A modular vacuum gauge

Abstract

The present invention discloses a modular vacuum gauge, including a display control unit and a core-changing vacuum gauge, wherein the display control unit includes a relay control module, a low vacuum gauge signal and processing module, a high vacuum signal and processing module, a power module, and a display module, wherein the front-end module plug of each module is inserted into the module slot inside the display unit mother seat and is powered and identified through the socket, and a single-chip microcomputer is arranged inside the display unit mother seat. The display control unit includes a special signal and processing part module, wherein the special signal and processing part module has a formula input keyboard and a display screen, wherein the special signal and processing part module uses a built-in single-chip microcomputer to collect voltage signals, converts the output voltage signals into vacuum measurement signals according to the input calculation formula, and automatically adjusts the gas type parameters (such as air, ammonia, nitrogen, and helium) inside the vacuum gauge to convert and display the vacuum degree when different gases are displayed, and then displays the same on the display screen of the display unit through switching.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum measurement, and in particular relates to a modular vacuum gauge. Background Art

[0002] In vacuum measurement, the current vacuum gauge and vacuum gauge design have the following problems and shortcomings: the existing vacuum gauge display unit is generally composed of several parts: low vacuum gauge signal and processing part, high vacuum signal and processing part, relay control part, analog signal output, power supply part, display part, all of which are circuit boards combined through the bottom board circuit board slot to form a whole and placed in a metal box of different sizes. When a part has a problem and the user cannot repair it by himself, he can only return it to the factory for repair. Since each manufacturer has its own specifications, different specifications cannot be universal. At the same time, each equipment control cabinet has pre-cut installation slots of corresponding sizes. When it cannot be repaired, only the original model of vacuum gauge display unit can be purchased. The existing vacuum gauge uses eight metal pins when using Pirani (resistance type) vacuum gauges, thermocouple vacuum gauges, and hot cathode vacuum gauges. Pirani (resistance type) vacuum gauges use four pins 1, 2, 3, and 4 to output measurement signals. The existing various vacuum equipment has different gauge interfaces on the equipment due to different manufacturers. When problems occur with the regulators, regulators from the same manufacturer cannot be used directly due to different interfaces. Only regulators with the same interface in stock can be used. If they are not available, they have to be purchased outside, which delays production.

[0003] When a low vacuum gauge (Pirani (resistance type) vacuum gauge or thermal conductivity vacuum gauge) is used, the existing vacuum display unit has two correction potentiometers (zero point potentiometer and full scale potentiometer) corresponding to one gauge built into the display panel, which are connected to the low vacuum gauge signal and processing part through wires. The resistance value of each vacuum gauge is different, so the replacement of a new vacuum gauge cannot be used directly. Generally, a low vacuum gauge (Pirani (resistance type) vacuum gauge or thermal conductivity vacuum gauge) has two potentiometers. The built-in zero point potentiometer and full scale potentiometer are connected to the low vacuum gauge signal and processing part through the corresponding four pins (one potentiometer of the thermal conductivity vacuum gauge is connected to the low vacuum gauge signal and processing part through the corresponding two pins). When the gauge is adjusted under vacuum, the zero point potentiometer is corrected, and the gauge is adjusted under standard atmospheric pressure. The full scale potentiometer is corrected. When the gauge is replaced, the potentiometer needs to be recalibrated due to the different resistance values ​​of the gauge. The shell of the vacuum gauge used at the same time is made of metal or glass. The shell of the one-shot vacuum gauge is made of glass, which needs to be cut when used. If you don't observe carefully, the cutting is not good, and cracks are easy to appear at the opening, which will cause leakage or breakage during use, causing leakage in the vacuum system. If the leakage is serious, the product will be contaminated. At the same time, the shell of the vacuum gauge is made of metal. During use, the quality of the gauge core cannot be directly observed due to the metal shell. At the same time, the gauge is replaced or directly discarded after being contaminated or damaged, resulting in waste of metal materials. The existing vacuum gauge uses pins and positioning pins to connect the measuring wire socket. The pins are made of metal material, and the positioning pins are made of plastic insulating material. Since the pins are the same thickness, when the positioning pin breaks, the user will not be able to connect the measuring wire socket normally, and the vacuum gauge cannot work normally.

[0004] At the same time, the current vacuum gauge display control system can only preset gas type parameters (air, ammonia, nitrogen, helium). When the gases are different, the vacuum degree of different gases cannot be automatically converted and displayed during the entire use process. Summary of the invention

[0005] In order to overcome the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a modular vacuum gauge, which overcomes the problems in the prior art that the vacuum gauge failure and damage cannot be handled in time and the vacuum gauge interface specifications are inconsistent, resulting in the inability to promptly and effectively solve the problems when they occur.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] The invention discloses a modular vacuum gauge, comprising: a display control unit, a core-changing vacuum gauge, an external low vacuum zero point and full scale adjustment plug and a signal line; the external low vacuum zero point and full scale adjustment plug connects the core-changing vacuum gauge and the low vacuum gauge signal and processing part module in the display control unit, and the signal line connects the core-changing vacuum gauge and the display control unit.

[0008] Preferably, the display control unit comprises: a display unit mother seat, a power supply part module, a hot cathode ionization gauge signal and processing part module, a low vacuum gauge signal and processing part module, a cold cathode ionization gauge signal and processing part module, a capacitor film gauge signal and processing part module, a relay control module and a special vacuum gauge signal and processing part module; a plurality of module slots are provided in the display unit mother seat, and the power supply part module, the hot cathode ionization gauge signal and processing part module, the low vacuum gauge signal and processing part module, the cold cathode ionization gauge signal and processing part module, the capacitor film gauge signal and processing part module, the relay control module and the special vacuum gauge signal and processing part module are all provided with front-end plugs, which are respectively inserted into the module slots, and are powered and identified through the slots, and a single-chip microcomputer is provided inside the display unit mother seat.

[0009] Preferably, a display panel is arranged on the display unit base, and a display unit display screen left, a display unit display screen right and a display unit key combination are arranged on the display panel.

[0010] Preferably, a low vacuum regulation signal and processing part module toggle switch is arranged on the top of the low vacuum regulation signal and processing part module, a low vacuum regulation signal and processing part module built-in signal processing circuit board is arranged on the side of the low vacuum regulation signal and processing part module, and a lower end interface and an upper end interface are arranged on the built-in signal processing circuit board of the low vacuum regulation signal and processing part module, and the lower end interface and the upper end interface are electrically connected to the lower and upper ends of the low vacuum regulation signal external input interface respectively.

[0011] Preferably, the hot cathode ionization gauge signal and processing part module is provided with a built-in signal processing board input socket of the hot cathode ionization gauge signal and processing part module, and the built-in signal processing board input socket of the hot cathode ionization gauge signal and processing part module is electrically connected to the rear end signal socket of the hot cathode ionization gauge signal and processing part module.

[0012] Preferably, the special vacuum gauge signal and processing module is provided with a display screen and an input keyboard.

[0013] Preferably, the core-changing vacuum gauge comprises: an O-shaped metal fixing ring, a core-changing tube core, an O-shaped rubber sealing ring, a metal tube shell, a positioning pin, a positioning groove, a metal pin, a lower end interface, an annular metal retaining ring, a filter and an annular magnet; the O-shaped rubber sealing ring is arranged in the metal tube shell, the core-changing tube core is arranged in the metal tube shell to compress the O-shaped rubber sealing ring, the positioning pin is arranged in the positioning groove on the inner side of the upper end of the metal tube shell, the metal pin is arranged at the upper end of the core-changing tube core, the lower end of the core-changing tube core is the lower end interface, the inner annular metal retaining ring fixes the filter in the lower end interface, the O-shaped metal fixing ring is arranged at the upper end of the metal tube shell, and is used to compress and seal so that the upper end of the core-changing tube core is sealed in the metal tube shell, the annular magnet is sleeved on the metal tube shell from the upper end of the metal tube shell, and is pressed downward by the O-shaped metal fixing ring.

[0014] Preferably, the replaceable core core includes a Pirani vacuum gauge core, a thermocouple vacuum gauge core, a hot cathode ionization vacuum gauge core, a cold cathode ionization gauge core, a piezoresistive vacuum gauge core, a thin film vacuum gauge core and a transmitter core; the filter disc is a circular metal powder sintered filter disc or a circular metal mesh single-layer or multi-layer filter disc.

[0015] Preferably, the external low vacuum zero point and full scale adjustment plug comprises: a left half shell of a plug, a right half shell of a plug, an RJ45 socket, a hollow pin seat, a zero point potentiometer, a full scale potentiometer and a circuit board; the hollow pin seat is welded on the circuit board and connected to the zero point potentiometer, the full scale potentiometer is arranged below the circuit board on one side of the zero point potentiometer, and the hollow pin seat is connected to the connection line of the RJ45 socket through the circuit board, the left half shell of the plug and the right half shell of the plug are buckled to seal the inside of the plug, the RJ45 socket is exposed at the upper end, and the hollow pin seat is exposed at the lower end.

[0016] Preferably, a small hole for exposing the adjustment knobs of the zero point potentiometer and the full scale potentiometer is provided on the right half shell of the plug.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] The present invention discloses a modular vacuum gauge. The display control unit modularizes each functional unit in the vacuum gauge and cooperates with the core-changing vacuum gauge. The core-changing vacuum gauge and the display control unit are combined to realize any function. The core-changing vacuum gauge and the display control unit are connected with an external low vacuum zero-full-scale adjustment plug to connect the core-changing vacuum gauge and the low vacuum gauge signal and processing part module in the display control unit. During the validity period, each channel of the low vacuum can match and backup two or more qualified vacuum gauges. If a problem is found, it can be replaced at any time without re-inspection. At the same time, the external low vacuum zero-full-scale adjustment plug can be reused with a new tube core when it is inspected next time. The other modules of the display control unit and the core-changing vacuum gauge are connected with a signal line, so that a set of display control units can be connected to gauges with different interfaces, and different tube cores can also be equipped with different tube shells, so that they can be used on different equipment, thereby improving the versatility of the display control unit and the gauge on the equipment, without considering that the original interface of the vacuum equipment is different and cannot be replaced. When there is a problem with the display control unit, the corresponding module can be directly purchased and directly replaced. At the same time, the modular vacuum gauge can be used with various existing universal signal lines to directly match various hot cathode ionization gauges, low vacuum gauges, cold cathode ionization gauges, and capacitor film gauges. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a front schematic diagram of the display control unit of the invention;

[0020] Figure 2 is a schematic diagram of the back of the invention display control unit;

[0021] Figure 3 It is a schematic diagram of other modules of the invention display control unit;

[0022] Figure 4 It is a schematic diagram of the exploded structure of the core-changing vacuum gauge of the present invention;

[0023] Figure 5 It is a schematic diagram of the exploded structure of the external low vacuum zero point and full scale adjustment plug of the present invention;

[0024] Figure 6 It is a schematic diagram of the structure of the display control unit, the core-changing vacuum regulator and the external plug signal line regulator of the present invention;

[0025] Figure 7 It is a schematic diagram of the structure of the invention for replacing the filament;

[0026] Figure 8 Schematic diagram A of the startup flow of the display control unit of the present invention;

[0027] Fig. 9 Schematic diagram B of the startup flow chart of the display control unit of the present invention.

[0028] Among them: 1-"O" type metal fixing ring; 2-core-changing tube core; 3-"O" type rubber sealing ring; 4-metal tube shell; 5-positioning pin; 6-positioning groove; 7-metal pin; 8-left half shell of plug; 9-right half shell of plug; 10-RJ45 socket; 11-hollow pin seat; 12-zero point potentiometer; 12.1-full scale potentiometer; 13-left small hole; 13.1-right small hole; 14-display unit mother seat; 14.1-the other direction of the display unit mother seat; 15-power supply Partial module; 16-hot cathode ionization gauge signal and processing part module; 17-low vacuum gauge signal and processing part module; 18-cold cathode ionization gauge signal and processing part module; 19-capacitance film gauge signal and processing part module; 20-relay control part module; 21-module plug; 22-module slot; 23-hot cathode ionization gauge signal and processing part module rear signal socket; 24-hot cathode ionization gauge signal and processing part module built-in signal processing board input socket; 25-low vacuum gauge signal and processing part module dial switch; 26-low vacuum gauge signal external input interface upper; 26.1-low vacuum gauge signal external input interface lower; 27-low vacuum gauge signal and processing part module built-in signal processing circuit board; 28-display unit display screen right; 28.1-display unit display screen left; 29-low vacuum gauge signal and processing part module built-in signal input socket lower; 29.1-low vacuum gauge signal and processing part module built-in signal input socket On the seat; 30-lower end interface; 30.1-upper end interface; 31-circuit board; 32-display unit key combination; 33-annular metal retaining spring; 34-filter; 35-special vacuum gauge signal and processing part module; 36-display screen; 37-input keyboard; 38-signal line; 38'-signal line; 39-gauge; 40-on the filament bracket; 40.1-under the filament bracket; 41-"O" shaped filament; 42-filament installation tool; 43-annular magnet; 44-display panel. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0030] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0031] The present invention is further described in detail below in conjunction with the accompanying drawings:

[0032] The present invention discloses a modular vacuum gauge, including a display control unit, a core-changing vacuum gauge 39, an external low vacuum zero-point full-scale adjustment plug and a signal line 38; the external low vacuum zero-point full-scale adjustment plug connects the core-changing vacuum gauge 39 with the low vacuum gauge signal and processing part module 17 in the display control unit, and the signal line 38 connects the core-changing vacuum gauge 39 and the display control unit. The display control unit includes a display unit mother seat 14, a power supply part module 15, a hot cathode ionization gauge signal and processing part module 16, a low vacuum gauge signal and processing part module 17, a cold cathode ionization gauge signal and processing part module 18, a capacitor film gauge signal and processing part module 19, a special signal and processing part module, a relay control module 20 and a special vacuum gauge signal and processing part module 35; the front-end module plug 21 of each module is inserted into the module slot 22 inside the display unit mother seat for power supply and identification through the socket, and a single-chip microcomputer is arranged inside the display unit mother seat 14. The special vacuum gauge signal and processing part module 35 has an input keyboard 37 and a display screen 36. The special vacuum gauge signal and processing part module 35 uses a built-in single-chip microcomputer to collect vacuum, or the voltage or current signal of the pressure transmitter, and converts the output voltage or current signal into a vacuum measurement signal according to the input calculation formula, and then displays it on the display screen of the display unit mother socket through an adapter, or a separate external 24V DC power supply is used to match the vacuum, or the pressure transmitter uses the measured output voltage or current to convert the voltage or current signal into a measurement signal according to the input calculation formula and display it on the display screen 36. At the same time, the module is equipped with a calibrated and qualified composite vacuum gauge to call the built-in self-calibration comparison program of the display module through the display unit key combination, and the processed voltage or current signal (for example, 0-10V) signal can be supplied to an external recorder through the back-end interface.

[0033] The modular vacuum gauge can adjust the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge in real time according to the control signals of the switches of each external air inlet (after returning to the relay control module (20)) to automatically convert and display the vacuum degree of different gases.

[0034] Furthermore, the low vacuum gauge signal and processing part module 17 is connected to the core-changing vacuum gauge 39 through an external low vacuum zero point and full scale adjustment plug module, and the eight external metal pins 7 of the core-changing vacuum gauge 39 are converted to the RJ45 socket 10 through the low vacuum zero point and full scale adjustment plug module, and the signals of four metal pins 7 are input back to the low vacuum gauge signal and processing part module 17 through the network cable signal line to provide the original gauge signal, and the signals of the other four pins are input back to the low vacuum gauge signal and processing part module 17 through the network cable signal line to provide the original gauge zero point and full scale potentiometer signals. The low vacuum gauge signal and processing part module 17 is one or two Pirani vacuum gauges, or one or two thermocouple vacuum gauges. A jumper module is set at the upper rear end of the low vacuum gauge signal and processing part module 17. The jumper module switches to use only one set of zero-point full-scale potentiometers or two sets of zero-point full-scale potentiometers built into the rear end of the module. The rear end of the low vacuum gauge signal and processing part module 17 is also provided with a gauge signal input interface and a signal output interface.

[0035] Furthermore, the core-changing vacuum gauge 39 includes a metal tube shell 30, the upper end of the metal tube shell is provided with an external thread, and there is an "O"-shaped positioning ring groove in the external thread, the "O"-shaped rubber sealing ring 3 is embedded downward in the "O"-shaped positioning ring groove, and the tube core is pressed downward to tighten the "O" rubber sealing ring 3. The positioning pin 5 is embedded in the positioning groove 6 on the inner side of the upper end of the metal tube shell. The lower end of the "O"-shaped metal fixing ring 1 has an internal thread, which is screwed downward with the external thread on the upper end of the metal tube shell to press and seal the upper end of the tube core in the metal tube shell. Eight metal pins 7 are provided on the upper end of the tube core (the 2nd and 7th pins are coarser than the other six for positioning), and the lower end interface is an outer diameter A straight-plug interface, or an interface with external threads at the lower end, or a CF metal flange interface fixed by welding metal bolts, or a KF metal flange interface fixed by welding metal clamps. There is a step in the lower end interface for placing a circular metal powder sintered filter or a circular metal mesh single-layer or multi-layer filter mesh. It is fixed with an annular metal retaining spring to reduce the contamination of the tube core when the vacuum system is heated and extend the service life. When installing the cold cathode gauge tube core, the annular magnet 43 is sleeved on the tube shell from the upper end of the metal tube shell and pressed down with an "O"-shaped metal fixing ring 1. The tube core of the core-changing vacuum gauge 39 is connected to the lower end of the metal tube needle by a support rod, welding or fusion connection, or a detachable fastening or plug-in connection. The upper end of the tube needle of the core-changing vacuum gauge 39 passes through the sealing ceramic in the tube seat and is welded to the bottom surface of the circuit board through a soft wire, and the RJ45 socket 10 is welded to the top surface of the circuit board. The lower end interface of the core-changing vacuum gauge 39 is The straight-in interface has an external threaded interface at the bottom, a CF metal flange interface fixed with welded metal bolts, or a KF metal flange interface fixed with welded metal clamps. When calibrating, one channel can calibrate the regulations of different interfaces through an external low vacuum zero point and full scale adjustment plug.

[0036] The vacuum gauge tube core is connected to the lower end support rod of the tube pin by welding or fusion connection, or by detachable fastening or plug connection. The upper end of the tube pin passes through the sealing ceramic in the tube seat and is welded to the bottom surface of the circuit board through a soft wire, and the RJ45 socket is welded to the top surface of the circuit board. The upper end of the tube pin passes through the sealing ceramic in the tube seat and is welded to the bottom surface of the circuit board through a soft wire, and the RJ45 socket is welded to the top surface of the circuit board. The modular jack of the 8 positions (8 pins) of the RJ socket of the circuit connection wire pre-printed on the circuit board, or the 8 pins of the 1st, 2nd, ..., 8th pin of the plug are connected to the upper end of the tube pin in sequence, one by one. When in use, the 8 metal pins of the core-changing gauge are inserted into the 8 hollow pin seats on the plug, and then connected to the RJ45 socket through the circuit board, and transferred to the corresponding low vacuum gauge signal and the back-end interface of the processing part module through the network cable. The emitter filament or collector filament of various resistance wires (resistance gauges), galvanic wires (galvanic gauges), and hot cathode high vacuum gauges of existing metal gauges are all elastic metal wires, and their two ends are respectively welded to the upper and lower ends of the filament. Because they are too thin and the welding is not firm, they are very easy to be desoldered or broken during use. Once broken, they cannot be used because they are welded and can only be discarded to waste resources. Since metal filament materials are generally elastic, they can be directly welded into an elastic "O"-shaped ring filament. The extended end of the filament bracket is changed into two semicircular hooks that are separated from each other. The two horizontal thin rods of the filament installation tool are used to hang the elastic "O"-shaped ring filament and then put it on the extended end of the filament bracket, which is changed into two semicircular hooks that are separated from each other. Then, it can be reused after calibration.

[0037] Furthermore, the replaceable core tube core of the replaceable core vacuum gauge 2 includes a Pirani vacuum gauge tube core, a thermocouple vacuum gauge tube core, a hot cathode ionization vacuum gauge tube core, a cold cathode ionization gauge tube core, a piezoresistive vacuum gauge tube core, a thin film vacuum gauge tube core or a transmitter tube core.

[0038] Furthermore, the external low vacuum zero point and full scale adjustment plug includes a circuit board 31, and eight hollow pin sockets 11 are welded to the circuit board 31, wherein four hollow pin sockets 11 are connected through the circuit board 31 and four signal output points of the zero point potentiometer 12 and the full scale potentiometer 12.1, and the other four are connected to four signal pins of the resistance gauge; the eight hollow pin sockets 11 are sequentially connected to the connection lines of the RJ45 socket 10 through the pre-connection lines on the circuit board 31, and the left half shell 8 and the right half shell 9 of the plug buckle and seal the inner part of the plug, with the RJ45 socket 10 exposed at the upper end and the eight pin sockets exposed at the lower end, and two small holes are provided on the side of the plug shell to expose the adjustment knobs of the zero point potentiometer 12 and the full scale potentiometer 12.1.

[0039] See also Figure 1 to Figure 7 The present invention is a modular vacuum gauge, including a display control unit and a core-changing vacuum gauge 39. The display control unit modularizes a power supply module 15, a hot cathode ionization gauge signal and processing module 16, a low vacuum gauge signal and processing module 17, a cold cathode ionization gauge signal and processing module 18, a capacitor film gauge signal and processing module 19, a relay control module 20 and a special vacuum gauge signal and processing module 35. Each module is of the same size (just like a computer blade server). You can select and match the module you need. If there is any remaining space after the splicing and combination, it can be supplemented with an empty module of the same size and then inserted into the display unit mother seat 14. After the front end plug 21 of each module is inserted into the module slot inside the display unit mother seat, it is powered and identified through the socket. The display unit mother seat has a single-chip microcomputer and a program to identify and judge the module. When in use, select the module as needed and combine it into a vacuum gauge display control unit through the plug-in interface. Each module has a self-calibration function, and self-calibrates every time it is turned on. If a fault occurs, the fault code is directly displayed on the panel. The user only needs to repair it according to the code prompt or replace the faulty module with spare parts. When all modules enter normal working conditions, the information provided by various modules is displayed on the display panel of the display unit mother socket.

[0040] The special vacuum gauge signal and processing part module 35 (with input keyboard 37 and display screen 36) of the display control unit, since foreign vacuum gauges are made into transmitter mode, only four pins are needed to input the working voltage (15V-30V) and return the output voltage signal (0V-10V) or (0V-5V) or (1V-5V) or current signal (4mA-20mA). This module only needs to provide the working voltage and process the output voltage signal (0V-10V) or (0V-5V) or (1V-5V) or current signal (4mA-20mA), and then use the built-in single-chip microcomputer to collect the voltage signal, and according to the input calculation formula (the formula is public), the output voltage signal can be converted into a vacuum measurement signal, and then displayed on the display panel 44 of the display unit socket 14 through the adapter. There is a regulation signal input interface at the back end of the module (which can be a network cable interface or an 8-pin aviation socket or a 9-pin socket or a 15-pin socket). It can also be connected to an external 24V DC power supply and used with a vacuum or pressure transmitter to measure the output voltage or current. According to the input calculation formula, the voltage or current signal is converted into a measurement signal and displayed on the display screen. At the same time, the module is equipped with a calibrated and qualified composite vacuum regulator. Through the display unit key combination, the built-in self-calibration comparison program of the display module is called. A test comparison similar to the verification during the measurement period is performed regularly every month. The relative error calculation is performed on the displayed values ​​of the regulator in use on other modules. If the error is large (exceeding ±50%) and it cannot be used, it will directly prompt to replace a new vacuum regulator.

[0041] The display control unit of the modular vacuum gauge can adjust the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge in real time according to the control signals of the switches of each external air inlet, and automatically convert and display the vacuum degree of different gases.

[0042] The modular vacuum gauge display control unit makes the zero-point full-scale potentiometer of the low vacuum regulation signal and processing part module 17 into an external low vacuum zero-point full-scale adjustment plug, and the external low vacuum zero-point full-scale adjustment plug includes a hollow pin seat (11) and a circuit board (31). Eight hollow pin seats 11 are welded to the circuit board 31, four of which are connected to the zero potentiometer 12 and the four signal output points of the full-scale potentiometer 12.1 through the circuit board 31, and the other four hollow pin seats 11 are connected to the Pirani The four signal pins of the vacuum gauge core or the thermocouple vacuum gauge core vacuum gauge; the eight hollow pin seats 11 are connected to the 1 to 8 connections of the RJ45 socket 10 in the order of 1 to 8 through the pre-connections on the circuit board, and then the left half shell 8 and the right half shell 9 of the plug buckle and seal the inner part of the plug, with only the RJ45 socket 10 exposed at the upper end and only the eight hollow pin seats 11 exposed at the lower end. There are two small holes on the side of the right half shell 9 of the plug to expose the adjustment knobs of the zero potentiometer 12 and the full-scale potentiometer 12.1. When in use, the core-changing vacuum gauge 39 is converted to the RJ45 socket 10 through the plug-in module via the eight external metal pins 7. Four metal pin 7 signals are input back to the low vacuum gauge signal and processing module 17 through the network cable signal line to provide the original gauge signal. The other four metal pin 7 signals are input back to the low vacuum gauge signal and processing module 17 through the network cable signal line to provide the original gauge zero potentiometer 12 and full scale potentiometer 12.1 signals. Since the zero potentiometer 12 and full scale potentiometer 12.1 are externally placed and are due for inspection or need to be recalibrated when they fail, the low vacuum gauge signal and processing module 17 of the display control unit of a vacuum gauge can correspond to one core-changing vacuum gauge 39, one channel, and one gauge at a time, and calibrate two or more gauges in batches. When there is a problem with the gauge, the user can directly replace the calibrated other gauges and corresponding modules without re-inspection. The metal tube shell 4, the core-changing tube core 2, the "O"-shaped metal fixing ring 1 and the RJ45 socket 10 are used to prevent the glass gauge from cracking, leaking or breaking during use, causing leakage in the vacuum system, polluting the product, and wasting metal materials by discarding the metal gauge after being polluted or damaged. At the same time, the size of the gauge 2, 7-pin pin and the corresponding plug hole is thickened. When the positioning pin 5 of the core-changing vacuum gauge 39 breaks, the user will not be unable to connect the measuring wire socket normally, and the core-changing vacuum gauge 39 will not be able to work normally.

[0043] See also Figure 8 , Fig. 9After the power supply module 15, the hot cathode ionization gauge signal and processing module 16, the low vacuum gauge signal and processing module 17, the cold cathode ionization gauge signal and processing module 18, the capacitor film gauge signal and processing module 19, the relay control module 20 and the special vacuum gauge signal and processing module 35 in the display control unit of the present invention are inserted into the display unit mother seat 14, the single-chip microcomputer in the display unit mother seat 14 receives the module insertion signal, starts the function program corresponding to the module signal and executes it, and the function of the module unit that has not been inserted will not be started and executed; specifically, the vacuum gauge instrument is initialized, and the single-chip microcomputer judges whether the low vacuum gauge signal and processing module 17 exists in the inserted module according to the insertion of the functional module. If not, continue to judge whether the next module exists. If it exists, read the module information and continue to judge whether the next module exists. By analogy, after judging whether each module exists, read the existing module information, and judge whether the corresponding module function is normal and whether the vacuum gauge assembly is complete. If not, display the fault code. If complete, start the functional unit corresponding to the inserted module and display the value of each channel, and update the data and status bar.

[0044] Embodiment 1:

[0045] The present invention includes a display control unit of a modular vacuum gauge, and an external low vacuum zero-full-scale adjustment plug module. The core-changing vacuum gauge includes multiple modules, specifically a display unit mother socket 14, a power supply module 15, a hot cathode ionization gauge signal and processing module 16, and a low vacuum gauge signal and processing module 17. The core-changing vacuum gauge can be a Pirani vacuum gauge, or two Pirani vacuum gauges, or a thermocouple vacuum gauge, or two thermocouple vacuum gauges. There is a jumper module at the upper rear end. Through the module switching, only one set of zero-full-scale potentiometers or two sets of zero-full-scale potentiometers (thermal conduction gauges only need one zero-point potentiometer) built in the rear end of the module can be used. The rear end has a gauge signal input interface (which can be a network cable interface or an 8-pin aviation socket or a 9-pin socket or a 15-pin socket) and a signal output interface. At the same time, the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge can be adjusted in real time according to the control signals of the switches of the external air inlets (after returning to the relay control part module 20) to automatically convert and display the vacuum degree of different gases.

[0046] Embodiment 2:

[0047] See also Figure 7When a single Pirani (resistance type) or thermocouple vacuum gauge is needed, only a display unit mother socket 14, a power supply module 15, a low vacuum gauge signal and processing module 17 (single channel) signal line 38, an external low vacuum zero full scale adjustment plug, a vacuum gauge 39, and a relay control module 20 are needed. When in use, the power supply module 15, the low vacuum gauge signal and processing module 17, and the relay control module are respectively inserted into the slot of the display unit, and the low vacuum gauge signal and processing module and the vacuum gauge 54 (Pirani gauge or thermocouple vacuum gauge) are connected with the signal line 38 and an external low vacuum zero full scale adjustment plug, and then turned on, and the vacuum numerical signal is displayed on the display panel 44. At the same time, the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge can be adjusted in real time according to the control signal of the switch of each external air inlet (after returning to the relay control module 20) to automatically convert and display the vacuum degree of different gases.

[0048] Embodiment 3:

[0049] See also Figure 7 When a dual Pirani (resistance type) or dual thermocouple vacuum gauge is needed, only one display unit female socket 14, power supply module 15, low vacuum gauge signal and processing module 17 (dual path), signal line 38, external low vacuum zero point full scale adjustment plug, vacuum gauge 39, relay control module 20 are needed. When in use, the power supply module 15, low vacuum gauge signal and processing module 17, and relay control module are respectively inserted into the slot of the display unit female, and two signal lines 38 and two external low vacuum zero point full scale adjustment plugs are used to connect the low vacuum gauge signal and processing module and two vacuum gauges 39 (Pirani gauge or thermocouple vacuum gauge) and then turned on, and the vacuum numerical signal is displayed on the display panel 44. At the same time, the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge can be adjusted in real time according to the control signal of the switch of each external air inlet (after returning to the relay control module 20) to automatically convert and display the vacuum degree of different gases.

[0050] Embodiment 4:

[0051] See also Figure 7When a single Pirani (resistance type) or single thermocouple single hot cathode ionization vacuum gauge is needed, only one display unit mother socket 14 power supply part module 15, low vacuum gauge signal and processing part module 17 (single channel), hot cathode ionization gauge signal and processing part module 16, signal line 38, external low vacuum zero full scale adjustment plug, vacuum gauge 39, relay control part module 20 is needed. When in use, the power supply part module 15, the low vacuum gauge signal and processing part module 17, and the relay control part module are respectively inserted into the slot of the display unit, and a signal line 38 and an external low vacuum zero full scale adjustment plug are used to connect the low vacuum gauge signal and processing part module and a vacuum gauge 39 (Pirani gauge or single thermocouple gauge), and a signal line 38 is used to connect the low hot cathode ionization gauge signal and processing part module 16 and a vacuum gauge 39 (hot cathode ionization vacuum gauge) and then turned on, and the vacuum numerical signal is displayed on the display panel 44. At the same time, the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge can be adjusted in real time according to the control signals of the switches of the external air inlets (after returning to the relay control part module 20) to automatically convert and display the vacuum degree of different gases.

[0052] Embodiment 5:

[0053] See also Figure 7 When a dual Pirani (resistance type) or dual thermocouple single hot cathode ionization vacuum gauge is needed, only a display unit mother socket 14, a power supply module 15, a low vacuum gauge signal and processing module 17 (dual path), a hot cathode ionization gauge signal and processing module 16, a vacuum gauge 39, an external low vacuum zero point full scale adjustment plug, a vacuum gauge 39, and a relay control module 20 are needed. When in use, the power supply module 15, the low vacuum gauge signal and processing module 17, and the relay control module are respectively inserted into the slot of the display unit, and a signal line 38 and an external low vacuum zero point full scale adjustment plug are used to connect the low vacuum gauge signal and processing module and the vacuum gauge 39 (Pirani gauge or thermocouple gauge), and a signal line 38 is used to connect the low hot cathode ionization gauge signal and processing module 16 and a vacuum gauge 39 (hot cathode ionization vacuum gauge) and then turned on. The vacuum numerical signal is displayed on the display panel 44. At the same time, the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge can be adjusted in real time according to the control signals of the switches of the external air inlets (after returning to the relay control part module 20) to automatically convert and display the vacuum degree of different gases.

[0054] Embodiment 6:

[0055] See also Figure 7When a single Pirani (resistance type) or single cold couple single hot cathode ionization vacuum gauge is needed, only one display unit mother socket 14, power supply module 15, low vacuum gauge signal and processing module 17 (single channel), cold cathode ionization gauge signal and processing module 18, signal line 38, external low vacuum zero point full scale adjustment plug, vacuum gauge 39, relay control module 20 are needed. When in use, the power supply module 15, the low vacuum gauge signal and processing module 17, and the relay control module are respectively inserted into the slot of the display unit, and a signal line 38 and an external low vacuum zero point full scale adjustment plug are used to connect the low vacuum gauge signal and processing module and a vacuum gauge 39 (Pirani gauge or single thermocouple gauge), and a signal line 38 is used to connect the low hot cathode ionization gauge signal and processing module 16 and a vacuum gauge 39 (cold cathode ionization vacuum gauge) and then the machine is turned on, and the vacuum numerical signal is displayed on the display panel 44. At the same time, the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge can be adjusted in real time according to the control signals of the switches of the external air inlets (after returning to the relay control part module 20) to automatically convert and display the vacuum degree of different gases.

[0056] Embodiment 7:

[0057] See also Figure 7 When a dual Pirani (resistance type) or dual thermocouple single cold cathode ionization vacuum gauge is needed, only a display unit mother socket 14, a power supply module 15, a low vacuum gauge signal and processing module 17 (dual path), a cold cathode ionization gauge signal and processing module 18, a signal line 38, an external low vacuum zero point full scale adjustment plug, a vacuum gauge 39, and a relay control module 20 are needed. When in use, the power supply module 15, the low vacuum gauge signal and processing module 17, and the relay control module are respectively inserted into the slot of the display unit, and a signal line and an external low vacuum zero point full scale adjustment plug are used to connect the low vacuum gauge signal and processing module and two vacuum gauges 39 (Pirani gauge or thermocouple gauge), and a signal line 38 is used to connect the low hot cathode ionization gauge signal and processing module 16 and a vacuum gauge 39 (cold cathode ionization vacuum gauge) and then the machine is turned on, and the vacuum numerical signal is displayed on the display panel 44. At the same time, the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge can be adjusted in real time according to the control signals of the switches of the external air inlets (after returning to the relay control part module 20) to automatically convert and display the vacuum degree of different gases.

[0058] Embodiment 8:

[0059] See also Figure 7When a dual Pirani (resistance type) or dual thermocouple single cold cathode ionization and capacitance film gauge vacuum gauge is needed, only a display unit mother socket 14, a power supply part module 15, a low vacuum gauge signal and processing part module 17 (dual-channel), a cold cathode ionization gauge signal and processing part module 18, a capacitance film gauge signal and processing part module 19, a signal line 38, an external low vacuum zero point and full scale adjustment plug, a vacuum gauge 39, and a relay control part module 20 are needed. When in use, the power supply module 15, the low vacuum gauge signal and processing module 17, and the relay control module are respectively inserted into the slots of the display unit, and then the low vacuum gauge signal and processing module and two vacuum gauges 39 (Pirani gauges or thermocouple gauges) are connected by a signal line and an external low vacuum zero and full scale adjustment plug, the low hot cathode ionization gauge signal and processing module 16 and a vacuum gauge 39 (cold cathode ionization vacuum gauge) are connected by a signal line 38, and the capacitance film gauge signal and processing module 19 and a vacuum gauge 39 (capacitance film gauge) are connected by a signal line 38, and then the machine is turned on, and the vacuum numerical signal is displayed on the display panel 44. At the same time, the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge can be adjusted in real time according to the control signals of the switches of each external air inlet (after returning to the relay control module 20), and the vacuum degree when different gases are automatically converted and displayed.

[0060] Embodiment 9:

[0061] See also Figure 7 When it is necessary to use the imported vacuum gauge at the same time, it is only necessary to add a special vacuum gauge signal and processing part module 35, signal line and vacuum gauge (various imported Pirani (resistance) vacuum gauges, thermocouple vacuum gauges, hot cathode ionization vacuum gauges, cold cathode ionization gauges, piezoresistive vacuum gauges, thin film vacuum gauges, pressure transmitters, etc.) to the existing combination, and input the corresponding formula of the vacuum gauge (P = 101.667U-9.33 or P = 10U-3.5U is the output voltage of the gauge) through the display screen 36 and the keyboard 37 (when using the thin film gauge, the upper limit of measurement can be set) and then turn on the machine, and the vacuum numerical signal is displayed on the display panel 44. At the same time, the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge can be adjusted in real time according to the control signal of the switch of each external air inlet (after returning to the relay control part module 20) to automatically convert and display the vacuum degree of different gases.

[0062] Related devices used in the present invention:

[0063] STM32 MCU

[0064] The STM32 series of microcontrollers launched by ST are based on the ARM Cortex-M core designed specifically for embedded applications requiring high performance, low cost and low power consumption. They also have first-class peripherals: 1μs dual 12-bit ADC, 4Mbit / s UART, 18Mbit / s SPI, etc. The simple structure and easy-to-use tools are combined with its powerful functions.

[0065] 1. Core: ARM32-bit Cortex-M3CPU, maximum operating frequency 72MHz, 1.25DMIPS / MHz, single-cycle multiplication and hardware division.

[0066] 2. Memory: 32-512KB Flash memory and 6-64KB SRAM memory integrated on chip.

[0067] 3. Clock, reset and power management: 2.0-3.6V power supply and I / O interface drive voltage. POR, PDR and programmable voltage detector (PVD). 4-16MHz crystal oscillator. Embedded 8MHz RC oscillator circuit adjusted before delivery. Internal 40kHz RC oscillator circuit. PLL for CPU clock. Calibrated 32kHz crystal oscillator for RTC

[0068] 4. Debug mode: Serial Debug (SWD) and JTAG interface. Up to 112 fast I / O ports, up to 11 timers, up to 13 communication interfaces.

[0069] In summary, the present invention discloses a modular vacuum gauge display control system, which overcomes the problems existing in the prior art that the vacuum gauge needs to be returned to the factory for repair and the specifications of the vacuum gauge are inconsistent, and the problems cannot be solved in a timely and effective manner when they occur. The present invention includes a display control unit and a core-changing vacuum gauge, and the display control unit includes a relay control module, a low vacuum gauge signal and processing module, a high vacuum signal and processing module, a power module, and a display module. The front-end module plug of each module is inserted into the module slot inside the display unit mother seat and is powered and identified through the socket. A single-chip microcomputer is arranged inside the display unit mother seat. The display control unit includes a special signal and processing part module, which has a formula input keyboard and a display screen. The special signal and processing part module uses a built-in single-chip microcomputer to collect voltage signals, and converts the output voltage signal into a vacuum measurement signal according to the input calculation formula. At the same time, the gas type parameters (such as air, ammonia, nitrogen, and helium) inside the vacuum gauge are automatically adjusted to convert the vacuum degree when displaying different gases, and then displayed on the display screen of the display unit through switching. If there is a problem with the display control unit of the present invention, the corresponding module can be directly purchased and used as a replacement; the modular vacuum gauge display control unit of the present invention can adjust the gas type parameters (such as air, ammonia, nitrogen, helium) inside the vacuum gauge in real time according to the control signal of the switch of each external air inlet (after returning to the relay control module) to automatically convert and display the vacuum degree of different gases. By using an external low vacuum zero point full scale adjustment plug, each low vacuum channel can back up two or more gauges; the metal shell of the core-changing vacuum gauge can be regularly cleaned and high-temperature baked for repeated use. Since it is made of metal material, it can avoid the gauge from breaking and causing leakage to pollute the vacuum system and products during use, while saving metal materials and avoiding waste; the present invention can directly use other vacuum gauges (various domestic and imported Pirani (resistance) vacuum gauges, thermocouple vacuum gauges, hot cathode ionization vacuum gauges, cold cathode ionization gauges, piezoresistive vacuum gauges, thin film vacuum gauges, pressure transmitters, etc.); the lower end interface of the core-changing vacuum gauge of the present invention is usually an outer diameter The straight-insert interface can also be selected from interfaces with external threads at the lower end or CF metal flange interfaces fixed by welding metal bolts or KF metal flange interfaces fixed by welding metal clamps; there is an "O"-shaped positioning ring groove in the lower interface of the core-changing vacuum gauge, which can be used to place round metal powder sintered filters (copper powder metal sintered filters) or round metal mesh single-layer or multi-layer filter meshes, and then fixed with an annular metal retaining ring. When used, it greatly reduces the pollution of the tube core during the hot processing of the vacuum system and prolongs the service life. A set of display control units can be connected to gauges with different interfaces, and different tube cores can also be equipped with different tube shells, so they can be used on different equipment, thereby improving the versatility of the display control unit and the gauge on the equipment, without considering that the original interfaces of the vacuum equipment are different and cannot be replaced. The present invention discloses a modular vacuum gauge, in which the display control unit modularizes the functional units in the vacuum gauge and is used in conjunction with the core-changing vacuum gauge. The core-changing vacuum gauge and the display control unit are combined according to the function to be realized, and an external low vacuum zero point full scale adjustment plug is used to connect the core-changing vacuum gauge and the low vacuum gauge in the display control unit. Tube signal and processing module and module dip switch During the validity period, each low vacuum channel can be matched with two or more qualified vacuum gauges. If problems are found, they can be replaced at any time without re-inspection. At the same time, the external low vacuum zero point full scale adjustment plug can be reused with a new tube core when it is inspected next time; the signal line will be used to connect the other modules of the display control unit and the core replacement vacuum gauge, so that a set of display control units can be connected to gauges with different interfaces, and different tube cores can also be installed with different tube shells, so that they can be used on different equipment, improving the versatility of the display control unit and the gauge on the equipment, without considering that the original interface of the vacuum equipment is different and cannot be replaced. And when there is a problem with the display control unit, the corresponding module can be directly purchased and replaced. At the same time, the modular vacuum gauge can be directly used with various hot cathode ionization gauges, low vacuum gauges, cold cathode ionization gauges, and capacitor film gauges with various existing universal signal lines.

[0070] The above contents are only for explaining the technical idea of ​​the present invention and cannot be used to limit the protection scope of the present invention. Any changes made on the basis of the technical solution in accordance with the technical idea proposed by the present invention shall fall within the protection scope of the claims of the present invention.

Claims

1. A modular vacuum gauge, characterized in that: include: A display control unit, a core-changing vacuum regulator (39), an external low vacuum zero-point full-scale adjustment plug and a signal line (38); the external low vacuum zero-point full-scale adjustment plug connects the core-changing vacuum regulator (39) and the low vacuum regulator signal and processing part module (17) in the display control unit, and the signal line (38) connects the core-changing vacuum regulator (39) and the display control unit; The display control unit comprises: a display unit mother seat (14), a power supply module (15), a hot cathode ionization gauge signal and processing module (16), a low vacuum gauge signal and processing module (17), a cold cathode ionization gauge signal and processing module (18), a capacitor film gauge signal and processing module (19), a relay control module (20) and a special vacuum gauge signal and processing module (35); a plurality of module slots (22) are provided in the display unit mother seat (14); front end plugs (21) are provided on the power supply module (15), the hot cathode ionization gauge signal and processing module (16), the low vacuum gauge signal and processing module (17), the cold cathode ionization gauge signal and processing module (18), the capacitor film gauge signal and processing module (19), the relay control module (20) and the special vacuum gauge signal and processing module (35); the front end plugs (21) are respectively inserted into the module slots (22) and are identified by power supply through the slots; and a single chip microcomputer is provided inside the display unit mother seat (14); A low vacuum regulation signal and processing module dial switch (25) is arranged on the top of the low vacuum regulation signal and processing module (17); a low vacuum regulation signal and processing module built-in signal processing circuit board (27) is arranged on the side of the low vacuum regulation signal and processing module (17); a lower end interface (30) and an upper end interface (30.1) are arranged on the low vacuum regulation signal and processing module built-in signal processing circuit board (27); the lower end interface (30) and the upper end interface (30.1) are electrically connected to the low vacuum regulation signal external input interface lower (26.1) and the low vacuum regulation signal external input interface upper (26), respectively.

2. A modular vacuum gauge according to claim 1, characterized in that: The display unit base (14) is provided with a display panel (44), and the display panel (44) is provided with a display unit display screen left (28.1), a display unit display screen right (28) and a display unit key combination (32).

3. A modular vacuum gauge according to claim 1, characterized in that: The hot cathode ionization gauge signal and processing part module (16) is provided with a hot cathode ionization gauge signal and processing part module built-in signal processing board input socket (24), and the hot cathode ionization gauge signal and processing part module built-in signal processing board input socket (24) is electrically connected to the hot cathode ionization gauge signal and processing part module rear end signal socket (23).

4. A modular vacuum gauge according to claim 1, characterized in that: The special vacuum gauge signal and processing module (35) is provided with a display screen (36) and an input keyboard (37).

5. A modular vacuum gauge according to claim 1, characterized in that: The core-changing vacuum gauge (39) comprises: an "O"-shaped metal fixing ring (1), a core-changing tube core (2), an "O"-shaped rubber sealing ring (3), a metal tube shell (4), a positioning pin (5), a positioning groove (6), a metal plug pin (7), a lower end interface (30), an annular metal retaining ring (33), a filter disc (34) and an annular magnet (43); the "O"-shaped rubber sealing ring (3) is arranged in the metal tube shell (4); the core-changing tube core (2) is arranged in the metal tube shell (4) to press the "O"-shaped rubber sealing ring (3); the positioning pin (5) is arranged in the positioning groove (6) on the inner side of the upper end of the metal tube shell (4); the metal plug pin (7) is arranged at the upper end of the core-changing tube core (2); the lower end of the core-changing tube core (2) is the lower end interface (30); the inner annular metal retaining ring (33) fixes the filter disc (34) in the lower end interface (30); An "O"-shaped metal fixing ring (1) is arranged at the upper end of the metal tube shell (4) and is used for pressing and sealing so that the upper end of the core-changing tube core (2) is sealed in the metal tube shell (4). The annular magnet (43) is sleeved on the metal tube shell (4) from the upper end of the metal tube shell (4) and is pressed downward by the "O"-shaped metal fixing ring (1).

6. A modular vacuum gauge according to claim 5, characterized in that: The core-changeable tube core (2) comprises a Pirani vacuum gauge tube core, a thermocouple vacuum gauge tube core, a hot cathode ionization vacuum gauge tube core, a cold cathode ionization gauge tube core, a piezoresistive vacuum gauge tube core, a thin film vacuum gauge tube core and a transmitter tube core; the filter (34) is a circular metal powder sintered filter or a circular metal mesh single-layer or multi-layer filter mesh.

7. A modular vacuum gauge according to claim 1, characterized in that: The external low vacuum zero point and full scale adjustment plug comprises: a left half shell (8) of the plug, a right half shell (9) of the plug, an RJ45 socket (10), a hollow pin seat (11), a zero point potentiometer (12), a full scale potentiometer (12.1) and a circuit board (31); the hollow pin seat (11) is welded on the circuit board (31) and connected to the zero point potentiometer (12); the full scale potentiometer (12.1) is arranged below the circuit board (31) and on one side of the zero point potentiometer (12); the hollow pin seat (11) is connected to a line of the RJ45 socket (10) through the circuit board (31); the left half shell (8) of the plug and the right half shell (9) of the plug are buckled together to seal the inside of the plug, the RJ45 socket (10) is exposed at the upper end, and the hollow pin seat (11) is exposed at the lower end.

8. A modular vacuum gauge according to claim 7, characterized in that: The right half shell (9) of the plug is provided with a small hole for exposing the adjustment knobs of the zero point potentiometer (12) and the full scale potentiometer (12.1).

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