A welding method for an integrated large-size titanium target

Abstract

The present invention relates to a welding method for an integrated large-size titanium target material, the welding method comprising the following steps: (1) subjecting a titanium target blank to a first local pressure treatment, a first heat treatment, a second heat treatment and a third heat treatment in sequence to obtain a first target blank; (2) subjecting a back plate to a fourth heat treatment to obtain a first back plate; (3) coating the welding surfaces of the first target blank obtained in step (1) and the second back plate obtained in step (2) with indium solder, and then subjecting the welding surfaces to a wetting treatment to obtain a second target blank and a second back plate; (4) assembling the second target blank obtained in step (3) and the second back plate to obtain a target material assembly, and then subjecting the second local pressure treatment and cooling in sequence to obtain a titanium target material. The welding method provided by the present invention can effectively solve the problem of temperature zone difference and wetting difficulty of large-size titanium targets, and effectively improve the welding bonding rate of target material assemblies.

Description

Technical Field

[0001] The invention relates to the technical field of target material welding, and in particular to a welding method for an integrated large-size titanium target material. Background Art

[0002] Metal sputtering targets are used as cathode materials in sputtering deposition technology. They are hit by positively charged cations in the sputtering machine. The metal on the surface of the metal sputtering target is separated from the cathode in the form of molecules, atoms or ions and redeposited on the anode surface. Metal sputtering targets are often made of relatively expensive metal materials such as high-purity aluminum, copper, titanium, nickel or tantalum. Due to the different strengths of metal sputtering targets, in actual applications, it is necessary to combine metal sputtering targets that meet performance requirements with backing plates with a certain strength to form target components, which are then installed on the sputtering machine to effectively control sputtering under the action of magnetic and electric fields. The backing plate can not only support and cool the metal sputtering target, but also reduce the raw material cost of the production process. Commonly used backing plate materials include high-purity aluminum, high-purity copper, aluminum alloy or copper alloy.

[0003] At present, the metal sputtering target and the back plate need to be processed and welded to ensure the success of subsequent sputtering. If the welding degree between the metal sputtering target and the back plate is poor, the metal sputtering target will deform, crack, or even fall off the back plate under heating conditions, which will not only fail to achieve uniform sputtering, but may also damage the sputtering base.

[0004] Due to its special specifications, the large-size (2300×1800mm) one-piece target is not suitable for ordinary hot isostatic pressing welding, and due to the large area of ​​the welding surface, it is easy to have temperature difference areas and poor wetting areas. In particular, the surface of the large-size one-piece titanium target is extremely difficult to wet, and there is a large area of ​​poor wetting area on the welding contact surface with the copper back plate, which may cause the target and the back plate to desolder in severe cases.

[0005] CN102059421A discloses a titanium target aluminum back plate welding method, comprising: providing a target material and a back plate, wherein the target material is a Ti target material and the back plate is an Al back plate; forming a nickel layer on the welding surface of the Ti target material; and combining the Ti target material with the nickel layer and the Al back plate by a brazing method. This method is not suitable for large-sized integrated titanium targets, which are prone to deformation during the welding process, affecting the welding bonding rate of the target assembly.

[0006] CN104588810A discloses a welding method for an aluminum target assembly, including providing an aluminum target and an aluminum backing plate; forming a brazing material wetting layer on the surface to be welded of the aluminum target or forming a brazing material wetting layer on the surface to be welded of the aluminum backing plate; placing the aluminum backing plate and the aluminum target with the brazing material wetting layer in a vacuum jacket, the surface to be welded of the aluminum backing plate is in contact with the brazing material wetting layer, or placing the aluminum target and the aluminum backing plate with the brazing material wetting layer in a vacuum jacket, the surface to be welded of the aluminum target is in contact with the brazing material wetting layer; and welding the aluminum target, the brazing material wetting layer, and the aluminum backing plate together by hot isostatic pressing to form an aluminum target assembly. The hot isostatic pressing welding method provided by the process is not suitable for large-sized integrated titanium target assemblies, and cannot solve the problem of deformation of large-sized targets due to temperature zone differences.

[0007] Therefore, it is of great significance to provide a welding method for an integrated, large-sized titanium target. Summary of the invention

[0008] In view of the above problems, the purpose of the present invention is to provide a welding method for an integrated large-size titanium target. Compared with the prior art, the welding method provided by the present invention can effectively solve the problems of temperature zone differences and wetting difficulties of large-size titanium targets, and effectively improve the welding bonding rate of the target assembly.

[0009] In order to achieve the purpose of the invention, the present invention adopts the following technical solutions:

[0010] The present invention provides a welding method for an integrated large-size titanium target material, the welding method comprising the following steps:

[0011] (1) subjecting a titanium target blank to a first local pressurization treatment, a first heat treatment, a second heat treatment, and a third heat treatment in sequence to obtain a first target blank;

[0012] (2) performing a fourth heat treatment on the backplane to obtain a first backplane;

[0013] (3) coating the welding surfaces of the first target blank obtained in step (1) and the second back plate obtained in step (2) with indium solder, and then performing a wetting treatment to obtain a second target blank and a second back plate;

[0014] (4) assembling the second target blank obtained in step (3) and the second backing plate to obtain a target assembly, and then sequentially performing a second local pressurization treatment and cooling to obtain a titanium target;

[0015] Step (1) and step (2) are performed in no particular order.

[0016] The welding method provided by the present invention, on the one hand, performs the first heat treatment, the second heat treatment and the third heat treatment on the titanium target blank, and adopts the segmented heating method to prevent the titanium target blank from being deformed due to uneven heating during heating due to its oversized size; on the other hand, the first local pressurization treatment and the second local pressurization treatment are performed to apply pressure to a specific position of the titanium target blank, so as to further prevent the titanium target blank from being deformed. The welding method provided by the present invention can effectively solve the problem of temperature zone difference caused by the large size of the one-piece large-sized titanium target blank itself, and effectively prevent the target material from being deformed, thereby improving the welding bonding rate of the titanium target material.

[0017] In the present invention, the one-piece large-size titanium target is rectangular in shape, and the "large size" refers to 2300×1800 mm.

[0018] Preferably, the first local pressurization treatment in step (1) includes: pressing a 40-50kg block on each of the four sides of the titanium target blank, for example, it can be 40kg, 42kg, 44kg, 46kg, 48kg or 50kg, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0019] Preferably, the temperature of the first heat treatment in step (1) is 90-100°C, for example, 90°C, 92°C, 94°C, 96°C, 98°C or 100°C, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0020] In the present invention, before the first heat treatment, the surface of the titanium target blank is covered with a high temperature insulation cloth, which can further make the titanium target blank heated evenly. In the present invention, during the first heat treatment, the second heat treatment and the third heat treatment, the four sides of the titanium target blank are always placed with pressing blocks.

[0021] Preferably, the time of the first heat treatment is 5-10 min, for example, 5 min, 6 min, 7 min, 8 min, 9 min or 10 min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0022] Preferably, the temperature of the second heat treatment in step (1) is 170-180°C, for example, it can be 170°C, 172°C, 174°C, 176°C, 178°C or 180°C, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0023] The present invention preferably controls the temperature of the second heat treatment within a specific range, which can further improve the welding bonding rate of the titanium target.

[0024] Preferably, the time of the second heat treatment is 10-20 min, for example, 10 min, 12 min, 14 min, 16 min, 18 min or 20 min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0025] Preferably, the third heat treatment in step (1) includes: heating the titanium target blank to 230-240°C and performing heat preservation treatment, for example, it can be 230°C, 232°C, 234°C, 236°C, 238°C or 240°C, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0026] The present invention preferably controls the temperature of the third heat treatment within a specific range, which can further improve the welding bonding rate of the titanium target.

[0027] Preferably, the fourth heat treatment in step (2) includes: heating the backplane to 230-240°C and performing heat preservation treatment, for example, it can be 230°C, 232°C, 234°C, 236°C, 238°C or 240°C, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0028] Preferably, the infiltration treatment in step (3) comprises steel brush infiltration treatment, pistol drill infiltration treatment and ultrasonic infiltration treatment performed in sequence.

[0029] In the present invention, before the infiltration treatment, the high temperature heat insulation cloth is removed, but the pressing block is not removed. If the pressing block part needs infiltration treatment, the pressing block is removed for infiltration treatment, and the pressing block is put back to its original position after infiltration treatment. In the present invention, the target blank can be further fully infiltrated by the combined operation of steel brush infiltration treatment, pistol drill infiltration treatment and ultrasonic infiltration treatment, thereby improving the welding effect.

[0030] Preferably, the steel brush infiltration treatment time is 30-40 min, for example, it can be 30 min, 32 min, 34 min, 36 min, 38 min or 40 min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0031] Preferably, the pistol drill infiltration treatment time is 25-35 minutes, for example, it can be 25 minutes, 26 minutes, 27 minutes, 28 minutes, 29 minutes, 30 minutes, 32 minutes, 34 minutes or 35 minutes, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0032] Preferably, the ultrasonic immersion treatment time is 30-40 min, for example, 30 min, 32 min, 34 min, 36 min, 38 min or 40 min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0033] Preferably, before the assembly in step (4), the welding surfaces of the second target blank and the second back plate are coated with indium solder again, and then the coated second target blank is subjected to a steel brush infiltration treatment.

[0034] In the present invention, high temperature tape is used to surround the four sides of the second back plate to form a solder groove 3-5 mm higher than the welding surface. During coating, indium solder is poured into the solder groove. After standing for a period of time, the indium oxide slag in the solder groove is scraped off with a scraper.

[0035] Preferably, the time for the steel brush infiltration treatment in step (4) is 8-10 min, for example, it can be 8 min, 8.2 min, 8.4 min, 8.6 min, 8.8 min, 9 min, 9.2 min, 9.4 min, 9.6 min, 9.8 min or 10 min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0036] Preferably, the assembly time is ≤15 min, for example, it can be 15 min, 14 min, 12 min, 10 min, 8 min, 6 min or 4 min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0037] In the present invention, the assembly is generally carried out in an integrated flipping machine, and the target material is sucked by the machine plate of the integrated flipping machine to achieve flipping. When fastening with the back plate, it is fastened slowly from one end to the other end, and all the indium oxide on the surface of the solder tank is squeezed out to achieve fastening.

[0038] Preferably, the second local pressurization treatment in step (4) includes: pressing a 40-50kg block, such as 40kg, 42kg, 44kg, 46kg, 48kg or 50kg, on each of the four sides of the target assembly, and pressing a 140-150kg block, such as 140kg, 142kg, 144kg, 146kg, 148kg or 150kg, in the middle of the target assembly, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0039] In the present invention, after placing the pressing blocks on the four sides of the target assembly, the center distance of the target needs to be adjusted (the target blank is kept at an equal distance from the four sides of the backing plate), and then the pressing blocks are placed in the middle of the target assembly.

[0040] As a preferred technical solution of the present invention, the welding method comprises the following steps:

[0041] (1) Pressing a 40-50 kg block on each of the four sides of the titanium target blank, then heating it to 90-100° C. for a first heat treatment for 5-10 min, then heating it to 170-180° C. for a second heat treatment for 10-20 min, then heating it to 230-240° C. for a third heat treatment, and then heat preservation treatment to obtain a first target blank;

[0042] (2) heating the back sheet to 230-240° C. for a fourth heat treatment, and then performing a heat preservation treatment to obtain a first back sheet;

[0043] (3) coating the welding surfaces of the first target blank obtained in step (1) and the first back plate obtained in step (2) with indium solder, and then sequentially performing steel brush infiltration treatment for 30-40 minutes, pistol drill infiltration treatment for 25-35 minutes, and ultrasonic infiltration treatment for 30-40 minutes to obtain a second target blank and a second back plate;

[0044] (4) The welding surfaces of the second target blank and the second back plate obtained in step (3) are coated with indium solder again, and the coated second target blank is subjected to a steel brush infiltration treatment for 8-10 minutes, and then assembled, wherein the assembly time is ≤15 minutes, to obtain a target assembly, and then a 40-50 kg block is pressed on each of the four sides of the target assembly, and a 140-150 kg block is pressed in the middle of the target assembly, and the assembly is cooled to obtain a titanium target.

[0045] Compared with the prior art, the present invention has the following beneficial effects:

[0046] The welding method provided by the present invention can prevent uneven heating and deformation of the titanium target blank caused by excessive size by means of segmented heating and local pressurization, effectively solves the problem of difficulty in infiltration of the titanium target material, and greatly improves the welding bonding rate of the target material assembly. DETAILED DESCRIPTION

[0047] The technical solution of the present invention is further described below by specific implementation methods. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0048] Example 1

[0049] This embodiment provides a welding method for an integrated large-size titanium target, the welding method comprising the following steps:

[0050] (1) Pressing a 45 kg block on each of the four sides of the titanium target blank, then heating it to 95° C. for a first heat treatment for 7 min, then heating it to 175° C. for a second heat treatment for 15 min, then heating it to 235° C. for a third heat treatment, and then performing a heat preservation treatment to obtain a first target blank; during the first heat treatment, the second heat treatment, and the third heat treatment, the blocks are always placed on the four sides of the titanium target blank;

[0051] (2) heating the back sheet to 235° C. for a fourth heat treatment, and then performing a heat preservation treatment to obtain a first back sheet;

[0052] (3) coating the welding surfaces of the first target blank obtained in step (1) and the first back plate obtained in step (2) with indium solder, and then sequentially performing steel brush infiltration treatment for 35 minutes, pistol drill infiltration treatment for 30 minutes, and ultrasonic infiltration treatment for 35 minutes to obtain a second target blank and a second back plate;

[0053] (4) The welding surfaces of the second target blank and the second back plate obtained in step (3) are coated with indium solder again, and the coated second target blank is subjected to a steel brush infiltration treatment for 9 minutes, and then assembled. The assembly time is 8 minutes to obtain a target assembly. Thereafter, a 45 kg block is pressed on each of the four sides of the target assembly, and a 145 kg block is pressed in the middle of the target assembly. The assembly is cooled to obtain a titanium target.

[0054] Example 2

[0055] This embodiment provides a welding method for an integrated large-size titanium target, the welding method comprising the following steps:

[0056] (1) Pressing a 40 kg block on each of the four sides of the titanium target blank, then heating it to 100° C. for a first heat treatment for 5 min, then heating it to 180° C. for a second heat treatment for 10 min, then heating it to 240° C. for a third heat treatment, and then performing a heat preservation treatment to obtain a first target blank; during the first heat treatment, the second heat treatment, and the third heat treatment, the blocks are always placed on the four sides of the titanium target blank;

[0057] (2) heating the back sheet to 240° C. for a fourth heat treatment, and then performing a heat preservation treatment to obtain a first back sheet;

[0058] (3) coating the welding surfaces of the first target blank obtained in step (1) and the first back plate obtained in step (2) with indium solder, and then sequentially performing steel brush infiltration treatment for 30 minutes, pistol drill infiltration treatment for 35 minutes, and ultrasonic infiltration treatment for 30 minutes to obtain a second target blank and a second back plate;

[0059] (4) The welding surfaces of the second target blank and the second back plate obtained in step (3) are coated with indium solder again, and the coated second target blank is subjected to a steel brush infiltration treatment for 8 minutes, and then assembled. The assembly time is 7 minutes to obtain a target assembly. Thereafter, a 50 kg block is pressed on each of the four sides of the target assembly, and a 140 kg block is pressed in the middle of the target assembly. The assembly is cooled to obtain a titanium target.

[0060] Example 3

[0061] This embodiment provides a welding method for an integrated large-size titanium target, the welding method comprising the following steps:

[0062] (1) Pressing a 50 kg block on each of the four sides of the titanium target blank, then heating it to 90° C. for a first heat treatment for 10 min, then heating it to 170° C. for a second heat treatment for 20 min, then heating it to 230° C. for a third heat treatment, and then performing a heat preservation treatment to obtain a first target blank; during the first heat treatment, the second heat treatment, and the third heat treatment, the four sides of the titanium target blank are always provided with blocks;

[0063] (2) heating the back sheet to 230° C. for a fourth heat treatment, and then performing a heat preservation treatment to obtain a first back sheet;

[0064] (3) coating the welding surfaces of the first target blank obtained in step (1) and the first back plate obtained in step (2) with indium solder, and then sequentially performing steel brush infiltration treatment for 40 minutes, pistol drill infiltration treatment for 25 minutes, and ultrasonic infiltration treatment for 40 minutes to obtain a second target blank and a second back plate;

[0065] (4) The welding surfaces of the second target blank and the second back plate obtained in step (3) are coated with indium solder again, and the coated second target blank is subjected to a steel brush infiltration treatment for 10 minutes, and then assembled. The assembly time is 9 minutes to obtain a target assembly. Thereafter, a 40 kg block is pressed on each of the four sides of the target assembly, and a 150 kg block is pressed in the middle of the target assembly. The assembly is cooled to obtain a titanium target.

[0066] Example 4

[0067] This embodiment provides a welding method for an integrated large-size titanium target material. The only difference compared with Embodiment 1 is that the temperature of the second heat treatment is 150°C.

[0068] Example 5

[0069] This embodiment provides a welding method for an integrated large-size titanium target material, which is different from Embodiment 1 only in that the temperature of the second heat treatment is 200°C.

[0070] Example 6

[0071] This embodiment provides a welding method for an integrated large-size titanium target material. The only difference compared with Embodiment 1 is that the temperature of the third heat treatment is 180°C.

[0072] Example 7

[0073] This embodiment provides a welding method for an integrated large-size titanium target. The only difference compared with Embodiment 1 is that the temperature of the third heat treatment is 270°C.

[0074] Comparative Example 1

[0075] This embodiment provides a welding method for an integrated large-size titanium target material. The only difference compared with Embodiment 1 is that the first local pressurization treatment is not performed in step (1), that is, no pressing blocks are placed on the four sides of the titanium target blank.

[0076] Comparative Example 2

[0077] This comparative example provides a welding method for an integrated large-size titanium target material. The only difference compared with Example 1 is that the first heat treatment and the second heat treatment are not performed, that is, step (1) is replaced by: pressing a 45 kg block on each of the four sides of the titanium target blank, then heating it to 235°C for heat treatment, and performing insulation treatment to obtain a first target blank.

[0078] The welding bonding rates of the titanium targets in Examples 1-7 and Comparative Examples 1-2 were measured using an ultrasonic C-scan imager. The results are shown in Table 1.

[0079] Table 1

[0080] Welding bonding rate / % Example 1 99 Example 2 99 Example 3 99 Example 4 78 Example 5 80 Example 6 79 Example 7 80 Comparative Example 1 75 Comparative Example 2 70

[0081] From Table 1, we can see the following points:

[0082] (1) From the data of Examples 1-7, it can be seen that the welding method provided by the present invention can effectively improve the welding bonding rate of the titanium target material, and the welding bonding rate can reach more than 78%. Under optimal conditions, it can reach 99%.

[0083] (2) Comprehensive comparison of the data of Example 1 and Examples 4-7 shows that the temperature of the second heat treatment in Example 1 is 175°C, while in Examples 4-5 it is 150°C and 200°C, respectively. The temperature of the third heat treatment in Example 1 is 235°C, while in Examples 6-7 it is 180°C and 270°C, respectively. The welding bonding rates in Example 1 are significantly higher than those in Examples 4-7. This indicates that the present invention preferably controls the temperatures of the second heat treatment and the third heat treatment, which can further improve the welding bonding rate.

[0084] (3) A comprehensive comparison of the data of Example 1 and Comparative Example 1 shows that the only difference between Comparative Example 1 and Example 1 is that the first local pressurization treatment is not performed, and the welding bonding rate in Example 1 is significantly higher than that in Comparative Example 1. This indicates that the present invention controls the first local pressurization treatment to further improve the welding bonding rate.

[0085] (4) A comprehensive comparison of the data of Example 1 and Comparative Example 2 shows that the only difference between Comparative Example 2 and Example 1 is that the first heat treatment and the second heat treatment are not performed, and the welding bonding rate in Example 1 is significantly higher than that in Comparative Example 2. This shows that the present invention can effectively improve the welding bonding rate of the titanium target by sequentially performing the first heat treatment, the second heat treatment and the third heat treatment.

[0086] In summary, the welding method provided by the present invention can prevent uneven heating and deformation of the titanium target blank caused by its oversized size, effectively solve the problem of difficult wetting of the titanium target material, and greatly improve the welding bonding rate of the target assembly.

[0087] The applicant declares that the above is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention shall fall within the protection scope and disclosure scope of the present invention.

Claims

1. A method for welding an integrated large-size titanium target, characterized in that: The welding method comprises the following steps: (1) subjecting a titanium target blank to a first local pressure treatment, a first heat treatment, a second heat treatment, and a third heat treatment in sequence to obtain a first target blank; The first local pressure treatment includes: pressing a 40-50kg block on each of the four sides of the titanium target blank; the temperature of the first heat treatment is 90-100°C; the temperature of the second heat treatment is 170-180°C; the third heat treatment includes: heating the titanium target blank to 230-240°C and performing a heat preservation treatment; (2) performing a fourth heat treatment on the back plate to obtain a first back plate; (3) coating the welding surfaces of the first target blank obtained in step (1) and the first back plate obtained in step (2) with indium solder, and then performing a wetting treatment to obtain a second target blank and a second back plate; (4) Assembling the second target blank and the second backing plate obtained in step (3) to obtain a target assembly, and then sequentially performing a second local pressurization treatment and cooling to obtain a titanium target; The second local pressurization treatment includes: pressing a 40-50 kg block on each of the four sides of the target assembly, and pressing a 140-150 kg block in the middle of the target assembly; Steps (1) and (2) are performed in no particular order.

2. The welding method according to claim 1, characterized in that: The first heat treatment lasts for 5-10 minutes.

3. The welding method according to claim 1, characterized in that: The second heat treatment time is 10-20 minutes.

4. The welding method according to claim 1, characterized in that: The fourth heat treatment in step (2) includes: heating the backplane to 230-240° C. and performing heat preservation treatment.

5. The welding method according to claim 1, characterized in that: The infiltration treatment in step (3) includes steel brush infiltration treatment, pistol drill infiltration treatment and ultrasonic infiltration treatment performed in sequence.

6. The welding method according to claim 5, characterized in that: The steel brush infiltration treatment lasts for 30-40 minutes.

7. The welding method according to claim 5, characterized in that: The pistol drill infiltration treatment time is 25-35 minutes.

8. The welding method according to claim 5, characterized in that: The ultrasonic infiltration treatment lasts for 30-40 minutes.

9. The welding method according to claim 1, characterized in that: Before the assembly in step (4), the welding surfaces of the second target blank and the second back plate are coated with indium solder again, and then the coated second target blank is subjected to a steel brush infiltration treatment.

10. The welding method according to claim 9, characterized in that: The time of the steel brush infiltration treatment in step (4) is 8-10 minutes.

11. The welding method according to claim 1, characterized in that: The assembly time is ≤15min.

12. The welding method according to claim 1, characterized in that: The welding method comprises the following steps: (1) Pressing a 40-50 kg block on each of the four sides of the titanium target blank, then heating it to 90-100°C for a first heat treatment for 5-10 minutes, then heating it to 170-180°C for a second heat treatment for 10-20 minutes, then heating it to 230-240°C for a third heat treatment, and then heat preservation treatment to obtain a first target blank; (2) heating the back sheet to 230-240° C. for a fourth heat treatment, and then performing a heat preservation treatment to obtain a first back sheet; (3) coating the welding surfaces of the first target blank obtained in step (1) and the first back plate obtained in step (2) with indium solder, and then sequentially subjecting them to steel brush infiltration treatment for 30-40 minutes, pistol drill infiltration treatment for 25-35 minutes, and ultrasonic infiltration treatment for 30-40 minutes, to obtain a second target blank and a second back plate; (4) The welding surfaces of the second target blank and the second back plate obtained in step (3) are coated with indium solder again, and the coated second target blank is subjected to a steel brush infiltration treatment for 8-10 minutes, and then assembled, wherein the assembly time is ≤15 minutes, to obtain a target assembly, and then a 40-50 kg block is pressed on each of the four sides of the target assembly, and a 140-150 kg block is pressed in the middle of the target assembly, and the mixture is cooled to obtain a titanium target.