Semiconductor silicon rod automatic grinding machine

Abstract

The present invention provides a semiconductor silicon rod automatic grinding machine tool, comprising a base extending left and right and arranged horizontally, a clamp device and a clamp driving device for driving the clamp device to move are arranged above the middle of the base, a loading and unloading device is installed on the left front side of the base, a rough grinding device for rough grinding of silicon rods and a fine grinding device for fine grinding of silicon rods are respectively arranged on the middle front side of the base, and a workpiece size detection device is arranged between the rough grinding device and the fine grinding device, a silicon rod crystal orientation detection device is installed on the middle rear side of the base at the position opposite to the fine grinding device, and a vertical grinding head device is installed on the middle rear side of the base at the position opposite to the rough grinding device. The present invention realizes the processing of rough grinding, fine grinding and V-groove on one machine tool, which increases work efficiency and saves costs.

Description

Technical Field

[0001] The invention relates to the technical field of silicon rod grinding, in particular to an automatic grinding machine tool for semiconductor silicon rods. Background Art

[0002] The existing silicon rod grinding machine is manually loaded and unloaded, and the centering of the silicon rod is manually centered during the loading and unloading process. There is only one grinding head on the silicon rod grinding machine for grinding. After the rough grinding is completed, the material is unloaded, and the rough-ground silicon rod is placed in the fine grinding machine for further grinding. After unloading, the fine-ground silicon rod is processed into a V-shaped groove (grinding the Naas groove), and size inspection, re-centering, and re-precision clamping are required when working on each machine. This will cause high labor intensity for workers, and the grinding accuracy of the workpiece is not high due to manual centering and loading and unloading, and the processing time is too long. Summary of the invention

[0003] In view of the above technical problems, a semiconductor silicon rod automatic grinding machine is provided. The present invention sets rough grinding, fine grinding, V-groove processing, loading and unloading devices, centering devices, clamping devices, and workpiece size detection on one machine, and reasonably sets its work flow, which reduces working time, improves work efficiency, and realizes mechanical automatic centering and automatic clamping, reducing the work intensity of workers.

[0004] The technical means adopted by the present invention are as follows:

[0005] A semiconductor silicon rod automatic grinding machine comprises a base extending left and right and arranged horizontally, a clamp device for clamping the silicon rod and driving the silicon rod to rotate around its axis and a clamp driving device for driving the clamp device to move left and right are arranged above the middle part of the base, a loading and unloading device is installed on the left front side of the base, a rough grinding device for rough grinding of the silicon rod and a fine grinding device for fine grinding of the silicon rod are respectively arranged on the middle front side of the base, and a workpiece size detection device for detecting the size of the silicon rod is arranged between the rough grinding device and the fine grinding device, a silicon rod crystal orientation detection device for detecting the crystal orientation of the silicon rod is installed on the middle rear side of the base at a position directly opposite to the fine grinding device, and a vertical grinding head device for processing V-shaped grooves on the silicon rod is installed on the middle rear side of the base at a position directly opposite to the rough grinding device.

[0006] Furthermore, the clamp driving device includes a driving screw which is installed above the base through a mounting frame and extends horizontally left and right, and the input end of the driving screw is connected to a driving motor and a driving reducer, and a driving guide rail fixed on the mounting frame and extending horizontally left and right is provided below the driving screw, and a driving slide which is slidably connected to the driving guide rail is connected to the bottom of the driving guide rail, the top of the driving slide is fixedly connected to the output end of the driving screw, and the bottom of the driving slide is connected to the clamp device.

[0007] Furthermore, the clamp device comprises a clamp mounting frame fixed to the bottom of the clamp driving device, and the clamp mounting frame is equipped with a clamp lead screw which is horizontally arranged and extends left and right, and a clamp motor and a clamp reducer which drive the clamp lead screw to work;

[0008] A floating chuck is rotatably connected to one end of the bottom of the fixture mounting frame, and the floating chuck is connected to the output end of the chuck motor and the chuck reducer fixed on the fixture mounting frame;

[0009] A movable clamp is fixed at the bottom of the output end of the clamp lead screw.

[0010] Further, the movable chuck comprises a chuck body, and the chuck body has a plurality of edge clamping nails evenly distributed around the axis of the chuck body;

[0011] The floating chuck comprises a clamping body, a central clamping unit is installed at the center of one end surface of the clamping body away from the chuck motor and the chuck reducer, and a plurality of evenly distributed side clamping units are installed around the central clamping unit;

[0012] The center clamping unit comprises a center guide sleeve at one end which penetrates into the clamping body, and the other end of the center guide sleeve is fixedly connected to the end face of the clamping body through a cover and a bolt, one end of a center push rod penetrates into the center guide sleeve, and the center guide sleeve is processed with a center through hole matching this end of the center push rod at one end of the clamping body, and the part of the center push rod in the center guide sleeve is processed with a shoulder protrusion which is in contact with the cover, and a preload disc spring group sleeved on the center push rod is arranged between the shoulder protrusion and the outer edge of the center through hole; a middle clamping nail is fixed to the end of the center push rod away from the preload disc spring group;

[0013] A central spherical surface entering the clamping body is fixedly installed at one end of the clamping body away from the central clamping unit, a floating support plate is provided between the central spherical surface and the central clamping unit, and a spherical groove matching the central spherical surface is processed on the side of the floating support plate close to the central spherical surface, and the central spherical surface is arranged in the spherical groove, and the outer edge of the spherical groove is processed with limiting surfaces whose number matches the number of the edge clamping units;

[0014] The edge clamping unit includes an edge guide sleeve with one end inserted into the clamping body, and the other end of the edge guide sleeve is fixedly connected to the clamping body, one end of the edge push rod passes through the edge guide sleeve, and this end of the edge push rod is processed with an edge spherical surface, the edge spherical surface is in contact with the limiting surface, and an edge pre-tightening spring sleeved on the edge push rod is provided between the side of the edge spherical surface away from the limiting surface and the outer edge of one end of the edge guide sleeve in the clamping body, and the other end of the edge push rod is arranged outside the clamping body and fixed with an edge clamping nail;

[0015] The distance between one end of the central push rod outside the clamping body and the clamping body is greater than the distance between one end of the side push rod outside the clamping body and the clamping body;

[0016] A floating gap is arranged between the floating support plate and the central guide sleeve.

[0017] Furthermore, the loading and unloading device comprises a transport mechanism installed on the base and extending forward and backward, and a centering device arranged on the transport mechanism for centering and radially clamping the silicon rod;

[0018] The transport mechanism comprises a transport track which is horizontally arranged and extends forward and backward, a transport slide which is slidably connected to the transport track is arranged on the transport track, a transport lead screw which is horizontally arranged and extends forward and backward is fixed on the base, an input end of the transport lead screw is connected to a transport motor and a transport reducer, and an output end of the transport lead screw is fixedly connected to the bottom of the transport slide;

[0019] The centering device includes a centering platform fixed on the top of the transport slide, a centering screw horizontally arranged and extending forward and backward, and a centering motor and a centering reducer for driving the centering screw are installed on the centering platform, the front and rear parts of the screw rod of the centering screw have threads with opposite rotation directions, the front and rear parts of the screw rod of the centering screw respectively have output ends of the centering screw that cooperate with the screw rod of the centering screw, a clamping block with a V-shaped notch is fixed on the top of the output end of the centering screw, and a silicon rod placement groove fixedly connected to the centering platform and with a V-shaped notch on the top is provided between the two clamping blocks.

[0020] Furthermore, the rough grinding device, the fine grinding device and the vertical grinding head device all include a fixed slide rail that is horizontally arranged and extends forward and backward, a movable slide table that is mounted on the fixed slide rail and is slidably connected to the fixed slide rail, a grinding screw that drives the movable slide table to move along the fixed slide rail, and a feed motor and a feed reducer that drive the grinding screw to work;

[0021] A rough grinding head for rough grinding silicon rods is installed on the movable slide of the rough grinding device, and the axis of the rough grinding head is arranged horizontally and extends forward and backward;

[0022] A vertical grinding head for grinding V-shaped grooves on silicon rods is installed on the movable slide of the vertical grinding head device, and the axis of the vertical grinding head is vertically arranged;

[0023] A vertically arranged column is installed on the movable slide of the fine grinding device, and a fine grinding head for fine grinding silicon rods and a fine grinding cylinder for driving the fine grinding head to move up and down along the column are slidably connected to the column, and the axis of the fine grinding head is horizontally arranged and extends forward and backward.

[0024] Furthermore, the workpiece size detection device includes a detection head and a driving cylinder for driving the detection head to move horizontally back and forth.

[0025] In use: the silicon rod is placed horizontally and extended left and right in the silicon rod placement groove of the centering platform, the transport screw drives the centering platform to move backward, and the centering screw rotates, so that the two clamps move toward the direction of the silicon rod at the same time to achieve clamping and centering. After that, the driving screw in the clamp driving device drives the driving slide to move to the top of the silicon rod, and the clamp screw drives the moving chuck to move toward the floating chuck to clamp the silicon rod. Then the clamp screw drives the silicon rod to move to the workpiece size detection device for detection, and the driving cylinder drives the detection head to detect the outer diameter of the silicon rod. After that, the clamp screw drives the silicon rod to move to the rough grinding device, and the grinding screw drives the rough grinding head to grind radially. At this time, the clamp screw reciprocates axially (left and right), and the chuck motor and chuck reducer drive the chuck to rotate evenly around its axis to achieve rough grinding of the overall outer surface of the silicon rod. After the rough grinding is completed, the fixture screw drives the silicon rod to move to the workpiece size detection device for further detection, and then the fixture screw drives the silicon rod to move to the fine grinding device. The fine grinding head is driven by the fine grinding cylinder and the grinding screw to adjust the position, and then the silicon rod is finely ground. After the fine grinding is completed, the final size inspection is carried out. After passing the inspection, the fixture screw drives the silicon rod to the silicon rod crystal direction detection device to detect the crystal direction of the finely ground silicon rod. After the crystal direction is determined, the fixture screw drives the silicon rod to the vertical grinding head device for V-groove processing. After that, the fixture screw transports all the processed silicon rods back to the silicon rod placement slot, and then unloads the material to complete the action cycle.

[0026] Compared with the prior art, the present invention has the following advantages:

[0027] 1. The present invention realizes automatic mechanical centering, material loading and unloading, and automatic clamping, thereby reducing the workload of workers.

[0028] 2. The present invention realizes rough grinding, fine grinding and V-groove processing on one machine tool, thereby increasing work efficiency.

[0029] 3. It saves costs. Rough grinding, fine grinding, and V-groove processing are all included in one machine tool, and it only has one loading and unloading device, one clamping device, one clamping driving device, one silicon rod crystal orientation detection device, and one workpiece size detection device.

[0030] 4. The combination of floating chuck and movable chuck realizes the precise clamping of silicon rod, ensuring that the axis of silicon rod coincides with the axis of chuck.

[0031] Based on the above reasons, the present invention can be widely promoted in the fields of silicon rod grinding and the like. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0033] Figure 1 This is a three-dimensional view of a semiconductor silicon rod automatic grinding machine tool in a specific implementation manner of the present invention (excluding the clamping device and the clamping drive device).

[0034] Figure 2 It is a front view of a semiconductor silicon rod automatic grinding machine tool in a specific implementation manner of the present invention.

[0035] Figure 3 It is a side view of an automatic grinding machine for semiconductor silicon rods in a specific embodiment of the present invention.

[0036] Figure 4 It is a side view and a top view of a semiconductor silicon rod automatic grinding machine tool in a specific embodiment of the present invention.

[0037] Figure 5 It is a front view of the clamp driving device in a specific implementation manner of the present invention.

[0038] Figure 6 It is a left view of the centering device in a specific implementation manner of the present invention.

[0039] Figure 7 It is a schematic diagram of the floating chuck structure in a specific implementation manner of the present invention.

[0040] In the figure:

[0041] 1. Base;

[0042] 2. Clamp device; 201. Clamp mounting frame; 202. Clamp lead screw; 203. Clamp motor and clamp reducer; 204. Clamp motor and clamp reducer; 205. Moving clamp; 206. Clamp body; 207. Edge clamp;

[0043] 3. Clamp driving device; 301. Mounting frame; 302. Driving screw; 303. Driving motor and driving reducer; 304. Driving guide rail; 305. Driving slide;

[0044] 4. Loading and unloading device; 41. Transportation mechanism; 411. Transportation track; 412. Transportation slide; 413. Transportation screw; 414. Transportation motor and transportation reducer; 42. Centering device; 421. Centering platform; 422. Centering screw; 423. Centering motor and centering reducer; 424. Clamp; 425. Silicon rod placement slot;

[0045] 5. Rough grinding device; 501. Fixed slide rail; 502. Moving slide; 503. Grinding screw; 504. Feed motor and feed reducer; 505. Rough grinding head;

[0046] 6. Fine grinding device; 601. column; 602. fine grinding head; 603. fine grinding cylinder;

[0047] 7. Workpiece size detection device; 701. Detection head; 702. Driving cylinder;

[0048] 8. Silicon rod crystal orientation detection device;

[0049] 9. Vertical grinding head device; 901. Vertical grinding head;

[0050] 10. Floating chuck; 1010. Clamping body; 1020. Center clamping unit; 1021. Center guide sleeve; 1022. Cover; 1023. Center push rod; 1024. Center through hole; 1025. Shoulder protrusion; 1026. Preload disc spring assembly; 1030. Edge clamping unit; 1031. Edge guide sleeve; 1032. Edge push rod; 1033. Edge spherical surface; 1034. Edge preload spring; 1035. Edge clamping pin; 1040. Center spherical surface; 1050. Floating support plate; 1051. Limiting surface; 1060. Floating gap; DETAILED DESCRIPTION

[0051] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0052] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0053] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0054] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, the numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be clear that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be regarded as part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0055] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention: the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0056] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below their position devices or structures". Thus, the exemplary term "above" may include both "above" and "below". The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0057] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0058] like Figures 1 to 7 As shown, a semiconductor silicon rod automatic grinding machine comprises a base 1 extending left and right and arranged horizontally, a clamp device 2 for clamping the silicon rod and driving the silicon rod to rotate around its axis and a clamp driving device 3 for driving the clamp device 2 to move left and right are provided on the upper middle part of the base 1, a loading and unloading device 4 is installed on the left front side of the base 1, a rough grinding device 5 for rough grinding of the silicon rod and a fine grinding device 6 for fine grinding of the silicon rod are respectively provided on the middle front side of the base 1, and a workpiece size detection device 7 for detecting the size of the silicon rod is provided between the rough grinding device 5 and the fine grinding device 6, a silicon rod crystal orientation detection device 8 for detecting the crystal orientation of the silicon rod is installed on the middle rear side of the base 1 at a position directly opposite to the fine grinding device 6, and a vertical grinding head device 9 for processing V-shaped grooves on the silicon rod is installed on the middle rear side of the base 1 at a position directly opposite to the rough grinding device 5.

[0059] Furthermore, the clamp driving device 3 includes a driving screw 302 which is installed above the base 1 through a mounting frame 301 and extends horizontally left and right, and the input end of the driving screw 302 is connected to a driving motor and a driving reducer 303, and a driving guide rail 304 which is fixed on the mounting frame 301 and extends horizontally left and right is provided below the driving screw 302, and a driving slide 305 which is slidably connected to the driving guide rail 304 is connected to the bottom of the driving guide rail 304, the top of the driving slide 305 is fixedly connected to the output end of the driving screw 302, and the bottom of the driving slide 305 is connected to the clamp device 2.

[0060] Furthermore, the clamp device 2 includes a clamp mounting frame 201 fixed to the bottom of the clamp driving device 3, and the clamp mounting frame 201 is equipped with a clamp lead screw 202 that is horizontally arranged and extends left and right, and a clamp motor and a clamp reducer 203 that drive the clamp lead screw 202 to work;

[0061] A floating chuck 10 is rotatably connected to one end of the bottom of the fixture mounting frame 201, and the floating chuck 10 is connected to the output end of the chuck motor and the chuck reducer 204 fixed on the fixture mounting frame 20;

[0062] A movable clamp 205 is fixed at the bottom of the output end of the clamp lead screw 202 .

[0063] The movable chuck 205 includes a chuck body 206, and one side of the chuck body 206 has a plurality of edge clamping nails 207 evenly distributed around the axis of the chuck body 206;

[0064] The floating chuck 10 comprises a clamping body 1010, a central clamping unit 1020 is installed at the center of one end surface of the clamping body 1010 away from the chuck motor and the chuck reducer 203, and three evenly distributed side clamping units 1030 are installed around the central clamping unit 1020;

[0065] The center clamping unit 1020 includes a center guide sleeve 1021 with one end inserted into the clamping body 1010, and the other end of the center guide sleeve 1021 is fixedly connected to the end face of the clamping body 1 through a cover 1022 and bolts, one end of a center push rod 1023 is inserted into the center guide sleeve 1021, and one end of the center guide sleeve 1021 in the clamping body 1 is processed with a center through hole 1024 matching this end of the center push rod 1023, and the part of the center push rod 1023 in the center guide sleeve 1021 is processed with a shoulder protrusion 1025 in contact with the cover 1022, and a preload disc spring group 1026 sleeved on the center push rod 1023 is provided between the shoulder protrusion 1025 and the outer edge of the center through hole 1024;

[0066] A central spherical surface 1040 entering into the clamping body 1010 is fixedly mounted on one end of the clamping body 1010 away from the central clamping unit 1020, and one end of the central spherical surface 1040 away from the clamping body 1010 is rotatably connected to the clamp mounting frame 201, and a floating support plate 1050 is provided between the central spherical surface 1040 and the central clamping unit 1020, and a spherical groove matching the central spherical surface 1040 is processed on one side of the floating support plate 1050 close to the central spherical surface 1040, and the central spherical surface 1040 is arranged in the spherical groove, and a limiting surface 1051 whose number matches the number of the edge clamping units 1030 is processed on the outer edge of the spherical groove;

[0067] The edge clamping unit 1030 includes an edge guide sleeve 1031, one end of which is inserted into the clamping body 1010, and the other end of the edge guide sleeve 1031 is fixedly connected to the clamping body 1010, one end of the edge push rod 1032 passes through the edge guide sleeve 1031, and this end of the edge push rod 1032 is processed with an edge spherical surface 1033, the edge spherical surface 1033 is in contact with the limiting surface 1051, and an edge preload spring 1034 is provided on the edge push rod 1032 between the side of the edge spherical surface 1033 away from the limiting surface 1051 and the outer edge of one end of the edge guide sleeve 1031 in the clamping body 1010, and the other end of the edge push rod 1032 is arranged outside the clamping body 1010.

[0068] The distance between the end of the central push rod 1023 outside the clamping body 1010 and the clamping body 1010 is greater than the distance between the end of the side push rod 1032 outside the clamping body 1010 and the clamping body 1010, which is about 2 mm.

[0069] The central push rod 1023 and the side push rod 1032 are respectively fixed with a middle clamping nail and a side clamping nail 1035 at one end outside the clamping body 1.

[0070] A floating gap 1060 is defined between the floating support plate 1050 and the central guide sleeve 1021 .

[0071] The floating support plate 1050 is clamped on the central spherical surface 1040 under the action of the plurality of edge preload springs 1034 pushing the edge spherical surface 1033 .

[0072] Furthermore, the loading and unloading device 4 comprises a transport mechanism 41 installed on the base 1 and extending forward and backward, and a centering device 42 provided on the transport mechanism 41 for centering and radially clamping the silicon rod;

[0073] The transport mechanism 41 includes a transport track 411 that is horizontally arranged and extends forward and backward, and a transport slide 412 that is slidably connected to the transport track 411 is arranged on the transport track 411. A transport lead screw 413 that is horizontally arranged and extends forward and backward is fixed on the base 1. The input end of the transport lead screw 413 is connected to a transport motor and a transport reducer 414, and the output end of the transport lead screw 413 is fixedly connected to the bottom of the transport slide 412.

[0074] The centering device 42 includes a centering platform 421 fixed on the top of the transport slide 412, and a centering screw 422 that is horizontally arranged and extends forward and backward, and a centering motor and a centering reducer 423 that drive the centering screw 422 to work are installed on the centering platform 421. The front and rear parts of the screw rod of the centering screw 422 have threads with opposite rotation directions, and the front and rear parts of the screw rod of the centering screw 422 respectively have output ends of the centering screw 422 that cooperate with the screw rod of the centering screw 422, and a clamping block 424 with a V-shaped notch is fixed on the top of the output end of the centering screw 422, and a silicon rod placement groove 425 that is fixedly connected to the centering platform 421 and has a V-shaped notch on the top is provided between the two clamping blocks 424.

[0075] Furthermore, the rough grinding device 5, the fine grinding device 6 and the vertical grinding head device 9 all include a fixed slide rail 501 that is horizontally arranged and extends forward and backward, a movable slide 502 that is mounted on the fixed slide rail 501 and is slidably connected to the fixed slide rail 501, a grinding screw 503 that drives the movable slide 502 to move along the fixed slide rail 501, and a feed motor and a feed reducer 504 that drive the grinding screw 503 to work;

[0076] A rough grinding head 505 for rough grinding silicon rods is installed on the movable slide 502 of the rough grinding device 5, and the axis of the rough grinding head 505 is horizontally arranged and extends forward and backward;

[0077] A vertical grinding head 901 for grinding V-shaped grooves on silicon rods is installed on the movable slide 502 of the vertical grinding head device 9, and the axis of the vertical grinding head 901 is vertically arranged;

[0078] A vertically arranged column 601 is installed on the movable slide 502 of the fine grinding device 6, and a fine grinding head 602 for fine grinding silicon rods and a fine grinding cylinder 603 for driving the fine grinding head 602 to move up and down along the column 601 are slidably connected to the column 601, and the axis of the fine grinding head 602 is horizontally arranged and extends forward and backward.

[0079] Furthermore, the workpiece size detection device 7 includes a detection head 701 and a driving cylinder 702 for driving the detection head 701 to move horizontally forward and backward.

[0080] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A semiconductor silicon rod automatic grinding machine tool, comprising a base extending left and right and arranged horizontally, a clamp device for clamping the silicon rod and driving the silicon rod to rotate around its axis and a clamp driving device for driving the clamp device to move left and right are arranged above the middle part of the base, and a loading and unloading device is installed on the left front side of the base, characterized in that: A rough grinding device for rough grinding of silicon rods and a fine grinding device for fine grinding of silicon rods are respectively arranged on the front side of the middle part of the base, and a workpiece size detection device for detecting the size of silicon rods is arranged between the rough grinding device and the fine grinding device, a silicon rod crystal orientation detection device for detecting the crystal orientation of silicon rods is installed at the middle rear side of the base at a position directly opposite to the fine grinding device, and a vertical grinding head device for processing V-shaped grooves on silicon rods is installed at the middle rear side of the base at a position directly opposite to the rough grinding device; The clamp driving device includes a driving screw which is installed above the base through a mounting frame and extends horizontally left and right, and the input end of the driving screw is connected to a driving motor and a driving reducer, a driving guide rail fixed to the mounting frame and extending horizontally left and right is provided below the driving screw, a driving slide which is slidably connected to the driving guide rail is connected to the bottom of the driving guide rail, the top of the driving slide is fixedly connected to the output end of the driving screw, and the bottom of the driving slide is connected to the clamp device; the clamp device includes a clamp mounting frame fixed to the bottom of the clamp driving device, a clamp screw which is horizontally arranged and extends left and right, and a clamp motor and a clamp reducer which drive the clamp screw to work are installed on the clamp mounting frame; A floating chuck is rotatably connected to one end of the bottom of the fixture mounting frame, and the floating chuck is connected to the output end of the chuck motor and the chuck reducer fixed on the fixture mounting frame; A movable chuck is fixed at the bottom of the output end of the clamp lead screw; the movable chuck comprises a chuck body, and the chuck body has a plurality of edge clamping nails evenly distributed around the axis of the chuck body; The floating chuck comprises a clamping body, a central clamping unit is installed at the center of one end surface of the clamping body away from the chuck motor and the chuck reducer, and a plurality of evenly distributed side clamping units are installed around the central clamping unit; The center clamping unit comprises a center guide sleeve at one end which penetrates into the clamping body, and the other end of the center guide sleeve is fixedly connected to the end face of the clamping body through a cover and a bolt, one end of a center push rod penetrates into the center guide sleeve, and the center guide sleeve is processed with a center through hole matching this end of the center push rod at one end of the clamping body, and the part of the center push rod in the center guide sleeve is processed with a shoulder protrusion which is in contact with the cover, and a preload disc spring group sleeved on the center push rod is arranged between the shoulder protrusion and the outer edge of the center through hole; a middle clamping nail is fixed to the end of the center push rod away from the preload disc spring group; A central spherical surface entering the clamping body is fixedly installed at one end of the clamping body away from the central clamping unit, a floating support plate is provided between the central spherical surface and the central clamping unit, and a spherical groove matching the central spherical surface is processed on the side of the floating support plate close to the central spherical surface, and the central spherical surface is arranged in the spherical groove, and the outer edge of the spherical groove is processed with limiting surfaces whose number matches the number of the edge clamping units; The edge clamping unit includes an edge guide sleeve with one end inserted into the clamping body, and the other end of the edge guide sleeve is fixedly connected to the clamping body, one end of the edge push rod passes through the edge guide sleeve, and this end of the edge push rod is processed with an edge spherical surface, the edge spherical surface is in contact with the limiting surface, and an edge pre-tightening spring sleeved on the edge push rod is provided between the side of the edge spherical surface away from the limiting surface and the outer edge of one end of the edge guide sleeve in the clamping body, and the other end of the edge push rod is arranged outside the clamping body and fixed with an edge clamping nail; The distance between one end of the central push rod outside the clamping body and the clamping body is greater than the distance between one end of the side push rod outside the clamping body and the clamping body; A floating gap is arranged between the floating support plate and the central guide sleeve.

2. The semiconductor silicon rod automatic grinding machine tool according to claim 1, characterized in that: The loading and unloading device comprises a transport mechanism installed on the base and extending forward and backward, and a centering device arranged on the transport mechanism for centering and radially clamping the silicon rod; The transport mechanism comprises a transport track which is horizontally arranged and extends forward and backward, a transport slide which is slidably connected to the transport track is arranged on the transport track, a transport lead screw which is horizontally arranged and extends forward and backward is fixed on the base, an input end of the transport lead screw is connected to a transport motor and a transport reducer, and an output end of the transport lead screw is fixedly connected to the bottom of the transport slide; The centering device includes a centering platform fixed on the top of the transport slide, a centering screw horizontally arranged and extending forward and backward, and a centering motor and a centering reducer for driving the centering screw are installed on the centering platform, the front and rear parts of the screw rod of the centering screw have threads with opposite rotation directions, the front and rear parts of the screw rod of the centering screw respectively have output ends of the centering screw that cooperate with the screw rod of the centering screw, a clamping block with a V-shaped notch is fixed on the top of the output end of the centering screw, and a silicon rod placement groove fixedly connected to the centering platform and with a V-shaped notch on the top is provided between the two clamping blocks.

3. The semiconductor silicon rod automatic grinding machine tool according to claim 1, characterized in that: The rough grinding device, the fine grinding device and the vertical grinding head device all include a fixed slide rail that is horizontally arranged and extends forward and backward, a movable slide table that is mounted on the fixed slide rail and is slidably connected to the fixed slide rail, a grinding screw that drives the movable slide table to move along the fixed slide rail, and a feed motor and a feed reducer that drive the grinding screw to work; A rough grinding head for rough grinding silicon rods is installed on the movable slide of the rough grinding device, and the axis of the rough grinding head is arranged horizontally and extends forward and backward; A vertical grinding head for grinding V-shaped grooves on silicon rods is installed on the movable slide of the vertical grinding head device, and the axis of the vertical grinding head is vertically arranged; A vertically arranged column is installed on the movable slide of the fine grinding device, and a fine grinding head for fine grinding silicon rods and a fine grinding cylinder for driving the fine grinding head to move up and down along the column are slidably connected to the column, and the axis of the fine grinding head is horizontally arranged and extends forward and backward.

4. The semiconductor silicon rod automatic grinding machine tool according to claim 1, characterized in that: The workpiece size detection device comprises a detection head and a driving cylinder for driving the detection head to move horizontally forward and backward.

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