A vacuum coating system with low energy consumption and cooling

Abstract

The embodiment of the present invention provides a low-energy cooling and reheating vacuum coating system, which includes: vacuum evaporation coating equipment, which includes a vacuum chamber, and a heated component and a cooled component arranged inside the vacuum chamber; a vortex cooler, which has a cold source end, a heat source end and a compressed air input end, the cold source end is used to output cooling gas to cool the cooled component, and the heat source end is used to output heating gas to heat the heated component. The present invention can significantly reduce the total energy consumption of the equipment system stage operation, and under ideal conditions can achieve zero emissions in the equipment cooling and reheating stage; the introduction of low-temperature airflow accelerates the cooling efficiency of vacuum environment components, improves the efficiency of the production process, and maximizes the effective production operation time of the equipment.

Description

Technical Field

[0001] The present invention relates to the field of vacuum heating and cooling, and belongs to a vacuum coating system with low energy consumption, cooling and reheating, and in particular to a cooling and reheating system in a device cavity after a staged product manufacturing process of a vacuum coating device is completed. Background Art

[0002] At present, conventional batch vacuum coating methods include magnetron sputtering, evaporation, etc., especially for large-area, high-efficiency, ultra-thin substrate coating products, the most common are roll-to-roll magnetron and roll-to-roll evaporation coating equipment systems. One of the key points of the evaporation coating system is the evaporation method used, which usually also includes boat evaporation and crucible evaporation.

[0003] For crucible-type evaporation, related heating electrodes, thermal insulation materials, etc. are usually required to control the temperature rise and insulation of the crucible. Usually, electrode materials and thermal insulation materials show good physical and chemical properties in a vacuum and high-temperature environment, but they cannot come into contact with oxidizing substances in a high-temperature environment. Therefore, after the coating is completed, the crucible, electrode, thermal insulation materials, etc. need to be cooled in a vacuum environment. However, the cooling time of the crucible, electrode, and thermal insulation materials in a vacuum environment is relatively long. In order to ensure the service life of the electrode, crucible, and thermal insulation materials, etc., it is necessary to significantly increase the cooling time so that the ambient temperature can be reduced to a safe temperature range that the relevant materials can accept.

[0004] On the other hand, in particular, in the coating process of some ultra-thin and flexible polymer substrates, in order to avoid the influence of heat radiation / conduction in the evaporation process on the physical properties of the base film material, a low-temperature cold drum is usually designed, and the base film material is wound on the surface of the cold drum for coating, and the relevant temperature reaches about minus 20°C. When the coating is completed and before the cavity is opened, in order to avoid the condensation of water vapor in the atmospheric environment on the surface of the cold drum near minus 20°C, the formation of condensed water affects the vacuum internal space environment and delays the time consumption of subsequent production vacuuming, so the conventional practice is to heat the cooling medium inside the cold drum before opening the cavity, and finally raise the temperature of the cold drum surface to near room temperature.

[0005] In the process of implementing the present invention, the inventors found that there are at least the following problems in the prior art:

[0006] In summary, the reheating of functional components such as the cold drum, as well as the cooling of electrodes and insulation materials, requires a lot of energy, resulting in energy consumption; at the same time, due to the temperature limit of the cooling medium, it is difficult to achieve the cooling purpose or demand of the components that need to be cooled quickly, resulting in an increase in ineffective production time and an increase in production costs. Summary of the invention

[0007] In view of this, an object of an embodiment of the present invention is to provide a vacuum coating system with low energy consumption and cooling to reduce energy consumption and improve production process efficiency.

[0008] To achieve the above objectives, in a first aspect, an embodiment of the present invention provides a low-energy consumption cooling and temperature recovery vacuum coating system, which comprises:

[0009] A vacuum evaporation coating device, comprising a vacuum chamber, and a heated component and a cooled component arranged inside the vacuum chamber;

[0010] The vortex cooler has a cold source end, a hot source end and a compressed air input end. The cold source end is used to output cooling gas to cool the cooled component, and the hot source end is used to output heating gas to heat the heated component.

[0011] Further, the heated component includes: a cooling main roller; the cooled component includes: an evaporation source; the cooling gas and the heating gas are non-oxidizing gases.

[0012] Furthermore, the cold source end is arranged inside or outside the vacuum cavity, and the heat source end is arranged outside the vacuum cavity.

[0013] Furthermore, the system further comprises: a temperature measuring instrument, arranged inside the vacuum chamber, for detecting the temperature value of the cooled component;

[0014] The vortex cooler further comprises: a flow split ratio controller for determining a flow split ratio instruction according to the temperature value of the cooled component, so that the temperature value of the cold source end decreases as the temperature value of the cooled object decreases.

[0015] Furthermore, the vacuum evaporation coating equipment also includes:

[0016] A box body, used to collect the heating gas output from the heat source end and accommodate the first heat exchange pipe section of the coolant circulation pipe, wherein the heating gas heats the coolant in the first heat exchange pipe section to obtain heated coolant;

[0017] A coolant circulation delivery pipe, comprising a first heat exchange pipe section, a second heat exchange pipe section, and an intermediate delivery pipe section connected between the first heat exchange pipe section and the second heat exchange pipe section, wherein the first heat exchange pipe section is accommodated in the box, and the second heat exchange pipe section is in thermal contact with the heated component;

[0018] A circulation pump is arranged on the cooling liquid circulation delivery pipe, and is used to circulate the heated cooling liquid between the first heat exchange pipe section and the second heat exchange pipe section to increase the temperature of the heated component. Furthermore, the vacuum evaporation coating equipment also includes: a vacuum degree detector, which is used to detect the vacuum degree of the vacuum chamber;

[0019] A circulating fan is also provided inside the vacuum cavity and is electrically connected to the vacuum degree detector. The circulating fan is used to start when the vacuum degree reaches a first preset pressure and circulate the internal gas of the vacuum cavity to dissipate heat.

[0020] Furthermore, a safety valve is provided on the cavity wall of the vacuum cavity and is electrically connected to the vacuum degree detector, and is used to open when the inflation pressure reaches a second preset pressure to discharge the hot gas inside the vacuum cavity to take away the heat.

[0021] Furthermore, the vacuum evaporation coating equipment also includes a vacuum pump, which is communicated with the vacuum chamber and electrically connected to the vacuum degree detector, and is used to start the vacuum pump to evacuate air when the pressure inside the vacuum chamber reaches a third preset pressure.

[0022] Further, the heated component includes a cooling main roller;

[0023] The second heat exchange pipe section of the coolant circulation conveying pipe penetrates into the cooling main roller and is in thermal contact with the cooling main roller;

[0024] The heat source end is used to output heating gas to increase the temperature of the cooling main roller so as to return the cooling main roller to a normal temperature state.

[0025] Furthermore, the cold source end is connected to an air outlet pipe, the air outlet pipe has a plurality of air outlets arranged at intervals, and the plurality of air outlets face the cooled component;

[0026] The evaporation source comprises a crucible-type evaporation source, and the evaporation source comprises an electrode, a crucible and a heat-insulating material.

[0027] The above technical solution has the following beneficial effects:

[0028] The beneficial technical effects of the above technical solution of the embodiment of the present invention are:

[0029] In the vacuum coating equipment system of the embodiment of the present invention, a vortex cooling tube is introduced to split the flow to form hot gas and cold gas, the cold gas is used to cool the components that need to be cooled, and the hot gas is used to provide a heat source for the medium that needs to be heated, thereby significantly reducing the total energy consumption of the equipment system during stage operation. In an ideal state, zero emission can be achieved during the equipment cooling and heating stage.

[0030] The embodiment of the present invention accelerates the cooling efficiency of the vacuum environment components by introducing a low-temperature airflow, improves the production process efficiency, and increases the effective production operation time of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0032] Figure 1 This is a principle block diagram of a first low-energy consumption cooling and temperature recovery vacuum coating system according to an embodiment of the present invention;

[0033] Figure 2 It is a principle block diagram of a second low-energy consumption cooling and temperature recovery vacuum coating system according to an embodiment of the present invention;

[0034] Figure 3 This is a principle block diagram of a third low-energy cooling and reheating vacuum coating system according to an embodiment of the present invention.

[0035] Description of Figure Numbers:

[0036] 10. Vacuum evaporation coating equipment; 101. Vacuum chamber; 102. Heated component; 103. Cooled component; 103a. Insulation layer; 103b. Electrode; 103c. Crucible;

[0037] 104, thermometer; 105, box body; 105a, hot air outlet;

[0038] 106, coolant circulation delivery pipe; 106a, first valve; 107, circulation pump;

[0039] 108, vacuum detector; 109, circulation fan; 110, safety valve; 111, vacuum pump; 112, coolant mechanism; 112a, second valve;

[0040] 20. Vortex cooler; 21. Cold source end; 22. Heat source end; 23. Compressed air input end; 24. Air outlet pipe; 25. Air outlet. DETAILED DESCRIPTION

[0041] The features and exemplary embodiments of various aspects of the present invention will be described in detail below. In the detailed description below, many specific details are proposed in order to provide a comprehensive understanding of the present invention. However, it is obvious to those skilled in the art that the present invention can be implemented without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by illustrating examples of the present invention. In the drawings and the following description, at least part of the known structures and technologies are not shown in order to avoid unnecessary ambiguity of the present invention; and, for clarity, the size of some structures may be exaggerated. In addition, the features, structures or characteristics described below may be combined in one or more embodiments in any suitable manner.

[0042] One purpose of the embodiments of the present invention is to solve the problem of low cooling efficiency in a vacuum environment, thereby improving the efficiency of the production process. Another purpose of the embodiments of the present invention is to achieve rapid cooling temperature control in different temperature environments, while being able to significantly enhance the cooling efficiency through contact and convection. Another purpose of the embodiments of the present invention is to reduce the overall energy consumption for vacuum high-temperature heat treatment processes.

[0043] The vacuum coating equipment system mainly involves the rapid cooling of some components inside the vacuum chamber 101 from the completion of coating in a high-temperature environment to the stage of product delivery, and the temperature recovery control of some components, so as to ultimately significantly shorten the ineffective production time during temperature recovery and cooling.

[0044] An embodiment of the present invention provides a system that can reduce energy consumption, shorten cooling time and ensure the service life of the cooled object. The system mainly includes equipment that can realize the conventional winding vacuum evaporation coating function. It forms hot gas and cold gas by introducing vortex cooling tube diversion. The cold gas realizes the cooling of the components that need to be cooled, and the hot gas provides a heat source for the medium that needs to be reheated (heated); the gas is a non-oxidizing gas, such as N2, Ar, etc.

[0045] Figure 1 1 is a principle block diagram of the first low-energy cooling and temperature-recovery vacuum coating system according to an embodiment of the present invention. Figure 1 As shown, the low-energy cooling and reheating vacuum coating system comprises: a vacuum evaporation coating device 10, which comprises a vacuum chamber 101, and a heated component 102 and a cooled component 103 arranged inside the vacuum chamber 101; a vortex cooler 20, which comprises a cold source end 21, a hot source end 22 and a compressed air input end 23, wherein the cold source end 21 is used to output cooling gas to cool the cooled component 103, and the hot source end 22 is used to output heating gas to heat the heated component 102. The low-energy cooling and reheating vacuum coating system reduces the cooling energy consumption and the reheating and heating energy consumption by cooling or heating the high and low temperature areas.

[0046] In some embodiments, the heated component 102 may include: a cooling main roller; the cooled component 103 may include: an evaporation source; the cooling gas and the heating gas are non-oxidizing gases. The non-oxidizing gas used for vortex flow diversion may be a high-purity N2 atmosphere.

[0047] In some embodiments, the cold source end 21 is disposed inside or outside the vacuum chamber 101, and the heat source end 22 is disposed outside the vacuum chamber 101. The cold source end 21 of the vortex cooling tube is disposed inside the chamber, which is beneficial to avoid the formation of condensed water, etc., and the heat source end 22 of the vortex cooling tube can be outside the chamber. In other embodiments, the vortex cooling tube can be disposed outside the vacuum chamber.

[0048] In some embodiments, the system further includes: a temperature meter 104, which is arranged inside the vacuum chamber 101 and is used to detect the temperature value of the cooled component 103; the vortex cooler 20 further includes: a shunt ratio controller, which is used to determine the shunt ratio instruction according to the temperature value of the cooled component 103, so that the temperature value of the cold source end 21 decreases as the temperature value of the cooled object decreases. In this embodiment, a vortex cooling tube with a shunt ratio that can be adjusted in real time is adopted, so that the cooling airflow and the heating airflow can be adjusted in real time as the temperature of the cooled component in the vacuum chamber 101 changes. The vortex cooling tube has an automatic adjustment function of the shunt ratio or flow rate, and can provide vortex shunt instructions through the temperature monitoring data of the cooled component, so as to provide a cooling gas source with a lower temperature as the temperature of the cooled component 103 decreases.

[0049] Figure 2 1 is a schematic diagram of a second low-energy cooling and temperature-recovery vacuum coating system according to an embodiment of the present invention. Figure 2As shown, in some embodiments, the vacuum evaporation coating equipment 10 also includes: a box 105, which is used to collect the heating gas output from the heat source end 22 and accommodate the first heat exchange pipe section of the coolant circulation conveying pipe 106, and the heating gas heats the coolant in the first heat exchange pipe section to obtain the heated coolant; the coolant circulation conveying pipe 106 has a first heat exchange pipe section, a second heat exchange pipe section and an intermediate conveying pipe section connected between the first heat exchange pipe section and the second heat exchange pipe section, the first heat exchange pipe section is accommodated in the box 105, and the second heat exchange pipe section is in thermal contact with the heated component 102; a circulating pump 107 is arranged on the coolant circulation conveying pipe 106, and is used to circulate the heated coolant between the first heat exchange pipe section and the second heat exchange pipe section to increase the temperature of the heated component 102. The advantage of this solution is that the heat source gas exchanges heat with the coolant in the box 105, and the temperature of the component that needs to be heated up (heated) is increased through circulation. In a further embodiment, the box 105 is also provided with a hot gas outlet 105a. Furthermore, the first heat exchange pipe section is arranged in a tortuous manner or bent multiple times in the box 105 to increase the heating area and improve the heat exchange efficiency.

[0050] In some embodiments, the vacuum evaporation coating device 10 further includes: a vacuum detector 108 for detecting the vacuum degree of the vacuum chamber 101; a circulating fan 109 is also provided inside the vacuum chamber 101, which is electrically connected to the vacuum detector 108 and is used to start when the vacuum degree reaches a first preset pressure, and circulate the internal gas of the vacuum chamber 101 to dissipate heat. The advantage of this technical solution is that by arranging the circulating fan 109 inside the chamber, when the vacuum degree reaches a certain pressure (for example, 0.05MPa, the circulating gas in the chamber is started, which is conducive to accelerating the circulation of the gas to achieve heat dissipation in a larger range through the outer wall of the chamber.

[0051] In some embodiments, a safety valve 110 is further provided on the cavity wall of the vacuum cavity 101, and the vacuum detector 108 is electrically connected, and is used to open when the inflation pressure reaches the second preset pressure, and to exhaust the hot gas inside the vacuum cavity 101 to take away the heat. In an exemplary example, a safety valve 110 is also set on the cavity wall, and when the inflation pressure reaches 0.11 MPa or above, the heat source gas inside the cavity is exhausted through the safety valve 110 to take away the heat.

[0052] In some embodiments, the vacuum evaporation coating device 10 further includes a vacuum pump 111, which is connected to the vacuum chamber 101 and is electrically connected to the vacuum detector 108, and is used to start the vacuum pump 111 to evacuate air when the pressure inside the vacuum chamber 101 reaches a third preset pressure. In an exemplary example, when the pressure inside the chamber reaches a certain value, such as 0.06MPa, the vacuum pump 111 can be started to evacuate air to accelerate the emptying of the internal heat source gas to take away the heat, or the vacuum pump 111 is continuously turned on.

[0053] In other embodiments, the circulation fan 109, the safety valve 110, and the vacuum pump 111 may be electrically connected to the vacuum detector 108 via a master controller, which receives the pressure data (vacuum degree) detected by the vacuum detector 108, and sends a corresponding control signal or instruction based on the detected pressure data to control the circulation fan 109 to start, or control the safety valve 110 to open to exhaust the hot gas inside the vacuum chamber 101 to take away the heat, or control the vacuum pump 111 to start for exhausting air.

[0054] In some embodiments, the heated component 102 includes a cooling main roller; the second heat exchange pipe section of the cooling liquid circulation conveying pipe 106 penetrates the cooling main roller and is in thermal contact with the cooling main roller; the heat source end 22 is used to output heating gas to heat the cooling main roller so that the cooling main roller returns to a normal temperature state. Furthermore, a temperature detector can be set on the cooling liquid circulation conveying pipe 106 or the cooling main roller to detect the temperature value of the cooling main roller to determine whether the cooling main roller returns to a normal temperature state.

[0055] In some embodiments, the cold source end 21 is connected to an air outlet pipe 24, which has multiple air outlets 25 arranged at intervals, and the multiple air outlets 25 are facing the cooled component 103; the evaporation source includes a crucible 103c type evaporation source, and the evaporation source includes an electrode 103b, a crucible 103c and an insulation material.

[0056] Figure 3 1 is a schematic diagram of a third low-energy cooling and temperature-recovery vacuum coating system according to an embodiment of the present invention. Figure 3 As shown, in some embodiments, a first valve 106a is further provided on the coolant circulation pipe 106; the system further comprises a coolant mechanism 112, which is connected to the coolant circulation pipe 106 via a connecting pipe, and a second valve 112a is provided on the connecting pipe. The provision of the coolant mechanism 112 is conducive to cooling the coating main roller.

[0057] The technical solution of the embodiment of the present invention is described in more detail below:

[0058] like Figures 1 to 3As shown, the system is a vacuum coating system with a common winding and evaporation flexible base film material, which also includes a cavity wall-mounted eddy current cooling tube, an inner wall circulation fan 109, a high-pressure exhaust valve, a cooled component 103, a thermometer 104, a vacuum degree measuring instrument and a vacuum pump 111 system.

[0059] This embodiment describes a system for depositing a metal thin film on the surface of a polymer base film by using a crucible 103c type thermal evaporation method, wherein the evaporation source system is a structure formed by using an electrode 103b, a heat-insulating material 103a and a crucible 103c, and the evaporation source system can be used for evaporation coating of various materials such as metals, organic matter, compounds, non-metals, etc. The temperature near the evaporation source can be as high as thousands of degrees Celsius, so the insulation of the evaporation source in the high temperature environment and the cooling of the joint of the sealing components are crucial, especially in terms of insulation, efforts should be made to prevent heat loss.

[0060] On the contrary, after the coating process is completed, it becomes more difficult for the heating element or the heated component 102 to be quickly cooled down in a non-oxidizing atmosphere. The embodiment of the present invention adopts a vortex cooling tube to provide a non-oxidizing gas source cooling medium with a variable temperature for rapid cooling of the components that need to be quickly cooled down.

[0061] For example, this embodiment is used for evaporating Al film on the surface of polymer substrate. After the process is completed, the temperature of the electrode 103b of the relevant evaporation source is as high as 1500°C, and there is also insulation protection of thermal insulation materials. In this embodiment of the present invention, a vortex cooling tube is designed on the cavity wall. One end of the cold source enters the thermal insulation material area in contact with the electrode 103b, and the other end of the heat source enters the outside of the cavity to exchange heat with the medium that needs to be heated. After heat exchange, it can be directly discharged into the atmosphere. The medium heated by the heat source air is injected into the vacuum cavity 101 through the circulation pump 107 to warm the cold drum of the polymer material, so as to improve the control requirement of the cold drum before the vacuum cavity 101 is opened from the common -20°C to the room temperature. One end of the cold source gas provides low-temperature gas to take away the heat of the thermal insulation material, the electrode 103b and the crucible 103c by blowing, thereby quickly reducing the temperature. The cooling gas enters the vacuum chamber 101 through blowing, and the internal pressure will gradually increase. When the pressure increases to a certain level, such as 0.05MPa, the circulation fan 109 starts to circulate the air flow inside the vacuum chamber 101. The internal temperature is uniformed through circulation, and the heat is dissipated through a larger area of ​​the chamber wall, providing heat exchange capabilities.

[0062] Furthermore, as the cooling gas continues to enter, the internal pressure continues to increase. When the pressure reaches 0.11 MPa, the pressure valve (air-breaking valve) on the top of the equipment opens to exhaust, and the high-temperature gas after heat exchange in the cooled component is automatically discharged through the pressure valve nozzle. The cooled component 103 is continuously cooled under the blowing of the cooling gas source, and the gas in the vacuum chamber 101 is continuously replaced and discharged, thereby achieving a temperature reduction.

[0063] Among them, the vortex cooling tube also has a significant feature, that is, it can adjust the cold source / hot source gas diversion ratio or different temperatures. When the cooled component 103 is still in a high temperature state, such as 1500°C, the cold source gas ratio is at the maximum and close to 100%. The purpose of this is to achieve gradual cooling to avoid rapid cooling and damage to the cooled component 103, such as the crucible 103c, the electrode 103b and the insulation material; when the measured temperature of the cooled component is lowered, the cooling airflow ratio is gradually reduced, thereby further reducing the temperature of the cold source gas so that it can take away more heat. The following examples are explained:

[0064] When the current temperature value of the cooled component 103 is 1200° C., the temperature value of the cold source airflow can be reduced to 5° C.;

[0065] When the current temperature value of the cooled component 103 is 800°C, the temperature value of the cold source airflow can be reduced to -5°C;

[0066] When the current temperature value of the cooled component 103 is 600°C, the temperature of the cold source airflow can be reduced to -15°C;

[0067] In general, the vortex cooling tube can divert the proportion of the cold source airflow as the temperature of the cooled component 103 decreases, and simultaneously adjust the lower temperature to speed up the cooling of the cooled component 103.

[0068] In comparison, the actual cooling temperature control needs to be combined with the type of cooling medium inside the vacuum chamber 101 to avoid condensation of the original cooling medium due to too low cooling source airflow at the contact position with other liquid cooling medium, causing other unnecessary troubles. For example, if the other cooling medium is water, the temperature control of the cooling source airflow is generally higher than 0°C, such as 5°C;

[0069] The verification of the contrast effect in this embodiment is divided into three cases:

[0070] Case 1: Natural cooling of the vacuum chamber 101, i.e. cooling by the original cooling medium;

[0071] Case 2: N2 blowing at normal temperature is set near the cooled component 103;

[0072] Case 3: A cooling source gas N2 is blown through a vortex cooling tube near the cooled component 103;

[0073] The time and relative energy consumption for the above to finally reduce to 300°C;

[0074] Cooling time: 155 minutes for case 1; 74 minutes for case 2; 35 minutes for case 3;

[0075] Relative energy consumption: 45kw for case 1; 30kw for case 2; 10kw for case 3 (because the vortex cooling tube diverts the heat source gas for heating, it reduces the energy required for normal electric heating and shortens the energy consumption of cooling in the auxiliary system of the whole equipment.

[0076] The working process of the above-mentioned low energy consumption cooling and temperature recovery vacuum coating system is as follows:

[0077] After stopping the coating, the electrode 103b and the crucible 103c need to be cooled, and the cold drum needs to be warmed up. When in use, the compressed gas is passed into the vortex cooler 20, and cold air is discharged from one end of the vortex cooler 20, and hot air is discharged from the other end. The cold air cools the components that need to be cooled, such as the insulation layer 103a, the electrode 103b and the crucible 103c. The cold air pipe can pass through the insulation layer 103a to directly blow the electrode 103b for cooling. After the hot air enters the box, the coolant is heated and transported to the components that need to be warmed up or heated, such as the cold drum, through the circulating pump 107. The coolant delivery pipe penetrates the cold drum to warm it up. In this embodiment, the first valve 106a is closed and the second valve 112a is opened to achieve refrigeration of the cold drum.

[0078] The beneficial technical effects of the above technical solution of the embodiment of the present invention are:

[0079] 1. Significantly reduce the total energy consumption of the equipment system during operation. Ideally, zero emissions can be achieved during the equipment cooling and temperature recovery stage;

[0080] 2. Accelerate the cooling efficiency of vacuum environment components by introducing low-temperature airflow, improve production process efficiency, and maximize the effective production operation time of equipment;

[0081] 3. Based on the outlet temperature of the adjustable vortex cooling tube, in particular, the temperature of the cooling airflow portion decreases as the temperature of the cooled component 103 decreases. This process can provide the cooled component 103 with the material thermal characteristics of the appropriate cooling process, thereby achieving the effect of protecting the cooled component 103.

[0082] In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "upper, lower, inner and outer" are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first, second or third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0083] In the present invention, unless otherwise clearly specified and limited, the terms "install, connect, connect" should be understood in a broad sense, for example: it can be a fixed connection, a detachable connection or an integral connection; it can also be a mechanical connection, an electrical connection or a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0084] Although the present invention has been described with reference to preferred embodiments, various modifications may be made thereto and parts thereof may be replaced by equivalents without departing from the scope of the present invention. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there are no structural conflicts. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A low energy consumption cooling and temperature recovery vacuum coating system, characterized in that: include: A vacuum evaporation coating device (10), comprising a vacuum chamber (101), and a heated component (102) and a cooled component (103) arranged inside the vacuum chamber (101); A vortex cooler (20), comprising a cold source end (21), a hot source end (22) and a compressed air input end (23), wherein the cold source end (21) is used to output cooling gas to cool the cooled component (103), and the hot source end (22) is used to output heating gas to heat the heated component (102); The heated component (102) comprises: a cooling main roller; the cooled component (103) comprises: an evaporation source; the cooling gas and the heating gas are non-oxidizing gases; The system further comprises: a temperature measuring instrument (104), arranged inside the vacuum chamber (101) and used for detecting the temperature value of the cooled component (103); The vortex cooler (20) further comprises: a flow split ratio controller, which is used to determine a flow split ratio instruction according to the temperature value of the cooled component (103), so that the temperature value of the cold source end (21) decreases as the temperature value of the cooled component (103) decreases.

2. The system according to claim 1, characterized in that The cold source end (21) is arranged inside or outside the vacuum cavity (101), and the hot source end (22) is arranged outside the vacuum cavity (101).

3. The system according to claim 1, characterized in that The vacuum evaporation coating device (10) further comprises: a box (105) for collecting the heating gas output from the heat source end (22) and accommodating a first heat exchange pipe section of the coolant circulation delivery pipe (106), wherein the heating gas heats the coolant in the first heat exchange pipe section to obtain heated coolant; a coolant circulation delivery pipe (106) comprising a first heat exchange pipe section, a second heat exchange pipe section, and an intermediate delivery pipe section connected between the first heat exchange pipe section and the second heat exchange pipe section, the first heat exchange pipe section being accommodated in the box (105), and the second heat exchange pipe section being in thermal contact with the heated component (102); A circulation pump (107) is arranged on the coolant circulation delivery pipe (106) and is used to circulate the heated coolant between the first heat exchange pipe section and the second heat exchange pipe section to increase the temperature of the heated component (102).

4. The system according to claim 1, characterized in that The vacuum evaporation coating device (10) further comprises: a vacuum degree detector (108) for detecting the vacuum degree of the vacuum cavity (101); A circulating fan (109) is also provided inside the vacuum cavity (101), which is electrically connected to the vacuum degree detector (108) and is used to start when the vacuum degree reaches a first preset pressure, and circulate the internal gas of the vacuum cavity (101) to dissipate heat.

5. The system according to claim 4, characterized in that A safety valve (110) is also provided on the cavity wall of the vacuum cavity (101), which is electrically connected to the vacuum degree detector (108) and is used to open when the inflation pressure reaches a second preset pressure, thereby exhausting the hot gas inside the vacuum cavity (101) to remove the heat.

6. The system according to claim 5, characterized in that The vacuum evaporation coating device (10) further comprises a vacuum pump (111), which is in communication with the vacuum chamber (101) and is electrically connected to the vacuum degree detector (108), and is used to start the vacuum pump (111) to evacuate air when the pressure inside the vacuum chamber (101) reaches a third preset pressure.

7. The system according to claim 3, characterized in that The heated component (102) comprises a cooling main roller; The second heat exchange pipe section of the cooling liquid circulation conveying pipe (106) penetrates into the cooling main roller and is in thermal contact with the cooling main roller; The heat source end (22) is used to output heating gas to increase the temperature of the cooling main roller, so that the cooling main roller returns to a normal temperature state.

8. The system according to claim 1, characterized in that The cold source end (21) is connected to an air outlet pipe (24), the air outlet pipe (24) having a plurality of air outlets (25) arranged at intervals, the plurality of air outlets (25) facing the cooled component (103); The evaporation source comprises a crucible (103c) type evaporation source, and the evaporation source comprises an electrode (103b), a crucible (103c) and a heat-insulating material.

Images