Ultraviolet irradiation device

Abstract

An ultraviolet irradiation device is provided, which can properly cool a lamp and also properly cool electrical components disposed inside the device, and can prevent the electrical components from being degraded by ozone. The ultraviolet irradiation device (10) comprises: a housing (11); a partition plate (14) which divides the interior of the housing (11) into a cooling section (15a) and a light source section (15b); a first through hole (14a) formed in the partition plate (14) which connects the interior of the cooling section (15a) with the interior of the light source section (15b); a light source (lamp) (51) which is disposed inside the light source section (15b) and radiates ultraviolet rays; electrical components (41, 42) which are disposed inside the cooling section (15a); a rectifying component which guides cooling air supplied to the interior of the cooling section (15a) toward the electrical components (41, 42); and an exhaust path (31) which is connected to the interior of the light source section (15b) and is not connected to the interior of the cooling section (15a). Cooling air is introduced from the cooling section (15a) through the first through hole (14a) to the light source section (15b), and is discharged from the light source section (15b) via the exhaust passage (31) as exhaust air.

Description

Technical Field

[0001] The present invention relates to an ultraviolet irradiation device for radiating ultraviolet rays. Background Art

[0002] In the past, ultraviolet irradiation devices using excimer lamps as light sources were used for cleaning semiconductor wafers, etc. In such ultraviolet irradiation devices, if the excimer lamps become high temperature, the ultraviolet transmittance of the light emitting tubes decreases, and the desired ultraviolet intensity can no longer be obtained, so the excimer lamps need to be cooled to a suitable temperature.

[0003] For example, Patent Document 1 (Japanese Patent Application Laid-Open No. 2017-157458) discloses an ultraviolet irradiation device including a cooling mechanism for supplying cooling air to a lamp.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2017-157458 Summary of the invention

[0007] Problems to be solved by the invention

[0008] In the housing of the ultraviolet irradiation device, there are cases where electrical components such as a lighting power supply (transformer) for lighting the lamp and a sensor (photodiode) for confirming that the lamp is lit are accommodated. Such electrical components have a heat resistance temperature and need to be cooled to an appropriate temperature. In addition, in the ultraviolet irradiation device, ozone is generated by the ultraviolet rays emitted from the lamp, and there is a problem that the above-mentioned electrical components are degraded by ozone.

[0009] However, the technology described in the above-mentioned Patent Document 1 (Japanese Patent Application Publication No. 2017-157458) does not take into account any countermeasures for temperature rise or measures to prevent deterioration due to ozone when electrical components such as a lighting power supply and a sensor are provided inside the ultraviolet irradiation device.

[0010] Therefore, an object of the present invention is to provide an ultraviolet irradiation device that can appropriately cool a lamp and also appropriately cool electrical components provided inside the device, and that can prevent the electrical components from being degraded by ozone.

[0011] Means used to solve problems

[0012] In order to solve the above-mentioned problems, one method of the ultraviolet irradiation device of the present invention comprises: a shell; a partition plate fixed to the above-mentioned shell, dividing the interior of the above-mentioned shell into a cooling part and a light source part; a first through hole formed in the above-mentioned partition plate, connecting the interior of the above-mentioned cooling part with the interior of the above-mentioned light source part; a light source, arranged in the interior of the above-mentioned light source part, radiating ultraviolet rays; electrical components, arranged in the interior of the above-mentioned cooling part; a rectifying component, guiding the cooling wind supplied to the interior of the above-mentioned cooling part toward the above-mentioned electrical components; and an exhaust path, connected to the interior of the above-mentioned light source part and not connected to the interior of the above-mentioned cooling part, the cooling wind is introduced into the above-mentioned light source part from the above-mentioned cooling part through the above-mentioned first through hole, and is discharged as exhaust wind from the above-mentioned light source part via the above-mentioned exhaust path.

[0013] Thus, the electrical components arranged inside the cooling unit and the light source arranged inside the light source unit can be properly cooled. Therefore, it is possible to prevent the ultraviolet transmittance from decreasing due to the light source becoming high temperature. In addition, the temperature of the electrical components can be maintained below the heat-resistant temperature, and the life of the electrical components can be extended. Furthermore, since the electrical components are arranged inside the cooling unit on the upstream side of the light source in the flow of cooling air, it is possible to reliably prevent the electrical components from being degraded due to ozone.

[0014] Furthermore, in the ultraviolet irradiation device, the rectifying member may be a plate-shaped member disposed near the electrical component. In this case, the flow of cooling air can be easily and appropriately formed so as to reliably pass through the electrical component.

[0015] Furthermore, in the ultraviolet irradiation device, the electrical component may include a sensor for confirming that the light source is on and a lighting power supply for lighting the light source. In this case, the degradation of the lighting confirmation sensor and the lighting power supply can be appropriately suppressed, so that the ultraviolet irradiation device can be properly operated.

[0016] In addition, in the above-mentioned ultraviolet irradiation device, the above-mentioned partition plate may divide the interior of the above-mentioned shell into the above-mentioned cooling part as the upper space and the above-mentioned light source part as the lower space; at least a portion of the above-mentioned exhaust path is formed directly above the above-mentioned light source inside the above-mentioned cooling part; and there is also a second through hole formed on the above-mentioned partition plate and connecting the above-mentioned light source part with the above-mentioned exhaust path.

[0017] In this case, a flow of wind that simultaneously exhausts ozone, cools the light source, and cools the electrical components can be formed inside the casing.

[0018] Furthermore, in the ultraviolet irradiation device, the electrical component may be fixed to the upper surface of the partition plate, and a first air intake hole may be formed near the partition plate on the side wall of the housing forming the cooling unit. In this case, the cooling air supplied from the first air intake hole can be reliably blown onto the electrical component fixed to the upper surface of the partition plate, and the electrical component can be effectively cooled.

[0019] Furthermore, in the ultraviolet irradiation device, the electrical component may be arranged above the interior of the cooling unit, and a second air intake hole may be formed above the electrical component on the upper wall of the housing. In this case, the cooling air supplied from the second air intake hole can be reliably blown onto the electrical component arranged above the interior of the cooling unit, and the electrical component can be effectively cooled.

[0020] Furthermore, the ultraviolet irradiation device may further include a handle portion disposed on the side wall of the shell forming the cooling portion; and a third air intake hole may be formed on the upper wall of the shell near the side wall where the handle portion is disposed.

[0021] In this case, the cooling air supplied from the third air intake hole can be blown onto the side wall, and the handle provided on the side wall can be cooled. Thus, the handle can be prevented from becoming too hot to be held, so that the ultraviolet irradiation device can be properly carried and moved. In addition, the side wall provided with the handle can also be cooled, so that the temperature rise of the housing can be suppressed, and the housing bending caused by thermal expansion can be prevented.

[0022] Furthermore, in the ultraviolet irradiation device, at least a portion of the handle may be provided to protrude from a side wall of the housing toward an interior of the cooling unit.

[0023] In this case, the cooling air supplied from the third air intake hole can be reliably blown onto the handle portion, and the handle portion can be effectively cooled.

[0024] Furthermore, the above-mentioned ultraviolet irradiation device can also have a plurality of the above-mentioned shells; the above-mentioned light source is arranged along the length direction of the above-mentioned shell; the above-mentioned shell has a pair of wider side walls parallel to the above-mentioned length direction and a pair of narrower side walls perpendicular to the above-mentioned length direction; the outer surface of the above-mentioned wider side wall is a flat surface, and no holes are formed for the above-mentioned cooling air and the above-mentioned exhaust air to pass through; the plurality of the above-mentioned shells are arranged in a manner so that the above-mentioned wider side walls are arranged opposite to each other.

[0025] Even in the ultraviolet irradiation device in which a plurality of housings are arranged in this manner, the lamp can be appropriately cooled, and the electrical components provided inside the device can also be appropriately cooled, thereby preventing the electrical components from being degraded by ozone.

[0026] Furthermore, in the ultraviolet irradiation device, the narrow side wall may be rotatably connected to the upper wall of the housing.

[0027] In this case, since the narrow side wall can be opened, even when a plurality of housings are arranged with the wide side walls facing each other, it is easy to enter the housing. Therefore, maintenance work such as replacement of the light source can be appropriately and easily performed.

[0028] Effects of the Invention

[0029] According to the present invention, the lamp can be appropriately cooled and the electrical components provided inside the device can also be appropriately cooled, and the electrical components can be prevented from being degraded by ozone.

[0030] The above-mentioned objects, forms and effects of the present invention as well as the objects, forms and effects of the present invention not described above can be understood by those skilled in the art based on the following specific implementation methods (detailed description of the invention) by referring to the drawings and the claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is an external view of the ultraviolet irradiation device of this embodiment.

[0032] Figure 2 This is a schematic diagram of the structure of an ultraviolet irradiation device.

[0033] Figure 3 It is a diagram showing the first through hole and the second through hole.

[0034] Figure 4 It is a diagram schematically showing the flow of cooling air inside the cooling unit.

[0035] Figure 5 This is a diagram schematically showing the flow of cooling air supplied from the third air intake hole.

[0036] Figure 6 This is a diagram schematically showing the flow of cooling air inside the light source unit. DETAILED DESCRIPTION

[0037] Hereinafter, embodiments of the present invention will be described based on the drawings.

[0038] Figure 1 1 is an external view of the ultraviolet irradiation device 10 of the present embodiment. In the present embodiment, the ultraviolet irradiation device 10 is described as being small and light enough to be carried by one person.

[0039] In addition, in the following description, Figure 1 The X direction is called the "width direction". Figure 1 The Y direction is called the "length direction". Figure 1 The Z direction is called the "height direction".

[0040] like Figure 1 As shown, the ultraviolet irradiation device 10 has a rectangular parallelepiped housing 11. The housing 11 has: a pair of narrow side walls 11a perpendicular to the longitudinal direction; an upper wall 11b; and a pair of wide side walls 11c parallel to the longitudinal direction. For example, the outer dimensions (length×width×height) of the housing 11 of the ultraviolet irradiation device 10 can be 500 mm to 750 mm×160 mm×360 mm.

[0041] A first air intake hole 21 is formed on the side wall 11a, and a second air intake hole 22 and a third air intake hole 23 are formed on the upper wall 11b. These air intake holes 21 to 23 are openings for taking in external air as cooling air into the interior of the ultraviolet irradiation device 10, and for example, the air intake holes can be composed of a plurality of slits. The cooling air taken in through these air intake holes 21 to 23 passes through a predetermined air duct inside the housing 11 to cool the components of the ultraviolet irradiation device 10, and is discharged from the exhaust path 31 as exhaust air.

[0042] The side wall 11a may be connected to the upper wall 11b via a hinge 11d, for example. That is, the side wall 11a may be rotatable about the X-axis with respect to the upper wall 11b around the hinge 11d.

[0043] Figure 2 It is a schematic diagram of the structure of the ultraviolet irradiation device 10.

[0044] If the Figure 2 As shown, both ends of a partition plate 14 are fixed to the side walls of the housing 11, and the housing 11 is divided into upper and lower parts by the partition plate 14. The upper space of the divided space is a cooling part 15a, and the lower space is a light source part 15b.

[0045] A portion of an exhaust passage 31 through which exhaust air flows is formed in the cooling portion 15a. The exhaust passage 31 is, for example, cylindrical in shape, and is arranged so that its axial direction and height direction coincide with each other. The upper end of the exhaust passage 31 is inserted into an opening provided in the upper wall 11b of the housing 11, and protrudes from the upper wall 11b to the outside (upward) of the housing 11.

[0046] The lower end of exhaust passage 31 is connected to the upper wall of exhaust chamber 32 formed in cooling unit 15a. Exhaust chamber 32 is formed of a rectangular parallelepiped housing with an open bottom, and its four side walls are connected to the upper surface of partition plate 14 in an airtight manner.

[0047] The interior of the exhaust passage 31 is connected to the interior of the exhaust chamber 32, but the interiors of the exhaust passage 31 and the exhaust chamber 32 are not connected to the interior of the cooling unit 15a, that is, the interiors of the exhaust passage 31 and the exhaust chamber 32 are spatially independent from the interior of the cooling unit 15a.

[0048] The partition plate 14 is formed with a first through hole 14a that connects the interior of the cooling portion 15a with the interior of the light source portion 15b. Figure 3 As shown, the first through holes 14 a are formed along the longitudinal direction on both sides of the exhaust chamber 32 in the width direction of the ultraviolet irradiation device 10 .

[0049] In addition, if Figure 3 As shown, the partition plate 14 is formed with a second through hole 14b that connects the inside of the exhaust path 31 (the inside of the exhaust chamber 32) with the inside of the light source unit 15b. Figure 3 As shown, the second through hole 14 b is formed in the central portion of the partition plate 14 along the longitudinal direction.

[0050] The light source unit 15b is provided with a lamp 51 as a light source. As the lamp 51, an excimer lamp that radiates ultraviolet rays in a specific wavelength range can be used. The lamp 51, for example, includes a light-emitting tube having a flat rectangular cross section perpendicular to the central axis of the lamp, and the lamp 51 is arranged so that the central axis of the lamp is consistent with the longitudinal direction of the ultraviolet irradiation device 10. The light-emitting tube can be, for example, a glass tube made of synthetic quartz.

[0051] The length of the lamp 51 in the longitudinal direction may be, for example, 385 mm to 635 mm. In addition, the input power of the lamp 51 may be, for example, about 250 W in the case of the 385 mm lamp 51 and 420 W in the case of the 635 mm lamp 51.

[0052] like Figure 3 As shown, the second through hole 14 b and the exhaust path 31 are formed right above the lamp 51 .

[0053] In addition, in the light source section 15b, a heat insulating plate 52 may be provided between the housing 11 and the lamp 51 along the lamp 51. The heat insulating plate 52 may be arranged on both sides of the lamp 51 in the width direction of the ultraviolet irradiation device 10. For example, the heat insulating plate 52 may be a plate-like member with a C-shaped cross section, and the plate-like member with a C-shaped cross section may include vertical surfaces 52a that are respectively fixed to the lower surface of the partition plate 14 and are continuous downward from the lower surface of the partition plate 14, and horizontal surfaces 52b that protrude inwardly in the width direction from the lower end of the vertical surface 52a. In this case, a predetermined gap is formed between the inner end of the vertical surface 52a in the width direction and the two side surfaces of the lamp 51 in the width direction.

[0054] Thus, by providing the heat insulating plate 52, it is possible to prevent the heat from the lamp 51 from being directly transferred to the housing 11. Therefore, it is possible to prevent the temperature of the housing 11 from excessively rising.

[0055] The first through hole 14a is formed on the outside in the width direction relative to the heat insulating plate 52, and connects the inside of the cooling portion 15a with the outside of the space inside the light source portion 15b surrounded by the heat insulating plate 52. The second through hole 14b connects the inside of the exhaust path 31 (the inside of the exhaust chamber 32) with the inside of the space inside the light source portion 15b surrounded by the heat insulating plate 52.

[0056] Back to Figure 2 , electrical components such as a sensor (photodiode) 41 for confirming that the lamp 51 is lit and a lighting power supply (transformer) 42 for lighting the lamp 51 are arranged inside the cooling section 15a of the ultraviolet irradiation device 10. The ultraviolet irradiation device 10 of this embodiment is a portable ultraviolet irradiation device, so it is necessary to store various electrical components required for lighting control of the ultraviolet irradiation device in the housing.

[0057] The sensor 41 is arranged near the lamp 51 to confirm that the lamp 51 is lit. Specifically, the sensor 41 is fixed to the partition plate 14. The partition plate 14 is provided with a window portion 14c (see Figure 4 ), the sensor 41 is configured to detect the light emitted from the lamp 51 and transmitted through the window portion 14c. Here, the window portion 14c can be configured as follows: a glass transparent to the light emitted from the lamp 51 is arranged in an opening formed in the partition plate 14, and is sealed by an O-ring or the like.

[0058] The lighting power source 42 is disposed above the interior of the cooling unit 15a. In addition, a rectifying plate (rectifying member) 43 is provided near the lighting power source 42. The rectifying plate 43 is a plate-shaped member that guides the cooling air supplied from the second air intake hole 22 provided in the upper wall 11b toward the lighting power source 42, and is formed into a cylindrical or cylindrical shape, for example. Figure 2 The rectifying plate 43 can be fixed to the side wall 11 c , for example. The lighting power source 42 can be placed on the bottom surface of the rectifying plate 43 .

[0059] The lighting power source 42 is supplied with electric power via the electric power cable 13 .

[0060] The first air intake hole 21 is formed on the narrow side wall 11a near the partition plate 14. The second air intake hole 22 is formed on the upper wall 11b above the lighting power source 42. That is, the first air intake hole 21 and the second air intake hole 22 are formed near the sensor 41 and the lighting power source 42, respectively.

[0061] Furthermore, the third air intake hole 23 is formed on the upper wall 11b near the side wall 11c, for example, at a position opposite to the first through hole 14a. Here, the opening area (total area) of the third air intake hole 23 may be equal to the opening area (total area) of the first through hole 14a.

[0062] The ultraviolet irradiation device 10 is provided with an exhaust fan (not shown), and by driving the exhaust fan, the inside of the space surrounded by the heat insulation plate 52 in the exhaust path 31, the exhaust chamber 32, and the light source unit 15b can be made to have a negative pressure relative to the pressure outside the device. Thus, external air is taken into the cooling unit 15a from the air intake holes 21 to 23 provided on the housing 11.

[0063] like Figure 4 As shown, the wind 61 taken into the cooling unit 15a from the first air intake hole 21 blows on the sensor 41 arranged near the first air intake hole 21, and functions as cooling wind for cooling the sensor 41. At this time, the partition plate 14 functions as a rectifying member that guides the cooling wind supplied from the first air intake hole 21 to the inside of the cooling unit 15a toward the sensor 41. The wind 62 that has cooled the sensor 41 flows into the light source unit 15b through the first through hole 14a formed in the partition plate 14.

[0064] On the other hand, the wind 63 taken into the cooling section 15a from the second air intake hole 22 is changed in flow direction by the rectifying plate 43 and blown onto the lighting power source 42 arranged near the second air intake hole 22. In this way, the rectifying plate 43 guides the cooling wind supplied from the second air intake hole 22 to the inside of the cooling section 15a in the direction of the lighting power source 42 instead of flowing downward. The wind 64 blown onto the lighting power source 42 functions as cooling wind for cooling the lighting power source 42, and the wind 65 after cooling the lighting power source 42 flows into the light source section 15b through the first through hole 14a formed in the partition plate 14.

[0065] In this embodiment, the second air intake hole 22 is formed near the center of the upper wall 11b in the longitudinal direction. As a result, the cooling air supplied from the second air intake hole 22 to the inside of the cooling portion 15a is blown onto the end of the rectifying plate 43, flows along the rectifying plate 43 to the outside in the longitudinal direction of the ultraviolet irradiation device 10, and then flows downward from the first through hole 14a into the light source portion 15b. Therefore, the cooling air can be appropriately blown onto the lighting power supply 42 placed on the rectifying plate 43.

[0066] Furthermore, the wind 66 taken into the cooling portion 15a from the third air intake hole 23 flows linearly toward the first through hole 14a disposed opposite to the cooling portion 15a, and flows into the light source portion 15b through the first through hole 14a.

[0067] Here, a handle 12 for a person to hold when carrying the ultraviolet irradiation device 10 is provided on the wide side wall 11c of the ultraviolet irradiation device 10. Figure 5 As shown in FIG. 1 , the handle 12 is provided so as to protrude from the side wall 11c into the cooling portion 15a. Since the third air intake hole 23 is formed near the side wall 11c of the upper wall 11b, the wind 66 taken into the cooling portion 15a from the third air intake hole 23 flows along the side wall 11c and directly blows on the handle 12 before flowing into the first through hole 14a. That is, the wind 66 functions as cooling wind for cooling the handle 12.

[0068] Figure 6 It is a diagram schematically showing the flow of wind inside the light source unit 15b.

[0069] The wind 66 introduced into the light source unit 15b from the first through hole 14a flows downward along the vertical surface 52a of the heat insulating plate 52, passes through the gap formed between the lamp 51 and the horizontal surface 52b of the heat insulating plate 52, and flows into the space surrounded by the heat insulating plate 52.

[0070] Wind 67 flowing into the space surrounded by heat shield 52 flows along the peripheral surface of lamp 51 and functions as cooling wind for cooling lamp 51. Wind 68 cooling lamp 51 flows toward second through hole 14b and flows into exhaust chamber 32 through second through hole 14b.

[0071] In the present embodiment, the second through hole 14b is formed right above the lamp 51. Therefore, the wind 67 flowing from the gap between the lamp 51 and the heat shield 52 into the space surrounded by the heat shield 52 flows along the surface of the lamp 51 and flows into the exhaust chamber 32 through the second through hole 14b. Therefore, the lamp 51 can be appropriately cooled.

[0072] The wind 69 introduced into the exhaust chamber 32 becomes exhaust wind, and is exhausted to the outside of the ultraviolet irradiation device 10 through the exhaust passage 31 .

[0073] In this way, the cooling wind supplied to the inside of the cooling unit 15a cools the electrical components such as the sensor 41 and the lighting power supply 42 in the cooling unit 15a, and then cools the lamp 51 in the inside of the light source unit 15b. That is, the wind that has cooled the electrical components is used to cool the lamp 51. Since the temperature of the electrical components is very low compared to the temperature of the lamp 51, the wind that has cooled the electrical components can be used as the cooling wind for cooling the lamp 51 without any problem.

[0074] As described above, in the ultraviolet irradiation device 10 of the present embodiment, the cooling air supplied to the interior of the cooling portion 15a from the air intake hole formed on the wall of the shell 11 forming the cooling portion 15a is introduced from the cooling portion 15a through the first through hole 14a to the light source portion 15b, and is discharged from the light source portion 15b via the exhaust path 31 as exhaust air.

[0075] Thus, since cooling air can be introduced into the light source unit 15b where the lamp 51 is arranged, the lamp 51 can be appropriately cooled. Therefore, a decrease in the ultraviolet transmittance of the light emitting tube provided in the lamp 51 can be suppressed, and a desired ultraviolet intensity can be obtained.

[0076] Furthermore, since cooling air before cooling the lamp 51 can be introduced into the cooling unit 15a where electrical components such as the sensor 41 (photodiode) and the lighting power supply 42 (transformer) are arranged, the electrical components can be appropriately cooled. Therefore, the life of the electrical components can be extended.

[0077] Here, the ultraviolet irradiation device 10 can be provided with a rectifying component (rectifier plate 43, partition plate 14) for guiding the cooling wind supplied to the inside of the cooling unit 15a to the electrical components. Thus, the electrical components can be effectively cooled. In addition, the rectifying component can be a plate-shaped component arranged near the electrical components. Thus, the flow of cooling wind that reliably passes through the electrical components can be easily and appropriately formed.

[0078] In particular, the ultraviolet irradiation device 10 of this embodiment can form an appropriate flow of cooling air inside the cooling section 15a by appropriately defining the positional relationship between the electrical components and the air intake holes 21 and 22 for taking the cooling air into the interior of the cooling section 15a, thereby reliably cooling the electrical components installed in the cooling section 15a.

[0079] Specifically, the first air intake hole 21 is formed near the sensor 41, and the second air intake hole 22 is formed near the lighting power source 42. Therefore, fresh cooling air taken in from outside the device can be blown onto these electrical components first, and the electrical components can be cooled efficiently.

[0080] Furthermore, by providing the rectifying plate 43 having a cylindrical shape or a U-shaped cross section so as to surround the lighting power source 42 which is the hottest among the electrical components, the lighting power source 42 can be reliably cooled.

[0081] Furthermore, since the interior of the light source unit 15b in which the lamp 51 is disposed is directly connected to the exhaust path 31, ozone generated in the light source unit 15b by ultraviolet rays emitted from the lamp 51 can be properly discharged. In addition, the interior of the exhaust path 31 is configured not to be connected to the interior of the cooling unit 15a. Thus, it is possible to configure the ozone generated in the light source unit 15b not to flow into the cooling unit 15a, and it is possible to prevent the electrical components provided in the cooling unit 15a from being exposed to ozone.

[0082] In this way, since the electrical components are arranged inside the cooling unit 15a on the upstream side of the lamp 51 in the flow of the cooling air, it is possible to reliably prevent the electrical components from being degraded by ozone.

[0083] Furthermore, in the ultraviolet irradiation device 10, if the heat of the lamp 51 is directly transferred to the housing 11, a temperature difference occurs between the upper side (cooling unit 15a side) and the lower side (light source unit 15b side) of the housing 11, and the housing 11 may bend due to the difference in thermal expansion. The irradiated object (workpiece) is arranged below the housing 11 (light irradiation side of the lamp 51), but the gap between the housing 11 and the workpiece is generally about several mm. Therefore, if the housing 11 is flexed, the housing 11 may come into contact with the workpiece.

[0084] In this embodiment, the third air intake hole 23 is formed near the side wall 11c having a wider width of the upper wall 11b. Thus, the cooling air taken in from the third air intake hole 23 can be blown onto the side wall 11c, and the side wall 11c can be uniformly cooled. Therefore, the temperature of the housing 11 can be made uniform, and as a result, the deflection of the housing 11 can be appropriately suppressed, and the position of the housing 11 relative to the workpiece can be stabilized and maintained.

[0085] Furthermore, since the handle 12 is provided on the side wall 11c, the handle 12 provided on the side wall 11c can also be cooled by blowing the cooling air taken in from the third air intake hole 23 onto the side wall 11c. At this time, if the handle 12 protrudes from the side wall 11c into the interior of the cooling portion 15a, the cooling air taken in from the third air intake hole 23 can be reliably blown onto the handle 12, and the handle 12 can be effectively cooled.

[0086] This can prevent the handle 12 from becoming too hot to be gripped, and the ultraviolet irradiation device 10 can be appropriately carried and moved.

[0087] Here, if the third air intake hole 23 is arranged opposite to the first through hole 14a, the fresh cooling air taken in from the third air intake hole 23 can flow into the first through hole 14a in a straight line. Therefore, the side wall 11c and the handle portion 12 can be properly cooled. In addition, the lamp 51 and the heat insulation board 52 arranged inside the light source portion 15b can also be properly cooled. By cooling the heat insulation board 52, the heat insulation function of the heat insulation board 52 can be improved.

[0088] In addition, in this embodiment, it is described that Figure 2 The third air intake hole 23 and the first through hole 14a are shown as being formed in a range shorter than the length of the lamp 51 in the longitudinal direction, but the third air intake hole 23 and the first through hole 14a may also be formed in a range equal to or longer than the length of the lamp 51 in the longitudinal direction.

[0089] In the ultraviolet irradiation device 10 of the present embodiment, the shape and number of the air intake holes 21 to 23 for taking the cooling air into the cooling portion 15a are not limited to Figure 1 The shape and number of the air intake holes 21 to 23 can be arbitrarily set as long as they are set to form a flow in which the cooling air passes through the electrical components arranged in the cooling part 15a and is introduced into the light source part 15b and is discharged from the exhaust path 31. At this time, the flow rate of the cooling air is set to, for example, 2 m / s or more.

[0090] Furthermore, the ultraviolet irradiation device 10 of the present embodiment may include a plurality of housings 11 .

[0091] The handle 12 provided on the wider side wall 11c of the housing 11 has a shape protruding into the inside of the housing 11, and the outer surface of the side wall 11c is a flat surface. In addition, the air intake hole for taking in cooling air and the exhaust hole for exhausting exhaust air are not formed on the side wall 11c. Therefore, the ultraviolet irradiation device 10 can also be configured by arranging and configuring a plurality of housings 11 so that the wider side walls 11c face each other. In this way, a large ultraviolet irradiation device can be configured.

[0092] Furthermore, in the ultraviolet irradiation device 10 of the present embodiment, the narrow side wall 11a is connected to the upper wall 11b of the housing 11 by a hinge 11d, and the side wall 11a can rotate around the X-axis relative to the upper wall 11b with the hinge 11d as the center. By opening the narrow side wall 11a, it is possible to enter the housing 11. Therefore, even in the case where a plurality of ultraviolet irradiation devices 10 are arranged so that the wide side walls 11c face each other, maintenance work such as replacing the lamp 51 in the housing 11 can be easily performed.

[0093] Thus, according to the ultraviolet irradiation device 10 of this embodiment, a wind flow that simultaneously exhausts ozone, cools the ultraviolet light source, and cools the electrical components can be formed inside the housing 11. Furthermore, the electrical components can be arranged on the upstream side of the ultraviolet light source in the wind flow. Thus, the lamp 51 as the light source can be appropriately cooled and the electrical components in the housing 11 can also be reliably cooled, and the electrical components will not be degraded by ozone.

[0094] (Variation Example)

[0095] In the above embodiment, the case where the interior of the housing 11 is divided into the upper and lower parts by the partition plate 14 is described, but the division method is not limited to the above. For example, the interior of the housing 11 may be divided into the left and right parts.

[0096] In the above embodiment, the exhaust passage 31 is described as being formed inside the cooling unit 15a, but it may be formed outside the cooling unit 15a as long as it is connected to the inside of the light source unit 15b and not connected to the inside of the cooling unit 15a.

[0097] In addition, a specific embodiment is described above, but the embodiment is only an example and is not intended to limit the scope of the present invention. The device and method described in this specification can be specifically implemented in forms other than the above. In addition, the above embodiment can be appropriately omitted, replaced and changed without departing from the scope of the present invention. The form after the omission, replacement and change is also included in the scope described in the claims and equivalent thereto, and belongs to the technical scope of the present invention.

[0098] Description of symbols

[0099] 10…ultraviolet irradiation device; 11…housing; 12…handle portion; 14…partitioning plate; 14a…first through hole; 14b…second through hole; 15a…cooling portion; 15b…light source portion; 21…first air intake hole; 22…second air intake hole; 23…third air intake hole; 31…exhaust path; 32…exhaust chamber; 41…sensor; 42…lighting power supply; 43…rectifier plate; 51…lamp; 52…heat shielding plate; 52a…vertical surface; 52b…horizontal surface.

Claims

1. An ultraviolet irradiation device, have: case; A partition plate is fixed to the housing to divide the interior of the housing into a cooling portion and a light source portion; a first through hole formed in the partition plate, connecting the interior of the cooling part with the interior of the light source part; A light source is disposed inside the light source portion and radiates ultraviolet rays; An electrical component is disposed inside the cooling unit; a rectifying member for guiding the cooling wind supplied to the interior of the cooling unit toward the electrical component; and The exhaust path is connected to the interior of the light source unit and is not connected to the interior of the cooling unit. The exhaust path passes through the cooling unit. The cooling air is introduced from the cooling unit to the light source unit through the first through hole, and is discharged from the light source unit as exhaust air via the exhaust passage. The partition plate is fixed to the side wall of the housing, and divides the interior of the housing into the cooling part as the upper space and the light source part as the lower space. At least a portion of the exhaust path is formed directly above the light source in the interior of the cooling unit. The ultraviolet irradiation device further includes a second through hole formed in the central portion of the partition plate along the longitudinal direction and connecting the light source portion with the exhaust passage. The second through hole is formed right above the light source in the interior of the cooling unit.

2. The ultraviolet irradiation device according to claim 1, The rectifying member is a plate-shaped member disposed near the electric component.

3. The ultraviolet irradiation device according to claim 1 or 2, The electrical components include a sensor for confirming that the light source is turned on, and a lighting power supply for turning on the light source.

4. The ultraviolet irradiation device according to claim 1, The electrical components are fixed to the upper surface of the partition plate. A first air intake hole is formed in a side wall of the housing forming the cooling unit, near the partition plate.

5. The ultraviolet irradiation device according to claim 1 or 4, The electrical components are arranged above the interior of the cooling unit. A second air intake hole is formed above the electrical component on the upper wall of the housing.

6. The ultraviolet irradiation device according to claim 1 or 4, The cooling unit further comprises a handle, which is provided on a side wall of the housing forming the cooling unit. A third air intake hole is formed on the upper wall of the housing near the side wall where the handle is provided.

7. The ultraviolet irradiation device according to claim 6, The handle is provided so that at least a portion thereof protrudes from a side wall of the housing toward the inside of the cooling unit.

8. The ultraviolet irradiation device according to claim 1 or 2, The above-mentioned shells are provided with a plurality of rectangular parallelepipeds, The light source is arranged along the length direction of the shell. The housing includes a pair of side walls parallel to the longitudinal direction and a pair of side walls perpendicular to the longitudinal direction. The outer surface of the side wall parallel to the longitudinal direction is a flat surface, and no holes are formed for the cooling air and the exhaust air to pass through. The plurality of housings are arranged in parallel so that the side walls parallel to the longitudinal direction face each other.

9. The ultraviolet irradiation device according to claim 8, The side wall perpendicular to the longitudinal direction is rotatably connected to the upper wall of the housing.

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