Device and method for synchronous in-situ measurement of linear displacement and straightness of guide rail

A technology of straightness and linear displacement, applied in the field of precision measurement, can solve the problems of off-line measurement, large assembly volume, affecting production speed and quality, etc., achieve high positioning accuracy, small installation volume, and avoid uneven heat transfer

CN111735393AActive Publication Date: 2020-10-02XI AN JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2020-10-02

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Abstract

The invention discloses a device and a method for synchronous in-situ measurement of linear displacement and straightness of a guide rail. For an integrated two-dimensional grating and guide rail, a two-dimensional grating is etched on the upper surface of a linear guide rail, and a reading head is embedded in a sliding block. The specific measurement method comprises the steps that when the sliding block moves on the guide rail, the reading head outputs two pairs of orthogonal sine and cosine signals at the same time, the sine and cosine signals are transmitted to an upper computer through anacquisition card after being subjected to filtering and analog-digital conversion, and displacement and straightness are solved on the upper computer through a method of counting edges through high-frequency pulses, wherein the linear displacement of the guide rail is solved through orthogonal signals generated by the grid lines perpendicular to the x axis, and the straightness of the guide railis solved through orthogonal signals generated by the grid lines perpendicular to the y axis. The method has the advantages of small guide rail pair mounting size, high positioning precision, multi-parameter synchronous in-place measurement and the like, and a new method is provided for displacement and straightness measurement of the guide rail.
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Description

technical field

[0001] The invention belongs to the technical field of precision measurement, and in particular relates to a device and method for synchronously measuring the linear displacement and straightness of a guide rail in situ. Background technique

[0002] The continuous improvement of positioning accuracy is one of the "stuck neck" technical problems in the development of high-end equipment. Linear guide rail components are the core basic components of high-end equipment, and their precise guidance and positioning accuracy play a decisive role in the accuracy of high-end equipment.

[0003] refer to figure 1 and figure 2 , the structural form of the traditional guide rail assembly is the assembly combination of the guide rail 6, the one-dimensional grating 7 and multiple external sensors. The uncertainty becomes larger; secondly, the two materials are inconsistent, and it is easy to introduce nonlinear errors under the condition of heating, which cannot be eff...

Examples

Embodiment Construction

[0031] In order to make the purpose and technical solution of the present invention clearer and easier to understand. The present invention will be further described in detail below in conjunction with the drawings and embodiments. The specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0032] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular ori...