Fluid supply device for substrate drying and substrate drying equipment

Abstract

The present invention relates to the technical field of post-processing of chemical mechanical polishing, and discloses a fluid supply device and substrate drying equipment for drying substrates, wherein the fluid supply device comprises a storage body, a first pipeline and a second pipeline, the first pipeline and the second pipeline are respectively connected to the storage body, and the first pipeline and the second pipeline are connected outside the storage body through a heating pipeline; the first pipeline is used to supply a first fluid, a part of the first fluid flows into the storage body, and another part of the first fluid is divided into the heating pipeline, heated, and then merged into the second pipeline and mixed with the second fluid pressed out of the storage body in the second pipeline before being output, thereby improving the effect of substrate drying.

Description

Technical Field

[0001] The invention relates to the technical field of chemical mechanical polishing post-processing, and in particular to a fluid supply device and substrate drying equipment for substrate drying. Background Art

[0002] Chemical Mechanical Planarization (CMP) is an ultra-precision surface processing technology for achieving global flatness in integrated circuit manufacturing. Since the chemical reagents and abrasives used in large quantities in chemical mechanical polishing can cause contamination on the substrate surface, a post-processing process is required after polishing to remove contaminants on the substrate surface. The post-processing process generally consists of cleaning and drying to provide a smooth and clean substrate surface.

[0003] The purpose of post-polishing cleaning is to remove particles and various chemicals on the surface of the substrate, and to avoid corrosion and damage to the surface and internal structure during the cleaning process. Post-polishing cleaning can be divided into wet and dry methods. Wet cleaning is cleaning in a solution environment, such as cleaning agent immersion, mechanical scrubbing, wet chemical cleaning, etc.

[0004] After the substrate is cleaned, a lot of water or cleaning liquid residues will remain on the substrate surface. Since these water or cleaning liquid residues contain impurities, if these residual liquids are allowed to evaporate and dry, these impurities will re-adhere to the surface of the substrate, causing contamination and even destroying the structure of the wafer. Therefore, the substrate surface needs to be dried to remove these residual liquids.

[0005] As the last step of post-processing, substrate drying plays a vital role in ensuring the surface quality of the substrate and the processing yield. The drying technology commonly used in the industry is isopropyl alcohol (IPA, Iso-PropylAlcohol) vapor drying, which uses the surface tension gradient of isopropyl alcohol vapor on water to promote the peeling of the water film adsorbed on the substrate surface. However, since isopropyl alcohol is easy to re-condense and cause secondary pollution, the drying effect is not good. Summary of the invention

[0006] The embodiments of the present invention provide a fluid supply device and a substrate drying equipment for drying a substrate, aiming to solve at least one of the technical problems existing in the prior art.

[0007] A first aspect of an embodiment of the present invention provides a fluid supply device for substrate drying, comprising a storage body, a first pipeline and a second pipeline, the first pipeline and the second pipeline are respectively connected to the storage body, and the first pipeline and the second pipeline are connected outside the storage body through a heating pipeline; the first pipeline is used to supply a first fluid, a part of the first fluid flows into the storage body, and another part of the first fluid is diverted to the heating pipeline for heating and then merged into the second pipeline and mixed with the second fluid pressed out of the storage body in the second pipeline before being output.

[0008] In one embodiment, the first fluid is nitrogen.

[0009] In one embodiment, the second fluid is isopropyl alcohol.

[0010] In one embodiment, a heating part is provided on the heating pipeline, and the heating part includes a heating module and a temperature control module, and the heating module is connected to the temperature control module.

[0011] In one embodiment, the output end of the second pipeline is provided with a temperature detection module connected to the temperature control module. The temperature detection module measures the temperature of the mixed fluid of the first fluid and the second fluid and feeds the temperature back to the temperature control module, so that the temperature control module controls the heating temperature of the heating module to stabilize the mixed fluid within a preset temperature range.

[0012] In one embodiment, a pipeline insulation structure is provided on the second pipeline.

[0013] In one embodiment, an atomization module is provided on the second pipeline, and the atomization module mixes and atomizes the first fluid and the second fluid.

[0014] In one embodiment, the fluid supply device further comprises a pressure relief pipeline, and the pressure relief pipeline is used to discharge gas from the storage body.

[0015] In one embodiment, the fluid supply device further includes a third pipeline, and the third pipeline is airtightly connected to the pressure detection part.

[0016] In one embodiment, the fluid supply device further includes a fourth pipeline, and the fourth pipeline is airtightly connected to the liquid level detection part.

[0017] A second aspect of an embodiment of the present invention provides a substrate drying device, including a substrate holding device and a fluid supply device as described above, wherein the substrate holding device fixes the cleaned substrate and sprays a mixed fluid of a first fluid and a second fluid onto the substrate through the fluid supply device to dry the substrate.

[0018] The beneficial effects of the present invention include: improving the drying effect of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The advantages of the present invention will become clearer and easier to understand through the detailed description made in conjunction with the following drawings, but these drawings are only schematic and do not limit the protection scope of the present invention, wherein:

[0020] Figure 1 A schematic structural diagram of a fluid supply device provided in one embodiment of the present invention;

[0021] Figure 2 A schematic structural diagram of a fluid supply device provided in another embodiment of the present invention;

[0022] Description of reference numerals:

[0023] 10. Storage entity;

[0024] 20, first pipeline; PV1, first valve; PV2, second valve;

[0025] 30, second pipeline; PV4, fourth valve; MFC2, second mass flow controller; 33, atomization module; 34, pipeline insulation structure; PV5, fifth valve; 35, temperature detection module;

[0026] 40, heating pipeline; PV3, third valve; MFC1, first mass flow controller; 41, heating module; 42, temperature control module;

[0027] 60. third pipeline; 61. pressure detection unit;

[0028] 50. Fourth pipeline; 51. Liquid level detection unit. DETAILED DESCRIPTION

[0029] The technical scheme of the present invention is described in detail below in conjunction with specific embodiments and their accompanying drawings. The embodiments recorded herein are specific embodiments of the present invention, which are used to illustrate the concept of the present invention; these descriptions are explanatory and exemplary and should not be construed as limitations on the embodiments of the present invention and the scope of protection of the present invention. In addition to the embodiments recorded herein, those skilled in the art can also adopt other obvious technical schemes based on the contents disclosed in the claims of this application and its specification, and these technical schemes include technical schemes that adopt any obvious replacements and modifications to the embodiments recorded herein. It should be understood that, unless otherwise specified, for ease of understanding, the following descriptions of the specific embodiments of the present invention are all based on the description of the relevant equipment, devices, components, etc. in the original static natural state without external control signals and driving forces.

[0030] An embodiment of the present invention provides a fluid supply device for substrate drying, which is applied to the drying process in substrate post-processing. The substrates to be dried include semiconductor wafers, glass substrates for photomasks, glass substrates for liquid crystal displays, glass substrates for plasma displays, substrates for optical disks, etc.

[0031] like Figure 1 As shown, an embodiment of the present invention provides a fluid supply device for substrate drying, including a storage body 10, a first pipeline 20 and a second pipeline 30, the first pipeline 20 and the second pipeline 30 are respectively connected to the storage body 10, and the first pipeline 20 and the second pipeline 30 are connected to the outside of the storage body 10 through a heating pipeline 40; the first pipeline 20 is used to supply a first fluid, a part of the first fluid flows into the storage body 10, and another part of the first fluid is diverted to the heating pipeline 40 for heating and then merged into the second pipeline 30 and mixed with the second fluid pressed out of the storage body 10 in the second pipeline 30 before being output.

[0032] The first pipeline 20 and the second pipeline 30 are respectively connected to the storage body 10 in an airtight manner, and the first pipeline 20 and the second pipeline 30 are connected in an airtight manner through the heating pipeline 40. The first fluid is heated and mixed with the second fluid to obtain a mixed fluid, specifically a mixed gas.

[0033] In one embodiment, the storage body 10 has a first connection port and a second connection port respectively connected to the first pipeline 20 and the second pipeline 30 in an airtight manner. A heating pipeline 40 is connected between the first pipeline 20 and the second pipeline 30.

[0034] The first fluid enters the first pipeline 20 from the input end of the first pipeline 20, and then the first fluid can enter the storage body 10 through the first connecting port between the first pipeline 20 and the storage body 10. The first fluid can also enter the heating pipeline 40 through the connecting port between the first pipeline 20 and the heating pipeline 40, and then obtain the heated first fluid through the heating of the heating pipeline 40. The heated first fluid can enter the second pipeline 30 through the connecting port between the heating pipeline 40 and the second pipeline 30, and then mix with the second fluid in the second pipeline 30 to obtain a heated mixed gas.

[0035] The first pipeline 20 passes the first fluid into the storage body 10 to increase the pressure in the storage body 10 , so that the second fluid stored in the storage body 10 is discharged through the second pipeline 30 under the action of the pressure.

[0036] In one embodiment, the first fluid is nitrogen and the second fluid is isopropyl alcohol.

[0037] At normal temperature, the second fluid stored in the storage body 10 is isopropyl alcohol liquid.

[0038] The first pipeline 20 introduces nitrogen into the storage body 10. The bottom end of the first pipeline 20 located in the storage body 10 is higher than the interface of the liquid in the storage body 10. When the first pipeline 20 adds nitrogen into the storage body 10 via the first connection port 1, the gas pressure in the storage body 10 increases to press out the isopropyl alcohol liquid to perform the substrate drying process.

[0039] The second pipeline 30 is used to circulate the isopropyl alcohol liquid discharged from the storage body 10. The second pipeline 30 is located at the bottom end of the storage body 10 close to the inner bottom surface of the storage body 10, so that the bottom end of the second pipeline 30 is lower than the liquid level in the storage body 10 under normal conditions, thereby facilitating the isopropyl alcohol liquid to be pressed into the second pipeline 30 and discharged.

[0040] In this embodiment, nitrogen is introduced into the first pipeline 20, then enters the storage body 10 and presses the isopropyl alcohol liquid into the second pipeline 30, and at the same time, the nitrogen flows into the heating pipeline 40 for heating. The heated nitrogen is mixed with the isopropyl alcohol in the second pipeline 30 to obtain a heated mixed gas, thereby achieving the use of the heated mixed gas to dry the substrate.

[0041] The temperature of the mixed gas is between 60°C and 90°C.

[0042] Using hot gas to dry the substrate can form a temperature gradient and thus produce the thermal Marangoni effect, which can induce the cleaning liquid on the substrate surface to peel off the surface attachments from the substrate surface. The strong interfacial flow generated by the thermal Marangoni effect can not only peel off the liquid adsorbed on the substrate surface, but also wash away the contaminants attached to the substrate surface, thereby achieving better substrate drying and improving the drying effect.

[0043] In one embodiment, the fluid supply device further comprises a control system to control the working state of the fluid supply device.

[0044] like Figure 1 As shown, the first pipeline 20 is provided with a first switch assembly to realize the on-off control of the first pipeline 20. The first switch assembly includes a first valve PV1 and a second valve PV2. The first valve PV1 is connected between the input end of the first pipeline 20 and the connection port of the first pipeline 20 and the heating pipeline 40 to control whether nitrogen is passed into the first pipeline 20. The second valve PV2 is connected between the connection port of the first pipeline 20 and the heating pipeline 40 and the first connection port of the first pipeline 20 and the storage body 10 to control whether nitrogen is passed into the storage body 10. In addition, the second valve PV2 can also be a one-way valve, the inlet of which is close to the input end side of the first pipeline 20, and the outlet is close to the storage body 10 side, so that nitrogen can only flow into the storage body 10 and cannot flow out in the reverse direction.

[0045] An input end of the first pipeline 20 is connected to a nitrogen supply source.

[0046] like Figure 1 As shown, in one embodiment of the present invention, a heating part is provided on the heating pipeline 40 , and the heating part includes a heating module 41 and a temperature control module 42 , and the heating module 41 is connected to the temperature control module 42 .

[0047] The heating module 41 is disposed at the upstream side of the connection port between the heating pipeline 40 and the second pipeline 30 to heat the nitrogen flowing through the heating pipeline 40. The temperature control module 42 is used to control the heating temperature of the heating module 41.

[0048] In one embodiment, the heating module 41 includes a first heater and a second heater.

[0049] As an implementation method, the first heater can be realized by installing a controllable heating wire in the heating pipeline 40. When current passes through the heating wire, the generated heat is transferred to the heated nitrogen through the heat transfer medium to achieve the purpose of heating the nitrogen.

[0050] As another possible implementation mode, the first heater can also be realized by a resistance wire arranged on the outer surface of the heating pipeline 40. Preferably, an insulator is wound around the outer surface of the heating pipeline 40, and the resistance wire is wound around the outside of the insulator. The nitrogen in the pipeline is heated by the heating of the resistance wire.

[0051] Specifically, the first heater may be: a pipeline gas heater or an external heating structure covered by the outer wall of the pipeline.

[0052] As an implementable embodiment, the second heater may be implemented by microwave heating.

[0053] In this embodiment, the first heater realizes rapid heating of the nitrogen, and the second heater realizes uniform heating of the nitrogen, thereby improving the effect of heating the nitrogen.

[0054] like Figure 1 As shown, the heating pipeline 40 is also provided with a third valve PV3 and a first mass flow controller MFC1, one end of the third valve PV3 is connected to the first pipeline 20, the other end of the third valve PV3 is connected to one end of the first mass flow controller MFC1, the other end of the first mass flow controller MFC1 is connected to the input end of the heating module 41, the output end of the heating module 41 is connected to the third pipeline 60, and the controlled end of the heating module 41 is connected to the output end of the temperature control module 42.

[0055] The third valve PV3 is used to control the on-off of the heating pipeline 40. In addition, a one-way valve may be provided on the heating pipeline 40, and the one-way valve is provided on the downstream side of the third valve PV3 to allow nitrogen to flow in one direction and not flow back.

[0056] The first mass flow controller MFC1 is used to control the flow of nitrogen mixed with isopropanol. The mass flow controller has a steady flow function and can control the flow of gas or liquid passing therethrough to control the mixing ratio of nitrogen and isopropanol. The mass flow controller is connected to the control system, and the user can set the flow rate as needed. The mass flow controller can automatically keep the flow rate constant at the set value, and even if the ambient pressure fluctuates or the ambient temperature changes, the flow rate will not deviate from the set value.

[0057] like Figure 1 As shown, in one embodiment of the present invention, the output end of the second pipeline 30 is provided with a temperature detection module 35 connected to the temperature control module 42. The temperature detection module 35 measures the temperature of the mixed fluid of the first fluid and the second fluid and feeds the temperature back to the temperature control module 42, so that the temperature control module 42 controls the heating temperature of the heating module 41 to stabilize the mixed fluid within a preset temperature range.

[0058] The temperature detection module 35 is disposed at the gas output end of the second pipeline 30 to measure the temperature of the mixed gas output from the second pipeline 30. Specifically, the temperature detection module 35 may be a temperature sensor.

[0059] The temperature detection module 35 sends the measured temperature of the mixed gas to the temperature control module 42, and the temperature control module 42 controls the heating module 41 according to the temperature to increase or decrease the heating temperature of the nitrogen, so as to stabilize the temperature of the mixed gas output by the second pipeline 30 within a preset temperature range. The preset temperature range can be 60°C to 90°C. In the embodiment of the present invention, the temperature detection module 35, the temperature control module 42 and the heating module 41 form a closed-loop control of the temperature, thereby achieving accurate temperature control and reducing control errors.

[0060] like Figure 1 As shown, in one embodiment of the present invention, a pipeline heat preservation structure 34 is provided on the second pipeline 30. The pipeline heat preservation structure 34 can be realized by a heat preservation material wrapped outside the second pipeline 30.

[0061] like Figure 1 As shown, in one embodiment of the present invention, an atomizing module 33 is provided on the second pipeline 30, and the atomizing module 33 mixes the first fluid and the second fluid and atomizes and outputs a mixed gas. The first input end of the atomizing module 33 is fed with isopropanol liquid, the second input end is fed with heated nitrogen, and the output end outputs a mixed gas of isopropanol and nitrogen.

[0062] In one embodiment, the atomization module 33 includes a first atomizer and a second atomizer. The first atomizer is used to achieve preliminary atomization of the isopropanol liquid. Optionally, the first atomizer is provided with an atomizing nozzle, and the isopropanol liquid is converted into atomized isopropanol gas by the atomizing nozzle, and then mixed with nitrogen to obtain a mixed gas.

[0063] The second atomizer can use oscillating waves for atomization, such as ultrasonic atomization, to further improve the atomization effect. Specifically, the second atomizer includes an ultrasonic generator connected to the nozzle, so as to use ultrasonic high-frequency oscillation to atomize the liquid passing through the nozzle into uniform micron-sized particles for output.

[0064] This embodiment adopts two-stage atomization, the first atomizer converts the liquid into atomized gas composed of droplets, and then uses oscillation waves to further break up the droplets in the atomized gas into finer particles, thereby improving the atomization effect of the final mixed gas, avoiding the defect of droplets formed on the surface of the substrate due to the use of insufficiently atomized mixed gas to perform substrate drying. In addition, this embodiment first uses the first atomizer with a simpler structure and a faster atomization speed for preliminary atomization, and then uses the second atomizer with a complex structure to perform secondary atomization on the gas that has been preliminarily atomized, which can also improve the efficiency of atomization.

[0065] like Figure 1 As shown, the second pipeline 30 is provided with a fourth valve PV4, a second mass flow controller MFC2, an atomization module 33, a fifth valve PV5 and a temperature sensor. The pipeline downstream of the atomization module 33 is provided with a pipeline insulation structure 34.

[0066] The fourth valve PV4 and the fifth valve PV5 form a second switch assembly, which is used to control the on-off of the second pipeline 30. One end of the fourth valve PV4 is connected to the second connection port of the second pipeline 30 and the storage body 10, and the other end of the fourth valve PV4 is connected to the input end of the second mass flow controller MFC2. The output end of the second mass flow controller MFC2 is connected to the first input end of the atomization module 33, and the second input end of the atomization module 33 is connected to the heating pipeline 40. The output end of the atomization module 33 is connected to one end of the fifth valve PV5. A temperature sensor is connected between the other end of the fifth valve PV5 and the output end of the second pipeline 30 to measure the temperature of the output mixed gas. Among them, the second mass flow controller MFC2 is a liquid mass flow controller. A pipeline insulation structure 34 is provided on the pipeline between the atomization module 33 and the fifth valve PV5 and the pipeline between the fifth valve PV5 and the temperature sensor.

[0067] like Figure 1As shown, the second pipeline 30 has an extension portion 31 located inside the storage body 10, and the distance between the bottom end of the extension portion 31 and the bottom surface of the storage body 10 is less than a preset value. The preset value can be 0.1 cm to 10 cm, preferably 0.5 cm. Under normal conditions, the bottom end of the extension portion 31 is lower than the interface of the liquid in the storage body 10.

[0068] like Figure 1 As shown, the inner bottom surface of the storage body 10 has a certain angle with the horizontal plane, and the angle is less than 5 degrees. The inner bottom surface is inclined and extended in a manner of decreasing in height from the edge to the corresponding position of the extension portion 31, so as to form a recess at the corresponding position of the extension portion 31, so that the extension portion 31 can extend into the recess, thereby being able to more thoroughly empty the isopropyl alcohol liquid in the storage body 10. A support portion is also provided at the bottom end of the storage body 10 to enable the storage body 10 to be placed horizontally.

[0069] In one embodiment, a weighing device may be used to monitor the weight of the storage body 10 in real time.

[0070] The embodiment of the present invention realizes temperature control of isopropanol by heating nitrogen. In addition, a temperature sensor is arranged at the outlet of the mixed gas to monitor the outlet temperature, thereby realizing real-time control of the temperature of the mixed gas. In addition, a pipeline insulation structure 34 is arranged on the relevant pipeline after heating to ensure that the temperature of the mixed gas is constant within a preset temperature range.

[0071] like Figure 2 As shown, in one embodiment, the fluid supply device further includes a liquid adding pipeline 32, which is used to add isopropyl alcohol liquid into the storage body 10. The liquid adding pipeline is connected to the second pipeline 30, that is, the liquid adding pipeline is also connected to the storage body 10 through the second connecting port. The input end of the liquid adding pipeline is connected to the isopropyl alcohol supply source.

[0072] like Figure 2 As shown, an independent switch assembly is provided on the liquid adding pipeline to control its on-off time. A sixth valve PV6 is provided on the liquid adding pipeline, and a one-way valve may also be provided. When the sixth valve is opened, the isopropyl alcohol liquid enters the storage body 10 through the sixth valve, and the one-way valve can prevent the isopropyl alcohol liquid from flowing out in the reverse direction. The inlet of the one-way valve on the liquid adding pipeline is close to the inlet side of the liquid adding pipeline, and the outlet is close to one side of the storage body 10, so that the isopropyl alcohol liquid can only flow into the storage body 10 through the liquid adding pipeline.

[0073] like Figure 2As shown, in one embodiment, the fluid supply device further includes a pressure relief pipeline 22, which is used to discharge gas from the storage body 10 to reduce the pressure in the storage body 10, so that the isopropyl alcohol liquid is added to the storage body 10 through the liquid adding pipeline. The pressure relief pipeline is connected to the first pipeline 20, that is, the pressure relief pipeline is also connected to the storage body 10 through the first connecting port.

[0074] like Figure 2 As shown, an independent switch component is provided on the pressure relief pipeline to control its on and off time. A seventh valve PV7 is provided on the pressure relief pipeline, and a one-way valve may also be provided. When the seventh valve is opened, the gas in the storage body 10 is discharged through the pressure relief pipeline, and the one-way valve can prevent the gas from flowing in reverse. The inlet of the one-way valve on the pressure relief pipeline is close to one side of the storage body 10, and the outlet is close to the outlet side of the pressure relief pipeline, so that the gas can only be discharged from the storage body 10 through the pressure relief pipeline.

[0075] like Figure 2 As shown, in one embodiment, the fluid supply device further comprises a third pipeline 60, which is airtightly connected to the pressure detection part 61. One end of the third pipeline 60 is airtightly connected to the third connection port of the storage body 10, and the other end of the third pipeline 60 is airtightly connected to the pressure detection part 61.

[0076] The third pipeline 60 connects the pressure detection unit 61 with the inside of the storage body 10, so that the pressure detection unit 61 can measure the air pressure in the storage body 10 in real time, and transmit the air pressure data to the control system for display, so as to facilitate the operator to monitor the internal state and operation of the storage device, and timely troubleshoot when the pressure is abnormal. The pressure detection unit 61 can be a pressure gauge. This embodiment can monitor the internal pressure of the storage body 10 in real time, can prevent pressure abnormalities, and realize safe and efficient use and storage of isopropyl alcohol liquid.

[0077] like Figure 2 As shown, in one embodiment, the fluid supply device further comprises a fourth pipeline 50, which is airtightly connected to the liquid level detection part 51. One end of the fourth pipeline 50 is airtightly connected to the fourth connection port of the storage body 10, and the other end of the fourth pipeline 50 is airtightly connected to the liquid level detection part 51.

[0078] The liquid level detection unit 51 may include a photoelectric switch sensor disposed in the storage body 10 to determine the height of the liquid level in the storage body 10. When the liquid level detection unit 51 detects that the liquid level in the storage body 10 is higher or lower than a preset position, an alarm signal is sent to the control system so that the control system executes a corresponding processing program. The processing program may be to control the switch component of the second pipeline 30 to open so that the liquid is discharged or to notify the operator to handle it.

[0079] It can be understood that the pressure detection unit 61, the liquid level detection unit 51 and the switch components of each pipeline are all connected to the control system.

[0080] In summary, the working process of the fluid supply device is:

[0081] In the IPA output state, the first valve PV1, the second valve PV2, the third valve PV3, the fourth valve PV4 and the fifth valve PV5 are all opened, the sixth valve and the seventh valve are all closed, and nitrogen is introduced into the storage body 10 through the first pipeline 20 to pressurize the isopropyl alcohol liquid and discharge it through the second pipeline 30. At the same time, the first mass flow controller MFC1 of the heating pipeline 40 allows a certain flow of nitrogen to pass through for heating and flow into the atomization module 33, and the second mass flow controller MFC2 of the second pipeline 30 allows a certain flow of isopropyl alcohol liquid to flow into the atomization module 33, so that the heated nitrogen and isopropyl alcohol in a fixed proportion are mixed in the atomization module 33 and the isopropyl alcohol and nitrogen mixed gas is discharged.

[0082] In the IPA input state, the sixth valve and the seventh valve are both opened, the first valve PV1, the second valve PV2, the third valve PV3, the fourth valve PV4 and the fifth valve PV5 are all closed, and the isopropyl alcohol liquid enters the storage body 10 through the liquid adding pipeline. At the same time, the gas in the storage body 10 is discharged through the pressure relief pipeline to ensure the stability of the air pressure in the storage body 10.

[0083] During the operation of the fluid supply device, when the liquid level detection unit 51 detects that the liquid level in the storage body 10 is too low, isopropyl alcohol liquid is controlled to be added into the storage body 10. During this period, the pressure detection unit 61 continuously detects the internal air pressure.

[0084] An embodiment of the present invention further provides a substrate drying device, comprising a substrate holding device and the fluid supply device as described above, wherein the substrate holding device fixes the cleaned substrate and sprays the mixed gas onto the substrate through the fluid supply device to dry the substrate.

[0085] The drawings of this specification are schematic diagrams, which assist in explaining the concept of the present invention and schematically show the shapes of various parts and their mutual relationships. It should be understood that in order to clearly show the structures of various components of the embodiments of the present invention, the drawings are not drawn according to the same scale, and the same reference numerals are used to represent the same parts in the drawings.

[0086] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0087] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A fluid supply device for substrate drying, comprising a storage body, a first pipeline and a second pipeline, wherein the first pipeline and the second pipeline are respectively connected to the storage body, and the first pipeline and the second pipeline are connected outside the storage body through a heating pipeline; The first pipeline is used to supply a first fluid, a part of the first fluid flows into the storage body, and another part of the first fluid is divided into the heating pipeline and heated before being merged into the second pipeline and mixed with the second fluid pressed out of the storage body in the second pipeline before being output; the first fluid is nitrogen, and the second fluid is isopropanol; the second pipeline is located at the bottom end of the storage body close to the inner bottom surface of the storage body; The second pipeline has an extension portion located inside the storage body, and the distance between the bottom end of the extension portion and the inner bottom surface of the storage body is less than 0.1-10cm; the angle between the inner bottom surface and the horizontal plane is less than 5°, and the inner bottom surface extends obliquely in a manner of decreasing height from the edge to the corresponding position of the extension portion; a heating portion is provided on the heating pipeline, and the heating portion includes a heating module and a temperature control module, and the heating module is connected to the temperature control module; the heating module is arranged on the upstream side of the connection port between the heating pipeline and the second pipeline to heat the nitrogen flowing through the heating pipeline; the heating module includes a first heater and a second heater; the first heater adopts a pipeline gas heater or an external heating structure covered by the outer wall of the pipeline to achieve rapid heating of the nitrogen; the second heater adopts microwave heating to achieve uniform heating of the nitrogen; the temperature of the mixed fluid is between 60°C and 90°C, and the substrate is dried using hot gas to form a temperature gradient to cause a thermal Marangoni effect, inducing the cleaning liquid on the surface of the substrate to be peeled off from the surface of the substrate with surface attachments.

2. The fluid supply device according to claim 1, characterized in that: The output end of the second pipeline is provided with a temperature detection module connected to the temperature control module. The temperature detection module measures the temperature of the mixed fluid of the first fluid and the second fluid and feeds the temperature back to the temperature control module, so that the temperature control module controls the heating temperature of the heating module to stabilize the mixed fluid within a preset temperature range.

3. The fluid supply device according to claim 1, characterized in that: The second pipeline is provided with a pipeline insulation structure.

4. The fluid supply device according to claim 1, wherein: The second pipeline is provided with an atomization module, and the atomization module mixes and atomizes the first fluid and the second fluid.

5. The fluid supply device according to claim 1, wherein: A pressure relief pipeline is also included, and the pressure relief pipeline is used to discharge gas from the storage body.

6. The fluid supply device according to claim 1, wherein: It also includes a third pipeline, which is airtightly connected to the pressure detection part.

7. The fluid supply device according to claim 1, wherein: It also includes a fourth pipeline, which is air-tightly connected to the liquid level detection part.

8. A substrate drying device, comprising a substrate holding device and a fluid supply device as described in any one of claims 1 to 7, wherein the substrate holding device fixes the cleaned substrate and sprays a mixed fluid of the first fluid and the second fluid onto the substrate through the fluid supply device to dry the substrate.

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