Electromagnetic property measurement device and system and electromagnetic property measurement method

Abstract

The present invention discloses an electromagnetic property measurement device and system and an electromagnetic property measurement method, wherein the electromagnetic property measurement device comprises a magnetic conductive structure, a coil and a scattering parameter measuring device. The magnetic conductive structure comprises a first side facing a sample to be measured and a second side relative to the first side, wherein the first side has a magnetic gap. The coil surrounds the magnetic conductive structure to generate a magnetic field with the magnetic conductive structure. The scattering parameter measuring device is arranged on the first side and is located within the range of the magnetic field.

Description

Technical Field

[0001] The invention relates to an electromagnetic property measurement device, an electromagnetic property measurement system and an electromagnetic property measurement method. Background Art

[0002] With the rapid development of communication and semiconductor technology, components, memory and other related devices are developing towards the technical directions of miniaturization, thinness, ultra-wideband, and adjustable loss. As a result, magnetic materials are increasingly used in electronic devices, circuit devices, memory, etc. For example, in inductors, sensors, interference suppressors, high-density magnetic recording and regeneration heads, magnetic memories, electromagnetic interference (EMI) protection, smart surfaces, component packaging, advanced driver assistance systems, transceiver antennas and other magnetic devices. The premise for the development and application of these magnetic materials is to accurately know the basic electromagnetic-related properties of magnetic materials in order to effectively carry out simulation design and development. Therefore, it is of great significance to be able to accurately measure the electromagnetic properties of magnetic materials under widescreen conditions.

[0003] Current electromagnetic property measurement methods include coaxial method, waveguide method and resonant cavity perturbation method, etc., which have very strict restrictions on sample size in detection. Therefore, the material needs to be reproduced into a sample of a specific size. The electromagnetic properties of the sample are usually related to the actual application size. Therefore, the reproduced material sample is different from the actual application material properties. Therefore, the electromagnetic properties measured by the current method are different from the actual application, which makes it easy to misjudge the material properties and cannot effectively perform simulation design. In addition, the current technology cannot perform large-area measurements, resulting in a long development process and a significant increase in costs for materials, components and related application devices. Summary of the invention

[0004] The present invention is directed to an electromagnetic property measurement device, an electromagnetic property measurement system and an electromagnetic property measurement method, which can directly measure the electromagnetic properties of actual samples without cutting or remaking the samples, thereby being able to meet the development and verification requirements of materials, components, and related application devices.

[0005] According to an embodiment of the present invention, an electromagnetic property measurement device includes a magnetic conductive structure, a coil, and a scattering parameter measuring device. The magnetic conductive structure includes a first side facing a sample to be measured and a second side relative to the first side, wherein the first side has a magnetic gap. The coil surrounds the magnetic conductive structure to generate a magnetic field with the magnetic conductive structure. The scattering parameter measuring device is arranged on the first side and is located within the range of the magnetic field.

[0006] According to an embodiment of the present invention, an electromagnetic property measurement system includes the electromagnetic property measurement device, an analysis unit and a control unit as described above. The analysis unit is coupled to the electromagnetic property measurement device to analyze the electromagnetic properties of the sample to be measured. The control unit is coupled to the electromagnetic property measurement device and the analysis unit to control the electromagnetic property measurement device to measure the surface of the sample to be measured.

[0007] According to an embodiment of the present invention, an electromagnetic property measurement method includes the following steps. Provide an electromagnetic property measurement device as described above. Contact the electromagnetic property measurement device with a first measurement point on the surface of a sample to be measured. Provide currents of different strengths to the electromagnetic property measurement device to generate magnetic fields of different strengths, and measure the scattering parameters generated by the sample to be measured. Analyze the electromagnetic properties of the sample to be measured at the first measurement point based on the scattering parameters. Move the electromagnetic property measurement device to a second measurement point on the surface.

[0008] Based on the above, the electromagnetic property measurement device of the present invention is provided with a magnetic gap on the first side facing the sample to be measured, so that the magnetic field can be directed to the first side. In this way, the electromagnetic property measurement device faces the sample to be measured with its first side, and can move on the surface of the sample to be measured to perform large-area measurements. Therefore, the electromagnetic property measurement device of the present invention does not need to cut the sample to be measured into a specific size to accommodate it between the two magnetic field structures, but can directly move on the surface of the sample to be measured to measure the original sample to be measured, thereby reducing the influence of the shape effect on the electromagnetic properties. Therefore, the electromagnetic property measurement device of the present invention can effectively improve the measurement accuracy of the electromagnetic properties of the sample to be measured (especially large-area samples or sheet samples). BRIEF DESCRIPTION OF THE DRAWINGS

[0009] The accompanying drawings are included to provide a further understanding of the present invention and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the present invention and together with the description serve to explain the principles of the present invention.

[0010] Figure 1 is a schematic diagram of an electromagnetic property measurement device according to an embodiment of the present invention;

[0011] Figure 2 is a block diagram of an electromagnetic property measurement system according to an embodiment of the present invention;

[0012] Figure 3 is a side view schematic diagram of an electromagnetic property measurement device according to an embodiment of the present invention;

[0013] Figure 4 is a measurement schematic diagram of an electromagnetic property measurement device according to an embodiment of the present invention;

[0014] Figure 5is a schematic diagram of a magnetization curve of a magnetic conductive structure according to an embodiment of the present invention;

[0015] Figure 6 It is a schematic diagram of the relationship between current and magnetic field strength of an electromagnetic characteristic measuring device according to an embodiment of the present invention;

[0016] Figures 7 to 12 It is a schematic diagram of the relationship between the magnetic gap distance and the magnetic field strength of an electromagnetic property measurement device according to an embodiment of the present invention;

[0017] Fig.13 is a bottom schematic diagram of an electromagnetic property measuring device according to an embodiment of the present invention;

[0018] Fig.14 is a schematic side view from another angle of an electromagnetic property measuring device according to an embodiment of the present invention;

[0019] Figure 15 to Figure 16 It is a schematic diagram of the relationship between scattering parameters and frequencies of an electromagnetic property measurement device under different external magnetic fields according to an embodiment of the present invention;

[0020] Figure 17 to Figure 18 It is a schematic diagram of the relationship between magnetic permeability and frequency of an electromagnetic property measurement device under different external magnetic fields according to one embodiment of the present invention;

[0021] Fig.19 It is a schematic flow chart of an electromagnetic property measurement method according to an embodiment of the present invention;

[0022] Fig. 20 is a schematic diagram of the relationship between magnetic permeability and frequency obtained using an electromagnetic property measurement device according to an embodiment of the present invention;

[0023] Fig.21 This is a schematic diagram of the relationship between magnetic permeability and frequency obtained using an existing electromagnetic property measurement device.

[0024] Description of Figure Numbers

[0025] 10: Electromagnetic characteristics measurement system;

[0026] 100: Electromagnetic properties measuring device;

[0027] 110: Magnetic structure;

[0028] 112: magnetic column;

[0029] 114: first magnetic conductor;

[0030] 116: second magnetic conductor;

[0031] 1141, 1142: magnetic conductive part;

[0032] 120: coil;

[0033] 130: port;

[0034] 140: bracket;

[0035] 142: fixed end;

[0036] 144: extension end;

[0037] 150: Scattering parameter measurer;

[0038] 152: conductor layer;

[0039] 154: dielectric layer;

[0040] 300: analysis unit;

[0041] 400: control unit;

[0042] 500: power supply unit;

[0043] D1: moving direction;

[0044] G1: magnetic gap;

[0045] P2: second measuring point;

[0046] SP: sample to be tested;

[0047] S1: first side;

[0048] S2: Second side. DETAILED DESCRIPTION

[0049] Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Whenever possible, the same reference numerals are used in the drawings and the description to refer to the same or like parts.

[0050] The other technical contents, features and effects of the present invention mentioned above will be clearly presented in the detailed description of the embodiments with reference to the drawings below. The directional terms mentioned in the following embodiments, such as "up", "down", "front", "back", "left", "right", etc., are only referenced to the directions of the attached drawings. Therefore, the directional terms used are used for explanation, not for limiting the present invention. In addition, in the following embodiments, the same or similar components will use the same or similar reference numerals.

[0051] Figure 1 is a schematic diagram of an electromagnetic property measurement device according to an embodiment of the present invention. Figure 2 is a block diagram of an electromagnetic property measurement system according to an embodiment of the present invention. Figure 1 and Figure 2In some embodiments, the electromagnetic property measurement system 10 includes an electromagnetic property measurement device 100, an analysis unit 300, a control unit 400, and a power supply unit 500. In some embodiments, the electromagnetic property measurement device 100 is a measurement probe for measuring electromagnetic properties of a sample SP to be measured, which can be moved freely or in an array on the surface of the sample SP to be measured. In some embodiments, the sample SP to be measured is a sheet or film sample, which can be a major surface (major surface) with a larger area, but is not limited to this. In this way, the electromagnetic property measurement device 100 of this embodiment can move freely on this major surface, so that the sample SP to be measured with a larger major surface (larger area) can be measured. In some embodiments, the electromagnetic property measurement system may also include a moving unit, which can be coupled to the electromagnetic property measurement device 100 to drive the electromagnetic property measurement device 100 to move along the surface of the sample SP to be measured. For example, the moving unit may be a robot arm, which may be coupled to the control unit 400 to automatically move on the main surface of the sample SP to be tested under the control of the control unit 400 to measure the electromagnetic properties of multiple measurement points on the surface of the sample SP to be tested. In other embodiments, the electromagnetic property measurement device 100 may also be manually moved on the surface of the sample SP to be tested by an operator for measurement.

[0052] In the above-mentioned embodiment of the present invention, the control unit 400 can be coupled to the electromagnetic property measurement device 100, the analysis unit 300, the power supply unit 500 and the mobile unit (if any), and is used to control the electromagnetic property measurement device 100 and the analysis unit 300 to measure the surface of the sample SP to be measured. For example, the control unit 400 may include a desktop computer, a server, a portable electronic device or other suitable electronic devices, but is not limited thereto. The power supply unit 500 can be coupled to the electromagnetic property measurement device 100 and the control unit 400, which can be controlled by the control unit 400, and is used to provide current to the electromagnetic property measurement device 100 to generate a magnetic field.

[0053] In some embodiments, the electromagnetic property measurement device 100 may include a magnetic conductive structure 110, a coil 120, and a scattering parameter measurement device 150. The magnetic conductive structure 110 includes a first side S1 and a second side S2 opposite to each other, wherein the first side S1 is used to face the sample SP to be measured. The coil 120 surrounds at least a portion of the magnetic conductive structure 110 to generate a magnetic field of a circular current with the magnetic conductive structure 110. In other words, the above-mentioned embodiments of the present invention utilize a current passing through the coil 120 to generate a magnetic field around the coil 120. Generally speaking, the greater the current passing through the coil 120, the stronger the magnetic field generated, and vice versa. In addition, the more turns the coil 120 has, the stronger the magnetic field generated. In some embodiments, the coil 120 may include a single-core (core) metal wire, a multi-core metal wire, a single-layer metal tube, or a multi-layer metal tube, but the present invention is not limited thereto.

[0054] In detail, the magnetic conductive structure 110 may include a plurality of magnetic conductive pillars 112 (two are shown, but not limited thereto), a first magnetic conductive body 114, and a second magnetic conductive body 116. The plurality of magnetic conductive pillars 112 may be parallel to each other and connected between the first side S1 and the second side S2. The first magnetic conductive body 114 is connected to the magnetic conductive pillars 112 at the first side S1, and the second magnetic conductive body 116 is connected to the magnetic conductive pillars 112 at the second side S1. Further, the plurality of magnetic conductive pillars 112 may be arranged in parallel to each other to define the first side S1 (lower side) and the second side S2 (upper side) of the electromagnetic property measuring device 100. The first magnetic conductive body 114 may be arranged below the magnetic conductive pillars 112 to respectively connect the first sides S1 of the plurality of magnetic conductive pillars 112, and the second magnetic conductive body 116 may be arranged above the magnetic conductive pillars 112 to respectively connect the second sides S2 of the plurality of magnetic conductive pillars 112. The coils 120 may surround the magnetic conductive pillars 112, respectively. In other words, the coil 120 can be wound to form a hollow portion to accommodate the magnetic conductive column 112 , so that the coil 120 is wound on the magnetic conductive column 112 .

[0055] In some embodiments, the magnetic structure 110 may be formed of a magnetic material (such as ferrite) and may have various shapes. For example, the material of the magnetic structure 110 may include ferrite compounds such as nickel zinc (NiZn) or manganese zinc (MnZn), or other soft magnetic ferromagnetic materials with low coercivity, but is not limited thereto. The coercivity of a magnetic material is also called the retaining force, which refers to the magnetic field intensity required to reduce the magnetization of the magnetic material to zero after the magnetic material has been magnetized to magnetic saturation. A lower coercivity means a lower ability to resist demagnetization, which also means a smaller hysteresis loss. Of course, the above embodiments are only used for illustration, and the present invention is not limited thereto. In addition, the cylindrical magnetic column 112 and the coil 120 wound around the magnetic column 112 shown in the figure are only one specific embodiment of the present invention. Anyone with ordinary knowledge in the relevant technical field should understand that the present invention can also use a magnetic column 112 with other appropriate shapes.

[0056] Figure 3 It is a side view schematic diagram of an electromagnetic property measurement device according to an embodiment of the present invention. Figure 4 It is a measurement schematic diagram of an electromagnetic property measurement device according to an embodiment of the present invention. Figure 5 This is a schematic diagram of a magnetization curve of a magnetic conductive structure according to an embodiment of the present invention. Figures 3 to 5 Generally speaking, the high magnetic conductivity of the magnetic material of the magnetic structure 110 allows it to have a higher inductance under a certain volume, but the saturation current it can withstand is relatively low. Once magnetic saturation is reached, the magnetic permeability of the magnetic structure 110 will drop sharply. The so-called magnetic saturation is a characteristic of magnetic materials (such as ferromagnetic or ferrimagnetic materials such as iron, nickel, cobalt, manganese and their alloys). Before magnetic saturation (such as Figure 5 As shown in the left half of the curve, if the strength of the external magnetic field H is increased, the material will be magnetized, and the magnetic flux density B will also increase accordingly. However, when the magnetic field strength H is greater than a certain level (such as Figure 5 The magnetic flux density B will only increase slowly due to the vacuum magnetic permeability, which is magnetic saturation. The relationship between the magnetic field intensity H and the magnetic flux density B can be expressed by the following magnetic permeability formula (a):

[0057]

[0058] Where μ is the magnetic permeability. Figure 5From the magnetic permeability formula (a), it can be seen that the magnetic permeability of a material is not a constant quantity, but depends on the magnetic field strength H. In a material that is magnetically saturated, its magnetic permeability reaches a maximum value as the magnetic field strength H increases, then decreases as its saturation changes, and finally approaches 1. The magnetic field when μ approaches 1 is defined as the critical magnetic field strength HC. In some embodiments, the critical magnetic field strength HC is greater than or equal to 10 Oersteds (Oe).

[0059] In the above embodiment, the strength of the external magnetic field generated by the electromagnetic property measurement device 100 needs to make the magnetic permeability of the sample SP to be measured approach 1, so the external magnetic field required to be generated by the electromagnetic property measurement device 100 needs to have sufficient strength. However, the characteristics of magnetic saturation limit the maximum magnetic field that the magnetic conductive structure 110 can reach. In view of this, the magnetic conductive structure 110 of this embodiment is provided with a magnetic gap G1. In one embodiment, the magnetic gap G1 refers to an air gap in the magnetic circuit, that is, the magnetic circuit of the magnetic conductive structure 110 may not be completely closed, but a gap is left in the middle. In some embodiments, the magnetic gap G1 may be filled with non-magnetic conductive materials, such as resin, rubber, ceramic or any combination thereof, but not limited thereto. In this embodiment, the magnetic gap G1 is provided in the main magnetic circuit of the magnetic conductive structure (the first magnetic conductive body 112 located on the first side S1), which can reduce the magnetic permeability of the magnetic conductive structure 110, avoid magnetic saturation and store more energy (most of the energy is stored in the magnetic gap G1).

[0060] In detail, in some embodiments, the first side S1 of the electromagnetic property measuring device 100 has a magnetic gap G1, and the magnetic gap G1 is located above the surface of the sample SP to be measured and between the magnetic conductive pillars 112. Further, in this embodiment, the first magnetic conductive body 112 connected to the first side S1 of the magnetic conductive pillars 112 includes the magnetic gap G1. In other words, the first magnetic conductive body 112 may include a plurality of (e.g., two) magnetic conductive portions 1141, 1142, which are respectively connected to the magnetic conductive pillars 112 and extend toward the middle direction of the two magnetic conductive pillars 112, and a distance may be maintained between the ends of the magnetic conductive portions 1141, 1142, and the distance is the magnetic gap G1.

[0061] Figure 6 FIG. 1 is a schematic diagram showing the relationship between current and magnetic field strength of an electromagnetic property measurement device according to an embodiment of the present invention. Figure 6It can be known that the distance (size) of the magnetic gap G1 is closely related to the strength of the generated magnetic field. Generally speaking, the smaller the distance of the magnetic gap G1, the greater the strength of the magnetic field generated by the magnetic conductive structure 110 and the coil 120. For example, the distance of the magnetic gap G1 can be about 0.1mm to 12mm, such as about 0.2mm to 10mm, about 0.5mm to 8mm, about 0.8mm to 5mm, about 0.1mm to 1mm, about 0.5mm to 3mm, about 0.75mm to 4.5mm, about 1mm to 5.5mm, about 2mm to 6mm, about 3mm to 7mm, about 4mm to 8mm, about 5mm to 10mm, about 6mm to 12mm, about 1mm, about 3mm, about 5mm, about 6mm, about 8mm, about 9mm, etc., but not limited thereto. Furthermore, when an external current is input, the external current can be controlled to be about 0 to 30 amperes (A), for example, the input current can be 0 (no current state), and can be about 0.01 to 30 amperes, about 0.1 to 25 amperes, about 0.5 to 20 amperes, about 1 to 18 amperes, about 2 to 15 amperes, about 2 amperes, about 3 amperes, about 5 amperes, about 8 amperes, about 10 amperes, about 12 amperes, about 15 amperes, about 20 amperes, about 25 amperes, etc., but not limited thereto. In this embodiment, the magnetic field strength H of the magnetic field generated by the electromagnetic property measurement device 100 is generally required to be controllable between 0 and the critical magnetic field strength HC. Of course, the numerical values ​​of this embodiment are only used for illustration, and the actual numerical values ​​may change according to other component sizes or environmental factors, and the present invention is not limited thereto.

[0062] Figures 7 to 12 1 is a schematic diagram of the relationship between the magnetic gap distance and the magnetic field strength of an electromagnetic property measurement device according to an embodiment of the present invention. It should be noted that: Figure 7 The graph shows the X direction (e.g., the magnetic gap G1) in the magnetic gap G1 when different currents (2, 5, 10, and 15 amperes) are input under the condition that the distance of the magnetic gap G1 is approximately 3 mm. Fig.13 The relationship between the magnetic field strength and frequency in the X direction (as shown). Figure 8 The graph shows the influence of different currents (2, 5, 10, and 15 amperes) on the Y direction (e.g., Fig.13 The relationship between the magnetic field strength and frequency in the Y direction shown in FIG. Fig. 9 The graph shows the X direction (e.g., the magnetic gap G1) in the magnetic gap G1 when different currents (2, 5, 10, and 15 amperes) are input under the condition that the distance of the magnetic gap G1 is approximately 6 mm. Fig.13 The relationship between the magnetic field strength and frequency in the X direction (as shown). Fig.10The graph shows the influence of different currents (2, 5, 10, and 15 amperes) on the Y direction (e.g., Fig.13 The relationship between the magnetic field strength and frequency in the Y direction (as shown). Fig.11 The graph shows the X direction (e.g., the magnetic gap G1) in the magnetic gap G1 when different currents (2, 5, 10, and 15 amperes) are input under the condition that the distance of the magnetic gap G1 is approximately 9 mm. Fig.13 The relationship between the magnetic field strength and frequency in the X direction (as shown). Fig.12 The graph shows the influence of different currents (2, 5, 10, and 15 amperes) on the Y direction (e.g., Fig.13 The relationship between the magnetic field strength and frequency in the Y direction (as shown).

[0063] From the above diagram, it can be seen that the larger the distance of the magnetic gap G1, the smaller the magnetic field strength in the magnetic gap G1. However, from the above diagram, it can also be found that when the distance of the magnetic gap G1 is the same, the magnetic field strength distribution in the magnetic gap G1 will increase as the current increases. Therefore, when the magnetic gap G1 is larger, the demand for magnetic field strength can also be supplemented by increasing the external current.

[0064] Please refer to the reply Figure 1 and Figure 3 In some embodiments, the scattering parameter measurer 150 is disposed on the first side S1 and is located within the range of the magnetic field generated by the electromagnetic property measurement device 100 to measure the scattering parameter (scattering parameter) of the sample SP to be measured and obtain the magnetic permeability of the sample SP to be measured. Specifically, the electromagnetic property measurement device 100 may also include a bracket 140, which may be disposed (for example, fixed) on the second side S2 and extend toward the first side S1 to above the magnetic gap G1. In this way, the scattering parameter measurer 150 may be disposed on the bracket 140 (for example, disposed at the end point of the bracket 140 on the first side S1) to be located above the magnetic gap G1. In detail, the bracket 140 may include a fixed end 142 and an extension end 144. The fixed end 142 is fixed to the second side S2 of the magnetic conductive structure 110, and the extension end 144 is connected to the fixed end 142 and extends toward the first side S1 to above the magnetic gap G1. In one embodiment, the scattering parameter measurement device 150 may be disposed at the end of the extension end 144. It is understood that the location of the arrangement may be changed according to actual needs, and the present invention is not limited thereto. In one embodiment, the material of the bracket 140 may be a non-magnetic material, such as resin, aluminum, copper, etc., but is not limited thereto.

[0065] In the above embodiment, under such a structural configuration, the electromagnetic property measurement device 100 is provided with a magnetic gap G1 on the first side S1, so that the maximum magnetic field can be directed to the first side S1. In this way, the electromagnetic property measurement device 100 faces the sample SP to be tested with its first side S1, and can move on the surface of the sample SP to be tested to perform large-area measurements. Therefore, the electromagnetic property measurement device 100 of the present invention does not need to cut the sample SP to be tested into a specific size (size) to be accommodated between the two magnetic field structures, but can directly move on the surface of the sample SP to be tested to measure the original sample SP to be tested, thereby reducing the influence of the shape effect on the electromagnetic properties. Therefore, the electromagnetic property measurement device 100 of the present invention can effectively improve the measurement accuracy of the electromagnetic properties of the sample SP to be tested (especially large-area samples or sheet samples).

[0066] Fig.13 It is a bottom view schematically showing an electromagnetic property measuring device according to an embodiment of the present invention. Fig.14 is a schematic side view of an electromagnetic property measurement device according to an embodiment of the present invention from another angle. Fig.13 and Fig.14 In some embodiments, the scattering parameter measurer 150 includes a conductor layer 152 and a dielectric layer 154 overlapping each other, wherein the conductor layer 152 of the scattering parameter measurer 150 closest to the sample SP to be measured includes a microstrip line, a coplanar waveguide (abbreviated as CPW or CPWG) or other stripline structures. In one embodiment, the scattering parameter measurer 150 uses a microstrip line to measure the scattering parameters, of course, the present invention is not limited to this. In one embodiment, the distance between the scattering parameter measurer 150 and the first side S1 can be substantially equal to or less than 7.5 cm, for example, about 7 cm, about 6.5 cm, about 6 cm, about 5.5 cm, about 5 cm, about 4.5 cm, about 4 cm, about 3.5 cm, about 3 cm, about 2.5 cm, about 2 cm, but not limited to this. Specifically, a microstrip line is a transmission line, which is composed of a conductor, a ground and a dielectric layer. The analysis unit 300 may be coupled to the scattering parameter measurer 150 of the electromagnetic property measurement device 100 to analyze the electromagnetic properties of the sample SP. For example, the analysis unit 300 may include a network analyzer, which may be connected to opposite ends of the microstrip line (conducting layer 152) of the scattering parameter measurer 150 via the port 130.

[0067] In some embodiments, the method for measuring the scattering parameters may include using a scattering parameter measurer 150 to measure a first scattering parameter of the electromagnetic property measuring device 100 itself, then using the scattering parameter measurer 150 to measure a second scattering parameter when the electromagnetic property measuring device 100 is placed on the sample SP to be tested but no magnetic field is applied, and finally measuring a third scattering parameter when the electromagnetic property measuring device 100 is placed on the sample SP to be tested and a magnetic field is applied. The analysis unit 300 can then use the equivalent circuit model and the above three scattering parameters to calculate the electromagnetic properties of the sample SP to be tested, such as (multiple) magnetic permeabilities.

[0068] Figure 15 to Figure 16 The figure is a schematic diagram showing the relationship between scattering parameters and frequencies of an electromagnetic property measurement device under different external magnetic fields according to an embodiment of the present invention. Figure 17 to Figure 18 The figure is a schematic diagram of the relationship between the magnetic permeability and the frequency of an electromagnetic property measurement device under different external magnetic fields according to an embodiment of the present invention. Generally speaking, the real part represents absorption and the imaginary part represents loss. Fig.15 The graph shows the relationship between the real part of the scattering parameter and the frequency measured by the scattering parameter measuring device 150 under five different conditions: only the electromagnetic property measuring device 100 itself (marked with "jig"), the device 100 is placed on the sample SP to be tested but no magnetic field is applied (marked with "jig + sample"), the device 100 is placed on the sample SP and a magnetic field of 100Oe is applied (marked with "100"), the device 100 is placed on the sample SP and a magnetic field of 200Oe is applied (marked with "200"), and the device 100 is placed on the sample SP and a magnetic field of 1800Oe is applied (marked with "1800"). Similarly, Fig.16 The graph shows the relationship between the imaginary part of the scattering parameter and the frequency measured by the scattering parameter measurer 150 under the above five different conditions.

[0069] Then, the electromagnetic properties (such as magnetic permeability) of the sample SP to be tested can be extracted using the above results to obtain the following: Fig.17 and Fig.18 The diagram shows the relationship between the magnetic permeability and frequency of the electromagnetic property measurement device under different external magnetic fields. Fig.17 and Fig.18 As can be seen from the graph, the response frequency increases with the increase of the magnetic field, so it can be known that the sample SP to be tested has ferromagnetic resonance characteristics.

[0070] Fig.19 is a flow chart of an electromagnetic property measurement method according to an embodiment of the present invention. Figure 1 and Figure 3, the method of using the above-mentioned electromagnetic property measurement device 100 and / or electromagnetic property measurement system 10 may include the following steps. First, execute step S110 to provide the electromagnetic property measurement system 10 as described above, which includes the electromagnetic property measurement device 100. Then, execute step S120 to place the electromagnetic property measurement device 100 at the first measurement point on the surface of the sample SP to be tested. In some embodiments, the number of electromagnetic property measurement devices 100 may be multiple. That is, this embodiment can provide multiple electromagnetic property measurement devices 100 to perform measurements on the surface of the sample SP to be tested at the same time.

[0071] Next, step S130 is executed to provide current to the electromagnetic property measurement device 100 to generate a magnetic field, and the electromagnetic property measurement device 100 is used to measure the corresponding scattering parameters. Specifically, the control unit 400 can control the power supply unit 500 to provide current to the electromagnetic property measurement device 100 to generate a magnetic field. The analysis unit 300 is configured to measure the scattering parameters at both ends of the microstrip line (conducting layer 152). Next, step S140 is executed to analyze the electromagnetic properties of the sample SP to be tested at the first measurement point based on the scattering parameters. In the present embodiment, the electromagnetic properties may be, for example, multiple magnetic permeabilities, but the present invention is not limited thereto.

[0072] In detail, when performing measurement, the electromagnetic characteristic measuring device 100 is placed on the surface of the sample SP to be measured. At this time, the two ends of the microstrip line (conductor layer 152) of the electromagnetic characteristic measuring device 100 constitute a two-port network. The scattering parameter measurer 150 can, for example, use a frequency sweep method to measure the scattering parameters at both ends of the microstrip line, and calculate the port characteristic impedances of the opposite ends of the conductor 152 (microstrip line) based on the transmission reflection method, and then calculate multiple magnetic permeabilities of the sample SP to be measured.

[0073] Further, calculating multiple magnetic permeabilities of the sample SP to be tested may include the following steps. First, when the electromagnetic property measurement device 100 is not placed on the sample SP to be tested, the first scattering parameter of the microstrip line is measured, and the corresponding first port characteristic impedance is calculated accordingly. Next, the electromagnetic property measurement device 100 is placed on the sample SP to be tested, and a corresponding current is applied to the coil 120 to form an external strong magnetic field (for example, a magnetic field that can be controlled between 0 and the critical magnetic field strength HC) on the surface of the sample SP to be tested, and the second scattering parameter of the microstrip line on the sample SP to be tested and the external strong magnetic field is measured, and the corresponding second port characteristic impedance is calculated accordingly. Next, the third scattering parameter of the microstrip line when the electromagnetic property measurement device 100 is placed on the sample SP to be tested is measured, and the corresponding third port characteristic impedance is calculated accordingly. Finally, based on the above values, the electromagnetic properties (for example: multiple magnetic permeabilities) of the sample SP to be tested at the first measurement point are analyzed using an equivalent circuit extraction model.

[0074] Afterwards, the electromagnetic property measurement device 100 can be moved (for example, along the moving direction D1) to the second measurement point P2 on the surface of the sample SP to be measured for subsequent measurement. Subsequent measurement steps can, for example, repeat steps S130 to S140 until all measurement points on the sample SP to be measured are measured. Repeated or similar technical contents of this embodiment are not described in detail herein. In some embodiments, the electromagnetic property measurement device 100 can be manually moved to the second measurement point P2 by an operator, or can be driven to move to the second measurement point P2 by a moving unit controlled by a control unit 400.

[0075] In some embodiments, the method of moving the electromagnetic property measurement device 100 may include free movement or array scanning movement on the surface of the sample SP to be tested. In addition, the method of placing the electromagnetic property measurement device 100 on the measurement point of the sample SP to be tested may include direct contact, that is, the electromagnetic property measurement device 100 may directly contact the surface of the sample SP to be tested. However, in other embodiments, the method of placing the electromagnetic property measurement device 100 on the measurement point of the sample SP to be tested may also be indirect contact, that is, the electromagnetic property measurement device 100 may maintain a specific distance from the surface of the sample SP to be tested (for example, floating and moving on the surface of the sample SP to be tested).

[0076] Fig. 20 It is a schematic diagram of the relationship between magnetic permeability and frequency obtained by using an electromagnetic property measurement device according to an embodiment of the present invention. Fig.21 This is a schematic diagram of the relationship between magnetic permeability and frequency obtained using an existing electromagnetic property measurement device. Specifically, Fig. 20 as well as Fig.21 The diagrams are respectively different diagrams of the relationship between the magnetic permeability and the frequency obtained by measuring the magnetic permeability of the sample to be tested using the electromagnetic property measuring device 100 of the present invention and the traditional winding method. Since the electromagnetic property measuring device 100 of the present invention can be directly moved on the surface of the original (sheet) sample to be tested SP to perform large-area measurement, there is no need to cut the sample to be tested SP into a specific size (e.g. Fig.21 The shape of the hollow cylinder shown in FIG. 1 is cut to accommodate the two magnetic field structures, thereby reducing the influence of the shape effect on the electromagnetic characteristics. Fig. 20 as well as Fig.21 Comparison of the two charts shows that Fig. 20 The magnetic permeability of the uncut sample measured in the test is about 12.6 at a frequency of 10MHz. Fig.21 The measured magnetic permeability of the cut sample to be tested is about 13.23 at a frequency of 10MHz, and the difference between the two is as high as 7%. Fig. 20 The response frequency of the uncut sample measured in the experiment is about 2.71 GHz, which is also much higher than Fig.21 The measured response frequency of the cut sample to be tested (about 0.03 GHz) is mainly due to the shape effect caused by the shape of the sample to be tested. It can be proved that the electromagnetic property measurement device 100 of the present invention can effectively improve the measurement accuracy and correctness of the electromagnetic properties of the sample to be tested SP (especially large-area samples or sheet samples).

[0077] In summary, the electromagnetic property measurement device of the present invention is provided with a magnetic gap on the first side facing the sample to be measured, so that the magnetic field can be directed to the first side. In this way, the electromagnetic property measurement device faces the sample to be measured with its first side, and can move on the surface of the sample to be measured to perform large-area measurements. Therefore, the electromagnetic property measurement device of the present invention does not need to cut the sample to be measured into a specific size to accommodate it between the two magnetic field structures, but can directly move on the surface of the sample to be measured to measure the original sample to be measured, thereby reducing the influence of the shape effect on the electromagnetic properties. Therefore, the electromagnetic property measurement device of the present invention can effectively improve the measurement accuracy of the electromagnetic properties of the sample to be measured (especially large-area samples or sheet samples).

[0078] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An electromagnetic property measuring device, characterized in that: include: A magnetic conductive structure, comprising a first side facing a sample to be tested and a second side opposite to the first side, wherein the first side has a magnetic gap, wherein the magnetic conductive structure comprises a plurality of magnetic conductive pillars parallel to each other and connecting the first side and the second side, a first magnetic conductive body connecting the plurality of magnetic conductive pillars on the first side, and a second magnetic conductive body connecting the plurality of magnetic conductive pillars on the second side, and the first magnetic conductive body comprises the magnetic gap; Coils, respectively surrounding the plurality of magnetic conductive pillars to generate a magnetic field with the magnetic conductive structure; and The scattering parameter measurer is arranged on the first side and is located within the range of the magnetic field.

2. The electromagnetic property measuring device according to claim 1, characterized in that: The electromagnetic property measuring device is used to move along the surface of the sample to be measured. 3 . The electromagnetic property measuring device according to claim 1 , wherein the current input to the coil is 0 to 30 amperes.

4. The electromagnetic property measuring device according to claim 1, wherein when the magnetic permeability of the sample to be measured is equal to 1, the corresponding magnetic field strength is the critical magnetic field strength, and the strength of the magnetic field generated by the coil and the magnetic conductive structure is 0 to the critical magnetic field strength. 5 . The electromagnetic property measuring device according to claim 1 , wherein the distance of the magnetic gap is between 0.1 and 12 mm. 6 . The electromagnetic property measuring device according to claim 1 , further comprising a bracket disposed on the second side and extending toward the first side to above the magnetic gap. 7 . The electromagnetic property measuring device according to claim 6 , wherein the scattering parameter measurer is disposed on the bracket. The electromagnetic property measuring device according to claim 6 , wherein the bracket is made of a non-magnetic material. 9 . The electromagnetic property measuring device according to claim 1 , wherein the coil comprises a single-core metal wire, a multi-core metal wire, a single-layer metal tube, or a multi-layer metal tube. 10 . The electromagnetic property measuring device according to claim 1 , wherein the scattering parameter measurer comprises a conductor layer and a dielectric layer overlapping each other. 11 . The electromagnetic property measuring device according to claim 1 , wherein a conductor layer of the scattering parameter measuring device close to the sample to be measured comprises a microstrip line or a coplanar waveguide. 12 . The electromagnetic property measuring device according to claim 1 , wherein the distance between the scattering parameter measurer and the first side is equal to or less than 7.5 cm.

13. An electromagnetic property measurement system, comprising: The electromagnetic characteristics measuring device according to any one of claims 1 to 12; An analysis unit, coupled to the electromagnetic property measuring device to analyze the electromagnetic properties of the sample to be tested; as well as The control unit is coupled to the electromagnetic property measuring device and the analysis unit to control the electromagnetic property measuring device and the analysis unit to measure the surface of the sample to be measured.

14. The electromagnetic property measurement system according to claim 13, wherein the analysis unit comprises a network analyzer. 15 . The electromagnetic property measurement system according to claim 13 , wherein the analysis unit is connected to both ends of a microstrip line of the scattering parameter measurer.

16. The electromagnetic property measurement system according to claim 13, wherein the control unit comprises a desktop computer or a portable electronic device. 17 . The electromagnetic property measurement system according to claim 13 , further comprising a power supply unit, coupled to the electromagnetic property measurement device and the control unit, for providing current to the electromagnetic property measurement device to generate the magnetic field.

18. A method for measuring electromagnetic properties, comprising: Providing an electromagnetic property measuring device according to any one of claims 1 to 12; Placing the electromagnetic property measuring device on a first measuring point on the surface of the sample to be measured; Providing current to the electromagnetic property measurement device to generate a magnetic field, and using the electromagnetic property measurement device to measure corresponding scattering parameters; Analyzing the electromagnetic characteristics of the sample to be measured at a first measuring point according to the scattering parameters; as well as The electromagnetic property measuring device is moved to a second measuring point on the surface. 19 . The electromagnetic property measurement method according to claim 18 , wherein a method of moving the electromagnetic property measurement device comprises freely moving or moving on the surface of the sample to be measured in an array scanning manner. 20 . The electromagnetic property measurement method according to claim 18 , wherein the method of placing the electromagnetic property measurement device on the first measurement point comprises direct contact.

21. The electromagnetic property measurement method according to claim 18, wherein the method of placing the electromagnetic property measurement device on the first measurement point comprises indirect contact.

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