A method and system for processing production data files of Fab equipment

Abstract

The present invention relates to the field of intelligent manufacturing technology, and discloses a method for processing production data files of Fab plant equipment, including: step S1. configuring equipment sites, generating file data and uploading to a NAS disk when performing production posting between equipment, and reporting a posting signal; step S2. the BC system reports the received posting signal to the MES system to record and update information; step S3. file modeling is performed in the file processing system, and file parsing rules and file processing rules are configured in the file model for execution processing; step S4. after the file processing system processes the original files of the process equipment and the detection equipment according to the file parsing rules and file processing rules in the file model, a result file in a unified format of MES is generated, and the result file is uploaded to the NAS disk; step S5. the MES system posts to the file processed by the NAS disk, and performs data determination and use. The present invention also discloses a system for processing production data files of Fab plant equipment, which is used to process production data files generated by Fab plant equipment.

Description

Technical Field

[0001] The present invention relates to the field of intelligent manufacturing technology, and in particular to a method and system for processing production data files of Fab factory equipment, which are used for processing production data files generated by Fab factory equipment. Background Art

[0002] With the development of the manufacturing industry, factory workshops use production control systems and gradually realize automation. Among them, the MES (Manufacturing Execute System) manufacturing execution system is a production execution management system for the manufacturing industry. During the production process, the MES system can respond to and report on production, and use the current accurate data to guide and process production. In the production and manufacturing process of LTPS and OLED panels, the machine equipment will record some production parameters and test results of the substrate into the production data file, including some production parameters and defect points, defect coordinates, defect causes, etc. that appear on the substrate during production. In some important production process links, personnel and equipment will determine the flow direction of the substrate based on the previous production situation. For example, when the substrate is damaged, the substrate goes to the scrapping site for scrapping; when the substrate has scratches, the substrate goes to the repair site for repair; when the brightness of a certain point on the substrate is uneven, it can be downgraded and then manufactured normally. At this time, it is necessary to read the files generated by the previous process, and obtain some previous production parameters by parsing one or more files to determine the next production flow of the substrate. In view of the above situation, the traditional technical solution is that the MES system developers carry out customized development for different files generated by different devices in important process links according to customer needs, and parse and process the files. These file processing are customized according to the needs and have the following disadvantages:

[0003] 1. In the manufacturing process, many devices are used. Since the manufacturers of the devices may be different, the file formats generated by the devices may be different. During customized development, each file needs to be parsed and processed separately, which will lead to a long demand development cycle and complex file processing.

[0004] 2. In the manufacturing process, user needs are uncertain, and each process site may need to parse and process previous files. Due to the uncertainty of demand, user demands cannot be met in a timely manner, and file processing cannot achieve the effect of stop-and-go use.

[0005] Therefore, in order to solve the above problem, the present invention proposes a solution to parse the files generated by the device by configuring the file model. By establishing different file models, the system processes the files according to the file models, solving the problem of multiple file formats. Summary of the invention

[0006] The purpose of the present invention is to provide a method and system for processing production data files of Fab plant equipment, which enables file processing tasks by configuring usage rules, realizes multi-file processing and achieves the effect of on-demand and on-demand.

[0007] The present invention is implemented by the following technical solution: A method for processing production data files of Fab plant equipment, comprising the following steps:

[0008] Step S1. Configure equipment sites A, B and C. When production posting is performed between site A and process equipment and site B testing equipment, file data is generated and uploaded to the NAS disk. At the same time, the process equipment and testing equipment report posting signals to the BC system.

[0009] Step S2. The BC system reports the received posting signal to the MES system, and the MES system records and updates the posting signal;

[0010] Step S3. Perform file modeling in the file processing system, configure file parsing rules and file processing rules in the file model, and execute processing on the original files of the process equipment and the detection equipment according to the file processing rules;

[0011] Step S4. After the file processing system processes the original files of the process equipment and the testing equipment according to the file parsing rules and file processing rules in the file model, it generates a result file in the MES unified format and uploads the result file to the NAS disk;

[0012] Step S5. When the MES system posts to site C, it reads the files processed by the NAS disk and makes judgments and uses the data.

[0013] In this technical solution, the present invention proposes a solution to parse the files generated by the device by configuring the file model. By establishing different file models, the system processes the files according to the file models to solve the problem of multiple file formats. By configuring the usage rules, the file processing task can realize multi-file processing and achieve the effect of stop and start at any time.

[0014] In order to better implement the present invention, further, the method for performing file modeling in the file processing system in step S3 includes:

[0015] Step S3.1. Establish a file model in the database in XML format, and configure the file parsing rules and file processing rules corresponding to the file model;

[0016] Step S3.2. Configure the configuration file to process the task and control the start and stop of the task;

[0017] Step S3.3. Abstract the production data files of different formats generated by the equipment into different tree structures to generate data models. Step S3.4. Read the files from the NAS disk according to the data model and parse the data model into Element objects according to the file model.

[0018] Step S3.5. Read the file processing rules, execute the processing on the original files of the process equipment and the detection equipment to generate new files.

[0019] In this technical solution, the production data files of different formats generated by the equipment are abstracted into different tree structures, which are used as the basis for file modeling, and various rules are provided in the file model to achieve the effect of multi-file processing.

[0020] In order to better implement the present invention, further, the method for configuring the file processing rule in step S3.1 includes:

[0021] Users can customize the file processing method according to their needs;

[0022] Process the original files in the database according to the device and site, and configure file processing rules according to the file format after processing;

[0023] The file processing method includes file merging, file reading, file updating and file parsing.

[0024] In this technical solution, the maintained file data model is used to customize the file processing method according to user needs.

[0025] In order to better implement the present invention, further, the method for configuring the configuration file parsing rules in step S3.1 includes:

[0026] Process the production data files generated by a single device and output the contents to the target file according to the file format defined by the file processing rules;

[0027] Process production data files of the same format generated by multiple devices, and output the content to the target file according to the file format defined by the file processing rules. The file processing rules can be the original format or other formats;

[0028] Process production data files of different formats generated by multiple devices, and output the content to the target file according to the file format defined by the file processing rules.

[0029] In order to better implement the present invention, further, step S3.3 includes:

[0030] Each node of the tree structure corresponds to different content of the production data file;

[0031] According to the abstract tree structure, the attributes of each node are configured in the database to maintain a unified data model.

[0032] In order to better implement the present invention, further, the method for executing the processing in step S3.5 includes:

[0033] Users specify the file processing time, processing steps and task cycle in the file processing rules according to their needs;

[0034] In the database, execution processing is performed based on the task ID, task type, task cycle, file processing rules, and whether the task is configured to be executed.

[0035] In order to better implement the present invention, the present invention further provides a system for processing production data files of Fab plant equipment, including a file processing system, equipment, a NAS disk, an MES system and a BC system, wherein:

[0036] The file processing system is used to parse and process the original files of the equipment according to the file parsing rules and file processing rules; it is used to generate files in a unified format of the MES system according to the file parsing rules and file processing rules;

[0037] Equipment, used to generate file data and upload it to NAS disk during production posting, and to report the generated posting signal to the BC system;

[0038] NAS disk, used to receive file data uploaded by the device, and to read the parsed files on its own NAS disk after receiving the signal reported by the site, and perform judgment operations;

[0039] The MES system is used to receive the posting signal from the BC system and record and update the posting signal;

[0040] The BC system is used to receive the posting signal transmitted by the equipment and report the received posting signal to the MES system.

[0041] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0042] (1) The present invention parses the files generated by the device by configuring file models. By establishing different file models, the system processes the files according to the file models, solving the problem of multiple file formats;

[0043] (2) The present invention configures the usage rules to enable file processing tasks, realizes multi-file processing, and achieves the effect of on-demand and on-demand. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] The present invention is further described in conjunction with the following drawings and embodiments, and all the concepts and innovations of the present invention should be regarded as the disclosed contents and the protection scope of the present invention.

[0045] Figure 1 A flowchart of a method for processing production data files of Fab plant equipment provided by the present invention.

[0046] Figure 2 A workflow diagram of a method for processing production data files of Fab plant equipment provided by the present invention.

[0047] Figure 3 A schematic diagram of the system architecture, functional modules and the inclusion relationship between modules provided by the present invention.

[0048] Figure 4 A schematic diagram of the principles of file modeling in a method for processing Fab plant equipment production data files provided by the present invention.

[0049] Figure 5 A schematic diagram of the file decoding process in a method for processing production data files of Fab equipment provided by the present invention. DETAILED DESCRIPTION

[0050] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. It should be understood that the described embodiments are only part of the embodiments of the present invention, not all of the embodiments, and therefore should not be regarded as limiting the scope of protection. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technical personnel in this field without making creative work are within the scope of protection of the present invention.

[0051] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0052] Embodiment 1:

[0053] A method for processing a Fab plant equipment production data file in this embodiment is as follows: Figure 1-5As shown in the figure, when the equipment at sites A and B posts production, file data will be generated and uploaded to the NAS disk, and the posting signal will be reported to the BC system. The BC system reports the posting signal to the MES system, which records and updates the information. The file processing system processes the file according to the parsing rules. After the file processing system completes the processing, it uploads the result file to the NAS disk. When MES posts to site C, it reads the file processed by the file system to determine and use the data.

[0054] Embodiment 2:

[0055] This embodiment is further optimized on the basis of embodiment 1. Figure 4 As shown, the text content in the file is abstracted into a tree structure and then abstracted into a database data model. The production data files of different formats generated by the equipment are abstracted into different tree structures, and the file contents are abstracted into different nodes in the tree structure; according to the abstract tree structure, the attributes of each node are configured in the database, so as to maintain a unified data model. For example, to maintain the data model of a file called AFile, first define the root node, define the root node as A in the database, and maintain its specific attributes: no parent node, no value, and the current node position is 0; secondly, define the child nodes of the second level, define the first node of the second level as AAA, the second node as BBB, and the third node as CCC in the database, and maintain their specific attributes: the parent node is A, and the positions in the second level are 0, 1, and 2 respectively, the node value is not empty, the node value is the number of the row, column, and code in the file, the node value separator, and other attributes; the third layer, the fourth layer... and so on, the content of the entire file is logically constructed into a tree structure model layer by layer and maintained in the database.

[0056] The other parts of this embodiment are the same as those of Embodiment 1, and thus will not be described in detail.

[0057] Embodiment 3:

[0058] This embodiment is further optimized on the basis of the above-mentioned embodiment 1 or 2. The maintained file data model allows users to customize the file processing method and define file processing rules according to their needs: for the maintained file data model, users can customize the file processing method, processing time, etc. according to their needs. The specific definition method is to configure the file processing rules in the database according to the equipment, site, original file model, processing method, file format after processing, etc. The file processing method includes file merging, file reading, file updating, file parsing, etc. For example, the existing detection site C needs to parse the production file generated by the previous process production site B equipment when checking and posting. Then, it only needs to configure in the database: the processing site is C, the processing equipment is the C site equipment, the original file format is BFile, the processing method is file parsing, the format after processing is BFile, etc. The definition of the file processing rules can be completed. For example, in the previous case, in order to improve the production yield, the user decided to expand the detection range and improve the detection standard at the detection site C. At this time, it is necessary to add the files generated by the production site A. At this time, it is only necessary to change the previous rules and add the file processing of AFile. Users can flexibly handle according to their needs.

[0059] The other parts of this embodiment are the same as those of the above-mentioned embodiment 1 or 2, and thus will not be described in detail.

[0060] Embodiment 4:

[0061] This embodiment is further optimized based on any one of the above embodiments 1-3. Figure 5 As shown in the figure, after the system is started, the system obtains the configured file processing tasks and runs the already started file processing tasks. In the file processing tasks, the configured file processing rules will be used to process the corresponding files. The file processing methods can be roughly divided into three categories, such as Figure 5 As shown:

[0062] Process the production data files generated by a single device and output the content to the target file according to the file format defined by the processing rules. For example, ① Update the content of source file 1: read the NAS disk source file 1 according to the data model maintained by the database, read the file as an Element object with a tree structure, and after updating the content, output the file to the target file 1 in the original format.

[0063] Process the production data files of the same format generated by multiple devices, and output the content to the target file according to the file format defined by the processing rules, which can be the original format or other formats. For example, ② Merge source file 1 and source file 2: read NAS disk source file 1 and source file 2 according to the data model maintained by the database, read the files into two Element objects, compare the Element node content, and after processing the files, output the files to target file 1 in the original format.

[0064] Process production data files of different formats generated by multiple devices, and output the content to the target file according to the file format defined by the processing rules. For example, ③ Merge source file 2 and source file 3: read NAS disk source file 2 and source file 3 respectively according to different data models, read the files into two Element objects, compare the Element node content, and output the files to target file 2 according to the configured merged file format.

[0065] The other parts of this embodiment are the same as any one of the above embodiments 1-3, so they are not repeated here.

[0066] Embodiment 5:

[0067] This embodiment is further optimized on the basis of any one of the above embodiments 1-4. The user specifies the processing time, processing steps and task cycle of the file for the maintained file processing rules according to the needs. In the database, according to the task ID, task type, task cycle, file processing rules, whether the task is enabled and other information, the execution task is configured.

[0068] The other parts of this embodiment are the same as any one of the above embodiments 1-4, so they are not repeated here.

[0069] Embodiment 6:

[0070] This embodiment is further optimized on the basis of any one of the above embodiments 1-5. In this embodiment, in the database, file processing rules are configured according to information such as equipment, site, original file model, processing method, processed file format, etc. The file processing methods include file merging, file reading, file updating, and file parsing.

[0071] The other parts of this embodiment are the same as any one of the above embodiments 1-5, so they are not repeated here.

[0072] Embodiment 7:

[0073] This embodiment discloses a system matching the method in embodiment 1, such as Figure 2 As shown, in the system, NAS disk, (Network Attached Storage), network attached storage; BC system (Block Control System), equipment module control system; MES system (Manufacturing Executing System), manufacturing execution system; site: (Operation), MES system is used to manage the concept introduced by the manufacturing process. The other parts of this embodiment are the same as those of embodiment 1, so they are not repeated here.

[0074] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any simple modification or equivalent change made to the above embodiment based on the technical essence of the present invention shall fall within the protection scope of the present invention.

Claims

1. A method for processing Fab plant equipment production data files, characterized in that: The following steps are involved: Step S1. Configure equipment sites A, B and C. When production posting is performed between site A and process equipment and site B testing equipment, file data is generated and uploaded to the NAS disk. At the same time, the process equipment and testing equipment report posting signals to the BC system. Step S2. The BC system reports the received posting signal to the MES system, and the MES system records and updates the posting signal; Step S3. Perform file modeling in the file processing system, configure file parsing rules and file processing rules in the file model, and execute processing on the original files of the process equipment and the detection equipment according to the file processing rules; Step S4. After the file processing system processes the original files of the process equipment and the testing equipment according to the file parsing rules and file processing rules in the file model, it generates a result file in the MES unified format and uploads the result file to the NAS disk; Step S5. When the MES system posts to site C, it reads the files processed by the NAS disk and determines and uses the data; The method for performing file modeling in the file processing system in step S3 includes: Step S3.

1. Establish a file model in the database in XML format, and configure the file parsing rules and file processing rules corresponding to the file model; Step S3.

2. Configure the configuration file to process the task and control the start and stop of the task; Step S3.

3. Abstract the production data files of different formats generated by the equipment into different tree structures to generate a data model; Step S3.

4. Read the file from the NAS disk according to the data model, and parse the data model into an Element object according to the file model; Step S3.

5. Read the file processing rules, execute the processing on the original files of the process equipment and the detection equipment to generate new files.

2. A method for processing Fab plant equipment production data files according to claim 1, characterized in that: The file processing rules corresponding to the configuration file model in step S3.1 include: Users can customize the file processing method according to their needs; Process the original files in the database according to the device and site, and configure file processing rules according to the file format after processing; The file processing method includes file merging, file reading, file updating and file parsing.

3. A method for processing Fab plant equipment production data files according to claim 1, characterized in that: The file parsing rules corresponding to the configuration file model in step S3.1 include: Process the production data files generated by a single device and output the contents to the target file according to the file format defined by the file processing rules; Process production data files of the same format generated by multiple devices, and output the content to the target file according to the file format defined by the file processing rules; Process production data files of different formats generated by multiple devices, and output the content to the target file according to the file format defined by the file processing rules.

4. A method for processing Fab plant equipment production data files according to claim 1, characterized in that: The step S3.3 comprises: Each node of the tree structure corresponds to different content of the production data file; According to the abstract tree structure, the attributes of each node are configured in the database to maintain a unified data model.

5. A method for processing Fab plant equipment production data files according to claim 1, characterized in that: The execution process in step S3.5 includes: Users specify the file processing time, processing steps and task cycle in the file processing rules according to their needs; The task is executed in the database according to the task ID, task type, task cycle, file processing rules and whether the task is configured to be executed.

6. A system for processing Fab plant equipment production data files, based on the method for processing Fab plant equipment production data files according to any one of claims 1 to 5, characterized in that: It includes file processing system, equipment site, NAS disk, MES system and BC system, including: The file processing system is used to parse and process the original files of the equipment according to the file parsing rules and file processing rules; it is used to generate files in a unified format of the MES system according to the file parsing rules and file processing rules; Equipment site, used to generate file data during production posting and upload it to NAS disk, used to report the generation of posting signal to BC system; NAS disk, used to receive file data uploaded by the device, and to read the parsed files on its own NAS disk after receiving the signal reported by the site, and perform judgment operations; The MES system is used to receive the posting signal from the BC system and record and update the posting signal; The BC system is used to receive the posting signal transmitted by the equipment and report the received posting signal to the MES system.

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