Chip detection and sorting machine and detection method thereof

Abstract

The present invention relates to a chip detection sorting machine and a detection method thereof. A chip detection sorting machine comprises a substrate; a material taking mechanism, a feeding mechanism, a testing mechanism, a pre-positioning mechanism, a discharging mechanism and an NG mechanism are arranged on the substrate; a material tray enters from the feeding mechanism, is taken out by the material taking mechanism and placed in the pre-positioning mechanism, is then taken in for detection by the testing mechanism, is then taken out by the testing mechanism and placed in the pre-positioning mechanism, is then taken out by the material taking mechanism, and is respectively placed in the discharging mechanism and the NG mechanism to complete the cycle. The present invention reasonably improves the processing capacity of the sorting machine.

Description

Technical Field

[0001] The present invention relates to the technical field of chip detection devices, and in particular to a chip detection and sorting machine and a detection method thereof. Background Art

[0002] As the Internet, electronic communications and various electronic consumer products occupy every corner of people's lives, the semiconductor industry, which lays the foundation for all of this, has undoubtedly become a top priority in the country's scientific and technological development. After the semiconductor devices used in large quantities in these microelectronics industries are manufactured, they need to be tested and sorted.

[0003] At present, the functions of existing testing and sorting machines in China are relatively simple. Some machines can only realize testing or packaging, and their operating speed is relatively slow. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention discloses a chip detection and sorting machine and a detection method thereof.

[0005] The technical solution adopted by the present invention is as follows:

[0006] A chip detection and sorting machine comprises a substrate; a material taking mechanism, a material feeding mechanism, a testing mechanism and a pre-positioning mechanism are arranged on the substrate;

[0007] The material taking mechanism comprises a first electric cylinder; the first electric cylinder is fixed on the first module mounting plate; both sides of the first module mounting plate are respectively arranged on support columns; the first electric cylinder comprises a first ball screw; the nut of the first ball screw is connected to the suction nozzle tooling;

[0008] The feeding mechanism comprises a tray clamping mechanism; the tray clamping mechanism comprises a tray; the material taking suction nozzle is located above the tray; clamping jaws are arranged on both sides of the tray; the clamping jaws are connected to the piston rod of the fourth cylinder; the bottom of the tray abuts against the top head; the top head is connected to the piston rod of the fifth cylinder; the cylinder body of the fourth cylinder is mounted on the clamping jaw base plate; the clamping jaw base plate is fixed on the nut mounting block; the nut mounting block is connected to the nut of the third ball screw; one end of the third ball screw is connected to the first driving module, and the first driving module drives the third ball screw to rotate;

[0009] The testing mechanism comprises a testing seat; the testing seat comprises a chip testing board; an adjustable light source light box is arranged above the testing seat;

[0010] The pre-positioning mechanism includes a positioning plate and a fourth electric cylinder; the positioning plate is provided with a plurality of chip positioning grooves; the chip test board and the positioning plate are on the same horizontal plane; a vibration motor is installed at the bottom of the positioning plate; the positioning plate is fixed on the slide plate through a supporting component; the slide plate is fixed on the first slider; the fourth electric cylinder includes a fifth ball screw; the nut of the fifth ball screw is connected to the first slider, and the straight line where the length of the third ball screw is located and the straight line where the length of the fifth ball screw is located are perpendicular to each other.

[0011] Its further technical features are: the suction nozzle tooling includes a first lifting mechanism; the first lifting mechanism includes a first guide rail mounting plate; the back of the first guide rail mounting plate is connected to the nut of the first ball screw; a group of linear guides are installed on the front of the first guide rail mounting plate; the linear guide is engaged with a slider; a linear module is installed between the group of linear guides; the first lifting mechanism also includes a slider mounting plate; the slider mounting plate is fixed on the slider; the linear module and the slider mounting plate are mechanically connected; a suction nozzle clamp is fixed on the slider mounting plate; a plurality of split suction nozzle modules are installed on the suction nozzle clamp; the split suction nozzle module includes a first suction nozzle, a guide ventilation shaft and a first air joint which are interconnected; one end of the guide ventilation shaft is connected to the first suction nozzle, and the other end of the guide ventilation shaft is connected to the first air joint.

[0012] Its further technical features are: the first drive module includes a second servo motor, a second synchronous belt, a third synchronous pulley and a fourth synchronous pulley; the output shaft of the second servo motor passes through the fourth synchronous pulley, and the second synchronous belt is tensioned on the third synchronous pulley and the fourth synchronous pulley; the third synchronous pulley is sleeved on the third ball screw.

[0013] Its further technical features are: the feeding mechanism also includes a feeding guide rail; the feeding guide rail includes a group of first guide rails parallel to each other; at least one group of tray limiting components is arranged on the first guide rails; at least one group of second lifting mechanism is arranged between a group of the first guide rails; the second lifting mechanism includes a second driving module and a second ball screw; the nut of the second ball screw is connected to the nut lifting plate; the nut lifting plate is connected to the tray plate through the first guide shaft; the tray clamping mechanism is arranged between a group of the tray plates; the tray plate can support the tray.

[0014] Its further technical features are: the second drive module includes a first servo motor, a first synchronous pulley, a first synchronous belt and a second synchronous pulley; the output shaft of the first servo motor passes through the second synchronous pulley, and the first synchronous belt is tensioned on the first synchronous pulley and the second synchronous pulley; the first synchronous wheel is sleeved on the second ball screw.

[0015] Its further technical feature is that the tray limiting assembly includes a group of guide groove fixing blocks and a group of limiting guide plates; the group of guide groove fixing blocks and the group of limiting guide plates respectively position the four corners of the tray.

[0016] Its further technical feature is that a third cylinder is arranged on one side of the limiting guide plate; and a piston rod of the third cylinder can pass through the bottom of the limiting guide plate.

[0017] Its further technical features are: a second cylinder is also installed on the first guide rail; the piston rod of the second cylinder is connected to the material tray stopper; and the end cover of the second cylinder is fixed on the stopper guide block.

[0018] Its further technical features are: the testing mechanism also includes a third electric cylinder; the third electric cylinder includes a fourth ball screw; the nut of the fourth ball screw is connected to the test upper fixed plate; the test upper fixed plate and the suction nozzle mounting plate are connected through a second guide shaft; the suction nozzle mounting plate is provided with a plurality of second suction nozzles; the test seat also includes a group of support plates; the group of support plates supports the chip testing board; a heat insulation plate and a mounting plate are arranged between the support plates and the chip testing board.

[0019] A detection method for the chip detection and sorting machine described above comprises the following steps:

[0020] Step S1: feeding; the material tray enters from the feeding mechanism; Step S2: taking the material and pre-positioning; taking it out through the taking mechanism and placing it in the pre-positioning mechanism; Step S3: testing; taking it in for testing by the testing mechanism; Step S4: pre-positioning and discharging; then taking it out by the testing mechanism and putting it into the pre-positioning mechanism; then taking it out by the taking mechanism and placing it in the discharging mechanism and NG mechanism respectively to complete the cycle.

[0021] The beneficial effects of the present invention are as follows:

[0022] 1. The positioning accuracy of the present invention is sufficient, so that the chip can be accurately placed in the tray to avoid chip damage. At the same time, the servo motor is used to drive the ball screw to move, which can achieve an extremely high operating speed.

[0023] 2. The present invention uses a pre-positioning mechanism to pre-correct the chip state in the chip detection slot before chip detection, which can facilitate the testing mechanism to accurately detect the chip and improve the accuracy of equipment detection.

[0024] 3. The present invention can significantly improve the detection and sorting efficiency, thus filling the market gap of high-efficiency ultra-small semiconductor device testing and sorting machines. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a top view of Example 1 of the present invention.

[0026] Figure 2 It is a front view of embodiment 1 of the present invention.

[0027] Figure 3 It is a side view of embodiment 1 of the present invention.

[0028] Figure 4 It is a structural diagram of the material taking mechanism.

[0029] Figure 5 This is the main view of the material taking mechanism.

[0030] Figure 6 It is a schematic diagram of the structure of the material taking suction nozzle.

[0031] Figure 7 This is a top view of the material taking nozzle.

[0032] Figure 8 This is a cross-sectional view of the material taking nozzle.

[0033] Fig. 9 It is a schematic diagram of the structure of the feed guide rail.

[0034] Fig.10 This is a cross-sectional view of the feed guide rail.

[0035] Fig.11 It is a structural schematic diagram of the tray clamping mechanism.

[0036] Fig.12 It is a cross-sectional view of the tray clamping mechanism.

[0037] Fig.13 It is a top view of the tray clamping mechanism.

[0038] Fig.14 This is the main view of the test organization.

[0039] Fig.15 A side view of the test structure.

[0040] Fig.16 This is a schematic diagram of the structure of the test socket.

[0041] Fig.17 for Fig.16 Schematic diagram of the structure at B in the figure.

[0042] Fig.18 It is a structural schematic diagram of the pre-positioning mechanism.

[0043] Fig.19 It is a side view of the pre-positioning mechanism.

[0044] Fig. 20 It is a top view of the pre-positioning mechanism.

[0045] Fig.21 for Fig. 20 Schematic diagram of the structure at A in the middle.

[0046] Fig. 22 It is a top view of embodiment 2 of the present invention.

[0047] Fig.23 It is a front view of embodiment 2 of the present invention.

[0048] Fig.24 It is a side view of embodiment 2 of the present invention.

[0049] Fig.25 This is a schematic diagram of the structure of Example 2 of the present invention.

[0050] In the figure: 100, substrate; 200, material taking mechanism; 201, support column; 202, first electric cylinder; 203, first module mounting plate; 204, first reinforcing rib; 205, material taking shaft main board; 206, first support; 207, second reinforcing rib; 208, material taking suction nozzle; 209, suction nozzle; 210, guide vent shaft; 211, first linear bearing; 212, suction nozzle clamping plate; 213, suction nozzle clamping block; 214, first air joint; 215, first cylinder mounting plate; 216, first cylinder; 217, first solenoid valve group; 218, first guide rail mounting plate; 219, terminal mounting plate; 220, terminal block column; 221, terminal block; 222, second air joint; 223, air pipe adapter; 224, stop 225, adjusting block; 226, reference block; 227, limiting plate; 228, slider mounting plate; 300, feeding mechanism; 301, guide groove fixing block; 302, material tray blocking block; 303, second cylinder; 304, blocking block guide block; 305, first guide rail; 306, limiting guide plate; 307, third cylinder; 308, guide rail base plate; 309, second linear bearing; 310, first guide shaft; 311, shaft fixing seat; 312, nut lifting plate; 313, second ball screw; 314, first servo motor; 315, tray plate; 316, first mounting base plate; 317, blocking piece; 318, buffer pad; 319, first screw fixing seat; 320, first synchronous pulley; 321, first synchronous step belt; 322, first motor support plate; 323, first motor mounting plate; 324, second synchronous belt pulley; 325, first material tray; 326, first clamping jaw; 327, first screw rod support seat; 328, second guide rail; 329, nut slider connecting plate; 330, nut mounting block; 331, clamping jaw base plate; 332, third ball screw; 333, second motor mounting plate; 334, second servo motor; 335, second synchronous belt; 336, third synchronous belt pulley; 337, fourth synchronous belt pulley; 338, second screw rod fixing seat; 339, limit pad; 340, first screw rod support; 341, sensor bracket; 342, first proximity switch; 343, top; 344, fourth cylinder; 345, first air cylinder Cylinder connecting plate; 346, protective cover; 347, first linear bearing mounting plate; 348, first guide shaft; 349, second linear bearing; 350, second nut; 351, fifth cylinder; 400, test mechanism; 401, test top plate; 402, pressure reducing valve; 403, support column; 404, test upper fixing plate; 405, first axis support; 406, second linear bearing; 407, nozzle mounting plate; 408, second guide shaft; 409, light box heat insulation board; 410, adjustable light source light box; 411, test seat; 4111, chip test board; 4112, heat insulation board; 4113, mounting plate; 4114, support plate; 4115, test slot; 420, second axis support; 421, third guide shaft;500, pre-positioning mechanism; 501, positioning groove; 502, positioning plate; 503, vertical plate; 504, slide plate; 505, third electric cylinder; 506, first slide block; 507, vibration motor; 600, discharging mechanism; 700, NG mechanism. ; DETAILED DESCRIPTION

[0051] The above and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of the embodiments with reference to the accompanying drawings. The directional terms mentioned in the following embodiments, such as up, down, left, right, front or back, etc., are only reference directions of the accompanying drawings. Therefore, the directional terms used are used to illustrate and not to limit the present invention. In addition, in all embodiments, the same reference numerals represent the same elements.

[0052] The specific implementation of this embodiment is described below in conjunction with the accompanying drawings.

[0053] Embodiment 1:

[0054] Figure 1 is a top view of embodiment 1 of the present invention, Figure 2 This is a front view of Embodiment 1 of the present invention, Figure 3 FIG. 1 is a side view of Embodiment 1 of the present invention. Figure 1 to Figure 3 A chip inspection and sorting machine includes a substrate 100. The substrate 100 is provided with a set of material taking mechanisms 200, a set of material feeding mechanisms 300, a set of testing mechanisms 400, a set of pre-positioning mechanisms 500, a set of material discharging mechanisms 600 and a set of NG mechanisms 700.

[0055] Figure 4 It is the structural diagram of the material taking mechanism. Figure 5 This is the main view of the material taking mechanism. Figure 4 and Figure 5 The material picking mechanism 200 includes a first electric cylinder 202. The first electric cylinder 202 is fixed on the first module mounting plate 203. Both sides of the first module mounting plate 203 are respectively arranged on the support column 201. In this embodiment, one side of the first module mounting plate 203 is fixed on the support column 201, and the other side of the first module mounting plate 203 is fixed on the first support 206, and a first reinforcing rib 204 is arranged at the support column 201, and a second reinforcing rib 207 is arranged at the first support 206 to improve the strength of the support column 201 and the first support 206. The first electric cylinder 202 includes a first ball screw. The nut of the first ball screw is connected to the suction nozzle tooling 208.

[0056] Figure 6 This is the structural diagram of the material taking nozzle. Figure 7 This is a top view of the material taking nozzle. Figure 8 This is a cross-sectional view of the material taking nozzle. Figure 6 to Figure 8The nozzle fixture 208 includes a first lifting mechanism. The first lifting mechanism includes a first guide rail mounting plate 218. The back of the first guide rail mounting plate 218 is connected to the nut of the first ball screw. A set of linear guides are installed on the front of the first guide rail mounting plate 218. The linear guide is engaged with a slider. A linear module is installed between a set of linear guides, and the linear module is a ball screw type linear module, which converts rotary motion into linear motion.

[0057] The first lifting mechanism also includes a slider mounting plate 228. The slider mounting plate 228 is fixed on the slider. The linear module is mechanically connected to the slider mounting plate 228. A nozzle clamp 212 is fixed on the slider mounting plate 228. A plurality of split nozzle modules are installed on the nozzle clamp 212. The split nozzle module includes a first nozzle 209, a guide ventilation shaft 210 and a first air joint 214 that are interconnected. One end of the guide ventilation shaft 210 is connected to the first nozzle 209, and the other end of the guide ventilation shaft 210 is connected to the first air joint 214. There is an angle between the axis of the guide ventilation shaft 210 and the axis of the first air joint 214. Preferably, the degree of the angle is 30°. The outer wall of the guide ventilation shaft 210 is sleeved with a first linear bearing 211, and the first linear bearing 211 passes through the nozzle clamp 213. The back of the nozzle clamp 213 is fixed with a limit plate 227, and the limit plate 227 is installed on the nozzle clamp 212. The first air connector 214 is connected to the first solenoid valve group 217. The nozzle clamping block 213 is connected to the piston rod of the first cylinder 216. The cylinder body of the first cylinder 216 is fixed on the first cylinder mounting plate 215, and the first cylinder mounting plate 215 and the nozzle clamping plate 212 are parallel to each other.

[0058] A reference block 226 is installed between the slider mounting plate 228 and the first guide rail mounting plate 218, and an adjustment block 225 is fixed on the reference block 226 by a stop bolt 228. The adjustment block 225 and the reference block 226 are used for auxiliary basic positioning of a fixed test mechanism for chip detection. A locking adjustment block is installed under the first guide rail mounting plate 218. The reference block 226 is installed on the locking adjustment block. A clamping block is installed on the back of the slider mounting plate 228. Since the thickness of the chip is different, a stop bolt 228 is added on the adjustment block 225 through manual fine-tuning, so that the slider mounting plate 228 connected to the reference block 226 can be finely adjusted up and down in the Z-axis direction on the linear guide rail, thereby achieving the advantage of not having to replace the first suction nozzle 209, thereby saving changeover time and processing costs. Alternatively, the first ball screw and the linear module are eliminated, and the suction nozzle tooling 208 is manually adjusted according to the relative height of the chip and the first suction nozzle 209.

[0059] The material taking mechanism 200 also includes a wiring module. The wiring module includes a terminal mounting plate 219. The terminal mounting plate 219 is vertically connected to the first guide rail mounting plate 218. A plurality of terminal stand columns 220 are vertically arranged on the terminal mounting plate 219. The terminal stand columns 220 support the terminal stand 221. The wiring module also includes a first solenoid valve group 217. The first solenoid valve group 217 is fixed on the first guide rail mounting plate 218. An air pipe adapter block is installed on the terminal mounting plate 219. A plurality of second air joints 222 are inserted into the air pipe adapter block.

[0060] Fig.11 It is a structural diagram of the tray clamp mechanism. Fig.12 It is a cross-sectional view of the tray clamping mechanism. Fig.13 This is a top view of the tray clamp mechanism. Figure 11 to Figure 13 , the feeding mechanism 300 includes a tray clamp mechanism. The tray clamp mechanism includes a first tray 325. The material taking suction nozzle 208 is located on the first tray 325. Clamps 326 are arranged on both sides of the first tray 325. The clamps 326 are connected to the piston rod of the fourth cylinder 344. The piston rod of the fourth cylinder 344 is connected to the first guide shaft 348, and the first guide shaft 348 is covered with a second linear bearing 349, and the second linear bearing 349 extends into the first linear bearing mounting plate 347, and the first linear bearing mounting plate 347 is fixed to one side of the clamp base plate 331. The bottom of the tray 325 abuts against the top head 343. The top head 343 is connected to the piston rod of the fifth cylinder 351. The cylinder body of the fourth cylinder 344 is mounted on the clamp base plate 331. A protective cover 346 is arranged outside the clamp base plate 331. A sensor bracket 341 is installed in the protective cover 346, and a first proximity switch 342 is arranged in the sensor bracket 341. The clamping claw base plate 331 is fixed on the nut mounting block 330. The nut mounting block 330 is connected to the second guide rail 328 through the nut slider connecting plate 329. The nut mounting block 330 is connected to the second nut 350 of the third ball screw 332. One end of the third ball screw 332 is connected to the first driving module, and the first driving module drives the third ball screw 332 to rotate. Specifically, one end of the third ball screw 332 extends into the first screw support 340, the first screw support 340 is fixed on the first screw support seat 327, the other end of the third ball screw 332 is covered with a limiting pad 339 on the outer wall, and the other end of the third ball screw 332 extends into the second screw fixing seat 338. The first driving module includes a second servo motor 334, a second synchronous belt 335, a third synchronous pulley 336 and a fourth synchronous pulley 337. The output shaft of the second servo motor 334 passes through the fourth synchronous pulley 337, and the second synchronous belt 335 is tensioned on the third synchronous pulley 336 and the fourth synchronous pulley 337. The third synchronous pulley 336 is sleeved on the third ball screw 332. The end cover of the second servo motor 334 is fixed on the second motor mounting plate 333.

[0061] Fig. 9 The schematic diagram of the structure of the feeding guide rail is shown in Figure 2. Fig.10 This is a cross-sectional view of the feed rail. Fig. 9 and Fig.10 The feeding mechanism 300 also includes a feeding guide rail. The feeding guide rail includes a set of first guide rails 305 parallel to each other. The first guide rails 305 are fixed on the guide rail base plate 308, and the guide rail base plate 308 is fixed on the first mounting base plate 316. Two sets of material tray limiting assemblies are arranged on the first guide rails 305. The material tray limiting assembly includes a set of guide groove fixing blocks 301 and a set of limiting guide plates 306. A set of guide groove fixing blocks 301 and a set of limiting guide plates 306 respectively position the four corners of the material tray 325. A third cylinder 307 is arranged on one side of the limiting guide plate 306. The piston rod of the third cylinder 307 can pass through the bottom of the limiting guide plate 306.

[0062] A second cylinder 303 is also installed on the first guide rail 305. The piston rod of the second cylinder 303 is connected to the material tray stopper 302. The end cover of the second cylinder 303 is fixed on the stopper guide block 304.

[0063] Two sets of second lifting mechanisms are arranged between a set of first guide rails 305. The second lifting mechanism includes a second driving module and a second ball screw 313. The end of the second ball screw 313 is sleeved with a buffer pad 318, and the end of the second ball screw 313 extends into the first screw fixing seat 319. The nut of the second ball screw 313 is connected to the nut lifting plate 312. The nut lifting plate 312 is connected to the tray plate 315 through the first guide shaft 310. Specifically, the outer wall of the first guide shaft 310 is sleeved with a second linear bearing 309, the second linear bearing 309 passes through the first mounting base plate 316, the bottom of the first guide shaft 310 is fixed in the shaft fixing seat 311, and the shaft fixing seat 311 is fixed on the nut lifting plate 312. A tray clamping mechanism is arranged between a set of tray plates 315. The tray plate 315 can support the tray 325. The second driving module includes a first servo motor 314, a first synchronous pulley 320, a first synchronous belt 321, and a second synchronous pulley 324. The output shaft of the first servo motor 314 passes through the second synchronous pulley 324, and the first synchronous belt 321 is tensioned on the first synchronous pulley 320 and the second synchronous pulley 324. The first synchronous pulley 321 is sleeved on the second ball screw 313. The cylinder of the first servo motor 314 is fixed on the guide rail base plate 308 through the first motor support plate 322 and the first motor mounting plate 323.

[0064] The left side of the first guide rail 305 is a feeding end, and the right side of the first guide rail 305 is a discharging end. The feeding end and the discharging end each have a lifting mechanism controlled by a first servo motor 314 to realize the accumulation and extraction of the first material tray 325.

[0065] The working principle of removing a single tray on the left is as follows:

[0066] Multiple trays are manually placed into the tray placement slot formed by the guide slot fixing block 301 and the limiting guide plate 306. The lifting mechanism on the left is started, and when the output shaft of the first servo motor 314 rotates, the second synchronous pulley 324 is driven to rotate, and the second synchronous pulley 324 transmits power to the first synchronous pulley 320 through the first synchronous belt 321, and the first synchronous pulley 320 drives the second ball screw 313 to rotate, thereby driving the nut lifting plate 312 to move upward, and the nut lifting plate 312 moves along the setting direction of the first guide shaft 310, and the movement of the first guide shaft 310 drives the tray plate 315 to move upward to support the tray.

[0067] Then the piston rod of the second cylinder 303 on the left side retracts the tray block 302 supported at the bottom of the tray, and then the output shaft of the first servo motor 314 rotates in the opposite direction, and the multiple first trays 325 as a whole drop by the thickness of a tray, and the piston rod of the second cylinder 303 extends out, and the tray block 302 drags the remaining multiple first trays 325 above, and the output shaft of the first servo motor 314 rotates again, and the tray plate 315 drops again to below the plane of the first guide rail 305, and a single first tray 325 is placed on the guide rail groove, and then clamped and conveyed by the first clamp 326, completing a single tray removal.

[0068] The working principle of the tray stacking on the right is as follows:

[0069] The lifting mechanism on the right side is started, and the output shaft of the first servo motor 314 on the right side rotates, driving the second synchronous pulley 324 to rotate. The second synchronous pulley 324 transmits power to the first synchronous pulley 320 through the first synchronous belt 321. The first synchronous pulley 320 drives the second ball screw 313 to rotate, thereby driving the nut lifting plate 312 to move upward. The nut lifting plate 312 moves along the setting direction of the first guide shaft 310. The movement of the first guide shaft 310 drives the tray plate 315 to move upward to support the tray. The piston rod of the second cylinder 303 on the right side retracts, and after the first tray 325 is sent to the tray placement slot, the piston rod of the second cylinder 303 on the right side extends to push the tray block 302 to clamp the tray, completing the stacking of a single tray.

[0070] Then, the output shaft of the first servo motor 314 on the right rotates in the opposite direction, and the tray plate 315 on the right descends below the plane of the first guide rail 305 , so that a plurality of first material trays 325 are stacked and placed on the guide rail groove.

[0071] The working principle of empty tray discharging is as follows:

[0072] When all the chips in the multiple first trays 325 have been taken out, the first trays 325 have been moved from the left side to the right side and are fully stacked, the material taking and placing is completed. The lifting mechanism on the right side is started, and the output shaft of the first servo motor 314 on the right side rotates, so that the tray plate 315 on the right side rises to hold the first tray 325, and the piston rod of the second cylinder 303 on the right side retracts to hold the tray stopper 302 at the bottom of the tray. Then the output shaft of the first servo motor 314 on the right side rotates in the opposite direction, and the tray plate 315 on the right side descends to the plane below the first guide rail 305, and multiple first trays 325 are stacked and placed on the guide rail groove, and then the bottom tray is clamped by the first clamp 326, and the third cylinder 303 on the right side is retracted. The piston rod of 7 retracts, driving the limit guide plate 306 to open, and multiple empty trays move from the right to the left. The piston rod cylinder of the third cylinder 307 on the right extends, driving the limit guide plate 306 to open. At the same time, the first clamp 326 is closed, and the first servo motor 314 on the left rises to the highest position. The piston rod of the second cylinder 303 on the left extends to push the tray block 302 to hold the multiple empty trays above. The first servo motor 314 on the left descends to the plane of the first guide rail 305, waiting for manual removal of the empty tray and placement of the new tray.

[0073] When the first material tray 325 reaches the designated position, the first proximity switch 342 senses the first material tray 325, and the piston rod of the fourth cylinder 344 retracts, driving the first clamping claw 326 to move at the same time, thereby clamping the first material tray 325. Then, the piston rod of the fifth cylinder 351 extends, driving the head 343 to push upward, completing the anti-deformation clamping of the first material tray 325. Then, the output shaft of the second servo motor 334 drives the fourth synchronous pulley 337 to rotate, and transmits power to the third synchronous pulley 336 through the second synchronous belt 335. The third synchronous pulley 336 drives the third ball screw 332 to rotate, thereby driving the second nut 350 and the nut mounting block 330 installed on the second nut 350 to move, and the second nut 350 converts the rotary motion into a linear motion, and the nut mounting block 330 slides on the second guide rail 328, thereby driving the material tray clamping claw mechanism to move linearly.

[0074] Fig.14 This is the main view of the test organization. Fig.15 The side view of the test mechanism. Fig.14 and Fig.15, the test mechanism 400 includes a test seat 411. The test seat 411 includes a chip test board 4111. An adjustable light source light box 410 is arranged above the test seat 411. The test mechanism 400 also includes a third electric cylinder. The third electric cylinder includes a fourth ball screw. The nut of the fourth ball screw is connected to the test upper fixed plate 404. The test upper fixed plate 404 and the suction nozzle mounting plate 407 are connected through a second guide shaft 408. The outer wall of one end of the second guide shaft 408 is sleeved with a second linear bearing 406, and one end of the second guide shaft 408 is fixed in the first shaft support 405. The suction nozzle mounting plate 407 is provided with a plurality of second suction nozzles. The test upper fixed plate 404 is fixed on the test upper top plate 401, and the two sides of the test upper top plate 401 are respectively fixed on the support columns 403. A pressure reducing valve 402 is installed on the test upper top plate 401.

[0075] Fig.16 This is the structural diagram of the test socket. Fig.17 for Fig.16 Schematic diagram of the structure at B in the figure. Fig.16 and Fig.17 The test seat 411 further includes a set of support plates 4114. The set of support plates 4114 supports the chip test board 4111. A heat insulation plate 4112 and a mounting plate 4113 are arranged between the support plates 4114 and the chip test board 4111.

[0076] Fig.18 is a structural diagram of the pre-positioning mechanism. Fig.19 is a side view of the pre-positioning mechanism. Fig. 20 is a top view of the pre-positioning mechanism. Fig.21 for Fig. 20 Schematic diagram of the structure at A in the figure. Figure 18 to Figure 21 The pre-positioning mechanism 500 includes a positioning plate 502 and a fourth electric cylinder 505. The positioning plate 502 is provided with a plurality of chip positioning grooves 501. The chip test board 4111 and the positioning plate 502 are on the same horizontal plane. A vibration motor 507 is installed at the bottom of the positioning plate 502. The positioning plate 502 is fixed to the slide plate 504 through a supporting component. The supporting component includes a vertical plate 503, and the vertical plate 503 and the slide plate 504 are vertically connected. The slide plate 504 is fixed on the first slider 506. The fourth electric cylinder 505 includes a fifth ball screw. The nut of the fifth ball screw is connected to the first slider 506, and the straight line where the length of the third ball screw 332 is located and the straight line where the length of the fifth ball screw is located are perpendicular to each other.

[0077] The chip is placed in the chip positioning groove 501, and the vibration motor 507 on the back of the positioning plate 502 is used. The vibration of the vibration motor 507 corrects the inconsistent chip posture caused by various reasons when the operator or the robot places the chip, so that the chip can accurately enter the next test station.

[0078] The positioning plate 502 is installed on the vertical plate 503, the vertical plate 503 is installed on the slide plate 504, and the slide plate 504 is installed on the first slider 506. Under the action of the output shaft of the servo motor of the fourth electric cylinder 505, the slide plate 504 moves linearly in the X-axis to realize the rapid transportation of chips.

[0079] The structure of the discharging mechanism 600 is the same as that of the feeding mechanism 300 , and the first guide rail 305 of the discharging mechanism 600 and the first guide rail 305 of the feeding mechanism 300 are parallel to each other.

[0080] The NG mechanism 700 includes a second material tray, a ball screw linear module, a second slider and a second guide rail, the second slider and the second guide rail are interlocked, the second material tray is fixed on the second slider, and the second slider is connected to the nut of the ball screw linear module through a connecting plate. The ball screw linear module drives the second slider to move along the second guide rail along the X-axis direction.

[0081] Embodiment 2:

[0082] Fig. 22 is a top view of embodiment 2 of the present invention, Fig.23 This is a front view of Embodiment 2 of the present invention, Fig.24 is a side view of embodiment 2 of the present invention, Fig.25 This is a schematic diagram of the structure of Embodiment 2 of the present invention. Figure 22 to Figure 25 , a chip inspection and sorting machine includes a substrate 100. Two groups of material taking mechanisms 200, two groups of material feeding mechanisms 300, two groups of testing mechanisms 400, two groups of pre-positioning mechanisms 500, two groups of material discharging mechanisms 600 and two groups of NG mechanisms 700 are arranged on the substrate 100. One group of material taking mechanisms 200, one group of material feeding mechanisms 300, one group of testing mechanisms 400, one group of pre-positioning mechanisms 500, one group of material discharging mechanisms 600 and one group of NG mechanisms 700 are on one side of the substrate 100, and another group of material taking mechanisms 200, another group of material feeding mechanisms 300, another group of testing mechanisms 400, another group of pre-positioning mechanisms 500, another group of material discharging mechanisms 600 and another group of NG mechanisms 700 are on the other side of the substrate 100.

[0083] A detection method for a chip detection and sorting machine includes the following steps: Step S1: feeding. The material tray enters from the feeding mechanism 300. Step S2: taking out the material and pre-positioning. The material tray is taken out by the taking out mechanism 200 and placed in the pre-positioning mechanism 500. Step S3: detection. The testing mechanism 400 takes in the material for detection. Step S4: pre-positioning and discharging. The material tray is taken out by the testing mechanism 400 and placed in the pre-positioning mechanism 500. The material tray is taken out by the taking out mechanism 200 and placed in the discharging mechanism 600 and the NG mechanism 700 respectively to complete the cycle.

Claims

1. A chip detection and sorting machine, characterized in that: It comprises a substrate (100); a material taking mechanism (200), a material feeding mechanism (300), a testing mechanism (400) and a pre-positioning mechanism (500) are arranged on the substrate (100); The material picking mechanism (200) comprises a first electric cylinder (202); the first electric cylinder (202) is fixed on a first module mounting plate (203); both sides of the first module mounting plate (203) are respectively arranged on a support column (201); the first electric cylinder (202) comprises a first ball screw; the nut of the first ball screw is connected to a suction nozzle fixture (208); the suction nozzle fixture (208) comprises a first lifting mechanism; the first lifting mechanism comprises a first guide rail mounting plate (218); the back side of the first guide rail mounting plate (218) is connected to the nut of the first ball screw; a group of linear guide rails are installed on the front side of the first guide rail mounting plate (218); the linear guide rails are engaged with a sliding block; the A linear module is installed between the first lifting mechanism and the second lifting mechanism; the first lifting mechanism also includes a slider mounting plate (228); the slider mounting plate (228) is fixed on the slider; the linear module and the slider mounting plate (228) are mechanically connected; a suction nozzle clamping plate (212) is fixed on the slider mounting plate (228); a plurality of split suction nozzle modules are installed on the suction nozzle clamping plate (212); the split suction nozzle module includes a first suction nozzle (209), a guide ventilation shaft (210) and a first air joint (214) which are interconnected; one end of the guide ventilation shaft (210) is connected to the first suction nozzle (209), and the other end of the guide ventilation shaft (210) is connected to the first air joint (214); The feeding mechanism (300) comprises a tray clamping mechanism; the tray clamping mechanism comprises a tray (325); the suction nozzle tooling (208) is located on the tray (325); clamping jaws (326) are arranged on both sides of the tray (325); the clamping jaws (326) are connected to the piston rod of the fourth cylinder (344); the bottom of the tray (325) abuts against the top head (343); the top head (343) is connected to the piston rod of the fifth cylinder (351); the cylinder body of the fourth cylinder (344) is mounted on the clamping jaw base plate (331); the clamping jaw base plate (331) is fixed on the nut mounting block (330); the nut mounting block (330) is connected to the nut of the third ball screw (332); one end of the third ball screw (332) is connected to the first driving module, and the first driving module drives the third ball screw (332) to rotate; The feeding mechanism (300) further comprises a feeding guide rail; the feeding guide rail comprises a group of mutually parallel first guide rails (305); at least one group of material tray limiting components is arranged on the first guide rails (305); at least one group of second lifting mechanisms is arranged between a group of the first guide rails (305); the second lifting mechanism comprises a second driving module and a second ball screw (313); the nut of the second ball screw (313) is connected to the nut lifting plate (312); the nut lifting plate (312) is connected to the tray plate (315) via the first guide shaft (310); the material tray clamping mechanism is arranged between a group of the tray plates (315); the tray plate (315) can hold the material tray (325); The testing mechanism (400) comprises a testing seat (411); the testing seat (411) comprises a chip testing board (4111); an adjustable light source light box (410) is arranged above the testing seat (411); The pre-positioning mechanism (500) comprises a positioning plate (502) and a fourth electric cylinder (505); the positioning plate (502) is provided with a plurality of chip positioning grooves (501); the chip test board (4111) and the positioning plate (502) are on the same horizontal plane; a vibration motor (507) is installed at the bottom of the positioning plate (502); the positioning plate (502) is fixed on a slide plate (504) through a supporting component; the slide plate (504) is fixed on a first slider (506); the fourth electric cylinder (505) comprises a fifth ball screw; the nut of the fifth ball screw is connected to the first slider (506), and the straight line where the length of the third ball screw (332) is located and the straight line where the length of the fifth ball screw is located are perpendicular to each other.

2. The chip detection and sorting machine according to claim 1, characterized in that: The first driving module comprises a second servo motor (334), a second synchronous belt (335), a third synchronous pulley (336) and a fourth synchronous pulley (337); the output shaft of the second servo motor (334) passes through the fourth synchronous pulley (337), and the second synchronous belt (335) is tensioned on the third synchronous pulley (336) and the fourth synchronous pulley (337); the third synchronous pulley (336) is sleeved on the third ball screw (332).

3. The chip detection and sorting machine according to claim 1, characterized in that: The second driving module comprises a first servo motor (314), a first synchronous pulley (320), a first synchronous belt (321) and a second synchronous pulley (324); the output shaft of the first servo motor (314) passes through the second synchronous pulley (324), the first synchronous belt (321) is tensioned on the first synchronous pulley (320) and the second synchronous pulley (324); the first synchronous pulley (320) is sleeved on the second ball screw (313).

4. The chip detection and sorting machine according to claim 1, characterized in that: The tray limiting assembly comprises a group of guide groove fixing blocks (301) and a group of limiting guide plates (306); the group of guide groove fixing blocks (301) and the group of limiting guide plates (306) respectively position the four corners of the tray (325).

5. The chip detection and sorting machine according to claim 4, characterized in that: A third cylinder (307) is arranged on one side of the limiting guide plate (306); a piston rod of the third cylinder (307) can pass through the bottom of the limiting guide plate (306).

6. The chip detection and sorting machine according to claim 1, characterized in that: A second cylinder (303) is also installed on the first guide rail (305); the piston rod of the second cylinder (303) is connected to the material tray stopper (302); and the end cover of the second cylinder (303) is fixed on the stopper guide block (304).

7. The chip detection and sorting machine according to claim 1, characterized in that: The testing mechanism (400) further comprises a third electric cylinder; the third electric cylinder comprises a fourth ball screw; the nut of the fourth ball screw is connected to the testing upper fixing plate (404); the testing upper fixing plate (404) and the suction nozzle mounting plate (407) are connected via a second guide shaft (408); the suction nozzle mounting plate (407) is provided with a plurality of second suction nozzles; the testing seat (411) further comprises a group of support plates (4114); the group of support plates (4114) supports the chip testing board (4111); a heat insulation plate (4112) and a mounting plate (4113) are provided between the support plates (4114) and the chip testing board (4111).

8. A detection method for a chip detection and sorting machine according to claim 1, characterized in that The following steps are involved: Step S1: feeding: the material tray enters from the feeding mechanism (300); Step S2: taking materials and pre-positioning; taking materials out through the material taking mechanism (200) and placing them in the pre-positioning mechanism (500); Step S3: Testing: the testing mechanism (400) takes in the test; Step S4: Pre-positioning and discharging; then taking out from the testing mechanism (400) to the pre-positioning mechanism (500) and then taken out by the material taking mechanism (200) and placed in the material discharging mechanism (600) and the NG mechanism (700) respectively, to complete the cycle.

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