Method for processing an object and device for implementing the method

Abstract

The invention provides a method for treating an object (2), wherein the object (2) to be treated is conveyed through a tank (3) by means of a conveying device (5), a treatment solution (4) is introduced into the tank (3) by means of at least one feed device (9) provided with an upwardly directed outlet (13), and the treatment solution (4) in the form of a treatment solution stream (24) is ejected upwardly through the upwardly directed outlet (13), the object (2) is conveyed through the tank (3) above the upwardly directed outlet (13), and during the conveyance of the object (2) through the tank (3), a downwardly directed surface (23) of the object (2) is placed in contact with the treatment solution jet (24). The invention also relates to a treatment device (1) for carrying out such a method.

Description

[0001] The invention relates to a method for processing an object and to a processing device for carrying out such a method.

[0002] The treatment of surfaces of objects by means of treatment solutions is used in various technical fields. Thus, for example, wet chemical etching methods are used, inter alia, for the treatment of wafer surfaces in the solar cell industry.

[0003] The treatment of the surfaces of the objects can be realized, for example, in the form of an immersion treatment, where a certain number of objects are immersed in a bath filled with a treatment solution and remain there for a predetermined duration. This is the so-called batch treatment method.

[0004] Another possibility is to treat the objects by a so-called inline method. Here, the objects are transported through the tank on a transport device, and the treatment of the objects by the treatment solution takes place during the transport of the objects through the tank. In contrast to batch methods, in which the objects are usually treated on both sides, in an inline method, a single-sided treatment of the objects can be achieved in various ways.

[0005] In batch processes and in-line processes, the quality of the process result depends inter alia on the temperature and / or the chemical composition of the process solution in the region of the object to be processed. For example, if heat build-up and / or supersaturation of reaction products occurs at the object, this has a negative impact on the quality of the process result. In the case of etching processes, for example, a reduction in the etching rate can occur in this type of case.

[0006] One object of the invention is to improve the quality of the processing result when processing objects, in particular when processing objects on one side.

[0007] According to the invention, the object is achieved by a method according to claim 1 and a processing device according to claim 6 .

[0008] In the method for processing an object according to the invention:

[0009] - transporting the objects to be processed through a tank by means of a transport device;

[0010] - introducing the treatment solution into the tank via at least one feed device provided with an upwardly directed outlet and spraying the treatment solution upwardly therefrom by means of the upwardly directed outlet configured with a treatment solution nozzle;

[0011] - objects are conveyed through the pool over an upwardly directed outlet; and

[0012] During the transport of the objects through the bath, their downwardly directed surfaces come into contact with the jets of treatment solution.

[0013] The processing device according to the present invention comprises:

[0014] - a tank in which the treatment liquid can be placed;

[0015] a transport device, by means of which the objects to be processed can be conveyed through the tank in a transport direction;

[0016] at least one feed device, which is arranged in the tank and by which a treatment solution can be introduced into the tank;

[0017] The at least one feed device has an upwardly directed outlet for spraying the treatment solution upwardly.

[0018] By spraying the treatment solution upwards by means of at least one feed device configured with a treatment solution nozzle, it is possible to obtain fresh or unused treatment solution for treating the object at the object, while the object to be treated is conveyed above the at least one feed device as is customary in single-sided treatment methods. In this way, a build-up of heat and / or an oversaturation of reaction products in the region of the object to be treated can be avoided, in particular because the treatment solution introduced into the tank via the at least one feed device can carry away heat and / or remove reaction products.

[0019] In contrast, a build-up of heat and / or a supersaturation of reaction products in the region of the object to be treated cannot be avoided sufficiently effectively by means of a downward outlet through which the treatment solution is ejected towards the bottom of the tank.

[0020] The statement that an object is transported through a tank does not mean that the surface of the object must be completely below the level of the treatment solution placed in the tank, nor does it mean that the surface of the object must be completely below one edge of the tank. Thus, part of the upper surface of the object or the entire surface of the object may be located or transported above the tank edge or above the level of the treatment solution.

[0021] Furthermore, "spraying the treatment solution upward" does not necessarily mean spraying the treatment solution jet in a vertical direction. The treatment solution jet sprayed upward may be sprayed upward in a direction with a deviation relative to the vertical direction. The deviation is preferably at most 40°, particularly preferably at most 35°.

[0022] An "upward outlet" is understood to mean an outlet arranged such that a fluid, such as a treatment solution, can flow out upward through said outlet, possibly with a deviation within the above-mentioned range relative to the vertical direction.

[0023] The object to be processed may be, for example, a substrate, in particular a wafer for the solar cell and / or semiconductor industry.

[0024] The objects to be processed preferably have a predetermined width. It is particularly preferred that all objects to be processed have the same width. This enables an object processing that is advantageous in terms of complexity.

[0025] The width of an object is to be understood as its extent in the transport plane perpendicular to the transport direction. The term "transport plane" is to be understood as meaning the plane in which the object is transported by means of the transport device.

[0026] Advantageously, the objects are transported by means of the transport device in a horizontal transport direction.

[0027] Where the objects are transported through a tank, the tank is preferably filled with treatment solution up to or beyond the downwardly facing surface of the objects.

[0028] The treatment of the object may in particular be a one-sided treatment, in which case the downwardly facing surface of the object is treated with the treatment solution. In other words, the method for treating the object may be a method for one-sided treatment of the downwardly facing surface of the object. In the case of such a treatment, the downwardly facing surface of the object is preferably not in contact with the treatment solution, or at least not in contact in a specific manner.

[0029] In the case of a single-sided treatment, it is preferred that the transport device is arranged and constructed and the tank is filled with treatment solution in such a way that only the downwardly facing surface of the objects comes into contact with the treatment solution during transport.

[0030] Furthermore, the treatment of the object can be, for example, an etching treatment. In this case, the treatment solution is advantageously an etching solution. The treatment can be carried out in particular in such a way that in the case of this treatment, an etching of at least 3 μm, preferably at least 5 μm, particularly preferably at least 6 μm is achieved on the respective object.

[0031] In a preferred embodiment of the invention, the treatment of the object is performed by formation of a meniscus of the treatment solution on the downwardly facing surface of the object.

[0032] During the transport of the object through the tank, each point of the downwardly facing surface of the object is advantageously brought into contact with the flow of treatment solution in such a way that, after passing through the tank, each point of the downwardly facing surface of the object is treated by the flow of treatment solution for the same length of time and possibly the same number of times. As a result, a uniform treatment result is obtained on the downwardly facing surface of the object.

[0033] Preferably, the treatment solution flow is arranged in the treatment solution already contained in the tank. Here, the treatment solution flow advantageously causes the circulation of the treatment solution already contained in the tank.

[0034] In the process of passing through the treatment solution already contained in the tank, the treatment solution flow can expand in a conical shape. In this case, "the treatment solution is ejected upwardly by means of an upward outlet having a treatment flow structure" can be understood as the deviation angle of the cone axis of each ejected treatment solution flow relative to the vertical direction is preferably at most 40°, particularly preferably at most 35°.

[0035] In an advantageous design variant, at least one feed device is designed as a pipe-in-pipe system, which has an outer pipe and an inner pipe arranged in the outer pipe. In this design variant, the treatment solution is advantageously introduced into the outer pipe via a downward outlet of the inner pipe. In addition, the treatment solution flow is advantageously sprayed upward from the outer pipe into the tank.

[0036] The downward outlet of the inner tube allows the treatment solution rich in bubbles to collect in the upper part of the inner tube. From there, the treatment solution rich in bubbles can be discharged from the inner tube, for example, via a discharge line connected to the inner tube, or only the collected gas can be discharged in a predetermined manner. In this way, it is possible to achieve a situation where there are few or no bubbles in the treatment solution introduced from the inner tube into the outer tube. In particular, in the case of single-sided treatment of an object, this has the advantage that contamination of the upward surface of the object with the treatment solution, for example due to broken bubbles, can be avoided.

[0037] By combining the outlet openings pointing downwards in the case of the inner tube and the outlet openings pointing upwards in the case of the outer tube, a "labyrinth effect" can be achieved, which can improve the outflow behavior of the treatment solution from the at least one feed device. In particular, by introducing the treatment solution into the outer tube via the outlet openings pointing downwards of the inner tube and the ejection of the treatment solution stream from the outer tube, the outflow of the treatment solution from the at least one feed device can be made more uniform.

[0038] It is particularly preferred if the inner tube has only one outlet pointing downwards for introducing the treatment solution into the outer tube.

[0039] The at least one feed device is advantageously arranged below the transport apparatus. The at least one feed device is preferably oriented horizontally.

[0040] In an advantageous development of the invention, at least one feed device extends in the tank at least partially and preferably completely non-parallel to the conveying direction. In other words, it is advantageous that at least one portion of at least one feed device extends non-parallel to the conveying direction.

[0041] Furthermore, at least one conveying device at least partially has a straight extension, which is oblique to the conveying direction. In other words, at least a portion of the at least one feed device can have a straight extension oblique to the conveying direction. Preferably, the straight extension includes the entire length of the at least one feed device.

[0042] The conically expanding treatment solution flow can advantageously be formed via an upwardly directed outlet of at least one feed device.

[0043] In the case where the straight extension encompasses the entire length of the at least one feed device, it is advantageous if the straight extension is oriented at an angle α relative to the conveying direction, which angle α is at least approximately equal to α=arcsin((B-2R) / L), where L is the length of the at least one feed device, B is the width of the object to be treated, and R is the radius of the treatment solution flow at the height of the transport plane of the conveyor. In particular, such an orientation of the at least one feed device relative to the conveying direction makes it possible to achieve a situation in which, after the tank is provided, every point of the downwardly facing surface of the object has been treated by the treatment solution flow for the same length of time.

[0044] Here, "at least approximately" means that α may be exactly equal to arcsin((B-2R) / L) or may differ slightly from this value, for example by at most 10%, preferably at most 5%.

[0045] As an alternative, at least one feed device has a period or has jumps parallel to the conveying plane and perpendicular to the conveying direction. For example, at least one feed device can have a zigzag track. An "interrupted" embodiment of the feed device is also possible, in which the feed device comprises a plurality of parts which are specifically spaced apart from one another and arranged obliquely with respect to the conveying direction.

[0046] In an advantageous embodiment of the invention, the at least one feed device has a plurality of upwardly directed outlets which are arranged spaced apart from one another along the longitudinal extension of the at least one feed device.

[0047] As mentioned above, the at least one feed device can be configured as a pipe-in-pipe system. In this case, the outer pipe advantageously has an outlet facing upwards for spraying the treatment solution upwards. In this case, the inner pipe can have an outlet facing downwards through which the treatment solution can be introduced into the outer pipe.

[0048] The processing device advantageously comprises at least one spacing element, which is arranged between the inner tube and the outer tube. Such a spacing element is preferably used to keep the two tubes at a predetermined spacing from each other. In addition, it is advantageous to seal the gap between the inner tube and the outer tube by means of one or more sealing elements.

[0049] In the present case, a tube does not necessarily have to be understood as meaning a hollow body having a circular cross-sectional shape. The corresponding tube can have, for example, a polygonal, in particular triangular or rectangular, cross-sectional shape, or a round, in particular a perfect circle, an elliptical or oval cross-sectional shape. Furthermore, the inner tube and the outer tube do not necessarily have to have the same cross-sectional shape. For example, the inner tube can have a circular cross-sectional shape, while the outer tube can have a rectangular cross-sectional shape.

[0050] In particular, in the embodiment of the outer tube with a rectangular cross-sectional shape, the outer tube can be as wide as the object to be treated and can be oriented parallel to the conveying direction. In this case, the upward outlets of the outer tube can be distributed so that the downwardly directed surfaces of the objects are uniformly treated with the treatment solution by the treatment solution flow during operation of the device or when carrying out the method.

[0051] In addition to the upward outlet, the at least one feed device may have a downward and / or lateral outlet for ejecting the treatment solution downward and / or laterally. This enables a more uniform circulation of the treatment solution in the tank. In particular, in a refinement in which the at least one feed device has the form of a tube-in-tube system, the outer tube may have said downward and / or lateral outlet.

[0052] "Downward outlet" is to be understood as an outlet arranged in such a way that a fluid, such as a process liquid, can flow downward through the outlet, possibly with a deviation from the vertical direction. The deviation is preferably at most 40°, particularly preferably at most 35°.

[0053] "lateral outlet" is understood to mean an outlet arranged so that, for example, a fluid such as a treatment liquid can flow out laterally through the outlet, with a deviation relative to the horizontal direction. Here, the deviation is preferably at most 40 °, particularly preferably at most 35 °.

[0054] In an advantageous embodiment, at least one feed device has a plurality of upwardly directed outlets which are adjacent to one another and arranged obliquely or vertically with respect to the conveying direction in order to eject the treatment solution upwards. In this way, the treatment solution is sprayed into the tank in a spatially more extended manner and thus a more uniform circulation of the treatment solution in the tank can be achieved. In particular, in a refinement in which at least one feed device has the form of a tube-in-tube system, the outer tube can have said outlets which are adjacent to one another and arranged obliquely or vertically with respect to the conveying direction.

[0055] In a preferred manner, the conveying device has a plurality of conveying rollers, which are arranged in sequence along the conveying direction. In addition, preferably, at least one feeding device is arranged below the conveying rollers of the conveying device.

[0056] Advantageously, the upward outlet of the at least one feed device is advantageously arranged at the location of the conveyor roller relative to the conveying direction. That is, when viewed from above, the outlet of the at least one feed device is shielded by the conveyor roller. This makes it possible to achieve a situation in which the conveyor roller is at least partially flowed through by the process solution flow, thereby achieving a better circulation of the process solution in the region of the conveyor roller.

[0057] In particular, the conveying rollers of the conveying device can be arranged in such a way that their highest point is each arranged at the height of the pool edge.

[0058] The treatment plant advantageously has a supply device for introducing the treatment solution into the at least one feed device. The supply device may in particular comprise a supply line connected to the at least one feed device. In particular, in a refinement in which the at least one feed device has the form of a pipe-in-pipe system, an inner pipe may be connected to the supply line.

[0059] In a preferred development of the invention, the treatment device has a degassing device for removing gas bubbles and / or a treatment solution rich in bubbles from at least one feed device. The degassing device can in particular have a discharge line connected to the at least one feed device. In particular, in a development in which the at least one feed device has the form of a pipe-in-pipe system, the inner pipe can be connected to the discharge line.

[0060] When implementing the method, the treatment solution rich in bubbles or, in a targeted manner, only the collected gas can be discharged from the at least one feed device via a degassing device. If the treatment solution rich in bubbles is discharged from the at least one feed device, the treatment solution can be introduced again into the at least one feed device after the bubbles have been removed from the treatment solution rich in bubbles.

[0061] Advantageously, the processing device is arranged to convey the objects to be processed in a plurality of lanes adjacent to one another along the conveying direction. As a result, a high throughput can be achieved with the processing device. The processing device can be configured, for example, in such a way that it can achieve a throughput of at least 500 objects per lane per hour, preferably at least 700 objects per lane per hour, particularly preferably at least 900 objects per lane per hour. For example, the processing device can be arranged to convey the objects to be processed in five lanes adjacent to one another along the conveying direction and achieve a throughput of 1000 objects per lane per hour.

[0062] The at least one feed device may be one of a plurality of feed devices, in particular of identical construction. In addition, the processing plant may be provided with a dedicated feed device for each track.

[0063] Each feed device is advantageously connected to the above-mentioned discharge line of the degassing device. Furthermore, advantageously, each feed device is connected to the above-mentioned supply line of the supply device.

[0064] In the following, the invention will be described in more detail with reference to the accompanying drawings. Here, where appropriate, identical or functionally identical elements have the same reference numerals. The invention is not limited to the embodiments shown in the drawings, not even to the embodiments shown in relation to the functional features. The preceding description and the following description of the drawings contain many features, which are partly combined in a variety of ways in the dependent claims. However, the person skilled in the art will also consider the features individually and combine them to form further suitable combinations. In particular, the features can be combined with the method according to the invention and / or the processing device according to the invention, respectively, individually and in any desired suitable combination.

[0065] In the attached picture:

[0066] Figure 1 An exemplary embodiment of a processing device according to the invention for carrying out the method according to the invention is shown in plan view,

[0067] Figure 2 Shown along Figure 1 AA section of the processing equipment in

[0068] Figure 3 A plan view showing a feed device of a processing plant,

[0069] Figure 4 Shows Figure 3 A side view of the feeding device,

[0070] Figure 5 Shows Figure 4 BB section (longitudinal section) of the feeding device,

[0071] Figure 6 Shows Figure 4 The CC section (cross section) of the feeding device, and

[0072] Figure 7 Shows Figure 5 Enlarged detail of the cross-sectional view (detailed longitudinal section).

[0073] Figure 1 An exemplary embodiment of a processing device 1 according to the invention for single-sided processing of an object 2 is shown in a top view.

[0074] Object 2 to be processed (see Figure 2 ) can be, for example, a substrate, in particular a wafer for solar cells and / or the semiconductor industry, for the sake of clarity, in Figure 1 The object 2 is not shown.

[0075] The processing device 1 comprises a tank 3 for containing a processing solution 4, such as an etching solution (see Figure 2 Furthermore, the treatment device 1 comprises a conveying device 5 , by means of which the objects 2 to be treated can be conveyed along a horizontal conveying direction 6 through the tank 3 .

[0076] Furthermore, the processing device 1 is configured to transport the objects 2 to be processed by means of a transport device 5 in a transport direction 6 on a plurality of lanes 7 adjacent to one another. Figure 1 In FIG. 7 , the dotted lines indicate the lateral edges of the individual tracks 7 .

[0077] from Figure 1 As can be seen in FIG, the conveying device 5 comprises a plurality of conveying rollers 8 which are arranged one behind the other along the conveying direction 6 and which convey the objects 2. The conveying rollers 8 are oriented perpendicularly to the conveying direction 6 and are preferably arranged equidistantly from one another.

[0078] Furthermore, the treatment device 1 comprises a plurality of feed devices 9, by means of which the treatment solution 4 can be introduced into the tank 3. The feed devices 9 are arranged below the conveyor rollers 8. Furthermore, the feed devices 9 are preferably arranged at the same height, parallel to each other, and equidistant from each other. Each lane 7 of the treatment device 1 has a dedicated feed device 9 for this lane 7. Since in the present exemplary embodiment the treatment device 1 is arranged to convey the objects 2 to be treated in five lanes 7 adjacent to each other by means of the conveyor device 5, the treatment device 1 has five feed devices 9 accordingly.

[0079] Each feed device 9 has a straight extension 10 which extends over the entire length L of the respective feed device 9 (see Figures 3 to 5 ) and is oriented crosswise to the conveying direction 6. In addition, each feed device 9 is constructed in the form of a tube-in-tube system, having an outer tube 11 and an inner tube 12 arranged in the outer tube 11 (see Figures 5 to 7 ).

[0080] The outer tube 11 of each feed device 9 has a plurality of upward outlets 13 for spraying the treatment solution 4 upwards (see in particular Figure 3 , 4 , 6 and 7). The outlets 13 are arranged at the positions of the conveying rollers 8 along the conveying direction 6, and each outer tube 11 has a plurality of outlets 13 arranged adjacent to each other and facing upward on each conveying roller 8. Since the conveying rollers 8 are arranged above the feeding device 9, the outlets 13 of each outer tube 11 are arranged at the positions of the conveying rollers 8 along the conveying direction 6. Figure 1 The inner tube 12 of each feed device 9 has a plurality of outlets 14 facing downwards for introducing the treatment solution 4 into the associated outer tube 11 (see Figure 7 ).

[0081] Furthermore, the treatment device 1 comprises a supply device 15 for introducing the treatment solution 4 into the inner tube 12 of each feed device 9. The supply device 15 comprises a supply line 16, to which each feed device 9 (more precisely, the inner tube 12 of each feed device 9) is connected via a connector unit 17 (see Figure 2 ).

[0082] Furthermore, the treatment device 1 comprises a degassing device 18 for removing gas bubbles and / or a treatment solution rich in gas bubbles from the feed device 9. The degassing device 18 has a discharge line 19 to which the respective feed device 9 (more precisely the inner tube 12 of the respective feed device 9) is connected via a connector unit 20 (see Figure 2 ).

[0083] Figure 2 Shows Figure 1 Section AA of the processing device 1.

[0084] from Figure 2 It can be seen that the conveying rollers 8 of the conveying device 5 are arranged at the same height. In the present exemplary embodiment, the conveying rollers 8 are arranged so that their highest points are at the height of the pool edge 21 of the pool 3. That is, the conveying plane 22 in which the objects 2 are conveyed by means of the conveying device 5 is located at the height of the pool edge 21. This achieves a situation in which the objects 2 conveyed on the conveying rollers 8 come into contact with the treatment solution 4 filling the pool 3 up to the pool edge 21 only on their downwardly facing surfaces 23.

[0085] The treatment of the objects 2 by means of the treatment solution 4 takes place during the transport of the objects 2 through the tank 3. In the case of this treatment, the objects 2 come into contact with the treatment solution 4 on their downwardly facing surface 23.

[0086] The treatment solution 4 is introduced into the inner tube 12 of the feed device 9 via the supply line 16 of the supply device 15. The treatment solution 4 is introduced from the inner tube 12 of the respective feed device 9 via its downwardly directed outlet 14. The treatment solution 4 is in turn ejected upwardly from the outer tube 11 of the respective feed device 9 via its upwardly directed outlet 13, which has the configuration of a treatment solution jet 24, some of which are Figure 2 It is schematically shown in FIG.

[0087] The treatment solution jet 24 is formed in the treatment solution 4 already contained in the tank 3 and comes into contact with the object to be treated 2. During the passage through the treatment solution 4 already contained in the tank 3, the treatment solution jet 24 widens in a conical shape.

[0088] As mentioned above, each feed device 9 is oriented obliquely to the conveying direction 6. For the angle α that each feed device 9 makes with the conveying direction 6, it is at least approximately α=arcsin((B-2R) / L), where L is the length of the corresponding feed device 9, B is the width of the object 2 to be treated, and R is the radius of the treatment solution flow 24 at the height of the conveying plane. In particular, such an orientation of the feed devices 9 relative to the conveying direction 6 makes it possible to achieve a situation in which, during the conveyance of the object 2 through the tank 3, every point of the downwardly facing surface 23 of the object 2 comes into contact with the treatment solution flow 24, so that after passing through the tank 3, every point of the downwardly facing surface 23 of the object 2 has been treated by the treatment solution flow 24 for the same amount of time.

[0089] The bubbles contained in the treatment solution 4 fed into the inner tubes 12 of the feed device 9 are gathered in the upper part of each inner tube 12. The treatment solution rich in bubbles or only the collected gas can be discharged via the discharge line 19 of the degassing device 18, which is connected to the inner tubes 12 of the feed device 9. The treatment solution 4 with only a few bubbles or no bubbles is discharged into the connected outer tube 11 through the downward outlet of each inner tube 12, with the result that only the treatment solution 4 with few bubbles or no bubbles is ejected upward from the outer tube 11. In this way, the bubbles entering the treatment solution 4 located in the tank 3 are avoided or at least reduced.

[0090] Figure 3 By way of example, a plan view of one of the feed devices 9 of the processing plant 1 is shown. Since the feed devices 9 of the processing plant 1 are identical in structure to each other, the following description is also applicable to the other feed devices 9 of the processing plant 1.

[0091] exist Figure 3 In the figure, the feed device 9 and more precisely the upward outlet 13 of its outer tube 11 can be seen (see Figure 5 ).from Figure 3 It can be seen that the upward outlet openings 13 of the feed device 9 are distributed along the longitudinal extension direction 25 of the feed device 9 over substantially the entire length L of the feed device 9 .

[0092] also, Figure 3 Two connector units 17, 20 are shown, by means of which the feed device 9 in the processing device 1 is connected to the discharge line 19 of the degassing device 18 and the supply line 16 of the supply device 15, respectively. Figure 3 In the figure, the connector unit 20 of the feeding device 9 connecting the discharge pipeline 19 of the degassing device 18 is arranged at the right end of the feeding device 9, and the connector unit 17 of the feeding device 9 connecting the feeding device 9 to the supply pipeline 16 of the supply device 15 is arranged at the left end of the feeding device 9.

[0093] Figure 4 Shows Figure 3 A side view of the feeding device 9. In addition, Figure 4 Also shown are two of the connector units 17, 20.

[0094] In addition, Figure 4 It is shown in Figures 5 to 7 The cross-sectional view concerns two cross-sections (cross-sections BB and CC).

[0095] Figure 5 Shown through Figure 3 The feed device 9 and the section BB through the connector units 17 , 20 arranged on the feed device 9 .

[0096] exist Figure 5 In addition to the outer tube 11 of the feeding device 9 (in Figure 3 and Figure 4 In addition to the inner tube 12 shown in FIG. 1 , its inner tube 12 is also visible.

[0097] Figure 6 Shown by Figure 3 Section CC of the feeding device 9.

[0098] Figure 6 The outer tube 11 and the inner tube 12 of the feed device 9 are shown in cross section. At the 1 o'clock position, one of the upward outlets 13 of the outer tube 11 can be seen. Figure 6 A spacing element 26 can be seen, which is arranged between the inner tube 12 and the outer tube 11 and which holds the two tubes 11 , 12 of the feed device 9 at a predetermined spacing from one another.

[0099] Figure 7 Shows Figure 5 Magnified detail of the cross-sectional view.

[0100] Figure 7 A portion of an inner tube 12 and a portion of an outer tube 11 of a feed device 9 are shown, wherein a plurality of downwardly directed outlets 14 of the inner tube 12 and some upwardly directed outlets 13 of the outer tube are visible.

[0101] The treatment solution 4 is introduced into the outer tube 11, more precisely, into the gap between the inner tube 12 and the outer tube 11, through the downward outlet 14 of the inner tube 12, and the bubbles are separated. The bubbles gather in the upper part of the inner tube 11. Therefore, the treatment solution 4 with few or no bubbles flows to the upward outlet 13.

[0102] The present invention has been described in detail above based on the illustrated embodiments. However, the present invention is not limited to the disclosed examples. A person skilled in the art may derive other variations from the exemplary embodiments without departing from the concepts underlying the present invention.

[0103] Reference numerals list:

[0104] 1. Processing equipment

[0105] 2 Objects

[0106] 3 Pool

[0107] 4. Treatment Solution

[0108] 5. Conveying equipment

[0109] 6 Conveying direction

[0110] 7

[0111] 8 Conveyor rollers

[0112] 9 Feeding device

[0113] 10 straight extension

[0114] 11 External tube

[0115] 12 Inner tube

[0116] 13 Exit facing upwards

[0117] 14 Downward Exit

[0118] 15 Supply equipment

[0119] 16 Supply lines

[0120] 17 Connector unit

[0121] 18 Degassing device

[0122] 19 Discharge line

[0123] 20 Connector units

[0124] 21 Pool Edge

[0125] 22 Conveyor plane

[0126] 23 Downward facing surface

[0127] 24 Process solution flow

[0128] 25 Longitudinal extension direction

[0129] 26 Spacer element

[0130] L Length

Claims

1. A method for processing an object (2), wherein: - conveying the objects to be treated (2) through the tank (3) by means of a conveying device (5); - the treatment solution (4) is introduced into the tank (3) by means of at least one feed device (9) provided with an upwardly directed outlet (13), and the treatment solution (4) in the form of a treatment solution stream (24) is ejected upwardly through the upwardly directed outlet (13); - the objects (2) are conveyed through the tank (3) above the upward outlet (13), and - during the transport of the object (2) through the tank (3), bringing the downwardly facing surface (23) of the object (2) into contact with the jet (24) of treatment solution, Features: The at least one feed device (9) is constructed as a pipe-in-pipe system, comprising an outer pipe (11) and an inner pipe (12) arranged in the outer pipe (11), the treatment solution (4) being introduced into the outer pipe (11) through a downward outlet (14) of the inner pipe (12), the treatment solution flow (24) being sprayed upward from the outer pipe (11) into the tank (3), wherein the collected gas is discharged from the inner pipe (12) via a discharge line (19) connected to the inner pipe (12).

2. The method according to claim 1, characterized in that: The treatment is a single-sided treatment, wherein the downwardly facing surface (23) of the object (2) is treated with the treatment solution (4).

3. The method according to claim 1, characterized in that: During the transport of the object (2) through the tank (3), every point of the downwardly facing surface (23) of the object (2) is brought into contact with the flow of treatment solution (24) in such a way that every point of the downwardly facing surface (23) of the object (2) has been treated by the flow of treatment solution (24) for the same length of time after passing through the tank (3).

4. The method according to claim 1, characterized in that: The treatment solution flow (24) is constructed in the treatment solution (4) already contained in the tank (3).

5. A processing device (1) for performing the method according to any one of the preceding claims, comprising: - a tank (3) for holding a treatment solution (4); - a conveying device (5) for conveying the objects (2) to be treated through the tank (3) in a conveying direction (6); at least one feed device (9) arranged in the tank (3) and through which the treatment solution (4) is introduced into the tank (3); the at least one feed device (9) has an upwardly directed outlet (13) for spraying the treatment solution (4) upwardly, Features: At least one feed device (9) is constructed as a pipe-in-pipe system, which has an outer pipe (11) and an inner pipe (12) arranged in the outer pipe (11), the outer pipe (11) having an upward outlet (13) for spraying the treatment solution (4) upward, and the inner pipe (12) having a downward outlet (14) through which the treatment solution (4) is introduced into the outer pipe (12), and a discharge line (19) connected to the inner pipe (12) is provided, and the collected gas from the inner pipe (12) is discharged through the discharge line (19).

6. The processing device (1) according to claim 5, characterized in that: At least one feed device (9) extends at least partially in the tank (3) in a non-parallel manner to the conveying direction (6).

7. The processing device (1) according to claim 6, characterized in that: The at least one feed device (9) extends completely in the tank (3) in a non-parallel manner to the conveying direction (6).

8. The processing device (1) according to claim 5, characterized in that: The at least one feed device (9) at least partially has a straight extension (10) which is oblique with respect to the conveying direction (6).

9. The processing device (1) according to claim 8, characterized in that: The straight extension (10) extends over the entire length (L) of at least one feed device (9) and, by means of an upward outlet (13) of at least one feed device (9), a conically widening treatment solution flow (24) is constructed, wherein the straight extension (10) of at least one feed device (9) forms an angle α with respect to the conveying direction (6), which angle α is at least approximately equal to α=arcsin((B-2R) / L), wherein L is the length of at least one feed device (9), B is the width of the object (2) to be treated, and R is the radius of the treatment solution flow (24) at the height of the conveying plane (22) of the conveying device (5).

10. The processing device (1) according to claim 5, characterized in that: At least one feed device (9) has a plurality of upwardly directed outlets (13) which are arranged spaced apart from one another along a longitudinal extension direction (25) of the at least one feed device (9).

11. The processing device (1) according to claim 5, characterized in that: At least one feed device has a plurality of upwardly directed outlets (13) which are arranged adjacent to one another and obliquely or perpendicularly to the conveying direction (6) for spraying the treatment solution (4) upwardly.

12. The processing device (1) according to claim 5, characterized in that: The conveying device (5) has a plurality of conveying rollers (8) arranged in sequence along a conveying direction (6), at least one feeding device (9) is arranged below the conveying rollers (8), and an upward outlet (13) of at least one feeding device (9) is arranged at the position of the conveying rollers (8) in the conveying direction (6).

13. The processing device (1) according to claim 5, characterized in that: A degassing device (18) for removing gas bubbles and / or gas-foam-rich treatment solution (4) from at least one feed device (9), the degassing device (18) having a discharge line (19) connected to the at least one feed device (9).

14. The processing device (1) according to claim 5, characterized in that: The processing device (1) is arranged to convey the objects (2) to be processed on a plurality of lanes (7) adjacent to each other along a conveying direction (6), and the at least one feeding device (9) is one of a plurality of feeding devices (9), and each lane (7) of the processing device (1) has a dedicated feeding device (9).

15. The processing device (1) according to claim 14, characterized in that: The multiple feeding devices are multiple feeding devices with the same structure.

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