Four-optical axis compensation and air bath type linear displacement laser interferometer calibration method and device

A laser interferometer, laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of large Abbe error, inconsistent influence, and inability to determine whether the interferometer group and measuring mirror belong to standard laser interferometer components or It belongs to the problem of being calibrated, and achieves the effect of small Abbe error and guaranteed accuracy

CN103528505AActive Publication Date: 2014-01-22哈尔滨超精密装备工程技术中心有限公司
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2014-01-22

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Abstract

The invention discloses a four-optical axis compensation and air bath type linear displacement laser interferometer calibration method and a four-optical axis compensation and air bath type linear displacement laser interferometer calibration device, and belongs to the technical field of laser measurement. Measurement light beams of a calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interference mirror group, and are arranged in parallel at the central positions of four parallel standard measurement light beams which are distributed as side edges of a regular triangular prism; the standard measurement light beams are at short perpendicular distances away from the measurement light beams of the calibrated laser interferometer, and an average air refractivity value of the four standard measurement light beams is approximate to air refractivity values of the measurement light beams of the calibrated laser interferometer; air temperature, air humidity and air pressure in a stable air bath environment formed by an air bath device are approximately uniformly distributed, so that the average air refractivity value of the four standard measurement light beams is more approximate to the air refractivity values of the measurement light beams of the calibrated laser interferometer; a measurement error caused by the surface appearance of the reflecting surface of a target reflector is compensated into a linear displacement measurement result to ensure the accuracy of a linear displacement measurement value.
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Description

technical field

[0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique

[0002] Laser interferometry linear displacement technology is a high-precision standard measurement technology, which is widely used in precision and ultra-precision machining, microelectronic equipment, nanotechnology industrial equipment and national defense equipment. In order to ensure the accuracy of laser interferometer measurement of linear displacement , a scientific and effective linear displacement laser interferometer calibration method and device are needed. The general idea of ​​calibrating a linear displacement laser interferometer is to use a linear displacement laser interferometer with a higher accuracy level for calibration. When the accuracy of the two is similar, it is called a comparison. In the actual calibration work, most of the linear displacement laser interferom...

Examples

Embodiment Construction

[0029] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0030] A four-optical-axis compensation and gas-bath linear displacement laser interferometer calibration device, comprising a standard laser interferometer laser 1 and four receivers 8, 9, 10, 11 configured at positions that can receive interference signals from the standard laser interferometer , the wires connect the four receivers 8, 9, 10, 11 to the standard laser interferometer signal processing system 12 respectively; the standard laser interferometer laser 1 is provided with an intermediate through hole 16 on the output optical path to allow the laser interferometer to be calibrated. A four-axis hollow standard laser interferometric mirror group 2 through which the measuring beam 15 passes; a guide rail 21 is arranged on one side of the four-axis hollow standard laser interferometric mirror group 2, a motion table 20 is fitted...