Temperature detection device based on micro-nano waveguide

Abstract

The present invention provides a temperature detection device based on micro-nano waveguide, comprising a heat absorption layer for absorbing external heat and conducting heat transfer, a heat transfer deformation layer arranged on the upper side of the heat absorption layer and capable of absorbing the heat transferred by the heat absorption layer and undergoing internal thermal expansion, a micro-nano structure waveguide arranged on the upper side of the heat transfer deformation layer and arranged parallel to the bottom surface of the heat absorption layer, and a heat conductive protective layer covering the micro-nano structure waveguide and combined with the heat transfer deformation layer; the micro-nano structure waveguide comprises a grating waveguide distributed in a linear array and capable of generating a waveguide periodic change when the heat transfer deformation layer undergoes internal thermal expansion after absorbing heat, and a straight waveguide arranged perpendicular to the grating waveguide. The present invention has the advantages of simple structure, small size, convenient use, and high detection sensitivity, and has good application prospects in the field of temperature detection.

Description

Technical Field

[0001] The present invention relates to the technical field of temperature detection, and in particular to a temperature detection device based on micro-nano waveguide. Background Art

[0002] A temperature detector is a detector that uses thermal sensing to detect ambient temperature and issue an alarm. It is used to detect the temperature of the object being measured and the environment, and issues an alarm when it exceeds or falls below the standard value.

[0003] The burning of materials during a fire generates a large amount of heat, causing the surrounding temperature to change. A temperature detector is a fire detector that responds to changes in the temperature around a certain point or line in the warning range. It converts temperature changes into electrical signals to achieve the purpose of alarm. Depending on the different temperature parameters monitored, the temperature detectors generally used in industrial and civil buildings include fixed temperature type, differential temperature type, and differential fixed temperature type.

[0004] (1) Constant temperature detector. A constant temperature detector is a fire detector that triggers an alarm when the temperature caused by a fire rises above a certain value within a specified time. It has two structures: linear and point. The linear type is that when the local ambient temperature rises to a specified value, the fusible insulator melts and short-circuits the two wires, thereby generating a fire alarm signal. The point type constant temperature detector uses components such as bimetallic strips, fusible metals, thermocouples, thermistors, and resistors to generate a fire alarm signal at a specified temperature value.

[0005] (2) Differential temperature detector. A differential temperature detector is a fire detector that triggers an alarm when the temperature rise rate caused by a fire exceeds a certain specified value within a specified time. It also has two structures: linear and point types. The linear differential temperature detector operates based on a wide range of thermal effects, while the point differential temperature detector operates based on a local thermal effect. The main temperature sensing devices are air membrane boxes, thermistor semiconductor resistor elements, etc.

[0006] (3) Differential temperature detector. Differential temperature detector combines the two working principles of fixed temperature and differential temperature and combines the two detector structures together. Differential temperature detectors are generally point-type combined detectors such as membrane box type or thermistor semiconductor resistance type.

[0007] The working principle of existing temperature detectors is mostly to use thermistors to sense temperature changes, and it is also necessary to design circuits to connect thermistors or thermal elements, so the structure is relatively complex and the volume is large. Summary of the invention

[0008] In order to solve the above problems, the present invention proposes a temperature detection device based on micro-nano waveguide, comprising a heat absorption layer for absorbing external heat and conducting heat transfer, a heat transfer deformation layer arranged on the upper side of the heat absorption layer and capable of absorbing the heat transferred by the heat absorption layer and then undergoing internal thermal expansion, a micro-nano structure waveguide arranged on the upper side of the heat transfer deformation layer and parallel to the bottom surface of the heat absorption layer, and a heat conductive protective layer covering the micro-nano structure waveguide and combined with the heat transfer deformation layer;

[0009] The micro-nanostructure waveguide includes a grating waveguide distributed in a linear array and capable of producing a waveguide periodic change when the heat transfer deformation layer absorbs heat and undergoes internal thermal expansion, and a straight waveguide arranged perpendicular to the grating waveguide; one end of the grating waveguide is an optical signal input end, and the other end is a reflection end, the straight waveguide is vertically arranged near a grating region close to the optical signal input end of the grating waveguide, and the end of the straight waveguide away from the grating waveguide is a signal output end.

[0010] In an optional embodiment, the heat transfer deformation layer includes a plurality of heat expansion blocks evenly spaced apart on the upper side of the heat absorption layer and a flexible layer covering the heat expansion blocks and combined with the heat absorption layer, the grating waveguide and the straight waveguide are both arranged on the upper side of the flexible layer, and an end of the straight waveguide close to the grating waveguide retains a gap with the grating waveguide.

[0011] In an optional implementation, the thermal expansion block is located directly below the grid gap of the grating waveguide, and a thermal expansion block located directly below each grid gap of the grating waveguide is correspondingly provided.

[0012] In an optional embodiment, the heat expansion block is a square strip block.

[0013] In an optional embodiment, the thermal expansion block is a block structure with a large contact surface close to the heat absorption layer and a small contact surface close to the grating waveguide.

[0014] In an optional embodiment, the material of the thermal expansion block is selected from any one of the high expansion alloys Cu60Zn40, FeNi22Cr3, FeNi20Mn6, FeNi13Mn7 and Mn72Cr18Ni10 alloys.

[0015] In an optional embodiment, the material of the heat absorption layer is black chrome plating.

[0016] In an optional implementation, the gap distance between the straight waveguide and the grating waveguide is less than 200 nanometers, and the width of the reflection end of the grating waveguide is greater than the width of the grating waveguide.

[0017] In an optional embodiment, the grating waveguide and the straight waveguide are both made of silicon material.

[0018] In an optional implementation, the material of the flexible layer is polyimide, and the material of the thermal conductive protection layer is polydimethylsiloxane (PDMS) material.

[0019] Beneficial effects of the present invention: The present invention provides a temperature detection device based on micro-nano waveguide, comprising a heat absorption layer for absorbing external heat and conducting heat transfer, a heat transfer deformation layer arranged on the upper side of the heat absorption layer and capable of absorbing the heat transferred by the heat absorption layer and then undergoing internal thermal expansion, a micro-nano structure waveguide arranged on the upper side of the heat transfer deformation layer and arranged parallel to the bottom surface of the heat absorption layer, and a heat conductive protective layer covering the micro-nano structure waveguide and combined with the heat transfer deformation layer. When the present invention is in use, the heat absorption layer absorbs heat in the environment and transmits the heat to the heat transfer deformation layer. After the heat transfer deformation layer absorbs the heat, the internal thermal expansion occurs and the volume increases, so that the squeezed heat transfer deformation layer is pushed upward, and the micro-nano structure waveguide on the upper side of the heat transfer deformation layer can more sensitively capture the tiny deformation caused by the thermal expansion of the heat transfer deformation layer, so that the period size of the grating waveguide changes, the central wavelength of the grating area is changed, and the transmittance of the optical signal in the same band is significantly changed, so that the temperature of the environment to be measured is detected by observing the change in the transmittance of the output signal of the port of the straight waveguide, which provides a new means for detecting temperature. The present invention has the advantages of simple structure, small size, convenient use and high detection sensitivity, and has good application prospects in the field of temperature detection.

[0020] The present invention will be further described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 A schematic diagram of a temperature detection device based on micro-nano waveguide provided in one embodiment of the present invention;

[0023] Figure 2 is a front view schematic diagram of a temperature detection device based on micro-nano waveguide provided by an embodiment of the present invention;

[0024] Figure 3 is a schematic diagram of a temperature detection device based on micro-nano waveguide provided by another embodiment of the present invention;

[0025] Figure 4 is a schematic diagram of a temperature detection device based on micro-nano waveguide provided by another embodiment of the present invention;

[0026] Figure 5 is a front view schematic diagram of a temperature detection device based on micro-nano waveguide provided by another embodiment of the present invention;

[0027] Figure 6 It is a front view schematic diagram of a temperature detection device based on micro-nano waveguide provided in yet another embodiment of the present invention.

[0028] In the figure: 1, heat absorption layer; 2, heat transfer deformation layer; 201, thermal expansion block; 202, flexible layer; 3, micro-nano structure waveguide; 301, grating waveguide; 302, straight waveguide; 303, optical signal input end; 304, reflection end; 4, protective layer. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention is clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work also fall within the scope of protection of the present invention.

[0030] Example 1

[0031] The embodiment of the present invention provides a temperature detection device based on micro-nano waveguide, such as Figure 1 and Figure 2 As shown, Figure 1 A schematic diagram of a temperature detection device based on micro-nano waveguide provided in one embodiment of the present invention; Figure 2 : is a front view schematic diagram of a temperature detection device based on a micro-nano waveguide provided by an embodiment of the present invention, the temperature detection device based on a micro-nano waveguide comprises a heat absorption layer 1 for absorbing external heat and conducting heat transfer, a heat transfer deformation layer 2 arranged on the upper side of the heat absorption layer 1 and capable of absorbing the heat transferred by the heat absorption layer 1 and undergoing internal thermal expansion, a micro-nano structure waveguide 3 arranged on the upper side of the heat transfer deformation layer 2 and parallel to the bottom surface of the heat absorption layer 1, and a heat conductive protection layer 4 covering the micro-nano structure waveguide 3 and combined with the heat transfer deformation layer 2.

[0032] Among them, the micro-nanostructure waveguide 3 includes a grating waveguide 301 distributed in a linear array and capable of producing a waveguide periodic change when the heat transfer deformation layer 2 absorbs heat and undergoes internal thermal expansion, and a straight waveguide 302 arranged perpendicular to the grating waveguide 301; one end of the grating waveguide 301 is an optical signal input end 303, and the other end is a reflection end 304, and between the optical signal input end 303 and the reflection end 304 is a grating region of the grating waveguide 301, and the straight waveguide 302 is vertically arranged near the grating region of the optical signal input end 303 of the grating waveguide 301, and the end of the straight waveguide 302 away from the grating waveguide 301 is a signal output end, and during use, the optical signal enters from the optical signal input end 303, and the transmittance of the light is detected at the signal output end. In a specific embodiment of the present invention, the grating waveguide 301 has a width of 220 nanometers, a height of 100 nanometers, a grid spacing of 200 nanometers, and a width of each grid of 200 nanometers; the straight waveguide 302 has a width of 220 nanometers, a length of 2.5 micrometers, and a height of 100 nanometers.

[0033] The temperature detection device based on micro-nano waveguide provided by the embodiment of the present invention, when in use, absorbs heat in the environment through the heat absorption layer 1 and transfers the heat to the heat transfer deformation layer 2. After the heat transfer deformation layer 2 absorbs the heat, the internal heat expansion occurs and the volume increases, so that the squeezed heat transfer deformation layer 2 pushes up, and the micro-nano structure waveguide 3 on the upper side of the heat transfer deformation layer 2 can more sensitively capture the small deformation caused by the heat expansion of the heat transfer deformation layer 2, so that the period size of the grating waveguide 301 changes, the central wavelength of the grating area is changed, and the transmittance of the optical signal in the same band changes significantly, so that the temperature of the environment to be measured is detected by observing the change in the transmittance of the port output signal of the straight waveguide, which provides a new means for detecting temperature. The present invention has the advantages of simple structure, small size, easy use, and high detection sensitivity, and has good application prospects in the field of temperature detection.

[0034] In some embodiments of the present invention, the heat transfer deformation layer 2 includes a plurality of heat expansion blocks 201 evenly spaced on the upper side of the heat absorption layer 1 and a flexible layer 202 covering the heat expansion blocks 201 and combined with the heat absorption layer 1. The grating waveguide 301 and the straight waveguide 302 are both arranged on the upper side of the flexible layer 202. An end of the straight waveguide 302 close to the grating waveguide 301 has a gap with the grating waveguide 301. By setting a reasonable gap, the end of the straight waveguide 302 close to the grating waveguide 301 does not contact the grating waveguide 301, so that the optical signal can be well coupled to the straight waveguide, and the periodic change of the grating area of ​​the grating waveguide can be not affected during detection, so that the detection effect of the device is better.

[0035] When the temperature detection device based on micro-nano waveguide provided by the embodiment of the present invention is used to detect the ambient temperature, the optical signal enters through the optical signal input end 303 of the grating waveguide 301. When the optical signal is transmitted in the grating region of the grating waveguide 301, a part of the light will be coupled into the straight waveguide 302 perpendicular to the grating waveguide 301 and transmitted in the straight waveguide 302. Another part of the optical signal will be transmitted along the grating region of the grating waveguide 301 to the reflection end 304 of the grating waveguide 301. The reflection end 304 will reflect this part of the light back to the grating region of the grating waveguide 301. These lights will propagate in the opposite direction along the grating region and be coupled into the straight waveguide 302. The two parts of the optical signal reaching the straight waveguide 302 will be transmitted along the straight waveguide 302 to the output end in the transverse magnetic mode TM. The transmittance of the waveguide is obtained by detecting the size of the optical signal at the output end. When the temperature changes, the heat absorption layer 1 absorbs the heat in the environment and transfers the heat to the heat expansion block 201. The volume of the heat expansion block 201 increases after absorbing the heat, and the flexible layer 202 covering the heat expansion block 201 is also squeezed and pushed up. The flexible layer 202 pushes up the grid of the grating waveguide 301, causing the grating period of the grating waveguide grating area to change, changing the central wavelength of the grating area, and causing the transmittance of the optical signal in the same band to change significantly. The corresponding relationship between the change in the transmittance of the optical signal and the temperature can reflect the temperature of the measured environment under different transmittance conditions. The corresponding relationship between the change in the transmittance of the optical signal and the temperature can be obtained based on experimental measurements, and the present invention will not be specifically described here. When applied, the signal input end 41 and the output end of the straight waveguide 302 are connected to the light source or light detector through other waveguides, for example, the light source or light detector is connected through a near-field optical probe.

[0036] In some embodiments of the present invention, Figure 2 As shown, the thermal expansion block 201 is located directly below the grid gap of the grating waveguide 301. This arrangement allows the thermal expansion block 201 to more easily squeeze the grid of the grating waveguide 301 to both sides when it expands due to heat, so that the periodic change of the grating area of ​​the grating waveguide 301 is more obvious and the detection sensitivity is higher. Figure 5 and Figure 6 As shown, a thermal expansion block 201 located directly below the grid gap is correspondingly arranged for every other grid gap of the grating waveguide 301, which means that a grid gap is reserved between adjacent thermal expansion blocks 201, and no thermal expansion block 201 is arranged at the grid gap position reserved between adjacent thermal expansion blocks 201. The present invention reserves gaps between the thermal expansion blocks 201 to make the grid more susceptible to extrusion, so that the grid will not be hindered by other thermal expansion blocks 201 when moving, so that the grid area period of the grating waveguide 301 is easier to change, the transmittance change is more obvious, and the detection sensitivity is higher.

[0037] In some embodiments of the present invention, Figure 1 and Figure 2As shown, the heat expansion block 201 is a square strip block with a width of 200 nanometers and a height of 300 nanometers.

[0038] In some embodiments of the present invention, Figure 4 As shown, the thermal expansion block 201 is a block structure with a large contact surface close to the heat absorption layer 1 and a small contact surface close to the grating waveguide 301. For example, the thermal expansion block 201 is a hemispherical structure. Such a design is conducive to the thermal expansion block 201 absorbing heat from the heat absorption layer 1. When expansion occurs, the pressure on the flexible layer 202 close to the grating waveguide 301 is greater, so that the flexible layer 202 is more easily lifted by the thermal expansion block 201, and the period of the grating area of ​​the grating waveguide 301 is more easily changed, so that the temperature detection performance is stronger.

[0039] In some embodiments of the present invention, the material of the thermal expansion block 201 is selected from any one of the high expansion alloys Cu60Zn40, FeNi22Cr3, FeNi20Mn6, FeNi13Mn7 and Mn72Cr18Ni10 alloys, which has a high expansion coefficient, expands significantly due to temperature changes, and is more likely to change the period of the grating waveguide region, thereby making the device more capable of detecting temperature.

[0040] In some embodiments of the present invention, the material of the heat absorption layer 1 is a black chrome plating layer, and the heat absorption layer 1 is arranged at the bottom of the device structure as a substrate. The black chrome plating layer used in the heat absorption layer 1 is an amorphous oxide crystal, which has good corrosion resistance, durability and heat absorption performance, and can effectively absorb heat in the environment, making the device more capable of detecting.

[0041] In some embodiments of the present invention, the gap distance between the straight waveguide 302 and the grating waveguide 301 is less than 200 nanometers, so as to enhance the coupling between the grating waveguide and the straight waveguide, reduce light loss, and improve the light transmission coefficient, thereby facilitating the improvement of the detection effect of the device. In a specific embodiment of the present invention, there is a gap of 40 nanometers between the grating waveguide 301 and the straight waveguide 302. Furthermore, the width of the reflection end 304 of the grating waveguide 301 is greater than the width of the grating waveguide 301. In the present invention, the reflection end 304 of the grating waveguide 301 is designed with a width greater than the width of the grating waveguide 301, which can improve the reflection ability of the reflection end to the optical signal in the grating waveguide, so that the straight waveguide receives more reflected signals, improves the light transmission coefficient, and thereby improves the detection effect of the device.

[0042] In some embodiments of the present invention, the grating waveguide 301 and the straight waveguide 302 are both made of silicon material, which can reduce the coupling loss between the grating waveguide 301 and the straight waveguide 302, ensure the coupling strength of the optical signal entering the straight waveguide, improve the light transmission coefficient, and thus improve the detection effect of the device.

[0043] In some embodiments of the present invention, the material of the flexible layer 202 is polyimide (PI), and the thickness of the flexible layer 202 is 500 nanometers. The flexible layer 202 completely covers the thermal expansion block 201. The flexible layer 202 has a very stable molecular structure and has the characteristics of high modulus, high strength, high and low temperature resistance, light weight, and flame retardancy. It is used as a flexible layer that can effectively deform and affect the spacing of the grating waveguide grid, thereby improving the detection effect.

[0044] The material of the thermal conductive protective layer 4 is polydimethylsiloxane PDMS material, which has high transparency, heat resistance, cold resistance, small viscosity change with temperature, good water resistance, and good thermal conductivity. It can not only play a protective role, but also has a small loss of light signals, and has a good thermal conductivity effect, so that the internal structure thermal expansion block 201 can obtain more heat and the detection effect is stronger. In a specific embodiment of the present invention, the thickness of the thermal conductive protective layer 4 is 5 microns, and the thermal conductive protective layer 4 is closely attached to the flexible layer 202 to prevent deformation and shedding.

[0045] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some or all of the technical features therein may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A temperature detection device based on micro-nano waveguide, characterized in that: It comprises a heat absorbing layer (1) for absorbing external heat and conducting heat transfer, a heat transfer deformation layer (2) arranged on the upper side of the heat absorbing layer (1) and capable of absorbing the heat transferred by the heat absorbing layer (1) and then undergoing internal thermal expansion, a micro-nanostructure waveguide (3) arranged on the upper side of the heat transfer deformation layer (2) and arranged parallel to the bottom surface of the heat absorbing layer (1), and a heat conductive protective layer (4) covering the micro-nanostructure waveguide (3) and combined with the heat transfer deformation layer (2); The micro-nanostructure waveguide (3) comprises a grating waveguide (301) distributed in a linear array and capable of generating a waveguide periodic change when the heat transfer deformation layer (2) absorbs heat and undergoes internal thermal expansion, and a straight waveguide (302) arranged perpendicularly to the grating waveguide (301); one end of the grating waveguide (301) is a light signal input end (303), and the other end is a reflection end (304); the straight waveguide (302) is vertically arranged near a grating region of the light signal input end (303) of the grating waveguide (301); and the end of the straight waveguide (302) away from the grating waveguide (301) is a signal output end; The heat transfer deformation layer (2) comprises a plurality of heat expansion blocks (201) evenly spaced and arranged on the upper side of the heat absorption layer (1), and a flexible layer (202) covering the heat expansion blocks (201) and combined with the heat absorption layer (1); the grating waveguide (301) and the straight waveguide (302) are both arranged on the upper side of the flexible layer (202); an end of the straight waveguide (302) close to the grating waveguide (301) retains a gap with the grating waveguide (301); The thermal expansion block (201) is located directly below the grid gap of the grating waveguide (301), and a thermal expansion block (201) located directly below the grid gap is provided corresponding to every other grid gap of the grating waveguide (301).

2. The temperature detection device based on micro-nano waveguide according to claim 1 is characterized in that: The thermal expansion block (201) is a square strip block.

3. The temperature detection device based on micro-nano waveguide according to claim 1, characterized in that: The thermal expansion block (201) is a block structure having a large contact surface close to the heat absorption layer (1) and a small contact surface close to the grating waveguide (301).

4. The temperature detection device based on micro-nano waveguide according to any one of claims 1 to 3, characterized in that: The material of the thermal expansion block (201) is selected from any one of the high expansion alloys Cu60Zn40, FeNi22Cr3, FeNi20Mn6, FeNi13Mn7 and Mn72Cr18Ni10.

5. The temperature detection device based on micro-nano waveguide according to claim 4, characterized in that: The material of the heat absorption layer (1) is a black chrome plating layer.

6. The temperature detection device based on micro-nano waveguide according to claim 4, characterized in that: The gap distance between the straight waveguide (302) and the grating waveguide (301) is less than 200 nanometers, and the width of the reflection end (304) of the grating waveguide (301) is greater than the width of the grating waveguide (301).

7. The temperature detection device based on micro-nano waveguide according to claim 4, characterized in that: The grating waveguide (301) and the straight waveguide (302) are both made of silicon material.

8. The temperature detection device based on micro-nano waveguide according to claim 7, characterized in that: The material of the flexible layer (202) is polyimide, and the material of the thermal conductive protective layer (4) is polydimethylsiloxane (PDMS) material.

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