is placed inside a thrust plate; meanwhile, magnetic flow liquid is injected into a gap between the magnetizer and the radial end face of the piston rear support. By the adoption of the pump, the magnetofluid sealing device is adopted in the winding end face of the vacuum pump; when a crank rotates, a piston front support and the piston rear support are driven to do radial winding relative to the thrust plate, and a closed magnetic field is generated between the permanent magnet and the magnetizer; the magnetic flow liquid forms a plurality of layers of closed magnetofluid O-shaped rings between a groove and the magnetizer; the magnetic flow liquid is utilized for achieving sealing of the scroll vacuum pump in the radial winding direction. Meanwhile, when the thrust plate is in contact with two planes of the piston rear support, the magnetic flow liquid can generate sliding thrust action under the action of a magnetic field, and therefore the effect is approximate to that of the sliding thrust bearing.

Description

Technical field

[0001] The invention relates to the technical field of vacuum pumps, in particular to the technical field of a scroll vacuum pump with a magnetic fluid translational sliding thrust bearing and a sealing structure. Background technique

[0002] At present, magnetic fluid sealing technology has been used for gas isolation in axial rotation, and used in vacuum pumps to replace traditional mechanical seals; magnetic fluid sealing technology is developed on the basis of magnetic fluid. When the magnetic fluid is injected into the gap of the magnetic field, it can fill the entire gap to form a "liquid O-ring seal". The function of the magnetic fluid sealing device is to transmit the rotating motion to the sealed container, but to seal the gap between the rotating shaft and the bearing, and is often used for vacuum sealing. figure 1 For a schematic diagram of a magnetic fluid sealing device, please refer to figure 1 Shown. It includes a shaft 11 and a housing 15 located...

Examples

Embodiment approach

[0042] In further embodiments of the present invention, please refer to Figure 4 to Figure 7 Shown. The end surface of the magnet 72 close to the magnetic fluid is coated with a layer of anaerobic fluid coating 73. The material of the anaerobic fluid coating 73 is mainly polytetrafluoroethylene. The magnetic fluid coating 73 is used to converge The role of the magnetic fluid, thereby improving the pressure resistance and air tightness, and reducing the resistance, reducing the loss of the magnetic fluid.

[0043] In a further embodiment of the present invention, Figure 8 for Figure 5 The first scheme schematic diagram of the groove on the radial end face of the middle piston rear seat, please refer to Figure 8 Shown. The cross-sectional shape of the convex ring 92 provided between the two adjacent first annular grooves 91 on the radial end surface of the piston rear support 9 is rectangular.

[0044] In a further embodiment of the present invention, Picture 9 for Figure 5 Th...

Technical field

[0001] The invention relates to the technical field of vacuum pumps, in particular to the technical field of a scroll vacuum pump with a magnetic fluid translational sliding thrust bearing and a sealing structure. Background technique

[0002] At present, magnetic fluid sealing technology has been used for gas isolation in axial rotation, and used in vacuum pumps to replace traditional mechanical seals; magnetic fluid sealing technology is developed on the basis of magnetic fluid. When the magnetic fluid is injected into the gap of the magnetic field, it can fill the entire gap to form a "liquid O-ring seal". The function of the magnetic fluid sealing device is to transmit the rotating motion to the sealed container, but to seal the gap between the rotating shaft and the bearing, and is often used for vacuum sealing. figure 1 For a schematic diagram of a magnetic fluid sealing device, please refer to figure 1 Shown. It includes a shaft 11 and a housing 15 located...

Examples

Embodiment approach

[0042] In further embodiments of the present invention, please refer to Figure 4 to Figure 7 Shown. The end surface of the magnet 72 close to the magnetic fluid is coated with a layer of anaerobic fluid coating 73. The material of the anaerobic fluid coating 73 is mainly polytetrafluoroethylene. The magnetic fluid coating 73 is used to converge The role of the magnetic fluid, thereby improving the pressure resistance and air tightness, and reducing the resistance, reducing the loss of the magnetic fluid.

[0043] In a further embodiment of the present invention, Figure 8 for Figure 5 The first scheme schematic diagram of the groove on the radial end face of the middle piston rear seat, please refer to Figure 8 Shown. The cross-sectional shape of the convex ring 92 provided between the two adjacent first annular grooves 91 on the radial end surface of the piston rear support 9 is rectangular.

[0044] In a further embodiment of the present invention, Picture 9 for Figure 5 Th...

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