Transport robot and tower lift including the same

Abstract

A transport robot includes a robot arm configured to transport a plurality of containers; a robot hand connected to one end of the robot arm, configured to support a first container having a first size in the container; and a clamp disposed below the robot hand, configured to clamp a second container having a second size different from the first size. Thus, the transport robot is capable of transporting containers having different sizes from each other.

Description

Technical Field

[0001] The present disclosure relates to a transport robot and a tower lift including the same. More specifically, the present disclosure relates to a transport robot capable of transporting containers having different sizes from each other, and a tower lift including the transport robot capable of transporting containers having different sizes from each other to leave a floor / arrive at a floor. Background Art

[0002] Generally, a manufacturing system for manufacturing a semiconductor device or a display device has a multi-layer structure and includes a plurality of manufacturing equipment installed at each layer, each for performing unit processes such as deposition, exposure, etching, ion implantation, and cleaning.

[0003] By repeatedly performing a series of unit processes on a silicon wafer used as a semiconductor substrate or a glass substrate used as a display substrate, a semiconductor device or a display device may be manufactured.

[0004] On the other hand, the tower lift may extend through each floor to operate in a vertical direction to transport substrates between the floors in a vertical direction. The tower lift may include a carrier robot having a transfer robot for transporting a container stacked with a plurality of substrates. Further, the tower lift may transport a plurality of containers having different sizes from each other, such as a first container for receiving a silicon wafer, a second container for receiving a reticle, and the like.

[0005] Therefore, it is necessary to realize a container transport system that can collect and transport containers of different sizes while suppressing a decrease in transport efficiency. Summary of the invention

[0006] Some embodiments of the present invention provide a carrying robot, which includes a robot arm configured to transport multiple containers; a robot hand connected to one end of the robot arm, which is configured to support a first container having a first size in the container; and a clamp disposed under the robot hand, which is configured to clamp a second container having a second size different from the first size.

[0007] In an exemplary embodiment, the second container may include a holding portion at an upper portion thereof, and the clamp may be configured to clamp the holding portion in a sliding manner.

[0008] Here, the clamp may include a first clamping portion and a second clamping portion spaced apart from each other at an interval corresponding to a width of the holding portion.

[0009] In addition, each of the first and second clamping parts may have a "C" shape to face each other, and one of the first and second clamping parts may include a light sensor at its end, and the other of the first and second clamping parts may include a reflector at its end.

[0010] In an exemplary embodiment, the robot arm may have a thickness corresponding to the height of the second container.

[0011] In an exemplary embodiment, the robot arm may have at least two or more stacked arms, and an uppermost arm included in the robot arm may have a thickness corresponding to a height of the second container.

[0012] In an exemplary embodiment, the carrier robot may further include a guide portion provided on a lower surface of the robot hand but not interfering with the clamp, the guide portion being configured to suppress vibration of the second container when the second container is transported.

[0013] In an exemplary embodiment, the carrier robot may further include a control unit configured to differently adjust an operation speed of the robot arm according to the first container and the second container.

[0014] In an exemplary embodiment, the robot hand may include a supporting pin corresponding to a guide groove formed on a lower surface of the first container.

[0015] Some embodiments of the present invention provide a tower lift. The tower lift includes a guide rail extending in a vertical direction, and at least one carrying robot configured to be movable in a vertical direction along the guide rail, the carrying robot configured to transport a plurality of containers, wherein the carrying robot includes a robot arm configured to transfer the plurality of containers; a robot hand connected to one end of the robot arm, the robot hand configured to support a first container having a first size in the container; and a clamp disposed below the robot hand, the clamp configured to clamp a second container having a second size different from the first size.

[0016] In an exemplary embodiment, the second container may include a holding portion at an upper portion thereof, and the clamp may be configured to clamp the holding portion in a sliding manner.

[0017] In an exemplary embodiment, the clamp may include a first clamping portion and a second clamping portion spaced apart from each other at an interval corresponding to a width of the holding portion.

[0018] Here, each of the first clamping portion and the second clamping portion may have a "C" shape to face each other, and one of the first clamping portion and the second clamping portion may include a light sensor at an end thereof, and the other of the first clamping portion and the second clamping portion may include a reflector at an end thereof.

[0019] In an exemplary embodiment, the robot arm may have a thickness corresponding to the height of the second container.

[0020] In an exemplary embodiment, the robot arm may have at least two or more stacked arms, and an uppermost arm included in the robot arm may have a thickness corresponding to a height of the second container.

[0021] In an exemplary embodiment, the carrier robot may further include a guide portion provided on a lower surface of the robot hand but not interfering with the clamp, the guide portion being configured to suppress vibration of the second container when transporting the second container.

[0022] In an exemplary embodiment, the carrier robot may further include a control unit configured to differently adjust an operation speed of the robot arm according to the first container and the second container.

[0023] Some embodiments of the present invention provide a tower lift. The tower lift includes a guide rail extending in a vertical direction, a lifting body configured to be movable in a vertical direction along the guide rail, and a first carrier robot and a second carrier robot connected to the lifting body, the first carrier robot being configured to transport a first container and a second container each having a first size and a second size different from each other, and the second carrier robot being configured to transport the first container, wherein the first carrier robot includes a first robot arm configured to transport the first container or the second container; a first robot hand connected to the end of the first robot arm, configured to support a first container having a first size; and a first clamp disposed below the first robot hand, configured to clamp a second container having a second size, and wherein the second carrier robot may include a second robot arm configured to transport the first container; and a second robot hand connected to the end of the second robot arm, configured to support the first container having the first size.

[0024] In an exemplary embodiment, the second container may include a holding portion at an upper portion thereof, and the first clamp may be configured to clamp the holding portion in a sliding manner.

[0025] In an exemplary embodiment, the clamp may include a first clamping portion and a second clamping portion spaced apart from each other at an interval corresponding to a width of the holding portion.

[0026] According to an exemplary embodiment of the present invention, a robot hand is provided to support a first container having a first size, and a clamp is provided at a lower portion of the robot hand to hold a second container having a second size different from the first size. Therefore, the carrying robot can simultaneously transport the first container and the second container having different sizes from each other.

[0027] On the other hand, when the logistics volume of transporting the first container is greater than the logistics volume of transporting the second container, the carrier robot transports the first container at a higher speed while stably supporting the first container in a supporting manner, thereby improving transportation efficiency.

[0028] The above summary of the present disclosure is not intended to describe each illustrated embodiment or every implementation of the present disclosure. The following detailed description and claims more particularly exemplify these embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The exemplary embodiments may be understood in more detail from the following description in conjunction with the accompanying drawings, in which:

[0030] Figure 1 is a side view of a carrier robot according to an exemplary embodiment of the present invention;

[0031] Figure 2 yes Figure 1 A front view of the robot hand and gripper shown in;

[0032] Figure 3 yes Figure 1 A plan view of the robot hand shown in ;

[0033] Figure 4 yes Figure 1 A side view of the carrier robot shown in FIG. 1 moving toward a second container;

[0034] Figure 5 yes Figure 4 A side view of the state in which the carrier robot is shown holding the second container;

[0035] Figure 6 is a side view of a tower lift according to an exemplary embodiment of the present invention;

[0036] Figure 7 is a side view of a tower lift according to an exemplary embodiment of the present invention;

[0037] Figure 8 is a front view of a container transportation system according to an embodiment of the present invention;

[0038] Fig. 9 yes Figure 8 a plan view of the conveyor shown in ; and

[0039] Fig.10 yes Figure 8 A cross-sectional view of the conveyor shown in FIG. DETAILED DESCRIPTION

[0040] Although various modifications and alternative forms may be made to the various embodiments, details thereof have been shown in the drawings by way of example and will be described in detail. However, it should be understood that the present invention is not intended to limit the claimed invention to the specific embodiments described. On the contrary, the present invention covers all modifications, equivalents and substitutes that fall within the spirit and scope of the subject matter defined by the claims.

[0041] Specific embodiments of the raceway unit and the OHT having the same will be described in detail below in conjunction with the accompanying drawings. However, the present invention can be implemented in different forms and should not be construed as being limited to the embodiments described herein. On the contrary, these embodiments are provided to make the present disclosure thorough and complete and to fully convey the scope of the present invention to those skilled in the art. The same reference numerals always refer to the same elements. In the figures, the sizes of layers and regions are exaggerated for clarity of illustration.

[0042] Terms such as first, second, etc. can be used to describe various elements, but the above elements should not be limited by the above terms. The above terms are only used to distinguish one element from another element. For example, in the present invention, without departing from the scope of the first component, the second component can be similarly named, and the second component can also be named as the first component.

[0043] The terms used herein are only used for the purpose of describing specific exemplary embodiments and are not intended to limit the concept of the present invention. As used herein, the singular forms "a", "an" and "the" are also intended to include plural forms, unless the context clearly indicates otherwise. It should be further understood that the terms "comprise" and / or "include", when used in this specification, indicate the presence of the features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups thereof.

[0044] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the inventive concept belongs. It should be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning consistent with their context in the relevant art, and should not be interpreted in an idealized or overly formal sense, unless explicitly defined as such herein.

[0045] Figure 1 is a side view of a carrier robot according to an exemplary embodiment of the present invention. Figure 2 yes Figure 1 Front view of the robot hand and gripper shown. Figure 3 yes Figure 1 A plan view of the robot hand.

[0046] Reference Figures 1 to 3 According to an exemplary embodiment of the present invention, a carrier robot 100 includes a robot arm 110, a robot hand 130, and a gripper 150. The carrier robot 100 can transport containers of different sizes between multiple locations. The container may include a first container 11 having a first size, such as a front opening wafer transfer box (FOUP) and a front opening wafer transfer box (FOSB) for accommodating wafers, and a second container 12 having a second size, such as a POD for accommodating a mask.

[0047] The robot arm 110 can be extended or shortened to have a variable length, so as to transport containers 11 and 12 of different sizes between the first loading position and the second loading position. The robot arm 110 may include an articulated robot arm structure having a plurality of arms 111, 112, and 113 connected to each other. The arms 111, 112, and 113 are respectively provided to connect the ends of the upper arms to the ends of the lower arms.

[0048] When the arms 111, 112, and 113 are vertically folded, the robot hand 130 and the clamp 150 may be positioned at the first loading position. In this case, the first loading position may correspond to the entry position of the robot arm 110. On the other hand, when the arms 111, 112, and 113 are unfolded to extend, the robot hand 130 and the clamp 150 may be located at the second loading position. In this case, the second loading position may correspond to the exit position of the robot arm 110.

[0049] A base member 101 may also be provided to support the robot arm 110. In addition, a guide member 102 may be further provided on the base member 101 to guide the robot arm 110 to move in a horizontal direction. On the other hand, a rotation drive unit 103 is further provided inside the base member 101, which is mechanically connected to the robot arm 110. Therefore, the rotation drive unit 103 can rotate the robot arm 110.

[0050] The robot hand 130 is connected to an end of the robot arm 110. The robot hand 130 is connected to, for example, an uppermost arm 113 among arms included in the robot arm 110. As shown in the figure, the robot hand 130 may be connected to a distal end portion of the uppermost arm 113. The robot hand 130 may support a first container 11 having a first size. The robot hand 130 includes an upper surface configured to support the first container 11. The first container 11 may include a first receiving portion 11a for receiving a wafer therein and a first holding portion 11b provided on the first receiving portion 11a. The first holding portion may have a T-shape.

[0051] The robot hand 130 includes support pins 131 on an upper surface thereof. The support pins 131 may be arranged to be spaced apart from each other. In this case, the support pins 131 are arranged to correspond to the arrangement of the guide grooves formed in the lower surface of the first container 11. Therefore, the support pins 131 are inserted into the guide grooves formed in the first container 11, so that the robot hand 130 can firmly support the first container 11. As a result, when transporting the first container 11, the robot hand 130 can suppress the first container 11 from falling off the robot hand 130 due to the support pins 131.

[0052] In particular, when the first container 11 corresponds to a FOUP or FOSB, even if it has a relatively large mass, the robot hand 130 can safely support the first container 11 in a supporting manner rather than a clamping manner. Therefore, the first container 11 can be effectively suppressed from falling from the robot hand 130 during transportation.

[0053] The recognition sensor 136 may be disposed on an upper surface of the robot hand 130. The recognition sensor 136 may include a light sensor, a weighing sensor, etc. Therefore, the recognition sensor 136 may detect whether the first container 11 is located on the robot hand 130.

[0054] The jig 150 is disposed below the robot hand 130. For example, the jig 150 is disposed to face the support pins 131 so that the main body of the robot hand 130 is placed between the support pins 131.

[0055] The jig 150 can clamp a second container 12 (e.g., a POD) having a second size (different from the first size of the first container 11). The second container 12 is relatively light compared to the first container 11 to reduce the risk of falling. Therefore, when the jig 150 clamps the second container 12 in a clamping manner, the second container 12 can be suppressed from falling from the jig 150. In this case, the second container 12 includes a second receiving portion 12a (refer to Figure 4 ), and a second holding portion 12b disposed on the accommodating portion 12a. The second holding portion 12b may have a T-shape.

[0056] The clamp 150 can clamp the second holding portion 12b located at the second receiving portion 12a in a sliding manner. That is, as the carrier robot 100 approaches the second container 12, the clamp 150 approaches the second holding portion 12b and lifts the second holding portion 12b. Therefore, the clamp 150 can clamp the second container 12.

[0057] For example, the clamp 150 may include a pair of first clamping portions 151 and second clamping portions 156 spaced apart from each other. The pair of first clamping portions 151 and second clamping portions 156 may have a spacing distance corresponding to the width W of the second clamping portion 12b.

[0058] Therefore, a driving portion for spacing or approaching the first and second clamping portions 151 and 156 relative to the second holding portion 12 b may be unnecessary.

[0059] In addition, when the carrier robot 100 approaches or moves away from the second container 12, the clamp 150 may clamp the second container 12 or release the second container 12 from the clamped state.

[0060] According to an exemplary embodiment of the present invention, the carrier robot 100 includes: a robot hand 130 capable of supporting a first container 11 having a first size, and a clamp 150 arranged below the robot hand 130 and capable of clamping a second container 12 having a second size different from the first size. Therefore, the carrier robot 100 can selectively transport one of the first container 11 and the second container 12 or transport both the first container 11 and the second container 12 at the same time.

[0061] In addition, the carrier robot 100 can support the first container 11 having a relatively high weight by a supporting method rather than a clamping method. Therefore, the carrier robot 100 can transport the first container 11 at a relatively high speed while stably supporting the first container 11.

[0062] In particular, when the logistics volume of transporting the first container 11 is greater than the logistics volume of transporting the second container 12, the carrier robot 100 transfers the first container 11 at a relatively high moving speed while the robot hand 130 only stably supports the first container 11. Therefore, the carrier robot 100 can achieve improved conveying efficiency.

[0063] In an exemplary embodiment of the present invention, each of the first and second clamping parts 151 and 156 may have an L-shape. In addition, the first and second clamping parts 151 and 156 face each other. The first and second clamps 151 and 156 are symmetrically arranged. Therefore, a clamping space is defined between the first and second clamping parts 151 and 156 having an L-shape. The second holding portion 12b of the second container 12 may be accommodated in the clamping space.

[0064] In an exemplary embodiment of the present invention, one of the first and second clamps 151 and 156 may include a photoelectric sensor 153, and the other may include a reflector 158. Therefore, the photoelectric sensor 153 and the reflector 158 may determine whether the second clamping portion 12b exists in the clamping space. That is, a pair of the photoelectric sensor 153 and the reflector 158 may detect whether the second container 12 is clamped.

[0065] In an exemplary embodiment of the present invention, the robot arm 110 has a thickness corresponding to the height of the second container 12 in the vertical direction. Therefore, when the clamp 150 clamps the second container 12, the base member 101 may contact the lower surface of the second container 12. Since the base member 101 supports the second container 12, the second container 12 may be suppressed from falling when the carrier robot 110 transports the second container 12.

[0066] In an exemplary embodiment of the present invention, the robot arm 110 includes at least two or more stacked arms, that is, the robot arm 110 includes a first arm 111, a second arm 112, and a third arm 113, each end of which is sequentially connected to each other.

[0067] For example, the height of the second container 12 may be substantially the same as the thickness of the uppermost arm (e.g., the third arm 113) included in the robot arm. When the clamp 150 clamps the second container 12, the second arm 112 located below the third arm 113 as the uppermost arm may contact the lower surface of the second container 12. Since the second arm 112 supports the second container 12, the second container 12 may be suppressed from falling while the carrier robot 100 transports the second container 12.

[0068] In an exemplary embodiment of the present invention, the carrier robot 100 may further include a guide portion 170. The guide portion 170 is disposed on the lower surface of the robot hand 130 and is separated from the clamp 150 to avoid interference with the clamp 150. The guide portion 170 may be configured to guide the side of the second container 12 to suppress vibration of the second container 12 when the carrier robot 100 transports the second container 12. The guide portion 170 may be disposed at a peripheral position of the robot hand 130.

[0069] In addition, the guide portion 170 may be provided to be movable in the vertical direction. Therefore, when the clamp 150 clamps the second container 12, the guide portion 170 may be lowered to contact the side of the second container 12. As a result, the guide portion 170 may suppress the second container 12 from falling off the carrier robot 100 during transportation.

[0070] In an exemplary embodiment of the present invention, the carrier robot may further include a control unit 180 configured to adjust a driving speed of the robot arm 110 according to transporting the first container 11 or the second container 12. That is, the controller 180 may control a driving power of a driving motor (not shown) and may adjust a driving speed of the robot arm 110.

[0071] For example, when the robot hand 130 connected to the robot arm 110 supports only the first container 11, the robot hand 130 can stably support the first container 11. The carrier robot 100 can transport the first container 11 at a relatively high transport speed. On the other hand, when the clamp 150 connected to the robot arm 110 clamps the second container 12, the clamp 150 may relatively unstably clamp the second container 12. Therefore, the carrier robot 100 can transport the second container 12 at a relatively low transport speed, thereby preventing the second container 12 from falling from the clamp 150.

[0072] Therefore, when the logistics volume of transporting the first container 11 is greater than the logistics volume of transporting the second container 12 , the transport robot 100 can transport the first container at a high transport speed, thereby improving the transport efficiency of the transport robot 100 .

[0073] Figure 4 yes Figure 1 Side view of the carrier robot moving towards the second container. Figure 5 yes Figure 4 A side view of the carrier robot holding the second container.

[0074] Reference Figure 4 , Figure 1 The carrier robot 100 is shown approaching the second container 12. In this case, the second container 12 may be located on the conveyor 40. In addition, as the robot arm 110 included in the carrier robot 100 is extended to approach the second container 12 located on the conveyor 40.

[0075] When the robot arm 110 includes first to third arms 111, 112 and 113 (refer to Figure 1 ), the first to third arms 111, 112 and 113 are extended to approach the second container 12. In addition, the robot hand 130 can be lowered in the vertical direction, so that the first and second clamping parts 151 and 156 included in the clamp 150 can also be lowered in the vertical direction to have the same vertical position corresponding to the vertical position of the second holding part 12b included in the second container 12.

[0076] That is, the lifting drive unit 160 (see Figure 1 ) is disposed on the uppermost arm of the robot arm 110 and is configured to be connected to the robot hand 130. The lifting drive unit 160 can vertically lift the robot hand 130.

[0077] Reference Figure 5 , the second holding portion 12 b is inserted into a clamping space formed between the first and second clamping portions 151 and 156 included in the clamp 150 , so that the clamp 150 can clamp the second container 12 .

[0078] Figure 6 is a side view of a tower lift according to an exemplary embodiment of the present invention.

[0079] Reference Figure 1 and Figure 6 , a tower lift 300 according to an exemplary embodiment of the present invention includes a guide rail 310 and a carrying robot 100 .

[0080] The transport robot 100 has the same Figure 1 The described transport robots have substantially the same multiple elements, and detailed descriptions thereof will be omitted.

[0081] The guide rail 310 is connected to the transport robot 100. The guide rail 310 provides a guide path for lifting the transport robot 100 in a vertical direction. The guide rail 310 extends in a vertical direction.

[0082] The tower lift 300 may further include a lifting body 330. The lifting body 330 is fixed to the guide rail 310 so as to be able to be lifted and lowered along the guide rail 310. The base member 101 interconnects the carrier robot 100 and the lifting body 330. Therefore, the carrier robot 100 may be lifted and lowered along the guide rail 310 together with the lifting body 330.

[0083] Figure 7 is a side view of a tower lift according to an exemplary embodiment of the present invention.

[0084] Reference Figure 1 and Figure 7 , the tower lift 300 according to the exemplary embodiment of the present invention includes a guide rail 310, a first carrier robot 100 and a second carrier robot 200. Since the first carrier robot 100 includes the same Figure 1 The same elements as those of the described transport robot will be omitted in their detailed description.

[0085] The second carrier robot 200 is located above the first carrier robot 100. The second carrier robot 200 is fixed to the lifting body 330 together with the first carrier robot 100. Therefore, each of the first and second carrier robots 100 and 200 can transport the first container 11 and the second container 12 at the same time.

[0086] Alternatively, the second carrier robot 200 may omit the clamp 150 from all elements of the first carrier robot 100. Therefore, the second carrier robot 200 may support only the first container 11. That is, in the configuration of the second carrier robot 200, the clamp may be provided or omitted according to the logistics amount of transporting the second container 12.

[0087] Figure 8 4 is a front view of a container transportation system according to an embodiment of the present invention. Fig. 9 yes Figure 8 The plan view of the conveyor in. Fig.10 yes Figure 8 Cross-section of the conveyor.

[0088] Reference Figure 1 and Figure 8-10 , the container transport system 1000 according to an exemplary embodiment of the present invention includes a tower lift 300 and a conveyor transport device 400. The tower lift 300 transports a plurality of containers between the first floor 1stF and the second floor 2ndF located above the first floor 1stF. The conveyor transport device 400 is provided on each of the first floor 1stF and the second floor 2ndF, and is configured to transport the first container 11 and the second container 12 in the horizontal direction. On the other hand, an overhead crane transport unit 4 is also provided on the ceiling of each floor. The overhead crane transport unit 4 is configured to transport the container in the vertical direction.

[0089] Therefore, each of the tower elevator 300 and the conveyor transport apparatus 400 transfers the first container 11 and the second container 12 having different sizes in the vertical direction and the horizontal direction, respectively.

[0090] When the conveyor transport device 400 transfers the first container 11 and the second container 12, the height of the first holder 11a included in the first container 11 is higher than the height of the holder 12a included in the second container 12. At the same time, the logistics volume of transporting the first container 11 may be greater than that of transporting the second container 12.

[0091] In an exemplary embodiment, the first container 11 may include a container for accommodating a wafer such as a semiconductor wafer for EUV process, and the second container 12 may include a container for accommodating a mask. For example, the first container 11 is a front opening wafer transfer box (FOUP) and a front opening wafer transfer box (FOSB), and the second container 12 is a container for accommodating a mask such as a POD. At this time, the first holding portion 11a and the second portion 12a correspond to the flange portion provided on the upper surface of each container.

[0092] The tower lift 300 includes a first carrier robot 100 , a second carrier robot 200 , a lifting body 330 , and a guide rail 310 .

[0093] The first carrier robot 100 is configured to transfer the first container 11 and the second container 12 between the plurality of conveyor transport devices 400 .

[0094] On the other hand, the second carrier robot 200 may be configured to transport only the first container 11 between the conveyor transport devices 400 .

[0095] Alternatively, the second carrier robot 200 is configured to transfer and unload the first container 11 and the second container 12 between the conveyor transport apparatus 400 .

[0096] Refer again Figure 8 and Fig. 9 A buffer unit 30 for temporarily supporting the containers 11 and 12 is also provided adjacent to the lifting body 330. The buffer unit 30 is located beside the ends of the plurality of conveyors 410 and 420 included in the conveyor transport device 400. Therefore, the buffer unit 30, the lifting body 330, and the ends of the conveyors 410 and 420 are adjacent to each other. In addition, the buffer unit 30 and the ends of the conveyors 410 and 420 define a plurality of loading positions 3.

[0097] The first carrier robot 100 simultaneously or sequentially transfers the first container 11 and the second container 12 between the buffer unit 30 and the conveyor transport device 400 at the loading position 3 .

[0098] In addition, the second carrier robot 200 transfers the first container 11 and the second container 12 between the buffer unit 30 and the conveyor transfer device 400 .

[0099] The first carrier robot 100 includes a first robot arm 110, a first robot hand 130, and a first gripper 150. Figure 7 The first transport robot 100 has been described in detail, so a detailed description thereof is omitted.

[0100] The second carrier robot 200 includes a second robot arm 210, a second robot hand 230, and a second gripper 250. Figure 7 The second carrier robot 200 has been described in detail, and a detailed description thereof is also omitted.

[0101] Reference Fig. 9 , the first carrier robot 100 transfers the first container 11 and the second container 12 between the loading positions 3.

[0102] The first carrier robot 100 may fold or unfold the first robot arm 110 to move both the first robot hand 130 and the first gripper 150 between the loading positions 3. In addition, the first carrier robot 100 includes a first lifting drive unit 160 configured to lift the first robot hand 130 from a lower position to an upper position or to lower the first robot hand 130 from an upper position to a lower position.

[0103] Therefore, the first carrier robot 100 includes a robot hand 130 and a gripper 150 that can move in horizontal and vertical directions to transfer the first and second containers 11 and 12 between the loading position 3 , thereby holding or unloading the first and second containers 11 and 12 at the loading position 3 .

[0104] In particular, when the first carrier robot 100 holds both the first and second containers 11 and 12 at the same time, the carrier robot 100 holds the first and second containers 11 and 12 without any order. However, when the first carrier robot 100 unloads both the first and second containers 11 and 12 to one of the loading positions 3, the first carrier robot 100 unloads the second container 12 at one of the loading positions 3, and then unloads the first container 11 at another loading position 3.

[0105] On the other hand, the first carrier robot 100 can transfer the first container 11 at a higher transfer speed than the second container 12 in a state where only the first container 11 is transferred. This is because the first carrier robot 100 can transfer the first container 11 in a supporting manner, thereby transferring the first container 11 more safely than in a case where only the second container 12 is transferred in a clamping manner.

[0106] Refer again Fig. 9The first conveyor 410 is configured as a pair of conveyors, respectively used to carry in and out the first container 11 in a horizontal direction. In addition, the second conveyor 420 is configured as a pair of conveyors, respectively used to carry in and out the second container 12 in a horizontal direction.

[0107] Refer again Figure 8 The conveyor transport device 400 may further include a third conveyor 440 and a fourth conveyor 450, which are respectively used to load the first container 11 and the second container 12 to the loading position 3.

[0108] The third conveyor 440 and the fourth conveyor 450 are located below the first conveyor and close to the bottom surface of each layer. One end of the third conveyor 440 corresponds to one of the loading positions 3, and the other end corresponds to a position where an operator can load the first container 11. Meanwhile, one end of the fourth conveyor 450 corresponds to one of the loading positions 3, and the other end corresponds to a position where an operator can load the second container 12.

[0109] Reference Fig.10 The first conveyor 410 may include a first transport vehicle 417 that can move in a horizontal direction to transport the first container 11 , and a first inner support member 418 installed at one end of a moving path of the first transport vehicle 417 and configured to support the first container 11 .

[0110] In addition, the first inner support 418 is located at a position adjacent to one of the loading positions 3. The carrier robot 100 may lift the first container 11 located on the first inner support 418 or load the first container at the first inner support 418.

[0111] The carrier robot and the tower lift according to some exemplary embodiments of the present invention may be used in a container transport system for transporting a first container and a second container having different sizes from each other.

[0112] Although the exemplary embodiments of the present invention have been described with reference to specific embodiments, they are not limited thereto. Therefore, it should be easily understood by those skilled in the art that various modifications and changes may be made to the present invention without departing from the essence and scope of the present disclosure as defined by the appended claims.

Claims

1. A transport robot, comprising: a robotic arm configured to transport a plurality of containers; a robotic hand connected to one end of the robotic arm, the robotic hand configured to support a first container of the containers having a first size; as well as a gripper disposed below the robotic hand, the gripper configured to grip a second container having a second size different from the first size; Wherein, the transport robot is capable of transporting the first container and the second container simultaneously under the drive of the robot hand; Wherein, the robot hand includes a support pin corresponding to a guide groove formed on a lower surface of the first container.

2. The transport robot according to claim 1, wherein: The second container includes a holding portion at an upper portion thereof, and the clamp is configured to hold the holding portion in a sliding manner.

3. The transport robot according to claim 2, wherein: The clamp includes a first clamping portion and a second clamping portion spaced apart from each other at an interval corresponding to a width of the holding portion.

4. The transport robot according to claim 3, wherein: Each of the first and second clamping parts has a "C" shape to face each other, and one of the first and second clamping parts includes a light sensor at an end thereof, and the other of the first and second clamping parts includes a reflector at an end thereof.

5. The transport robot according to claim 1, wherein: The robot arm has a thickness corresponding to the height of the second container.

6. The transport robot according to claim 1, wherein: The robot arm has at least two or more stacked arms, and an uppermost arm included in the robot arm has a thickness corresponding to a height of the second container. 7 . The carrier robot according to claim 1 , further comprising a guide portion provided on a lower surface of the robot hand but not interfering with the clamp, the guide portion being configured to suppress vibration of the second container when the second container is transported. 8 . The carrier robot according to claim 1 , further comprising a control unit configured to differently adjust an operation speed of the robot arm according to the first container and the second container.

9. A tower lift comprising: A guide rail extending in a vertical direction; as well as at least one transport robot configured to be movable in a vertical direction along the guide rail, the transport robot being configured to transport a plurality of containers, Wherein, the transport robot comprises: a robotic arm configured to transfer a plurality of containers; a robotic hand connected to one end of the robotic arm, the robotic hand configured to support a first one of the containers having a first size; and a gripper disposed below the robotic hand, the gripper configured to grip a second container having a second size different from the first size; Wherein, the transport robot is capable of transporting the first container and the second container simultaneously under the drive of the robot hand; Wherein, the robot hand includes a support pin corresponding to a guide groove formed on a lower surface of the first container.

10. The tower lift according to claim 9, wherein: The second container includes a holding portion at an upper portion thereof, and the clamp is configured to hold the holding portion in a sliding manner.

11. The tower lift according to claim 10, wherein: The clamp includes a first clamping portion and a second clamping portion spaced apart from each other at an interval corresponding to a width of the holding portion.

12. The tower lift according to claim 11, wherein: Each of the first and second clamping parts has a "C" shape to face each other, and one of the first and second clamping parts includes a light sensor at an end thereof, and the other of the first and second clamping parts includes a reflector at an end thereof.

13. The tower lift according to claim 9, wherein: The robot arm has a thickness corresponding to a height of the second container.

14. The tower lift according to claim 9, wherein: The robot arm has at least two or more stacked arms, and an uppermost arm included in the robot arm has a thickness corresponding to a height of the second container.

15. The tower lift according to claim 9, wherein: The carrier robot further includes a guide portion disposed on a lower surface of the robot hand but not interfering with the clamp, the guide portion being configured to suppress vibration of the second container when the second container is transported.

16. The tower lift according to claim 9, wherein: The carrier robot further includes a control unit configured to differently adjust an operation speed of the robot arm according to the first container and the second container.

17. A tower lift comprising: A guide rail extending in a vertical direction; A lifting body configured to be movable in a vertical direction along the guide rail; as well as a first carrier robot and a second carrier robot connected to the lifting body, the first carrier robot being configured to transport a first container and a second container each having a first size and a second size different from each other, and the second carrier robot being configured to transport the first container, Wherein, the first transport robot comprises: a first robotic arm configured to transport the first container or the second container; a first robotic hand connected to one end of the first robotic arm, the first robotic hand configured to support the first container having the first size; and a first gripper disposed below the first robot hand, the first gripper configured to grip the second container having the second size; wherein the first transport robot is capable of simultaneously transporting the first container and the second container under the drive of the first robot hand, and Wherein, the second carrier robot comprises: a second robotic arm configured to transport the first container; a second robotic hand connected to one end of the second robotic arm, the second robotic hand configured to support the first container having the first size; Wherein, the robot hand includes a support pin corresponding to a guide groove formed on a lower surface of the first container.

18. The tower lift according to claim 17, wherein: The second container includes a holding portion at an upper portion thereof, and the first clamp is configured to clamp the holding portion in a sliding manner.

19. The tower lift according to claim 18, wherein: The first clamp includes a first clamping portion and a second clamping portion spaced apart from each other at an interval corresponding to a width of the holding portion.

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