Fixture and deposition device for depositing doped coating on sheet material

Abstract

The present invention provides a fixture and a deposition device for depositing a doped coating on a sheet, and relates to the technical field of coating deposition auxiliary equipment. The fixture includes a transmission unit and a clamping unit, the clamping unit is used to load a doping source, the transmission unit is connected to the clamping unit, and the transmission unit can drive the clamping unit to move vertically under external drive, the fixture can adjust the distance between the doping source and the hot wire, and realize flexible adjustment of the doping amount of the doped substance, thereby realizing gradient doping of the doped substance, improving the defect that the distance between the doping source and the hot wire cannot be adjusted in the existing deposition process, thereby causing the doping amount of the doped substance to be flexibly adjusted; the fixture has a simple structure, is easy to operate, and does not change the original structure and components of the deposition device, providing an industrial basis for depositing a doped coating on a sheet. The present invention also provides a deposition device, including a furnace body and the above-mentioned fixture, the fixture is located in the furnace body and loads the doping source.

Description

Technical Field

[0001] The invention relates to the technical field of coating deposition auxiliary equipment, and in particular to a fixture and a deposition device for depositing a doped coating on a sheet. Background Art

[0002] With the development of chemical vapor deposition diamond technology, more and more companies and research institutes have conducted systematic research on this technology. One important aspect of the research is to dope diamonds, thereby changing the mechanical, thermal, electrical, optical and other properties of diamonds, making them have a wider range of uses. Metal doping can effectively improve the internal stress of the coating and improve the bonding strength of the film substrate. When metal doping is performed, a special fixture is often required to fix the metal doping source. The position of the metal doping source (the temperature field) has an important influence on the doping amount. Studies have shown that when the distance between the substrate and the hot wire is constant, the closer the metal doping source is to the hot wire, the more metal doping is deposited in the diamond, and the farther the metal doping source is from the hot wire, the less metal doping is deposited in the diamond.

[0003] The existing metal doping device directly fixes the metal doping source at a certain distance below the hot wire. During the deposition process, the distance between the doping source and the hot wire cannot be adjusted, so the metal doping amount cannot be adjusted, and gradient doping of the metal cannot be achieved.

[0004] In view of this, the present invention is proposed to solve at least one of the above problems. Summary of the invention

[0005] The first purpose of the present invention is to provide a fixture for depositing a doped coating on a sheet. Without changing the basic structure of the deposition device, the fixture can be used to adjust the distance between the doping source and the hot wire, thereby achieving flexible adjustment of the doping amount of the dopant to be doped, and further achieving gradient doping of the dopant to be doped.

[0006] The second object of the present invention is to provide a deposition device, which uses the above-mentioned fixture for depositing a doped coating on a sheet to perform deposition doping operations, and can flexibly adjust the doping amount of the dopant to achieve gradient doping of the dopant.

[0007] In order to solve the above technical problems, the present invention particularly adopts the following technical solutions:

[0008] The present invention provides a fixture for depositing a doped coating on a sheet, comprising a transmission unit and a clamping unit;

[0009] The clamping unit is used to load the doping source, the transmission unit is connected to the clamping unit, and the transmission unit can drive the clamping unit to move vertically under external drive.

[0010] Further, based on the technical solution of the present invention, the clamping unit includes a clamping portion and a clamping head, and the doping source is loaded on the clamping portion through the clamping head.

[0011] Further, on the basis of the technical solution of the present invention, the transmission unit comprises a transmission member and a rotating shaft, the transmission member is sleeved on the rotating shaft and moves coaxially with the rotating shaft, and the rotating shaft is provided with an external thread;

[0012] The clamping part is provided with a screw hole threadedly connected to the rotating shaft; the clamping part is connected with a limiting member for limiting its rotation around the rotating shaft.

[0013] Further, on the basis of the technical solution of the present invention, the transmission unit includes a transmission member and a fixed shaft, the fixed shaft is provided with an external thread, and the transmission member is provided with a screw hole threadedly connected to the fixed shaft;

[0014] The clamping part is pivotally connected to the transmission member and can be raised and lowered synchronously with the transmission member; the clamping part is connected to a limiter for limiting its circumferential rotation.

[0015] Further, on the basis of the technical solution of the present invention, the transmission unit includes a transmission member, a rotating shaft and a fixed shaft, the fixed shaft is provided with an external thread, the rotating shaft is provided with a screw hole threadedly connected to the fixed shaft, the transmission member is sleeved on the rotating shaft and moves coaxially with the rotating shaft;

[0016] The clamping part is pivotally connected to the rotating shaft and can be raised and lowered synchronously with the rotating shaft; the clamping part is connected to a limiting member for limiting its circumferential rotation.

[0017] Furthermore, based on the technical solution of the present invention, the transmission member is a gear, a pulley or a sprocket.

[0018] Further, based on the technical solution of the present invention, the transmission part is a copper transmission part;

[0019] And / or, the clamping portion is a copper clamping portion.

[0020] The present invention also provides a deposition device, comprising a furnace body, wherein the fixture for depositing a doped coating on a sheet is located inside the furnace body and is used to load a doping source;

[0021] The clamp is detachably fixedly connected to the furnace body.

[0022] Further, on the basis of the technical solution of the present invention, a fixture for depositing a doping coating on a sheet is located inside the furnace body and is used to load a doping source;

[0023] The clamp is detachably fixedly connected to the furnace body.

[0024] Further, on the basis of the technical solution of the present invention, a substrate platform is provided inside the furnace body, a rotatable sample stage and at least two hot wire fixing frames are provided on the substrate platform, the hot wire fixing frames are connected to the substrate platform through electrode columns, hot wires are provided between the hot wire fixing frames, and the rotatable sample stage is located below the hot wires;

[0025] The rotatable sample stage can drive the transmission unit of the clamp to move, thereby driving the clamping unit to move vertically.

[0026] Further, based on the technical solution of the present invention, gear transmission, belt transmission or chain transmission is adopted between the rotatable sample stage and the transmission unit of the clamp.

[0027] Compared with the prior art, the fixture and deposition device for depositing a doped coating on a sheet provided by the present invention have the following beneficial effects:

[0028] (1) The clamp for depositing a doped coating on a sheet provided by the present invention comprises a transmission unit and a clamping unit, wherein the clamping unit is used to load a doping source, the transmission unit is connected to the clamping unit, and the transmission unit can drive the clamping unit to move vertically under external drive. The clamp controls the vertical movement of the clamping unit to achieve the vertical lifting and lowering of the doping source, thereby adjusting the distance between the doping source and the hot wire, so as to achieve the purpose of flexibly adjusting the doping amount of the doped material and gradient doping of the doped material, thereby improving the defect that the distance between the doping source and the hot wire cannot be adjusted in the existing deposition process, thereby resulting in the inability to flexibly adjust the doping amount of the doped material.

[0029] The fixture has a simple structure and is easy to operate, and will not change the original structure and components of the deposition device, thus providing an industrial basis for depositing a doped coating on a sheet.

[0030] (2) The deposition device provided by the present invention comprises a furnace body, and the fixture for depositing a doped coating on a sheet is located in the furnace body and loads a doping source. In view of the advantages of the fixture for depositing a doped coating on a sheet, the deposition device using the fixture of the present invention also has all the advantages of the fixture. The deposition device can deposit a doped coating on a sheet, and the doping amount of the doped material can be adjusted by adjusting the distance between the doped material and the hot wire, thereby achieving gradient doping of the doped material. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0032] Figure 1 A schematic diagram of the structure of a fixture for depositing a doped coating on a sheet in an embodiment of the present invention, inside a deposition device;

[0033] Figure 2 for Figure 1 A schematic diagram of the structure of a fixture for depositing a doped coating on a sheet at another angle inside a deposition device;

[0034] Figure 3 for Figure 2 A top view of

[0035] Figure 4 A schematic structural diagram of a clamping unit in an embodiment of the present invention.

[0036] Illustration: 1-transmission unit; 2-clamping unit; 3-doping source; 4-substrate platform; 5-rotatable sample stage; 6-sheet; 7-hot wire fixing frame; 8-hot wire; 9-electrode column; 11-transmission member; 12-rotating shaft; 21-clamping part; 22-chuck; 211-screw hole; 212-limiting hole. DETAILED DESCRIPTION

[0037] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0038] In the description of the present invention, it should be noted that the terms "upper", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0039] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] Embodiment 1

[0041] In the existing deposition process, the distance between the doping source and the hot wire is fixed and cannot be adjusted, which leads to the defect that the doping amount of the dopant cannot be flexibly adjusted.

[0042] To this end, an embodiment of the present invention provides a fixture for depositing a doped coating on a sheet, comprising a clamping unit 2 and a transmission unit 1;

[0043] The clamping unit 2 is used to load the doping source 3. The transmission unit 1 is connected to the clamping unit 2, and the transmission unit 1 can drive the clamping unit 2 to move vertically. Figure 1-4 shown.

[0044] Specifically, the sheet 6 in the present invention represents a sheet-shaped material to be deposited, and the type of the material to be deposited is not limited. The size of the sheet 6 is not specifically limited, and the area of ​​the sheet 6 can be smaller than the effective deposition range of the deposition device, or larger than the effective deposition range of the deposition device. It should be noted that the area of ​​the sheet 6 cannot be infinitely large, and it is limited by the size of the deposition device, and it should be ensured that the sheet 6 can be placed in the deposition device for deposition.

[0045] The clamping unit 2 in the present invention is mainly used to clamp and position the doping source 3. The specific structure of the clamping unit 2 is not limited, and it can be a clamping assembly well known to those skilled in the art, for example, a clamping unit mainly composed of a clamping head 22 and a clamping portion 21; or a clamping unit mainly composed of a clamping member, a positioning nut and a clamping nut, etc.

[0046] There is no specific limitation on the type and form of the doping source 3, which can be a gas, liquid or solid, and can be configured according to actual needs. For example, in the process of chemical vapor deposition of diamond film, a metal doping source is usually used.

[0047] The transmission unit 1 in the present invention can drive the clamping unit 2 to move by external drive. The specific structure of the transmission unit 1 is not limited, and it is a common transmission component in the art, and can be a friction transmission that uses friction between parts to transmit power and motion, such as belt transmission, friction wheel transmission, etc.; or a meshing transmission that transmits power or motion by meshing between the active part and the driven part or by meshing with the help of an intermediate part, such as gear transmission, chain transmission, spiral transmission and harmonic wave transmission.

[0048] The external drive refers to an external device or component that can drive the transmission unit 1 to move, such as a drive motor or other rotatable components, etc., which is not specifically limited here.

[0049] The transmission unit 1 in the present invention mainly drives the clamping unit 2 to move, thereby driving the doping source 3 to move, thereby adjusting the distance between the doping source 3 and the hot wire 8, thereby achieving the purpose of flexibly adjusting the doping amount of the dopant to be doped, realizing gradient doping of the doped material, and improving the defect that the distance between the doping source and the hot wire cannot be adjusted in the existing deposition process, thereby causing the doping amount of the doped material to be unable to be flexibly adjusted.

[0050] Specifically, as a preferred embodiment of the present invention, the clamping unit 2 includes a clamping portion 21 and a clamp 22 , and the doping source 3 is loaded on the clamping portion 21 through the clamp 22 .

[0051] The clamping portion 21 and the clamping head 22 are detachably fixedly connected.

[0052] The transmission unit 1 may be composed of a single component or a plurality of components that cooperate with each other. When the transmission unit 1 is composed of a plurality of components that cooperate with each other, it can be mainly divided into the following three situations:

[0053] As a preferred embodiment of the present invention, the transmission unit 1 includes a transmission member 11 and a rotating shaft 12, the transmission member 11 is sleeved on the rotating shaft 12 and moves coaxially with the rotating shaft 12, and the rotating shaft 12 is provided with an external thread;

[0054] The clamping portion 21 is provided with a screw hole 211 threadedly connected to the rotating shaft 12 ; the clamping portion 21 is connected to a limiting member (not marked in the figure) for limiting its rotation around the rotating shaft 12 .

[0055] In this case, the transmission member 11 can drive the rotating shaft 12 to rotate, and neither of them undergoes vertical displacement; the rotating shaft 12 is threadedly connected to the clamping portion 21, and the rotation of the rotating shaft 12 drives the clamping portion 21 to rise and fall vertically, that is, the clamping portion 21 has a vertical displacement relative to the rotating shaft 12. At the same time, since the clamping portion 21 is provided with a limit member, the limit member can limit the rotation of the clamping portion 21 around the rotating shaft 12, so that the clamping portion 21 only undergoes vertical lifting and falling without rotating itself.

[0056] In addition, threaded transmission is adopted between the rotating shaft 12 and the clamping part 21, which can achieve adjustment with a precision of 0.5 mm, thereby making the lifting movement of the clamping part 21 more stable.

[0057] As another preferred embodiment of the present invention, the transmission unit 1 includes a transmission member 11 and a fixed shaft (not shown in the figure), the fixed shaft is provided with an external thread, and the transmission member 11 is provided with a threaded hole threadedly connected to the fixed shaft;

[0058] The clamping portion 21 is pivotally connected to the transmission member 11 and can be raised and lowered synchronously with the transmission member 11 ; the clamping portion 21 is connected to a limiter for limiting its circumferential rotation.

[0059] In this case, the transmission member 11 rotates under external drive. Since the transmission member 11 is threadedly connected to the fixed axis, the transmission member 11 can move vertically along the fixed axis. The clamping portion 21 is pivotally connected to the transmission member 11, and the clamping portion 21 can be raised and lowered synchronously with the transmission member 11. At the same time, since the clamping portion 21 is provided with a limit member, the limit member can limit the circumferential rotation of the clamping portion 21, so that the clamping portion 21 only performs vertical lifting and lowering without rotating itself.

[0060] As another preferred embodiment of the present invention, the transmission unit 1 includes a transmission member 11, a rotating shaft 12 and a fixed shaft, the fixed shaft is provided with an external thread, the rotating shaft 12 is provided with a threaded hole threadedly connected to the fixed shaft, and the transmission member 11 is sleeved on the rotating shaft 12 and moves coaxially with the rotating shaft 12;

[0061] The clamping portion 21 is pivotally connected to the rotating shaft 12 and can be raised and lowered synchronously with the rotating shaft 12 ; the clamping portion 21 is connected to a limiter for limiting its circumferential rotation.

[0062] In this case, the transmission member 11 rotates synchronously with the rotating shaft 12. Since the rotating shaft 12 is threadedly connected to the fixed shaft, the rotating shaft 12 and the transmission member 11 can move vertically along the fixed shaft. The clamping portion 21 is pivotally connected to the rotating shaft 12, and the clamping portion 21 can be raised and lowered synchronously with the rotating shaft 12. At the same time, since the clamping portion 21 is provided with a limit member, the limit member can limit the circumferential rotation of the clamping portion 21, so that the clamping portion 21 only moves vertically with the rotating shaft 12 without rotating itself.

[0063] It should be noted that the above-mentioned limiter is a component that limits the clamping part 21 from rotating around the rotating shaft 12 or limits the clamping part 21 from rotating in the circumferential direction. The specific structure of the limiter is not specifically limited, and it can be a limiter rod or a limiter block. Alternatively, a limiter hole 212 is provided on the clamping part 21, which can also achieve the above-mentioned limit function.

[0064] In the above three situations, the movement of the transmission unit 1 can be converted into the vertical lifting movement of the clamping part 21, so as to realize the position change of the doping source 3 in the temperature field, thereby achieving the purpose of adjusting the distance between the doping source 3 and the hot wire 8.

[0065] There is no limitation on the specific form of the transmission member 11. As a preferred embodiment of the present invention, the transmission member 11 is a gear, a pulley or a sprocket. The above structure of the transmission member 11 determines that the connection mode between the transmission member 11 and the external drive is gear drive, belt drive or chain drive.

[0066] Gear transmission refers to the transmission of motion and power by gear pairs. It can transmit rotational motion and torque between two parallel axes, intersecting axes or staggered axes. The transmission is relatively accurate, efficient, compact in structure, reliable in operation and long in service life.

[0067] Belt drive is a mechanical transmission that relies on friction to transmit motion and power. Its main features are: the belt has good elasticity, can alleviate shock and vibration during work, and moves smoothly without noise. When the load is too large, the belt slips on the wheel, thus preventing other parts from being damaged and playing a safety protection role.

[0068] Chain drive is a transmission method that transmits the motion and power of a driving sprocket with a special tooth shape to a driven sprocket with a special tooth shape through a chain. Its characteristics are: no elastic sliding, can maintain an accurate average transmission ratio, and have a high transmission efficiency; and the chain does not require a large tension force, so the load on the shaft and bearing is small, the transmission is reliable, the overload capacity is strong, and it can work well under low speed and heavy load.

[0069] The above transmission modes can all realize the transmission of power or motion between the transmission member 11 and the external drive. Preferably, gear transmission is adopted between the transmission member 11 and the external drive, that is, the external drive is a large gear, and the transmission member 11 is a small gear, and the transmission of motion and power is realized through the meshing transmission between the large gear and the small gear; or, belt transmission is adopted between the transmission member 11 and the external drive, that is, both the transmission member 11 and the external drive are pulleys, and the transmission between the two is carried out through a belt.

[0070] The material selection of the transmission unit 1 and the clamping unit 2 should take into consideration the use environment. As a preferred embodiment of the present invention, the transmission member 11 is a copper transmission member;

[0071] And / or, the clamping portion 21 is a copper clamping portion.

[0072] As a preferred embodiment of the present invention, the chuck 22 is a molybdenum chuck.

[0073] The use of copper as the material of the transmission member 11 and the clamping portion 21 can ensure that the above components have a good cooling effect. The use of molybdenum as the material of the clamping head can enable it to withstand a higher working temperature.

[0074] The fixture has a simple structure and is easy to operate, and will not change the original structure and components of the deposition device, thus providing an industrial basis for depositing a doped coating on a sheet.

[0075] Embodiment 2

[0076] The embodiment of the present invention further provides a deposition device. This embodiment is an improvement on the first embodiment. The technical solution described in the first embodiment also belongs to this embodiment and will not be described in detail here.

[0077] The present embodiment provides a deposition device, comprising a furnace body, wherein the fixture for depositing a doped coating on a sheet is located inside the furnace body and is used to load a doping source 3;

[0078] The clamp is detachably fixedly connected to the furnace body.

[0079] The fixture is designed to be detachable, and the original structure and components of the deposition device will not be changed. The fixture only needs to be installed at the corresponding position inside the furnace body. The above design can be implemented using conventional equipment in the field (for example, hot wire chemical vapor deposition furnace) without the need for additional equipment.

[0080] There is no particular limitation on the specific structure of the deposition device.

[0081] As a preferred embodiment of the present invention, a substrate platform 4 is provided inside the furnace body, a rotatable sample stage 5 and at least two hot wire fixing frames 7 are provided on the substrate platform 4, the hot wire fixing frames 7 are connected to the substrate platform 4 through electrode columns 9, hot wires 8 are provided between the hot wire fixing frames 7, and the rotatable sample stage 5 and the clamp are both located below the hot wires 8;

[0082] The rotatable sample stage 5 can drive the transmission unit 1 of the clamp to move, and further drive the clamping unit 2 to move vertically to adjust the distance between the doping source 3 and the hot wire 8 .

[0083] At this time, the sheet 6 is placed on the rotatable sample stage 5, and the original rotatable sample stage 5 of the deposition device is used as an external drive to drive the transmission unit 1 and the clamping unit 2 to move, thereby realizing the vertical movement of the doping source 3, realizing the adjustment of the doping amount of the dopant, and realizing gradient doping by adjusting at different stages of the deposition of the sheet 6. Parameters such as the rotation speed and rotation time of the rotatable sample stage 5 are related to the deposition and doping effect of each sheet, and the above parameters can be adjusted by the deposition device itself.

[0084] As a preferred embodiment of the present invention, when the transmission unit 1 includes a transmission member 11 and a rotating shaft 12, the transmission member 11 is sleeved on the rotating shaft 12, the rotating shaft 12 is sleeved on an electrode column 9, and a screw hole 211 and a limiting hole 212 are provided on the clamping portion 21 of the clamping unit 2. The screw hole 211 is threadedly connected to the rotating shaft 12, and the clamping portion 21 is sleeved on another electrode column 9 through the limiting hole 212, so that the doping source 3 loaded on the clamping portion 21 is located below the hot wire 8, while ensuring that the entire clamping unit 2 is at a certain horizontal height, the clamping portion is also limited from rotating around the rotating shaft.

[0085] At this time, the sheet 6 is placed on the rotatable sample stage 5, and the original rotatable sample stage 5 of the deposition device is used as an external drive. The rotation of the rotatable sample stage 5 drives the transmission member 11 and the rotating shaft 12 to rotate. The rotation of the rotating shaft 12 is converted into the vertical movement of the clamping part 21, thereby realizing the vertical movement of the doping source 3, and then realizing the adjustment of the distance between the doping source 3 and the hot wire 8.

[0086] Furthermore, on the basis of the above technical solution of the present invention, gear transmission, belt transmission or chain transmission is adopted between the rotatable sample stage 5 and the transmission unit 1 of the fixture.

[0087] When the rotatable sample stage 5 and the transmission member 11 of the fixture adopt gear transmission, a rack is provided on the circumferential side of the rotatable sample stage 5, and the transmission member 11 is a gear. The rack on the rotatable sample stage 5 is meshed with the transmission member 11, thereby transmitting the movement of the rotatable sample stage 5 to the transmission member 11.

[0088] When the rotatable sample stage 5 and the transmission member 11 of the fixture are driven by belts, both the rotatable sample stage 5 and the transmission member 11 are pulleys, and the two are connected by a belt, so that the movement of the rotatable sample stage 5 is transmitted to the transmission member 11 .

[0089] When the rotatable sample stage 5 and the transmission member 11 of the fixture are chain-driven, both the rotatable sample stage 5 and the transmission member 11 are in the form of sprockets and are connected by a chain, thereby transmitting the movement of the rotatable sample stage 5 to the transmission member 11 .

[0090] The sheet deposition steps are as follows: opening the furnace of the deposition device, installing a fixture for depositing a doped coating on the sheet inside the deposition device, placing the sheet 6 on the rotatable sample stage 5, and closing the furnace;

[0091] The deposition device is started and the rotation speed of the rotatable sample stage 5 is adjusted as needed to perform hot wire vapor deposition on the sheet 6. The doping source 3 is moved up and down by the controllable rotation of the rotatable sample stage 5 of the deposition device, thereby adjusting the distance between the doping source 3 and the hot wire 8.

[0092] In view of the advantages of the above-mentioned fixture for depositing doped coatings on sheets, the deposition device using the fixture of the present invention also has all the advantages of the above-mentioned fixture. The deposition device can be used to deposit doped coatings on sheets, and the distance between the doped material and the hot wire can be adjusted to adjust the doping amount of the doped material, thereby achieving gradient doping of the doped material.

[0093] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A deposition device, characterized in that: It comprises a furnace body, and a fixture located inside the furnace body and used for loading a doping source (3), wherein the fixture is detachably fixedly connected to the furnace body; the fixture comprises a transmission unit (1) and a clamping unit (2); The clamping unit (2) is used to load the doping source (3), the transmission unit (1) is connected to the clamping unit (2), and the transmission unit (1) can drive the clamping unit (2) to move vertically to adjust the distance between the doping source and the hot wire; A substrate platform (4) is provided inside the furnace body, a rotatable sample platform (5) and at least two hot wire fixing frames (7) are provided on the substrate platform (4), a sheet is provided on the rotatable sample platform (5), the hot wire fixing frames (7) are connected to the substrate platform (4) via electrode columns (9), hot wires (8) are provided between the hot wire fixing frames (7), and the rotatable sample platform (5) is located below the hot wires (8); The rotatable sample stage (5) is capable of driving the transmission unit (1) of the clamp to move, thereby driving the clamping unit (2) to move vertically; The clamping unit (2) comprises a clamping portion (21) and a clamping head (22); the clamping portion (21) and the clamping head (22) are detachably fixedly connected, and the doping source (3) is loaded on the clamping portion (21) via the clamping head (22).

2. The deposition device according to claim 1, characterized in that: The rotatable sample stage (5) and the transmission unit (1) of the fixture are driven by gears, belts or chains.

3. The deposition device according to claim 1, characterized in that: The transmission unit (1) comprises a transmission member (11) and a rotating shaft (12); the transmission member (11) is sleeved on the rotating shaft (12) and moves coaxially with the rotating shaft (12); and the rotating shaft (12) is provided with an external thread; The clamping portion (21) is provided with a screw hole threadedly connected to the rotating shaft (12); the clamping portion (21) is connected to a limiting member for limiting its rotation around the rotating shaft (12).

4. The deposition device according to claim 1, characterized in that: The transmission unit (1) comprises a transmission member (11) and a fixed shaft, the fixed shaft is provided with an external thread, and the transmission member (11) is provided with a screw hole threadedly connected to the fixed shaft; The clamping portion (21) is pivotally connected to the transmission member (11) and can be raised and lowered synchronously with the transmission member (11); the clamping portion (21) is connected to a limiter for limiting its circumferential rotation.

5. The deposition device according to claim 1, characterized in that: The transmission unit (1) comprises a transmission member (11), a rotating shaft (12) and a fixed shaft, the fixed shaft being provided with an external thread, the rotating shaft (12) being provided with a screw hole threadably connected to the fixed shaft, the transmission member (11) being sleeved on the rotating shaft (12) and moving coaxially with the rotating shaft (12); The clamping portion (21) is pivotally connected to the rotating shaft (12) and can be raised and lowered synchronously with the rotating shaft (12); the clamping portion (21) is connected to a limiting member for limiting its circumferential rotation.

6. The deposition device according to any one of claims 3 to 5, characterized in that: The transmission member (11) is a gear, a belt pulley or a sprocket.

7. The deposition device according to any one of claims 3 to 5, characterized in that: The transmission member (11) is a copper transmission member; And / or, the clamping portion (21) is a copper clamping portion.

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