Vacuum valve

Abstract

A vacuum valve has a simple structure, wherein a rotating shaft and a valve plate are connected by a connecting rod along the length direction of the valve plate, whereby the valve plate can rotate along with the rotating shaft, and the connecting side of the connecting rod and the valve plate is floatingly connected at a connecting position between the near-valve-port side and the far-valve-port side, and the floating connection allows slight movement between the valve plate and the connecting rod; an elastic member is also arranged between the connecting rod and the valve plate, and the elastic member applies elastic force on the valve plate to force the valve plate to move to an extreme position within a range of slight movement; the extreme position makes the far-valve-port side of the valve plate contact the side wall earlier than the near-valve-port side in the path where the valve plate rotates toward the valve port following the rotating shaft, and then the near-valve-port side is fixed, and the continuously rotating connecting rod is caused to move slightly relative to the valve plate, thereby pushing and swinging the valve plate, so that the sealing side of the valve plate seals the valve port.

Description

Technical Field

[0001] The invention relates to a vacuum valve. Background Art

[0002] With the rapid development of the national economy, the application of vacuum technology in various industries has become increasingly extensive, and new, higher and more comprehensive requirements have been put forward. Most coating equipment now uses rectangular plug valves. The main problems of this type of valve are high cost, short service life and long single action time. Some customers use rectangular flap valves in their systems, which are not only expensive but also have a long cycle. CN102117734A discloses such flap valves.

[0003] At present, reducing costs and improving competitiveness is an important issue in the industry. A rectangular flap valve with simple structure, high vacuum degree and short single action time is expected to fully meet the requirements of the coating system for the isolation valve. Summary of the invention

[0004] The object of the present invention is to provide a vacuum valve with a simple structure.

[0005] A vacuum valve comprises a valve core assembly and a valve body, wherein the valve body comprises a side wall, the side wall is provided with a valve port, and the valve core assembly comprises a valve plate;

[0006] The valve core assembly also includes a rotating shaft, which is arranged in the valve body and can rotate around its own axis;

[0007] The valve plate has a width direction, a length direction and a thickness direction, and has a connection side and a sealing side in the thickness direction; and has a proximal valve port side adjacent to the valve port and a distal valve port side away from the valve port in the width direction;

[0008] The rotating shaft and the valve plate are connected by a connecting rod along the length direction of the valve plate, whereby the valve plate can rotate along with the rotating shaft, and the connecting side of the connecting rod and the valve plate is floatingly connected at a connecting position between the near valve port side and the far valve port side, and the floating connection allows slight movement between the valve plate and the connecting rod;

[0009] An elastic member is further provided between the connecting rod and the valve plate, and the elastic member applies an elastic force to the valve plate to force the valve plate to move to an extreme position of the slight movable range;

[0010] The extreme position causes the valve plate to follow the shaft to rotate toward the valve port, and the far valve port side of the valve plate contacts the side wall earlier than the near valve port side, thereby subsequently making the near valve port side a fixed part and causing the connecting rod that continues to rotate to move slightly relative to the valve plate, thereby pushing and swinging the valve plate so that the sealing side of the valve plate seals the valve port.

[0011] In one or more embodiments of the vacuum valve, the valve body is a hollow cavity with one side being an open side. The valve core assembly further comprises a cover plate, and a shaft bracket is protrudingly provided on the side of the cover plate facing the valve body. The shaft is rotatably supported by the shaft bracket, and the cover plate detachably seals the open side, whereby the cover plate is configured as a supporting base for the valve core assembly.

[0012] In one or more embodiments of the vacuum valve, the valve core assembly further comprises a driving device, wherein the driving device is arranged on a side of the cover plate facing away from the valve body, and the driving device has a linear motion output member, wherein the linear motion output member passes through the cover plate and is connected to the rotating shaft via a crank, thereby driving the rotating shaft to rotate; a sealing member is arranged between the cover plate and the linear motion output member.

[0013] In one or more embodiments of the vacuum valve, the sealing member is a bellows, one end of the bellows is mounted on the cover plate to form a seal with the cover plate, and the linear motion output member passes through the bellows to form a seal with the bellows.

[0014] In one or more embodiments of the vacuum valve, support plates are provided on the cover plate corresponding to the two ends of the rotating shaft, and the support plates are inserted into the valve body. A small tolerance clearance is fitted between the two ends of the support plate and the wall of the valve body, thereby providing support to the wall from the inner side of the wall of the valve body.

[0015] In one or more embodiments of the vacuum valve, the support plate is the rotating shaft bracket.

[0016] In one or more embodiments of the vacuum valve, a positioning pin is provided on the cover plate, and a pin hole is correspondingly provided on the valve body, and the positioning pin is inserted into the pin hole, and the positioning pin and the positioning hole are cooperated to maintain a parallel state between the cavity walls of the valve body.

[0017] In one or more embodiments of the vacuum valve, the side of the valve body opposite to the side where the valve core assembly is located is also an open side, and the valve body further includes another cover plate, which is detachably connected to the open side located on the opposite side through the other cover plate.

[0018] In one or more embodiments of the vacuum valve, a sealing ring is provided on the sealing side of the valve plate, and the valve port is sealed by means of the sealing ring.

[0019] In one or more embodiments of the vacuum valve, the sealing side of the valve plate is configured as a heat insulation plate.

[0020] In one or more embodiments of the vacuum valve, the sealing side of the valve plate is configured as a heat insulation plate, and the heat insulation plate is configured to keep the sealing ring of the valve plate within an allowable temperature range.

[0021] In one or more embodiments of the vacuum valve, the vacuum valve is a rectangular vacuum valve.

[0022] In one or more embodiments of the vacuum valve, the valve body includes two long side walls and two short side walls, the two long side walls respectively have valve ports, the valve core assembly is arranged corresponding to one of the valve ports, and a reinforcing bracket is arranged between the two long side walls.

[0023] In one or more embodiments of the vacuum valve, the reinforcing bracket includes a connecting pipe and flanges at both ends of the connecting pipe for connecting to the long side walls.

[0024] In one or more embodiments of the vacuum valve, an observation window for observing the valve movement is installed on at least one of the two short side walls or the valve core assembly.

[0025] The aforementioned vacuum valve is mainly suitable for high vacuum systems such as semiconductors and vacuum coating, such as solar cell coating, glass coating, etc. The valve is used to cut off and connect the coating process chambers, and to cut off the chambers from the atmosphere, and can work stably for a long time at a high frequency.

[0026] The aforementioned vacuum gate valve not only has a simple structure and a high vacuum degree, but also has a short single action time, which fully meets the use requirements of the isolation valve in the system such as the coating system. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The above and other features, properties and advantages of the present invention will become more apparent through the following description in conjunction with the accompanying drawings and embodiments, in which:

[0028] Figure 1 It is a three-dimensional diagram of a vacuum valve.

[0029] Figure 2 is an exploded view of the vacuum valve.

[0030] Figure 3 It is a three-dimensional view of the valve body.

[0031] Figure 4 It is a three-dimensional view of the valve core assembly.

[0032] Figure 5 is a partial view of the valve core assembly.

[0033] Figure 6 is a schematic diagram of the reinforcement bracket.

[0034] Figure 7 It is a schematic diagram of the valve core assembly at time T0.

[0035] Figure 8 yes Figure 7 Sectional view along line I-I.

[0036] Fig. 9 It is a schematic diagram of the valve core assembly at time T1.

[0037] Fig.10 It is a schematic diagram of the valve core assembly at time T2.

[0038] Fig.11 yes Fig.10 Cross-sectional view along line II-II.

[0039] Fig.12 is along Figure 4 Cross-sectional view along direction III-III. DETAILED DESCRIPTION

[0040] The following discloses a variety of different implementation methods or embodiments of the subject technical solution. To simplify the disclosure, specific examples of each element and arrangement are described below. Of course, these are only examples and are not intended to limit the scope of protection of the present invention. For example, the first feature subsequently recorded in the specification is formed above or on the second feature, which may include an implementation method in which the first and second features are formed by direct connection, and may also include an implementation method in which an additional feature is formed between the first and second features, so that the first and second features may not be directly connected. In addition, the figure marks and / or letters may be repeated in different examples in these disclosures. This repetition is for simplicity and clarity, and does not itself represent the relationship between the various implementation methods and / or structures to be discussed. Further, when the first element is described in a manner connected or combined with the second element, the description includes an implementation method in which the first and second elements are directly connected or combined with each other, and also includes the use of one or more other intervening elements to indirectly connect or combine the first and second elements.

[0041] Figure 1 A vacuum valve is shown, which belongs to the industry's rectangular vacuum valve, wherein the valve body, valve, and valve port are rectangular in shape. Although the embodiments of the present invention are described by taking a rectangular vacuum valve as an example, the shape is not limited to a strict rectangular shape.

[0042] Combination Figure 2 The vacuum valve includes a valve core assembly 1 and a valve body 2 , the valve body 2 includes a side wall 21 , the side wall 21 is provided with a valve port 210 , and the valve core assembly 1 includes a valve plate 10 .

[0043] Combination Figure 5 The valve core assembly 1 further includes a rotating shaft 11, which is arranged in the valve body 2 and can rotate around its own axis.

[0044] The valve plate 10 has a width direction W, a length direction L and a thickness direction H. In the thickness direction H, it has a connecting side 101 and a sealing side 102 . In the width direction W, it has a proximal valve port side 103 adjacent to the valve port 210 and a distal valve port side 104 away from the valve port 210 .

[0045] The rotating shaft 11 and the valve plate 10 are connected by connecting rods 14 and 13 along the length direction L of the valve plate 10, so that the valve plate 10 can rotate along with the rotating shaft 11. The connecting rods 14 and 13 and the connecting side 101 of the valve plate 10 are floatingly connected at a connecting position 141 between the near valve port side 103 and the far valve port side 104. The floating connection allows slight movement between the valve plate 10 and the connecting rods 14 and 13.

[0046] An elastic member 12 is also provided between the connecting rod 13 and the valve plate 10. The elastic member 12 applies elastic force to the valve plate 10 to force the valve plate 10 to move to an extreme position within a slight range of movement. Figure 7 As shown, at time T0, the valve plate 10 is pressed downward by the elastic force exerted by the elastic member 12. Since the valve plate 10 and the connecting rods 14 and 13 are floatingly connected, the valve plate 10 is slightly inclined relative to the elastic member 12. An example of the inclination angle is 1°-2°, but it is not limited to this and can be selected according to actual conditions.

[0047] like Figure 7 As shown in FIG. 1 , due to the holding effect of the elastic member 12, the valve plate 10 is kept at the extreme position at time T0, so that when the valve plate 10 follows the rotating shaft 11 to rotate toward the valve port 210, the far valve port side 104 of the valve plate 10 contacts the side wall 21 earlier than the near valve port side 103. Due to the friction caused by the contact, the far valve port side 104 is then fixed. Figure 7 At the time T1 shown, the point corresponding to the far valve port side 104 is basically fixed and will not slide, thereby causing the connecting rods 13 and 14 that continue to rotate to move slightly relative to the valve plate 10, thereby pushing the valve plate 10 and forcing it to swing counterclockwise with the far valve port side 104 as the fixed part, and finally Fig.10 , Fig.11 At the time T2 shown, the sealing side 102 of the valve plate 10 seals the valve port 210 , and the position corresponding to T2 is also the dead point of the swing of the connecting rods 13 , 14 .

[0048] The floating connection makes the valve plate 10 self-adjustable, and an existing floating connection structure can be used, for example, the connecting rods 14 and 13 are provided with floating connection heads, such as ball heads, and correspondingly, there is a pit on the connection side 101 of the valve plate 10, such as a ball pit, and the radius of the ball pit is greater than the radius of the ball head. Other floating connection structures can also be used, such as a structure that allows the valve plate 10 to slightly swing and slightly move relative to the connecting rods 14 and 13.

[0049] Compared with the rectangular plug valve, the above structure is simple, light, and the opening and closing speed of the valve port is also very fast, which can meet the user's requirements of single action ≤ 5 seconds, for example, it can meet the test of single action 3 seconds. Due to the simple structure, the loss is low and the maintenance cycle is long. In the inventor's test, the action and performance meet the requirements within 250,000 times.

[0050] Although one embodiment of the vacuum valve is described above, in other embodiments, there may be more details in many aspects relative to the above embodiment, and at least a part of these details may have various variations. At least a part of these details and variations will be described below with some embodiments.

[0051] One implementation of the elastic member 12 is a spring, which is sleeved on a limit bolt connected to the connecting rod 13 to apply pressure to the valve plate 10 .

[0052] The rotation angle of the valve plate 10 is set to 90 degrees, but is not limited thereto.

[0053] The valve body 2 is a hollow cavity, and the upper side shown in the figure is an open side. The valve core assembly 1 also includes a cover plate 15, and a shaft bracket 16 is protrudingly provided on the side of the cover plate 15 facing the inside of the valve body 2. The shaft 11 is rotatably supported by the shaft bracket 16. The cover plate 15 detachably seals the upper open side of the valve body 2, whereby the cover plate 15 is provided as a supporting base for the valve core assembly 1. The valve core assembly 1 can be assembled with the valve body 2 as a whole, so it is convenient for disassembly, assembly and maintenance.

[0054] Continue to refer to Figures 2 to 5 The valve core assembly 1 further includes a driving device 17, which is arranged on the side of the cover plate 15 facing away from the valve body 2. The driving device 17 has a linear motion output member 171, which passes through the cover plate 15 and is connected to the rotating shaft through a crank, which is a connecting rod 13. In the following description, the crank and the connecting rod 13 have the same meaning. The linear motion output member 171 is configured to be movable and swingable, so as to push the crank at various positions where the crank rotates, and the crank can drive the rotating shaft 11 to rotate. A sealing member is arranged between the cover plate 15 and the linear motion output member 171.

[0055] like Fig.12As shown, a preferred embodiment is that the sealing member between the cover plate 15 and the linear motion output member 171 is a bellows 172, one end of the bellows 172 is mounted on the cover plate 15, and forms a seal with the cover plate 15, and the linear motion output member 171 passes through the bellows, and forms a seal with the bellows 172. The bellows 172 is used to achieve sealing, and there is no friction at the sealing point, so the service life is long.

[0056] The driving device may be a cylinder, but is not limited thereto. The embodiment shown in the figure uses a double cylinder drive and is equipped with multiple shaft brackets 16 to support the shaft, which has a smooth operation and good sealing. The cylinder can also be replaced by a servo electric cylinder, which can meet more requirements and the switching speed is adjustable.

[0057] Compared with the general flap valve which sets the cylinder at the end of the rotating shaft, placing the cylinder or the driving device at the upper part greatly increases the thrust and makes the valve seal more reliable.

[0058] Figure 5 The left end in the figure is the cross section of the valve core assembly. The shaft support 16 is inserted into the valve body 2, and the ends of the shaft support 16 in the width direction W are matched with the walls 21 and 22 of the valve body 2 with a small tolerance gap, providing support for the walls 21 and 22 from the inner side of the walls 21 and 22 of the valve body 2, and maintaining the parallel state of the walls 21 and 22. In another embodiment, a support plate can be separately provided to support the opposite walls 21 and 22, which keeps the cavity from deforming inwards due to the external atmospheric pressure in a vacuum state.

[0059] Continue to refer to Figures 2 to 5 A positioning pin 153 is provided on the lower side of the cover plate 15, and a pin hole is correspondingly provided on the upper side of the valve body 2. The positioning pin 153 is inserted into the pin hole, and the positioning pin 153 and the pin hole are matched to maintain the parallel state between the cavity walls 21 and 22 of the valve body 2. Combined with the aforementioned support plate or shaft bracket 16, this holding effect is better and is conducive to the sealing of the valve plate.

[0060] like Figure 2 As shown, the lower side of the valve body 2, that is, the side opposite to the side where the valve core assembly is located, is also an open side. The valve body 2 also includes a lower cover plate 23, and the open side is detachably connected through the lower cover plate 23. The upper and lower sides of the valve body 2 are both set to be open, which is convenient for cleaning and maintenance of the valve. On the other hand, a positioning pin is also provided on the lower cover plate 23, which cooperates with the positioning hole on the lower side of the valve body 2, and can also play a role in positioning and preventing the walls 21 and 22 of the two long sides of the valve body 2 from deforming.

[0061] like Fig.12As shown, the sealing side 102 of the valve plate 10 is provided with a sealing ring 105, which seals the valve port 210. Due to the aforementioned floating connection and elastic member, the valve plate 10 is helped to reach a certain angle, and the far valve port side 104 of the valve plate 10 contacts the side wall 21 earlier than the near valve port side 103, so the sealing ring will not be rubbed, the problem of loose closure is avoided, and the sealing ring will not be damaged.

[0062] like Figure 4 As shown, a heat insulation board 18 is provided on the sealing side of the valve plate 10. The system using the valve has a high temperature, and the valve core is difficult to cool by water cooling. The sealing side of the valve plate 10 is provided with a heat insulation board 18, so the life of the valve plate can be improved. In particular, in the embodiment where a sealing ring is used for sealing, the heat insulation board 18 is provided to keep the sealing ring of the valve plate 10 within the allowable temperature range, which can effectively improve the service life of the valve.

[0063] like Figure 3 As shown, the valve body 2 includes two long side walls 21, 22 and two short side walls 25, 24, the two long side walls 25, 24 have valve ports respectively, and the valve core assembly 1 is arranged corresponding to one valve port 210. The four side walls surround a rectangular cavity.

[0064] like Figure 2 As shown, a reinforcing bracket 4 is disposed between the two long side walls 25 and 24. The reinforcing bracket 4 can further maintain the parallel state between the two walls 25 and 24.

[0065] Figure 6 A reinforcing bracket is shown, which includes a pipe 41 and flanges 42 at both ends of the pipe 41 for connecting the long side walls. One or more reinforcing brackets can be arranged at the bottom of the valve body along the length direction of the valve body. The bracket can ensure the parallelism of the body cavity, prevent the body cavity from deforming inward or outward, ensure the sealing performance, and the folding assembly is convenient for maintenance.

[0066] like Figure 2 , Figure 3 As shown, observation windows 240, 150 for observing the valve action are installed on at least one of the walls of the two short sides or the valve core assembly, so that the valve action and working flow can be observed at any time.

[0067] In addition, to cope with high temperature environment, the connection surface between the valve body and the cavity in the system can be provided with water circulation cooling, such as Figure 2 As shown, the valve body is provided with a cooling water connection 28 .

[0068] As a preferred arrangement, bearings 5 ​​are installed at all rotating locations of the valve core assembly 1, which can ensure concentricity and avoid friction damping.

[0069] Figures 1 to 5In the embodiment shown, the assembly process of the vacuum valve is as follows:

[0070] 1. Valve body:

[0071] Valve body assembly and welding processing:

[0072] ① Assemble the two side panels (long side walls) and the two end panels (short side walls) according to the drawing requirements and fix them by spot welding;

[0073] ② After confirming that the size meets the requirements, perform full welding of the filler;

[0074] ③ Plastic surgery and stress relief;

[0075] ④Perform post-welding processing according to the finishing drawing.

[0076] 2. Valve core assembly:

[0077] The parts in the valve core assembly are processed and assembled according to the drawing:

[0078] ①Fix the heat insulation board to the valve plate;

[0079] ② Install the spring on the connecting rod, and connect the valve plate and the connecting rod through the floating joint in turn for standby use;

[0080] ③Connect the bellows to the cylinder shaft;

[0081] ④Assemble the pneumatic actuator / electric actuator with the upper cover;

[0082] ⑤Assemble the shaft bracket and the upper cover;

[0083] ⑥ Insert the shaft into the support plate hole of the shaft bracket, install the bearings in sequence and fix them;

[0084] ⑦Assemble the connecting rod and rotating shaft;

[0085] ⑧Fix the bellows shaft and the connection;

[0086] The valve core assembly is complete.

[0087] 3. General assembly of pneumatic flap valve ():

[0088] ①Install the reinforcement bracket into the corresponding position at the lower end of the valve body;

[0089] ②Put the valve core assembly into the valve body steadily, fix it with the positioning pin first and then tighten it with the screw;

[0090] ③ Assemble the lower cover plate and the handle 230 on the lower cover plate;

[0091] ④Equipped with two observation windows;

[0092] ⑤Assemble the cooling water interface on the valve body;

[0093] ⑥ Assemble the lifting parts 151;

[0094] ⑦Assemble the solenoid reversing valve and gas circuit accessories.

[0095] Its working principle is:

[0096] 1. Valve closing: When the valve is a pneumatic valve, compressed air is used as the power, the upper cylinder takes in air, drives the piston to move to the lower cylinder, and pushes the connecting rod downward through the cylinder shaft, so that the valve plate fastened to the connecting rod rotates to the valve body sealing surface with the center of the shaft as the center of the circle, that is, the closed position. At this time, the bellows is in a free state.

[0097] 2. Valve opening: When the valve is a pneumatic valve, compressed air is used as the power, the lower cylinder takes in air, drives the piston to move toward the upper cylinder, and drives the connecting rod upward through the cylinder shaft, so that the valve plate rotates with the center of the shaft as the center of the circle to a position that is 90 degrees with the sealing surface of the valve body, that is, the open position. At this time, the bellows is in a compressed state.

[0098] 3. Features: (1) The valve can be used as pneumatic or electric, just replace the drive mechanism. When used as a pneumatic valve, the valve can already meet the system requirements. If it is replaced with an electric actuator, the valve will have an additional function - the switching speed is adjustable from 0 to 125 mm / s, and it can stop at any position during the process; (2) The valve is equipped with two observation windows, one on the valve body side and the upper cover plate. The working condition of the valve can be observed at any time; (3) The valve is equipped with a lower cover plate for easy cleaning and maintenance.

[0099] Although the present invention is disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art may make possible changes and modifications without departing from the spirit and scope of the present invention. Therefore, any modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the protection scope defined by the claims of the present invention.

Claims

1. A vacuum valve, comprising a valve core assembly and a valve body, wherein the valve body comprises a side wall, the side wall is provided with a valve port, and the valve core assembly comprises a valve plate; characterized in that: The valve core assembly also includes a rotating shaft, which is arranged in the valve body and can rotate around its own axis; The valve plate has a width direction, a length direction and a thickness direction, and has a connection side and a sealing side in the thickness direction; and has a proximal valve port side adjacent to the valve port and a distal valve port side away from the valve port in the width direction; The rotating shaft and the valve plate are connected by a connecting rod along the length direction of the valve plate, whereby the valve plate can rotate along with the rotating shaft, and the connecting side of the connecting rod and the valve plate is floatingly connected at a connecting position between the near valve port side and the far valve port side, and the floating connection allows slight movement between the valve plate and the connecting rod; An elastic member is further provided between the connecting rod and the valve plate, and the elastic member applies an elastic force to the valve plate to force the valve plate to move to an extreme position of the slight movable range; The extreme position causes the valve plate to follow the shaft to rotate toward the valve port, and the far valve port side of the valve plate contacts the side wall earlier than the near valve port side, thereby subsequently making the near valve port side a fixed part and causing the connecting rod that continues to rotate to move slightly relative to the valve plate, thereby pushing and swinging the valve plate so that the sealing side of the valve plate seals the valve port.

2. The vacuum valve according to claim 1, characterized in that: The valve body is a hollow cavity with one side being an open side. The valve core assembly also includes a cover plate, and a shaft bracket is protrudingly arranged on the side of the cover plate facing the valve body. The shaft is rotatably supported by the shaft bracket, and the cover plate is detachably sealed from the open side, whereby the cover plate is arranged as a supporting base for the valve core assembly.

3. The vacuum valve according to claim 2, characterized in that: The valve core assembly also includes a driving device, which is arranged on the side of the cover plate facing away from the valve body. The driving device has a linear motion output member, which passes through the cover plate and is connected to the rotating shaft through a crank, so as to drive the rotating shaft to rotate; a sealing member is arranged between the cover plate and the linear motion output member.

4. The vacuum valve according to claim 3, characterized in that: The sealing member is a bellows, one end of which is mounted on the cover plate to form a seal with the cover plate, and the linear motion output member passes through the bellows to form a seal with the bellows.

5. The vacuum valve according to claim 2, characterized in that: Corresponding to the two ends of the rotating shaft, the cover plate is provided with a support plate, and the support plate is inserted into the valve body. The two ends of the support plate and the wall of the valve body are matched with a small tolerance gap to provide support for the wall from the inner side of the wall of the valve body.

6. The vacuum valve according to claim 5, characterized in that: The support plate is the rotating shaft bracket.

7. The vacuum valve according to claim 2 or 5, characterized in that: The cover plate is provided with a positioning pin, and the valve body is correspondingly provided with a pin hole, the positioning pin is inserted into the pin hole, and the positioning pin and the pin hole are matched to maintain the parallel state between the cavity walls of the valve body.

8. The vacuum valve according to claim 2, characterized in that: The side of the valve body opposite to the side where the valve core assembly is located is also an open side, and the valve body also includes another cover plate, which is detachably connected to the open side located on the opposite side through the other cover plate.

9. The vacuum valve according to claim 1, characterized in that: The sealing side of the valve plate is provided with a sealing ring, and the valve port is sealed by means of the sealing ring.

10. The vacuum valve according to claim 1, characterized in that: The sealing side of the valve plate is configured as a heat shield.

11. The vacuum valve according to claim 9, characterized in that: The sealing side of the valve plate is configured as a heat insulation plate, and the heat insulation plate is configured to keep the sealing ring of the valve plate within an allowable temperature range.

12. The vacuum valve according to claim 1, characterized in that: The vacuum valve is a rectangular vacuum valve.

13. The vacuum valve according to claim 12, characterized in that: The valve body comprises two long side walls and two short side walls. The two long side walls are respectively provided with valve ports. The valve core assembly is arranged corresponding to one of the valve ports. A reinforcing bracket is arranged between the two long side walls.

14. The vacuum valve according to claim 13, characterized in that: The reinforcing bracket includes a connecting pipe and flanges at both ends of the connecting pipe for connecting with the long side walls.

15. The vacuum valve according to claim 13, characterized in that: An observation window for observing the valve action is installed on at least one of the two short side walls or the valve core assembly.

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