Contactor, inspection jig, inspection device, and method for manufacturing contactor

Abstract

Provided are a contactor, an inspection jig, an inspection device, and a method for manufacturing the contactor that are easy to manufacture. The contactor includes a coil spring with a slit formed in a cylindrical body, and a first conductor and a second conductor. The bottom wall, the first side wall, the second side wall, and the top wall are configured so that the cross-sectional shape viewed in the axial direction of the cylindrical body becomes a rectangle. The slits include a first slit, a second slit, a third slit, and a fourth slit. The third slit is connected to the first slit and the second slit, and the fourth slit is connected to the second slit. In a side view of the cylindrical body, the first slit and the second slit are rectangular. The first conductor is connected to one end of the cylindrical body, and the second conductor is connected to the other end of the cylindrical body.

Description

Technical Field

[0001] The present invention relates to a contactor for inspecting an inspection object, an inspection jig for making the contactor contact the inspection object, an inspection device including the inspection jig, and a method for manufacturing the contactor. Background Art

[0002] A coil spring probe has long been known, comprising: a contact pin having a contactor having a conductive pad that contacts an object to be measured; and a cylindrical barrel that is inserted into a cylindrical guide extending on a straight line from the contactor of the contact pin, and a portion of the peripheral wall of the barrel serves as a spring (for example, refer to patent document 1).

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2007-24664 Summary of the invention

[0006] Problems to be solved by the invention

[0007] In addition, in recent years, the miniaturization of semiconductor substrates and circuit boards of the measurement objects has been progressing. The inspection points of the measurement objects or the adjacent spacing between the inspection points are also becoming smaller. Therefore, the diameter of the probe used for inspection has become about 0.1 mm.

[0008] However, if the diameter of the coil spring probe is to be 0.1 mm, a thinner cylindrical guide must be inserted into the cylinder having a diameter of 0.1 mm by manual work, which is laborious.

[0009] An object of the present invention is to provide a contactor that is easy to manufacture, an inspection jig and an inspection device using the contactor, and a method for manufacturing the contactor.

[0010] Technical means of solving problems

[0011] A contactor according to an example of the present invention includes: a coil spring having a slit formed in a cylindrical body; a first conductor having a substantially rod-shaped shape; and a second conductor having a substantially rod-shaped shape; the cylindrical body including a bottom wall portion, a first side wall portion and a second side wall portion respectively connected to the bottom wall portion, and a top wall portion facing the bottom wall portion, the bottom wall portion, the first side wall portion, the second side wall portion, and the top wall portion being configured in such a way that a cross-sectional shape observed in an axial direction of the cylindrical body becomes a rectangle, the slits include a first slit provided in the first side wall portion, a second slit provided in the second side wall portion, a third slit provided in the top wall portion, and a fourth slit provided in the bottom wall portion, the third slit being connected to the first slit and the second slit, the fourth slit being connected to the second slit, the first slit and the second slit being rectangular in a side view of the cylindrical body, the first conductor being connected to one end portion of the cylindrical body, and the second conductor being connected to the other end portion of the cylindrical body.

[0012] Furthermore, an inspection jig according to an example of the present invention includes: the contactor; and a support member that supports the contactor.

[0013] In addition, an inspection device according to an example of the present invention includes: the inspection jig; and an inspection processing unit that inspects the inspection object based on an electrical signal obtained by bringing the contactor into contact with an inspection point provided on the inspection object.

[0014] In a method for manufacturing a contactor according to an example of the present invention, the method for manufacturing a contactor includes forming the first side wall portion and the second side wall portion after forming the bottom wall portion.

[0015] Effects of the Invention

[0016] The contactor, inspection jig and inspection device of this structure are easy to manufacture. In addition, according to this manufacturing method, the contactor can be easily manufactured. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a conceptual diagram schematically showing the structure of an inspection device 1 including a contactor Pr according to one embodiment of the present invention.

[0018] Figure 2 Yes Figure 1 2 is a schematic cross-sectional view showing a simplified example of the structure of the inspection jig 3 shown in FIG.

[0019] Figure 3 Yes means Figure 2 A perspective view of an example of the structure of the contactor Pr shown in FIG.

[0020] Figure 4 Yes means Figure 3A perspective view of an example of the structure of the coil spring CS shown in FIG.

[0021] Figure 5 Yes means Figure 3 A perspective view of an example of the structure of the first conductor P1 and the second conductor P2 shown in FIG.

[0022] Figure 6 1 is an explanatory diagram showing the relative positions of the first conductor P1 and the second conductor P2 in a state where a load is applied to the coil spring CS and the coil spring CS is compressed.

[0023] Figure 7 Yes means Figure 3 A cross-sectional view of the contactor Pr taken along section VII-VII shown in FIG.

[0024] Figure 8 It is used to illustrate Figure 3 1 is an explanatory diagram of an example of a method for manufacturing the contactor Pr shown in .

[0025] Fig. 9 It is used to illustrate Figure 3 1 is an explanatory diagram of an example of a method for manufacturing the contactor Pr shown in .

[0026] Fig.10 It is an explanatory diagram showing a case where the first slit SL1 and the second slit SL2 are assumed to be inclined.

[0027] Fig.11 Yes means Figure 2 Schematic cross-sectional view of a state where the inspection jig 3 shown in FIG. 3 is mounted on the pitch conversion block 35 .

[0028] Fig.12 Yes means Figure 2 1 is a schematic cross-sectional view of an inspection state in which the contactor Pr is crimped to the bump BP.

[0029] [Explanation of Reference Numerals]

[0030] 1: Check the device

[0031] 3: Check the fixture

[0032] 4: Inspection Department

[0033] 6: Sample table

[0034] 6a: Loading section

[0035] 8: Inspection and processing department

[0036] 31: Supporting member

[0037] 34: Wiring

[0038] 34a: Electrode

[0039] 35: Pitch transformation block

[0040] 37: Connecting plate

[0041] 101: Semiconductor wafer (inspection object)

[0042] 311, 312: Support plate

[0043] B: Base end

[0044] BP: Bump (check point)

[0045] C1, C2: Hollow

[0046] F: cylindrical body

[0047] F1: First side wall

[0048] F2: Second side wall

[0049] F3: Top wall

[0050] F4: Bottom wall

[0051] Fx1, Fx2: Fixation part

[0052] H: Through hole

[0053] Ha: Support hole

[0054] Hb: Through hole

[0055] L1: First layer

[0056] L2: Second layer

[0057] L3: The third layer

[0058] L4-1, L4-2: The fourth floor

[0059] L5: Fifth layer

[0060] L6: Sixth layer

[0061] L7: Seventh floor

[0062] N1: First incision

[0063] N2: Second incision

[0064] NF1: First contact surface

[0065] NF2: Second contact surface

[0066] P1: First conductor

[0067] P1a: First protrusion

[0068] P1b: Part I

[0069] P1c, P2c: fixation area

[0070] P1d: First inner conductor

[0071] P1e: First outer conductor

[0072] P2: Second conductor

[0073] P2a: Second protrusion

[0074] P2b: Part 2

[0075] P2d: Second inner conductor

[0076] P2e: Second outer conductor

[0077] Pr: Contactor

[0078] SL': Slit

[0079] SL1: First Slit

[0080] SL2: Second Slit

[0081] SL3: The third slit

[0082] SL4: The fourth slit

[0083] T: front end

[0084] TP1: First cone

[0085] TP2: Second cone

[0086] Wcy, Wcz, Ws, Wy, Wz: Width

[0087] Wf: Line width DETAILED DESCRIPTION

[0088] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Note that structures with the same reference numerals in the respective drawings represent the same structures, and descriptions thereof will be omitted.

[0089] Figure 1 An inspection apparatus 1 shown in FIG. 1 is a semiconductor inspection apparatus for inspecting a circuit formed on a semiconductor wafer 101 as an example of an inspection target object.

[0090] Circuits corresponding to a plurality of semiconductor chips are formed on a semiconductor substrate such as silicon on the semiconductor wafer 101. Furthermore, the inspection object may be an electronic component such as a semiconductor chip, a chip size package (CSP), a semiconductor element (IC), or any other object that can be subjected to electrical inspection.

[0091] In addition, the inspection device is not limited to a semiconductor inspection device, and may be, for example, a substrate inspection device for inspecting a substrate. The substrate to be inspected may be, for example, a printed wiring substrate, a glass epoxy substrate, a flexible substrate, a ceramic multilayer wiring substrate, a packaging substrate for semiconductor packaging, an interposer substrate, a film carrier, or the like, or may be an electrode plate for a display such as a liquid crystal display, an electroluminescence (EL) display, a touch screen display, or an electrode plate for a touch screen, and may be various substrates.

[0092] Figure 1 The inspection apparatus 1 shown in FIG. 1 includes an inspection unit 4, a sample stage 6, and an inspection processing unit 8. A mounting portion 6a for mounting a semiconductor wafer 101 is provided on the upper surface of the sample stage 6, and the sample stage 6 is configured to fix the semiconductor wafer 101 to be inspected at a predetermined position.

[0093] The loading section 6a is, for example, designed to be able to be raised and lowered, so that the semiconductor wafer 101 stored in the sample stage 6 can be raised to the inspection position, or the inspected semiconductor wafer 101 can be stored in the sample stage 6. In addition, the loading section 6a can, for example, rotate the semiconductor wafer 101 so that the orientation flat faces a predetermined direction. In addition, the inspection device 1 includes a conveying mechanism such as a robot arm (not shown in the figure), and the semiconductor wafer 101 is loaded on the loading section 6a or the inspected semiconductor wafer 101 is taken out from the loading section 6a by the conveying mechanism.

[0094] The inspection unit 4 includes an inspection jig 3, a pitch conversion block 35, and a connection plate 37. The inspection jig 3 is a jig for inspecting by bringing a plurality of contactors Pr into contact with the semiconductor wafer 101, and is configured as a so-called probe card, for example.

[0095] A plurality of chips are formed on the semiconductor wafer 101. A plurality of pads or bumps BP and other inspection points are formed on each chip. The inspection jig 3 corresponds to a region (for example, Figure 1 The area indicated by hatching in the figure is referred to as the inspection area below), and a plurality of contactors Pr are maintained in a manner corresponding to each inspection point in the inspection area.

[0096] After the contactor Pr contacts each inspection point in the inspection area and the inspection in the inspection area is completed, the placement unit 6a lowers the semiconductor wafer 101, the sample stage 6 moves parallel to move the inspection area, and then the placement unit 6a raises the semiconductor wafer 101 to contact the contactor Pr with a new inspection area for inspection. In this way, the inspection area is moved sequentially and inspected, thereby performing the inspection of the entire semiconductor wafer 101.

[0097] Furthermore, Figure 1 This is an explanatory diagram that briefly and conceptually shows an example of the structure of the inspection device 1 from the perspective of easy understanding of the invention, and the number, density, and arrangement of the contactors Pr, or the shapes and size ratios of the inspection section 4 and the sample stage 6 are also simplified and conceptualized. For example, from the perspective of easy understanding of the arrangement of the contactors Pr, the inspection area is described with greater emphasis than that of a general semiconductor inspection device, but the inspection area may be smaller or larger.

[0098] The connection plate 37 is configured to be detachable from the pitch conversion block 35. A plurality of electrodes (not shown in the figure) connected to the pitch conversion block 35 are formed on the connection plate 37. Each electrode of the connection plate 37 is electrically connected to the inspection processing unit 8, for example, via a cable or a connection terminal (not shown in the figure). The pitch conversion block 35 is a pitch conversion member for converting the interval between the contactors Pr into the electrode pitch of the connection plate 37.

[0099] The inspection jig 3 includes a plurality of contactors Pr having a tip end T and a base end B described later, and a support member 31 that holds the plurality of contactors Pr with the tip end T facing the semiconductor wafer 101 .

[0100] The pitch conversion block 35 is provided with an electrode 34a described later that contacts and conducts with the base end B of each contactor Pr. The inspection unit 4 includes a connection circuit (not shown) that electrically connects each contactor Pr of the inspection jig 3 to the inspection processing unit 8 via the connection plate 37 and the pitch conversion block 35 or switches the connection.

[0101] Thus, the inspection processing unit 8 can supply an inspection signal to an arbitrary contactor Pr via the connection plate 37 and the pitch conversion block 35 , or detect a signal from an arbitrary contactor Pr.

[0102] The inspection processing unit 8 includes, for example, a power supply circuit, a voltmeter, an ammeter, and a microcomputer, etc. The inspection processing unit 8 controls a driving mechanism (not shown) to move the inspection unit 4, and positions each contactor Pr so that each inspection point of the semiconductor wafer 101 is contacted. Thus, each inspection point is electrically connected to the inspection processing unit 8.

[0103] In the above state, the inspection processing unit 8 supplies an inspection current or voltage to each inspection point of the semiconductor wafer 101 via each contactor Pr of the inspection jig 3, and performs inspection of the semiconductor wafer 101, such as disconnection or short circuit of the circuit pattern, based on the electrical signal such as the voltage or current obtained from each contactor Pr. Alternatively, the inspection processing unit 8 may be a member that measures the impedance of the inspection object based on the electrical signal such as the voltage or current obtained from each contactor Pr by supplying an alternating current or voltage to each inspection point.

[0104] Figure 2 The support member 31 shown in the figure is formed by stacking plate-shaped support plates 311 and 312, for example. A plurality of through holes H are formed to penetrate the support plates 311 and 312. The through holes H are rectangular holes whose cross-sectional shape perpendicular to the axial direction is substantially square. A contactor Pr is inserted into each through hole H.

[0105] A plurality of insertion holes Hb including an opening hole of a predetermined diameter are formed in the support plate 312. A support hole Ha having a smaller diameter than the insertion hole Hb is formed in the support plate 311. The through hole H is formed by connecting the insertion hole Hb of the support plate 312 with the support hole Ha of the support plate 311.

[0106] Furthermore, the support plate 312 may be formed by stacking a plurality of support plates. In addition, a structure in which a plurality of support plates are separated from each other and connected by, for example, pillars, etc. may be used instead of the support plate 312. In addition, the support member 31 is not limited to the example in which the plate-shaped support plates 311 and 312 are stacked, and, for example, a structure in which the through hole H is provided in an integral member may be used.

[0107] A pitch conversion block 35 made of, for example, an insulating resin material is mounted on one end of the support plate 312, and the pitch conversion block 35 blocks the opening of one end of the through hole H (see FIG. Fig.11 ) The wiring 34 is mounted on the pitch conversion block 35 at a position facing the opening of the through hole H so as to penetrate the pitch conversion block 35 .

[0108] The surface of the pitch conversion block 35 facing the support plate 312 and the end surface of the wiring 34 are set to be the same surface. The end surface of the wiring 34 is set as an electrode 34a. Each wiring 34 increases the pitch and is connected to each electrode of the connection plate 37. The pitch conversion block 35 can also be composed of a multi-layer wiring substrate such as a multi-layer organic board (Multi Layer Organic, MLO) or a multi-layer ceramic board (MultiLayer Ceramic, MLC), instead of the wiring 34.

[0109] Reference Figure 3The contactor Pr includes: a coil spring CS, a first conductor P1, and a second conductor P2. In each figure, in order to make the direction relationship clear, it is appropriate to represent the XYZ orthogonal coordinate axis. In each figure, the axial direction of the contactor Pr (coil spring CS, first conductor P1, and second conductor P2) facing the horizontal direction is set as the X direction, the direction perpendicular to the X direction and horizontal is set as the Y direction, and the direction perpendicular to the X direction and the Y direction is set as the Z direction.

[0110] The coil spring CS, the first conductor P1 and the second conductor P2 include conductive materials such as nickel (Ni), nickel cobalt (NiCo), nickel alloy, palladium (Pd), etc. In addition, as described later, a material having a higher conductivity than nickel such as copper is embedded in the first conductor P1 and the second conductor P2.

[0111] Reference Figure 4 , Figure 3 The coil spring CS shown in FIG. 1 is formed into a coil shape by a slit SL extending spirally along the peripheral wall of a cylindrical body F having a cylindrical shape having a rectangular cross-sectional shape perpendicular to the axial direction.

[0112] The slit SL is formed by connecting the first slit SL1 , the third slit SL3 , the second slit SL2 , and the fourth slit SL4 .

[0113] The peripheral wall of the cylindrical body F includes: a first side wall portion F1 and a second side wall portion F2 facing each other, and a top wall portion F3 and a bottom wall portion F4 arranged between the first side wall portion F1 and the second side wall portion F2. That is, the first side wall portion F1 and the second side wall portion F2 are connected to the bottom wall portion F4, respectively. Thus, the bottom wall portion F4, the first side wall portion F1, the second side wall portion F2, and the top wall portion F3 are configured in a manner such that the cross-sectional shape observed in the axial direction of the cylindrical body F becomes a rectangle.

[0114] The first side wall F1, the second side wall F2, the top wall F3, and the bottom wall F4 have substantially flat shapes. The first side wall F1 and the second side wall F2 extend along the XZ plane. The top wall F3 and the bottom wall F4 extend along the XY plane.

[0115] The first slit SL1 is formed in the first side wall portion F1 and extends perpendicularly to the axial direction. The second slit SL2 is formed in the second side wall portion F2 and extends perpendicularly to the axial direction. That is, the first slit SL1 and the second slit SL2 extend along the Z direction. In the side view of the cylindrical body F, the first slit SL1 and the second slit SL2 become rectangular.

[0116] The third slit SL3 is formed in the top wall portion F3 and extends obliquely with respect to the axial direction. The third slit SL3 allows the first slit SL1 and the second slit SL2 to communicate with each other.

[0117] The fourth slit SL4 is formed in the bottom wall portion F4 and extends obliquely with respect to the axial direction. The fourth slit SL4 connects the second slit SL2 and the first slit SL1. The third slit SL3 and the fourth slit SL4 are orthogonal to each other in the Z direction and are oblique with respect to the X direction and the Y direction.

[0118] A fixing portion Fx1 fixed to the first portion P1b is provided at one end of the top wall portion F3 and the bottom wall portion F4. A fixing portion Fx2 fixed to the second portion P2b is provided at the other end of the top wall portion F3 and the bottom wall portion F4. The thickness t1 of the fixing portion Fx1 and the thickness t2 of the fixing portion Fx2 are thicker than the thickness t3 of the top wall portion F3 and the bottom wall portion F4 near the center of the coil spring CS.

[0119] Reference Figure 5 The first conductor P1 and the second conductor P2 have a substantially rod-like shape. The front end of the first conductor P1 becomes the front end portion T of the contact Pr. The front end of the second conductor P2 becomes the base end portion B of the contact Pr.

[0120] The first conductor P1 is formed by connecting a first portion P1b located inside one end of the coil spring CS and a first protrusion P1a protruding from one end of the coil spring CS. An anchor region P1c is provided near the boundary between the first portion P1b and the first protrusion P1a.

[0121] The fixation area P1c is fixed to Figure 4 The fixing portion Fx1 in one end of the coil spring CS shown in FIG. Thus, the portion other than the fixing region P1c in the first portion P1b is formed inside the coil spring CS with a gap corresponding to the difference between the thickness t1 and the thickness t3 with respect to the top wall F3 and the bottom wall F4. As described later, the coil spring CS is formed integrally with the first conductor P1. Thus, the coil spring CS and the first conductor P1 are connected in an integral continuous state through the fixing portion Fx1 and the fixing region P1c.

[0122] A first notch portion N1 having a shape in which one side portion is cut is provided at the front end portion of the first portion P1b. The first notch portion N1 has a substantially flat first contact surface NF1 extending along the axial direction. A first taper portion TP1 is formed at the front end portion of the first notch portion N1 in connection with the first contact surface NF1. The first taper portion TP1 is configured so that the thickness becomes thinner as it approaches the front end of the first portion P1b.

[0123] The first notch portion N1 is recessed in the Y direction. The first contact surface NF1 extends along the XZ plane. The first tapered portion TP1 extends in the Z direction and is inclined in a direction in which the tip is separated from the second conductor P2 relative to the X direction and the Y direction.

[0124] The second conductor P2 is formed by connecting a second portion P2b located inside the other end of the coil spring CS and a second protrusion P2a protruding from the other end of the coil spring CS. An anchor region P2c is provided near the boundary between the second portion P2b and the second protrusion P2a.

[0125] The fixing area P2c is fixed to Figure 4 The fixing portion Fx2 in the other end of the coil spring CS shown in FIG. Thus, the portion other than the fixing region P2c in the second portion P2b is inserted into the coil spring CS with a gap corresponding to the difference between the thickness t2 and the thickness t3 with respect to the top wall F3 and the bottom wall F4. As described later, the coil spring CS is formed integrally with the second conductor P2. Thus, the coil spring CS and the second conductor P2 are connected in an integral continuous state through the fixing portion Fx2 and the fixing region P2c.

[0126] A second cutout portion N2 having a shape in which one side portion is cut is provided at the front end portion of the second portion P2b. The second cutout portion N2 has a substantially flat second contact surface NF2 extending along the axial direction. A second taper portion TP2 is formed at the front end portion of the second cutout portion N2 in connection with the second contact surface NF2. The second taper portion TP2 is configured so that the thickness becomes thinner as it moves toward the front end of the second portion P2b.

[0127] The second notch portion N2 is recessed in the Y direction opposite to the first notch portion N1. The second contact surface NF2 extends along the XZ plane. The second tapered portion TP2 extends in the Z direction and is inclined relative to the X direction and the Y direction toward the direction in which the tip is separated from the first conductor P1.

[0128] The front end of the second protrusion P2a, that is, the central part in the Z direction of the base end B of the contactor Pr protrudes more than the two side parts in the Z direction. The front end T and the base end B of the contactor Pr can also be flat, and can be set to various shapes such as crown shape, cone shape, etc. suitable for contact with the inspection point or electrode 34a.

[0129] The cross-sectional shape of the portion other than the first notch N1 of the first conductor P1 and the portion other than the second notch N2 of the second conductor P2 perpendicular to the axial direction is a rectangle. The length of one side of the cross-sectional shape is slightly shorter than the length of one side of the inner wall in the cross-sectional shape perpendicular to the axial direction of the coil spring CS. In this way, by setting the cross-sectional shape to a rectangle, the cross-sectional area of ​​the first conductor P1 and the second conductor P2 can be increased compared to a contactor having a circular cross-sectional shape, and the resistance of the first conductor P1 and the second conductor P2 can be reduced.

[0130] Figure 51 shows the relative positions of the first conductor P1 and the second conductor P2 when no load is applied to the coil spring CS and the coil spring CS is not compressed. When no load is applied to the coil spring CS, the first contact surface NF1 and the second contact surface NF2 are separated, and the first taper portion TP1 and the second taper portion TP2 are separated and arranged facing each other. The first contact surface NF1 and the second contact surface NF2 are located in the same plane.

[0131] Reference Figure 3 If a load is applied between the tip end T and the base end B, the coil spring CS is compressed. The first conductor P1 and the second conductor P2 are fixed to the coil spring CS by the fixing area P1c and the fixing area P2c. Therefore, if the coil spring CS is compressed, Figure 6 As shown, the first conductor P1 and the second conductor P2 move relatively toward the approaching direction.

[0132] At this time, since the first contact surface NF1 and the second contact surface NF2 are located in the same plane, the first contact surface NF1 and the second contact surface NF2 slide against each other. Thus, when a predetermined load is applied to the coil spring CS, the first contact surface NF1 and the second contact surface NF2 come into contact with each other.

[0133] When no load is applied to the coil spring CS, the first tapered portion TP1 and the second tapered portion TP2 are separated and arranged facing each other. Therefore, when the coil spring CS is compressed from this state, the first tapered portion TP1 and the second tapered portion TP2 guide the relative position of the first contact surface NF1 and the second contact surface NF2 to a slidable position.

[0134] This allows the first contact surface NF1 and the second contact surface NF2 to slide smoothly, and the first contact surface NF1 and the second contact surface NF2 to stably contact each other. As a result, the reliability of electrical conduction from the tip end T to the base end B is improved.

[0135] Reference Figure 3 In the state where no load is applied, the overall length L of the contactor Pr is, for example, about 1.15 mm, and the length Lc of the coil spring CS is, for example, about 0.6 mm. The length L1a of the first protrusion P1a is, for example, about 0.4 mm, and the length L2a of the second protrusion P2a is, for example, about 0.15 mm. The width Wy of the first conductor P1 and the second conductor P2 in the Y direction is, for example, about 0.068 mm, and the width Wz in the Z direction is, for example, about 0.068 mm.

[0136] Reference Figure 4The width Wcy of the coil spring CS in the Y direction is, for example, about 0.1 mm, and the width Wcz in the Z direction is, for example, about 0.1 mm. The line width Wf of the coil spring CS along the X direction is, for example, about 0.08 mm. When no load is applied, the width Ws of the slit SL in the X direction is, for example, about 0.04 mm.

[0137] Reference Figure 7 In the first conductor P1 and the second conductor P2, a first inner conductor P1d and a second inner conductor P2d made of a material having a higher conductivity than the material constituting the outer shell are buried. The outer portion of the first conductor P1 that includes the first inner conductor P1d corresponds to the first outer conductor P1e. ​​The outer portion of the second conductor P2 that includes the second inner conductor P2d corresponds to the second outer conductor P2e.

[0138] The first inner conductor P1d is located closer to the center than the first outer conductor P1e when viewed in the axial direction of the cylindrical body F. The second inner conductor P2d is located closer to the center than the second outer conductor P2e when viewed in the axial direction of the cylindrical body F.

[0139] The resistance value of the first inner conductor P1d and the second inner conductor P2d is lower than the resistance value of the first outer conductor P1e and the second outer conductor P2e. When nickel or the like is used as the first outer conductor P1e and the second outer conductor P2e, copper, for example, can be used as the first inner conductor P1d and the second inner conductor P2d. Thus, the resistance of the contactor Pr can be reduced.

[0140] Next, a method for manufacturing a contactor Pr according to an example of the present invention is described. As a method for manufacturing the contactor Pr, various manufacturing techniques such as micro-electromechanical systems (MEMS) including exposure, electroplating, and grinding, or semiconductor manufacturing processes, electroforming, and stereo molding using a three-dimensional (3D) printer can be used.

[0141] Reference Figure 8 First, nickel or the like is deposited horizontally and in a strip shape along the X direction by electroforming or the like to a thickness t3, and a plurality of fourth slits SL4 are formed by etching, for example. Thus, a bottom wall portion F4 is horizontally formed as the first layer L1.

[0142] Next, nickel or the like is stacked on the first layer L1 at both ends of the bottom wall F4 in the X direction and both ends of the bottom wall F4 in the Y direction until the thickness becomes t1 and t2. Thus, the first side wall F1 and a part of the second side wall F2, as well as the fixing portions Fx1 and Fx2 are formed as the second layer L2.

[0143] Then, nickel or the like is stacked on the second layer L2 to form a part of the first conductor P1 and the second conductor P2, and the first side wall portion F1 and the second side wall portion F2 are grown in the Z direction. Thus, the third layer L3 is formed. The first conductor P1 and the second conductor P2 are connected and formed integrally in a state where the fixing regions P1c and the fixing regions P2c are fixed to the fixing portions Fx1 and the fixing portions Fx2.

[0144] Then, nickel or the like is stacked on the third layer L3, and the first conductor P1 and the second conductor P2 and the first side wall portion F1 and the second side wall portion F2 are grown in the Z direction. Thus, the fourth layer L4-1 is formed. In the fourth layer L4-1, the outer edges of the first conductor P1 and the second conductor P2 are raised, and the cavities C1 and C2 are formed inside the first conductor P1 and the second conductor P2.

[0145] Then, copper or other material having a higher conductivity than nickel or other material is filled into the voids C1 and C2 to form the fourth layer L4-2. Thus, the first internal conductor P1d and the second internal conductor P2d are formed. The first internal conductor P1d and the second internal conductor P2d may be copper used as a sacrificial layer and remain in the voids C1 and C2, for example.

[0146] Then, refer to Fig. 9 , nickel or the like is stacked on the fourth layer L4-2 to form the first conductor P1 and the second conductor P2. In addition, the first side wall portion F1 and the second side wall portion F2 are grown in the Z direction. Thus, the fifth layer L5 is formed.

[0147] Then, nickel or the like is laminated on the fifth layer L5, and a fixing portion Fx1 is formed on the fixing region P1c of the first conductor P1, and a fixing portion Fx2 is formed on the fixing region P2c of the second conductor P2. In addition, the first side wall portion F1 and the second side wall portion F2 are grown in the Z direction. Thus, the sixth layer L6 is formed. In the sixth layer L6, the first conductor P1 and the second conductor P2 are also connected and integrally formed in a state where the fixing regions P1c and the fixing regions P2c are fixed to the fixing portions Fx1 and the fixing portions Fx2.

[0148] Next, nickel or the like is stacked on the sixth layer L6 to form the top wall portion F3. Thus, the seventh layer L7 is formed. Thus, the contactor Pr is completed.

[0149] According to the structure of the contactor Pr, by stacking the first layer L1 to the seventh layer L7, it is easy to manufacture the contactor Pr in which the first part P1b and the second part P2b are inserted into the coil spring CS in advance. Therefore, the contactor Pr does not need to insert the cylindrical guide into the cylinder of the fine coil spring by manual work as in the probe described in Patent Document 1. As a result, the contactor Pr is easier to manufacture than the probe described in Patent Document 1.

[0150] In addition, according to the manufacturing method, the contactor Pr is manufactured by stacking the first layer L1 to the seventh layer L7, and stacking the copper or nickel material in the vertical direction on the bottom wall F4 formed horizontally. In this case, the direction in which the first slit SL1 and the second slit SL2 extend is consistent with the stacking direction. As a result, the outer edges of the first slit SL1 and the second slit SL2 become smooth, and the strength of the coil spring CS is improved.

[0151] Specifically, assuming that the first slit SL1 and the second slit SL2 are inclined, as shown in FIG. Fig.10 As shown in the slit SL', steps are formed in each layer from the first layer L1 to the seventh layer L7. Therefore, a sawtooth pattern is formed like the slit SL'. If the sawtooth pattern is formed as described above, the width of the spring portion becomes uneven, and the minimum width of the spring portion becomes smaller than when the outer edge of the slit is smooth. In addition, the force applied to the spring portion also becomes uneven. As a result, the strength of the coil spring CS decreases.

[0152] That is, the coil spring CS can suppress the decrease in strength of the coil spring CS and easily manufacture the contactor Pr by including a first slit SL1 and a second slit SL2, wherein the first slit SL1 is formed in the first side wall portion F1 and extends perpendicularly to the axial direction, and the second slit SL2 is formed in the second side wall portion F2 and extends perpendicularly to the axial direction.

[0153] In the stacking process of the third to fifth layers L3 to L5, the first and second tapered portions TP1 and TP2 grow in the vertical direction along their plane directions. Therefore, for the same reason as the first and second slits SL1 and SL2, the first and second tapered portions TP1 and TP2 are smoothly formed without serrations.

[0154] As a result, the first tapered portion TP1 and the second tapered portion TP2 can slide smoothly with each other, and the first contact surface NF1 and the second contact surface NF2 can be guided to slide.

[0155] The surface direction of the first cone portion TP1 and the second cone portion TP2 of the contactor Pr extends along the Z direction and along the direction in which the first slit SL1 and the second slit SL2 extend. As a result, the bottom wall portion F4 is horizontally formed as the first layer L1, and the second layer L2 to the seventh layer L7 are stacked on the first layer L1, thereby forming the first slit SL1 and the second slit SL2 with smooth outer edges and the smooth and flat first cone portion TP1 and the second cone portion TP2 at the same time.

[0156] In addition, the cross-sectional shape of the first conductor P1, the second conductor P2 and the coil spring CS perpendicular to the axial direction is approximately rectangular, so compared with the case where the cross-sectional shape is circular, the wall surfaces of the first conductor P1, the second conductor P2 and the coil spring CS can be smoothly formed during the process of stacking the first layer L1 to the seventh layer L7.

[0157] In addition, assuming that when no load is applied to the coil spring CS, the first cone TP1 and the second cone TP2, or the first contact surface NF1 and the second contact surface NF2 are in contact, when the third layer L3 to the fifth layer L5 are stacked, the first conductor P1 and the second conductor P2 are not separated but become one component.

[0158] However, when the contactor Pr does not apply a load to the coil spring CS, the first tapered portion TP1 and the second tapered portion TP2 are separated and arranged facing each other, and the first contact surface NF1 and the second contact surface NF2 are separated. As a result, when the third layer L3 to the fifth layer L5 are stacked, the first conductor P1 and the second conductor P2 can be manufactured as separate components.

[0159] Furthermore, the contactor Pr may not include the fixing portion Fx1 and the fixing portion Fx2, and may not form the second layer L2 and the sixth layer L6. In addition, in the third layer L3 to the fifth layer L5, the coil spring CS may be formed near both ends ( Figure 8 , Fig. 9 The first side wall portion F1 and the second side wall portion F2 (the portion surrounded by the dotted line in FIG. 1 ) are connected to the first conductor P1 and the second conductor P2.

[0160] Reference Figure 2 , before the inspection jig 3 is mounted on the pitch conversion block 35, the second conductor P2 protrudes slightly from the support plate 312. Fig.11 As shown, when the support plate 312 is attached to the pitch conversion block 35 , the upper end of the second conductor P2 , that is, the base end B of the contactor Pr is pressed by the electrode 34 a of the pitch conversion block 35 .

[0161] As a result, the coil spring CS of the contactor Pr is compressed and elastically deformed. The second conductor P2 resists the force applied by the coil spring CS and is squeezed into the support member 31. Moreover, the front end of the second conductor P2, that is, the base end B, is pressed against the electrode 34a in response to the force applied by the coil spring CS. As a result, the base end B of the contactor Pr and the electrode 34a are maintained in a stable conductive contact state.

[0162] In the above state, Fig.11As shown, it is preferred that the first contact surface NF1 of the first conductor P1 contacts the second contact surface NF2 of the second conductor P2. Even when the bump BP is not in contact with the contactor Pr, the first contact surface NF1 and the second contact surface NF2 are kept in contact, and the resistance value of the contactor Pr from the front end T to the base end B is stably maintained at a low resistance.

[0163] However, when the bump BP is not in contact with the contactor Pr, the first contact surface NF1 and the second contact surface NF2 do not necessarily need to be in contact with each other.

[0164] like Fig.12 As shown, when the inspection jig 3 is pressed against the semiconductor wafer 101 , the tip portion T of the contactor Pr is pressed by the bump BP of the semiconductor wafer 101 .

[0165] As a result, the coil spring CS of the contactor Pr is further compressed and elastically deformed. The first conductor P1 resists the force applied by the coil spring CS and is squeezed into the support member 31. Moreover, the front end of the first conductor P1, that is, the front end portion T, is pressed against the bump BP in response to the force applied by the coil spring CS. As a result, the front end portion T of the contactor Pr and the bump BP are maintained in a stable conductive contact state.

[0166] In the above state, Fig.12 As shown, the first contact surface NF1 of the first conductor P1 contacts the second contact surface NF2 of the second conductor P2. Thus, during inspection, the resistance value of the contact Pr from the tip end T to the base end B can be made low.

[0167] Furthermore, the cross-sectional shape of the first conductor P1 and the second conductor P2 perpendicular to the axial direction is not necessarily limited to a rectangle, but may be substantially circular. In addition, the plane direction in which the first contact surface NF1 and the second contact surface NF2 extend may not necessarily coincide with the direction in which the first slit SL1 and the second slit SL2 extend.

[0168] Furthermore, the first tapered portion TP1 and the second tapered portion TP2 do not necessarily need to be formed at the tips of the first conductor P1 and the second conductor P2. Furthermore, the first contact surface NF1 and the second contact surface NF2 only need to be in contact during inspection and do not necessarily need to be located in the same plane.

[0169] In addition, the contactor Pr may not include the second conductor P2. The first notch portion N1 may not be formed in the first conductor P1.

[0170] That is, a contactor of one example of the present invention includes: a coil spring having a slit formed in a cylindrical body; a first conductor having a substantially rod-shaped shape; and a second conductor having a substantially rod-shaped shape, the cylindrical body including a bottom wall portion, a first side wall portion and a second side wall portion respectively connected to the bottom wall portion, and a top wall portion facing the bottom wall portion, the bottom wall portion, the first side wall portion, the second side wall portion, and the top wall portion being configured in such a way that a cross-sectional shape observed in an axial direction of the cylindrical body becomes a rectangle, the slits include a first slit provided in the first side wall portion, a second slit provided in the second side wall portion, a third slit provided in the top wall portion, and a fourth slit provided in the bottom wall portion, the third slit being connected to the first slit and the second slit, the fourth slit being connected to the second slit, the first slit and the second slit being rectangular in a side view of the cylindrical body, the first conductor being connected to one end portion of the cylindrical body, and the second conductor being connected to the other end portion of the cylindrical body.

[0171] According to the structure, the first slit, the third slit, the second slit and the fourth slit of the coil spring are connected to form a spiral slit along the peripheral wall of the cylindrical body. The coil spring having a rectangular cross-sectional shape perpendicular to the axial direction is formed by the spiral slit. A first conductor that is roughly rod-shaped is connected to one end of the coil spring. A contactor of this shape can form a first slit and a second slit in a vertical direction along the stacking direction by making the axial direction of the contactor horizontal and stacking materials on the bottom wall. The shape extending along the stacking direction can be formed smoothly. Moreover, the coil spring and the first conductor can be easily manufactured as a whole by stacking. Therefore, there is no need to insert the contactor into the coil spring by manual work as in the probe described in Patent Document 1, so this contactor is easy to manufacture.

[0172] In addition, the first conductor includes a first portion located inside the cylindrical body and a first protrusion protruding from one end of the cylindrical body, and the second conductor includes a second portion located inside the cylindrical body and a second protrusion protruding from the other end of the cylindrical body, the first portion includes a first contact surface extending along the axial direction of the cylindrical body, and the second portion includes a second contact surface located on the same plane as the first contact surface, when no load is applied to the coil spring, the first contact surface is separated from the second contact surface, and when a load is applied to the coil spring, the first contact surface is in contact with the second contact surface.

[0173] According to the structure, when no load is applied to the coil spring, the first contact surface and the second contact surface are separated, so when the contactor is manufactured by stacking materials, it is easy to manufacture the first conductor and the second conductor as separated components. In addition, when a predetermined load is applied to the coil spring, the first contact surface contacts the second contact surface, so the first conductor and the second conductor are connected by surface contact. As a result, when the contactor is tested by applying a load, the resistance value of the contactor from the first conductor to the second conductor decreases.

[0174] Furthermore, it is preferable that a surface direction of the first contact surface is orthogonal to a surface direction of the bottom wall portion.

[0175] According to the above structure, the plane direction in which the first contact surface and the second contact surface extend and the direction in which the first slit and the second slit extend can be made consistent with the stacking direction. As a result, when the contactor is manufactured by stacking, the shapes of the first slit and the second slit can be easily formed smoothly together with the first contact surface and the second contact surface.

[0176] In addition, it is preferred that a first cone portion is formed in the first part and a second cone portion is formed in the second part, the first cone portion is formed in a manner that the thickness becomes thinner toward the front end of the first part, and the second cone portion is formed in a manner that the thickness becomes thinner toward the front end of the second part.

[0177] According to the above structure, when a load is applied to the contactor and the coil spring is compressed, the first tapered portion and the second tapered portion can be mutually inclined to guide the first contact surface and the second contact surface to slide.

[0178] Furthermore, it is preferable that the cross-sectional shape of the first portion is a rectangle when viewed in the axial direction of the cylindrical body.

[0179] According to the above structure, the conductor area of ​​the cross section of the first part perpendicular to the axial direction is increased compared with the circular shape, which makes it easy to make the contactor low in resistance. In addition, when the contactor is manufactured by lamination, the outer peripheral surface of the first part can be smoothly formed.

[0180] In addition, it is preferred that the first conductor has a first inner conductor and a first outer conductor, the first inner conductor has a portion located on the center side compared to the first outer conductor when viewed in the axial direction of the cylindrical body, and the first inner conductor has a lower resistance value than the first outer conductor.

[0181] According to the above configuration, the first conductor includes the first inner conductor having a lower resistance than the first outer conductor, and thus the resistance value of the first conductor can be easily reduced.

[0182] Furthermore, an inspection jig according to an example of the present invention includes: the contactor; and a support member that supports the contactor.

[0183] According to the above configuration, the inspection jig is configured using the easily manufactured contactor, so that the inspection jig can be easily manufactured.

[0184] In addition, an inspection device according to an example of the present invention includes: the inspection jig; and an inspection processing unit that inspects the inspection object based on an electrical signal obtained by bringing the contactor into contact with an inspection point provided on the inspection object.

[0185] According to the above configuration, the inspection device is configured using a contactor that is easy to manufacture, so that the inspection device can be easily manufactured.

[0186] In a method for manufacturing a contactor according to an example of the present invention, the method for manufacturing a contactor includes forming the first side wall portion and the second side wall portion after forming the bottom wall portion.

[0187] According to the method, the contactor can be easily manufactured.

Claims

1. A contactor, characterized in that: include: A coil spring having a slit formed in a cylindrical body; A first conductor in the form of a rod; as well as The second conductor is a rod, The cylindrical body includes a bottom wall portion, a first side wall portion and a second side wall portion respectively connected to the bottom wall portion, and a top wall portion facing the bottom wall portion. The bottom wall portion, the first side wall portion, the second side wall portion, and the top wall portion are configured so that the cross-sectional shape viewed in the axial direction of the cylindrical body becomes a rectangle. The slits include a first slit disposed on the first side wall portion, a second slit disposed on the second side wall portion, a third slit disposed on the top wall portion, and a fourth slit disposed on the bottom wall portion. The third slit is connected to the first slit and the second slit, The fourth slit is connected to the second slit, In the side view of the cylindrical body, the first slit and the second slit are rectangular. The first conductor is connected to one end of the cylindrical body. The second conductor is connected to the other end of the cylindrical body.

2. The contactor according to claim 1, characterized in that: The first conductor comprises: A first part is located inside the cylindrical body; and A first protrusion protrudes from one end of the cylindrical body, The second conductor comprises: A second part is located inside the cylindrical body; and A second protrusion protrudes from the other end of the cylindrical body, The first portion includes a first contact surface extending along the axial direction of the cylindrical body, The second portion comprises a second contact surface located in the same plane as the first contact surface, When no load is applied to the coil spring, the first contact surface is separated from the second contact surface, and when a load is applied to the coil spring, the first contact surface is in contact with the second contact surface.

3. The contactor according to claim 2, characterized in that: A surface direction of the first contact surface is orthogonal to a surface direction of the bottom wall portion.

4. The contactor according to claim 2, characterized in that: The first portion forms a first cone portion, A second cone is formed in the second portion, The first tapered portion is configured such that the thickness thereof becomes thinner toward the front end of the first portion. The second tapered portion is configured such that a thickness thereof becomes thinner toward a front end of the second portion.

5. The contactor according to claim 2, characterized in that: When viewed in the axial direction of the cylindrical body, the cross-sectional shape of the first portion is a rectangle.

6. The contactor according to any one of claims 1 to 5, characterized in that: The first conductor comprises a first inner conductor and a first outer conductor, The first inner conductor has a portion located on the center side relative to the first outer conductor when viewed in the axial direction of the cylindrical body. The first inner conductor has a lower resistance than the first outer conductor.

7. An inspection jig, characterized in that: include: The contactor according to any one of claims 1 to 6; as well as A supporting member supports the contactor.

8. An inspection device, characterized in that: include: The inspection jig according to claim 7; as well as The inspection processing unit performs inspection of the inspection object based on an electrical signal obtained by bringing the contactor into contact with an inspection point provided on the inspection object.

9. A method for manufacturing a contactor, characterized in that: A method for manufacturing a contactor according to any one of claims 1 to 6, After the bottom wall portion is formed, the first side wall portion and the second side wall portion are formed.

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