A device for automatically correcting and measuring the warpage of sputtering target materials

Abstract

The present invention discloses a device for automatic correction and measurement of the warpage of a sputtering target material. The correction platform is installed above the base of the equipment. The main oil cylinder system includes a main oil cylinder bracket and a main oil cylinder slidably installed on the main oil cylinder bracket. The main oil cylinder bracket is installed on the base of the equipment through a first motion driving mechanism. The target material ejection oil cylinder system includes more than two target material ejection oil cylinders. Each target material ejection oil cylinder is respectively installed on the base of the equipment through a second motion driving mechanism. The upper surface of the correction platform corresponds to each target material ejection oil cylinder and is provided with an ejection oil cylinder slideway for the top of the target material ejection oil cylinder to extend and slide. A target material warpage laser measuring instrument is respectively installed on the side of the main oil cylinder and below the correction platform. The present invention is not only simple in structure, high in efficiency in correction and measurement of target material warpage, and strong in safety, but also realizes high-precision automatic correction and detection of target material warpage, and is highly practical.

Description

Technical Field

[0001] The invention relates to the field of sputtering target manufacturing equipment, and in particular to a device for automatically correcting and measuring the warpage of a sputtering target. Background Art

[0002] The sputtering target is usually bonded to the backing plate by welding. The backing plate is usually made of oxygen-free copper, while the target can be made of many materials, such as high-purity aluminum, molybdenum, copper, titanium, ITO (indium tin oxide), etc. Due to the different thermal expansion coefficients of the target and the backing plate, the target will warp to varying degrees during the welding and heating process of the target. Taking the G8.5 generation long molybdenum target as an example, the thermal expansion coefficient of molybdenum is 5.8×10 -6 / ℃, while the thermal expansion coefficient of copper is 17.6×10 -6 / ℃. The target blank of this target material is 2650mm long, the back plate is 3070mm long, and the welding temperature is 180℃. It is calculated that when the target blank and the back plate are welded, the target blank will be elongated by 2.77mm, and the back plate will be elongated by 9.73mm. During the cooling process of the target material after welding, the shrinkage of the back plate is greater than that of the target blank. Therefore, the entire target material will be arched upward, and the maximum arch height can reach 30mm. However, the OEM customers generally require the target material warpage to be -2 to +1mm, so the target material that is arched due to welding deformation needs to be corrected so that its warpage meets the specified requirements.

[0003] At present, sputtering target manufacturers generally use manual methods to calibrate and measure the target warpage. The method is to move the target by a crane (or other lifting equipment) and place it on a special platform for target calibration, and put a pad (which can be a hardwood block or Teflon) under the edge of the target to support the target. There is a movable bracket above the calibration platform. Move this bracket to the center of the target, and then put the jack between the target and the bracket crossbar. Use the power of the jack to press the target down at the highest arch point of the target until the target warpage is about -5mm (empirical value). After holding the pressure for 4 to 5 hours, release the jack and the target begins to rebound upward. After the target rebounds stably, use an ordinary (or digital) wedge-shaped feeler gauge to measure the target warpage. If the warpage does not meet the requirements, repeat the above process, adjust the pressure value and the holding time according to the actual warpage size, so that the target warpage finally meets the specified requirements.

[0004] However, it is inevitable that the manual correction and measurement of the target material warpage mentioned above has problems such as low efficiency, poor safety, poor measurement accuracy, and poor practicality. Summary of the invention

[0005] The object of the present invention is to provide a device for automatically correcting and measuring the warpage of a sputtering target material, which has a simple structure, high efficiency in correcting and measuring the warpage of the target material, high measurement accuracy and high safety.

[0006] To achieve the above object, the present invention provides the following solutions:

[0007] The present invention provides a device for automatically correcting and measuring the warpage of a sputtering target material, comprising a correction platform, an equipment base, a main oil cylinder system, a target material ejecting oil cylinder system and a target material warpage laser measuring instrument, wherein the correction platform is installed above the equipment base, the main oil cylinder system comprises a main oil cylinder bracket and a main oil cylinder slidably installed on the main oil cylinder bracket, the main oil cylinder is located above the correction platform, and the main oil cylinder bracket is movably installed on the equipment base through a first motion driving mechanism; the target material ejecting oil cylinder system comprises more than two target material ejecting oil cylinders, each of which is movably installed on the equipment base through a second motion driving mechanism, and an ejecting oil cylinder slide groove for the top of the target material ejecting oil cylinder to extend and slide is respectively provided on the upper surface of the correction platform corresponding to each of the target material ejecting oil cylinders; and a target material warpage laser measuring instrument is respectively installed on the side of the main oil cylinder and below the correction platform.

[0008] Optionally, at least two target material positioning blocks may be detachably mounted on the correction platform, and positioning surfaces of the target material positioning blocks for contacting the target material are provided with chamfers.

[0009] Optionally, a numerically controlled servo proportional valve is installed on the main oil cylinder, and the numerically controlled servo proportional valve can automatically control the downward pressure and distance of the main oil cylinder according to different initial warping degrees of the target material.

[0010] Optionally, a numerically controlled servo proportional valve is installed on each of the target ejection cylinders, and the numerically controlled servo proportional valve can control the ejection height of the target ejection cylinder.

[0011] Optionally, the target ejection cylinder includes two long target ejection cylinders and four square target ejection cylinders; the two long target ejection cylinders are symmetrically arranged in the length direction of the correction platform, and the two ejection cylinder slides corresponding to the two long target ejection cylinders are located on the length direction axis of the correction platform; the four square target ejection cylinders are radially distributed with the midpoint of the length direction axis as the center, and the ejection cylinder slides corresponding to the square target ejection cylinders are symmetrically arranged in pairs, and each relative two ejection cylinder slides are located on the same oblique straight line, and the two oblique straight lines intersect at the midpoint of the length direction axis.

[0012] Optionally, the acute angles formed between the two oblique straight lines and the longitudinal axis are both 38°.

[0013] Optionally, the master cylinder bracket includes two support frames, a first ball screw connected between the two support frames, and a first ball nut arranged on the first ball screw, one end of the first ball screw is connected to a first motor reducer, and the master cylinder is installed on the first ball nut; the two support frames are symmetrically installed on both sides of the correction platform through the first motion drive mechanism.

[0014] Optionally, the first motion drive mechanism includes a second ball screw, a second motor reducer connected to one end of the second ball screw, and a second ball nut arranged on the second ball screw, the second ball screw is horizontally installed along the length direction of the correction platform, and the support frame is installed on the second ball nut.

[0015] Optionally, the second motion drive mechanism includes a third ball screw, a servo motor connected to one end of the third ball screw, and a third ball nut arranged on the third ball screw, each of the third ball screws is horizontally installed along the extension direction of the corresponding ejection cylinder slide groove, and a linear guide rail is arranged on one side of each of the third ball screws.

[0016] Optionally, the correction platform is a rectangular correction platform, and a positioning block is respectively arranged on four sides of the rectangular correction platform.

[0017] Compared with the prior art, the present invention has achieved the following technical effects:

[0018] The device for automatic correction and measurement of the warpage of a sputtering target provided by the present invention has a main oil cylinder that can move in a cross direction through a main oil cylinder bracket, and the main oil cylinder automatically controls the pressing pressure and the holding time according to the initial warpage of the target material, so as to perform downward correction on the starting point of the deformation arch of the target material; each target material ejection oil cylinder arranged below the correction platform can correct the position of the target material before the main oil cylinder is started, and the position of each target material ejection oil cylinder is automatically adjusted according to the specification of the target material, so as to improve the position accuracy of the correction of the warpage of the target material; at the same time, a warpage laser measuring instrument arranged on one side of the main oil cylinder can be used to measure the initial warpage of the target material before the main oil cylinder is pressed down, automatically calculate and execute the distance and pressure that the main oil cylinder needs to press down until the warpage of the target material meets the specified requirements, and the warpage laser measuring instrument installed directly below the correction platform can accurately measure the change of the warpage at the center position of the target material. The present invention not only has a simple structure, high efficiency in correction and measurement of the warpage of the target material, and strong safety, but also realizes high-precision automatic correction and detection of the warpage of the target material, and has strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0020] Figure 1 A top view of the device for automatically correcting and measuring the warpage of a sputtering target according to the present invention;

[0021] Figure 2 It is a front view of the device for automatically correcting and measuring the warpage of a sputtering target material according to the present invention;

[0022] Figure 3 for Figure 1 AA section view;

[0023] Among them, the accompanying drawings are marked as follows: 1. Correction platform; 2. Equipment base; 3. Target warping laser measuring instrument; 4. Main oil cylinder; 5. Support frame; 6. First ball screw; 7. Second ball screw; 8. Target positioning block; 9. Long target ejection cylinder; 10. Square target ejection cylinder; 11. Ejection cylinder slide; 12. Third ball screw; 13. Linear guide; 14. Length axis; 15. Oblique straight line; 16. Smallest long target; 17. Largest long target; 18. Smallest square target; 19. Largest square target. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] The object of the present invention is to provide a device for automatically correcting and measuring the warpage of a sputtering target material, which has a simple structure, high efficiency in correcting and measuring the warpage of the target material, high measurement accuracy and high safety.

[0026] Based on this, the present invention provides a device for automatic correction and measurement of the warpage of a sputtering target, comprising a correction platform, an equipment base, a main oil cylinder system, a target ejection oil cylinder system and a target warpage laser measuring instrument, wherein the correction platform is installed above the equipment base, the main oil cylinder system comprises a main oil cylinder bracket and a main oil cylinder slidably installed on the main oil cylinder bracket, the main oil cylinder is located above the correction platform, and the main oil cylinder bracket is movably installed on the equipment base through a first motion driving mechanism; the target ejection oil cylinder system comprises more than two target ejection oil cylinders, each target ejection oil cylinder is movably installed on the equipment base through a second motion driving mechanism, and an ejection oil cylinder slide groove for the top of the target ejection oil cylinder to extend and slide is respectively provided on the upper surface of the correction platform corresponding to each target ejection oil cylinder; a target warpage laser measuring instrument is respectively installed on the side of the main oil cylinder and below the correction platform.

[0027] The present invention has not only a simple structure, high efficiency in target material warpage correction and measurement, and strong safety, but also realizes high-precision automatic correction and detection of target material warpage, and has strong practicality.

[0028] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0029] Embodiment 1:

[0030] like Figures 1 to 3As shown, this embodiment provides a device for automatically correcting and measuring the warpage of a sputtering target, comprising a correction platform 1, an equipment base 2, a main oil cylinder system, a target ejection oil cylinder system and a target warpage laser measuring instrument 3, wherein the correction platform 1 is installed above the equipment base 2, the main oil cylinder system comprises a main oil cylinder bracket and a main oil cylinder 4 slidably installed on the main oil cylinder bracket, the main oil cylinder 4 is located above the correction platform 1, the main oil cylinder bracket is movably installed on the equipment base 2 through a first motion driving mechanism, and the main oil cylinder 4 can be moved forward and backward and left and right above the correction platform 1 under the movement of the first motion driving mechanism; the target ejection oil cylinder system comprises more than two target ejection oil cylinders, each target ejection oil cylinder They are movably mounted on the equipment base 2 through a second motion drive mechanism. The upper surface of the correction platform 1 is provided with a cylinder slide 11 for the top of the target ejection cylinder to extend and slide. A target warpage laser measuring instrument 3 is installed on the side of the main cylinder 4 and directly below the correction platform 1. The warpage laser measuring instrument 3 set on one side of the main cylinder 4 can be used to measure the initial warpage of the target before the main cylinder 4 is pressed down, and automatically calculate and execute the distance and pressure that the main cylinder 4 needs to be pressed down until the warpage of the target meets the specified requirements. The warpage laser measuring instrument 3 installed directly below the correction platform 1 can accurately measure the change of the warpage at the center of the target. Among them, since the equipment base 2 is used to support the correction platform 1 and the entire device, the equipment base 2 is integrally welded and tempered to eliminate stress to have sufficient strength. At the same time, the equipment base 2 has a horizontal adjustment function of the device, which can adjust the plane inclination of the correction platform 1.

[0031] Furthermore, if Figure 1 As shown, in this embodiment, the correction platform 1 is preferably a rectangular correction platform. The size of the correction platform 1 can be preferably set to 4200mm×2200mm according to the existing longest strip target and the largest square target size. In order to ensure sufficient strength and surface finish, high-quality ductile iron can be used for one-time casting and processing, and 45# steel can also be used for quenching and tempering, and the surface finish is below Ra3.2. Among them, at least two target positioning blocks 8 are detachably installed on the correction platform 1. In this embodiment, a target positioning block 8 is preferably set around the rectangular correction platform. The target positioning block 8 is used to position the target on the correction platform 1, and its position can be automatically adjusted according to the size of the target. In addition, when the target positioning block 8 is placed on the correction platform 1 and is precisely positioned again, in order to accurately place the target on the correction platform 1, the positioning surface of the target positioning block 8 used for contacting the target is provided with a chamfer of 10° to 15° in this embodiment. Preferably, the entire positioning surface of the target positioning block 8 is an inclined surface with an inclination of 10° to 15°. During positioning, the inclined surface will maintain an angle of 10° to 15° with the contact surface of the target. In order to avoid damage to the target, the positioning surface of the target positioning block 8 should be made of protective material.

[0032] Furthermore, a numerically controlled servo proportional valve is installed on the main oil cylinder 4 in this embodiment, and the numerically controlled servo proportional valve can automatically control the pressure and distance of the main oil cylinder 4 according to the different initial warping degrees of the target material. The main oil cylinder 4 in this embodiment preferably adopts a piston cylinder with a nominal pressure of 300KN.

[0033] Furthermore, each target ejection cylinder in this embodiment is also equipped with a numerical control servo proportional valve, where the numerical control servo proportional valve can control the upward ejection height of the target ejection cylinder. Each target ejection cylinder is controlled individually with a control accuracy of 0.1 mm. Each target ejection cylinder can respectively lift the target through the ejection cylinder slide 11.

[0034] Furthermore, in this embodiment, Figure 1 and 3 As shown, the target ejection cylinder includes two long target ejection cylinders 9 and four square target ejection cylinders 10; wherein, the two long target ejection cylinders 9 are symmetrically arranged in the length direction of the correction platform 1, and the two ejection cylinder slides 11 corresponding to the two long target ejection cylinders 9 are located on the length direction axis 14 of the correction platform 1, and the length direction axis 14 is the symmetry axis of the correction platform 1 in the length direction; the four square target ejection cylinders 10 are radially distributed with the midpoint of the length direction axis 14 as the center, and the ejection cylinder slides 11 corresponding to the square target ejection cylinders 10 are symmetrically arranged in pairs, and each of the two opposite ejection cylinder slides 11 is located on the same oblique straight line 15, as shown in FIG. Figure 1 As shown, the two oblique straight lines 15 are respectively distributed on the two angle bisectors of the square target, and the two oblique straight lines 15 intersect at the midpoint of the longitudinal axis 14. Preferably, the acute angles formed between the two oblique straight lines 15 and the longitudinal axis 14 are both 38°. It can be seen that the six ejection cylinder slide grooves 11 are symmetrically distributed in a "M" shape on the correction platform 1.

[0035] like Figure 1As shown, the two ejection cylinder chutes 11 corresponding to the two long target ejection cylinders 9 are chutes of exactly the same size, and the largest long target 17 can completely cover the two ejection cylinder chutes 11 when placed in the center of the correction platform 1, and the two ends of the smallest long target 16 can respectively cover part of the ejection cylinder chutes 11 when placed in the center of the correction platform 1. Correspondingly, the four ejection cylinder chutes 11 corresponding to the four square target ejection cylinders 9 are chutes of exactly the same size, and the largest square target 18 and the largest square target 19 can both cover part of each ejection cylinder chutes 11 when placed in the center of the correction platform 1, including the two ejection cylinder chutes 11 corresponding to the two long target ejection cylinders 9. The above-mentioned six ejector oil cylinder chutes 11 are controlled independently. When the correction target material is a long strip target material, the two ejector oil cylinder chutes 11 on the longitudinal axis 14 are started; when the correction target material is a square target material, the other four ejector oil cylinder chutes 11 are started. In special cases, when correcting a square target material, the two ejector oil cylinder chutes 11 on the longitudinal axis 14 can also be opened at the same time.

[0036] Furthermore, if Figure 1 As shown, in this embodiment, the main oil cylinder bracket includes two support frames 5, a first ball screw 6 connected between the two support frames 5, and a first ball nut arranged on the first ball screw 6. One end of the first ball screw 6 is connected to the first motor reducer, and the main oil cylinder 4 is installed on the first ball nut. The first ball screw 6 is driven to rotate by the first motor reducer, so that the main oil cylinder 4 can be moved axially along the first ball screw 6. The two support frames 5 are symmetrically installed on both sides of the correction platform 1 through a first motion drive mechanism, wherein the first motion drive mechanism includes a second ball screw 7, a second motor reducer connected to one end of the second ball screw 7, and a second ball nut arranged on the second ball screw 7. The second ball screw 7 is horizontally installed along the length direction of the correction platform 1, and the second ball screw 7 is perpendicular to the first ball screw 6. The support frame 5 is installed on the second ball nut. The second ball screw 7 is driven to rotate by the second motor reducer, which can drive the main cylinder bracket to move in a direction perpendicular to the axis direction of the first ball screw 6, thereby realizing the two-dimensional movement of the main cylinder 4 above the correction platform 1. In this embodiment, the first motor reducer and the second motor reducer can be driven simultaneously or separately, depending on the deformation position of the target material.

[0037] Furthermore, if Figure 3As shown, in this embodiment, the second motion driving mechanism includes a third ball screw 12, a servo motor connected to one end of the third ball screw 12, and a third ball nut arranged on the third ball screw 12. Each third ball screw 12 is horizontally installed along the extension direction of the corresponding ejection cylinder slide 11. At the same time, in this embodiment, a high-strength linear guide rail is respectively arranged on one side of each third ball screw 12 to improve the guiding accuracy of each target ejection cylinder.

[0038] The following is a specific description of the use of this embodiment.

[0039] When in use, first place the target material to be corrected on the correction platform 1, and make the target material to be corrected on the longitudinal axis 14. Then, the target material to be corrected is positioned by the target positioning blocks 8 at both ends of the target material to be corrected. When the position of the target material to be corrected needs to be moved, it can be lifted up and moved by the corresponding long target ejection cylinder 9 or square target ejection cylinder 10. After moving to the desired position, the target material to be corrected is returned to the upper surface of the correction platform 1 by the corresponding target ejection cylinder, and then accurately positioned by the target positioning block 8. Finally, the deformation arch starting point on the target material to be corrected can be corrected by moving the position of the main cylinder 4. After the correction is completed, it can also be lifted up and taken out by the corresponding long target ejection cylinder 9 or square target ejection cylinder 10.

[0040] It can be seen that the device for automatic correction and measurement of the warpage of sputtering targets provided by the present invention, the main oil cylinder can move in the cross direction through the main oil cylinder bracket, the main oil cylinder automatically controls the pressing pressure and the holding time according to the initial warpage of the target material, so as to press down and correct the starting point of the deformation arch of the target material; each target ejection oil cylinder arranged below the correction platform can correct the position of the target material before the main oil cylinder is started, and the position of each target ejection oil cylinder is automatically adjusted according to the size of the target material to improve the position accuracy of the correction of the warpage of the target material; at the same time, the warpage laser measuring instrument arranged on one side of the main oil cylinder can be used to measure the initial warpage of the target material before the main oil cylinder is pressed down, automatically calculate and execute the distance and pressure that the main oil cylinder needs to press down until the warpage of the target material meets the specified requirements, and the warpage laser measuring instrument installed directly below the correction platform can accurately measure the change of the warpage at the center position of the target material. The present invention is not only simple in structure, high in efficiency and safety in target warpage correction and measurement, but also realizes high-precision automatic correction and detection of target warpage, and is highly practical.

[0041] It should be noted that it is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention, and any figure mark in the claims should not be regarded as limiting the claims involved.

[0042] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A device for automatically correcting and measuring the warpage of a sputtering target, characterized in that: It includes a correction platform, an equipment base, a main oil cylinder system, a target ejection oil cylinder system and a target warpage laser measuring instrument, wherein the correction platform is installed above the equipment base, the main oil cylinder system includes a main oil cylinder bracket and a main oil cylinder slidably installed on the main oil cylinder bracket, the main oil cylinder is located above the correction platform, and the main oil cylinder bracket is movably installed on the equipment base through a first motion driving mechanism; the target ejection oil cylinder system includes more than two target ejection oil cylinders, each of which is movably installed on the equipment base through a second motion driving mechanism, and an ejection oil cylinder slideway for the top of the target ejection oil cylinder to extend and slide is respectively provided on the upper surface of the correction platform corresponding to each of the target ejection oil cylinders , wherein the target ejection oil cylinder comprises two long target ejection oil cylinders and four square target ejection oil cylinders; the two long target ejection oil cylinders are symmetrically arranged in the length direction of the correction platform, and the two ejection oil cylinder slides corresponding to the two long target ejection oil cylinders are located on the length direction axis of the correction platform; the four square target ejection oil cylinders are radially distributed with the midpoint of the length direction axis as the center, and the ejection oil cylinder slides corresponding to the square target ejection oil cylinders are symmetrically arranged in pairs, and each relative two ejection oil cylinder slides are located on the same oblique straight line, and the two oblique straight lines intersect at the midpoint of the length direction axis; a target warping laser measuring instrument is respectively installed on the side of the main oil cylinder and under the correction platform.

2. The device for automatically correcting and measuring the warpage of a sputtering target according to claim 1, characterized in that: At least two target material positioning blocks can be detachably mounted on the correction platform. During positioning, the contact surface of the target material positioning block maintains an oblique angle of 10° to 15° with the contact surface of the target material.

3. The device for automatically correcting and measuring the warpage of a sputtering target according to claim 1, characterized in that: A numerically controlled servo proportional valve is installed on the main oil cylinder, and the numerically controlled servo proportional valve can automatically control the downward pressure and distance of the main oil cylinder according to the different initial warping degrees of the target material.

4. The device for automatically correcting and measuring the warpage of a sputtering target according to claim 1, characterized in that: A numerically controlled servo proportional valve is respectively installed on each of the target material ejecting oil cylinders, and the numerically controlled servo proportional valve can control the ejection height of the target material ejecting oil cylinder.

5. The device for automatically correcting and measuring the warpage of a sputtering target according to claim 1, characterized in that: The acute angles formed between the two oblique straight lines and the longitudinal axis are both 38°.

6. The device for automatically correcting and measuring the warpage of a sputtering target according to claim 1, characterized in that: The master cylinder bracket includes two support frames, a first ball screw connected between the two support frames, and a first ball nut arranged on the first ball screw, one end of the first ball screw is connected to the first motor reducer, and the master cylinder is installed on the first ball nut; the two support frames are symmetrically installed on both sides of the correction platform through the first motion drive mechanism.

7. The device for automatically correcting and measuring the warpage of a sputtering target according to claim 6, characterized in that: The first motion driving mechanism includes a second ball screw, a second motor reducer connected to one end of the second ball screw, and a second ball nut arranged on the second ball screw. The second ball screw is horizontally installed along the length direction of the correction platform, and the support frame is installed on the second ball nut.

8. The device for automatically correcting and measuring the warpage of a sputtering target according to claim 1, characterized in that: The second motion driving mechanism includes a third ball screw, a servo motor connected to one end of the third ball screw, and a third ball nut arranged on the third ball screw. Each of the third ball screws is horizontally installed along the extension direction of the corresponding ejection cylinder slide groove, and a linear guide is arranged on one side of each of the third ball screws.

9. The device for automatically correcting and measuring the warpage of a sputtering target according to claim 2, characterized in that: The correction platform is a rectangular correction platform, and a positioning block is respectively arranged on the four sides of the rectangular correction platform.

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