Rotating coating equipment for vacuum coating

Abstract

The revolving and self-rotating coating equipment for vacuum coating has a coating furnace chamber in the furnace body, a revolving disk rotating mechanism and a self-rotating gear mechanism are arranged inside the coating furnace chamber, and a target material is connected to one side of the inner wall. The revolving disk rotating mechanism of the invention drives the hanger tray to realize the revolving of the AR fixed frame assembly by adopting a planetary gear mechanism, and the self-rotating gear mechanism makes the rack mesh with the self-rotating gear through the crank rocker mechanism, so that the self-rotating lower shaft rotates to drive the hanger to turn over 180 degrees for reverse coating, and the self-rotating positioner is used to make the hanger achieve the purpose of accurate turning over; because the crank rocker mechanism is controlled by a rotating cylinder, it can selectively and evenly coat the film, realize automatic turning over in the same batch, avoid the time and electric energy consumed by opening the door to turn over and then evacuate and heat up, effectively save time and electric energy, and improve the double-sided coating efficiency, and effectively ensure the uniformity and consistency of double-sided coating.

Description

Technical Field

[0001] The present invention relates to the field of film coating equipment, and more specifically, to a revolving and rotating film coating equipment for vacuum coating. Background Art

[0002] The turrets of traditional coating machines simply revolve. Once the transmission device of the turret is started, the turret will rotate continuously inside the coating machine and cannot rotate on its own to coat the reverse side.

[0003] When a product needs to be coated on both sides, after coating one side, the machine needs to be stopped and the door opened, then turned over, the door closed again, vacuumed and heated up before resuming coating. Opening the door, turning over, vacuumed and heated up consumes time and electricity. In order to save time and energy, improvements have been made so that it can automatically turn over without opening the door, thus saving time and energy for opening the door to vacuum and heat up.

[0004] However, the existing revolving and rotating turrets are constantly rotating during the coating process, and cannot selectively and evenly coat the film. The revolving turret cannot automatically turn over in the same furnace batch. If both sides are to be plated at the same time, a coating source must be added on the inner side of the turret, which increases the cost of purchasing equipment and makes it difficult to ensure the consistency of the two sides. Summary of the invention

[0005] The present invention improves the prior art in view of the above shortcomings and provides a revolving and rotating coating device for vacuum coating. The technical solution is as follows:

[0006] A revolving and self-rotating coating device for vacuum coating comprises a furnace body, a coating furnace chamber is arranged in the furnace body, a revolving disk rotating mechanism and a self-rotating gear mechanism are arranged inside the coating furnace chamber, a target material is connected to one side of the inner wall, the revolving disk rotating mechanism is connected to the inner bottom of the furnace body, and comprises a chassis fixedly connected to the furnace body, a plurality of groups of first support columns are evenly arranged and connected above the chassis, and a fixed large toothed disk is connected through the first support columns, a plurality of groups of small gears are evenly meshed around the outer periphery of the fixed large toothed disk to form a planetary gear mechanism, the bottom centers of the small gears are all extended and penetrated through the revolving disk, and the top centers are all extended and penetrated through the rack tray, a transmission gear is fixedly connected to the bottom of the revolving disk, the bottom of the transmission gear is rotatably connected to the chassis, and the top is connected to the rack tray through evenly arranged second support columns, the top surface of the rack tray is connected to a revolving upper disk around the revolving support rod, a plurality of groups of AR fixing frame assemblies are detachably connected between the revolving upper disk and the rack tray, and the AR fixing frame assemblies are sequentially arranged around the edge of the rack tray;

[0007] The autorotation gear mechanism is arranged between the inner bottom of the furnace body and the chassis, and includes a rotating cylinder, which is fixedly embedded in the outer bottom of the furnace body, and its rotating shaft passes through the furnace body and is arranged inside the coating furnace chamber. The rotating shaft of the rotating cylinder is connected to a crank rocker mechanism, and the other end of the crank rocker mechanism is connected to a guide slider, and a guide rail is connected to the bottom of the guide slider, and the guide rail is fixedly connected to the inner bottom of the furnace body. A rack is fixedly connected to the top of the guide slider, and the rack is meshed with the autorotation gear. The autorotation gear is sleeved on the bottom end of the AR fixed frame assembly, and the AR fixed frame assembly is fixedly penetrated with an autorotation locator above the autorotation gear.

[0008] An upper support seat is extended and arranged at the inner top end of the furnace body corresponding to the center of the revolving upper plate, and is movably connected to the revolving upper plate through the upper support seat.

[0009] Furthermore, an ion source dust removal device is connected below the upper support seat, and the outer periphery of the ion source dust removal device is rotatably connected to a baffle track, and the ion source dust removal device is supported by the baffle track, and the upper end edge of the baffle track is fixedly connected to the inner top of the furnace body.

[0010] Furthermore, the ion source dust removal device includes a plasma dust removal base, the outer periphery of which is limited and set below the upper support seat by a baffle track, the lower periphery of the plasma dust removal base is connected around the revolving upper plate, and the bottom end is connected to several groups of ion source divergent rods, and the other end of the ion source divergent rods is connected to the chassis.

[0011] Furthermore, the bottom end of the plasma dust removal base is connected to four groups of ion source diverging rods, which are evenly distributed in a cross shape.

[0012] The AR fixed frame assembly includes a bracket and a rotating lower shaft and a positioning upper shaft connected to both ends of the bracket. The upper part of the bracket is movably penetrated on the revolving upper plate through the positioning upper shaft, and the lower part of the bracket is penetrated from top to bottom in sequence by a rotating lower shaft, through which a rotating locator and a rotating gear meshing with a rack are provided, so that the bracket can perform limited rotation. The bracket is arranged corresponding to the target material.

[0013] The rotating cylinder rotates 180 degrees to drive the crank rocker mechanism to transmit the motion from the rocker to the slider. The slider is equipped with a rack that allows the rotating gear to rotate 180 degrees. While revolving, the rack is meshed with the rotating gear, driving the hanger with the product to rotate and turn over. There is a rotation locator on the upper end of the gear, which is a friction disk. This friction disk is fixedly connected to the rotating lower shaft by a flat key and pressed on the upper surface of the rotating gear under the action of gravity. When the shaft rotation angle is greater than 180 degrees, it is limited by the pin and the friction disk slips to achieve the purpose of accurate turning over. After turning over, the rotating cylinder reverses, the slider retracts, and the hanger remains stationary, so as to achieve the purpose of plating the other side, and the purpose of repeated turning over and coating can be achieved.

[0014] The lower part of the transmission gear is movably connected to the chassis via a guide rail in a circular ring structure.

[0015] The second support column is fixedly connected to the transmission gear, and the rack tray is rotated along with the transmission gear through the second support column.

[0016] The revolution support rods are arranged in four groups around the top end surface of the hanger tray and are evenly distributed in a cross shape. The revolution support rods are all connected to the revolution upper plate and make the revolution upper plate rotate with the hanger tray.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: the revolution plate rotation mechanism of the present invention drives the hanger tray to realize the revolution of the AR fixed frame assembly by adopting a planetary gear mechanism, and the hanger tray is connected to the revolution upper plate through the revolution support rod, which can make the walking state of the AR fixed frame assembly more stable during the revolution, and the self-rotation gear mechanism makes the rack mesh with the self-rotation gear through the crank rocker mechanism, so that the self-rotation lower shaft rotates to drive the hanger to turn over 180 degrees for reverse side coating, and the self-rotation positioner is used to enable the hanger to achieve the purpose of accurate turning over; because the crank rocker mechanism is controlled by a rotating cylinder, it can enable it to selectively and evenly coat, realize automatic turning over in the same furnace batch, avoid the time and electric energy consumed by opening the door to turn over and then vacuumizing and heating, effectively save time and electric energy, and improve the double-sided coating efficiency, effectively ensuring the uniformity and consistency of double-sided coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the embodiment of the present invention, the following is a brief introduction to the drawings required for describing the embodiment:

[0019] Figure 1 It is a schematic diagram of the full cross-section structure of the present invention;

[0020] Figure 2 It is a partial stereoscopic enlarged view of the present invention;

[0021] Figure 3 It is a full cross-sectional top view of the present invention;

[0022] Figure 4 It is a front view of the present invention;

[0023] Figure 5 A three-dimensional view of the present invention;

[0024] It includes: a furnace body 1, an upper support seat 2, a baffle track 3, a plasma dust removal base 4, a revolving upper disk 5, a positioning upper shaft 6, an ion source diverging rod 7, a revolving support rod 8, a rotating lower shaft 9, a rotating positioner 10, a rotating gear 11, a rack 12, a guide rail 13, a slider 14, a rocker 15, a rotating cylinder 16, a crank rocker mechanism 17, a coating furnace chamber 18, an AR fixed frame assembly 19, a target material 20, a revolving disk rotating mechanism 21, a rotating gear mechanism 22, a chassis 23, a first support column 24, a fixed large gear plate 25, a pinion 26, a revolving disk 27, a rack tray 28, a transmission gear 29, a second support column 30, an ion source dust removal device 31, a rack 32, and a guide rail 33. DETAILED DESCRIPTION

[0025] The following is a clear and complete description of the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the protection scope of the present invention.

[0026] The embodiments of the present invention will be further described in detail below with reference to the accompanying drawings, as follows:

[0027] The rotary coating device for vacuum coating comprises a furnace body 1, wherein a coating furnace chamber 18 is arranged in the furnace body 1, a rotary disk rotating mechanism 21 and a rotary gear mechanism 22 are arranged inside the coating furnace chamber 18, a target material 20 is connected to one side of the inner wall, the rotary disk rotating mechanism 21 is connected to the inner bottom of the furnace body 1, and comprises a chassis 23 fixedly connected to the furnace body 1, and four groups of first support columns 24 are evenly arranged above the chassis 23, and a fixed large toothed disc 2 is connected through the first support column 24. 5. The outer circumference of the fixed large toothed disc 25 is uniformly surrounded by six groups of meshing pinions 26 to form a planetary gear mechanism. The bottom centers of the pinions 26 are all extended to penetrate the revolving disc 27, and the top centers are all extended to penetrate the rack tray 28. The bottom of the revolving disc 27 is fixedly connected to a transmission gear 29, the bottom of the transmission gear 29 is rotatably connected to the chassis 23, and the top is connected to the rack tray 28 through uniformly arranged second support columns 30. The top surface of the rack tray 28 is surrounded by the revolving support The rod 8 is connected to the revolution upper plate 5, and there are twenty-five groups of AR fixed frame assemblies 19 that can be detachably connected between the revolution upper plate 5 and the rack tray 28. The AR fixed frame assemblies 19 are arranged around the edge of the rack tray 28 in sequence; the self-rotating gear mechanism 22 is arranged between the inner bottom of the furnace body 1 and the bottom plate 23, and includes a rotating cylinder 16, which is fixedly embedded in the outer bottom of the furnace body 1, and its rotating shaft passes through the furnace body 1 and is arranged inside the coating furnace chamber 18. The rotating shaft of the rotating cylinder 16 is connected There is a crank rocker mechanism 17, the other end of which is connected to a guide slider 14, the lower part of which is connected to a guide rail 13, which is fixedly connected to the inner bottom of the furnace body 1, and the upper part of the guide slider 14 is fixedly connected to a rack 12, which is meshed with a self-rotating gear 11, which is sleeved on the bottom end of an AR fixed frame assembly 19, and the AR fixed frame assembly 19 is fixedly penetrated with a self-rotating positioner 10 above the self-rotating gear 11.

[0028] Furthermore, an upper support seat 2 is extended and arranged at the inner top end of the furnace body 1 corresponding to the center of the revolving upper plate 5, and an ion source dust removal device 31 is connected to the bottom of the upper support seat 2. The ion source dust removal device 31 includes a plasma dust removal base 4. The outer periphery of the plasma dust removal base 4 is limited and arranged below the upper support seat 2 through a baffle track 3, and the plasma dust removal base 4 is supported by the baffle track 3. The upper end edge of the baffle track 3 is fixedly connected to the inner top end of the furnace body 1, and the lower periphery of the plasma dust removal base 4 is connected around the revolving upper plate 5, and the bottom end is connected to four groups of ion source divergent rods 7, which are evenly distributed in a cross shape, and the other end of the ion source divergent rod 7 is connected to the chassis 23.

[0029] Furthermore, the AR fixed frame assembly 19 includes a bracket 32 ​​and a rotating lower shaft 9 and a positioning upper shaft 6 connected to both ends of the bracket 32. The upper part of the bracket 32 ​​is movably penetrated through the revolving upper plate 5 through the positioning upper shaft 6. The lower part of the bracket 32 ​​is penetrated through the rotating lower shaft 9 in sequence from top to bottom with a rotating locator 10 and a rotating gear 11 meshing with a rack 12, so that the bracket 32 ​​can perform limited rotation. The bracket 32 ​​is arranged corresponding to the target material 20.

[0030] Furthermore, the slider 14 is equipped with a rack 12 that can allow the rotating gear 11 to rotate 180 degrees. While revolving, it can drive the hanger with the product to rotate to achieve turning over. The upper end of the gear is provided with a rotation positioner 10, which is a friction disk. This friction disk is fixedly connected to the rotating lower shaft 9 by a flat key. When the rotation angle of the shaft is greater than 180 degrees, it is limited by the pin and the friction disk slips to achieve the purpose of accurate turning over.

[0031] Furthermore, the bottom of the transmission gear 29 is movably connected to the chassis 23 via a guide rail 33 with a circular ring structure, the second support column 30 is fixedly connected to the transmission gear 29, and the hanger tray 28 is rotated along with the transmission gear 29 through the second support column 30, and four groups of revolving support rods 8 are arranged around the top surface of the hanger tray 28, which are evenly distributed in a cross shape, and the revolving support rods 8 are all connected to the revolving upper plate 5, and the revolving upper plate 5 is rotated along with the hanger tray 28.

[0032] Taking the working principle combined with the above structure as an example, when in use, the product to be coated is first installed on the rack 32, and the rack 32 is fixed on the rack tray 28 by positioning the upper shaft 6 and the rotating lower shaft 9. Before coating, vacuum is first evacuated to increase the temperature, and the drive motor is started to drive the transmission gear 29 to rotate. The bottom of the revolving disk 27 is fixedly connected to the transmission gear 29, so that the revolving disk 27 rotates with the transmission gear 29. The bottom center of the pinion 26 is extended and penetrated through the revolving disk 27, and the top center is extended and penetrated through the rack tray 28, so that the pinion 26 rotates around the fixed large toothed disk 25 as the center to form a planetary gear mechanism, so that the rack tray 28 revolves, and the rack tray 28 drives the AR fixed frame assembly 19 to revolve, and the rack tray 28 is connected to the transmission gear 29 through the evenly arranged second support columns 30, which can realize the stable rotation of the rack tray 28 driven by the top of the pinion 26 and the second support column 30, and the top surface of the rack tray 28 revolves around the revolving support The support rod 8 is connected to the revolving upper plate 5, so that the revolving upper plate 5 rotates at a uniform speed with the rack tray 28, and then the coating is carried out on one side; when the coating is completed, the rotating cylinder 16 rotates 180 degrees to drive the crank rocker mechanism 17 and transmit the motion from the rocker 15 to the slider 14, and the slider 14 is equipped with a rack 12 that can rotate the self-rotating gear 11 by 180 degrees. At the same time of the revolution, since the rack 12 is meshed with the self-rotating gear 11, the hanger with the product is driven to rotate and turn over. , and there is a rotation locator 10 at the upper end of the gear, which is a friction disk. This friction disk is fixedly connected to the rotation lower shaft 9 by a flat key, and is pressed on the upper surface of the rotation gear 11 under the action of gravity. When the rotation angle of the shaft is greater than 180 degrees, it is limited by the pin, and the friction disk slips to achieve the purpose of accurate turning over. After turning over, the rotating cylinder 16 reverses, the slider 14 retreats, and the bracket 32 ​​remains stationary, thereby achieving the purpose of plating the other side, and the purpose of repeated turning over and coating can be achieved.

[0033] The revolution disk rotation mechanism 21 of the present invention drives the hanger tray 28 to realize the revolution of the AR fixed frame assembly 19 by adopting a planetary gear mechanism, and the hanger tray 28 is connected to the revolution upper plate 5 through the revolution support rod 8, which can make the walking state of the AR fixed frame assembly 19 more stable during the revolution, and the self-rotation gear mechanism 22 makes the rack 12 mesh with the self-rotation gear 11 through the crank rocker mechanism 17, so that the self-rotation lower shaft 9 rotates to drive the hanger to turn over 180 degrees for reverse coating, and the self-rotation positioner 10 is used to enable the hanger to achieve the purpose of accurate turning over; because the crank rocker mechanism 17 is controlled by the rotating cylinder 16, it can selectively and evenly coat the film, realize automatic turning over in the same furnace batch, avoid the time and electricity consumed by opening the door to turn over and then vacuuming and heating, effectively save time and electricity, and improve the double-sided coating efficiency, effectively ensure the uniformity and consistency of double-sided coating.

[0034] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A revolving coating device for vacuum coating, comprising a furnace body (1), wherein a coating furnace chamber (18) is provided in the furnace body (1), and characterized in that: The coating furnace chamber (18) is provided with a revolution disk rotating mechanism (21) and a self-rotating gear mechanism (22) inside, and a target material (20) is connected to one side of the inner wall. The revolution disk rotating mechanism (21) is connected to the inner bottom of the furnace body (1), and comprises a chassis (23) fixedly connected to the furnace body (1). A plurality of groups of first support columns (24) are evenly arranged and connected above the chassis (23), and a fixed large toothed disk (25) is connected through the first support columns (24). The outer periphery of the fixed large toothed disk (25) is evenly surrounded by a plurality of groups of small gears (26) meshing therewith, thereby forming a planetary gear mechanism. The bottom center of each small gear (26) is extended by a plurality of The rotating disk (27) is penetrated, and the top center is extended to penetrate the rack tray (28). The bottom of the rotating disk (27) is fixedly connected with a transmission gear (29). The bottom of the transmission gear (29) is rotatably connected to the chassis (23). The top is connected to the rack tray (28) through a uniformly arranged second support column (30). The top surface of the rack tray (28) is connected to a rotating upper disk (5) through a rotating support rod (8). A plurality of AR fixed frame assemblies (19) are detachably connected between the rotating upper disk (5) and the rack tray (28). The AR fixed frame assemblies (19) are sequentially arranged around the edge of the rack tray (28). The self-rotating gear mechanism (22) is arranged between the inner bottom of the furnace body (1) and the bottom plate (23), and comprises a rotating cylinder (16). The rotating cylinder (16) is fixedly embedded in the outer bottom of the furnace body (1), and its rotating shaft passes through the furnace body (1) and is arranged inside the coating furnace chamber (18). The rotating shaft of the rotating cylinder (16) is connected to a crank rocker mechanism (17), and the other end of the crank rocker mechanism (17) is connected to a guide slider (14). A guide rail (13) is connected to the bottom of the block (14), and the guide rail (13) is fixedly connected to the inner bottom of the furnace body (1). A rack (12) is fixedly connected to the top of the guide slider (14), and the rack (12) is meshed with a self-rotating gear (11). The self-rotating gear (11) is sleeved on the bottom end of the AR fixed frame assembly (19), and the AR fixed frame assembly (19) is fixedly penetrated with a self-rotating positioner (10) above the self-rotating gear (11); The AR fixed frame assembly (19) comprises a hanger (32) and a self-rotating lower shaft (9) and a positioning upper shaft (6) connected to both ends of the hanger (32); the upper part of the hanger (32) is movably penetrated on the revolving upper plate (5) through the positioning upper shaft (6); the lower part of the hanger (32) is penetrated in sequence from top to bottom through the self-rotating lower shaft (9) by a self-rotating locator (10) and a self-rotating gear (11) meshing with a rack (12), so that the hanger (32) performs limited self-rotation; the hanger (32) is arranged corresponding to the target material (20); The lower part of the transmission gear (29) is movably connected to the chassis (23) via a guide rail (33) having a circular ring structure.

2. The revolving and rotating coating equipment for vacuum coating according to claim 1, characterized in that: An upper support seat (2) is extended from the inner top end of the furnace body (1) corresponding to the center of the revolving upper plate (5) and is movably connected to the revolving upper plate (5).

3. The rotary coating device for vacuum coating according to claim 2, characterized in that: An ion source dust removal device (31) is connected below the upper support seat (2); the outer periphery of the ion source dust removal device (31) is rotatably connected to a baffle track (3), and the ion source dust removal device (31) is supported by the baffle track (3); the upper edge of the baffle track (3) is fixedly connected to the inner top end of the furnace body (1).

4. The revolving and rotating coating equipment for vacuum coating according to claim 3, characterized in that: The ion source dust removal device (31) comprises a plasma dust removal base (4), the outer periphery of which is limitedly arranged below the upper support base (2) by a baffle track (3), the lower periphery of the plasma dust removal base (4) surrounds and is connected to a revolving upper disk (5), and the bottom end is connected to a plurality of groups of ion source diverging rods (7), and the other end of the ion source diverging rods (7) is connected to a base plate (23).

5. The revolving and rotating coating equipment for vacuum coating according to claim 4, characterized in that: The bottom end of the plasma dust removal base (4) is connected to four groups of ion source diverging rods (7) which are evenly distributed in a cross shape.

6. The revolving and rotating coating equipment for vacuum coating according to claim 1, characterized in that: The second support column (30) is fixedly connected to the transmission gear (29), and the rack tray (28) is caused to rotate along with the transmission gear (29) through the second support column (30).

7. The revolving and rotating coating equipment for vacuum coating according to claim 1, characterized in that: Four groups of the revolution support rods (8) are arranged around the top end surface of the hanger tray (28) and are evenly distributed in a cross shape. The revolution support rods (8) are all connected to the revolution upper plate (5) and enable the revolution upper plate (5) to rotate with the hanger tray (28).

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