Device array based on electrofluid application and its manufacturing device and manufacturing method

Abstract

The present invention provides a device array based on electrofluid application and a manufacturing device and a manufacturing method thereof, comprising: a generating system, the generating system is used to apply the generated surface acoustic standing wave to a functional material solution so that a liquid peak array is formed on the surface of the functional material solution; a positioning system, the positioning system is used to move a target substrate to the liquid peak of the functional material solution; and a power supply, the two ends of the power supply are respectively connected to the target substrate and the generating system, so that the liquid peak array forms a Taylor cone under the action of an electric field, gravity and surface tension, and generates a jet and is then transferred to the target substrate; when the electric field is stopped from being applied to the generating system and the target substrate, the Taylor cone of the liquid peak array disappears immediately and the spraying stops. By means of a Taylor cone jet, the spraying of nanometer to micrometer-level patterns can be achieved, and the uniformity of the pattern is not easily affected by the curvature of the target substrate.

Description

Technical Field

[0001] The present invention relates to the technical field of arrayed devices, and in particular to a device array based on electrofluid application and a manufacturing device and a manufacturing method thereof. Background Art

[0002] Quantum dots are small spherical semiconductor particles of nanometer size, also known as nano-semiconductor particles or nanocrystals. They usually have a radius smaller than or close to the Bohr radius of the exciton, and are composed of only a few or dozens of atoms. When voltage is applied, they will produce self-luminescence, absorb and re-release light of the same wavelength. In addition, quantum dots have another characteristic, that is, when stimulated by light or electricity, quantum dots will emit colored light. The color of the light is determined by the constituent materials, size and shape of the quantum dots, which means that quantum dots can change the color of the light emitted by the light source. Micro light-emitting diode chips often use quantum dot arrays as color conversion layers to convert blue light or ultraviolet light into light of other colors. However, there are currently only photolithography or nozzle spray printing methods for printing quantum dot arrays. Among them, the photolithography method has a serious waste of materials, and the nozzle spray printing method is difficult to handle high-density, large-area substrates. At present, the industry is in urgent need of a new production device and process to deal with the production problems of related functional device arrays.

[0003] In view of this, the inventor specially designed a device array based on electrofluid application and its manufacturing device and method, and this case was thus generated. Summary of the invention

[0004] The purpose of the present invention is to provide a device array based on electrofluid application and its manufacturing device and manufacturing method, which effectively solves the technical problems existing in the prior art and proposes a new manufacturing process and device, which does not require the functional material solution to be sprayed through a nozzle, which not only avoids the waste of resources, but also realizes the preparation of high-density, nano to micron-scale device arrays.

[0005] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0006] A device for manufacturing a device array based on electrofluidic applications, comprising:

[0007] A generating system, the generating system is used to apply the generated surface acoustic standing wave to a functional material solution so that a liquid spike array is formed on the surface of the functional material solution;

[0008] A positioning system, the positioning system is used to move the target substrate to the liquid peak of the functional material solution, and align the functional area surface array of the target substrate with the liquid peak array of the functional material solution;

[0009] A power source, the two ends of which are respectively connected to the target substrate and the generating system, so that the liquid spike array forms a Taylor cone under the action of the electric field, gravity and surface tension and generates a jet which is then transferred to the functional area surface of the target substrate.

[0010] Preferably, the production system comprises:

[0011] a wave generating unit, the wave generating unit being used to generate the surface acoustic wave;

[0012] A material container, wherein the material container is used to hold the functional material solution and the functional material solution forms a liquid spike array on the opening side of the material container according to the surface acoustic standing wave; the material container has a conductive base, and the two ends of the power supply are respectively connected to the target substrate and the base of the material container.

[0013] Preferably, the wave generating unit comprises:

[0014] Piezoelectric substrate;

[0015] An acoustic device and a waveguide layer are arranged on one surface of the piezoelectric substrate, the acoustic device is used to generate the surface acoustic standing wave, and the waveguide layer is used to transmit the surface acoustic standing wave to a material container located on a side of the waveguide layer away from the piezoelectric substrate.

[0016] Preferably, the acoustic device comprises a plurality of pairs of interdigital transducers.

[0017] Preferably, the material container is a conductive container.

[0018] Preferably, the positioning system comprises:

[0019] A controllable fixing frame, wherein the controllable fixing frame is used to fix the target substrate;

[0020] A positioning drive device connected to the controllable fixing frame is used to control the controllable fixing frame to move the target substrate to the liquid peak of the functional material solution, and to align the functional area surface array of the target substrate with the liquid peak array of the functional material solution.

[0021] Preferably, the hydrophilicity and hydrophobicity of the functional area surface of the target substrate are consistent with those of the functional material solution;

[0022] The surface of the area other than the functional area of ​​the target substrate has a hydrophilicity and hydrophobicity opposite to that of the functional material solution.

[0023] Preferably, the functional material solution is a quantum dot solution, an OLED solution, a photoresist solution, an aggregation-induced emission material solution, a fluorescent material solution, a cell culture solution or a perovskite precursor material solution.

[0024] Accordingly, the present invention also provides a method for manufacturing a device for manufacturing an array of devices based on electrofluidic applications, using any one of the above-mentioned devices for manufacturing an array of devices based on electrofluidic applications, the manufacturing method comprises:

[0025] The positioning system moves the target substrate to the functional material solution side, and aligns the functional area surface array of the target substrate with the area where the functional material solution forms a liquid peak array;

[0026] The generating system generates a standing acoustic surface wave to act on the functional material solution, so that a liquid spike array is formed on the surface of the functional material solution;

[0027] Connecting the power supply to apply an electric field between the target substrate and the generating system, so that the liquid spike array forms a Taylor cone and generates a jet under the action of the electric field, gravity and surface tension;

[0028] The liquid peak of the functional material solution is transferred to the surface of the functional area of ​​the target substrate by jetting, and functional material droplets are formed on the surface of the functional area of ​​the target substrate;

[0029] The functional device is formed after the functional material droplets evaporate.

[0030] Correspondingly, the present invention further provides a device array, wherein the device array is manufactured by the manufacturing method of the above-mentioned device array manufacturing apparatus based on electrofluid application.

[0031] The present invention provides a device array based on electrofluid application and a manufacturing device and a manufacturing method thereof, comprising: a generating system, wherein the generating system is used to apply the generated acoustic surface standing wave to a functional material solution so that a liquid peak array is formed on the surface of the functional material solution; a positioning system, wherein the positioning system is used to move a target substrate to the liquid peak of the functional material solution and align the functional area surface array of the target substrate with the liquid peak array of the functional material solution; a power supply, wherein the two ends of the power supply are respectively connected to the target substrate and the generating system, so that the liquid peak array forms a Taylor cone under the action of an electric field, gravity and surface tension, and generates a jet, which is then transferred to the functional area surface of the target substrate; when the electric field is stopped from being applied to the generating system and the target substrate, the Taylor cone of the liquid peak array disappears immediately and the jetting stops. By using Taylor cone jets, spraying of nanometer to micrometer scale patterns can be achieved, and the uniformity of the pattern is not easily affected by the curvature of the target substrate. At the same time, since the Taylor cone can produce smaller jets, there is no need to increase the high voltage on the interdigital transducer to produce sharp liquid spikes, which can extend the service life of the piezoelectric substrate.

[0032] From the above content, it can be seen that the present invention proposes a new manufacturing process and device. The technical solution provided by the present invention does not need to spray the functional material solution through a nozzle, which not only avoids the waste of resources, but also realizes the preparation of a high-density functional device array. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0034] Figure 1 A schematic structural diagram of a device for manufacturing a device array based on electrofluidic applications provided by an embodiment of the present invention;

[0035] Figure 2 A schematic structural diagram of another device for manufacturing a device array based on electrofluidic applications provided by an embodiment of the present invention;

[0036] Figure 3 A schematic structural diagram of another device for manufacturing a device array based on electrofluidic applications provided by an embodiment of the present invention;

[0037] Figure 4 A flow chart of a method for manufacturing a device for manufacturing a device array based on electrofluidic applications provided by an embodiment of the present invention;

[0038] Explanation of symbols in the figure: 100, generating system, 110, wave generating unit, 111, piezoelectric substrate, 112, acoustic device, 113, waveguide layer, 120, material container, 130, functional material solution, 131, jet, 200, positioning system, 210, controllable fixing frame, 220, positioning driving device, 300, target substrate, V, power supply, DETAILED DESCRIPTION

[0039] To make the content of the present invention clearer, the content of the present invention is further described below in conjunction with the accompanying drawings. The present invention is not limited to this specific embodiment. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments

[0041] These are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] As described in the background technology, quantum dots are small spherical semiconductor particles of nanometer size, also known as nano semiconductor particles or nano crystals, usually with a radius smaller than or close to the Bohr radius of the exciton, and are composed of only a few or dozens of atoms. When voltage is applied, it will produce self-luminescence, absorb and re-release light of the same wavelength. In addition, quantum dots have another characteristic, that is: when stimulated by light or electricity, quantum dots will emit colored light, and the color of the light is determined by the constituent materials and size and shape of the quantum dots, which means that quantum dots can change the color of the light emitted by the light source. Micro light-emitting diode chips often use quantum dot arrays as color conversion layers to convert blue light or ultraviolet light into light of other colors. However, there are currently only photolithography or nozzle spray printing methods for printing quantum dot arrays, among which the photolithography method is very wasteful of materials, and the nozzle spray printing method is difficult to process high-density, large-area substrates. At present, the industry is in urgent need of a new manufacturing device and process to deal with the manufacturing problems of related functional device arrays.

[0043] Based on this, the embodiments of the present invention provide a device array based on electrofluid application and a manufacturing device and method thereof, which effectively solve the technical problems existing in the prior art and propose a new manufacturing process and device, which does not require spraying the functional material solution through a nozzle, which not only avoids the waste of resources, but also realizes the preparation of a high-density functional device array.

[0044] To achieve the above purpose, the technical solution provided by the embodiment of the present invention is as follows, specifically combined with Figures 1 to 4 The technical solution provided by the embodiment of the present invention is described in detail.

[0045] refer to Figure 1 FIG. 1 is a schematic diagram of a structure of a device for manufacturing a device array based on electrofluidic application provided by an embodiment of the present invention, wherein the manufacturing device provided by the embodiment of the present invention includes:

[0046] A generating system 100 is used to apply a generated surface acoustic standing wave to a functional material solution so as to form a liquid spike array on the surface of the functional material solution.

[0047] A positioning system 200, wherein the positioning system 200 is used to move the target substrate 300 to the liquid peak of the functional material solution, and to align the functional area surface array of the target substrate 300 with the liquid peak array of the functional material solution;

[0048] A power source V, the two ends of which are respectively connected to the target substrate 300 and the generating system 100, so that the liquid spike array forms a Taylor cone under the action of the electric field, gravity and surface tension and generates a jet 131 which is then transferred to the functional area surface of the target substrate 300.

[0049] Furthermore, the generation system 100 provided in the embodiment of the present invention includes:

[0050] The wave generating unit 110 is used to generate the surface acoustic wave.

[0051] The material container 120 is used to hold the functional material solution 130, and the functional material solution 130 forms a liquid spike array on the opening side of the material container 120 according to the surface acoustic standing wave; and the two ends of the power supply V are respectively connected to the target substrate 300 and the base of the material container 120. It should be noted that the base of the material container 120 is a conductive material.

[0052] It can be understood that the technical solution provided by the embodiment of the present invention does not need to spray the functional material solution through a nozzle, which not only avoids the waste of resources but also realizes the preparation of a high-density functional device array.

[0053] refer to Figure 2 FIG. 1 is a schematic diagram of a structure of another device for manufacturing a device array based on electrofluidic application provided by an embodiment of the present invention, wherein the manufacturing device provided by the embodiment of the present invention includes:

[0054] A generating system 100 is used to apply a generated surface acoustic standing wave to a functional material solution so as to form a liquid spike array on the surface of the functional material solution.

[0055] The positioning system 200 is used to move the target substrate 300 to the liquid peak of the functional material solution, and align the functional area surface array of the target substrate 300 with the liquid peak array of the functional material solution.

[0056] A power source V, the two ends of which are respectively connected to the target substrate 300 and the generating system 100, so that the liquid spike array forms a Taylor cone under the action of the electric field, gravity and surface tension and generates a jet 131 which is then transferred to the functional area surface of the target substrate 300.

[0057] Furthermore, the generating system 100 provided in an embodiment of the present invention includes: a wave generating unit 110, wherein the wave generating unit 110 is used to generate the surface acoustic standing wave; and a material container 120, wherein the material container 120 is used to contain the functional material solution 130 and the functional material solution 130 forms a liquid spike array on the opening side of the material container 120 according to the surface acoustic standing wave; and the two ends of the power supply V are respectively connected to the target substrate 300 and the base of the material container 120. It should be noted that the base of the material container 120 is a conductive material.

[0058] The wave generation unit 110 provided in the embodiment of the present invention includes:

[0059] The piezoelectric substrate 111 .

[0060] An acoustic device 112 and a waveguide layer 113 are arranged on one surface of the piezoelectric substrate 111. The acoustic device 112 is used to generate the surface acoustic standing wave, and the waveguide layer 113 is used to transmit the surface acoustic standing wave to a material container 120 located on a side of the waveguide layer 113 away from the piezoelectric substrate 111.

[0061] In one embodiment of the present invention, the acoustic device provided by the present invention comprises a plurality of pairs of interdigital transducers, wherein the plurality of pairs of interdigital transducers are vertically placed on the surface of the piezoelectric substrate. Also, the material container provided by the embodiment of the present invention is a conductive container.

[0062] It can be understood that the surface acoustic wave provided by the embodiment of the present invention is generated by the interdigital transducer on the surface of the piezoelectric substrate. The formation of the surface acoustic wave is due to the interference of sound waves. When the interdigital transducers are arranged in pairs, the sound waves generated have the same frequency, the propagation direction is opposite, and the phase difference remains constant, they will interfere to form a synthetic wave with unchanged node and antinode positions, that is, a standing wave. When a pair of identical and opposite interdigital transducers are made on the piezoelectric substrate, after the power supply V is turned on, the opposing propagating surface acoustic waves are refracted into the fluid at the Rayleigh angle, and the surface acoustic wave standing wave can be generated. It is precisely because of this refraction of the sound wave that the mode of the surface acoustic wave becomes a leaky wave. The amplitude of the antinode of the surface acoustic wave is the largest, and the body force generated by the nonlinear attenuation of the sound wave acts on the fluid itself, causing the fluid to move rapidly in the direction of the sound wave propagation, forming an acoustic rush. If the thickness of the liquid above the wave is low and the power applied is appropriate, when the liquid moves to the liquid surface, the surface tension of the liquid and the gravity of the liquid itself will prevent the liquid from moving further upward. When the momentum, surface tension and gravity of the liquid reach a balance, a stable liquid peak will be formed at the "liquid-gas" interface.

[0063] At this time, a high voltage is applied to the base of the material container 120 and the target substrate, and the curved liquid surface on the opening side of the material container 120 will form an induced charge, so that the curved liquid surface is affected by the electric field force. Under the action of the electric field force, gravity and surface tension, the curved liquid surface gradually forms a Taylor cone and generates a jet 131.

[0064] Therefore, the technical solution provided by the embodiment of the present invention is based on the principle of surface acoustic standing waves, and the surface acoustic standing waves are applied to the functional material solution, so that a liquid peak array can be formed on the surface of the functional material solution. And, through precise analysis of the positioning system, the surface array of the functional area of ​​the target substrate and the area where the functional material solution can form a liquid peak array are aligned. Then, after the generation system is powered on, the functional material solution forms a liquid peak array; at the same time, due to the connection of the power supply V, an electric field is applied between the target substrate and the generation system, so that the liquid peak array forms a Taylor cone and generates a jet 131 under the action of the electric field, gravity and surface tension; thereby, the liquid peak of the functional material solution is transferred to the surface of the functional area of ​​the target substrate through the jet 131, and functional material droplets are formed on the surface of the functional area of ​​the target substrate. Then, the target substrate is removed or the generation system is stopped from being powered on, and the liquid peak of the functional material solution disappears, so that functional material droplets are formed on the surface of the functional area of ​​the target substrate. After the solvent of the functional material droplets evaporates, a functional device is formed on the surface of the target substrate. Furthermore, by repeating the above manufacturing steps, a functional device array with higher density can be formed on the surface of the target substrate.

[0065] like Figure 3 FIG. 1 is a schematic diagram of a structure of another device for manufacturing a device array based on electrofluidic application provided by an embodiment of the present invention, wherein the manufacturing device provided by the embodiment of the present invention includes:

[0066] A generating system 100 is used to apply a generated surface acoustic standing wave to a functional material solution so as to form a liquid spike array on the surface of the functional material solution.

[0067] The positioning system 200 is used to move the target substrate 300 to the liquid peak of the functional material solution, and align the functional area surface array of the target substrate 300 with the liquid peak array of the functional material solution.

[0068] A power source V, the two ends of which are respectively connected to the target substrate 300 and the generating system 100, so that the liquid spike array forms a Taylor cone under the action of the electric field, gravity and surface tension and generates a jet 131 which is then transferred to the target substrate 300.

[0069] Furthermore, the generation system 100 provided in the embodiment of the present invention comprises: a wave generation unit 110, the wave generation unit 110 is used to generate the surface acoustic standing wave. And a material container 120, the material container 120 is used to hold the functional material solution 130 and the functional material solution 130 forms a liquid spike array on the opening side of the material container 120 according to the surface acoustic standing wave; and the two ends of the power source V are respectively connected to the target substrate 300 and the base of the material container 120, and it should be noted that the base of the material container 120 is a conductive material.

[0070] In one embodiment of the present invention, the wave generating unit 110 provided by the embodiment of the present invention comprises: a piezoelectric substrate 111. An acoustic device 112 and a waveguide layer 113 are arranged on a surface of one side of the piezoelectric substrate 111, the acoustic device 112 is used to generate the surface acoustic standing wave, and the waveguide layer 113 is used to transmit the surface acoustic standing wave to a material container 120 located on a side of the waveguide layer 113 away from the piezoelectric substrate 111.

[0071] Furthermore, the positioning system 200 provided in the embodiment of the present invention includes:

[0072] A controllable fixing frame 210 , wherein the controllable fixing frame 210 is used to fix the target substrate 300 .

[0073] A positioning drive device 220 connected to the controllable fixing frame 210 is used to control the controllable fixing frame 210 to move the target substrate 300 to the liquid peak of the functional material solution 130, and to align the functional area surface array of the target substrate 300 with the liquid peak array of the functional material solution 130.

[0074] In one embodiment of the present invention, the controllable fixing frame provided by the present invention can fix the target substrate, and at the same time, the controllable fixing frame can drive the target substrate to move in a three-dimensional coordinate space according to the driving of the positioning drive device. In addition, the positioning drive device provided in the embodiment of the present invention can be a host computer, and the present invention does not make specific restrictions on this.

[0075] In one embodiment of the present invention, the hydrophilicity of the functional area surface of the target substrate provided by the present invention is consistent with that of the functional material solution; and the hydrophilicity of the area surface outside the functional area surface of the target substrate is opposite to that of the functional material solution.

[0076] It is understandable that in order to ensure that the array structure is highly uniform, the surface of the target substrate can be treated with hydrophilicity and hydrophobicity to form a hydrophilic and hydrophobic pattern. Among them, the hydrophilicity of the surface of the functional area of ​​the target substrate is consistent with that of the functional material solution; the surface of the area outside the functional area of ​​the target substrate is opposite to the hydrophilicity of the functional material solution, thereby ensuring that the functional material droplets are only on the surface of the functional area. For example, when the functional material solution is a quantum dot solution, the quantum dot solution is generally an organic solution that is hydrophobic and lipophilic, so the surface of the functional area can be treated as a hydrophobic area, and the surface outside the functional area can be treated as a hydrophilic area, so that the quantum dot droplets formed by the quantum dot solution tend to be only on the surface of the functional area. Furthermore, by designing the size and shape of the surface of the functional area, the parameters such as the size and shape of the functional device can be effectively improved, and the flexibility can be improved.

[0077] Optionally, the functional material solution provided in the embodiment of the present invention is a quantum dot solution, an OLED solution, a photoresist solution, an aggregation-induced emission material solution, a fluorescent material solution, a cell culture medium or a perovskite precursor material solution, and the present invention does not make any specific limitation on this.

[0078] Correspondingly, an embodiment of the present invention further provides a method for manufacturing a device array based on electrofluidic applications, using a manufacturing device for a functional device array provided by any of the above embodiments. Figure 4 FIG. 1 is a flowchart of a method for manufacturing a functional device array according to an embodiment of the present invention, wherein the manufacturing method includes:

[0079] S01. The positioning system moves the target substrate to the functional material solution side, and aligns the functional area surface array of the target substrate with the area where the functional material solution forms a liquid peak array.

[0080] S02. The generation system generates a surface acoustic standing wave to act on a functional material solution, so that a liquid spike array is formed on the surface of the functional material solution.

[0081] S03, connecting the power source V to apply an electric field between the target substrate and the generating system, so that the liquid spike array forms a Taylor cone and generates a jet under the action of the electric field, gravity and surface tension.

[0082] S04. The liquid peak of the functional material solution is transferred to the surface of the functional area of ​​the target substrate by jetting, and functional material droplets are formed on the surface of the functional area of ​​the target substrate.

[0083] S05, forming the functional device after the functional material droplets evaporate.

[0084] Furthermore, repeating the above steps can obtain a functional device array with higher density.

[0085] Correspondingly, an embodiment of the present invention further provides a device array, wherein the device array is manufactured by the manufacturing method of the above-mentioned device array manufacturing apparatus based on electrofluid application.

[0086] The embodiment of the present invention provides a device array based on electrofluid application and its manufacturing device and manufacturing method, including: a generating system, the generating system is used to apply the generated acoustic surface standing wave to a functional material solution so that a liquid peak array is formed on the surface of the functional material solution; a positioning system, the positioning system is used to move a target substrate to the liquid peak of the functional material solution, and align the functional area surface array of the target substrate with the liquid peak array of the functional material solution; a power supply, the two ends of the power supply are respectively connected to the target substrate and the generating system, so that the liquid peak array forms a Taylor cone under the action of an electric field, gravity and surface tension, and generates a jet and is then transferred to the functional area surface of the target substrate; when the electric field is stopped from being applied to the generating system and the target substrate, the Taylor cone of the liquid peak array disappears immediately and the spraying stops. By using Taylor cone jets, spraying of nanometer to micrometer scale patterns can be achieved, and the uniformity of the pattern is not easily affected by the curvature of the target substrate. At the same time, since the Taylor cone can produce smaller jets, there is no need to increase the high voltage on the interdigital transducer to produce sharp liquid spikes, which can extend the service life of the piezoelectric substrate.

[0087] From the above content, it can be seen that the present invention proposes a new manufacturing process and device. The technical solution provided by the present invention does not need to spray the functional material solution through a nozzle, which not only avoids the waste of resources, but also realizes the preparation of a high-density functional device array.

[0088] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0089] It should also be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprises", "comprising" or any other variants thereof are intended to cover non-exclusive inclusion, so that an article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such article or device. In the absence of further restrictions, the elements defined by the sentence "comprising a ..." do not exclude the existence of other identical elements in the article or device including the above elements.

[0090] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A device for manufacturing a device array based on electrofluidic applications, characterized in that: include: A generating system, the generating system is used to apply the generated surface acoustic standing wave to a functional material solution so that a liquid spike array is formed on the surface of the functional material solution; A positioning system, the positioning system is used to move the target substrate to the liquid peak of the functional material solution, and align the functional area surface array of the target substrate with the liquid peak array of the functional material solution; A power source, wherein both ends of the power source are respectively connected to the target substrate and the generating system, so that the liquid spike array forms a Taylor cone under the action of the electric field, gravity and surface tension, and generates a jet which is then transferred to the surface of the functional area of ​​the target substrate to achieve spraying of nanometer to micrometer scale patterns; Wherein, the generation system comprises: a wave generating unit, the wave generating unit being used to generate the surface acoustic wave; A material container, the material container is used to hold the functional material solution and the functional material solution forms a liquid spike array on the opening side of the material container according to the surface acoustic standing wave; the material container has a conductive base, and the two ends of the power supply are respectively connected to the target substrate and the base of the material container; The wave generating unit comprises: Piezoelectric substrate; An acoustic device and a waveguide layer are arranged on a surface of one side of the piezoelectric substrate, the acoustic device is used to generate the surface acoustic standing wave, and the waveguide layer is used to transmit the surface acoustic standing wave to a material container located on a side of the waveguide layer away from the piezoelectric substrate; The acoustic device includes a plurality of pairs of interdigital transducers.

2. The device for manufacturing a device array based on electrofluidic application according to claim 1, characterized in that: The material container is a conductive container.

3. The device for manufacturing a device array based on electrofluidic application according to claim 1, characterized in that: The positioning system comprises: A controllable fixing frame, wherein the controllable fixing frame is used to fix the target substrate; A positioning drive device connected to the controllable fixing frame is used to control the controllable fixing frame to move the target substrate to the liquid peak of the functional material solution, and to align the functional area surface array of the target substrate with the liquid peak array of the functional material solution.

4. The device for manufacturing a device array based on electrofluidic application according to claim 1, characterized in that: The hydrophilicity and hydrophobicity of the functional area surface of the target substrate are consistent with those of the functional material solution; The surface of the area other than the functional area of ​​the target substrate has a hydrophilicity and hydrophobicity opposite to that of the functional material solution.

5. The device for manufacturing a device array based on electrofluidic application according to claim 1, characterized in that: The functional material solution is a quantum dot solution, an OLED solution, a photoresist solution, an aggregation-induced emission material solution, a fluorescent material solution, a cell culture solution or a perovskite precursor material solution.

6. A method for manufacturing a device for manufacturing a device array based on electrofluidic applications, characterized in that: The device for manufacturing a device array based on electrofluidic application according to any one of claims 1 to 5 is used, and the manufacturing method comprises: The positioning system moves the target substrate to the functional material solution side, and aligns the functional area surface array of the target substrate with the area where the functional material solution forms a liquid peak array; The generating system generates a standing acoustic surface wave to act on the functional material solution, so that a liquid spike array is formed on the surface of the functional material solution; Connecting the power supply to apply an electric field between the target substrate and the generating system, so that the liquid spike array forms a Taylor cone and generates a jet under the action of the electric field, gravity and surface tension; The liquid peak of the functional material solution is transferred to the surface of the functional area of ​​the target substrate by jetting, and functional material droplets are formed on the surface of the functional area of ​​the target substrate; After the functional material droplets evaporate, a functional device is formed.

7. A device array, characterized in that: The device array is manufactured by using the manufacturing method of the device array manufacturing apparatus based on electrofluid application as claimed in claim 6.

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