Light irradiation device

Abstract

The present application provides a light irradiation device that can suppress the decrease in detection accuracy caused by light irradiation. The light irradiation device involved in the technology disclosed in the present application specification has: a workbench; and at least one light irradiation unit for irradiating light to the upper surface of the workbench; at least one scattering unit for scattering light is provided on at least a portion of the workbench, and the light irradiation device also has a detection unit for detecting light scattered by the scattering unit, and the scattering unit is made of a transparent material.

Description

Technical Field

[0001] The technology disclosed in this application specification relates to a technology for detecting irradiated light. Background Art

[0002] Conventionally, a photoprocessing technique has been used for processing an object by light irradiation such as laser irradiation.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2006-272430

[0004] In the above-mentioned optical processing technology, in order to improve processing accuracy, it is important to control the position irradiated with light with high accuracy.

[0005] As a method for detecting the position irradiated with light, there is a method of detecting the position irradiated with light by photographing light with an area camera, for example. However, there is a problem of reduced detection accuracy due to the accumulation of damage on components or optical elements arranged at the position irradiated with light, especially when detecting high-intensity light such as laser. Summary of the invention

[0006] The technology disclosed in the present specification has been accomplished in view of the above-mentioned problems, and provides a technology for suppressing a decrease in detection accuracy due to irradiation with light.

[0007] A light irradiation device of the first mode of the technology disclosed in the present application specification comprises: a workbench; and at least one light irradiation unit for irradiating light onto the upper surface of the workbench, at least one first scattering unit for scattering the light is provided on at least a portion of the workbench, the light irradiation device also comprises a detection unit for detecting the light scattered by the first scattering unit, the first scattering unit being made of a transparent material.

[0008] A light irradiation device according to a second aspect of the technology disclosed in the present specification is related to the light irradiation device according to the first aspect, and the light irradiated from the light irradiation section is laser light.

[0009] A light irradiation device according to a third aspect of the technology disclosed in the present specification is related to the light irradiation device according to the first or second aspect, wherein the first scattering portion is formed by frosting.

[0010] A light irradiation device according to a fourth aspect of the technology disclosed in the present specification is related to the light irradiation device according to any one of the first to third aspects, wherein the first scattering portion is disposed at an end portion of a light irradiation region irradiated with the light by the light irradiation portion.

[0011] A light irradiation device according to a fifth aspect of the technology disclosed in the present specification is related to the light irradiation device according to the fourth aspect, wherein a plurality of light irradiation units are provided, and the first scattering unit is disposed at a connection portion between the light irradiation regions of the light irradiation units.

[0012] The sixth mode of light irradiation device of the technology disclosed in the specification of the present application is related to the light irradiation device of any one of the first to fifth modes, and the detection unit comprises: a focusing lens for focusing the light transmitted through the first scattering unit; and a shading plate located at a position farther from the first scattering unit than the focusing lens and arranged at the focusing position of the focusing lens.

[0013] The seventh mode of light irradiation device of the technology disclosed in the present application specification is related to the sixth mode of light irradiation device, and the light irradiation device also has a chamber, which has the workbench built in, and the chamber is in a vacuum or reduced pressure environment. The detection unit also has: an optical fiber that allows the light focused by the focusing lens to propagate to the outside of the chamber; and a light detector that is arranged outside the chamber and detects the light propagated through the optical fiber.

[0014] A light irradiation device according to an eighth aspect of the technology disclosed in the present specification is related to the light irradiation device according to any one of the first to seventh aspects, wherein the first scattering portion is formed on the upper surface of the stage.

[0015] A ninth mode of light irradiation device of the technology disclosed in the specification of the present application is related to a light irradiation device of any one of the first to eighth modes, wherein the first scattering portion is extended in a first direction along the upper surface of the workbench and in a second direction along the upper surface of the workbench and intersecting with the first direction, and the width of the first scattering portion in the first direction increases or decreases in the second direction as it approaches a central portion of the first scattering portion.

[0016] A light irradiation device according to a tenth aspect of the technology disclosed in the present specification is related to the light irradiation device according to any one of the first to ninth aspects, wherein the first scattering portion is a butterfly shape in which one vertices of two triangles are connected to each other in a plan view of the workbench.

[0017] The eleventh mode of light irradiation device of the technology disclosed in the specification of the present application is related to the light irradiation device of any one of the first to tenth modes, and the detection unit has: a propagation component for propagating the light that has passed through the first scattering portion; and a light detector for detecting the light propagated through the propagation component, the propagation component being made of a transparent material, and a second scattering portion for scattering the light is provided on the propagation component.

[0018] A light irradiation device according to a twelfth aspect of the technology disclosed in the present specification is related to the light irradiation device according to the eleventh aspect, wherein the propagation member is made of a glass material.

[0019] A light irradiation device according to a thirteenth aspect of the technology disclosed in the present specification is related to the light irradiation device according to the eleventh or twelfth aspect, wherein the second scattering portion is formed by performing sandblasting on a surface of the propagation member.

[0020] A light irradiation device according to a fourteenth aspect of the technology disclosed in the present specification is related to the light irradiation device according to any one of the eleventh to thirteenth aspects, wherein the second scattering portion is a reflective film coated on a lower surface of the transmission member.

[0021] A light irradiation device according to a fifteenth aspect of the technology disclosed in the present specification is related to the light irradiation device according to any one of the eleventh to fourteenth aspects, wherein at least a portion of the second scattering portion is provided in a range overlapping with the first scattering portion in a plan view.

[0022] A light irradiation device according to a sixteenth aspect of the technology disclosed in the present specification is related to the light irradiation device according to any one of the eleventh to fifteenth aspects, wherein the transmission member is cylindrical.

[0023] A seventeenth light irradiation device of the technology disclosed in the present specification is related to the light irradiation device of any one of the eleventh to sixteenth aspects, wherein the propagation member is formed to extend along a first direction, which is a direction in which the light propagates, and the second scattering portion is continuously provided in the first direction.

[0024] An eighteenth aspect of the light irradiation device of the technology disclosed in the present specification is related to the light irradiation device of any one of the eleventh to seventeenth aspects, wherein the light detector detects the light propagated through the propagation member outside the chamber in which the stage is built.

[0025] According to at least the first aspect of the technology disclosed in the specification of this application, since the scattering portion irradiated with light is made of a transparent material, damage to the portion irradiated with light can be reduced even when irradiated with high-intensity light such as laser light. Therefore, the positional accuracy of the light detected by the detection unit is not easily reduced.

[0026] In addition, the objects, features, aspects, and advantages related to the technology disclosed in the present application specification will become more apparent from the following detailed description and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a perspective view schematically showing an example of the structure of the light irradiation device according to the embodiment.

[0028] Figure 2It is a cross-sectional view showing an example of the internal structure and peripheral structure of a vacuum chamber of the light irradiation device according to the embodiment.

[0029] Figure 3 It is the main expression Figure 2 A perspective view of a light irradiation unit and a workbench in an exemplary structure.

[0030] Figure 4 It is the main expression Figure 2 A cross-sectional view showing an example of the structure of a light irradiation unit and a stage in the exemplary structure.

[0031] Figure 5 It is a schematic diagram showing the structure and function of the focusing unit.

[0032] Figure 6 It is a schematic diagram showing the structure and function of the focusing unit.

[0033] Figure 7 It is a plan view showing an example of the shape of the scattering part.

[0034] Figure 8 It means scanning in the X-axis direction Figure 7 FIG. 1 is a diagram showing an example of a detection signal in a light detector obtained in the case of a scattering portion having the shape exemplified in FIG.

[0035] Fig. 9 It is a cross-sectional view showing an example of a structure in which a plurality of light irradiation units are provided.

[0036] Fig.10 It is a cross-sectional view showing an example of the internal structure and peripheral structure of the vacuum chamber of the light irradiation device according to the present embodiment.

[0037] Fig.11 It is the main expression Fig.10 A three-dimensional view of the light irradiation unit and the workbench in the structure exemplified in FIG.

[0038] Fig.12 It is the main expression Fig.10 A cross-sectional view of an example of the structure of the light irradiation unit and the workbench in the structure exemplified in FIG.

[0039] Fig.13 This is a schematic diagram showing the structure and function of the detection unit.

[0040] Fig.14 It is a schematic diagram showing the structure and function of the detection unit.

[0041] Fig.15 It is a cross-sectional view schematically showing an example of the structure of a transparent rod.

[0042] Description of Reference Numerals

[0043] 1 Light irradiation device

[0044] 12 Vacuum Chamber

[0045] 12A, 12B, 12C Opening

[0046] 14 External fixing part

[0047] 14B External components

[0048] 14A, 14C Columnar components

[0049] 16A, 16B bellows

[0050] 18, 118, 218 Light irradiation part

[0051] 18A, 118A, 218A Scanners

[0052] 18B, 118B, 162, 218B condenser lens

[0053] 18C, 118C, 218C laser

[0054] 20, 20A, 20B Irradiation window

[0055] 21 Vacuum pump

[0056] 22 Control Department

[0057] 24 racks

[0058] 42 Workbench

[0059] 42A Object Configuration Area

[0060] 42B Position correction area

[0061] 44 Slide

[0062] 46 Pedestal

[0063] 48 Linear guides

[0064] 50 Linear motor mechanism

[0065] 52 Lifting pin mechanism

[0066] 52A Lifting Pin

[0067] 62 Detection Department

[0068] 62A Concentrator Unit

[0069] 62B Fiber

[0070] 62C Photodetector

[0071] 62D, 162D transparent rod

[0072] 142 light-transmitting part

[0073] 142A, 142B, 142C, 142D, 166 Scattering unit

[0074] 164 visor

[0075] 168 Reflective film DETAILED DESCRIPTION

[0076] Hereinafter, the embodiments will be described with reference to the drawings. In the following embodiments, detailed features and the like are shown for explaining the technology, but these are only examples, and not all of these features are essential features for implementing the embodiments.

[0077] It should be noted that the drawings are schematically shown, and for the convenience of explanation, the structures are appropriately omitted or simplified in the drawings. In addition, the size and position of the structures shown in different drawings may not necessarily be accurately recorded, and there may be appropriate changes. In addition, in drawings such as top views that are not sectional views, there are sometimes shadows added to facilitate the understanding of the contents of the embodiments.

[0078] In the following description, the same components are denoted by the same reference numerals and are illustrated, and their names and functions are assumed to be the same, so that detailed description thereof may be omitted in order to avoid duplication.

[0079] In the following description, when a certain component is expressed as “having”, “including”, or “having”, this does not mean an exclusive expression excluding the presence of other components unless otherwise specified.

[0080] In the following description, even when ordinal numbers such as “first” or “second” are used, these terms are used to facilitate understanding of the contents of the embodiments, and are not limited to the order or the like generated by these ordinal numbers.

[0081] In addition, in the descriptions recorded below, expressions indicating relative or absolute positional relationships, such as "in a direction", "along a direction", "parallel", "orthogonal", "center", "concentric" or "coaxial", etc., include situations in which the positional relationship is expressed in a strict sense, and also include situations in which the angle or distance is displaced within a tolerance or a range that can achieve the same degree of functionality, unless otherwise specified.

[0082] In addition, in the description recorded below, even when terms are used that mean a specified position or direction such as "up", "down", "left", "right", "side", "bottom", "front" or "inside", these terms are used to facilitate understanding of the contents of the implementation method and have nothing to do with the position or direction during actual implementation.

[0083] In the following description, when it is expressed as "on the upper surface of..." or "on the lower surface of...", in addition to the upper surface or lower surface of the target component itself, it also includes a state where other components are formed on the upper surface or lower surface of the target component. That is, for example, when it is expressed as "B is provided on the upper surface of A", it does not prevent another component "C" from being sandwiched between A and B.

[0084] In addition, in the description recorded below, expressions indicating shapes, such as "quadrilateral shape" or "cylindrical shape", etc., include the case of indicating the shape in the strict sense, and also include the case of indicating a shape with projections and depressions or inclination angles within a tolerance or a range that can achieve the same degree of function, unless otherwise specified.

[0085] <First embodiment>

[0086] Hereinafter, the light irradiation device of the present embodiment will be described. It should be noted that in the following embodiment, as an example, the light irradiation device in a chamber in a vacuum or reduced pressure environment is described, but the same is applicable even when the chamber is not in a vacuum.

[0087] <About the structure of the light irradiation device>

[0088] Figure 1 1 is a perspective view schematically showing an example of the structure of the light irradiation device 1 according to the present embodiment. Figure 1 In the figure, the chamber frame supporting the vacuum chamber 12 or the wiring actually connected thereto are omitted for convenience. It should be noted that the "vacuum" in this embodiment is preferably a high vacuum (e.g., 0.00001 Pa) in order to prevent the characteristics of the substrate W from being degraded, but also includes the case where the vacuum degree does not reach the high vacuum.

[0089] like Figure 1As shown in the example in FIG. 1 , the light irradiation device 1 includes: a vacuum chamber 12; an external fixing portion 14 such as a fixing plate; a bellows 16A, which is a stretchable member connected between the vacuum chamber 12 and the external fixing portion 14 and is formed of, for example, stainless steel; a light irradiation portion 18, which irradiates light into the vacuum chamber 12; a vacuum pump 21, which decompresses the vacuum chamber 12 to make it a vacuum state; and a control portion 22, which controls each driving portion of the light irradiation device 1. In the above, as an example of the stretchable member, a bellows formed of stainless steel or the like is shown, but a stretchable member formed of a metal other than stainless steel may be used according to the required specifications, and a stretchable member formed of resin or the like may be used. In addition, the shape of the stretchable member may not be a corrugated shape like the bellows 16A described above.

[0090] The vacuum chamber 12 has a space for accommodating a substrate W therein. The substrate W to be processed includes, for example, a semiconductor wafer, a glass substrate for a liquid crystal display device, a substrate for a flat panel display (FPD) such as an organic EL (electro luminescence) display device, a substrate for an optical disk, a substrate for a magnetic disk, a substrate for an optical magneto-optical disk, a glass substrate for a photomask, a ceramic substrate, a substrate for a field emission display (FED), or a substrate for a solar cell. In addition, the substrate W is, for example, a substrate in a state where a thin film is formed on the upper surface.

[0091] In addition, an opening 12A is formed on the side of the vacuum chamber 12 for allowing the substrate W to pass through when the substrate W is carried in and out. When the vacuum chamber 12 is in a vacuum state, the opening 12A is appropriately closed. Other structures contained in the vacuum chamber 12 will be described later.

[0092] The light irradiation unit 18 irradiates light toward the upper surface of the substrate W accommodated in the vacuum chamber 12. At this time, the substrate W is pre-positioned by the detection unit 62 described later, etc. The light irradiation unit 18 performs ablation processing on the substrate W by irradiating a laser, for example. In addition, the light irradiation unit 18 may also irradiate light such as an electron beam according to the purpose of processing, etc. The light irradiation unit 18 irradiates light from the outside of the vacuum chamber 12 to the upper surface of the substrate W accommodated in the vacuum chamber 12 through an irradiation window (a transparent plate formed of quartz, etc.) not shown in the figure. Moreover, the upper surface of the substrate W is scanned by light by moving the substrate W in the vacuum chamber 12 relative to the light irradiation unit 18, or by controlling the optical system in the light irradiation unit 18. In addition, the light irradiation unit 18 is arranged on the upper surface of the stand 24 fixed to the external fixing unit 14.

[0093] The control unit 22 may include: for example, a storage device, which includes a memory (storage medium), the memory including a hard disk drive (HDD), a random access memory (RAM), a read-only memory (ROM), a flash memory, a volatile or non-volatile semiconductor memory, a magnetic disk, a floppy disk, an optical disk, a compressed disk, a mini disk or a DVD, etc.; a processing circuit of a central processing unit (CPU), etc., which executes a program stored in, for example, the storage device, an external CD-ROM, an external DVD-ROM, or an external flash memory, etc.; an input device capable of inputting information, including a mouse, a keyboard, a touch screen, or various switches, etc.; and an output device capable of outputting information, including a display, a liquid crystal display device, or a lamp, etc.

[0094] The control unit 22 controls the output of the light source in the light irradiation unit 18, the direction of light irradiation, the output of the vacuum pump 21, and the drive control of various drive units described later (for example, the drive unit of the linear motor mechanism or the drive unit of the lifting pin mechanism).

[0095] Figure 2 1 is a cross-sectional view showing an example of the internal structure and peripheral structure of the vacuum chamber 12 of the light irradiation device 1 of the present embodiment. Figure 2 As shown in the example in FIG. 1 , the vacuum chamber 12 includes: a workbench 42 on which a substrate W is arranged on the upper surface; a slider 44 that is movable in the Y-axis direction and supports the workbench 42 from below; a base 46 that is fixed to the external fixing portion 14 independently of the vacuum chamber 12; a linear guide 48 that is fixed to the base 46 and extends in the Y-axis direction; a linear motor mechanism 50 that moves the slider 44 in the Y-axis direction along the linear guide 48; a lift pin mechanism 52 that includes lift pins 52A that pass through through holes (not shown here) formed in the workbench 42 to support the substrate W; and a detection unit 62 that is arranged below the workbench 42 ( Figure 2 negative direction of the Z axis).

[0096] The workbench 42 holds the substrate W in a substantially horizontal state with the processing surface of the substrate W facing upward. The detailed structure of the workbench 42 will be described later. The slide 44 supporting the workbench 42 moves in the Y-axis direction through the linear motor mechanism 50, and the light irradiated from the light irradiation unit 18 is scanned in the X-axis direction, so that the entire surface of the processing area of ​​the substrate W can be scanned by light when viewed from above. Alternatively, the light irradiated from the light irradiation unit 18 is scanned in the X-axis direction and the Y-axis direction, so that the entire surface of the processing area of ​​the substrate W can be scanned by light when viewed from above. In addition, the lifting pin mechanism 52 is fixed to the base 46.

[0097] The linear motor mechanism 50 is fixed to the external fixing part 14 located on the side of the vacuum chamber 12 via the opening 12B formed on the side of the vacuum chamber 12. Specifically, the linear motor mechanism 50 is fixed to the end of the hollow columnar member 14A passing through the bellows 16A welded to the opening 12B. At this time, the wiring and the like connected to the linear motor mechanism 50 pass through the inside of the columnar member 14A and are led out to the outside of the vacuum chamber 12. In addition, the columnar member 14A included in the external fixing part 14 is fixed to the external member 14B included in the external fixing part 14. In addition, the columnar member 14A does not contact the bellows 16A connected to the side of the vacuum chamber 12.

[0098] The base 46 is fixed to the external fixing part 14 located below the vacuum chamber 12 via the opening 12C formed on the bottom surface of the vacuum chamber 12. Specifically, the base 46 is fixed to the end of the columnar member 14C passing through the bellows 16B welded to the opening 12C. In addition, the columnar member 14C included in the external fixing part 14 is fixed to the external member 14B included in the external fixing part 14. In addition, the columnar member 14C does not contact the bellows 16B connected to the bottom surface of the vacuum chamber 12.

[0099] exist Figure 2 In the embodiment, the external fixing part 14 is arranged on the side and below of the vacuum chamber 12, but the external fixing parts 14 at these positions do not necessarily need to be arranged continuously, and can be arranged dispersedly at these positions, or can be arranged only at arbitrary positions. In addition, the vacuum chamber 12 is supported and fixed from below in the vertical direction independently of the bellows 16B by a chamber frame (not shown), and the chamber frame is independently arranged with respect to the external fixing part 14.

[0100] The detection unit 62 is located below the stage 42 and can detect the light irradiated from the light irradiation unit 18. The detailed structure of the detection unit 62 will be described later.

[0101] Figure 3 It is the main expression Figure 2 A perspective view of the light irradiation unit 18 and the workbench 42 in the structure exemplified in FIG. Figure 3 FIG. 4 shows a state where a substrate W is arranged on the upper surface of the workbench 42. The light irradiation unit 18 can be Figure 3 The scanning light irradiation direction is in the X-axis direction, and the worktable 42 is based on the linear motor mechanism 50 (refer to Figure 2 ) can move in the Y-axis direction. Therefore, the light irradiated from the light irradiation unit 18 to the upper surface of the workbench 42 can form a rectangular irradiation area (light irradiation area) on the upper surface of the substrate W.

[0102] like Figure 3 As shown, the stage 42 includes an object placement region 42A where a substrate W, which is an object to be irradiated by the light irradiation unit 18 , is placed, and a position correction region 42B for correcting the position of light irradiated by the light irradiation unit 18 .

[0103] The target placement area 42A places the substrate W at a predetermined position in the target placement area 42A. Thus, the positional relationship of the substrate W on the workbench 42 is predetermined. In the position correction area 42B, the position of the light irradiated from the light irradiation unit 18 into the position correction area 42B is detected by the detection unit 62 (see Figure 2 Then, in the position correction area 42B, before the optical processing of the substrate W in the object configuration area 42A, the correspondence between the set value of the direction of the light irradiated from the light irradiation unit 18 and the detected irradiation position of the light is corrected.

[0104] A light-transmitting portion 142 for transmitting light is provided in at least a portion of the position correction region 42B. The light-transmitting portion 142 is made of quartz (SiO 2 ) or a transparent material such as a transparent resin (e.g., silicone resin). The light-transmitting portion 142 is provided from the upper surface to the lower surface of the workbench 42 corresponding to the position correction area 42B. The light irradiated from the light irradiation portion 18 to the light-transmitting portion 142 is transmitted from the upper surface to the lower surface of the workbench 42.

[0105] At least one ( Figure 3 The scattering parts 142A are made of a transparent material, and the irradiated light is reflected or transmitted while being scattered. The position where the scattering parts 142A are provided is a predetermined position in the workbench 42. That is, the position of the scattering parts 142A in the entire workbench 42 is predetermined. Figure 3In the embodiment, each scattering portion 142A is arranged at the end of the light irradiation area of ​​the light irradiation portion 18 in the X-axis direction, but the position where the scattering portion 142A is arranged can be any position on the workbench 42, and is not limited to the end of the light irradiation area of ​​the light irradiation portion 18. The scattering portion 142A has the property of scattering incident light, and is obtained by, for example, sandblasting the glass material or frosting it with hydrofluoric acid or the like. Figure 3 In the embodiment, each scattering portion 142A is formed on the upper surface of the light-transmitting portion 142 , but at least one scattering portion 142A may be formed on the lower surface of the light-transmitting portion 142 .

[0106] In addition, Figure 3 In the case shown in , the object configuration area 42A and the position correction area 42B are independent areas, but these areas may overlap at least in part. That is, the light-transmitting portion 142 may be provided in an area where at least a part of the substrate W is configured. In such a case, for example, in a state where the substrate W is not configured, the position of the light irradiated from the light irradiation portion 18 may be corrected at the position where the substrate W is configured.

[0107] In addition, the scattering portion 142A may be formed over the entire range of the light-transmitting portion 142. That is, there may be no portion that transmits only light, and light scattering may occur over the entire range of the light-transmitting portion 142.

[0108] In addition, Figure 3 In the embodiment, the light-transmitting portion 142 is extended along the X-axis direction, and the scattering portion 142A is provided at each end in the X-axis direction. However, the light-transmitting portion 142 may be divided into multiple locations in the X-axis direction. However, in the case where a plurality of scattering portions 142A are provided on the integrally formed light-transmitting portion 142 (i.e., Figure 3 In the case shown in FIG. 1 , the light-transmitting portion 142 can be mounted on the workbench 42 (in the case where the light-transmitting portion 142 is made of a transparent material) while maintaining the positional accuracy between the plurality of scattering portions 142A. Figure 3 Therefore, since positional deviation between the scattering parts 142A does not occur when the scattering parts 142A are mounted on the workbench 42, the accuracy of calibration using the plurality of scattering parts 142A can be maintained at a high level.

[0109] Figure 4 It is the main expression Figure 2 sectional view of an example of the structure of the light irradiation unit 18 and the workbench 42 in the structure exemplified in FIG. Figure 4 As shown in the example, the light irradiation unit 18 includes: a scanner 18A, which is a galvano mirror or a polygon mirror, etc., which controls the direction of the irradiated light to the X-axis direction and the Y-axis direction; and a focusing lens 18B, which focuses the light from the light source (not shown). Figure 4In the embodiment, the light irradiated through the condenser lens 18B and then through the irradiation window 20 formed of quartz or the like is, for example, laser light 18C. The laser light 18C can scan the substrate W arranged on the upper surface of the worktable 42 in the X-axis direction and the Y-axis direction by the control of the scanner 18A. Here, it is preferred that the light irradiation unit 18 can control the light in the X-axis direction and the Y-axis direction, but the light irradiation unit 18 may control the light in either the X-axis direction or the Y-axis direction.

[0110] Stage 42 includes light-transmitting portion 142 formed in position correction region 42B and scattering portion 142A formed on the upper surface of light-transmitting portion 142. Laser beam 18C irradiated from light irradiation portion 18 can be scanned in the X-axis direction within a range reaching at least scattering portion 142A.

[0111] A detection unit 62 for detecting light is disposed below the workbench 42. The detection unit 62 includes a light focusing unit 62A that focuses light in the vacuum chamber 12, an optical fiber 62B that propagates the light focused on the light focusing unit 62A to the outside of the vacuum chamber 12, and a photodetector 62C that detects the light propagated to the outside of the vacuum chamber 12 through the optical fiber 62B. Since the photodetector 62C is disposed outside the vacuum chamber 12, it is possible to suppress the gas released from the photodetector 62C from intruding into the vacuum chamber 12.

[0112] Figure 5 and Figure 6 Schematic diagram showing the structure and function of the focusing unit 62A. Figure 5 and Figure 6 As shown in the example in FIG. 1 , the focusing unit 62A includes: a focusing lens 162 that focuses the light incident from the light irradiation unit 18 on the optical axis of the light; and a light shielding plate 164 that is arranged on the optical axis of the light incident from the light irradiation unit 18 and is located downstream of the light path of the focusing lens 162 (i.e., Figure 5 and Figure 6 The light shielding plate 164 is a plate-shaped member that shields incident light and is located farther from the light-transmitting portion 142 than the light-collecting lens 162 and is arranged at the light-collecting position of the light-collecting lens 162.

[0113] exist Figure 5 In the case shown, from the light irradiation unit 18 (refer to Figure 4 ) The incident laser beam 18C (parallel light) reaches the focusing unit 62A only through the light-transmitting portion 142 in the workbench 42. Figure 6 In the case shown, from the light irradiation unit 18 (refer to Figure 4 ) The incident laser beam 18C passes through the scattering portion 142A and the light-transmitting portion 142 in the workbench 42 and reaches the focusing unit 62A. Figure 6In the embodiment, the laser beam 18C passes through the scattering portion 142A and the light transmitting portion 142, but the laser beam 18C may pass through only the scattering portion 142A.

[0114] exist Figure 5 In the case shown, the laser light 18C that has passed through the light-transmitting portion 142 other than the scattering portion 142A reaches the light-condensing unit 62A without significantly changing the irradiation range and direction of the light. Then, the laser light 18C is condensed by the condensing lens 162 in the light-condensing unit 62A and enters the light shielding plate 164 disposed at the condensing position of the condensing lens 162. Since the light is shielded by the light shielding plate 164, the laser light 18C does not reach the optical fiber 62B that is downstream of the light shielding plate 164 on the light path along the optical axis of the laser light 18C.

[0115] On the other hand, Figure 6 In the case shown in FIG. 1 , the laser light 18C passing through the scattering portion 142A in the light-transmitting portion 142 is scattered when passing through the scattering portion 142A. Figure 6 The laser light 18C reaches the focusing unit 62A in a state of being enlarged by the sand grains in the laser beam. Then, the laser light 18C is focused by the focusing lens 162 in the focusing unit 62A.

[0116] At this time, the laser light 18C whose irradiation range is expanded due to the scattering of light in the scattering portion 142A contains a large number of components that are not parallel light, and at least a part of the components is not focused at the focusing position of the condensing lens 162. Therefore, the light shielding plate 164 arranged at the focusing position of the condensing lens 162 shields only a part of the laser light 18C. In other words, a part of the laser light 18C that is not shielded by the light shielding plate 164, that is, the scattered light of the laser light 18C, reaches the optical fiber 62B that is downstream of the light shielding plate 164 on the light path along the optical axis of the laser light 18C.

[0117] As described above, when the laser light 18C irradiated on the upper surface of the workbench 4 is incident on the portion of the light-transmitting portion 142 where the scattering portion 142A is formed, the light is focused by the focusing unit 62A and reaches the optical fiber 62B. Then, the light reaching the optical fiber 62B is detected by the light detector 62C. Therefore, when the scattering portion 142A is irradiated with the laser light 18C, since the detection unit 62 can detect the scattered light of the laser light 18C, the position of the irradiated light can be corrected in such a way that the setting value of the scanner 18A at this time corresponds to the position of the scattering portion 142A. As a result, in the subsequent process, when the substrate W arranged on the upper surface of the workbench 42 is subjected to optical processing, the position of the light irradiated from the light irradiation unit 18 can be aligned with high precision.

[0118] In addition, since the light-transmitting portion 142 irradiated by the light irradiation portion 18 is made of a transparent material, even if the light-transmitting portion 142 is repeatedly irradiated with relatively high-intensity light in order to correct the position of the light irradiated by the light irradiation portion 18, damage to the target irradiated with light for correction (i.e., the light-transmitting portion 142) can be suppressed.

[0119] Furthermore, since the light detected in the detection unit 62 is scattered light, rather than transmitted light that has not been scattered but has passed through the light-transmitting unit 142 , damage to the detection unit 62 due to the light can be suppressed compared to the case where the unscattered transmitted light is directly detected.

[0120] <About the shape of the scattering part>

[0121] Figure 7 142A is a top view showing an example of the shape of the scattering portion 142A. Figure 7 As shown in the example, the scattering portion 142A is provided on the upper surface of the workbench 42 and extends in the X-axis direction and the Y-axis direction, for example, in a top view, it is a shape (butterfly shape) in which two triangles are arranged opposite to each other and one of their vertices is connected to each other. If such a shape is adopted, the width of the scattering portion 142A in the X-axis direction (the total width of the formed area) increases as it moves toward the central part in the Y-axis direction. Alternatively, the width of the scattering portion 142A in the Y-axis direction decreases as it moves toward the central part in the X-axis direction.

[0122] Figure 8 It means that the Figure 7 The shape exemplified in FIG. 1 is a diagram showing an example of a detection signal in the light detector 62C obtained when the scattering portion 142A is scanned. Figure 8 In the example shown, the light detector 62C detects light at constant sampling timings (T1, T2, T3, T4, and T5) and outputs a detection signal S, and the position in the Y-axis direction of the stage 42 is changed for each scan.

[0123] When the light irradiated to the butterfly-shaped scattering portion 142A is detected by the light detector 62C, as shown in FIG. Figure 8 As shown in the example, at the end portion on the positive direction side of the Y axis and the end portion on the negative direction side of the Y axis, the scattered light region is divided into two locations in the X axis direction, so the detection signal S is interrupted at least at sampling timing T3. On the other hand, at the center portion in the Y axis direction, the scattered light region is continuously arranged in the X axis direction, so the detection signal S is not interrupted from sampling timing T1 to sampling timing T5.

[0124] Thus, it can be seen that the Y-axis position detected during scanning when the detection signal S is not interrupted is the Y-axis center position of the scattering portion 142A. That is, by comparing the interruptions of the detection signal S in multiple scans, the center position of the scattering portion 142A can be determined with high accuracy.

[0125] It can be seen that the position in the X-axis direction corresponding to the middle point of the period in which the detection signal S is output (sampling timing T3 when the detection signal S is output at sampling timing T1 and sampling timing T5) is the center position of the scattering portion 142A in the X-axis direction.

[0126] On the other hand, Figure 7 The shape of the example in FIG. 1 is rotated 90 degrees, that is, the scattering part (butterfly shape) is scanned in the X-axis direction (this corresponds to the Figure 7 In the example shape (i.e., when the scattering portion is scanned in the Y-axis direction), the area of ​​scattered light is continuously arranged longer in the X-axis direction at the end on the positive direction side of the Y-axis and the end on the negative direction side of the Y-axis, and the area of ​​scattered light is arranged shortest in the X-axis direction in the central part in the Y-axis direction.

[0127] Thus, it can be seen that the Y-axis position of the scan in which the detection signal S is detected as the shortest is the Y-axis center position of the scattering part. That is, by comparing the time lengths of detecting the detection signal S in multiple scans, the center position of the scattering part can be determined with high accuracy.

[0128] It can be seen that the position in the X-axis direction corresponding to the middle point of the period in which the detection signal S is output (sampling timing T3 when the detection signal S is output from sampling timing T1 to sampling timing T5) is the center position of the scattering part in the X-axis direction.

[0129] As described above, since the scattering portion is butterfly-shaped, the center position of the scattering portion in the X-axis direction or the Y-axis direction can be determined with high accuracy. Therefore, the position of the light irradiated from the light irradiation unit 18 can be corrected and aligned with high accuracy.

[0130] Here, the shape of the scattering portion is not limited to Figure 7 and Figure 8 The shape in which the area formed toward the center in the X-axis direction becomes smaller and smaller may be, for example, a shape in which the area formed toward the center in the X-axis direction becomes smaller discontinuously, or a shape in which the area formed toward the center in both the X-axis direction and the Y-axis direction becomes larger. Figure 7 and Figure 8 The straight lines shown may also include curved lines at least in part.

[0131] <About the case where multiple light irradiation units are provided>

[0132] Fig. 9 2 is a cross-sectional view showing an example of a structure having a plurality of light irradiation units. Fig. 9 As shown in the example, the light irradiation device includes a plurality of light irradiation units 118 and a plurality of light irradiation units 218 .

[0133] The light irradiation unit 118 includes a scanner 118A, which is a galvano mirror or the like for controlling the direction of the irradiated light in the X-axis direction, and a condenser lens 118B for condensing light from a light source (not shown). Fig. 9 In the figure, the light irradiated through the focusing lens 118B and then through the irradiation window 20A formed by quartz or the like is, for example, laser 118C. The laser 118C is controlled by the scanner 118A to scan the substrate W arranged on the upper surface of the workbench 42 in the X-axis direction.

[0134] Similarly, the light irradiation unit 218 includes a scanner 218A, which is a galvano mirror or the like for controlling the direction of the irradiated light in the X-axis direction, and a focusing lens 218B for focusing light from a light source (not shown). Fig. 9 In the figure, the light irradiated through the focusing lens 218B and then through the irradiation window 20B formed by quartz or the like is, for example, laser 218C. The laser 218C is controlled by the scanner 218A to scan the substrate W arranged on the upper surface of the workbench 42 in the X-axis direction.

[0135] Here, the light irradiation area in the X-axis direction of the light irradiation section 118 refers to the area from the position corresponding to the scattering section 142B formed in the light-transmitting section 142 to the position corresponding to the scattering section 142C formed in the light-transmitting section 142. On the other hand, the light irradiation area in the X-axis direction of the light irradiation section 218 refers to the area from the position corresponding to the scattering section 142C formed in the light-transmitting section 142 to the position corresponding to the scattering section 142D formed in the light-transmitting section 142. That is, the scattering section 142C is arranged at the connecting portion of the light irradiation area of ​​the light irradiation section 118 and the light irradiation area of ​​the light irradiation section 218.

[0136] The detection section 62 is disposed below the stage 42 at positions corresponding to the scattering section 142B, the scattering section 142C, and the scattering section 142D. The light focusing means 62A in each detection section 62 is disposed on the optical axis of the light incident from the corresponding light irradiation section.

[0137] By configuring the scattering parts 142B, 142C, and 142D in this way, the connecting portion of the light irradiation area of ​​the light irradiation part 118 and the light irradiation area of ​​the light irradiation part 218 is positioned by the common scattering part 142C, thereby suppressing positional deviation between the two light irradiation areas.

[0138] <Second embodiment>

[0139] Fig.10 1 is a cross-sectional view showing an example of the internal structure and peripheral structure of the vacuum chamber 12 of the light irradiation device 1 of the present embodiment. Fig.10 As shown in the example, the interior of the vacuum chamber 12 includes: a workbench 42, on which a substrate W is arranged; a slide 44, which can move in the Y-axis direction and supports the workbench 42 from below; a base 46, which is fixed to the external fixing part 14 independently of the vacuum chamber 12; a linear guide 48, which is fixed to the base 46 and extends in the Y-axis direction; a linear motor mechanism 50, which moves the slide 44 in the Y-axis direction along the linear guide 48; and a lifting pin mechanism 52, which has a lifting pin 52A that supports the substrate W by passing through a through hole (not shown here) formed in the workbench 42.

[0140] Fig.11 It is the main expression Figure 2 A perspective view of the light irradiation unit 18 and the workbench 42 in the structure exemplified in FIG. Fig.11 FIG. 4 shows a state where a substrate W is arranged on the upper surface of the workbench 42. The light irradiation unit 18 can be Fig.11 The scanning light irradiation direction is in the X-axis direction, and the workbench 42 is driven by a linear motor mechanism 50 (refer to Figure 2 ) can move in the Y-axis direction, so the light irradiated from the light irradiation unit 18 to the upper surface of the workbench 42 can form a rectangular irradiation area (light irradiation area) on the upper surface of the substrate W.

[0141] like Fig.11 As shown, the stage 42 includes an object placement region 42A where a substrate W, which is an object to be irradiated with light by the light irradiation unit 18 , is placed, and a position correction region 42B for correcting the position of light irradiated by the light irradiation unit 18 .

[0142] The target configuration area 42A configures the substrate W at a determined position in the target configuration area 42A. Thus, the positional relationship between the worktable 42 and the substrate W is predetermined. In the position correction area 42B, the position of the light irradiated from the light irradiation unit 18 into the position correction area 42B is detected. Then, in the position correction area 42B, before the optical processing of the substrate W in the target configuration area 42A is performed, the correspondence between the set value of the direction of the light irradiated from the light irradiation unit 18 and the detected irradiation position of the light is corrected.

[0143] A light-transmitting portion 142 for transmitting light is provided on at least a portion of the position correction region 42B. The light-transmitting portion 142 is made of quartz (SiO 2) or a transparent material such as a transparent resin (e.g., silicone resin). The light-transmitting portion 142 is provided from the upper surface to the lower surface of the workbench 42 corresponding to the position correction area 42B. The light irradiated from the light irradiation portion 18 to the light-transmitting portion 142 is transmitted from the upper surface to the lower surface of the workbench 42.

[0144] At least one ( Fig.11 The scattering parts 142A are made of a transparent material and scatter the irradiated light while reflecting or transmitting it. The position where the scattering parts 142A are provided is a predetermined position on the workbench 42. That is, the position of the scattering parts 142A on the entire workbench 42 is predetermined. Fig.11 In the embodiment, each scattering portion 142A is disposed at an end of the light irradiation area of ​​the light irradiation portion 18 in the X-axis direction, but the position where the scattering portion 142A is disposed can be any position on the workbench 42, and is not limited to the end of the light irradiation area of ​​the light irradiation portion 18. The scattering portion 142A has the property of scattering incident light, and is obtained, for example, by sandblasting a glass material or frosting it with hydrofluoric acid or the like. Fig.11 In the embodiment, each scattering portion 142A is formed on the upper surface of the light-transmitting portion 142 , but at least one scattering portion 142A may be formed on the lower surface of the light-transmitting portion 142 .

[0145] In addition, Fig.11 In the case shown, the object arrangement area 42A and the position correction area 42B are independent areas, but these areas may overlap at least in part. That is, the light-transmitting portion 142 may be provided in at least a part of the area where the substrate W is arranged. In such a case, for example, when the substrate W is not arranged, the position of the light irradiated from the light irradiation portion 18 may be corrected at the position where the substrate W is arranged.

[0146] In addition, the light-transmitting portion 142 may have the scattering portion 142A formed over the entire range thereof. That is, there may be no portion that transmits only light, and light scattering may occur over the entire range of the light-transmitting portion 142 .

[0147] In addition, Fig.11 In the embodiment, the light-transmitting portion 142 is extended along the X-axis direction, and the scattering portion 142A is provided at each end in the X-axis direction. However, the light-transmitting portion 142 may be divided into multiple locations in the X-axis direction. However, in the case where multiple scattering portions 142A are provided in the integrally formed light-transmitting portion 142 (i.e. Fig.11 In the case shown in FIG. 1 , the light-transmitting portion 142 can be mounted on the workbench 42 ( FIG. 4 ) while maintaining the positional accuracy between the plurality of scattering portions 142A when the light-transmitting portion 142 is made of a transparent material. Fig.11Therefore, since positional deviation between the scattering parts 142A does not occur when the scattering parts 142A are mounted on the workbench 42, the accuracy of calibration using the plurality of scattering parts 142A can be maintained at a high level.

[0148] Fig.12 It is the main expression Fig.10 A cross-sectional view of an example of the structure of the light irradiation unit 18 and the workbench 42 in the exemplary structure. Fig.12 As shown in the example, the light irradiation unit 18 includes: a scanner 18A, which is a galvano mirror or a polygon mirror, etc., which controls the direction of the irradiated light in the X-axis direction and the Y-axis direction; and a focusing lens 18B, which focuses the light from the light source (not shown). Fig.12 In the embodiment, the light irradiated through the condenser lens 18B and then through the irradiation window 20 formed of quartz or the like is, for example, laser light 18C. The laser light 18C can scan the substrate W arranged on the upper surface of the workbench 42 in the X-axis direction and the Y-axis direction through the control of the scanner 18A. Here, it is preferred that the light irradiation unit 18 can control the light in the X-axis direction and the Y-axis direction, but the light irradiation unit 18 can also control the light in either the X-axis direction or the Y-axis direction.

[0149] Stage 42 includes light-transmitting portion 142 formed in position correction region 42B and scattering portion 142A formed on the upper surface of light-transmitting portion 142. Laser beam 18C irradiated from light irradiation portion 18 can be scanned in the X-axis direction within a range reaching at least scattering portion 142A.

[0150] A detection unit 62 for detecting light is arranged below the workbench 42. The detection unit 62 comprises: a focusing unit 62A for focusing light in the vacuum chamber 12; a transparent rod 62D for propagating the light focused on the focusing unit 62A; a scattering unit 166 provided on the transparent rod 62D; an optical fiber 62B for further propagating the light propagated in the transparent rod 62D to the outside of the vacuum chamber 12; and a light detector 62C for detecting the light propagated to the outside of the vacuum chamber 12 through the optical fiber 62B. The light detector 62C is arranged outside the vacuum chamber 12, so that the gas released from the light detector 62C can be suppressed from intruding into the vacuum chamber 12. In addition, in Fig.12 In the example shown, the light propagating in the transparent rod 62D is propagated to the outside of the vacuum chamber 12 by the optical fiber 62B, but any member that propagates light in the same manner may be used, for example, a lens or the like may be used instead of the optical fiber 62B.

[0151] Fig.13 and Fig.14 Schematic diagram showing the structure and function of the detection unit 62. Fig.13 and Fig.14As shown in the example, the focusing unit 62A of the detection unit 62 includes: a focusing lens 162 for focusing the light incident from the light irradiation unit 18 on the optical axis of the light; and a light shielding plate 164 arranged on the optical axis of the light incident from the light irradiation unit 18 at a position downstream of the focusing lens 162 on the light path (i.e. Fig.13 and Fig.14 The light shielding plate 164 is a plate-shaped member that shields incident light and is disposed at a position farther from the light-transmitting portion 142 than the light-collecting lens 162 and at the light-collecting position of the light-collecting lens 162.

[0152] In addition, if Fig.13 and Fig.14 As shown in the example, the transparent rod 62D of the detection part 62 is made of quartz (SiO 2 ) or a transparent material such as a transparent resin (such as a silicone resin). In addition, the transparent rod 62D is, for example, a cylindrical rod member, which is extended on a plane (i.e., an XY plane) along the surface of the workbench 42. If the transparent rod 62D is cylindrical, when the light focused in the focusing unit 62A is incident on the transparent rod 62D, the total reflection condition is easily satisfied in the transparent rod 62D, and the light can be efficiently transmitted. However, the shape of the transparent rod 62D is not limited to a cylindrical shape. In addition, in the present embodiment, although the transparent rod 62D is shown as a rod-shaped case, the transparent rod 62D may also be, for example, a surface shape corresponding to the entire surface of the workbench 42.

[0153] The transparent rod 62D is disposed at a conjugate position with the scattering portion 142A with reference to the condenser lens 162 in the Z-axis direction.

[0154] In addition, the transparent rod 62D can be arranged in a range that at least overlaps with the scattering portion 142A when viewed from above (for example, a range that includes the scattering portion 142A when viewed from above). If arranged in this way, light that is scattered by the scattering portion 142A and further focused by the focusing unit 62A efficiently enters the transparent rod 62D and propagates.

[0155] In addition, a scattering portion 166 is provided on the lower surface of the transparent rod 62D. The scattering portion 166 scatters the irradiated light and reflects or transmits the irradiated light. The scattering portion 166 is obtained by, for example, sandblasting a glass material or frosting it with hydrofluoric acid or the like.

[0156] The scattering portion 166 is disposed in a range that at least overlaps with the scattering portion 142A when viewed from above (for example, a range that includes the scattering portion 142A when viewed from above). In addition, the scattering portion 166 may also be disposed inside or on the upper surface of the transparent rod 62D. Fig.12As shown, the scattering portion 166 may be provided in a range extending continuously along the length direction of the transparent rod 62D, or may be provided in the entire transparent rod 62D when viewed from above.

[0157] In addition, the scattering portion provided on the transparent rod 62D is not limited to being formed by processing the surface of the transparent rod 62D. For example, a reflective film functioning as a scattering portion may be applied to the lower surface of the transparent rod 62D.

[0158] If the scattering portion 166 is formed by processing a transparent material, it is less likely to be damaged by light irradiation, and exhaust that becomes a problem under a vacuum (or under reduced pressure) can be suppressed. On the other hand, when a metal film, i.e., a reflective film, is provided as the scattering portion, the reflectivity of the light incident into the transparent rod 62D can be increased, thereby improving the propagation efficiency of the light.

[0159] Fig.15 162D is a cross-sectional view schematically showing an example of the structure of the transparent rod 162D. Fig.15 As shown in the example, a reflective film 168 as a scattering portion is applied to the lower surface of the transparent rod 162D. The reflective film 168 is made of, for example, aluminum oxide (Al 2 O 3 ) and other metal films.

[0160] Here, the light incident on the transparent rod 162D is the scattered light that has been scattered by the scattering portion 142A, and has an intensity higher than that of the light incident on the light irradiation portion 18 (see Fig.12 ) is directly irradiated with light of low light intensity. Therefore, when the reflective film 168 is provided instead of the scattering portion 166, the degree of degradation of the reflective film 168 can be suppressed to a low level.

[0161] exist Fig.13 In the case shown, from the light irradiation unit 18 (refer to Fig.12 ) The incident laser beam 18C (parallel light) reaches the focusing unit 62A only through the light-transmitting portion 142 of the workbench 42. Fig.14 In the case shown, from the light irradiation unit 18 (refer to Fig.12 ) The incident laser beam 18C passes through the scattering portion 142A and the light-transmitting portion 142 of the workbench 42 and reaches the focusing unit 62A. Fig.14 In the embodiment, although the laser light 18C passes through the scattering portion 142A and the light transmitting portion 142, the laser light 18C may pass through only the scattering portion 142A.

[0162] exist Fig.13In the case shown, the laser light 18C that has passed through the light-transmitting portion 142 other than the scattering portion 142A reaches the light-condensing unit 62A without significantly changing the irradiation range and direction of the light. Then, the laser light 18C is condensed by the condensing lens 162 in the light-condensing unit 62A, and enters the light-shielding plate 164 disposed at the condensing position of the condensing lens 162. Since the light is shielded by the light-shielding plate 164, the laser light 18C does not reach the transparent rod 62D that is downstream of the light-shielding plate 164 on the light path along the optical axis of the laser light 18C.

[0163] On the other hand, Fig.14 In the case shown in FIG. 1 , the laser light 18C passing through the scattering portion 142A in the light-transmitting portion 142 is scattered when passing through the scattering portion 142A. Fig.14 The laser light 18C reaches the focusing unit 62A in a state of being enlarged by the sand grains in the laser beam. Then, the laser light 18C is focused by the focusing lens 162 in the focusing unit 62A.

[0164] At this time, the laser light 18C whose irradiation range is expanded due to the scattering of light in the scattering portion 142A contains a large number of components that are not parallel light, and at least a part of the components is not focused at the focusing position of the condensing lens 162. Therefore, the light shielding plate 164 arranged at the focusing position of the condensing lens 162 only shields a part of the laser light 18C. In other words, a part of the laser light 18C that is not shielded by the light shielding plate 164, that is, the scattered light of the laser light 18C, reaches the transparent rod 62D that is downstream of the light shielding plate 164 on the light path along the optical axis of the laser light 18C.

[0165] Then, the laser light 18C incident on the transparent rod 62D is scattered by the scattering part 166. A part of the scattered laser light 18C is reflected by the transparent rod 62D and propagates to reach the optical fiber 62B connected to the end of the transparent rod 62D. Fig.15 In the case where the reflective film 168 illustrated in FIG. 1 is provided here, the laser light 18C is totally reflected by the reflective film 168 and propagates inside the transparent rod 62D.

[0166] As described above, when the laser light 18C irradiated onto the upper surface of the workbench 42 is incident on the portion of the light-transmitting portion 142 where the scattering portion 142A is formed, the light is condensed by the condensing unit 62A and reaches the transparent rod 62D. Then, the light reaching the transparent rod 62D propagates in the optical fiber 62B connected to the end of the transparent rod 62D in the transparent rod 62D and is detected by the light detector 62C. Therefore, when the laser light 18C is irradiated onto the scattering portion 142A, the detection unit 62 can detect the scattered light of the laser light 18C, and thus can correct the position of the irradiated light in such a way that the setting value of the scanner 18A at this time corresponds to the position of the scattering portion 142A. As a result, in the subsequent process, when the substrate W arranged on the upper surface of the workbench 42 is subjected to optical processing, the position of the light irradiated from the light irradiation unit 18 can be aligned with high precision.

[0167] In addition, since the light-transmitting portion 142 and the transparent rod 62D irradiated by the light irradiation portion 18 are made of transparent materials, even if the light-transmitting portion 142 and the transparent rod 62D are repeatedly irradiated with relatively high-intensity light in order to correct the position of the light irradiated by the light irradiation portion 18, damage to the target irradiated with light for correction (i.e., the light-transmitting portion 142 and the transparent rod 62D) can be suppressed.

[0168] Furthermore, since the light detected in the detection unit 62 is scattered light, not transmitted light that has not been scattered but has passed through the light-transmitting unit 142 , damage to the detection unit 62 due to the light can be suppressed compared to the case where the unscattered transmitted light is directly detected.

[0169] <Effects of the above-described embodiments>

[0170] Next, examples of the effects produced by the above-described embodiments are shown. It should be noted that in the following description, the effects are described based on the specific structures exemplified in the above embodiments, but other specific structures exemplified in the specification of this application may be substituted within the scope of producing the same effects. That is, in the following, for convenience, only the case where any one of the corresponding specific structures is used as a representative is described, and other specific structures corresponding to the representative specific structures may be substituted.

[0171] According to the above-described embodiment, the light irradiation device includes a workbench 42, at least one light irradiation unit 18 (or light irradiation unit 118, light irradiation unit 218), and a detection unit 62. The light irradiation unit 18 irradiates light to the upper surface of the workbench 42. At least one scattering unit 142A (or scattering unit 142B, scattering unit 142C, scattering unit 142D) for scattering light is provided on at least a portion of the workbench 42. The detection unit 62 detects light scattered in the scattering unit 142A. Moreover, the scattering unit 142A is made of a transparent material.

[0172] According to such a structure, since the scattering portion 142A of the irradiated light is made of a transparent material, damage to the portion irradiated with light (scattering portion 142A) can be reduced when irradiated with high-intensity light such as laser. Therefore, the position accuracy of the light detected by the detection unit 62 is not easily reduced. In addition, by detecting the scattered light scattered by the scattering portion 142A, damage to the detection unit 62 caused by direct irradiation light can be reduced even when detecting high-intensity light such as laser.

[0173] It should be noted that, when other structures exemplified in the specification of the present application are appropriately added, that is, even when other structures in the specification of the present application that are not mentioned as the above-mentioned structures are appropriately added, the same effects can be produced.

[0174] According to the above-described embodiment, the light irradiated from the light irradiation unit 18 is the laser light 18C (or the laser light 118C or the laser light 218C). With such a configuration, even when irradiated with high-intensity light such as laser light, damage to the scattering portion 142A can be reduced.

[0175] In addition, according to the above-described embodiment, the scattering portion 142A is formed by frosting. According to such a structure, the light irradiated to the light-transmitting portion 142 can be scattered in the scattering portion 142A.

[0176] According to the above-described embodiment, the scattering portion 142A is disposed at the end of the light irradiation area irradiated by the light irradiation unit 18. According to such a configuration, the outer edge of the light irradiation area irradiated by the light irradiation unit 18 can be directly detected by detecting the light irradiated to the scattering portion 142A by the detection unit 62.

[0177] In addition, according to the above-described embodiment, the light irradiation unit 118 and the light irradiation unit 218 are provided. Moreover, the scattering unit 142C is arranged at the connecting portion between the light irradiation areas of each light irradiation unit. According to such a structure, even when a plurality of light irradiation units are used to perform light processing on a wider area, since the connecting portion between the light irradiation area of ​​the light irradiation unit 118 and the light irradiation area of ​​the light irradiation unit 218 is positioned by the common scattering unit 142C, it is possible to suppress the positional deviation between the two light irradiation areas.

[0178] In addition, according to the above-described embodiment, the detection unit 62 includes a condenser lens 162 and a shading plate 164. The condenser lens 162 condenses the light that has passed through the scattering portion 142A. The shading plate 164 is disposed at a position farther from the scattering portion 142A than the condenser lens 162. In addition, the shading plate 164 is disposed at the condensing position of the condenser lens 162. According to such a structure, the position where the light that has passed through the scattering portion 142A while being scattered by the scattering portion 142A is condensed is offset from the condensing position of the condenser lens 162 disposed with the shading plate 164. Therefore, the detection unit 62 avoids detecting the direct light (straight light) that has passed through the light transparent portion 142 without passing through the scattering portion 142A in the light irradiated to the light transparent portion 142, and can detect only the scattered light in the light transparent portion 142 that has been scattered by the scattering portion 142A. Therefore, even in the case of detecting high-intensity light such as laser, damage to the detection unit 62 caused by direct irradiation light can be reduced.

[0179] In addition, according to the embodiment described above, the light irradiation device includes a chamber in which a workbench 42 is built. Here, the chamber corresponds to, for example, the vacuum chamber 12. The vacuum chamber 12 is in a vacuum or reduced pressure environment. In addition, the detection unit 62 includes an optical fiber 62B and a photodetector 62C. The optical fiber 62B transmits the light focused by the focusing lens 162 to the outside of the vacuum chamber 12. The photodetector 62C is arranged outside the vacuum chamber 12. In addition, the photodetector 62C detects the light transmitted through the optical fiber 62B. According to such a structure, since the photodetector 62C in the detection unit 62 is arranged outside the vacuum chamber 12, it is possible to suppress the exhaust gas released from the photodetector 62C from invading the vacuum chamber 12.

[0180] In addition, according to the above-described embodiment, the scattering portion 142A is formed on the upper surface of the workbench 42. According to such a structure, when the focus of the light irradiated from the light irradiation unit 18 is focused on the upper surface of the workbench 42, the focus of the light (or its vicinity) is focused on the scattering portion 142A. Therefore, the irradiation range of the light irradiated to the scattering portion 142A is sufficiently compressed, and the position detection accuracy of the detection unit 62 is improved.

[0181] In addition, according to the above-described embodiment, the scattering portion 142A is provided so as to extend in a first direction (X or Y axis direction) along the upper surface of the workbench 42 and in a second direction (Y or X axis direction) along the upper surface of the workbench 42 and intersecting the first direction. Moreover, the width of the scattering portion 142A in the first direction increases or decreases in the second direction as it approaches the center of the scattering portion 142A. According to such a structure, it can be known that the position at the time of scanning where the detection signal S is detected the shortest or longest is the center position of the scattering portion. That is, by comparing the time lengths of the detection signal S detected in multiple scans, the center position of the scattering portion can be determined with high accuracy.

[0182] In addition, according to the above-described embodiment, the scattering portion 142A is a butterfly shape in which two triangles are connected at one vertex when viewed from above the workbench 42. According to such a structure, the center position of the scattering portion in the X-axis direction or the Y-axis direction can be determined with high accuracy. Therefore, the position of the light irradiated from the light irradiation unit 18 can be corrected and aligned with high accuracy.

[0183] According to the above-described embodiment, the light irradiation device includes a workbench 42, at least one light irradiation unit 18, and a detection unit 62. The light irradiation unit 18 irradiates light to the upper surface of the workbench 42. In addition, at least one first scattering unit for scattering light is provided on at least a portion of the workbench 42. Here, the first scattering unit corresponds to, for example, the scattering unit 142A. The detection unit 62 detects light scattered in the scattering unit 142A. In addition, the scattering unit 142A is made of a transparent material. In addition, the detection unit 62 includes a focusing lens 162, a shading plate 164, a transmission member, and a light detector 62C. In this case, the transmission member corresponds to, for example, a transparent rod 62D. The focusing lens 162 focuses light that has passed through the scattering unit 142A. The shading plate 164 is disposed at a position farther from the scattering unit 142A than the focusing lens 162. In addition, the shading plate 164 is disposed at the focusing position of the focusing lens 162. The transparent rod 62D propagates the light that has been condensed by the condensing lens 162. The light detector 62C detects the light propagated through the transparent rod 62D. In addition, the transparent rod 62D is made of a transparent material. Moreover, a second scattering portion for scattering light is provided at least at a portion of the transparent rod 62D corresponding to the portion where the scattering portion 142A is formed. Here, the second scattering portion corresponds to, for example, the scattering portion 166. In addition, the condensing lens 162 and the light shielding plate 164 in the detection unit 62 may not be provided.

[0184] According to such a structure, since the scattering portion 142A and the transparent rod 62D of the irradiated light are made of transparent materials, even when irradiating high-intensity light such as laser, the damage to the portion irradiated with light (the scattering portion 142A and the transparent rod 62D) can be reduced. Therefore, the position accuracy of the light detected by the detection unit 62 is not easily reduced. In addition, by detecting the scattered light scattered by the scattering portion 142A, even when detecting high-intensity light such as laser, the damage to the detection unit 62 caused by direct irradiation with light can be reduced. In addition, by providing the scattering portion 166 on the transparent rod 62D, the light incident on the transparent rod 62D can be scattered by the scattering portion 166 and efficiently propagated in the transparent rod 62D. Therefore, the light can be efficiently detected by the light detector 62C.

[0185] It should be noted that, when other structures exemplified in the specification of the present application are appropriately added to the above-mentioned structure, that is, even when other structures in the specification of the present application that are not mentioned as the above-mentioned structure are appropriately added, the same effect can be produced.

[0186] In addition, according to the above-described embodiment, the transparent rod 62D is made of glass material. According to such a structure, it is possible to suppress the damage of the transparent rod 62D that may be caused by the light focused by the focusing lens 162 irradiating the transparent rod 62D. Therefore, the position accuracy of the light detected by the detection unit 62 is not easily reduced.

[0187] According to the above-described embodiment, the scattering portion 166 is formed by sandblasting the surface of the transparent rod 62D. With such a structure, damage due to irradiation with light is less likely to occur, and exhaust that becomes a problem in a vacuum (or reduced pressure) can be suppressed.

[0188] In addition, according to the above-described embodiment, the scattering portion is the reflective film 168 coated on the lower surface of the transparent rod 62D. According to such a structure, by increasing the reflectivity of the lower surface of the transparent rod 62D, the reflectivity of the light incident into the transparent rod 62D is increased. Therefore, the propagation efficiency of the light can be improved.

[0189] In addition, according to the above-described embodiment, at least a portion of the scattering portion 166 is disposed in a range overlapping with the scattering portion 142A when viewed from above. According to such a structure, the light incident on the transparent rod 62D scattered by the scattering portion 142A is further scattered by the scattering portion 142A in the transparent rod 62D, and the light can be efficiently propagated in the transparent rod 62D.

[0190] In addition, according to the above-described embodiment, the transparent rod 62D is cylindrical. According to such a structure, since the light incident on the transparent rod 62D easily satisfies the total reflection condition in the transparent rod 62D, the propagation efficiency of the light is improved.

[0191] According to the above-described embodiment, the light irradiated from the light irradiation unit 18 is laser light. According to such a configuration, even when high-intensity light such as laser light is irradiated, damage to the scattering portion 142A and the transparent rod 62D can be reduced.

[0192] In addition, according to the above-described embodiment, the light irradiation device includes a chamber having a built-in workbench 42. Here, the chamber corresponds to, for example, the vacuum chamber 12. Moreover, the light detector 62C detects the light propagated through the transparent rod 62D outside the vacuum chamber 12. According to such a structure, since the light detector 62C in the detection unit 62 is provided outside the vacuum chamber 12, it is possible to suppress the exhaust gas (outgas) released from the light detector 62C from entering the vacuum chamber 12.

[0193] <Regarding Modifications of the Embodiments Described Above>

[0194] In the above-described embodiments, although the material, size, shape, relative arrangement relationship, implementation conditions, etc. of each component are sometimes described, these are merely examples in all respects and are not limiting.

[0195] Therefore, numerous modifications and equivalents not shown are contemplated within the scope of the technology disclosed in the present specification, including, for example, modifications, additions, or omissions of at least one constituent element.

[0196] In the above-described embodiments, when a material name or the like is described without particular designation, the material may contain other additives, such as alloys, unless there is any inconsistency.

Claims

1. A light irradiation device, wherein: have: a workbench having a substrate disposed on an upper surface thereof; and at least one light irradiation unit, used to irradiate light onto the upper surface of the workbench, At least one first scattering portion for scattering the light is provided in at least a portion of the workbench except for the area where the substrate is arranged. The light irradiation device further includes a detection unit configured to detect the light scattered by the first scattering unit. The first scattering part is made of a transparent material.

2. The light irradiation device according to claim 1, wherein The light irradiated from the light irradiation unit is laser light.

3. The light irradiation device according to claim 1 or 2, wherein: The first scattering portion is formed by frosting.

4. The light irradiation device according to claim 1 or 2, wherein: The first scattering portion is disposed at an end portion of a light irradiation region where the light is irradiated by the light irradiation portion.

5. The light irradiation device according to claim 4, wherein: The light irradiation unit is provided with a plurality of The first scattering portion is disposed at a connecting portion between the light irradiation regions of the light irradiation portions.

6. The light irradiation device according to claim 1 or 2, wherein: The detection unit has: a condenser lens, configured to condense the light transmitted through the first scattering portion; and The light shielding plate is located at a position farther from the first scattering portion than the condensing lens and is arranged at a condensing position of the condensing lens.

7. The light irradiation device according to claim 6, wherein: The light irradiation device further comprises a chamber in which the workbench is built. The chamber is in a vacuum or reduced pressure environment. The detection unit also has: an optical fiber that transmits the light focused by the focusing lens to the outside of the chamber; and A light detector is disposed outside the chamber and detects the light propagating through the optical fiber.

8. The light irradiation device according to claim 1 or 2, wherein: The first scattering portion is formed on the upper surface of the workbench.

9. The light irradiation device according to claim 1 or 2, wherein: The first scattering portion is disposed to extend in a first direction along the upper surface of the workbench and in a second direction along the upper surface of the workbench and intersecting the first direction. The width of the first scattering portion in the first direction increases or decreases as approaching a central portion of the first scattering portion in the second direction.

10. The light irradiation device according to claim 1 or 2, wherein: The first scattering portion is in a butterfly shape in which two triangles have one vertex connected to each other when viewed from above the workbench.

11. The light irradiation device according to claim 1 or 2, wherein: The detection unit has: a propagation member configured to propagate the light having passed through the first scattering portion; and a light detector for detecting the light propagated through the propagation member, The transmission member is made of a transparent material. The transmission member is provided with a second scattering portion for scattering the light.

12. The light irradiation device according to claim 11, wherein The transmission member is made of glass material.

13. The light irradiation device according to claim 11, wherein The second scattering portion is formed by performing sandblasting on the surface of the transmission member.

14. The light irradiation device according to claim 11, wherein The second scattering portion is a reflective film coated on the lower surface of the transmission member.

15. The light irradiation device according to claim 11, wherein At least a portion of the second scattering portion is provided in a range overlapping with the first scattering portion in a plan view.

16. The light irradiation device according to claim 11, wherein The transmission member is cylindrical in shape.

17. The light irradiation device according to claim 11, wherein The propagation member is formed to extend along a first direction, which is a direction in which the light propagates. The second scattering portions are continuously arranged in the first direction.

18. The light irradiation device according to claim 11, wherein The light detector detects the light propagated through the propagation member outside a chamber in which the stage is built.

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