Dynamic coating device and its dynamic coating method

Abstract

The present invention relates to a dynamic coating device and a dynamic coating method thereof. The dynamic coating device includes a control module, a buffer chamber, a transition chamber, and a coating chamber arranged in sequence along a first direction. The transition chamber includes at least three detection elements. An adjacent two detection elements define a transition interval, and a driving mechanism is provided in the transition interval. The driving mechanism has a process speed, a transmission speed, and a limit speed. The control module is communicatively connected to the detection elements and the driving mechanism, and is configured to control the driving mechanism to accelerate to the transmission speed when the detection element close to the coating chamber detects that the tail of the previous substrate leaving the coating chamber has left, and control the driving mechanism to decelerate to the process speed when the detection element close to the coating chamber detects that the head of the next substrate approaching the coating chamber starts to leave. The acceleration and transmission speed of multiple chases are small, reducing the substrate fragmentation rate, shortening the distance between adjacent substrates, realizing continuous coating with a distance of less than 20 mm, reducing target waste, and improving the stability of the coating process and the product yield.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and particularly to a dynamic coating device and a dynamic coating method thereof. Background Art

[0002] Dynamic coating is a method of coating multiple substrates continuously in line. The substrates enter the coating chamber at a fixed process speed uniformly, and physical vapor deposition, chemical vapor deposition and other deposition operations are completed in the coating chamber.

[0003] Currently, a conventional dynamic coating device includes an inlet lock chamber, a buffer chamber, a transition chamber, a coating chamber, a transition chamber, a buffer chamber, and an outlet lock chamber. These chambers are arranged linearly, and this linear arrangement is called an inline structure. After the second substrate is transferred from the inlet lock chamber to the buffer chamber, the buffer chamber is evacuated to a set pressure. When the first substrate in the transition chamber enters the coating chamber at the process speed, the second substrate enters the transition chamber and is accelerated once to catch up with the first substrate at the upper limit speed, and leaves the transition chamber at the process speed. At this time, the distance between the first substrate and the second substrate is the smallest and they do not contact. However, when the production capacity requirement of the dynamic coating device is high, the process speed of the substrate increases accordingly. The upper limit speed of the transition chamber is limited by the transmission stability and mechanical configuration of the substrate. Generally, the upper limit speed is about 40 m / min and the process running speed is 4 m / min. The length of the transition chamber is slightly larger than the length of the substrate (2 m), and the minimum distance between the trays where the two substrates are located can only be guaranteed to 200 mm. Obviously, it is difficult to meet the distance requirement below 20 mm. Since the larger the gap between the trays means more loss of coating materials, for substrates with a length of 2 m and a gap of 200 mm, it means that 10% of the coating materials are wasted due to the gap between the trays. At the same time, the stability of the coating process will also be affected, and there is a risk of wrap-around plating. In addition, the higher acceleration and upper limit speed result in a higher substrate fragmentation rate and a lower product yield. Summary of the Invention

[0004] Based on this, in view of the problem that the gap between adjacent substrates in the existing dynamic coating device is large and difficult to control, it is necessary to provide a dynamic coating device and a dynamic coating method thereof.

[0005] The present invention provides a dynamic coating device for continuously coating multiple substrates, including a control module and a buffer chamber, a transition chamber, and a coating chamber arranged in sequence along a first direction, wherein:

[0006] The transition cavity includes at least three detection elements arranged along the first direction. One detection element is arranged close to the buffer cavity, and the remaining detection elements are close to the coating cavity for detecting substrate information. Two adjacent detection elements define a transition interval, and a driving mechanism is arranged in the transition interval. The driving mechanism has an adjustable transmission speed, and the transmission speed is not less than the process speed of the substrate in the coating cavity, so as to realize the chasing operation of the substrate. The control module is communicatively connected to the detection elements and the driving mechanism, and is configured to control the driving mechanism to accelerate to the transmission speed when the detection element close to the coating cavity detects that the tail of the previous substrate has left, and control the driving mechanism to decelerate to the process speed when the detection element close to the coating cavity detects the head of the next substrate.

[0007] When the above dynamic coating device is in use, multiple substrates are sequentially fed from the buffer cavity. The first substrate passes through the transition interval at the process speed, and the subsequent substrates chase it. When two adjacent substrates are in a transition interval, the detection element close to the coating cavity sends a signal to the control module when it detects that the tail of the previous substrate has left. The control module controls the corresponding driving mechanism to accelerate to the transmission speed, and the next substrate accelerates and is conveyed in the transition interval at the transmission speed. When the above detection element detects the head of the substrate, it sends a signal to the control module, and the control module controls the driving mechanism to decelerate to the process speed to complete a chasing process. After the next substrate performs multiple chasing strokes, it enters the coating cavity while maintaining a fixed distance from the previous substrate and performs coating operations in the coating cavity. Compared with the single chasing process in the prior art, the above dynamic coating device has a smaller acceleration and transmission speed during the chasing process through multiple chasings, reduces the fragmentation rate of the substrate, improves the product yield, and each acceleration during the multiple chasing processes can shorten the distance between adjacent substrates, so that continuous coating with a distance of less than 20 mm between adjacent substrates can be conveniently and controllably realized, reducing the waste of the target material and improving the process stability of coating and the product yield.

[0008] In one embodiment, along the first direction, the lengths of multiple transition intervals gradually decrease.

[0009] In one embodiment, along the first direction, in two adjacent transition intervals, the transmission speed of the previous transition interval far from the coating cavity is greater than or equal to the transmission speed of the next transition interval close to the coating cavity.

[0010] In one embodiment, the transition cavity includes a first chamber and a second chamber. The first chamber is close to the buffer cavity and is integrally connected to the second chamber along the first direction. At both ends of the first chamber along the first direction, there is a detection element respectively. At least one detection element is arranged in the second chamber, and one detection element is arranged at the end of the second chamber close to the coating cavity along the first direction.

[0011] In one embodiment, the first chamber and the second chamber are of an integral structure, and the length of the transition cavity along the first direction is greater than the substrate.

[0012] In one embodiment, the length of the substrate along the first direction is greater than the second chamber and less than the first chamber, and the first chamber and the second chamber are butted together.

[0013] In one embodiment, the length ratio of the second chamber to the first chamber along the first direction is greater than 0.2.

[0014] In one embodiment, the number of detection elements in the second chamber is less than or equal to 5.

[0015] In one embodiment, the detection element is a sensor or a travel switch.

[0016] In addition, the present invention also provides a dynamic coating method for a dynamic coating device as described in any one of the above technical solutions, including:

[0017] S1. Provide a plurality of substrates, and the plurality of substrates are sequentially fed from the buffer cavity. The first substrate passes through the transition interval at the process speed.

[0018] S2. The control module controls the subsequent substrate to perform a chasing stroke, including the following steps:

[0019] S21. The detection element close to the coating cavity collects the position information of the previous substrate and transmits the position information to the control module when the tail of the previous substrate leaves at the process speed.

[0020] S22. The control module controls the driving mechanism of the transition interval where the previous substrate leaves to accelerate to the transmission speed.

[0021] S23. The above detection element collects the position information of the subsequent substrate and transmits the position information to the control module when the head of the subsequent substrate is detected.

[0022] S24. The control module controls the driving mechanism of the transition interval where the subsequent substrate is located to decelerate to the process speed.

[0023] S3. Repeat step S2. After the subsequent substrate performs multiple chasing strokes, when the fixed distance between the subsequent substrate and the previous substrate is reached, coating operation is carried out in the coating chamber.

[0024] In the above dynamic coating method, first, multiple substrates are provided through step S1. The multiple substrates are sequentially fed into the buffer chamber. The first substrate passes through the transition interval at the process speed, and the subsequent substrates chase after it. Then, when two adjacent substrates are in a transition interval through step S2, the control module controls the subsequent substrate to perform a chasing stroke. In step S21, the detection element near the coating chamber collects the position information of the previous substrate and transmits the position information to the control module when the tail of the previous substrate leaves at the process speed. In step S21, the control module controls the over-drive mechanism to accelerate to the transmission speed, and the subsequent substrate accelerates accordingly and is transmitted in the transition interval at the transmission speed. In step S23, the above detection element collects the position information of the subsequent substrate and transmits the position information to the control module when the head of the subsequent substrate is detected. In step S24, the control module controls the drive mechanism to decelerate to the process speed. Then, through step S3, after the subsequent substrate performs multiple chasing strokes, it enters the coating chamber while maintaining a fixed distance from the previous substrate and coating operation is carried out in the coating chamber. Compared with a single chasing process in the prior art, in the above dynamic coating method, through multiple chasings, the acceleration and transmission speed in the chasing process are smaller, reducing the fragment rate of the substrates and improving the product yield. Moreover, in each acceleration during the multiple chasing processes, the distance between adjacent substrates can be shortened, and thus it is more convenient and controllable to achieve continuous coating with a distance of less than 20 mm between adjacent substrates, reducing the waste of the target material and improving the process stability of coating and the product yield. Description of the Drawings

[0025] Figure 1(a) - Figure 1(f) It is a schematic diagram of the transmission process of the existing dynamic coating device;

[0026] Figure 2 It is a schematic diagram of the structure of the dynamic coating device in an embodiment of the present invention;

[0027] Figure 3 It is a schematic diagram of the structure of the dynamic coating device in another embodiment of the present invention;

[0028] Figure 4(a) - Figure 4(e) It is a schematic diagram of the transmission process of the dynamic coating device in an embodiment of the present invention;

[0029] Figure 5 It is a flowchart of the dynamic coating method of the dynamic coating device in an embodiment of the present invention;

[0030] Reference Signs:

[0031] Prior Art: <>

[0032] 01. Existing dynamic coating device; 011. First buffer chamber; 0111. First detection element; 012. Second buffer chamber; 0121. Second detection element; 013. Transition chamber; 0131. Third detection element; 014. Coating chamber; 0141. Coating source; 015. First valve; 016. Second valve; 017. Third valve;

[0033] 02. First substrate; 03. Second substrate; 04. Third substrate.

[0034] The present invention:

[0035] 10. Dynamic coating device; X. First direction;

[0036] 100. Buffer chamber; 110. First buffer chamber; 120. Second buffer chamber;

[0037] 200. Transition chamber; 210. Detection element; 211. First detection element; 212. Second detection element; 213. Third detection element; 214. Fourth detection element; 215. Fifth detection element; 220. Transition interval; 221. First transition interval; 222. Second transition interval; 223. Third transition interval; 224. Fourth transition interval; 230. First chamber; 240. Second chamber;

[0038] 300. Coating chamber; 310. Coating source;

[0039] 20. Substrate; 21. Previous substrate; 22. Next substrate. Detailed implementation manners

[0040] To make the above objects, features, and advantages of the present invention more apparent and understandable, the following detailed description of the specific implementation manners of the present invention will be made in conjunction with the accompanying drawings. Many specific details are set forth in the following description in order to fully understand the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

[0041] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

[0042] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0043] In the present invention, unless otherwise clearly specified and defined, terms such as "mounted", "connected", "coupled", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal connection or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0044] In the present invention, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0045] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0046] As Figure 1(a) - Figure 1(f)As shown in the figure, the existing dynamic coating device 01 includes a control module, a first buffer chamber 011, a second buffer chamber 012, a transition chamber 013, and a coating chamber 014. A first detection element 0111 is provided at one end of the first buffer chamber 011 away from the coating chamber 014. A second detection element 0121 is provided at one end of the second buffer chamber 012 close to the coating chamber 014. A third detection element 0131 is provided at one end of the transition chamber 013 close to the coating chamber 014, and multiple coating sources 0141 are provided in the coating chamber 014. The specific transmission process of the existing dynamic coating device 01 is as follows: As shown in Figure 1(a), the first substrate 02 is transmitted from the atmosphere side to the first buffer chamber 011, and the first detection element 0111 detects the position information of the first substrate 02. After detecting that the tail of the first substrate 02 enters the first buffer chamber 011, the control module controls the closing of the first valve 015, and evacuates the first buffer chamber 011 to medium vacuum; As shown in Figure 1(b), after the first buffer chamber 011 reaches the set threshold pressure, the position information of the second substrate 03 is detected by the second detection element 0121. After detecting that the second substrate 03 in the second buffer chamber 012 leaves the second buffer chamber 012, the control module controls the opening of the second valve 016; As shown in Figure 1(c), the first substrate 02 is transmitted to the second buffer chamber 012 and the second valve 016 is closed, and the second buffer chamber 012 is evacuated to high vacuum; As shown in Figure 1(d), after the second buffer chamber 012 reaches the set threshold pressure, the position information of the second substrate 03 is detected by the third detection element 0131. After detecting that the second substrate 03 in the transition chamber 013 leaves the transition chamber 013 and enters the coating chamber 014 and runs at a constant process speed, the third valve 017 is opened; As shown in Figure 1(e), the first substrate 02 accelerates to the limit speed and is transmitted to the third buffer chamber to chase the previous second substrate 03. As shown in Figure 1(f), after the third detection element 0131 detects the head information of the first substrate 02, the speed is reduced to the process speed so that the distance between the two substrates is the smallest and they do not touch. The first substrate 02, the second substrate 03, and the third substrate 04 located in the coating chamber 014 are continuously coated forward at the same speed. When the production capacity requirement of the existing dynamic coating device 01 is relatively high, the process speed increases accordingly. However, the upper limit speed of the transition chamber 013 is limited by the transmission stability of the substrate and the mechanical configuration. Generally, the upper limit speed is about 40 m / min. When the process running speed is 4 m / min, assuming that the length of the transition chamber 013 is 2 m, the minimum distance between the trays where the first substrate 02 and the second substrate 03 are located can only be guaranteed to be 200 mm. Obviously, this is completely unacceptable for the general spacing requirement of 20 mm.

[0047] The following introduces the technical solutions provided by the embodiments of the present invention in conjunction with the accompanying drawings.

[0048] As Figure 2 、 Figure 3 、 Figure 4(a) - Figure 4(e)As shown in the figure, the present invention provides a dynamic coating device 10 for continuously coating a plurality of substrates 20. The dynamic coating device 10 includes a control module, a buffer chamber 100, a transition chamber 200, and a coating chamber 300. The buffer chamber 100, the transition chamber 200, and the coating chamber 300 are arranged in sequence along the first direction X, and the first direction X is the moving direction of the substrate 20 in the buffer chamber 100. Among them, the end of the substrate 20 close to the coating chamber is the head of the substrate 20, and the end far from the coating chamber is the tail of the substrate 20. The buffer chamber 100 and the coating chamber 300 adopt the structural forms in the existing dynamic coating device 01, that is, the buffer chamber 100 includes a first buffer chamber 110 and a second buffer chamber 120, and a plurality of coating sources 310 are arranged in the coating chamber 300, without any changes, so no further description will be given here.

[0049] The transition chamber 200 includes at least three detection elements 210, and the number of the detection elements 210 can be three, four, five, six or more than six. In specific settings, the detection element 210 can be a sensor, such as an infrared light sensor, a photoelectric sensor, etc., and the detection element 210 can also be a travel switch, such as a direct-acting travel switch, a roller-type travel switch, etc., so as to conveniently and reliably detect the position of the substrate 20 through simple structural components. Of course, the number and specific structure of the detection element 210 are not limited to this, and it can also be other structural forms that can meet the requirements.

[0050] These detection elements 210 are arranged in sequence along the first direction X. One detection element 210 is arranged close to the buffer chamber 100 for detecting whether the substrate enters the transition chamber, and the remaining detection elements 210 are arranged close to the coating chamber 300 for detecting the information of the substrate 20 to feedback a chasing signal, such as Figure 2As shown, along the first direction X in the transition cavity 200, there are a first detection element 211, a second detection element 212, a third detection element 213, a fourth detection element 214, and a fifth detection element 215. The first detection element 211 is used to detect whether the subsequent substrate 20 has completely entered. The second detection element 212, the third detection element 213, the fourth detection element 214, and the fifth detection element 215 detect information of the substrate 20 and use this information as the judgment information for the substrate 20 to catch up. Two adjacent detection elements 210 define a transition interval 220. In each transition interval 220, there is a driving mechanism. The driving mechanism has an adjustable transmission speed, and the transmission speed is not less than the process speed of the substrate in the coating cavity, so as to realize the catching-up operation between adjacent substrates. When specifically set, the driving mechanism can be a roller-type driving structure or a conveyor belt-type driving structure. The driving mechanism is the structural form in the existing dynamic coating device 01 and has not been changed, so it will not be elaborated here. For example, the process speed is 4 m / min, and the transmission speed is between 4 m / min and 40 m / min. In addition, limited by the transmission stability and mechanical configuration of the substrate 20, the maximum speed of the transmission speed is the limit speed. For example, the limit speed can be 40 m / min.

[0051] There are various ways to set the transition interval 220. In a preferred implementation manner, along the first direction X, the lengths of multiple transition intervals 220 gradually decrease. For example, when the number of detection elements 210 is 5, the number of transition intervals 220 is four, which are the first transition interval 221, the second transition interval 222, the third transition interval 223, and the fourth transition interval 224 in sequence along the first direction X. The length of the first transition interval 221 > the length of the second transition interval 222 > the length of the third transition interval 223 > the length of the fourth transition interval 224. In the above-mentioned dynamic coating device 10, by gradually decreasing the length of the coating interval along the first direction X, the length of the transition cavity 200 can be shortened as much as possible, the space occupied by the transition cavity 200 can be reduced, and thus the cost of the dynamic coating device 10 can be reduced.

[0052] There are various ways to set the transition interval 220. In a preferred implementation, along the first direction X, among two adjacent transition intervals 220, the driving speed of the previous transition interval farther from the coating chamber 300 is greater than that of the latter transition interval closer to the coating chamber 300, or, among two adjacent transition intervals 220, the driving speed of the previous transition interval farther from the coating chamber 300 is equal to that of the latter transition interval closer to the coating chamber 300. Continuing with the above example, the speed of the driving mechanism in the first transition interval 221 ≥ the speed of the driving mechanism in the second transition interval 222 ≥ the speed of the driving mechanism in the third transition interval 223 ≥ the speed of the driving mechanism in the fourth transition interval 224. In the above dynamic coating device 10, by decomposing the ultimate speed after a single acceleration in the prior art into several relatively low chasing speeds, the transmission stability can be significantly improved, and thus the product defect rate can be reduced.

[0053] The control module is communicatively connected to the detection element 210 by means of wires, WiFi, etc. The detection element 210 transmits the position information of the substrate 20 it collects to the control module. The control module is communicatively connected to the driving mechanism by means of wires, WiFi, etc. The control module generates a control signal through internal logical operations based on the received position information of the substrate 20, and controls the driving mechanism to accelerate or decelerate through the control signal. The specific logical operation of the control module is: to control the driving mechanism to accelerate to the transmission speed when the tail of the previous substrate 21 is detected to leave by the detection element 210 closer to the coating chamber 300, and to control the driving mechanism to decelerate to the process speed when the head of the latter substrate 22 is detected by the above detection element 210. In specific settings, the control module can be a PLC or a single-chip microcomputer. The control module can also be integrated in an external control panel. Of course, the structural form of the control module is not limited to this, and it can also be other forms that can meet the requirements.

[0054] When the above dynamic coating device 10 is in use, multiple substrates 20 are sequentially fed from the buffer chamber 100. The first substrate 20 passes through the transition section 220 at the process speed, and the subsequent substrates 20 chase after it. When two adjacent substrates 20 are within a transition section 220, the detection element 210 near the coating chamber 300 sends a signal to the control module when detecting that the tail of the previous substrate 21 leaves. The control module controls the over-drive mechanism to accelerate to the transmission speed, and the subsequent substrate 20 is accelerated accordingly and is transmitted within the transition section 220 at the transmission speed. Moreover, when the detection element 210 detects the head of the substrate 20, it sends a signal to the control module, and the control module controls the drive mechanism to decelerate to the process speed to complete one chasing process. After the subsequent substrate 22 performs multiple chasing strokes, it enters the coating chamber 300 while maintaining a fixed distance from the previous substrate 21 and performs a coating operation in the coating chamber 300. Compared with the single chasing process in the prior art, the above dynamic coating device 10 has a smaller acceleration and transmission speed during the chasing process through multiple chasings, reducing the fragmentation rate of the substrate 20 and improving the product yield. Moreover, during each acceleration in the multiple chasing processes, the distance between adjacent substrates 20 can be shortened, and thus it is more convenient and controllable to achieve continuous coating with a distance of less than 20 mm between adjacent substrates 20, reducing the waste of the target material and improving the process stability of coating and the product yield.

[0055] As Figure 2 , Figure 3 , Figure 4(a) - Figure 4(e) shown, there are various ways to set up the transition chamber 200. In a preferred embodiment, the transition chamber 200 includes a first chamber 230 and a second chamber 240. The first chamber 230 is closer to the buffer chamber 100 than the second chamber 240 in the first direction X. The first chamber 230 and the second chamber 240 are arranged along the first direction X, and the first chamber 230 and the second chamber 240 are connected as a whole.

[0056] Specifically, the first chamber 230 and the second chamber 240 are of an integral structure. The length of the transition chamber 200 along the first direction X is greater than that of the substrate 20. For example, the length ratio of the transition chamber 200 to the substrate 20 can be 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, etc. In the above dynamic coating device 10, by defining the transition chamber 200 as an integral structure, it is convenient to replace the transition chamber 013 of the existing dynamic coating device 01, facilitating preparation and assembly. At the same time, by defining the length of the transition chamber 200, it is convenient to match the existing substrate 20.

[0057] Specifically, along the first direction X, the length of the substrate 20 is greater than that of the second chamber 240 and less than that of the first chamber 230. The first chamber 230 and the second chamber 240 are butted together. For example, the first chamber 230 and the second chamber 240 are directly abutted, or the first chamber 230 and the second chamber 240 are connected together by means of snap connection, concave-convex fitting, etc. In the above dynamic coating device 10, the first chamber 230 can be the transition chamber 013 in the existing dynamic coating device 01. On the basis of the existing transition chamber 013, a second chamber 240 is added between the transition chamber 013 and the coating chamber 014 to save chamber materials, reduce costs, and make the best use of the existing coating chamber 300.

[0058] A detection element 210 is provided at each end of the first chamber 230 along the first direction X, and at least one detection element 210 is provided in the second chamber 240. The specific number of the detection elements 210 can be one, two, three, four or more than four. And one detection element 210 in the second chamber 240 is provided at the end of the second chamber 240 close to the coating chamber 300 along the first direction X. Specifically, only the detection elements 211, 212, and 213 are provided. Among them, the detection element 211 is used to detect whether the substrate 20 completely enters the transition chamber, and the detection elements 212 and 213 are used to detect the information of the substrate 20 and use this information as the judgment information for the substrate 20 to catch up.

[0059] Specifically, along the first direction X, the length ratio of the second chamber 240 to the first chamber 230 is greater than 0.2. For example, the length ratio of the second chamber 240 to the first chamber 230 is 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, etc. In the above dynamic coating device 10, by adjusting the length ratio of the second chamber 240 to the first chamber 230, the acceleration and transmission speed of the transmission mechanism can be controlled, the product fragmentation rate can be reduced, and the product yield can be improved.

[0060] Specifically, the number of the detection elements 210 in the second chamber 240 is less than or equal to 5. The specific number of the detection elements 210 can be one, two, three, four or five, which is convenient for the substrate 20 to catch up in the second chamber 240 and can set the driving mechanism more conveniently and quickly.

[0061] In the above dynamic coating device 10, taking the substrate 20 with a length of 2000 mm, a process running speed of 4 m / min, the first chamber 230 being slightly larger than the length of the substrate 20, the first detection element 211 and the second detection element 212 are provided along the first direction X in the first chamber 230, the third detection element 213, the fourth detection element 214 and the fifth detection element 215 are arranged along the first direction X in the second chamber 240, the length of the second transition interval 222 is 400 mm, the length of the third transition interval 223 is 250 mm, the length of the fourth transition interval 224 is 150 mm, and taking the rough calculation without considering the acceleration and deceleration time as an example to discuss the chasing scheme:

[0062] As shown in Fig. 4(a), the previous substrate 21 is driven in the first chamber 230 at the process running speed. When the tail of the previous substrate 21 passes through the position of the second detection element 212 and leaves the first chamber 230, the control module controls the drive mechanism in the first chamber 230 to accelerate. The subsequent substrate 22 is accelerated by the drive mechanism to 25 m / min for driving; as shown in Fig. 4(b), when the head of the subsequent substrate 22 reaches the position of the second detection element 212, it decelerates to the process running speed and maintains a fixed distance X1 (e.g., about 320 mm) from the tail of the previous substrate 21 and continues to move forward at the process running speed; as shown in Fig. 4(c), when the tail of the previous substrate 21 leaves the third detection element 213, the control module controls the drive mechanism in the second transition interval 222 to accelerate. The subsequent substrate 22 is accelerated again by the drive mechanism to 15 m / min to catch up with the previous substrate 21. When the head of the subsequent substrate 22 reaches the third detection element 213, it decelerates to the process running speed and maintains a fixed distance X2 (e.g., about 85 mm) from the tail of the previous substrate 21; as shown in Fig. 4(d), when the tail of the previous substrate 21 leaves the fourth detection element 214, the control module controls the drive mechanism in the third transition interval 223 to accelerate. The subsequent substrate 22 is accelerated again by the drive mechanism to 10 m / min to catch up with the previous substrate 21. When the head of the subsequent substrate 22 reaches the fourth detection element 214, it decelerates to the process running speed and maintains a fixed distance X3 (e.g., about 34 mm) from the tail of the previous substrate 21; as shown in Fig. 4(e), when the tail of the previous substrate 21 leaves the fifth detection element 215, the control module controls the drive mechanism in the fourth transition interval 224 to accelerate. The subsequent substrate 22 is accelerated again by the drive mechanism to 8 m / min to catch up with the previous substrate 21. When the head of the subsequent substrate 22 reaches the fifth detection element 215, it decelerates to the process running speed and maintains a fixed distance X4 (e.g., about 17 mm), and then enters the coating chamber 300 at a constant speed for coating. The above example shows that four-stage chasing can ensure that the driving speed in each chasing process is relatively small, reduce the fragmentation rate of the substrate 20, improve the product yield, and each acceleration in the multiple chasing processes can shorten the distance between adjacent substrates 20. Furthermore, it can conveniently and controllably achieve continuous coating with a distance of less than 20 mm between adjacent substrates 20, reduce the waste of the target material, and improve the process stability of coating and the product yield.

[0063] In addition, as Figure 4(a) - Figure 4(e) , Figure 5 shown, the present invention also provides a dynamic coating method for the dynamic coating device 10 of any one of the above technical solutions, including:

[0064] S1. Provide a plurality of substrates 20, and the plurality of substrates 20 are sequentially fed from the buffer chamber 100. The first substrate 20 passes through the transition interval 22 from the process speed; specifically, the initial start speed of the drive mechanism in the transition interval 220 is the process speed.

[0065] S2. The control module controls the subsequent substrate 22 to perform a chasing stroke once, including the following steps:

[0066] S21. The detection element 210 near the coating chamber 300 collects the position information of the previous substrate 21 and transmits the position information to the control module when the tail of the previous substrate 21 leaves at the process speed; specifically, when the detection element 210 is a photoelectric sensor, the position information of the substrate 20 can be obtained by whether the light is blocked by the substrate 20 to obtain an electrical signal.

[0067] S22. The control module controls the driving mechanism of the previous substrate 21 leaving the transition interval 220 to accelerate to the transmission speed; specifically, the control module determines whether to change the rotation speed of the driving mechanism according to the electrical signal received by the photoelectric sensor.

[0068] S23. The above detection element 210 collects the position information of the subsequent substrate 22 and transmits the position information to the control module when the head of the subsequent substrate 22 is detected;

[0069] S24. The control module controls the driving mechanism of the subsequent substrate 22 in the transition interval 220 to decelerate to the process speed;

[0070] S3. Repeat step S2. After the subsequent substrate 22 performs multiple chasing strokes, a fixed distance is maintained between the subsequent substrate 22 and the previous substrate 21, and coating operations are performed in the coating chamber 300. Specifically, the chasing process of the subsequent substrate 22 can be two, three or more times.

[0071] In the above dynamic coating method, first, a plurality of substrates 20 are provided through step S1. The plurality of substrates 20 are sequentially fed from the buffer chamber 100. The first substrate 20 passes through the transition interval 220 at the process speed, and the subsequent substrates 20 chase after it. Then, when two adjacent substrates 20 are within a transition interval 220 through step S2, the control module controls the subsequent substrate 22 to perform a chasing stroke once. In step S21, the detection element 210 near the coating chamber 300 collects the position information of the previous substrate 21 and transmits the position information to the control module when the tail of the previous substrate 21 leaves. Specifically, the previous substrate 21 leaves at the process speed. In step S21, the control module controls the over-driving mechanism to accelerate to the transmission speed, and the subsequent substrate 20 accelerates accordingly and is conveyed within the transition interval 220 at the transmission speed. In step S23, the above detection element 210 collects the position information of the subsequent substrate 22 and transmits the position information to the control module when the head of the subsequent substrate 22 is detected. In step S24, the control module controls the driving mechanism to decelerate to the process speed. Then, through step S3, after the subsequent substrate 2 executes multiple chasing strokes, it enters the coating chamber 300 while maintaining a fixed distance from the previous substrate 21 and performs a coating operation in the coating chamber 300. Compared with a single chasing process in the prior art, in the above dynamic coating method, through multiple chasings, the acceleration and transmission speed during the chasing process are smaller, reducing the fragmentation rate of the substrates 20 and improving the product yield. Moreover, during each acceleration in the multiple chasing processes, the distance between adjacent substrates 20 can be shortened, and thus, it is possible to conveniently and controllably achieve continuous coating with a distance of less than 20 mm between adjacent substrates 20, reducing the waste of the target material and improving the process stability of coating and the product yield.

[0072] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered that the scope described in this specification.

[0073] The above embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the invention patent should be subject to the appended claims.

Claims

1. A dynamic coating device for continuously coating multiple substrates, characterized in that: It includes a control module and a buffer chamber, a transition chamber and a coating chamber arranged in sequence along a first direction, a gate valve is provided between the buffer chamber and the transition chamber, wherein: Along the first direction, the length of the transition cavity is greater than that of the substrate; The transition chamber includes at least three detection elements arranged along the first direction, wherein one detection element is arranged near the buffer chamber for detecting whether the substrate has entered the transition chamber, and the remaining detection elements are arranged near the coating chamber for detecting information about the substrate so as to feed back a catch-up signal, and two adjacent detection elements define a transition interval, wherein a driving mechanism is provided within the transition interval, and the driving mechanism has an adjustable transmission speed, and the transmission speed is not less than the process speed of the substrate in the coating chamber, so as to achieve a catch-up operation between adjacent substrates; the transition chamber is provided with a first detection element, a second detection element, and a third detection element along the first direction, wherein the first detection element is used to detect whether the substrate has completely entered the transition chamber, and the second detection element and the third detection element are used to detect information about the substrate, and use the information about the substrate as judgment information for the substrate catch-up; The control module is in communication with the detection element and the drive mechanism; when two adjacent substrates are in one transition zone, the control module is used to control the drive mechanism to accelerate to the transmission speed when the detection element close to the coating chamber detects that the tail of the previous substrate has left, and the next substrate is accelerated accordingly and transported within the transition zone at the transmission speed, and when the detection element detects the head of the next substrate, the control module controls the drive mechanism to decelerate to the process speed to complete a catch-up; After the latter substrate performs multiple catching-up strokes, the coating operation is performed in the coating chamber at a fixed distance between the latter substrate and the former substrate; Along the first direction, in two adjacent transition intervals, the transmission speed of the preceding transition interval away from the coating chamber is greater than or equal to the transmission speed of the succeeding transition interval close to the coating chamber.

2. The dynamic coating device according to claim 1, characterized in that: Along the first direction, the lengths of the plurality of transition intervals gradually decrease.

3. The dynamic coating device according to claim 1, characterized in that: The transition chamber includes a first chamber and a second chamber. The first chamber is close to the buffer chamber and is connected to the second chamber along the first direction as a whole. The first chamber is provided with a detection element at each end along the first direction. The second chamber is provided with at least one detection element, and one detection element is provided at the end of the second chamber close to the coating chamber along the first direction.

4. The dynamic coating device according to claim 3, characterized in that: The first chamber and the second chamber are an integrated structure.

5. The dynamic coating device according to claim 3, characterized in that: The length of the substrate along the first direction is greater than the second cavity and smaller than the first cavity, and the first cavity and the second cavity are connected to form a whole.

6. The dynamic coating device according to claim 3, characterized in that: A length ratio of the second cavity to the first cavity along the first direction is greater than 0.

2.

7. The dynamic coating device according to claim 3, characterized in that: The number of the detection elements in the second chamber is less than or equal to 5.

8. The dynamic coating device according to claim 1, characterized in that: The detection element is a sensor or a travel switch.

9. A dynamic coating method for a dynamic coating device according to any one of claims 1 to 8, characterized in that: include: S1. Multiple substrates are provided and sequentially fed into the buffer chamber, with the first substrate passing through the transition zone at a process speed. S2, the control module controls the next substrate to perform a catch-up stroke, including the following steps: S21, a detection element close to the coating chamber collects position information of the previous substrate and transmits the position information to the control module when the tail of the previous substrate leaves at the process speed; S22, the control module controls the driving mechanism of the transition zone where the previous substrate leaves to accelerate to a transmission speed; S23, the detection element collects the position information of the next substrate to be detected, and transmits the position information to the control module when the head of the next substrate is detected; S24, the control module controls the driving mechanism in the transition zone where the next substrate is located to slow down to the process speed; S3, repeating step S2, after the latter substrate performs multiple catching-up strokes, the coating operation is performed in the coating chamber at a fixed distance between the latter substrate and the former substrate.

Images