High vacuum fully automatic packaging and testing equipment for microelectronic packaging components

Abstract

The invention discloses a high vacuum fully automatic packaging and testing equipment for microelectronic packaging components, which solves the problem of how to design a low-cost fully automatic packaging and testing equipment that occupies a small space and can complete parallel welding with high quality. A structure in which multiple high vacuum chambers are connected in series is adopted to realize the automatic packaging production flow operation of high vacuum sealed devices. The high vacuum chambers in series include a vacuum pretreatment chamber, a vacuum activation chamber, a vacuum visual alignment and parallel welding chamber, a vacuum test chamber, and a vacuum transfer chamber; each process chamber is isolated and connected to each other through a gate valve; the MEMS device first enters the vacuum pretreatment chamber in sequence through a feed gate, is transferred to the vacuum activation chamber by a transfer mechanism, and then is transferred to the vacuum visual alignment and parallel welding chamber, is parallel welded by a parallel welding mechanism, and then enters the vacuum test chamber for testing, and finally enters the vacuum transfer chamber and is discharged from the discharge gate.

Description

Technical Field

[0001] The invention relates to a microelectronic packaging device, and in particular to a high vacuum fully automatic packaging and testing device and a testing method for completing a microelectronic packaging component. Background Art

[0002] Microelectronic packaging and assembly (MEMS devices) is a technical process that uses membrane technology and micro-machining technology to arrange, paste, fix and connect chips and other elements on a frame or substrate, lead out wiring terminals, and fix them by encapsulating with plastic insulating media. Then, according to the electrical schematic or logic diagram, microelectronics technology and high-density assembly technology are used to assemble microelectronic devices and micro-components into applicable and producible electronic components, parts or a system. At present, vacuum packaging equipment is changing from a single machine to a multi-chamber that can perform multiple processes (such as baking, activation, alignment, sealing, and testing). High-vacuum multi-chamber production lines have emerged, which greatly improve the transportation efficiency of microelectronic packaging components under high vacuum. How to design a low-cost, small-footprint, and high-quality fully automatic packaging and testing equipment that can complete parallel sealing has become a problem that urgently needs to be solved. Summary of the invention

[0003] The invention provides a high vacuum fully automatic packaging and testing device for a microelectronic packaging assembly, which solves the technical problem of how to design a low-cost fully automatic packaging and testing device that occupies a small space and can complete parallel sealing and welding with high quality.

[0004] The present invention solves the above technical problems through the following technical solutions:

[0005] The overall concept of the present invention is: adopting a structure of multiple high vacuum chambers connected in series to realize the automated packaging production flow operation of high vacuum sealed devices. The high vacuum chambers connected in series include a vacuum pretreatment chamber, a vacuum activation chamber, a vacuum visual alignment and parallel sealing chamber, a vacuum test chamber, and a vacuum transfer chamber; each process chamber is isolated and connected to each other through a gate valve; the MEMS device first enters the vacuum pretreatment chamber through a feed gate in turn, and is then transferred to the vacuum activation chamber by a transfer mechanism, and then transferred to the vacuum visual alignment and parallel sealing chamber, and parallel sealing is performed by a parallel welding mechanism, and then enters the vacuum test chamber for testing, and finally enters the vacuum transfer chamber and is discharged from the discharge gate.

[0006] A high-vacuum fully automatic packaging and testing equipment for microelectronic packaging components comprises a bracket, on which, from left to right, a vacuum pretreatment chamber, a vacuum activation chamber, a vacuum visual alignment and parallel welding chamber, a vacuum testing chamber and a vacuum transfer chamber are arranged in sequence, a gate valve is arranged between two adjacent vacuum chambers, a loading door is arranged on the left side elevation of the vacuum pretreatment chamber, and a discharge port is arranged on the right side elevation of the vacuum transfer chamber; a baking chamber multi-layer tray bracket is arranged in the vacuum pretreatment chamber, an activation chamber multi-layer tray bracket is arranged in the vacuum activation chamber, a first tray transfer mechanism is arranged between the baking chamber multi-layer tray bracket and the activation chamber multi-layer tray bracket, and a first tray transfer mechanism is arranged in the vacuum visual alignment and parallel welding chamber respectively. A storage tray bracket, an X-direction welding station and a Y-direction welding station are provided, a second tray transfer mechanism is provided between the activation chamber multi-layer tray bracket and the storage tray bracket, a third tray transfer mechanism is provided between the storage tray bracket and the X-direction welding station, a fourth tray transfer mechanism is provided between the X-direction welding station and the Y-direction welding station, a test station is provided in the vacuum test chamber, a material unloading station is provided in the vacuum transfer chamber, a fifth tray transfer mechanism and a sixth tray transfer mechanism are respectively provided between the Y-direction welding station and the test station, and a seventh tray transfer mechanism is provided between the test station and the unloading station; the structures of the seven tray transfer mechanisms are exactly the same.

[0007] A welding mechanism walking gantry is arranged in the vacuum visual alignment and parallel sealing welding chamber, a horizontally arranged transverse guide rail for aligning and grabbing cover plates is arranged on the front side of the crossbeam of the welding mechanism walking gantry, a grabbing mechanism mounting slider is movably arranged on the transverse guide rail for aligning and grabbing cover plates, a grabbing mechanism mounting slider is connected with a grabbing alignment nut connecting block, the grabbing alignment nut connecting block is screwed together with the grabbing horizontal alignment lead screw through the grabbing alignment nut, one end of the grabbing horizontal alignment lead screw is connected with the vertical lead screw after reversing through a 90-degree commutator, and the other end of the vertical lead screw after reversing is connected with the grabbing alignment drive motor outside the sealing chamber through a sealing magnetic fluid; a horizontally arranged welding transverse guide rail is arranged on the rear side of the crossbeam of the welding mechanism walking gantry, a welding mechanism mounting slider is movably arranged on the welding transverse guide rail, and a welding mechanism mounting slider is arranged on the welding mechanism mounting slider A welding alignment nut connection block is connected to the top, and the welding alignment nut connection block is screwed together with the welding horizontal alignment lead screw through the welding alignment nut, one end of the welding horizontal alignment lead screw is connected to another reversing vertical lead screw through another 90-degree commutator, and the other end of the other reversing vertical lead screw is connected to the welding alignment drive motor outside the sealed cavity through another sealed magnetic fluid; it is characterized in that a rotating table and a visual system are respectively installed on the grabbing alignment nut connection block, a grabbing mechanism is connected to the lower bottom surface of the rotating table, and the rotating table is connected to the rotating drive motor enclosed in the cavity; a parallel welding mechanism is connected to the welding alignment nut connection block; a welding station tray is arranged directly below the crossbeam of the welding mechanism walking gantry, and a welding station cover plate and a welding station tube shell are respectively arranged in the welding station tray.

[0008] A box-shaped frame body is arranged on the welded alignment nut connection block, an eccentric wheel is arranged on the front elevation of the front side vertical plate of the box-shaped frame body, a closed shell of the eccentric wheel driving motor is arranged in the box-shaped frame body, an eccentric wheel driving motor is arranged in the closed shell, air is sealed in the closed shell, the output shaft of the eccentric wheel driving motor is connected with the eccentric wheel shaft of the eccentric wheel through the sealed magnetic fluid, a U-shaped frame plate is buckled on the front elevation of the front side vertical plate, and the eccentric wheel is movably arranged in the frame of the U-shaped frame plate, A left lifting guide block and a right lifting guide block are fixedly arranged in parallel with each other on the front side vertical surface of the U-shaped frame plate, a left guide groove in the up-down direction is fixedly arranged on the front side vertical plate on the left side of the U-shaped frame plate, and a right guide groove in the up-down direction is fixedly arranged on the front side vertical plate on the right side of the U-shaped frame plate. The left column of the half-mouth-shaped lifting frame is arranged in the left guide groove in the up-down direction, and the right column of the half-mouth-shaped lifting frame is arranged in the right guide groove in the up-down direction. A A lifting block of the lifting frame is connected to the lifting block of the lifting frame, and a lifting guide wheel shaft is connected to the lifting guide wheel shaft. A lifting guide wheel is arranged on the lifting guide wheel shaft, and the lifting guide wheel is top-connected with the outer edge side of the eccentric wheel; a left lifting slider is arranged on the left lifting guide rail block, and a right lifting slider is arranged on the right lifting guide rail block. A left parallel welding wheel mechanism is fixedly connected to the left lifting slider, and a right parallel welding wheel mechanism is fixedly connected to the right lifting slider. The structure of the left parallel welding wheel mechanism is exactly the same as that of the right parallel welding wheel mechanism; on the left A left parallel welding wheel bracket of a left parallel welding wheel mechanism is connected to the lifting slide block, a left welding wheel assembly is connected to the lower end of the left parallel welding wheel bracket, a left welding wheel is connected to the left welding wheel assembly, a left welding wheel is fixedly connected to the upper end of the left parallel welding wheel bracket with a weight left support plate, a left weight connecting rod is arranged on the left support plate of the weight, and the left weight is placed on the left support plate of the weight through the connecting hole thereon; a sealing welding assembly is arranged directly below between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, and the left welding wheel is crimped onto the left weld of the sealing welding assembly.

[0009] The left welding wheel assembly is connected to the lower end of the left parallel welding wheel bracket through a left L-shaped hanging plate, and the left L-shaped hanging plate and the lower end of the left parallel welding wheel bracket are connected together through an insulating gasket and an insulating screw; the weight of the left weight placed on the left parallel welding wheel mechanism is the same as the weight of the right weight placed on the right parallel welding wheel mechanism; a nylon lifting screw is arranged on the lower bottom surface of the left support plate of the weight, and the lifting block of the lifting frame is arranged directly below the nylon lifting screw.

[0010] The first step is to place the tray with the tube shell and the cover plate into the vacuum pretreatment chamber through the loading door, close the loading door, evacuate the vacuum pretreatment chamber, and then open the gate valves set between the vacuum chambers;

[0011] In the second step, the pallet with the tube shell and the cover plate is transferred to the X-direction welding station through the first pallet transfer mechanism, the second pallet transfer mechanism, and the third pallet transfer mechanism in turn, and then transferred to the Y-direction welding station by the fourth pallet transfer mechanism for parallel sealing in the Y direction, and then transferred to the test station by the fifth pallet transfer mechanism and the sixth pallet transfer mechanism for testing, and finally transferred to the unloading station by the seventh pallet transfer mechanism.

[0012] A welding mechanism walking gantry is arranged in the vacuum visual alignment and parallel sealing welding chamber, and an alignment grabbing cover plate transverse moving guide rail is arranged horizontally on the front side of the crossbeam of the welding mechanism walking gantry, and a grabbing mechanism mounting slide block is movably arranged on the alignment grabbing cover plate transverse moving guide rail, and a grabbing mechanism mounting slide block is connected with a grabbing alignment nut connecting block, and the grabbing alignment nut connecting block is screwed together with the grabbing horizontal alignment lead screw through the grabbing alignment nut, and one end of the grabbing horizontal alignment lead screw is connected with the reversing vertical lead screw through a 90-degree commutator, and the other end of the reversing vertical lead screw is connected with the grabbing alignment drive motor outside the sealing chamber through a sealing magnetic fluid; on the rear side of the crossbeam of the welding mechanism walking gantry, a horizontal alignment nut is arranged horizontally on the rear side of the crossbeam of the welding mechanism walking gantry, and a grabbing mechanism mounting slide block is movably arranged on the reversing guide rail, and a grabbing alignment nut connecting block is connected with the grabbing horizontal alignment lead screw through the grabbing alignment nut. A welding transverse guide rail is provided, a welding mechanism mounting slide block is movably provided on the welding transverse guide rail, a welding alignment nut connection block is connected to the welding mechanism mounting slide block, the welding alignment nut connection block is screwed together with the welding horizontal alignment lead screw through the welding alignment nut, one end of the welding horizontal alignment lead screw is connected to another reversing vertical lead screw through another 90-degree commutator, and the other end of the other reversing vertical lead screw is connected to the welding alignment drive motor outside the sealed cavity through another sealed magnetic fluid; a rotating table and a visual system are respectively installed on the grabbing alignment nut connection block, a grabbing mechanism is connected to the lower bottom surface of the rotating table, and the rotating table is connected to the rotating drive motor enclosed in the cavity. ; A parallel welding mechanism is connected to the welding alignment nut connection block; a welding station tray is arranged directly below the crossbeam of the walking gantry of the welding mechanism, and a welding station cover plate and a welding station tube shell are respectively arranged in the welding station tray; a box-shaped frame body is arranged on the welding alignment nut connection block, and a U-shaped frame plate is buckled on the front facade of the front side vertical plate of the box-shaped frame body, and a left lifting guide block and a right lifting guide block are respectively fixedly arranged parallel to each other on the front side facade of the U-shaped frame plate, a left lifting slide block is arranged on the left lifting guide block, and a right lifting slide block is arranged on the right lifting guide block, a left parallel welding wheel mechanism is fixedly connected to the left lifting slide block, and a right parallel welding wheel mechanism is fixedly connected to the right lifting slide block The structure of the left parallel welding wheel mechanism is exactly the same as that of the right parallel welding wheel mechanism; the left parallel welding wheel bracket of the left parallel welding wheel mechanism is connected to the left lifting slide block, the left welding wheel assembly is connected to the lower end of the left parallel welding wheel bracket, the left welding wheel is connected to the left welding wheel assembly, the left welding wheel is fixedly connected to the upper end of the left parallel welding wheel bracket with a weight left support plate, a left weight connecting rod is arranged on the weight left support plate, and the left weight is placed on the weight left support plate through the connecting hole thereon; a sealing welding assembly is arranged directly below the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, the left welding wheel is pressed on the left welding seam of the sealing welding assembly, and the right welding wheel on the right parallel welding wheel mechanism is pressed on the right welding seam of the sealing welding assembly; it is characterized by the following steps:

[0013] The visual system takes pictures of the welding station cover plate and the welding station tube shell respectively arranged in the welding station tray. According to the photographing position, the grabbing and aligning driving motor outside the sealed cavity drives the grabbing and aligning nut connecting block to accurately align the welding station cover plate, and the grabbing mechanism grabs the welding station cover plate; the welding alignment driving motor outside the sealed cavity drives the grabbing and aligning nut connecting block to accurately align the grabbed welding station cover plate above the welding station tube shell, and places the welding station cover plate on the welding station tube shell;

[0014] The visual system takes a picture of the welding station tube shell with the welding station cover plate placed thereon. According to the photographing position, the welding alignment drive motor outside the sealing cavity drives the welding alignment nut connecting block, driving the parallel welding mechanism to accurately align to the top of the welding station tube shell with the welding station cover plate placed thereon, and then the parallel welding mechanism performs parallel sealing welding on the welding station tube shell with the welding station cover plate placed thereon.

[0015] An eccentric wheel is arranged on the front facade of the front side vertical plate of the box-shaped frame body, and a closed shell of an eccentric wheel driving motor is arranged in the box-shaped frame body, and the eccentric wheel driving motor is arranged in the closed shell, and air is enclosed in the closed shell, and the output shaft of the eccentric wheel driving motor is connected with the eccentric wheel shaft of the eccentric wheel after sealing the magnetic fluid; a left guide rail groove in the up-down direction is fixedly arranged on the front side vertical plate on the left side of the U-shaped frame plate, and a right guide rail groove in the up-down direction is fixedly arranged on the front side vertical plate on the right side of the U-shaped frame plate, the left side column of the half-mouth-shaped lifting frame is arranged in the left guide rail groove in the up-down direction, and the right side column of the half-mouth-shaped lifting frame is arranged in the right guide rail groove in the up-down direction, and a lifting block of the lifting frame is fixedly connected to the lower bottom surface of the middle part of the cross beam of the half-mouth-shaped lifting frame, and a lifting guide wheel axle is connected to the lifting block of the lifting frame, and a lifting guide wheel axle is arranged on the lifting guide wheel axle, and the lifting guide wheel is connected to the eccentric wheel outer edge side surface;

[0016] When the left welding wheel and the right welding wheel are welding the two parallel welds of the sealing welding assembly, the lifting block of the lifting frame on the half-mouth-shaped lifting frame is arranged directly below the nylon lifting screw. At this time, the left parallel welding wheel mechanism and the right parallel welding wheel mechanism are in a disengaged state from the half-mouth-shaped lifting frame;

[0017] When the left welding wheel and the right welding wheel have completed welding the two parallel welds of the sealing welding assembly, the eccentric wheel drive motor arranged in the closed shell is started, and the eccentric wheel lifts the half-mouth shaped lifting frame through the lifting guide wheel. The half-mouth shaped lifting frame lifts the left welding wheel and the right welding wheel through the top-connected weight left support plate and the weight right support plate in the right parallel welding wheel mechanism, and then separates them from the sealing welding assembly.

[0018] The patent of this invention can automatically complete the high vacuum heating pretreatment of packaged devices, high vacuum getter high temperature activation, high vacuum high precision visual recognition robot positioning and picking, high vacuum sealing parallel welding and other functions in the equipment. Each process chamber can be flexibly customized according to the actual packaging products of customers. Intelligent process configuration meets the packaging production needs of products with different specifications. The device can be packaged in vacuum to improve the accuracy and life of the sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is the overall equipment appearance diagram of the present invention;

[0020] Figure 2 It is a structural schematic diagram of the entire packaging test process of the present invention;

[0021] Figure 3 It is a structural schematic diagram of a mechanism for completing X-direction parallel welding in the vacuum visual alignment and parallel sealing welding chamber 404 of the present invention;

[0022] Figure 4 It is a structural schematic diagram of the welding mechanism walking gantry 330 of the present invention;

[0023] Figure 5 It is a structural schematic diagram of the adaptive parallel sealing mechanism of the present invention;

[0024] Figure 6 It is a structural schematic diagram of the upper and lower guide rail seats of the two parallel welding wheel mechanisms of the present invention and the lifting guide rail seats of the half-mouth-shaped lifting frame 317;

[0025] Figure 7 It is a structural schematic diagram of a half-mouth-shaped lifting frame 317 of the present invention;

[0026] Figure 8 It is a structural schematic diagram of the U-shaped frame plate 313 of the present invention;

[0027] Fig. 9 It is a diagram showing the coordination relationship between the eccentric wheel 323, the lifting guide wheel 324, the lifting block 326 of the lifting frame and the half-mouth-shaped lifting frame 317 of the present invention;

[0028] Fig.10 It is a diagram showing the matching relationship between the lifting block 326 of the lifting frame, the weight left support plate 306 and the nylon lifting screw 327 of the present invention;

[0029] Fig.11 It is a structural schematic diagram of the left parallel welding wheel mechanism bracket of the present invention;

[0030] Fig.12 It is a structural schematic diagram of the left welding wheel assembly 301 of the present invention. DETAILED DESCRIPTION

[0031] The present invention is described in detail below in conjunction with the accompanying drawings:

[0032] A high vacuum fully automatic packaging and testing equipment for microelectronic packaging components, including a bracket 401, on which, from left to right, a vacuum pretreatment chamber 402, a vacuum activation chamber 403, a vacuum visual alignment and parallel welding chamber 404, a vacuum testing chamber 405 and a vacuum transfer chamber 406 are arranged in sequence, a gate valve 104 is arranged between two adjacent vacuum chambers, a loading door 105 is arranged on the left vertical surface of the vacuum pretreatment chamber 40), and a discharge port is arranged on the right vertical surface of the vacuum transfer chamber 406; a baking chamber multi-layer tray bracket 118 is arranged in the vacuum pretreatment chamber 402, an activation chamber multi-layer tray bracket 151 is arranged in the vacuum activation chamber 403, a first tray transfer mechanism 407 is arranged between the baking chamber multi-layer tray bracket 118 and the activation chamber multi-layer tray bracket 151, and a material storage tray 106 is arranged in the vacuum visual alignment and parallel welding chamber 404. A tray bracket 409, an X-direction welding station 411 and a Y-direction welding station 413, a second tray transfer mechanism 408 is arranged between the activation chamber multi-layer tray bracket 151 and the storage tray bracket 409, a third tray transfer mechanism 410 is arranged between the storage tray bracket 409 and the X-direction welding station 411, a fourth tray transfer mechanism 412 is arranged between the X-direction welding station 411 and the Y-direction welding station 413, a test station 416 is arranged in the vacuum test chamber 405, a discharge station 418 is arranged in the vacuum transfer chamber 406, a fifth tray transfer mechanism 414 and a sixth tray transfer mechanism 415 are respectively arranged between the Y-direction welding station 413 and the test station 416, and a seventh tray transfer mechanism 417 is arranged between the test station 416 and the discharge station 418; the structures of the seven tray transfer mechanisms are exactly the same.

[0033] A welding mechanism walking gantry 330 is arranged in the vacuum visual alignment and parallel sealing chamber 404, and an alignment grabbing cover plate transverse guide rail 331 is horizontally arranged on the front side of the crossbeam of the welding mechanism walking gantry 330, and a grabbing mechanism mounting slider 332 is movably arranged on the alignment grabbing cover plate transverse guide rail 331, and a grabbing alignment nut connecting block 333 is connected to the grabbing mechanism mounting slider 332, and the grabbing alignment nut connecting block 333 is connected to the grabbing horizontal alignment nut 334 through the grabbing alignment nut 334. The positioning lead screw 335 is screwed together, one end of the grabbing horizontal positioning lead screw 335 is connected to the reversing vertical lead screw through a 90-degree commutator 336, and the other end of the reversing vertical lead screw is connected to the grabbing positioning drive motor outside the sealed chamber through a sealed magnetic fluid; on the rear side of the crossbeam of the welding mechanism walking gantry 330, a welding transverse guide rail 337 is horizontally arranged, and a welding mechanism mounting slider 338 is movably arranged on the welding transverse guide rail 337, and a welding positioning nut connecting block 339 is connected to the welding mechanism mounting slider 338, and the welding positioning nut connecting block 339 is screwed to the welding horizontal positioning lead screw 341 through a welding positioning nut 340, one end of the welding horizontal positioning lead screw 341 is connected to another reversing vertical lead screw through another 90-degree commutator 342, and the other end of the other reversing vertical lead screw is connected to the welding positioning drive motor outside the sealed chamber through another sealed magnetic fluid; on the grabbing positioning nut connecting block 333, respectively, It is equipped with a rotating table 343 and a visual system 346. A gripping mechanism 344 is connected to the lower bottom surface of the rotating table 343. The rotating table 343 is connected to a rotating drive motor 345 enclosed in a cavity. A parallel welding mechanism 347 is connected to the welding alignment nut connecting block 339. A welding station tray 348 is arranged directly below the crossbeam of the welding mechanism walking gantry 330, and a welding station cover plate 349 and a welding station tube shell 350 are respectively arranged in the welding station tray 348.

[0034] A box-shaped frame body 315 is arranged on the welding alignment nut connecting block 339, an eccentric wheel 323 is arranged on the front facade of the front side vertical plate 316 of the box-shaped frame body 315, a closed shell 328 of the eccentric wheel driving motor is arranged in the box-shaped frame body 315, an eccentric wheel driving motor is arranged in the closed shell 328, air is enclosed in the closed shell 328, the output shaft of the eccentric wheel driving motor is connected to the eccentric wheel shaft 322 of the eccentric wheel 323 after sealing the magnetic fluid, a U-shaped frame plate 313 is buckled on the front facade of the front side vertical plate 316, and the eccentric wheel 323 is movably arranged on the frame of the U-shaped frame plate 313 In the embodiment, on the front side vertical surface of the U-shaped frame plate 313, a left lifting guide block 312 and a right lifting guide block 314 are fixedly arranged in parallel with each other, on the front side vertical plate 316 on the left side of the U-shaped frame plate 313, a left guide groove 318 in the vertical direction is fixedly arranged, and on the front side vertical plate 316 on the right side of the U-shaped frame plate 313, a right guide groove 319 in the vertical direction is fixedly arranged, the left side column 320 of the half-mouth-shaped lifting frame 317 is arranged in the left guide groove 318 in the vertical direction, and the right side column 321 of the half-mouth-shaped lifting frame 317 is arranged in the right guide groove 319 in the vertical direction, and on the lower bottom surface of the middle part of the crossbeam of the half-mouth-shaped lifting frame 317 , a lifting frame lifting block 326 is fixedly connected, and a lifting guide wheel shaft 325 is connected to the lifting frame lifting block 326, and a lifting guide wheel 324 is arranged on the lifting guide wheel shaft 325, and the lifting guide wheel 324 is top-connected with the outer edge side of the eccentric wheel 323; a left lifting slider 304 is arranged on the left lifting guide rail block 312, and a right lifting slider is arranged on the right lifting guide rail block 314. A left parallel welding wheel mechanism is fixedly connected to the left lifting slider 304, and a right parallel welding wheel mechanism is fixedly connected to the right lifting slider. The structure of the left parallel welding wheel mechanism is exactly the same as that of the right parallel welding wheel mechanism; on the left lifting slider 3 04 is connected to a left parallel welding wheel bracket 305 of a left parallel welding wheel mechanism, a left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305, a left welding wheel 302 is connected to the left welding wheel assembly 301, a left weight support plate 306 is fixedly connected to the upper end of the left parallel welding wheel bracket 305, a left weight connecting rod 307 is provided on the weight left support plate 306, and a left weight 308 is placed on the weight left support plate 306 through a connecting hole 309 thereon; a sealing welding assembly 329 is provided directly below between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, and the left welding wheel 302 is crimped onto the left weld of the sealing welding assembly 329.

[0035] The left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305 through the left L-shaped hanging plate 303, and the left L-shaped hanging plate 303 and the lower end of the left parallel welding wheel bracket 305 are connected together through an insulating gasket 310 and an insulating screw 311; the weight of the left weight 308 placed on the left parallel welding wheel mechanism is the same as the weight of the right weight placed on the right parallel welding wheel mechanism; a nylon lifting screw 327 is arranged on the lower bottom surface of the left weight support plate 306, and the lifting frame lifting block 326 is arranged directly below the nylon lifting screw 327.

[0036] A high vacuum fully automatic packaging and testing method for a microelectronic packaging assembly, characterized in that, in the first step, a tray with a tube shell and a cover plate is placed into a vacuum pretreatment chamber 402 through a loading door 105, the loading door 105 is closed, and after the vacuum pretreatment chamber 402 is evacuated, a gate valve 104 arranged between the vacuum chambers is opened;

[0037] In the second step, the pallet with the tube shell and the cover plate passes through the first pallet transfer mechanism 407, the second pallet transfer mechanism 408, and the third pallet transfer mechanism 410 in sequence, and is transferred to the X-direction welding station 411 for parallel sealing in the X direction, and then is transferred to the Y-direction welding station 413 by the fourth pallet transfer mechanism 412 for parallel sealing in the Y direction, and then is transferred to the test station 416 by the fifth pallet transfer mechanism 414 and the sixth pallet transfer mechanism 415 for testing, and finally is transferred to the unloading station 418 by the seventh pallet transfer mechanism 417.

[0038] A welding mechanism walking gantry 330 is arranged in the vacuum visual alignment and parallel sealing chamber 404, and an alignment grabbing cover plate transverse guide rail 331 is horizontally arranged on the front side of the crossbeam of the welding mechanism walking gantry 330, and a grabbing mechanism mounting slider 332 is movably arranged on the alignment grabbing cover plate transverse guide rail 331, and a grabbing mechanism mounting slider 332 is connected to a grabbing mechanism mounting slider 332, and the grabbing alignment nut connecting block 333 is screwed together with a grabbing horizontal alignment lead screw 335 through a grabbing alignment nut 334, and one end of the grabbing horizontal alignment lead screw 335 is connected to the reversing vertical lead screw through a 90-degree commutator 336, and the reversing vertical lead screw The other end of the lead screw is connected to the grabbing alignment drive motor outside the sealed cavity through a sealed magnetic fluid; a welding transverse guide rail 337 is horizontally arranged on the rear side of the crossbeam of the welding mechanism walking gantry 330, and a welding mechanism mounting slider 338 is movably arranged on the welding transverse guide rail 337, and a welding alignment nut connecting block 339 is connected to the welding mechanism mounting slider 338, and the welding alignment nut connecting block 339 is screwed together with the welding horizontal alignment lead screw 341 through a welding alignment nut 340, and one end of the welding horizontal alignment lead screw 341 is connected to another reversing rear vertical lead screw through another 90-degree commutator 342, and the other reversing rear vertical lead screw is connected to another reversing rear vertical lead screw. The other end of the lead screw is connected to the welding alignment drive motor outside the sealed cavity through another sealed magnetic fluid; a rotating table 343 and a visual system 346 are respectively installed on the grabbing alignment nut connecting block 333, a grabbing mechanism 344 is connected to the lower bottom surface of the rotating table 343, and the rotating table 343 is connected to the rotating drive motor 345 enclosed in the cavity; a parallel welding mechanism 347 is connected to the welding alignment nut connecting block 339; a welding station tray 348 is arranged directly below the crossbeam of the welding mechanism walking gantry 330, and a welding station cover plate 349 and a welding station tube shell 350 are respectively arranged in the welding station tray 348; A box-shaped frame body 315 is arranged on the nut connection block 339, and a U-shaped frame plate 313 is buckled on the front elevation of the front side vertical plate 316 of the box-shaped frame body 315. A left lifting guide block 312 and a right lifting guide block 314 are fixedly arranged in parallel with each other on the front side vertical surface of the U-shaped frame plate 313, a left lifting slide block 304 is arranged on the left lifting guide block 312, and a right lifting slide block is arranged on the right lifting guide block 314. A left parallel welding wheel mechanism is fixedly connected to the left lifting slide block 304, and a right parallel welding wheel mechanism is fixedly connected to the right lifting slide block, and the structure of the left parallel welding wheel mechanism is exactly the same as that of the right parallel welding wheel mechanism.A left parallel welding wheel bracket 305 of a left parallel welding wheel mechanism is connected to the left lifting slide block 304, a left welding wheel assembly 301 is connected to the lower end of the left parallel welding wheel bracket 305, a left welding wheel 302 is connected to the left welding wheel assembly 301, a left weight support plate 306 is fixedly connected to the upper end of the left parallel welding wheel bracket 305, a left weight connecting rod 307 is provided on the weight left support plate 306, and a left weight 308 is placed on the weight left support plate 306 through a connecting hole 309 thereon; a sealing welding assembly 329 is provided directly below between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism, the left welding wheel 302 is pressed onto the left welding seam of the sealing welding assembly 329, and the right welding wheel on the right parallel welding wheel mechanism is pressed onto the right welding seam of the sealing welding assembly 329; it is characterized by the following steps:;

[0039] The visual system 346 takes pictures of the welding station cover plate 349 and the welding station tube shell 350 respectively arranged in the welding station tray 348. According to the photographing position, the grabbing alignment driving motor outside the sealed cavity drives the grabbing alignment nut connecting block 333 to accurately align the welding station cover plate 349, and the grabbing mechanism 344 grabs the welding station cover plate 349; the welding alignment driving motor outside the sealed cavity drives the grabbing alignment nut connecting block 333 to accurately align the grabbed welding station cover plate 349 above the welding station tube shell 350, and places the welding station cover plate 349 on the welding station tube shell 350;

[0040] The visual system 346 takes a picture of the welding station tube shell 350 on which the welding station cover plate 349 has been placed. According to the photographing position, the welding alignment drive motor outside the sealed cavity drives the welding alignment nut connecting block 339, driving the parallel welding mechanism 347 to accurately align to the top of the welding station tube shell 350 on which the welding station cover plate 349 has been placed, and then the parallel welding mechanism 347 performs parallel sealing on the welding station tube shell 350 on which the welding station cover plate 349 has been placed.

[0041] An eccentric wheel 323 is arranged on the front facade of the front side vertical plate 316 of the box-shaped frame body 315, and a closed housing 328 of an eccentric wheel driving motor is arranged in the box-shaped frame body 315. An eccentric wheel driving motor is arranged in the closed housing 328, and air is sealed in the closed housing 328. The output shaft of the eccentric wheel driving motor is connected to the eccentric wheel shaft 322 of the eccentric wheel 323 through a sealed magnetic fluid; a left guide rail groove 318 in the up-down direction is fixedly arranged on the front side vertical plate 316 on the left side of the U-shaped frame plate 313, and a left guide rail groove 318 in the up-down direction is fixedly arranged on the front side vertical plate 316 on the right side of the U-shaped frame plate 313. 16, a right guide groove 319 in the up-down direction is fixedly arranged, a left column 320 of a half-mouth-shaped lifting frame 317 is arranged in the left guide groove 318 in the up-down direction, a right column 321 of the half-mouth-shaped lifting frame 317 is arranged in the right guide groove 319 in the up-down direction, a lifting frame lifting block 326 is fixedly connected to the lower bottom surface of the middle part of the cross beam of the half-mouth-shaped lifting frame 317, a lifting guide wheel shaft 325 is connected to the lifting frame lifting block 326, a lifting guide wheel shaft 325 is arranged on the lifting guide wheel shaft 325, and the lifting guide wheel 324 is connected to the outer edge side of the eccentric wheel 323;

[0042] When the left welding wheel 302 and the right welding wheel are welding the two parallel welds of the sealing welding assembly 329, the lifting frame lifting block 326 on the half-mouth-shaped lifting frame 317 is arranged directly below the nylon lifting screw 327. At this time, the left parallel welding wheel mechanism and the right parallel welding wheel mechanism are in a disengaged state from the half-mouth-shaped lifting frame 317.

[0043] When the left welding wheel 302 and the right welding wheel have completed welding the two parallel welds of the sealing welding assembly 329, the eccentric wheel drive motor arranged in the closed shell 328 is started, and the eccentric wheel 323 lifts the half-mouth-shaped lifting frame 317 through the lifting guide wheel 324. The half-mouth-shaped lifting frame 317 lifts the left welding wheel 302 and the right welding wheel through the top-connected weight left support plate 306 and the weight right support plate in the right parallel welding wheel mechanism, and then separates them from the sealing welding assembly 329.

Claims

1. A high vacuum fully automatic packaging and testing device for a microelectronic packaging component, comprising a support (401), on which a vacuum pretreatment chamber (402), a vacuum activation chamber (403), a vacuum visual alignment and parallel welding chamber (404), a vacuum testing chamber (405) and a vacuum transfer chamber (406) are arranged in sequence from left to right, a gate valve (104) is arranged between two adjacent vacuum chambers, a loading door (105) is arranged on the left side elevation of the vacuum pretreatment chamber (402), and a discharge port is arranged on the right side elevation of the vacuum transfer chamber (406); the characteristics are as follows: A baking chamber multi-layer tray support (118) is arranged in the vacuum pretreatment chamber (402), an activation chamber multi-layer tray support (151) is arranged in the vacuum activation chamber (403), a first tray transfer mechanism (407) is arranged between the baking chamber multi-layer tray support (118) and the activation chamber multi-layer tray support (151), a material storage tray support (409), an X-direction welding station (411) and a Y-direction welding station (413) are arranged in the vacuum visual alignment and parallel welding chamber (404), and a first tray transfer mechanism (407) is arranged between the activation chamber multi-layer tray support (151) and the activation chamber multi-layer tray support (151). A second pallet transfer mechanism (408) is provided between the material storage pallet support (409), a third pallet transfer mechanism (410) is provided between the material storage pallet support (409) and the X-direction welding station (411), a fourth pallet transfer mechanism (412) is provided between the X-direction welding station (411) and the Y-direction welding station (413), a test station (416) is provided in the vacuum test chamber (405), a material unloading station (418) is provided in the vacuum transfer chamber (406), and a material unloading station (419) is provided between the Y-direction welding station (413) and the test station. (416), a fifth pallet transfer mechanism (414) and a sixth pallet transfer mechanism (415) are respectively arranged between them, and a seventh pallet transfer mechanism (417) is arranged between the test station (416) and the unloading station (418); the structures of the seven pallet transfer mechanisms are exactly the same; in the vacuum visual alignment and parallel sealing welding chamber (404), a welding mechanism walking gantry (330) is arranged, and on the front side of the crossbeam of the welding mechanism walking gantry (330), an alignment grabbing cover plate transverse guide rail (331) is horizontally arranged, and on the alignment grabbing cover plate A grabbing mechanism installation slider (332) is movably provided on the plate transverse guide rail (331), a grabbing mechanism installation slider (332) is connected to a grabbing alignment nut connection block (333), the grabbing alignment nut connection block (333) is screwed together with a grabbing horizontal alignment lead screw (335) through a grabbing alignment nut (334), one end of the grabbing horizontal alignment lead screw (335) is connected to a reversing vertical lead screw through a 90-degree commutator (336), and the other end of the reversing vertical lead screw is connected to a grabbing alignment drive motor outside the sealed cavity through a sealed magnetic fluid;A welding lateral guide rail (337) is horizontally arranged on the rear side of the crossbeam of the welding mechanism walking gantry (330), a welding mechanism mounting slide block (338) is movably arranged on the welding lateral guide rail (337), a welding alignment nut connection block (339) is connected to the welding mechanism mounting slide block (338), the welding alignment nut connection block (339) is screwed together with a welding horizontal alignment lead screw (341) through a welding alignment nut (340), one end of the welding horizontal alignment lead screw (341) is connected to another reversing rear vertical lead screw through another 90-degree commutator (342), and the other end of the other reversing rear vertical lead screw is connected to a sealing magnetic fluid through another sealing magnetic fluid. The welding alignment drive motor outside the sealed cavity is connected together; a rotating table (343) and a visual system (346) are respectively installed on the grabbing alignment nut connection block (333); a grabbing mechanism (344) is connected to the lower bottom surface of the rotating table (343); the rotating table (343) is connected to the rotating drive motor (345) sealed in the cavity; a parallel welding mechanism (347) is connected to the welding alignment nut connection block (339); a welding station tray (348) is arranged directly below the crossbeam of the welding mechanism walking gantry (330), and a welding station cover plate (349) and a welding station tube shell (350) are respectively arranged in the welding station tray (348). ; 2. The high vacuum fully automatic packaging and testing equipment for microelectronic packaging components according to claim 1, characterized in that: A box-shaped frame body (315) is arranged on the welded aligning nut connection block (339); an eccentric wheel (323) is arranged on the front elevation of the front side vertical plate (316) of the box-shaped frame body (315); a sealed housing (328) of an eccentric wheel driving motor is arranged in the box-shaped frame body (315); an eccentric wheel driving motor is arranged in the sealed housing (328); air is sealed in the sealed housing (328); an output shaft of the eccentric wheel driving motor is connected to an eccentric wheel shaft (322) of the eccentric wheel (323) through a sealed magnetic fluid; a U-shaped frame plate (313) is buckled on the front elevation of the front side vertical plate (316); and the eccentric wheel (323) is movably arranged on the frame of the U-shaped frame plate (313). In the embodiment, a left lifting guide rail block (312) and a right lifting guide rail block (314) are fixedly arranged in parallel with each other on the front side vertical surface of the U-shaped frame plate (313); a left guide rail groove (318) in the vertical direction is fixedly arranged on the front side vertical plate (316) on the left side of the U-shaped frame plate (313); a right guide rail groove (319) in the vertical direction is fixedly arranged on the front side vertical plate (316) on the right side of the U-shaped frame plate (313); a left side column (320) of a half-mouth-shaped lifting frame (317) is arranged in the left guide rail groove (318) in the vertical direction; a right side column (321) of the half-mouth-shaped lifting frame (317) is arranged in the right guide rail groove (319) in the vertical direction; and a bottom middle portion of a crossbeam of the half-mouth-shaped lifting frame (317) is provided. The bottom surface is fixedly connected with a lifting frame lifting block (326), and a lifting guide wheel shaft (325) is connected to the lifting frame lifting block (326). A lifting guide wheel (324) is arranged on the lifting guide wheel shaft (325), and the lifting guide wheel (324) is connected to the outer edge side of the eccentric wheel (323). A left lifting slider (304) is arranged on the left lifting guide rail block (312), and a right lifting slider is arranged on the right lifting guide rail block (314). A left parallel welding wheel mechanism is fixedly connected to the left lifting slider (304), and a right parallel welding wheel mechanism is fixedly connected to the right lifting slider. The structure of the left parallel welding wheel mechanism is completely the same as that of the right parallel welding wheel mechanism. A left parallel welding wheel bracket (305) is connected to a left parallel welding wheel mechanism; a left welding wheel assembly (301) is connected to the lower end of the left parallel welding wheel bracket (305); a left welding wheel (302) is connected to the left welding wheel assembly (301); a weight left support plate (306) is fixedly connected to the upper end of the left parallel welding wheel bracket (305); a left weight connecting rod (307) is provided on the weight left support plate (306); a left weight (308) is placed on the weight left support plate (306) through a connecting hole (309) on the left weight; a sealing welding assembly (329) is provided directly below between the left parallel welding wheel mechanism and the right parallel welding wheel mechanism; the left welding wheel (302) is pressed onto the left welding seam of the sealing welding assembly (329).

3. The high vacuum fully automatic packaging and testing equipment for microelectronic packaging components according to claim 2, characterized in that: The left welding wheel assembly (301) is connected to the lower end of the left parallel welding wheel bracket (305) through a left L-shaped hanging plate (303), and the left L-shaped hanging plate (303) and the lower end of the left parallel welding wheel bracket (305) are connected together through an insulating washer (310) and an insulating screw (311); the weight of the left weight (308) placed on the left parallel welding wheel mechanism is the same as the weight of the right weight placed on the right parallel welding wheel mechanism; a nylon lifting screw (327) is provided on the lower bottom surface of the left weight support plate (306), and the lifting frame lifting block (326) is provided directly below the nylon lifting screw (327).

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