Wet flower basket

Abstract

The present application provides a wet method flower basket, which belongs to the field of solar cell production equipment. A wet method flower basket includes a first support plate, a second support plate and a plurality of flower basket rods arranged between the first support plate and the second support plate. A plurality of flower basket rods enclose a receiving cavity for accommodating silicon wafers, and the receiving cavity has a receiving opening for silicon wafers to enter and exit the receiving cavity. Each flower basket rod is provided with a plurality of flower basket teeth spaced axially on one side facing the receiving cavity, and any two adjacent flower basket teeth of each flower basket rod have a receiving groove for accommodating the edge of the silicon wafer, and the receiving grooves between the flower basket rods are arranged correspondingly. Another wet method flower basket includes a first support plate, a second support plate and a plurality of flower basket rods arranged between the first support plate and the second support plate. A plurality of flower basket rods enclose a receiving cavity for accommodating silicon wafers, and the receiving cavity has a receiving opening for silicon wafers to enter and exit the receiving cavity. The flower basket rod is a carbon fiber rod, with a circular cross section and a diameter of 15-25 mm. It can effectively reduce the occurrence of basket floating phenomenon and silicon wafer displacement phenomenon.

Description

Technical Field

[0001] The present application relates to the field of solar cell production equipment, and in particular to a wet process flower basket. Background Art

[0002] In the prior art, in the texturing stage, the solar cell wafers are brought into various acid and alkali process tanks for treatment by wet baskets. After the robot sends the basket into the process tank, due to the buoyancy of the liquid and the thrust of the bubbles at the bottom of the process tank, the basket and the silicon wafer are subjected to an upward force, and the silicon wafer is fixed in position by the basket.

[0003] At present, after the flower basket is sent into the process tank, it is easy to float. When the basket floats, when the robot lifts the flower basket from the process tank, it will hit the flower basket during the downward movement of the robot to grab the flower basket, causing the edge and corner of the silicon wafer to collapse. The robot hitting the flower basket is also likely to cause the silicon wafer in the flower basket to shift and partially pop out of the flower basket, causing the robot to hit the silicon wafer when lifting the flower basket; when the robot puts the lifted flower basket into the next process tank, it is also easy for the silicon wafer to hit the tank body of the process tank or other flower baskets in the process tank. Summary of the invention

[0004] The purpose of the present application is to provide a wet flower basket that can effectively reduce the occurrence of basket floating and silicon wafer shifting phenomena.

[0005] The embodiment of the present application is implemented as follows:

[0006] In a first aspect, an embodiment of the present application provides a wet basket, comprising a first support plate, a second support plate, and a plurality of basket rods arranged between the first support plate and the second support plate, wherein the plurality of basket rods form a receiving cavity for receiving silicon wafers, the receiving cavity having a receiving opening for the silicon wafers to enter and exit the receiving cavity, and each basket rod has a plurality of basket teeth arranged axially at intervals on one side facing the receiving cavity, and a receiving groove for receiving the edge of the silicon wafer is provided between any two adjacent basket teeth of each basket rod, and the receiving grooves of any two basket rods are arranged correspondingly.

[0007] In the above technical solution, a plurality of flower basket teeth are arranged at intervals along the axial direction on one side of the flower basket rod facing the accommodating cavity, and the accommodating groove between any two adjacent flower basket teeth of each flower basket rod is used to accommodate the edge of the silicon wafer, separate any two adjacent silicon wafers, and avoid the phenomenon of stacking. Since the flower basket teeth have a certain height, when the size of the accommodated silicon wafer increases, the contact area between the flower basket teeth and the silicon wafer increases, and when the size of the accommodated silicon wafer decreases, the contact area between the flower basket teeth and the silicon wafer decreases, so that silicon wafers of different sizes can be accommodated well.

[0008] In an embodiment of the present application, each flower basket rod is provided with flower basket teeth: each flower basket rod can fix the silicon wafer through the flower basket teeth, which has a better overall fixing effect on the silicon wafer and can effectively reduce the occurrence of silicon wafer displacement; it can better increase the weight of the flower basket rod and can reduce the occurrence of basket floating phenomenon to a certain extent.

[0009] The inventors also found that the current flower basket can only fix small silicon wafers in the process tank. When the size of the silicon wafer increases, the thrust of the silicon wafer on the flower basket rod increases after the flower basket enters the process tank, which increases the probability of the flower basket floating phenomenon. Flower basket teeth are arranged on the flower basket rod. By controlling the height of the flower basket teeth, the flower basket teeth can better contact with the silicon wafer and fix the silicon wafer, and the floating of the silicon wafer can be controlled within a certain range, which can effectively reduce the probability of the flower basket floating.

[0010] In some possible implementations, the cross-section of each turnbuckle rod is circular.

[0011] In the above technical solution, the cross section of the flower basket rod is set to be circular to avoid stress concentration on the flower basket rod during use and damage to the flower basket, and to avoid the generation of edges and corners on the flower basket rod that may easily cause chipping and corner cracking of the silicon wafer.

[0012] In some possible embodiments, the turnbuckle rods are carbon fiber rods, and the diameter of each turnbuckle rod is 15-25 mm.

[0013] In the above technical solution, the lower limit of the diameter of the flower basket rod is 12 mm, which increases the diameter and weight of the flower basket rod, can effectively avoid the basket floating phenomenon, and can also effectively avoid the silicon wafer displacement caused by the basket floating phenomenon; the upper limit of the diameter of the flower basket rod is 25 mm, so that the diameter of the flower basket rod has a suitable increase degree, which effectively avoids the basket floating phenomenon and reduces the burden of transportation.

[0014] In some possible embodiments, the turnbuckle teeth have a tooth height of 12-16 mm.

[0015] In the above technical solution, the flower basket teeth are arranged according to the above height requirements, which can avoid the flower basket teeth being too small to fix the silicon wafer well, and can also avoid the flower basket teeth being too large to hinder the placement and texturing of the silicon wafer in the flower basket, and can better fix silicon wafers of different sizes.

[0016] In some possible embodiments, the tooth width of the turnbuckle teeth is 13-17 mm.

[0017] In the above technical solution, the flower basket teeth are set according to the above width requirements, which can avoid the flower basket teeth being too small to fix the silicon wafer well, and also avoid the flower basket teeth being too large to hinder the placement and texturing of the silicon wafer in the flower basket, so as to better fix the silicon wafer.

[0018] In some possible embodiments, the multiple flower basket teeth on each flower basket rod are divided into a first tooth segment and a second tooth segment, the first tooth segment and the second tooth segment are spaced apart along the axial direction of the flower basket rod, and a separation channel is provided between the first tooth segment and the second tooth segment, and in the axial direction of the flower basket rod, the width of the separation channel is greater than the width of the accommodating groove.

[0019] In the above technical solution, the flower basket teeth are arranged as the first tooth segment and the second tooth segment which are spaced apart along the axial direction of the flower basket rod, so that a plurality of silicon wafers can be spaced apart corresponding to the first tooth segment and the second tooth segment in the flower basket, and it is more convenient to take and put the silicon wafers in the flower basket.

[0020] In some possible embodiments, the plurality of flower basket rods are divided into a plurality of first flower basket rods spaced apart along a first preset direction, a plurality of second flower basket rods spaced apart along a second preset direction, and a plurality of third flower basket rods spaced apart along the second preset direction, and the first preset direction is perpendicular to the second preset direction; the accommodating cavity has a closed bottom end opposite to the accommodating opening, and the plurality of first flower basket rods are distributed at the closed bottom end; the plurality of second flower basket rods and the plurality of third flower basket rods are located on one side of the plurality of first flower basket rods close to the accommodating opening, and are spaced apart along the first preset direction on opposite sides of the plurality of first flower basket rods in the first preset direction.

[0021] In the above technical solution, a plurality of first flower basket rods are distributed at intervals at the closed bottom end along a first preset direction, which can better fix the edge of the silicon wafer at the closed bottom end. A plurality of second flower basket rods and a plurality of third flower basket rods are respectively distributed on both sides of the plurality of first flower basket rods along a second preset direction perpendicular to the first preset direction, which can better fix the edges of the silicon wafer at both sides. The first flower basket rod, the second flower basket rod, and the third flower basket rod cooperate with each other to have a better fixing effect on the silicon wafer.

[0022] In some possible implementations, the turnbuckle teeth of each second turnbuckle rod and the turnbuckle teeth of each third turnbuckle rod extend along the first preset direction.

[0023] In the above technical solution, the flower basket teeth of the second flower basket rod and the third flower basket rod extend along a first preset direction. When fixing the edges of the silicon wafer on both sides, the extension direction of the flower basket teeth of the second flower basket rod and the third flower basket rod is perpendicular to the edges of the silicon wafer on both sides. The force exerted by the flower basket teeth on the silicon wafer is uniform, and the edges of the silicon wafer on both sides can be better fixed.

[0024] In some possible implementations, the turnbuckle teeth of each first turnbuckle rod extend along the second preset direction.

[0025] In the above technical solution, the basket teeth of the first basket rod extend along the second preset direction. When fixing the edge of the silicon wafer at the closed bottom end, the extension direction of the basket teeth of the first basket rod is perpendicular to the edge of the silicon wafer at the closed bottom end. The force exerted by the basket teeth on the silicon wafer is uniform, which can better achieve the fixation of the edge of the silicon wafer at the closed bottom end.

[0026] In the second aspect, an embodiment of the present application provides a wet flower basket, comprising a first support plate, a second support plate, and a plurality of flower basket rods arranged between the first support plate and the second support plate, wherein the plurality of flower basket rods form a receiving cavity for receiving silicon wafers, the receiving cavity having an receiving opening for the silicon wafers to enter and exit the receiving cavity, the flower basket rods being carbon fiber rods, the cross-section of each flower basket rod is circular, and the diameter of each flower basket rod is 15-25 mm.

[0027] In the above technical solution, the cross section of the flower basket rod is set to be circular to avoid stress concentration on the flower basket rod during use and damage to the flower basket, and to avoid corners on the flower basket rod that may cause chipping and corners of the silicon wafer. The lower limit of the flower basket rod diameter is 12mm, which increases the diameter and weight of the flower basket rod, can effectively avoid the floating basket phenomenon, and can also effectively avoid the silicon wafer displacement caused by the floating basket phenomenon; the upper limit of the flower basket rod diameter is 25mm, so that the diameter of the flower basket rod has a suitable increase, effectively avoiding the floating basket phenomenon and reducing the burden of transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 A schematic structural diagram of a wet-process flower basket provided in an embodiment of the present application at a first viewing angle;

[0030] Figure 2 A schematic structural diagram of a wet-process flower basket provided in an embodiment of the present application at a second viewing angle;

[0031] Figure 3 for Figure 1 A partial enlarged view of point I in the middle;

[0032] Figure 4 A schematic structural diagram of a flower basket rod of a wet flower basket provided in an embodiment of the present application at a second viewing angle.

[0033] Icon: 100-wet flower basket; 110-first support plate; 120-second support plate; 130-flower basket rod; 1301-first flower basket rod; 1302-second flower basket rod; 1303-third flower basket rod; 1304-flower basket tooth; 1305-accommodating groove; 1306-first tooth segment; 1307-second tooth segment; 1308-partitioning channel; 140-accommodating cavity. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0035] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0036] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0037] It should be noted that the “and / or” in the present application, such as “Scheme A and / or Scheme B”, refers to three methods: Scheme A alone, Scheme B alone, and Scheme A plus Scheme B.

[0038] In the description of this application, it should be noted that the terms "center", "upper", "lower", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0039] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0040] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0041] First embodiment

[0042] See also Figure 1 The embodiment of the present application provides a wet process flower basket 100, comprising a first support plate 110, a second support plate 120, and a plurality of flower basket rods 130 disposed between the first support plate 110 and the second support plate 120. The first end of each flower basket rod 130 in the axial direction is connected to the first support plate 110, and the second end of each flower basket rod 130 in the axial direction is connected to the second support plate 120.

[0043] Exemplarily, each flower basket rod 130 is perpendicular to the first support plate 110 and the second support plate 120, respectively, so that the wet flower basket 100 has better stability.

[0044] See also Figure 2 In an embodiment of the present application, a plurality of basket rods 130 form a receiving cavity 140 for receiving a silicon wafer, and the receiving cavity 140 has a receiving opening for the silicon wafer to enter and exit the receiving cavity 140 .

[0045] See also Figure 3 In the embodiment of the present application, each basket rod 130 is provided with a plurality of basket teeth 1304 axially spaced apart on one side facing the accommodating cavity 140, and a accommodating groove 1305 for accommodating the edge of the silicon wafer is provided between any two adjacent basket teeth 1304 of each basket rod 130, and the accommodating grooves 1305 of any two basket rods 130 are provided correspondingly.

[0046] In this embodiment, the accommodating groove 1305 between any two adjacent turnbuckles 1304 of each turnbuckle rod 130 is used to accommodate the edge of the silicon wafer, separate any two adjacent silicon wafers, and avoid the phenomenon of overlapping. Since the turnbuckles 1304 have a certain height, when the size of the accommodated silicon wafer increases, the contact area between the turnbuckles 1304 and the silicon wafer increases, and when the size of the accommodated silicon wafer decreases, the contact area between the turnbuckles 1304 and the silicon wafer decreases, so that silicon wafers of different sizes can be accommodated well.

[0047] At the same time, the wet process flower basket 100 provided in this embodiment is provided with flower basket teeth 1304 on each flower basket rod 130: each flower basket rod 130 can fix the silicon wafer through the flower basket teeth 1304, which has a better overall fixing effect on the silicon wafer and can effectively reduce the occurrence of silicon wafer displacement; it can better increase the weight of the flower basket rod 130 and can reduce the occurrence of basket floating phenomenon to a certain extent.

[0048] In some possible embodiments, the plurality of flower basket rods 130 are divided into a plurality of first flower basket rods 1301, a plurality of second flower basket rods 1302, and a plurality of third flower basket rods 1303. The accommodating cavity 140 has a closed bottom end opposite to the accommodating opening, and closed sides located at opposite sides between the closed bottom end and the accommodating opening.

[0049] A plurality of first basket rods 1301 are distributed at intervals at the closed bottom end of the accommodating cavity 140 along a first preset direction. The first preset direction is as follows: Figure 2 The direction a shown enables the plurality of first basket rods 1301 to be better fixed to the edge of the silicon wafer at the closed bottom end.

[0050] See also Figure 4 Furthermore, the turnbuckle teeth 1304 of each first turnbuckle rod 1301 extend along the second preset direction. When the first turnbuckle rod 1301 fixes the edge of the silicon wafer at the closed bottom end, the extension direction of the turnbuckle teeth 1304 is perpendicular to the edge of the silicon wafer at the closed bottom end, and the force applied to the silicon wafer is uniform, which can better fix the edge of the silicon wafer at the closed bottom end.

[0051] The plurality of second flower basket rods 1302 and the plurality of third flower basket rods 1303 are located on one side of the plurality of first flower basket rods 1301 close to the receiving opening, and are spaced apart along the first preset direction on the opposite sides of the plurality of first flower basket rods 1301 in the first preset direction. The plurality of second flower basket rods 1302 are spaced apart along the second preset direction on one of the closed sides of the receiving cavity 140, and the plurality of third flower basket rods 1303 are spaced apart along the second preset direction on the other closed side of the receiving cavity 140. The second preset direction is as shown in FIG. Figure 2 The direction b shown enables the plurality of second flower basket rods 1302 and the plurality of third flower basket rods 1303 to be better fixed to the edges of the silicon wafer on both sides.

[0052] See also Figure 4Further, the turnbuckle 1304 of each second turnbuckle rod 1302 and the turnbuckle 1304 of each third turnbuckle rod 1303 extend along the first preset direction. When the second turnbuckle rod 1302 and the third turnbuckle rod 1303 fix the edges of the silicon wafer on both sides, the extension direction of the turnbuckle 1304 is perpendicular to the edges of the silicon wafer on both sides, and the turnbuckle 1304 exerts a uniform force on the silicon wafer, which can better fix the edges of the silicon wafer on both sides.

[0053] Optionally, the number of the first flower basket rod 1301, the second flower basket rod 1302 and the third flower basket rod 1303 is the same, and the second flower basket rod 1302 and the third flower basket rod 1303 are symmetrically arranged relative to the first flower basket rod 1301, so that the first flower basket rod 1301, the second flower basket rod 1302 and the third flower basket rod 1303 are evenly distributed, and have a better fixing effect on the silicon wafer when they cooperate with each other. Exemplarily, the number of the first flower basket rod 1301, the second flower basket rod 1302 and the third flower basket rod 1303 are 2-3, for example, 3, so that the wet flower basket 100 has a suitable density of flower basket rods 130, thereby ensuring that the wet flower basket 100 has an appropriate weight.

[0054] In some exemplary embodiments, the cross-section of each basket rod 130 is circular, so as to avoid stress concentration on the basket rod 130 during use, thereby preventing the basket from being damaged, and to avoid sharp edges on the basket rod 130, which may cause chipping and corner cracking of silicon wafers.

[0055] Furthermore, the flower basket rod 130 is a carbon fiber rod, which can better adapt to the strong acid and alkaline working environment of the wet flower basket 100. The flower basket rod 130 is a solid rod structure, and the diameter of each flower basket rod 130 is 15-25mm, or 20-25mm, for example but not limited to any one of 15mm, 16mm, 17mm, 18mm, 19mm, 20mm, 21mm, 22mm, 23mm, 24mm and 25mm or the range between any two. The lower limit of the diameter of the flower basket rod 130 is controlled to be 12mm. Compared with the existing flower basket, the diameter and weight of the flower basket rod 130 are increased, which can effectively avoid the floating basket phenomenon and the silicon wafer displacement phenomenon caused by the floating basket phenomenon. At the same time, the upper limit of the diameter of the flower basket rod 130 is controlled to be 25mm, so that the diameter of the flower basket rod 130 has a suitable increase degree, which effectively avoids the floating basket phenomenon and reduces the burden of transportation.

[0056] In some possible embodiments, the tooth height of the turnbuckle 1304 is 12-16 mm, or 13-15 mm, for example, 14 mm. In the embodiment of the present application, the tooth height direction of the turnbuckle 1304 is as follows: Figure 4The height of the flower basket teeth 1304 is set according to the above requirements, which can avoid the flower basket teeth 1304 being too small to fix the silicon wafer well, and can also avoid the flower basket teeth 1304 being too large to hinder the placement and texturing of the silicon wafer in the flower basket, and can better fix silicon wafers of different sizes.

[0057] In some possible embodiments, the tooth width of the turnbuckle 1304 is 13-17 mm, or 14-16 mm, for example, 15 mm. In the embodiment of the present application, the tooth width direction of the turnbuckle 1304 is as follows: Figure 4 The width of the flower basket teeth 1304 is set according to the above requirements, which can prevent the flower basket teeth 1304 from being too small to fix the silicon wafer well, and can also prevent the flower basket teeth 1304 from being too large to hinder the placement and texturing of the silicon wafer in the flower basket, so as to better fix the silicon wafer.

[0058] Optionally, the plurality of flower basket teeth 1304 on each flower basket rod 130 are divided into a first tooth segment 1306 and a second tooth segment 1307, the first tooth segment 1306 and the second tooth segment 1307 are spaced apart along the axial direction of the flower basket rod 130, a separation channel 1308 is provided between the first tooth segment 1306 and the second tooth segment 1307, and the width of the separation channel 1308 is greater than the width of the accommodation groove 1305 in the axial direction of the flower basket rod 130. The flower basket teeth 1304 are arranged as the first tooth segment 1306 and the second tooth segment 1307 spaced apart along the axial direction of the flower basket rod 130, so that the plurality of silicon wafers are spaced apart in the flower basket corresponding to the first tooth segment 1306 and the second tooth segment 1307, and it is more convenient to take and put the silicon wafers in the flower basket.

[0059] Second embodiment

[0060] The embodiment of the present application provides another wet process basket 100, comprising a first support plate 110, a second support plate 120, and a plurality of basket rods 130 disposed between the first support plate 110 and the second support plate 120. The plurality of basket rods 130 enclose a receiving cavity 140 for receiving a silicon wafer, and the receiving cavity 140 has a receiving opening for the silicon wafer to enter and exit the receiving cavity 140. The connection method of the basket rods 130, the first support plate 110, and the second support plate 120 is exemplarily the same as that of the first embodiment, and will not be repeated here.

[0061] In the present embodiment, the flower basket rod 130 is a carbon fiber rod, and the cross section of each flower basket rod 130 is circular. The flower basket rod 130 is a solid rod structure, and the diameter of each flower basket rod 130 is 15-25 mm.

[0062] In the wet process flower basket 100 provided in this embodiment, the cross section of the flower basket rod 130 is set to be circular, so as to avoid stress concentration on the flower basket rod 130 during use and damage to the flower basket, and to avoid the occurrence of edges and corners on the flower basket rod 130, which may easily cause the silicon wafer to have broken edges and corners. The flower basket rod 130 is a carbon fiber rod, which can better adapt to the strong acid and alkaline working environment of the wet process flower basket 100. The lower limit of the diameter of the flower basket rod 130 is 12 mm, which increases the diameter and weight of the flower basket rod 130, can effectively avoid the floating basket phenomenon, and can also effectively avoid the silicon wafer displacement phenomenon caused by the floating basket phenomenon; the upper limit of the diameter of the flower basket rod 130 is 25 mm, so that the diameter of the flower basket rod 130 has a suitable increase, which effectively avoids the floating basket phenomenon and reduces the burden of transportation.

[0063] It can be understood that, in this embodiment, the plurality of flower basket rods 130 can also be divided into a plurality of first flower basket rods 1301, second flower basket rods 1302 and third flower basket rods 1303, and / or, part or all of the flower basket rods 130 can also be provided with flower basket teeth 1304, and the arrangement method is exemplarily the same as that of the first embodiment, which will not be repeated here.

[0064] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A wet flower basket, characterized in that: It comprises a first support plate, a second support plate and a plurality of basket rods arranged between the first support plate and the second support plate, wherein the plurality of basket rods form a receiving cavity for receiving a silicon wafer, wherein the receiving cavity has a receiving opening for the silicon wafer to enter and exit the receiving cavity, and a plurality of basket teeth are arranged axially at intervals on one side of each basket rod facing the receiving cavity, and a receiving groove for receiving the edge of the silicon wafer is provided between any two adjacent basket teeth of each basket rod, and the receiving grooves of any two basket rods are arranged correspondingly; the cross section of each basket rod is circular; the basket rod is a carbon fiber rod, and the diameter of each basket rod is 15-25 mm.

2. The wet method flower basket according to claim 1, characterized in that: The tooth height of the flower basket teeth is 12-16 mm.

3. The wet method flower basket according to claim 1, characterized in that: The tooth width of the flower basket teeth is 13-17 mm.

4. The wet method flower basket according to any one of claims 1 to 3, characterized in that: The multiple flower basket teeth on each flower basket rod are divided into a first tooth segment and a second tooth segment. The first tooth segment and the second tooth segment are spaced apart along the axial direction of the flower basket rod. A separation channel is provided between the first tooth segment and the second tooth segment. In the axial direction of the flower basket rod, the width of the separation channel is greater than the width of the accommodating groove.

5. The wet method flower basket according to any one of claims 1 to 3, characterized in that: The plurality of flower basket rods are divided into a plurality of first flower basket rods spaced apart along a first preset direction, a plurality of second flower basket rods spaced apart along a second preset direction, and a plurality of third flower basket rods spaced apart along the second preset direction, wherein the first preset direction is perpendicular to the second preset direction; the accommodating cavity has a closed bottom end opposite to the accommodating opening, and the plurality of first flower basket rods are distributed at the closed bottom end; the plurality of second flower basket rods and the plurality of third flower basket rods are located on one side of the plurality of first flower basket rods close to the accommodating opening, and are spaced apart along the first preset direction on opposite sides of the plurality of first flower basket rods in the first preset direction.

6. The wet method flower basket according to claim 5, characterized in that: The flower basket teeth of each of the second flower basket rods and the flower basket teeth of each of the third flower basket rods extend along the first preset direction.

7. The wet method flower basket according to claim 5, characterized in that: The turnbuckle teeth of each of the first turnbuckle rods extend along the second preset direction.

8. A wet flower basket, characterized in that: It includes a first support plate, a second support plate and a plurality of basket rods arranged between the first support plate and the second support plate, wherein the plurality of basket rods form a receiving cavity for receiving a silicon wafer, wherein the receiving cavity has a receiving opening for the silicon wafer to enter and exit the receiving cavity, and the basket rods are carbon fiber rods, each of which has a circular cross-section and a diameter of 15-25 mm.

Images