Coating for cutting tools, high wear-resistant and long-life coating cutting tools applicable to a wide temperature range and preparation method thereof

Abstract

The present invention provides a coating for a tool, a high wear-resistant and long-life coating tool suitable for a wide temperature range and a preparation method thereof. The coating tool comprises a substrate and a double-layer coating deposited on the surface of the substrate by a reactive magnetron sputtering method, comprising a Ti coating of an inner sub-coating and a Ti coating of an outer sub-coating. a Nb b Hf c W d N coating, where a+b+c+d=1, 0≤a≤0.34, 0

Description

Technical Field

[0001] The present invention relates to the technical field of tool preparation, and in particular to a coating for a tool, a highly wear-resistant and long-life coating tool applicable to a wide temperature range, and a preparation method thereof. Background Art

[0002] Modern manufacturing industry has put forward a series of stringent requirements on the machining accuracy and surface quality of mechanical parts. Generally, the machining surface of high-performance parts is required to reach sub-nanometer surface roughness and nanometer flatness, and the surface / sub-surface is free of damage, but traditional cutting equipment and machining tools are difficult to meet such requirements. The demand for high-speed and high-precision dry cutting is increasing. During high-speed dry cutting, the local temperature of the tool exceeds 1000℃, so the tool is required to have good high-temperature oxidation resistance and wear resistance. Depositing a hard coating on the tool surface can effectively extend the tool life and improve the machining quality, which is a commonly used tool strengthening method.

[0003] Commonly used coated tools include TiN tools, TiAlN tools, etc. However, due to the poor thermal stability of TiN coating, the application scope of TiN tools is greatly limited. On the one hand, TiAlN tools undergo strip decomposition at high temperatures, which strengthens the mechanical properties of the coating; on the other hand, they are challenged by poor performance after long-term use. In addition, TiAlN coatings also face many problems such as difficult to control Al content, high internal stress in the coating, and low bonding strength.

[0004] Therefore, it is necessary to develop new types of highly wear-resistant and long-life coated tools suitable for a wide temperature range. For alloy materials, adding early transition metal elements such as Nb and W can effectively improve the high-temperature mechanical properties of alloy materials. In the TiN system, elements such as Nb and W have similar chemical properties to the Ti element and can form face-centered cubic crystals Fcc with N. Adding them to TiN can replace some Ti atoms in the crystal, increase the configuration entropy of the system, and thus increase its thermal stability. At present, there are no reports on the application of TiNbHfWN coating systems in cutting tools. The present invention provides a new method for using TiNbHfWN coatings as tool protective coatings. Summary of the invention

[0005] According to the above-mentioned TiN coating, the thermal stability is poor, which greatly limits the application scope of TiN tools; TiAlN tools are challenged by poor performance after long-term use, and TiAlN coatings also face technical problems such as difficult to control Al content, large internal stress in the coating, and low bonding strength. A coating for tools, a high wear-resistant and long-life coating tool suitable for a wide temperature range, and a preparation method thereof are provided. The present invention mainly adopts a reactive magnetron sputtering method to coat the inner layer sub-coating with Ti and the outer layer sub-coating with Ti. a Nb b Hfc W d The N coating is deposited on the surface of the substrate to prepare a coated tool.

[0006] The technical means adopted by the present invention are as follows:

[0007] A coating for a tool, comprising a double-layer coating deposited on the surface of a substrate of the tool, wherein the double-layer coating comprises an inner sub-coating and an outer sub-coating arranged in sequence from the inside to the outside, wherein the inner sub-coating is a Ti coating, and the outer sub-coating is a Ti a Nb b Hf c W d N coating, where a+b+c+d=1, 0≤a≤0.34, 0 <b≤0.34,0<c≤0.34,0<d≤0.34。

[0008] Furthermore, the outer sub-coating is a single-phase face-centered cubic structure Fcc-TiN, Ti, Nb, Hf, W and other atoms occupy the face center positions in the Fcc crystal and can replace each other, and N atoms occupy the vertex positions in the Fcc crystal.

[0009] Furthermore, the outer sub-coating is one of TiNbN, TiHfN, TiWN, TiNbHfN, TiNbWN, TiHfWN or TiNbHfWN, and the thickness of the outer sub-coating is 0.5 to 6.5 μm.

[0010] Furthermore, the outer sub-coating layer is TiNbWN.

[0011] Furthermore, the thickness of the outer sub-coating layer is 1.5 to 3.5 μm.

[0012] Furthermore, the inner sub-coating layer is a single-phase close-packed hexagonal structure hcp-Ti, and the thickness of the inner sub-coating layer is 0.1 to 1.5 μm.

[0013] Furthermore, the thickness of the inner sub-coating layer is 0.2-1.0 μm.

[0014] The present invention also provides a highly wear-resistant and long-life coated tool applicable to a wide temperature range, comprising the above-mentioned coating and a substrate, wherein the coating is arranged on the substrate.

[0015] The present invention also provides a method for preparing a highly wear-resistant and long-life coated tool applicable to a wide temperature range. The method adopts a reactive magnetron sputtering method, uses a Ti target and an alloy target, and deposits a coating of a set thickness on the surface of an etched tool substrate to obtain a coated tool; the alloy target is one of a NbW target, a NbHf target, a HfW target or a NbHfW target.

[0016] Furthermore, the method specifically includes the following steps:

[0017] S1. Inert gas is introduced into the cavity, the bias voltage range is set to -500 to -150 V, and the surface of the tool substrate is etched for a set time, and the etching time is 2 to 30 minutes;

[0018] S2. Inert gas is introduced into the chamber, the gas flow rate is maintained between 10 and 100 sccm, the vacuum degree of the chamber is maintained between 0.05 and 1.5 Pa, a DC voltage is applied to the Ti target, the loading power is 50 to 450 W, an inner layer sub-coating is deposited on the substrate, and the deposition time is controlled to be 5 to 150 min;

[0019] S3, introducing inert gas and nitrogen into the chamber, the ratio of nitrogen is set to 10-85%, the total gas flow rate is maintained between 10-100 sccm, the vacuum degree of the chamber is maintained between 0.05-1.5 Pa, a DC voltage is applied to the Ti target, the loading power is 50-450 W, and a medium frequency voltage is applied to the alloy target, the loading power is 50-450 W, the duty cycle is 10-80%, and an outer sub-coating is deposited, and the deposition time is controlled to be 5 min to 500 min;

[0020] S4. Heat the substrate after depositing the double-layer coating to 200-600°C in the cavity and keep it warm for 10-300 minutes to obtain a highly wear-resistant and long-life coated tool suitable for a wide temperature range.

[0021] Compared with the prior art, the present invention has the following advantages:

[0022] 1. The coating for cutting tools provided by the present invention, the high wear-resistant and long-life coating cutting tools applicable to a wide temperature range and the preparation method thereof, the obtained coating cutting tools have good wear resistance and service life between 25 and 800°C. The outer sub-coating has excellent comprehensive mechanical properties through the solid solution strengthening effect, and the inner Ti coating is used to improve the bonding strength of the coated cutting tools.

[0023] 2. The coating for cutting tools provided by the present invention, the highly wear-resistant and long-life coated cutting tools applicable to a wide temperature range and the preparation method thereof, the obtained coated cutting tools have good thermal stability. This is because TiNbHfWN can form a single-phase solid solution, and Ti, Nb, Hf and W are all metal elements with relatively high melting points.

[0024] 3. The coating for cutting tools provided by the present invention, the highly wear-resistant and long-life coated cutting tools applicable to a wide temperature range and the preparation method thereof, the obtained coated cutting tools can protect the cutting edges from wear, thereby ensuring the machining surface quality of the workpiece during a long working cycle.

[0025] In summary, the application of the technical solution of the present invention can solve the problem that the thermal stability of the TiN coating in the prior art is poor, which greatly limits the scope of application of TiN tools; TiAlN tools are challenged by poor performance after long-term use, and the TiAlN coating also faces the problems of difficult to control Al content, high internal stress in the coating, and low bonding strength.

[0026] Based on the above reasons, the present invention can be widely promoted in the fields of tool preparation and the like. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0028] Figure 1 This is a schematic diagram of the coating structure of a highly wear-resistant and long-life coated tool applicable to a wide temperature range according to an embodiment of the present invention.

[0029] Figure 2 Flank wear of coated cutting tools prepared according to one or more embodiments of the present invention varies with cutting length.

[0030] In the figure: 1, substrate; 2, inner sub-coating; 3, outer sub-coating. DETAILED DESCRIPTION

[0031] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0032] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0034] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, the numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be clear that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be regarded as part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0035] As shown in the figure, the present invention provides a highly wear-resistant and long-life coated tool suitable for a wide temperature range, comprising a substrate and a coating deposited on the surface of the substrate by a reactive magnetron sputtering method, wherein the coating is a double-layer coating, comprising: a Ti coating of an inner sub-coating and a Ti coating of an outer sub-coating. a Nb b Hf c W d N coating (a+b+c+d=1,0≤a≤0.34,0 <b≤0.34,0<c≤0.34,0<d≤0.34)。

[0036] As a preferred embodiment, the outer sub-coating of the double-layer coated tool is a single-phase cubic structure Fcc-TiN, in which Ti, Nb, Hf, W and other atoms occupy the face-center positions in the Fcc crystal and can replace each other, and N atoms occupy the vertex positions in the Fcc crystal.

[0037] As a preferred embodiment, the outer sub-coating of the double-layer coated tool is one of TiNbN, TiHfN, TiWN, TiNbHfN, TiNbWN, TiHfWN, TiNbHfWN, preferably TiNbWN, and the thickness of the outer sub-coating is 0.5-6.5 μm, preferably 1.5-3.5 μm.

[0038] As a preferred embodiment, the inner sub-coating of the double-layer coated tool is a single-phase close-packed hexagonal structure hcp-Ti, and the thickness of the inner sub-coating is 0.1 to 1.5 μm, preferably 0.2 to 1.0 μm.

[0039] The present invention also provides a method for preparing the above-mentioned double-layer coated tool, comprising the steps of:

[0040] A coating of a set thickness is deposited on the etched surface of a tool substrate by a reactive magnetron sputtering method using a Ti target and an alloy target to obtain a coated tool; the alloy target is one of a NbW target, a NbHf target, a HfW target, and a NbHfW target.

[0041] The specific steps include:

[0042] (1) Inert gas is introduced into a cavity (not shown in the figure, which is the prior art), the bias voltage range is set to -500 to -150 V, and the surface of the tool substrate is etched for a set time, and the etching time is 2 to 30 minutes;

[0043] (2) introducing an inert gas into the chamber, maintaining the gas flow rate between 10 and 100 sccm, maintaining the vacuum degree of the chamber between 0.05 and 1.5 Pa, applying a DC voltage to the Ti target, the loading power is 50 to 450 W, depositing an inner layer sub-coating on the substrate, and controlling the deposition time to be 5 min to 150 min;

[0044] (3) Inert gas and nitrogen are introduced into the chamber, the ratio of nitrogen is set to 10-85%, the total gas flow rate is maintained between 10-100 sccm, the vacuum degree of the chamber is maintained between 0.05-1.5 Pa, a DC voltage is applied to the Ti target, the loading power is 50-450 W, and a medium frequency voltage is applied to the alloy target, the loading power is 50-450 W, the duty cycle is 10-80%, and the outer sub-coating is deposited, and the deposition time is controlled to be 5-500 min;

[0045] (4) The substrate is heated to 200-600°C in the cavity and kept warm for 10-300 minutes, thereby obtaining a highly wear-resistant and long-life coated tool suitable for a wide temperature range.

[0046] Example 1

[0047] like Figure 1 As shown, embodiment 1 of the present invention is a highly wear-resistant and long-life coated tool applicable to a wide temperature range, comprising a substrate 1, an inner sub-coating 2 and an outer sub-coating 3.

[0048] The substrate 1 can be made of one of materials such as cemented carbide, high-speed steel, diamond, etc.

[0049] In this embodiment, the outer sub-coating can be made of Ti of the general formulaa Nb b W d N represents, where a + b + d = 1, 0 ≤ a ≤ 0.34, 0 < b ≤ 0.34, 0 < d ≤ 0.34. The outer sub - coating is a single - phase face - centered cubic crystal structure Fcc - TiN. Ti, Nb, and W atoms occupy the face - centered positions, while N atoms occupy the vertex positions, and Ti, Nb, and W atoms can be interchanged with each other. The thickness of the outer sub - coating is designed to be 2.5 μm.

[0050] In this embodiment, the inner sub - coating is a single - phase hexagonal close - packed structure hcp - Ti, and the thickness of the inner sub - coating is 0.2 μm.

[0051] Embodiment 1 of the present invention provides a method for preparing a double - layer coated tool, comprising the following steps:

[0052] S1: Use a Ti target and a NbW alloy target to deposit a coating with a set thickness on the surface of the etched tool substrate by reactive magnetron sputtering.

[0053] S2: Introduce an inert gas into the cavity, set the bias voltage to - 350V, and perform surface etching on the tool substrate for a set time. The etching time is 12 min.

[0054] S3: Introduce an inert gas into the cavity, keep the gas flow rate between 35 sccm, maintain the vacuum degree of the cavity at 0.75 Pa, apply a DC voltage on the Ti target, with a loading power of 320W, deposit the inner sub - coating, and control the deposition time to be 23 min.

[0055] S4: Introduce an inert gas and nitrogen into the cavity, set the proportion of nitrogen to 35%, keep the total gas flow rate at 52 sccm, maintain the vacuum degree of the cavity between 0.42 Pa, apply a DC voltage on the Ti target, with a loading power of 320W, apply an intermediate - frequency voltage on the NbW alloy target, with a loading power of 360W, and a duty cycle of 30%, deposit the outer sub - coating, and control the deposition time to be 310 min.

[0056] S5: Heat the substrate to 405 °C in the cavity and keep it warm for 180 min to obtain the coated tool.

[0057] Embodiment 2

[0058] Different from Embodiment 1, in this embodiment, the outer sub - coating can use Ti of the general formula a Nb b Hf c W dN represents, where a + b + c + d = 1, 0 ≤ a ≤ 0.34, 0 < b ≤ 0.34, 0 < c ≤ 0.34, 0 < d ≤ 0.34. The outer sub - coating is a single - phase face - centered cubic crystal structure Fcc - TiN. Ti, Nb, Hf, and W atoms occupy the face - centered positions, while N atoms occupy the vertex positions, and the Ti, Nb, Hf, and W atoms can be interchanged with each other. The thickness of the outer sub - coating is designed to be 3.2 μm.

[0059] In this embodiment, the inner sub - coating is a single - phase hexagonal close - packed structure hcp - Ti, and the thickness of the inner sub - coating is 0.34 μm.

[0060] Embodiment 2 of the present invention is a method for preparing a double - layer coated tool, which includes the following steps:

[0061] S1: Use a Ti target and an HfNbW alloy target to deposit a coating with a set thickness on the surface of the etched tool substrate by reactive magnetron sputtering.

[0062] S2: Introduce an inert gas into the cavity, set the bias voltage to - 350 V, and perform surface etching on the tool substrate for a set time. The etching time is 12 min.

[0063] S3: Introduce an inert gas into the cavity, keep the gas flow rate between 35 sccm, maintain the vacuum degree of the cavity at 0.75 Pa, apply a DC voltage on the Ti target, with a loading power of 320 W, deposit the inner sub - coating, and control the deposition time to be 23 min.

[0064] S4: Introduce an inert gas and nitrogen into the cavity, set the proportion of nitrogen to 35%, keep the total gas flow rate at 52 sccm, maintain the vacuum degree of the cavity between 0.42 Pa, apply a DC voltage on the Ti target, with a loading power of 280 W, apply an intermediate - frequency voltage on the HfNbW alloy target, with a loading power of 405 W, and a duty cycle of 24%, deposit the outer sub - coating, and control the deposition time to be 285 min.

[0065] S5: Heat the substrate to 320 °C in the cavity and keep it warm for 210 min to obtain the coated tool.

[0066] Comparative Example 1

[0067] Different from Embodiment 1 and Embodiment 2, in Comparative Example 1, the outer sub - coating can be represented by TiN of the general formula. The outer sub - coating is a single - phase face - centered cubic crystal structure. Ti atoms occupy the face - centered positions, while N atoms occupy the vertex positions. The thickness of the outer sub - coating is designed to be 1.8 μm.

[0068] The inner sub - coating is a single - phase hexagonal close - packed structure hcp - Ti, and the thickness of the inner sub - coating is 0.12 μm.

[0069] Comparative Example 1 of the present invention is a method for preparing a double-layer coated tool, comprising the following steps:

[0070] S1: Using a Ti target to deposit a coating of a set thickness on the etched tool substrate surface by reactive magnetron sputtering;

[0071] S2: Inert gas is introduced into the chamber, the bias voltage is set to -350 V, and the surface of the tool substrate is etched for a set time, and the etching time is 12 minutes;

[0072] S3: Inert gas is introduced into the chamber, the gas flow rate is maintained at 35 sccm, the vacuum degree of the chamber is maintained at 0.75 Pa, a DC voltage is applied to the Ti target, the loading power is 320 W, the inner sub-coating is deposited, and the deposition time is controlled to be 23 min;

[0073] S4: Inert gas and nitrogen are introduced into the chamber, the ratio of nitrogen is set to 35%, the total gas flow rate is maintained at 52 sccm, the vacuum degree of the chamber is maintained at 0.42 Pa, a DC voltage is applied to the Ti target, the loading power is 280 W, the outer sub-coating is deposited, and the deposition time is controlled to be 285 min;

[0074] S5: The substrate is heated to 300° C. in the cavity and kept at this temperature for 140 min to obtain a coated tool.

[0075] Table 1 is a comparison of the surface hardness properties of the coatings prepared in Example 1, Example 2, and Comparative Example 1 at different temperatures.

[0076] Table 1 Comparison of surface hardness properties at different temperatures (unit: GPa)

[0077] 25℃ 300℃ 600℃ 800℃ Example 1 16.8 12.4 6.8 8.7 Example 2 14.1 10.9 8.4 5.6 Comparative Example 1 12.5 9.1 6.4 3.3

[0078] From the data comparison in Table 1, it can be seen that the surface hardness of the double-coated tool prepared in the embodiment of the present invention is better than that of the tool coating in Comparative Example 1 in the temperature range of 25 to 800°C, indicating that the double-coated tool provided by the present invention is applicable in a wider temperature range than the coated tools in the prior art.

[0079] The hardness test method is as follows:

[0080] The substrate surface was polished to a mirror surface, and after the coating was deposited, it was tested using a G200 nanoindenter (MTS). The indenter was a diamond Berkovich indenter, and the continuous stiffness method was used for testing. The indentation depth was controlled to be 1 / 3 of the coating thickness. The hardness of 10 different points was measured, and the average value was taken as the hardness of the coating.

[0081] Figure 2The variation of flank wear of the coated tools prepared in Example 1, Example 2 and Comparative Example 1 with cutting length during cutting is compared with that of the uncoated tools. Figure 2 In the middle, number 4 is the variation of flank wear of the uncoated tool with cutting length, number 5 is the variation of flank wear of the TiN coated tool with cutting length, number 6 is the variation of flank wear of the TiNbWN coated tool with cutting length, and number 7 is the variation of flank wear of the TiNbHfWN coated tool with cutting length.

[0082] Depend on Figure 2 By comparison, it can be seen that the flank wear of the coated tool prepared in the embodiment of the present invention is less than that of other comparative samples and uncoated tools. The longer the cutting length, the more obvious this advantage is, as can be seen from the comparison between Example 1 and Comparative Example 1. These data fully demonstrate that the service life of the double-layer coated tool provided by the present invention is greatly improved compared with the coated tool of the prior art.

[0083] The cutting test method is as follows:

[0084] Processing method: continuous dry cutting;

[0085] Material: Ductile iron;

[0086] Tool model: CCMT 09T3 08-MF S205;

[0087] Cutting conditions: cutting speed 150m / min, feed 0.1mm / z, cutting depth 0.1mm;

[0088] The wear amount VB (unit μm) of the tool flank after cutting different lengths was measured using an OLYMPUS SZ61 optical super-depth microscope with a scale.

[0089] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A coating for a tool, characterized in that: The double-layer coating is deposited on the surface of the substrate of the tool, wherein the double-layer coating comprises an inner sub-coating and an outer sub-coating arranged in sequence from the inside to the outside, wherein the inner sub-coating is a Ti coating, and the outer sub-coating is a Ti a Nb b Hf c W d N coatings, where a+b+c+d=1, 0 <a≤0.34,0<b≤0.34,0<c≤0.34,0<d≤0.34; The outer sub-coating is a single-phase face-centered cubic structure Fcc-TiN, wherein Ti, Nb, Hf, and W atoms occupy the face-center positions in the Fcc crystal and can replace each other, and N atoms occupy the vertex positions in the Fcc crystal; The thickness of the outer sub-coating is 0.5-6.5 μm; The inner sub-coating layer is a single-phase close-packed hexagonal structure hcp-Ti, and the thickness of the inner sub-coating layer is 0.1-1.5 μm.

2. The coating for a tool according to claim 1, characterized in that The thickness of the outer sub-coating layer is 1.5-3.5 μm.

3. The coating for a tool according to claim 1, characterized in that: The thickness of the inner sub-coating layer is 0.2-1.0 μm.

4. A highly wear-resistant and long-life coated tool suitable for a wide temperature range, characterized in that: The coating according to any one of claims 1 to 3 further comprises a substrate, wherein the coating is disposed on the substrate.

5. A method for preparing a highly wear-resistant and long-life coated tool applicable to a wide temperature range as claimed in claim 4, characterized in that: The method adopts a reactive magnetron sputtering method, uses a Ti target and an alloy target, deposits a coating of a set thickness on the surface of a tool substrate that has been etched, and obtains a coated tool; the alloy target is one of a NbW target, a NbHf target, a HfW target, or a NbHfW target; The specific steps include: S1. Inert gas is introduced into the cavity, the bias voltage range is set to -500~-150V, and the surface of the tool substrate is etched for a set time, and the etching time is 2~30 min; S2. Inert gas is introduced into the chamber, the gas flow rate is maintained between 10 and 100 sccm, the vacuum degree of the chamber is maintained between 0.05 and 1.5 Pa, a DC voltage is applied to the Ti target, the loading power is 50 to 450 W, and the inner layer sub-coating is deposited on the substrate. The deposition time is controlled to be 5 to 150 min. S3, inert gas and nitrogen are introduced into the chamber, the proportion of nitrogen is set to 10-85%, the total gas flow rate is maintained between 10-100 sccm, the vacuum degree of the chamber is maintained between 0.05-1.5 Pa, a DC voltage is applied to the Ti target, the loading power is 50-450 W, and an intermediate frequency voltage is applied to the alloy target, the loading power is 50-450 W, the duty cycle is 10-80%, and the outer sub-coating is deposited, and the deposition time is controlled to be 5 min-500 min; S4. Heat the substrate after depositing the double-layer coating to 200-600 °C in the cavity and keep it warm for 10-300 min to obtain a highly wear-resistant and long-life coated tool suitable for a wide temperature range.

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