Anti-static conveyor belt for cleaning machines

Abstract

The present invention is an antistatic conveyor belt used for a cleaning machine, comprising a machine; a transmission device arranged in the machine, which sequentially comprises a feeding area, a conveying area, a cleaning area, a dewatering area, a discharging area and a conveyor belt, wherein the conveyor belt is made of antistatic material; a cover body having a gate device located in the cleaning area, wherein both the input side and the output side of the cleaning area are provided with a baffle door which can extend under the transmission device; a pressing device is supported on the surface of one side of the plurality of semiconductors and is arranged in the cover body and above the transmission device, wherein the setting area of ​​the pressing device extends from the conveying area to the interval of the dewatering area; a cleaning device capable of cleaning the surfaces of the plurality of semiconductors and located in the cleaning interval; a dewatering and cooling device is arranged in the dewatering area of ​​the machine, so as to achieve the purpose of eliminating the electrostatic damage generated by the semiconductors during the cleaning and air-drying process.

Description

Technical Field

[0001] The present invention relates to an antistatic conveyor belt used in a cleaning machine, and in particular to a conveyor belt made of an antistatic material to achieve the purpose of eliminating electrostatic damage generated by semiconductors during the cleaning and air-drying process. Background Art

[0002] With the advancement of high-tech, various electronic and electrical products are popular. Portable electronic devices such as smart phones, tablet computers and laptops are widely used by the public, which has also led to the establishment of related manufacturing industries. Among them, the semiconductor industry has grown the fastest. Whether it is silicon wafers, integrated circuit manufacturing or IC chip packaging, the production process of semiconductor manufacturing is quite complicated, and there are many types of chemical substances used in the process. The residues of these chemical substances or solvents will not only cause air pollution in the production process, but also have a huge impact on the pass rate of silicon wafers, integrated circuits or IC chips.

[0003] Furthermore, these semiconductor manufacturing processes are completed by using high-precision machines to perform high-precision layering operations on silicon wafers. The manufacturing costs of the machines, factories, etc. are very high. Therefore, in the process of manufacturing wafers, the product qualification rate can determine whether a semiconductor company is profitable or not. Therefore, working hard to improve the product qualification rate is the most important issue for every semiconductor industry operator.

[0004] However, in order to improve the product qualification rate of semiconductor manufacturing, during the cleaning and air-drying process of the semiconductor, it is necessary to ensure that the chemical substances on the semiconductor have been cleaned and no chemical substances are left. Then, the wind knife group set in the second half of the transmission device is used to blow away water and cool down. However, when the wind blown by the wind knife group passes through the surface of the semiconductor to take away the moisture, the semiconductor is also subjected to wind friction. The friction will generate static electricity, which will cause electronic damage to the integrated circuit or electronic components formed in the semiconductor, thereby directly reducing the product qualification rate of semiconductor manufacturing.

[0005] Therefore, how to eliminate the electrostatic damage generated by the semiconductor during the cleaning and drying process is the direction that the relevant industry players are eager to study and improve. Summary of the invention

[0006] Therefore, in view of the above problems and deficiencies, the inventor has collected relevant information, conducted multiple evaluations and considerations, and based on years of experience accumulated in this industry, has continuously trial-produced and modified, and finally designed an anti-static conveyor belt for use in cleaning machines.

[0007] To achieve the above object, the technical solution adopted by the present invention is:

[0008] An anti-static conveyor belt used for a cleaning machine, characterized by comprising:

[0009] One machine;

[0010] A transmission device is arranged in the machine, which includes a feeding area, a conveying area, a cleaning area, a water removal area, a discharging area and a conveyor belt in sequence, and the conveyor belt carries a plurality of semiconductors, and the conveyor belt is made of an antistatic material to absorb static electricity of the plurality of semiconductors;

[0011] A cover body is arranged on the top of the machine;

[0012] a cleaning device for spraying a cleaning liquid to clean the plurality of semiconductor surfaces, which is disposed in the machine and located in the cleaning zone; and

[0013] A dewatering and cooling device is used to remove the cleaning liquid on the preset semiconductor and is arranged in the dewatering area of ​​the machine.

[0014] The antistatic conveyor belt used for cleaning machine, wherein: the transmission device is also provided with a plurality of conveyor wheels driven by a power source and for carrying the plurality of semiconductors, and the conveyor belt is wrapped around the outside of the plurality of conveyor wheels.

[0015] The antistatic conveyor belt used for cleaning machine, wherein: the pressing device is supported on the surface of one side of the plurality of semiconductors, and is arranged in the cover body and above the transmission device, and the setting area of ​​the pressing device extends from the conveying area to the interval of the dewatering area.

[0016] The antistatic conveyor belt used for cleaning machine, wherein: the pressing device is also provided with a plurality of transmission wheels driven by a power source and used to press against the surface of one side of the plurality of semiconductors.

[0017] The anti-static conveyor belt used for a cleaning machine, wherein: the cleaning device is also provided with a plurality of nozzles arranged in the cleaning area and for spraying the cleaning liquid on the surfaces of the plurality of semiconductors, and the plurality of nozzles are connected to a pressure pump through pipelines for pressurizing the plurality of cleaning liquids and delivering them to the plurality of nozzles, and the pressure pump is connected to a plurality of heaters for heating the cleaning liquid.

[0018] The anti-static conveyor belt used for cleaning machine, wherein: the water removal and temperature reduction device is also provided with an air knife group for removing the plurality of cleaning liquids attached to the plurality of semiconductors.

[0019] The antistatic conveyor belt used for cleaning machines is made of polyacrylonitrile carbon fiber material, or a composite material of polypropylene and stainless steel fiber, or a composite material of polypropylene and carbon black conductivity.

[0020] The anti-static conveyor belt used for cleaning a machine, wherein: the static electricity generated by the air knife group blowing gas to the surface of the plurality of semiconductors is absorbed by the conveyor belt, and the plurality of conveyor wheels arranged in the conveyor belt are made of metal, the plurality of conveyor wheels contact the conveyor belt and absorb the static electricity adsorbed by them, and the plurality of conveyor wheels that have absorbed the static electricity then conduct the static electricity to the machine, and then the machine conducts the static electricity to the ground.

[0021] The anti-static conveyor belt used for cleaning machines, wherein: the cover body has a gate device located in the cleaning area, the gate device is arranged on an input side and an output side of the cleaning area, and the input side and the output side of the cleaning area are both provided with a blocking door that can extend under the transmission device.

[0022] The main advantage of the present invention is that it can eliminate the electrostatic damage generated by the semiconductor during the cleaning and air-drying process.

[0023] Another advantage of the present invention is that the conveyor belt is made of polyacrylonitrile carbon fiber, a composite material of polypropylene and stainless steel fiber, and a composite material of polypropylene and carbon black conductivity. The conveyor belt is made of non-metallic material, which can effectively prevent the conveyor belt from scratching the surface of the plurality of semiconductors.

[0024] Another advantage of the present invention is that the static electricity generated by the air knife group blowing gas to the surface of the plurality of semiconductors is absorbed by the conveyor belt at the first time, and the plurality of conveyor wheels arranged in the conveyor belt are made of metal. The plurality of conveyor wheels contact the conveyor belt and absorb the static electricity adsorbed by them. The plurality of conveyor wheels that have absorbed the static electricity then conduct the static electricity to the machine, and then the machine conducts the static electricity to the ground. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a side sectional view of the present invention.

[0026] Figure 2 The present invention Figure 1 Magnified view of part A.

[0027] Figure 3 It is the use state diagram (I) of the present invention.

[0028] Figure 4 It is the use state diagram (two) of the present invention.

[0029] Figure 5 It is a structural diagram of the antistatic conveyor belt of the present invention.

[0030] Explanation of the reference numerals: 1-machine; 2-transmission device; 21-feeding area; 22-conveying area; 23-cleaning area; 24-dewatering area; 25-discharging area; 26-conveying wheel; 27-conveying belt; 3-cover body; 31-gate device; 311-blocking door; 4-pressing device; 41-transmission wheel; 5-cleaning device; 51-nozzle; 52-boosting pump; 53-heater; 6-dewatering and cooling device; 61-wind knife group; 7-semiconductor. DETAILED DESCRIPTION

[0031] In order to achieve the above-mentioned purpose and effect, the technical means and structures adopted by the present invention are illustrated in detail with reference to the preferred embodiments of the present invention, and their features and functions are described as follows for a complete understanding.

[0032] See also Figure 1 , Figure 2 Shown is a side cross-sectional view of the present invention and Figure 1 The enlarged view of part A of the embodiment of the present invention clearly shows that the anti-static conveyor belt for cleaning the machine includes a machine 1, a transmission device 2, a cover 3, a pressing device 4, a cleaning device 5 and a water removal and cooling device 6, wherein:

[0033] The machine 1 is provided with a transmission device 2 capable of reciprocating transmission, wherein the transmission device 2 sequentially includes a feeding area 21, a conveying area 22, a cleaning area 23, a dewatering area 24 and a discharging area 25, and has a plurality of conveying wheels 26 driven by a power source, and a conveyor belt 27, and the conveyor belt 27 is coated on the outside of the plurality of conveying wheels 26, and the conveyor belt 27 carries a plurality of semiconductors 7, and the conveyor belt 27 is made of an antistatic material, and has a plurality of holes for the cleaning liquid to flow downward to absorb the static electricity of the plurality of semiconductors 7, and the conveyor belt 27 is made of polyacrylonitrile carbon fiber, a composite material of polypropylene and stainless steel fiber, and a composite material of polypropylene and carbon black conductivity, and the conveyor belt 27 is made of non-metallic material, which can effectively prevent the conveyor belt 27 from scratching the surface of the plurality of semiconductors 7.

[0034] The housing 3 is disposed on the top of the machine 1 and has a gate device 31 respectively disposed on the input side and the output side of the cleaning area 23 and having a blocking door 311 .

[0035] The pressing device 4 is disposed in the housing 3 and above the transmission device 2. The pressing device 4 is disposed in an area extending from the conveying area 22 to the dewatering area 24 and has a plurality of transmission wheels 41 driven by a power source.

[0036] The cleaning device 5 includes a plurality of nozzles 51 disposed in the cleaning area 23 . The plurality of nozzles 51 are connected to a pressure pump 52 through pipelines, and the pressure pump 52 is connected to a plurality of heaters 53 .

[0037] The dewatering and cooling device 6 includes an air knife assembly 61 disposed in the dewatering area 24 .

[0038] The above-mentioned pressing device 4 is preferably implemented as a plurality of transmission wheels 41, but in actual application, the pressing device 4 can also be a pressing plate, a pressing belt, etc. that can cooperate with the transmission device 2 to prevent the carried items from shifting, deflecting, tilting, etc. There are many types and types of such pressing devices 4, and their basic structures and movement modes are mostly different depending on the application scope. They can also be changed according to the actual application. The detailed structure is not the key point of the invention of this case. Only a simple description is given here for understanding.

[0039] Please refer to Figure 1 , Figure 3 , Figure 4 , Figure 5 As shown in the figure, there are a side cross-sectional view, a use state view (I), a use state view (II) and a structural view of the anti-static conveyor belt of the present invention. It can be clearly seen from the figure that when the present invention is used, the semiconductor 7 is first introduced from the feed area 21, and the semiconductor 7 is driven by the plurality of conveying wheels 26 to be sequentially conveyed from the feed area 21 to the discharge area 25. When the semiconductor 7 enters the conveying area 22, the upper and lower surfaces of the semiconductor 7 are abutted by the plurality of conveying wheels 26 of the transmission device 2 and the plurality of transmission wheels 41 of the pressing device 4, and continue to move toward the discharge area 25. When the semiconductor 7 enters the cleaning area 23, the gate device 31 drives the baffles 311 located at the input side and the output side of the cleaning area 23, so that the two baffles 311 are lowered to extend under the transmission device 2. At the same time, the pressure pump 52 of the cleaning device 5 will pressurize the cleaning liquid heated by the multiple heaters 53 and send it to the multiple nozzles 51, so that the multiple nozzles 51 can spray high-pressure cleaning liquid to clean the semiconductor 7. When the semiconductor 7 arrives at the output side of the cleaning area 23, the multiple conveying wheels 26 and a conveyor belt 27 of the transmission device 2 will rotate in the opposite direction so that the carried semiconductor 7 is driven and moved toward the feed area 21. However, the cleaning device 5 also continues to perform the cleaning action. When the semiconductor 7 arrives at the input side of the cleaning area 23, the multiple conveying wheels 26 and the conveyor belt 27 of the transmission device 2 will rotate in the opposite direction again, and move the semiconductor 7 toward the discharge area 25 again, so as to repeatedly clean the oil stains or dirt attached to the semiconductor 7.

[0040] If the semiconductor 7 has been cleaned, the semiconductor 7 will enter the dewatering area 24, and the air knife group 61 will spray the pressurized gas through the air pressurizing device (not shown) onto the surface of the semiconductor 7 to remove the cleaning liquid attached to the semiconductor 7 during the cleaning process and achieve the effect of cooling at the same time, and the semiconductor 7 will further enter the discharge area 25 to be collected. The static electricity generated by the air knife group 61 blowing the gas to the surface of the semiconductor 7 is immediately absorbed by the conveyor belt 27, and the plurality of conveyor wheels 26 arranged in the conveyor belt are made of metal. The plurality of conveyor wheels 26 contact the conveyor belt 27 and absorb the static electricity adsorbed by them. The plurality of conveyor wheels 26 that have absorbed the static electricity then conduct the static electricity to the machine 1, and the machine 1 then conducts the static electricity to the ground.

[0041] The transmission device 2 of the present invention can perform reciprocating conveying actions. When the semiconductor 7 carried by the transmission device 2 enters the cleaning area 23, it will be driven by the transmission device 2 to perform repeated cleaning actions, that is, there is no need to further add additional cleaning equipment to make the semiconductor 7 clean. In addition, since there is no need to add additional cleaning equipment, the production cost required for adding cleaning equipment can be avoided.

[0042] Furthermore, the present invention can repeatedly clean the semiconductor 7 in the cleaning area 23. Due to the repeated cleaning, the semiconductor 7 is not only cleaned in a single direction, but also in multiple directions, so that the cleaning angle of the semiconductor 7 can be even, and it is less likely that one side is not cleaned.

[0043] However, when the semiconductor 7 enters the cleaning area 23, the gate device 31 of the cover body 3 of the present invention will drive the baffle 311 to descend to the bottom of the transmission device 2 to stop at the two sides of the cleaning area 23. At the same time, the cleaning device 5 sprays the cleaning liquid at high pressure to clean the semiconductor 7. During the repeated cleaning process of the semiconductor 7, since there are baffles 311 on both sides of the cleaning area 23, the cleaning liquid sprayed by the cleaning device 5 will not spill into the conveying area 22 and the dewatering area 24, so that the conveying area 22 and the dewatering area 24 can be kept clean, and the use of cleaning liquid can be reduced.

[0044] Therefore, the present invention mainly provides an anti-static conveyor belt for use in a cleaning machine, comprising: a machine; a transmission device, which is arranged in the machine, and which sequentially comprises a feeding area, a conveying area, a cleaning area, a water removal area, a discharging area and a conveyor belt, the conveyor belt carries a plurality of semiconductors, and the conveyor belt is made of an anti-static material; a cover body is arranged on the top of the machine, and has a gate device located in the cleaning area, the gate device is arranged on an input side and an output side of the cleaning area, and the cleaning area The input side and the output side are both provided with a baffle that can extend under the transmission device; a pressing device is supported on the surface of one side of the plurality of semiconductors and is arranged in the cover body and above the transmission device, and the setting area of ​​the pressing device extends from the conveying area to the interval of the dewatering area; a cleaning device is used for spraying a cleaning liquid to clean the surfaces of the plurality of semiconductors and is arranged in the machine and located in the cleaning interval; a dewatering and cooling device is used to remove the cleaning liquid on the preset semiconductor and is arranged in the dewatering area of ​​the machine. With the aforementioned structure of the cleaning machine, the static electricity generated by the air knife group blowing gas to the surface of the plurality of semiconductors is absorbed by the conveyor belt at the first time, and the plurality of conveyor wheels arranged in the conveyor belt are made of metal. The plurality of conveyor wheels contact the conveyor belt and absorb the static electricity adsorbed by it. The plurality of conveyor wheels that have absorbed the static electricity then conduct the static electricity to the machine, and then the machine conducts the static electricity to the ground, so as to achieve the purpose of eliminating the static electricity damage generated by the semiconductor during the cleaning and air-drying process. Therefore, all structures and devices that can achieve the aforementioned effects should be covered by the present invention, and such simple modifications and equivalent structural changes should also be included in the patent scope of the present invention and are hereby stated.

Claims

1. An anti-static conveyor belt used for cleaning a machine, characterized in that: include: One machine; A transmission device is arranged in the machine, which includes a feeding area, a conveying area, a cleaning area, a water removal area, a discharging area and a conveyor belt in sequence, and the conveyor belt carries a plurality of semiconductors, and the conveyor belt is made of an antistatic material to absorb the static electricity of the plurality of semiconductors, and the transmission device performs reciprocating transmission; A cover body is arranged on the top of the machine; A cleaning device for spraying a cleaning liquid to clean the plurality of semiconductor surfaces, which is disposed in the machine and located in the cleaning area; as well as A dewatering and cooling device is used to remove the cleaning liquid on the preset semiconductor and is arranged in the dewatering area of ​​the machine; and the transmission device reciprocates in the cleaning area to repeatedly clean the semiconductor carried by the transmission device; The transmission device is further provided with a plurality of conveying wheels driven by a power source and used to carry the plurality of semiconductors, and the conveying belt is wrapped around the outside of the plurality of conveying wheels; A pressing device is supported on one side surface of the plurality of semiconductors and is disposed in the cover and above the transmission device. The setting area of ​​the pressing device extends from the transmission area to the dewatering area. The pressing device is further provided with a plurality of transmission wheels driven by a power source and used to press against one side surface of the plurality of semiconductors; The cleaning device is further provided with a plurality of nozzles disposed in the cleaning area and for spraying the cleaning liquid on the surfaces of the plurality of semiconductors, and the plurality of nozzles are connected to a pressure pump through pipelines for pressurizing the cleaning liquid and delivering it to the plurality of nozzles, and the pressure pump is connected to a plurality of heaters for heating the cleaning liquid; The dewatering and cooling device is further provided with an air knife group for removing the cleaning liquid attached to the plurality of semiconductors; The conveyor belt is made of polyacrylonitrile carbon fiber material, or a composite material of polypropylene and stainless steel fiber, or a composite material of polypropylene and carbon black conductive material; The static electricity generated by the air knife group blowing gas to the surface of the plurality of semiconductors is absorbed by the conveyor belt, and the plurality of conveyor wheels arranged in the conveyor belt are made of metal. The plurality of conveyor wheels contact the conveyor belt and absorb the static electricity adsorbed by them. The plurality of conveyor wheels that have absorbed the static electricity then conduct the static electricity to the machine, and the machine then conducts the static electricity to the ground; The cover has a gate device located in the cleaning area, the gate device is arranged at an input side and an output side of the cleaning area, and the input side and the output side of the cleaning area are both provided with a blocking door that can extend under the transmission device.

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