Evaporation device of vacuum coating machine

Abstract

The present invention relates to the field of vacuum coating technology, specifically, an evaporation device of a vacuum coating machine, including a substrate, a material tray assembly, arranged above the substrate, the material tray assembly including a shell, an evaporation tray and a crucible, the evaporation tray is rotatably connected to the inside of the evaporation tray, and multiple groups of crucibles are evenly arranged in the evaporation tray; an electron gun structure is arranged on the side wall of the substrate, and when powered on, an electron striking channel is formed, and an electron beam is emitted to bombard the raw materials in the crucible. The present invention is provided with a driving assembly, a gantry assembly and a gate, and when the evaporation tray of continuous coating rotates, the gate can effectively isolate the electron striking channel to ensure that the evaporation tray is not damaged, and as the crucible gradually approaches the electron gun structure, the driving assembly drives the gantry assembly to lift the gate, the gate is lifted, the electron striking channel is unblocked, and the electron beam is released to strike the material in the crucible, thereby avoiding the electron beam from damaging the evaporation tray, and at the same time, there is no need to repeatedly power on and off the electron beam.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum coating, in particular to an evaporation device of a vacuum coating machine. Background Art

[0002] Vacuum coating is a technology that produces thin film materials by physical methods. In a vacuum chamber, the atoms of the material are separated from the heating source and hit the surface of the object to be coated, and the evaporator is the equipment that evaporates the material.

[0003] The existing evaporation device is composed of a crucible and an electron gun structure. An external wire is inserted into the electron gun structure. After power is turned on, the electron beam is directly injected into the crucible, thereby rapidly evaporating the material in the crucible.

[0004] Existing evaporation devices are used for continuous coating: since some workpieces require multi-layer coating, such as telescope lenses, car dashboard glass, etc., the electron beam needs to evaporate different materials in an orderly manner. In order to meet this demand, a crucible system of a vacuum evaporation machine with announcement number CN216585179U is provided with a rotating evaporation plate, so that different material crucibles can be quickly replaced.

[0005] However, there are still some shortcomings. Since the material of the evaporation plate itself cannot withstand the impact of the electron beam, the following situations will occur when the evaporation plate is rotated to replace the loading crucible:

[0006] (1) Workers need to turn off the power before turning the evaporation plate, and turn on the power again after turning the evaporation plate to replace the crucible. However, frequent power on and off increases the operation steps and affects the coating efficiency. In addition, the unstable internal temperature affects the coating effect.

[0007] (2) Workers directly rotate the evaporation plate without turning off the power. The electron beam hits the surface of the evaporation plate. Workers need to replace the evaporation plate regularly, which increases production costs. In addition, evaporation on the surface of the evaporation plate will produce new evaporation particles, causing the surface of the film to be impure after coating.

[0008] Therefore, there is a need for an evaporation device of a vacuum coating machine that can continuously coat films without power outage and without damaging the evaporation plate to solve the above problems. Summary of the invention

[0009] The present invention provides the following technical solutions: an evaporation device of a vacuum coating machine, comprising a substrate, a material tray assembly, arranged above the substrate, the material tray assembly comprising a shell, an evaporation tray and a crucible, the evaporation tray is rotatably connected to the inside of the evaporation tray, and a plurality of groups of crucibles are evenly arranged in the evaporation tray;

[0010] The electron gun structure is arranged on the side wall of the substrate, and when powered on, an electron striking channel is formed, and an electron beam is emitted to bombard the raw materials in the crucible;

[0011] A gate is provided between the crucible and the electron gun structure to isolate the electron striking channel;

[0012] A gantry assembly is arranged above the gate, the gantry assembly comprises a gantry frame connected to the upper side wall of the base plate, a connecting block is slidably connected to the upper side of the gantry frame, and a chain connected to the gate and the connecting block runs through the interior of the gantry frame;

[0013] The driving assembly is connected above the evaporation plate. The driving assembly includes an upper connecting rod and a toggle rod which rotate synchronously with the evaporation plate. The toggle rod is connected above the upper connecting rod. When the crucible stops rotating, the driving assembly drives the gate to rise and open the electron striking channel.

[0014] Preferably, the shifting rods are composed of an inner circular plate and multiple groups of outer shifting rods, the number of the outer shifting rods matches the number of the crucibles and are evenly distributed on the outer wall of the inner circular plate.

[0015] Preferably, the gate side wall is connected with a side convex strip, and the electron gun structure side wall is provided with a sliding groove for inserting the side convex strip.

[0016] Preferably, the gate material is set to graphite to isolate the electron beam.

[0017] Preferably, a rotating mechanism is provided under the evaporation plate, and the rotating mechanism includes a lower connecting rod connected to the bottom end of the evaporation plate, the bottom end of the lower connecting rod is connected to a blade, the blade is composed of four groups of inner concave edges and outer convex edges, the inner concave edges and the outer convex edges are staggered, and the four groups of outer convex edges are all provided with limiting grooves, the top bearing of the base plate is connected to the bottom plate, and the top of the bottom plate is connected to a protrusion.

[0018] Preferably, a limiting plate is connected to the top of the bottom plate, and the outer curvature of the limiting plate matches the inner concave edge of the blade, and an arc-shaped groove is formed on a side of the limiting plate facing the protrusion.

[0019] Preferably, the diameter of the protrusion is smaller than the width of the limiting groove.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The evaporation device of the vacuum coating machine is provided with a driving component, a gantry component and a gate. During continuous coating, when the evaporation plate rotates, the gate can effectively isolate the electron striking channel to ensure that the evaporation plate is not damaged. As the crucible gradually approaches the electron gun structure, the driving component drives the gantry component to lift the gate. When the gate is lifted, the electron striking channel is unblocked, and the electron beam is released to strike the material in the crucible, thereby avoiding damage to the evaporation plate by the electron beam. At the same time, there is no need to repeatedly power on and off the electron beam.

[0022] At the same time, a rotating mechanism is provided to ensure that the evaporation plate rotates at a fixed angle each time and to ensure the stability of the evaporation plate after each rotation, thereby changing the traditional operation mode of the evaporation plate directly controlled by a motor and avoiding angle errors due to inertia or motor rotation accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0025] Figure 2 For the present invention Figure 1 Schematic diagram of the state structure;

[0026] Figure 3 It is a schematic diagram of the three-dimensional structure of the inner turntable and the crucible of the present invention;

[0027] Figure 4 It is a three-dimensional structural schematic diagram of the rotating mechanism of the present invention;

[0028] Figure 5 It is a schematic diagram of the three-dimensional structure of the gate of the present invention.

[0029] Description of the drawings: 110, substrate; 120, electron gun structure; 130, shell; 140, evaporation plate; 150, crucible; 210, upper connecting rod; 220, toggle rod; 230, gantry; 240, gate; 241, side convex strip; 250, chain; 260, connecting block; 310, lower connecting rod; 320, blade; 330, limit groove; 340, bottom plate; 350, limit plate; 360, protrusion. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] like Figure 1-5As shown, in the embodiment of the present invention: an evaporation device of a vacuum coating machine includes a substrate 110, a material tray assembly, which is arranged above the substrate 110, the material tray assembly includes a shell 130, an evaporation tray 140 and a crucible 150, the evaporation tray 140 bearing is connected to the inside of the evaporation tray 140, and four groups of crucibles 150 are evenly arranged in the evaporation tray 140;

[0032] The electron gun structure 120 is disposed on the side wall of the substrate 110 and forms an electron striking channel when powered on, and emits an electron beam to bombard the raw materials in the crucible 150;

[0033] The gate 240 is disposed between the crucible 150 and the electron gun structure 120 to isolate the electron striking channel;

[0034] The gantry assembly is arranged above the gate 240, and the gantry assembly includes a gantry frame 230 connected to the upper side wall of the base plate 110, and a connecting block 260 is slidably connected to the upper side of the gantry frame 230, and a chain 250 connected to the gate 240 and the connecting block 260 runs through the interior of the gantry frame 230;

[0035] The driving assembly is connected above the evaporation plate 140. The driving assembly includes an upper connecting rod 210 and a toggle rod 220 that rotate synchronously with the evaporation plate 140. The toggle rod 220 is connected above the upper connecting rod 210. When the crucible 150 stops rotating, the driving assembly drives the gate 240 to rise and open the electron striking channel.

[0036] In specific operation, after the first group of crucibles 150 have evaporated and formed a coating, the evaporation plate 140 rotates to replace a new crucible 150. As the crucible 150 rotates, the toggle rod 220 and the upper connecting rod 210 rotate synchronously. At this time, the toggle rod 220 and the connecting block 260 are out of contact, the gate 240 moves downward due to gravity, and the connecting block 260 moves along the trajectory of the gantry 230 toward the through hole formed by the chain 250 passing through the gantry 230 at the opening. As the toggle rod 220 continues to rotate, the second When the group of crucibles 150 is about to rotate 90 degrees, another group of toggle rods 220 abut against the connecting block 260. As the evaporation plate 140 and the crucible 150 continue to rotate, the toggle rods 220 continue to rotate, pushing the connecting block 260 to move along the trajectory of the gantry 230 to the side away from the opening, and the gate 240 is lifted by the chain 250. When the crucible 150 rotates 90 degrees to complete the replacement, the gate 240 releases the obstruction to the electron striking channel, and the electron beam strikes the inside of the new crucible 150 to complete the continuous coating.

[0037] The lever 220 is composed of an inner circular plate and multiple groups of outer levers. The number of the outer levers matches the number of the crucibles 150 and is evenly distributed on the outer wall of the inner circular plate.

[0038] Through the above design, each group of crucibles 150 has a matching external lever, and there is an angle difference between the external lever and the crucible 150. When the crucible 150 reaches the specified position, the gate 240 can be lifted without blocking the evaporation track directly above the crucible 150.

[0039] The side wall of the gate 240 is connected with a side convex strip 241 , and the side wall of the electron gun structure 120 is provided with a sliding groove for inserting the side convex strip 241 , and the side convex strip 241 is inserted in the sliding groove.

[0040] Through the above design, the establishment of the side convex strip 241 can ensure that the gate 240 can move straight up and down along the track of the sliding groove without deviation when moving up and down.

[0041] The connecting block 260 is slidably connected to the upper surface of the gantry 230 , limiting the moving trajectory of the connecting block 260 so that the connecting block 260 can only move along the trajectory of the gantry 230 , thereby cooperating with the push of the toggle rod 220 to lift the gate 240 .

[0042] The gate 240 is made of graphite to isolate the electron beam.

[0043] Through the above design, graphite has good heat resistance, high melting point and boiling point to isolate the electron beam.

[0044] A rotating mechanism is provided below the evaporation plate 140, and the rotating mechanism includes a lower connecting rod 310 connected to the bottom end of the evaporation plate 140, and a blade 320 is connected to the bottom end of the lower connecting rod 310, and the blade 320 is composed of four groups of inner concave edges and outer convex edges, and the inner concave edges and the outer convex edges are staggered. The four groups of outer convex edges are all provided with limiting grooves 330, and the top bearing of the substrate 110 is connected to the bottom plate 340, and the top of the bottom plate 340 is connected to a protrusion 360.

[0045] When the bottom plate 340 is rotated 90 degrees, the arc-shaped groove of the limit plate 350 is directly opposite to the outer convex edge of the blade 320, thereby limiting the position of the blade 320. Through the above mechanism, the blade 320 and the evaporation plate 140 can be driven to rotate 90 degrees quickly and accurately. The rotation accuracy of the blade 320 will not be affected by the inertia of the bottom plate 340 after one rotation, thereby ensuring the accurate position of the crucible 150 after replacement.

[0046] The top of the bottom plate 340 is connected to a limiting plate 350 , and the outer curvature of the limiting plate 350 matches the inner concave edge of the blade 320 . A circular arc groove is formed on one side of the limiting plate 350 facing the protrusion 360 .

[0047] Through the above design, the outer arc of the limiting plate 350 can be matched with the inner concave edge of the blade 320, so as to limit the blade 320 and ensure its stability.

[0048] The diameter of the protrusion 360 is smaller than the width of the limiting groove 330 .

[0049] The above design ensures that the protrusion 360 can enter the limiting groove 330 to drive the blade 320 to rotate when rotating.

[0050] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. An evaporation device of a vacuum coating machine, comprising a substrate (110), characterized in that: A material tray assembly is arranged above the substrate (110), the material tray assembly comprising a shell (130), an evaporation tray (140) and a crucible (150), the evaporation tray (140) is rotatably connected to the inside of the shell (130), and four groups of crucibles (150) are evenly arranged in the evaporation tray (140); The electron gun structure (120) is arranged on the side wall of the substrate (110), and forms an electron striking channel when powered on, and emits an electron beam to bombard the raw materials in the crucible (150); A gate (240) is disposed between the crucible (150) and the electron gun structure (120) and is used to isolate the electron striking channel; A driving assembly connected above the evaporation plate (140), the driving assembly drives the gate (240) to rise when the crucible (150) stops rotating, thereby opening the electron striking channel; The driving assembly comprises an upper connecting rod (210) and a toggle rod (220) that rotates synchronously with the evaporation plate (140), wherein the toggle rod (220) is connected above the upper connecting rod (210); A gantry assembly is arranged above the gate (240), the gantry assembly comprising a gantry frame (230) connected to the top of the side wall of the base plate (110), a connecting block (260) being slidably connected to the top of the gantry frame (230), and a chain (250) connected to the gate (240) and the connecting block (260) passing through the inside of the gantry frame (230); The shifting rod (220) is composed of an inner circular plate and a plurality of groups of outer shifting rods, the number of the outer shifting rods matches the number of the crucibles (150) and is evenly distributed on the outer wall of the inner circular plate; Each group of crucibles (150) has an outer lever matched thereto, and there is an angle difference between the outer lever and the crucible (150), so that the gate (240) can be lifted when the crucible (150) reaches a specified position without blocking the evaporation track directly above the crucible (150).

2. The evaporation device of a vacuum coating machine according to claim 1, characterized in that: The side wall of the gate (240) is connected to a side convex strip (241), and the side wall of the electron gun structure (120) is provided with a sliding groove for inserting the side convex strip (241).

3. The evaporation device of a vacuum coating machine according to claim 1, characterized in that: The gate (240) is made of graphite to isolate the electron beam.

4. The evaporation device of a vacuum coating machine according to claim 1, characterized in that: A rotating mechanism is provided below the evaporation plate (140), and the rotating mechanism comprises a lower connecting rod (310) connected to the bottom end of the evaporation plate (140), the bottom end of the lower connecting rod (310) is connected to a blade (320), the blade (320) is composed of four groups of inner concave edges and outer convex edges, the inner concave edges and the outer convex edges are arranged in a staggered manner, and the four groups of outer convex edges are all provided with limiting grooves (330), the top end of the base plate (110) is connected to a bottom plate (340) with a bearing, and the top of the bottom plate (340) is connected to a protrusion (360).

5. The evaporation device of a vacuum coating machine according to claim 4, characterized in that: The top of the bottom plate (340) is connected to a limiting plate (350), and the outer curvature of the limiting plate (350) matches the inner concave edge of the blade (320), and a circular arc groove is formed on a side of the limiting plate (350) facing the protrusion (360).

6. The evaporation device of a vacuum coating machine according to claim 5, characterized in that: The diameter of the protrusion (360) is smaller than the width of the limiting groove (330).

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