A coating window structure and its process method

Abstract

The present invention relates to a coating window structure and a process method, the structure comprising a substrate (1), a signal transmitter (2) and a device (3) are arranged on the substrate (1), the signal transmitter (2) and the device (3) are encapsulated with a plastic packaging material (4) on the periphery, a gate groove structure (8) is opened on the surface of the plastic packaging material (4) above the signal transmitter (2), and a sputtering coating (5) is arranged on the surface of the plastic packaging material (4) in other areas except the gate groove structure (8). The coating window structure and the process method of the present invention can solve the problems of poor operability, residual adhesive, coating debris, etc. caused by the traditional coating window opening in a specific area by covering with a high-temperature adhesive tape.

Description

Technical Field

[0001] The invention relates to a coating window structure and a process method thereof, belonging to the technical field of semiconductor packaging. Background Art

[0002] The traditional method of opening windows in magnetron sputtering coatings in specific areas is as follows:

[0003] 1. Take a high temperature resistant tape and use the mechanical upper and lower tool punching technology to cut it into pieces in a longitudinal manner, and then stick the tape to the position where the window needs to be opened (see Figure 1 );

[0004] 2. Place the product with the high-temperature tape affixed into the magnetron sputtering machine for coating. Magnetron sputtering generally forms a continuous coating, and at this moment, a layer of coating covers the top of the high-temperature tape.

[0005] 3. Remove the high temperature tape on the surface of the sputtered product and prepare the coating window in the area covered by the high temperature tape (see Figure 2 ).

[0006] Disadvantages of the above traditional process methods:

[0007] 1. The high-temperature tape has poor dimensional stability during physical punching, the tape has poor dimensional accuracy after punching, and there is glue drawing on the cutting edge, which affects subsequent operations;

[0008] 2. The high-temperature tape of a specific size needs to be pasted to the designated window position of the coating. The position accuracy of pasting it on the surface of the product is poor and wrinkles are prone to occur;

[0009] 3. After sputtering, the high-temperature tape needs to be torn off. There is no force point, so it is difficult to tear off;

[0010] 4. After tearing off the tape, residual glue and coating debris are likely to appear in the tape area, affecting the appearance and performance of the product. Summary of the invention

[0011] The technical problem to be solved by the present invention is to provide a coating window structure and its process method for the above-mentioned prior art, which can solve the problems of poor operability, residual glue, coating debris, etc. caused by the traditional method of opening windows in specific areas by covering with high-temperature glue.

[0012] The technical solution adopted by the present invention to solve the above-mentioned problem is: a coating window structure, which includes a substrate, on which a signal transmitter and a device are arranged, and the signal transmitter and the device are encapsulated with a plastic packaging material. A gate groove structure is opened on the surface of the plastic packaging material vertically above the signal transmitter, and a sputtering coating is provided on the upper surface of the plastic packaging material and the side surfaces of the plastic packaging material and the substrate. The sputtering coating is a discontinuous coating in the area of ​​the gate groove structure.

[0013] Optionally, the distance from the upper surface of the signal emitting device to the upper surface of the molding compound is greater than 150 um.

[0014] Optionally, the gate groove structure is composed of a plurality of grooves, the plurality of grooves are arranged in parallel, and a distance between two adjacent grooves is greater than 10 um.

[0015] Optionally, the ratio of the depth to the width of the groove is greater than 5:1.

[0016] Optionally, the groove has a depth ranging from 50um to 500um and a width ranging from 10um to 100um.

[0017] A process method for a coating window structure, the method comprising the following steps:

[0018] Step 1: Take a plastic-sealed substrate;

[0019] Step 2: Optically locate the position where the window needs to be opened;

[0020] Step 3: Using laser to form a gate groove structure on the upper surface of the plastic packaging material;

[0021] Step 4: Clean the dust inside the excavated grid groove structure;

[0022] Step 5: cutting the substrate, and performing magnetron sputtering on the upper surface and side surface of the cut unit product to form a sputtering coating. The sputtering coating is continuous on the flat surface of the plastic packaging material and discontinuous on the upper surface of the gate groove structure.

[0023] Step 6: Remove the sputtered product.

[0024] Optionally, in step 1, the upper surface of the substrate is mounted with components and signal emitting components, the upper surface of the substrate is plastic-sealed, and the components and signal emitting components are wrapped with a plastic sealing material.

[0025] Optionally, in step 4, high-speed airflow or dry ice cleaning is used to remove dust from the grid groove.

[0026] Compared with the prior art, the advantages of the present invention are:

[0027] 1. The laser digging process of the present invention can achieve the coating window effect without the need to use high-temperature tape for sticking and shielding operations;

[0028] 2. The laser grating window opening process of the present invention adopts an optical positioning method, the window opening and grating groove position accuracy is high, and the laser processing area is not limited by the window opening contour, and the grating window opening of any contour and any size can be prepared;

[0029] 3. The laser grating slot opening of the present invention does not require the use of tape to mask the coating, so there is no difficulty in peeling the adhesive, the preparation process is simple, and the production efficiency is high;

[0030] 4. The laser grating slot opening of the present invention does not have side effects such as residual glue caused by tape sticking and coating debris caused by tape tearing, and the product appearance is better and the quality is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 Schematic diagram of sticking tape to a specific magnetron sputtering coating window position in a traditional specific area magnetron sputtering coating window opening method.

[0032] Figure 2 Schematic diagram of the preparation of magnetron sputtering coating window for the traditional specific area magnetron sputtering coating window method in the high temperature tape covering area.

[0033] Figure 3 This is a schematic diagram of a coating window structure of the present invention.

[0034] Figure 4 for Figure 3 Top view of the .

[0035] in:

[0036] Substrate 1

[0037] Signal Transmitter 2

[0038] Device 3

[0039] Plastic compound 4

[0040] Sputtering coating 5

[0041] High temperature tape 6

[0042] Coating window 7

[0043] Gate trench structure 8. DETAILED DESCRIPTION

[0044] The present invention is further described in detail below with reference to the accompanying drawings.

[0045] like Figure 3 , Figure 4 As shown, the present invention relates to a coating window structure, which includes a substrate 1, on which a signal transmitter 2 and a device 3 are arranged, and the signal transmitter 2 and the device 3 are encapsulated with a plastic packaging material 4. A gate groove structure 8 is opened on the surface of the plastic packaging material 4 vertically above the signal transmitter 2, and a sputtering coating 5 is provided on the upper surface of the plastic packaging material 4 and the side surfaces of the plastic packaging material 4 and the substrate 1. The sputtering coating 5 is a discontinuous coating in the area of ​​the gate groove structure 8.

[0046] The process comprises the following steps:

[0047] Step 1: Take a plastic-sealed substrate;

[0048] Take a substrate, mount the device and the signal emitting device on the upper surface of the substrate, perform plastic sealing on the upper surface of the substrate, wrap the device and the signal emitting device with plastic sealing material, and the distance between the upper surface of the signal emitting device and the upper surface of the plastic sealing material is greater than 150um, so as to facilitate the laser digging of the gate groove in the subsequent step three;

[0049] Step 2, optically positioning the position of the window on the substrate;

[0050] The optical recognition system of the laser equipment scans the alignment point of the substrate and identifies the location of the area to be processed, which facilitates precise processing in step three;

[0051] Step 3: Use laser to dig a grid groove on the plastic packaging material;

[0052] On the substrate after optical positioning in step 2, a laser device is used to dig a groove in the plastic packaging material corresponding to the vertical upper side of the signal transmitter to dig out a gate groove structure with a specific line width and groove depth;

[0053] The area of ​​the gate trench structure is larger than 200×200um;

[0054] The gate groove structure is formed by multiple grooves, and the distance between two adjacent grooves is greater than 10um. This specially designed structure is conducive to the subsequent coating window opening in step five;

[0055] The depth to width ratio of the groove is greater than 5:1;

[0056] The depth of the groove ranges from 50um to 500um, and the width ranges from 10um to 100um;

[0057] Step 4: Clean the dust inside the laser-dug grid groove;

[0058] The principle of laser grooving is to use laser to destroy the molecular bonding of the material and the thermal effect to destroy the structure of the plastic packaging material to form a groove. The dust generated during the grooving process will block the groove. Therefore, after the laser grooving is completed in step 3, the dust in the groove needs to be cleaned and removed. Generally, high-speed airflow, dry ice cleaning and other methods are used to remove the dust in the grooving.

[0059] Step 5, performing magnetron sputtering;

[0060] The substrate plastic package is cut, and a sputtering coating is sputtered on the upper and side surfaces of the product using the magnetron sputtering PVD process. This sputtering coating appears continuous on the flat surface of the plastic package, but in the special surface structure of the gate groove, the sputtering coating will be discontinuous in this area due to the shielding effect inside the gate groove area. This discontinuous coating formed due to the specific structure of the gate groove forms a window structure of the magnetron sputtering coating, which facilitates the internal signal transmitter to transmit signals to the outside;

[0061] Step 6: Remove the sputtered substrate and place it in a tray.

[0062] In addition to the above embodiments, the present invention also includes other implementation modes. Any technical solutions formed by equivalent transformation or equivalent replacement should fall within the protection scope of the claims of the present invention.

Claims

1. A coating window structure, characterized in that: The invention comprises a substrate (1), on which a signal transmitter (2) and a device (3) are arranged, the signal transmitter (2) and the device (3) are encapsulated with a plastic packaging material (4) at their peripheries, a gate groove structure (8) is provided on the surface of the plastic packaging material (4) vertically above the signal transmitter (2), a sputtering coating (5) is provided on the upper surface of the plastic packaging material (4) and the side surfaces of the plastic packaging material (4) and the substrate (1), and the sputtering coating (5) is a discontinuous coating in the region of the gate groove structure (8).

2. A coating window structure according to claim 1, characterized in that: The distance between the upper surface of the signal transmitter (2) and the upper surface of the plastic packaging material (4) is greater than 150 um.

3. The coating window structure according to claim 1, characterized in that: The gate groove structure (8) is composed of a plurality of grooves, the plurality of grooves are arranged in parallel, and the spacing between two adjacent grooves is greater than 10 um.

4. The coating window structure according to claim 3, characterized in that: The ratio of the depth to the width of the groove is greater than 5:

1.

5. The coating window structure according to claim 3, characterized in that: The depth of the groove ranges from 50um to 500um, and the width ranges from 10um to 100um.

6. A process for a coating window structure, characterized in that The method comprises the following steps: Step 1: Take a plastic-sealed substrate; Step 2: Optically locate the position where the window needs to be opened; Step 3: Use laser to form a gate groove structure on the upper surface of the positioned plastic packaging material; Step 4: Clean the dust inside the excavated grid groove structure; Step 5: cutting the substrate, forming a sputtering coating on the upper surface and side surfaces of the cut unit product, wherein the sputtering coating is continuous on the flat surface of the plastic sealing layer and discontinuous on the upper surface of the gate groove structure; Step 6: Remove the sputtered product.

7. A process for forming a coating window structure according to claim 6, characterized in that: In step 1, the substrate is subjected to a magnetron sputtering electromagnetic shielding process, a signal transmitter and a device are arranged on the substrate, and the periphery of the signal transmitter and the device are wrapped with a plastic packaging material.

8. The process for forming a coating window structure according to claim 6, characterized in that: In step 4, high-speed airflow or dry ice cleaning is used to remove dust from the grid structure.

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