System and method for connecting electronic components

Abstract

The invention relates to a system for connecting electronic components and / or for manufacturing workpieces, the system comprising a plurality of modules for connecting electronic components and / or for manufacturing workpieces. The invention is characterized in that at least one module is designed as a loading station and one module is designed as an unloading station, or one module is designed as a loading station and is designed as an unloading station, wherein at least one other module is designed as a manufacturing station, and a manufacturing workpiece carrier is provided for accommodating electronic components and / or workpieces, which manufacturing workpiece carrier can be moved from the loading station via the manufacturing station to the unloading station in an automated manner by a conveying unit, wherein a multi-gripper is provided, by which at least two electronic components and / or workpieces can be placed on the manufacturing workpiece carrier at the same time.

Description

Technical Field

[0001] The invention relates to a system for connecting electronic components and / or for manufacturing workpieces, in particular a sintering or welding system. The invention also relates to a foil / film transfer unit for a covering foil / film for covering workpieces in the system, a foil / film separation unit and a manufacturing workpiece carrier.

[0002] The invention further relates to a method for connecting electronic components and / or for producing workpieces, in particular for a sintering or welding system, in particular for a vacuum sintering or vacuum welding system, preferably for a diffusion welding system. Background Art

[0003] Systems and methods for connecting electronic components are known from the prior art, in particular soldering and sintering systems with a process atmosphere, in particular a vacuum or gas atmosphere, which are designed as individual systems and not for continuous production. In this case, undesirable idle times occur between individual method steps or individual positions of the system, during which individual manufacturing operations have to be performed manually, such as, for example, transferring the workpieces to a transfer unit or covering the workpieces with a process cover. Therefore, systems are known from the prior art for connecting electronic components that do not operate in a fully automated manner. In such known systems or methods, the individual working steps are performed manually and require manual intervention. In this case, errors can occur during the production of the workpieces.

[0004] Interruptions of individual steps or between individual locations mean that the supply of clean rooms, especially ISO 5 clean rooms, is not always so reliable.

[0005] A clean room or ultra-clean room is a room in which the concentration of particles in the air is kept very low. Specific manufacturing processes (mainly semiconductor manufacturing) require clean rooms or ultra-clean rooms, where particles present in the normal ambient air will destroy the patterning of integrated circuits in the fractional range of a micrometer. Further applications of clean room or ultra-clean room technology can be found in optical and laser technology and in the case of sintering or diffusion soldering considered here.

[0006] International standards define specific cleanliness requirements for operations in controlled environments. Standards and guidelines specify particle concentrations (e.g., EN ISO 14644 and VDI 2083, 2019) or otherwise specify the microbial load of the environment (e.g., EU-GPMP Guidelines, 2019).

[0007] For ultra-clean rooms used in microelectronics, there are several hierarchical areas with corresponding clean room classes. Thus, an ultra-clean room (ISO Class 4 and above) where work on substrates is performed is enclosed by a separate area with the necessary systems for coating and patterning.

[0008] DE20122579U1 shows an automatic assembly machine and an automatic welding machine. Thus, at least two modules are formed, wherein the circuit carrier is supplied by a slide to the conveyor belt of the automatic assembly machine. In the automatic assembly machine, other circuit components from a bin container are attached to the circuit carrier using a gripper arm. The conveyor belt is merged into a conveyor belt inside the automatic assembly machine, which guides the circuit carrier into the automatic welding machine. The manufacturing station is formed by the automatic welding machine.

[0009] DE 10 2016 12 3 362 B3 shows a multi-assembly head. This means that the chip holding devices are arranged in a fixed grid. Thus, multiple chips can be removed or loaded at the same time.

[0010] DE 10 2019 134 410 A1 shows a system with a foil / film transfer unit.

[0011] US 2008 / 0127486 A1 shows an arrangement of a plurality of chips arranged one above the other on a substrate.

[0012] DE102018004086A1 shows a production system for coating substrates, which comprises a process module and a vacuum gate valve. The automatic movement of the workpiece carrier is thus shown. The production system may include a return unit for returning the substrate carrier for further use after the substrate is removed.

[0013] US 2013 / 0108406 A1 shows a gripper that can simultaneously pick up a plurality of workpieces arranged in a matrix.

[0014] JP 2013-219096 A shows the loading of a workpiece carrier with workpieces, wherein pads are arranged between the workpieces. Summary of the invention

[0015] The object of the present invention is to propose a system or a method which enables an automated, in particular fully automated, sequence in order to ensure in particular the supply of ISO 5 clean rooms.

[0016] A further object of the invention is to specify a system or a method in which a manual check of individual locations or individual method steps can be dispensed with.

[0017] Furthermore, a foil / film transfer unit is proposed, in particular for a sintering system, in which a covering foil / film can be placed on and removed from a workpiece to be sintered fully automatically. The aim is to achieve an automatic pick-up and placement of the foil / film, wherein any sticking of the foils / films to one another and / or any contamination of the foils / films is to be prevented. In a welding system, the foil / film transfer unit can preferably be omitted.

[0018] This object is achieved by a system, a method and a foil / film transfer unit according to the independent claims. Advantageous further developments of the invention form the subject matter of the dependent claims.

[0019] The subject of the invention is a system for connecting electronic components and / or for manufacturing workpieces, in particular a sintering or welding system, comprising a plurality of modules for connecting electronic components and / or for manufacturing workpieces. The welding or sintering system is particularly designed for the formation of a process atmosphere, in particular for vacuum operation. In an embodiment as a vacuum welding system, the latter can preferably be configured as a diffusion welding system.

[0020] It is proposed that at least one module is designed as a loading station and one module is designed as an unloading station, or that one module is designed as a loading station and an unloading station. In both cases, at least one further module is designed as a manufacturing station and a manufacturing workpiece carrier is provided for accommodating electronic components and / or workpieces, which manufacturing workpiece carrier can be moved in an automated manner from the loading station via the manufacturing station to the unloading station by means of a transfer unit, wherein the system is particularly designed for production in a production line, wherein a multi-gripper is provided, by means of which at least two electronic components and / or workpieces can be placed simultaneously on the manufacturing workpiece carrier.

[0021] For example, such a system can be used to ensure assembly line production, in which an automated and in particular fully automated process is achieved. Since the execution of the individual steps in the individual modules is particularly unaffected by any interruptions, a clean room (in particular a clean room in accordance with ISO 5) can be provided, for example. Therefore, the system can be particularly suitable for microelectronics, in which electronic components and / or workpieces can form microelectronic components or workpieces. The system can be mainly used for the production of high-power electronic devices, and for the formation of power semiconductor contact structures with bond buffers, such as described in DE102009022660B3. The workpiece can in particular include high-energy semiconductor switches used in frequency converters and associated circuit carriers and / or heat sinks, i.e. the workpiece can be multi-part, in which the individual parts must be connected to each other by welding, sintering or similar methods. A preferred application is to connect semiconductor components to associated cold transfer media, which must be understood as workpieces in the sense of the present invention.

[0022] The system can be a sintering system or a welding system in particular. For example, the low-pressure sintering described in DE3414065A1, DE102014114093B4, DE102004019567B3 is suitable for this purpose. In this case, sintering can involve the production or modification of materials under high pressure and high temperature, especially below the melting temperature. The material can be a ceramic or metal material in particular. On the other hand, sintering can be understood as the connection of multiple elements of a workpiece, such as an electronic unit and a radiator, or an electronic component and a printed circuit board (PCB). Heat-resistant sintered joints can be produced in this way. Such sintered joints can be a substitute for traditional solder joints and are particularly used in power electronics. For this purpose, a low-pressure connection method (NTV) can be preferred and has been successfully used to produce large-area components for connecting workpieces, such as IGBT modules. NTV uses pressure sintering of a silver powder layer to form a connection. Scanning electron microscopy examination shows that powders suitable for NTV spontaneously sinter in air at a temperature of 200°C under ambient pressure. Under the simultaneous action of pressures above 20 MPa, the powder layer is compressed into a solid silver layer that is able to absorb high shear stresses. Compared to conventional joining methods based on solidification of the liquid phase, in NTV the temperature of the joining device without mechanical stress can be adjusted to a wide range by a suitable pressure and temperature profile during the joining process. In particular, any form of copper sintering (e.g. with copper-based sintering pastes) is suitable for production sintering systems in line.

[0023] On the other hand, the system can be designed as a soldering system, in particular a vacuum soldering system. For example, a reflow or diffusion soldering method can be used as a soldering method. Reflow soldering is a common soft soldering method for soldering electronic components in electrical engineering. A pre-applied solder deposit, such as a solder preform, is arranged between the workpieces to be soldered and then melted to produce a solder joint.

[0024] During diffusion soldering, the solder is fully alloyed to provide an intermetallic phase. The melting point of the resultant phase is significantly higher than the operating temperature of the active components. It is also substantially increased relative to the melting point of the solder. In addition, the intermetallic phase has a significantly higher modulus of elasticity. The process is described for a copper / tin system for power modules and a gold / tin system for soldering on printed circuit boards. Load cycle tests with active switching on and off of the chip have shown that components with this connection technology achieve cycle numbers of an order of magnitude higher.

[0025] In order to provide a clean room for a sintering or welding system, loading and unloading stations or modules designed as loading and unloading stations are preferably arranged in the system. Thus, the clean room extends from the loading station to the unloading station via the manufacturing station. At least one manufacturing workpiece carrier that can be moved in an automated manner can be arranged in the closed system.

[0026] In order to provide assembly line production, one or more manufacturing workpiece carriers (preferably with the same design) are arranged inside the system. The manufacturing workpiece carrier can, for example, accommodate multiple identical electronic components and / or workpieces. The automatic movement of the manufacturing workpiece carrier or multiple manufacturing workpiece carriers is realized using a transfer unit. When a module is designed as a loading station and an unloading station, the transfer unit preferably runs from the loading station to the manufacturing station and from the manufacturing station to the loading station at least. If the loading station and the unloading station are designed as separate modules, wherein the manufacturing station is arranged between the two modules, the transfer unit preferably runs from the loading station to the unloading station via the manufacturing station. In this embodiment, the manufacturing workpiece carrier is preferably guided back to the loading station from the unloading station to provide assembly line production. This can, for example, be realized by another conveying method or by the transmission of another type. In this way, the manufacturing workpiece carrier can pass through the entire system without any intervention from the outside of the system, particularly manual intervention.

[0027] In an automated manner, it is meant in particular that the movement is possible without manual intervention. For this purpose, the transport unit can be designed, for example, at least partially as a belt conveyor and / or a lifting unit. A further advantage of automation, in particular a fully automated system, is that a clean room, in particular an ISO 5 clean room, can be provided for each module individually and for the entire system. Thus, the system can, for example, be designed to be closed and / or gas-tight per se. The individual process chambers within the system can also be of closed and / or gas-tight design.

[0028] The multi-gripper can be used in sintering and welding systems. A multi-gripper must be understood as a pick-up element which is able to pick up at least two electronic components or at least two workpieces simultaneously and to transfer them from one place to another. The multi-gripper can be used in a loading station and / or an unloading station. In particular, the multi-gripper can be used in sintering systems and welding systems. In particular, a multi-gripper can be used to clamp and transfer at least two workpieces simultaneously. This enables faster loading and unloading of the workpiece carrier.

[0029] In a preferred embodiment, the multi-gripper can have at least two, in particular four, gripper arms, each gripper arm being designed to pick up an electronic component and / or a workpiece. This makes it possible in particular for the same workpiece to be moved simultaneously. Each gripper arm can comprise a telescopic and / or pivotable part, and a part for picking up a workpiece or a component. The socket can consist of two clamping elements, which can clamp a workpiece or a component from both sides. The telescopic and / or pivotable part can be telescopically and / or pivotally arranged on the base element of the multi-gripper. This makes it possible for the gripper arms to move relative to each other and relative to the base element.

[0030] Preferably, the gripper arms are movable and / or controllable independently of each other. In particular, all gripper arms are arranged in a row so that workpieces and / or components arranged adjacent to each other can be picked up. In other words, the gripper arms are preferably arranged adjacent to each other on the longitudinal axis of the multi-gripper.

[0031] In a preferred embodiment, at least one gripper arm can be pneumatically controlled so that at least one gripper can be moved and / or pivoted relative to at least one other gripper arm. If multiple gripper arms are pneumatically controlled, pneumatic control is preferably applied independently to each gripper arm so that the gripper arms can move independently of each other.

[0032] In a preferred embodiment, the multi-gripper can have four gripper arms arranged parallel to each other along a line, wherein two outer gripper arms can be moved along the line so that the two outer gripper arms can be moved relative to the two inner gripper arms. Line guidance can be realized in the form of a multi-gripper, wherein the multi-gripper, for example, has a linear basic element. The gripper arms can preferably move along the linear basic element, for example, using a telescopic element and / or a track element. A sliding element with pneumatic control can be provided here, wherein, in particular, the two outer gripper arms can move away from each other. If the multi-gripper is designed to have at least three, in particular four gripper arms, at least one gripper arm arranged between the two outer gripper arms can be designed to be fixed. Fixed especially means that the two outer gripper arms can be moved relative to at least one intermediate gripper arm. In addition, fixed especially means that at least one intermediate gripper arm cannot move relative to the basic element of the multi-gripper. If the multi-gripper is designed with a total of four gripper arms and therefore with two middle gripper arms, the two middle gripper arms can be designed to be fixed.

[0033] In a preferred embodiment, the manufacturing station may include at least one further module as a welding module and / or as a sintering module. The manufacturing station may preferably include more than one further module, in particular a preheating module, a plasma module, a welding module and / or a sintering module and / or a cooling module. The preheating module is used to preheat the workpieces to be connected. The plasma module can be used, for example, to clean the workpieces. The welding and / or sintering module can perform the connection of the workpieces, in particular in a thermal connection method under a process atmosphere. The cooling module is used for defined cooling of the workpieces, so that a high flow cycle for in-line manufacturing (i.e. assembly line production) can be achieved. One or more consecutive modules that can be connected by an airtight airlock can provide a process atmosphere, in particular a negative pressure or a vacuum as a process atmosphere for connecting the workpieces.

[0034] The further modules are preferably arranged between the loading station and the unloading station. If the loading station and the unloading station are integrated in a common module, the further modules are preferably arranged on at least one side with respect to the loading station or the unloading station. The system can be designed, for example, as an elongated throughput system. The manufacturing workpiece carrier can preferably be passed through all modules of the system in an automated manner. It is conceivable that the manufacturing workpiece carrier can be passed through the system in two directions (i.e. to and fro) so as to form a circuit. Assembly line manufacturing that is implemented in an automated manner can thereby be arranged particularly advantageously. The to and fro movement can take place at different levels within the system.

[0035] In a preferred embodiment, one module can be designed as a loading station and one module can be designed as an unloading station, wherein the loading station is arranged upstream of the manufacturing station and the unloading station is arranged downstream of the manufacturing station, and the conveying unit conveys the electronic components and / or workpieces from the unloading station back to the loading station, in particular bypassing the manufacturing station. Bypassing the manufacturing station should not be understood as a spatial bypass, but as a functional bypass. The manufacturing station can be, for example, a functional workstation, which particularly includes at least one closed and / or airtight processing chamber. When the manufacturing station is bypassed, the closed processing chamber can be bypassed during the return movement of the manufacturing workpiece carrier. The conveying unit can be arranged here, for example, for the return movement outside the processing chamber but inside the outer shell around the manufacturing station. The manufacturing workpiece carrier can, for example, return to at least one workstation or processing chamber of the manufacturing station below or near it. In particular, the return movement occurs inside the system, wherein the manufacturing workpiece carrier preferably does not leave the system during the entire manufacturing process, in particular during assembly line production. The conveying unit can be constructed according to the conveyor belt principle or the chain guidance principle. For the vertical transport of a return transport unit arranged below the workstation, a lifting tool can be provided, on which the workpiece carrier can be moved according to the lifting principle.

[0036] Typically, a transport workpiece carrier may be used as a manufacturing workpiece carrier, and if so, there is no need to transfer components between the various workpiece carrier types and a return transport of the manufacturing workpiece carrier may be omitted.

[0037] In a preferred embodiment, at least one automated robot for guiding a multi-gripper can be arranged in a loading station, by which at least two electronic components and / or workpieces can be transferred to and, if applicable, placed on a manufacturing workpiece carrier in the loading station in an automated manner and simultaneously from a conveying workpiece carrier. An automated robot can also be arranged in an unloading station for unloading electronic components and / or workpieces. Electronic components and / or workpieces can be supplied to the system by conveying workpiece carriers. Transferring from conveying workpiece carriers to manufacturing workpiece carriers is preferably carried out inside the loading station. This is accomplished by an automated robot preferably arranged inside the loading station. In one embodiment, for example, an automated robot can be arranged, which is designed to load manufacturing workpiece carriers at the loading station and unload manufacturing workpiece carriers at the unloading station. This makes it possible to transfer components from a conveying workpiece carrier that is usually specific to a manufacturer to a manufacturing workpiece carrier that is specific to the system. The manufacturing workpiece carrier can, for example, accommodate a large number of components here, wherein the conveying workpiece carrier only conveys one or several components. To this extent, components from multiple conveying workpiece carriers can be accommodated on a manufacturing workpiece carrier. Therefore, at least in the loading station, it is preferably transferred using a multi-gripper. A plurality of workpieces arranged next to one another on a plurality of transport workpiece carriers can be lifted or clamped simultaneously, for example, by means of gripper arms that are movable relative to one another, and can also be placed simultaneously on a production workpiece carrier. Since the gripper arms can be moved relative to one another, in particular pneumatically, any desired spatial arrangement on the production workpiece carrier is possible, even if the workpieces on the transport workpiece carriers are all arranged next to one another in a line. The multi-gripper is controlled in particular by a robot arm. The transfer of electronic components or workpieces from the production workpiece carrier to the transport workpiece carrier in the unloading station can also be performed by means of the multi-gripper.

[0038] Typically, automated robots are designed as 3D or 2D manipulation robots. Automated robots can advantageously be designed as single-axis manipulation robots. One-dimensional drives can be designed, for example, as linear drives, thereby enabling high-speed pick-and-place operations at low cost.

[0039] In a preferred embodiment, the alignment of at least one, in particular all of the accommodated electronic components and / or at least one, in particular all of the accommodated workpieces can be achieved by the gripper arm in an axis transverse or longitudinal to the multi-gripper, wherein the axis is in particular aligned horizontally. The longitudinal axis is preferably aligned in the direction of the line in which the gripper arms are arranged. The transverse direction is orthogonal thereto, wherein, in particular, both axes are in a horizontal plane. This allows alignment in at least one horizontal spatial direction when the workpiece or component is picked up by the gripper arm. The alignment is intended so that the workpiece or component is placed already aligned into the manufacturing workpiece carrier.

[0040] In a preferred embodiment, at least one gripper arm, in particular each gripper arm, can have at least two gripper elements for picking up an electronic component and / or a workpiece, which at least two gripper elements enable alignment of the electronic component and / or the workpiece on an axis, wherein the axis in particular passes through the two gripper elements. A gripper element must be understood as a clamping element, which can contact a component or a workpiece, in particular at a lateral edge. If two gripper elements are arranged oppositely on the gripper arm, the workpiece or component can be held between them in a clamped manner. Preferably, the gripper elements can be moved relative to each other in order to hold or release the component / workpiece.

[0041] The clamping elements are preferably designed for alignment. To this end, each clamping element is preferably in contact with a lateral edge surface of the workpiece so that the workpiece can be aligned in one direction. In one embodiment, all clamping arms of the multi-clamp are arranged parallel to or adjacent to each other on an axis so that all workpieces can be aligned identically. In particular, the relative clamping elements are therefore also arranged parallel to or on an axis relative to the corresponding adjacent clamping elements. In another embodiment, the clamping elements of the clamping arms are arranged adjacent to each other so that the rear surface of the clamping element and the rear surface of the clamping element of the adjacent clamping arm are aligned with each other in each case.

[0042] A preferred embodiment may include an alignment unit that enables alignment of electronic components and / or workpieces picked up by the multi-gripper on an axis parallel to and / or transverse to the axis of the multi-gripper. In one embodiment, a first alignment can be achieved by the gripper arms of the multi-gripper on an axis transverse to the axis of the multi-gripper. The alignment unit can be designed as a stop, towards which the multi-gripper moves, so that the free lateral edge of the workpiece that is not contacted by the clamping element contacts the alignment unit. If the alignment unit is designed as an edge, the workpieces / components are all aligned in the same way by contact with this edge.

[0043] In a preferred embodiment, the alignment unit can realize the alignment of the electronic assembly and / or the workpiece on the axis transverse to the alignment by means of a clamping element. The alignment unit is preferably designed to be similar to a multi-gripper here. This means that the alignment unit also has a clamping element designed to pick up or contact the workpiece. The clamping element of the alignment unit can move upward from below against the workpiece already held by the multi-gripper here, so as to clamp the workpiece and align them at two opposite free lateral edges. Therefore, the workpiece can sometimes be contacted by the clamping element at all four lateral edges so that the workpiece can be aligned. Therefore, alignment can be carried out in two directions, which extend orthogonally to each other in a preferred horizontal plane. The alignment unit is then preferably moved away from the workpiece / assembly again. The aligned assembly can then be placed on the aligned manufacturing workpiece carrier.

[0044] In a preferred embodiment, a centering device can be provided in the loading station for alignment and / or centering of the manufacturing workpiece carrier, which device realizes horizontal and / or vertical alignment and / or centering of the manufacturing workpiece carrier before accommodating the electronic components and / or workpieces. Preferably, the manufacturing workpiece carrier can include a conveying frame and a substrate accommodated therein, wherein the workpiece is positioned in the substrate. This allows the manufacturing workpiece carrier or the substrate to be accurately aligned relative to the conveying frame of the manufacturing workpiece carrier in order to accommodate the workpiece / component aligned with the multi-gripper with an accurate fit.

[0045] The centering device can realize the centering or alignment of the manufacturing workpiece carrier relative to the conveying unit. This makes the manufacturing workpiece carrier actually designed in two parts, wherein the so-called base plate is provided for accommodating the area of ​​the workpiece or electronic component, and the conveying frame is designed as a frame element for accommodating the base plate. This makes the base plate aligned and fixed relative to the conveying frame. The base plate is hereinafter the basic element of the manufacturing workpiece carrier, or the base plate can be provided with the manufacturing workpiece carrier as a whole or its basic features and the frame element, because the base plate includes sockets for a large number of workpieces / components. The base plate can preferably be moved, raised or lowered relative to the conveying frame here. In addition, the base plate and the conveying frame can be rotated relative to each other. This allows the sockets of the workpiece / component to be aligned. This can preferably be used for the correct alignment of the position of the workpiece relative to the pressure plunger in the manufacturing station for pressure treatment.

[0046] In a preferred embodiment, the centering device can include a centering plate and / or a lifting unit, wherein the control is in particular pneumatic. The manufacturing workpiece carrier or substrate is arranged on the centering plate so that the centering plate can be moved relative to the manufacturing workpiece carrier or the conveying frame. Preferably, at least two, in particular three, supports are used so that the centering plate and the manufacturing workpiece carrier or substrate are preferably in contact. The supports can be ball bearing type supports. The centering plate can be lifted and lowered using the lifting unit.

[0047] In a preferred embodiment, at least one protrusion or pin that can contact a stopper on the workpiece carrier or substrate can be arranged on the centering plate, so that the alignment and / or centering of the workpiece carrier relative to the centering plate can be carried out in the horizontal clamping plane. This can be achieved, for example, using a pressing element, which is pressed against the workpiece carrier or substrate, wherein the protrusion or pin contacts the stopper. This allows the workpiece carrier or substrate to be aligned in the conveying frame of the workpiece carrier. The pressing element can be designed as an eccentric device and moved at right angles to the clamping plane, in particular by an electric motor. Optionally, the pressing element can be designed as a plunger in the clamping plane and, for example, controlled by a pneumatic cylinder.

[0048] In another embodiment, a suction gripper can be used for the transfer, which can lift the workpiece by means of negative pressure while avoiding mechanical clamping forces. In addition, more than one automated robot can be arranged inside the system. In a preferred embodiment, one automated robot is arranged in the loading station and another automated robot is arranged in the unloading station. In this way, continuous loading or unloading of the manufacturing workpiece carrier can be carried out inside the system, whereby assembly line production can be achieved particularly advantageously. Therefore, the specifications for the transport workpiece carrier are independent of the specifications for the manufacturing workpiece carrier suitable for the joining process (for example sintering or welding process).

[0049] The correct manufacturing (in particular the position and arrangement of the components on the manufacturing workpiece carrier at the loading station) can be optically checked and archived by at least one camera. At least one camera for optical alignment in the loading station and / or unloading station can also be provided for aligning the gripper arm of the automated robot / handling robot. For example, the camera can determine the correct alignment of the workpieces or the joining counterparts inside the workpiece (e.g. DCB (direct copper bonding)) relative to each other or relative to the manufacturing workpiece carrier and / or the covering foil / film and / or the covering mask, and transmit the adjustment information to the automated robot. This makes it possible, for example, to detect edge and angular contours and thereby determine the X / Y offset. The automated robot can take the form of a conventional industrial robot with an arm that can move around multiple axes. It can also be designed as a single-axis or multi-axis transport system for transporting workpiece carriers, foils / films, covering masks, etc.

[0050] The stacking bin for the manufactured workpiece carriers can be arranged inside or in front of the loading station, which enables the overall transport unit to have a sequential chain of manufactured workpiece carriers, in particular at the start of production. Thus, the continuous process can start immediately without having to wait for the first manufactured workpiece carrier to return. Thus, even during the start of production, high unit productivity can be achieved, in particular if a multi-gripper can be used to pick up multiple workpieces simultaneously.

[0051] In particular, at the end of a batch run in which a plurality of workpiece carriers are to be joined, in the case of a last manufactured workpiece carrier which cannot be completely filled with workpieces, dummy workpieces can be placed at the remaining empty positions of the manufactured workpiece carrier and, after the joining process, in particular after a sintering or diffusion welding process, the dummy workpieces can be placed from the manufactured workpiece carrier back to the dummy positions.

[0052] In a preferred embodiment, another conveying unit can be provided for accommodating the conveying workpiece carrier and can be moved from the loading station to the unloading station independently of the module, in particular bypassing the manufacturing station. This other conveying unit can be guided to the system in the loading station, for example, and guided away from the system in the unloading station. Blanks or unconnected components that can originate from external manufacturers are particularly arranged on the conveying workpiece carrier. Bypassing the manufacturing station should be understood as already described above. In particular, the other conveying unit can be moved autonomously and in particular independently of the conveying unit of the manufacturing workpiece carrier of the system. The conveying unit of the conveying workpiece carrier can preferably move parallel to the modules of the system.

[0053] In a preferred embodiment, the loading station can be configured to attach a processing cover to the electronic component and / or the workpiece, and / or the unloading station can be configured to remove the processing cover from the electronic component and / or the workpiece, in particular by means of an automated robot to attach and / or remove the processing cover. The processing cover can be a mask or a cover mask, in particular for sintering treatment, and the processing cover can be placed in an automated manner on the electronic component and / or the workpiece arranged on the manufacturing workpiece carrier. The processing cover can be connected using an automated device or an automated robot. The processing cover can be reciprocated / displaced between a parking position (in particular for the intermediate storage of the processing cover) and a position on the manufacturing workpiece carrier here. The processing cover can be installed on a type of storage device and moved in place using a track. This can be controlled by a computer. If multiple manufacturing workpiece carriers are set inside the system, in particular for continuous manufacturing, multiple processing covers are preferably arranged inside the system. For example, if the processing cover previously arranged there has been removed or placed on the manufacturing workpiece carrier, the processing cover can be continuously placed in the parking position. In addition, a processing cover can be set for each manufacturing workpiece carrier, wherein, when the manufacturing workpiece carrier returns, the processing cover returns together with the manufacturing workpiece carrier. Before returning from the unloading station to the loading station, the process cover can be placed back on the manufacturing workpiece carrier for return transport.

[0054] In a preferred embodiment, the loading station and / or the unloading station may comprise at least two working positions, in particular three or four working positions, wherein the manufacturing workpiece carrier can be moved from one working position to an adjacent working position in an automated manner, in particular by means of an unloading unit. Each working position may perform different working steps from another working position. In a first working position, a processing cover, in particular a covering mask, may be placed, for example, on the manufacturing workpiece carrier with the electronic component and / or the workpiece. Optionally, the mask may also not be used. After passing through the final working position, the electronic component and / or the workpiece on the manufacturing workpiece carrier are preferably prepared in such a way that the electronic component and / or the workpiece can pass through the manufacturing station, in particular a preheating module, a welding or sintering module and a cooling module. The displacement unit may be designed as a conveying unit, such as a belt conveyor or a conveyor belt. The displacement unit may form a loop for returning the manufacturing workpiece carrier together with the conveying unit, so as to provide a production line. If a plurality of manufacturing workpiece carriers are arranged in the system, the plurality of manufacturing workpiece carriers are preferably arranged on the displacement unit at a constant interval from one another. The workstations may be arranged sequentially and linearly one after another, or circularly adjacent to one another in the form of a rotary indexing table.

[0055] In a preferred embodiment, the loading station may comprise three working positions connected to each other by a displacement unit. For this purpose, the electronic component and / or the workpiece may be placed in an automated manner on the first working position by an automated robot. At least one mask may be placed in an automated manner on the electronic component and / or the workpiece as a first processing cover by an automated robot. Alternatively or additionally, in the second working position, at least one foil / film or a plurality of foils / films may be placed in an automated manner on the mask as a second processing cover or an optional mask by an automated robot, and in the third working position, the closure of the workpiece carrier to the foil / film may occur automatically, in particular using a retaining frame, in particular a retaining ring. It is conceivable that a single automated robot is provided for performing all operations in all working positions. Preferably, a separate automated robot or other type of computer-controlled actuator device is provided at each working position so as to perform the corresponding working steps at the working position.

[0056] The foil / film transfer unit is used especially when the system is a sintering system. In the case of a welding system, the foil / film transfer unit can be omitted and the foil / film can be used arbitrarily.

[0057] The foil / film can be, for example, a heat-resistant equalizing foil / film, for example in a temperature range of about 250° C., such as a PTFE film, a FKM film, a silicone mold, a polyurethane elastomer film, an Eladur film, a PFA film, a PI film, etc., such as a graphite film, an aluminum foil, etc. The foil / film can preferably be used as protection for SMD (surface mounted devices). SMD components have an extremely compact design. Such electronic components have no leads, but are directly soldered to a printed circuit board with the aid of solderable lands. This technology can also be designated as surface mounting. In the context of the sintering process, the foil / film can prevent the gel pad from undesirably adhering to the component surface.

[0058] In a preferred embodiment, the loading station and the unloading station can be designed as mirror images of each other. Thus, the electronic components and / or workpieces in the loading station can be particularly advantageously continuously prepared for a subsequent sintering operation or welding operation. Conversely, in the unloading station, auxiliary devices required for sintering or welding (e.g., processing covers or foils / films) can be continuously removed again. Since the working steps of the loading station are performed in a complementary manner in particular in the unloading station, the two modules can preferably have the same structure, but be designed as mirror images or complements of each other.

[0059] In a preferred embodiment, a conveying unit for conveying a manufacturing workpiece carrier may comprise a lifting unit and an underfloor conveying unit, wherein the moving path of the underfloor conveying unit is arranged inside the system, in particular through a manufacturing station, in particular an airtight processing chamber, and in particular extends below the level at which loading and / or unloading of the manufacturing workpiece carrier and the conveying of the manufacturing workpiece carrier through the manufacturing station occur. Bypassing the manufacturing station should be understood as described above. The manufacturing workpiece carrier can be moved by the underfloor conveying unit parallel to the working position of the loading station or the unloading station. This can save structural space because the return can be carried out inside the system. The manufacturing workpiece carrier can therefore be particularly advantageously moved from the loading station to the unloading station. In the unloading station, before the manufacturing workpiece carrier returns to the loading station, another conveying unit can pick up electronic components and / or workpieces from the manufacturing workpiece carrier.

[0060] In a preferred embodiment, an optical inspection unit including at least one inspection camera may be provided. The at least one inspection camera may be in the loading station and / or the unloading station and may at least detect and record the correct alignment of the position of the components and / or the workpieces in the manufacturing workpiece carrier. The inspection camera may verify the rotational position and the XY offset of the workpiece on the manufacturing workpiece carrier. Preferably, the inspection camera or the second inspection camera may also detect the rotational position and the XY offset of the workpiece on the transport workpiece carrier or the relative position of the joining counterparts (joining counterparts) (DCB-direct copper bonding) of the workpiece. The inspection camera may be provided with an illumination unit. Advantageously, at least one inspection camera may be arranged on a gripper arm of the automated robot, which gripper arm ensures that the workpiece is transferred from the transport workpiece carrier to the manufacturing workpiece carrier. Such an optical inspection camera may be included in the loading station and the unloading station. The inspection unit may record the position and appearance of the workpiece before and after the connection. In addition, the inspection unit may control the automated robot by monitoring the XY offset. For example, once the workpiece has been gripped by the automated robot, the position correction of the automated robot may be determined by means of the first inspection camera. With the second inspection camera, the exact position of the manufacturing workpiece carrier can be determined so that the workpiece can be placed in the manufacturing workpiece carrier without positional offset and with exact alignment. This allows incorrect positioning of the workpiece in the transport workpiece carrier to be corrected and ensures exact positioning in the manufacturing workpiece carrier. To this end, one or more optical reference marks can be provided on the manufacturing workpiece carrier for simplified detection by the inspection tool. The reference marks allow reliable and accurate identification of the position, enabling the use of inspection cameras with low optical resolution or in difficult light conditions or with simple auxiliary lighting. For example, lightweight inspection cameras can also be used for gripper arms, thereby achieving high movement speeds and low weight for automated robots.

[0061] Preferred embodiments can include a foil / film transfer unit with at least one, particularly two or more foil / film transfer tools, which is designed for the automatic attachment of the foil / film as a processing cover in a loading station. The foil / film transfer unit is designed to place the foil / film on a manufacturing workpiece carrier with electronic components and / or workpieces, preferably on a mask. The foil / film transfer tool can be, for example, designed to have a gripper, wherein the foil / film can be pneumatically and / or by vacuum pick-up. In this respect, the foil / film transfer tool can be considered as a processing unit that can pick up the foil / film, which can be in the form of pre-cut foil / film, and can be placed in spatially different positions again. For example, the foil / film can be picked up by a vacuum nozzle arranged on the foil / film transfer tool. Therefore, the placement of the foil / film can be carried out in an automated manner or a fully automated manner. Human intervention is unnecessary. In this way, a clean room, particularly an ISO 5 clean room, can be provided.

[0062] In a preferred embodiment, the foil / film transfer unit can include at least one, particularly two foil / film stacks, which are designed as foil / film bins and have a removal surface for top foil / film at the top. Therefore, foil / film can be an independent foil / film element accurately prepared for the workpiece accommodating area of ​​the manufacturing workpiece carrier. Therefore, the foil / film stack of these independent foil / film elements can be composed of the stack of independent foil / film pre-cut, and the stack of independent foil / film can be placed continuously, particularly in the working position of the loading station, to the manufacturing workpiece carrier passing the working position. For this reason, the top or bottom foil / film can be removed at the removal surface in each case, that side of the top or bottom foil / film of the stack being arranged. At least one foil / film stack (particularly two foil / film stacks) can be arranged beside the loading station or in the loading station. If there are two foil / film stacks, then uninterrupted assembly line production can be particularly advantageously set. Therefore, the first foil / film stack can be refilled, and foil / film continues to be removed from the second foil / film stack simultaneously. A foil / film transfer unit with a foil / film stack and a foil / film transfer tool may preferably be arranged inside the system.

[0063] The foil / film stacking with pre-cut foil / film makes the foil / film blank optimized, reduces waste, thereby saves cost.Preferably, foil / film can be suitable for manufacturing the shape of workpiece carrier and holding frame, and in particular, foil / film can be designed as circle, rectangle, square or hexagon.The change of foil / film and the change between two foil / film stackings are automatic, resulting in long cycle time, and almost no production delay or idle time.The uniformity of temperature between foil / film stacking and ambient temperature can be achieved, which can not be guaranteed when removing foil / film from roller.The foil / film blank of different thickness and different foil / film or material type can be set on foil / film stacking, for sequential removal and easily adapt to.When production is completed, foil / film imitation (foil / film dummy) can also be set, for example, as plastics or metal sheets in foil / film stacking, so that unnecessary waste or foil / film waste can not be produced. The thickness of the foil / film may be 1 mm or less, in particular 0.25 mm or less, preferably 0.1 mm or less, especially 0.05 mm or less, and the number of foils / films in the foil / film stack may also correspond exactly to the number of components / parts to be processed. ESD (electrostatic discharge) techniques may be used for loading and unloading the foil / film stack to prevent the foils / films from electrostatically adhering to each other.

[0064] In principle, it is conceivable to remove the bottom or top foil / film from the foil / film stack. In a preferred embodiment, the foil / film stack can have a foil / film lifting unit, which can gradually lift the foil / film stack towards the top. The top foil / film of the foil / film stack can be arranged at a substantially constant height in this way. In this way, if the foil / film stack moves on the same movement path, in particular continuously at the same height, it can be ensured that the foil / film transfer tool can reach the top foil / film of the foil / film stack in each case.

[0065] In another embodiment, a continuous foil / film on a roller can be used to replace a separate foil / film. A separate foil / film portion or foil / film can be separated or cut from a continuous foil / film. A continuous foil / film can, for example, be wound on a roller. Using a foil / film feed roller, the front end of the continuous foil / film can be clamped and guided to a clamping position by the rotation of the foil / film feed roller. The end of the accessible continuous foil / film can therefore be pulled out to a desired length by a clamp. Preferably, the foil / film feed roller is slightly lifted during the pulling process. Once the desired length is reached, the foil / film feed roller is preferably placed downward on the foil / film so that it is fixed in place. The foil / film can then be stretched to the desired length by a clamp and cut at a desired position by a separating element. The foil / film can then, for example, be cleaned before being placed on a manufacturing workpiece carrier. By constantly repeating the steps just described, a separate foil / film portion can be provided for a plurality of manufacturing workpiece carriers. The entire device can be arranged in the region of a loading station, particularly arranged at a working position where the foil / film is attached to a filled manufacturing workpiece carrier.

[0066] The invention also provides a foil / film transfer unit. The foil / film transfer unit is particularly suitable for use in a system as described above. Furthermore, the foil / film transfer unit can be used independently of the above system and / or can be retrofitted into or on an existing system, for example.

[0067] It is proposed to comprise at least one, in particular two foil / film transfer tools and at least one, in particular two foil / film stacks. The above-mentioned features and advantages also apply to a separate foil / film transfer unit.

[0068] A foil / film transfer unit is used, in particular a foil / film transfer unit which can pick up a foil / film, in particular a foil / film transfer unit of a heat-resistant isostatic foil / film (e.g. a temperature range of about 250° C.), such as a PTFE film, FKM film, silicone mold, PFA film, PI film, aluminum foil, graphite film, etc. The use of such foils / films has been described: they can be used in the sintering process as a sintering mat or a process cover between the hard punch and the component surface and / or a covering mask on the component.

[0069] A preferred embodiment may include a cleaning unit for cleaning the top and / or bottom foil / film before transfer to the electronic component and / or workpiece. In this way, any foil / film can be cleaned by the cleaning unit, for example before being placed on a manufacturing workpiece carrier with electronic components and / or workpieces. The cleaning unit can be arranged, for example, between the foil / film stack and the location of the manufacturing workpiece carrier.

[0070] When removing foils / films from a foil / film stack, these foils / films can adhere to each other primarily due to static electricity. In order to avoid this, and in order to be able to use different foil / film materials, the foils / films can advantageously be statically discharged. This can be achieved, for example, using an ionization system, such as that from Keyence Deutschland GmbH, Neu-Isenburg. Using automatic ion control by means of an ionizer, electrostatic charges can be neutralized quickly and reliably, regardless of polarity. For this purpose, the discharge rod for applying the ions can be operated with or without compressed air.

[0071] In a preferred embodiment, the foil / film stack can be designed as a foil / film warehouse with a foil / film lifting unit so that the corresponding top foil / film of the foil / film stack can be moved toward the top by a certain upward travel, and the foil / film transfer tool has a height balancing system. For example, in each case, after removing a certain amount of foil / film from the foil / film stack, an upward travel of 5mm to 15mm, particularly 10mm can be performed. For example, after removing 5 to 15, particularly 10 foils / films from the foil / film stack, the foil / film lifting unit can move upward by 10mm. The height balancing system enables the foil / film transfer tool to compensate for the deviation of the height at which the top foil / film to be removed is located. In this way, the foil / film transfer tool can actually set tolerances when accommodating foil / film. In particular, the tolerances of the height at which the top foil / film of the foil / film stack is located can be equalized.

[0072] In a preferred embodiment, the foil / film stack may comprise a plurality of foils / films. In particular, the foil / film stack may comprise foils / films for production within a time period, for example 24 hours. Other time periods are also conceivable.

[0073] In a preferred embodiment, the cleaning unit can comprise a linear cleaning unit, or a surface cleaning system designed for contactless operation. The linear cleaning unit can in each case pass one foil / film through the cleaning system. In this case, the foil / film can, for example, first be placed on the linear cleaning unit with a first foil / film transfer tool, moved there and cleaned, and then removed again from the cleaning unit with a second foil / film transfer tool.

[0074] In a preferred embodiment, the cleaning unit can be designed as a surface cleaning system that operates contactlessly. This makes it advantageous to remove contaminants from three-dimensional or patterned surfaces. For example, contaminants can be removed by pulsating and highly turbulent air flows. In particular, using compressed air and / or vacuum and / or ionized air (particularly in that order), positive and negative charges can be introduced into the foil / membrane to prevent dirt particles from electrostatically adhering to the membrane surface.

[0075] In a preferred embodiment, the foil / film can be electrostatically discharged in the cleaning unit by introducing positive and negative charges. Air can then be blown onto the foil / film, preferably at high pressure, to remove impurities or particles. The particles are then sucked out, in particular, by suction (e.g. by an extraction unit). As a result, the foil / film is in a discharged state so that no particles can adhere due to electrostatic attraction. The method is particularly suitable for heat-resistant equalizing foils / films, for example in the temperature range of about 250° C., for example PTFE films, FKM films, silicone molds, PFA films, PI films, aluminum foils, graphite films or similar foil / film types.

[0076] Contactless cleaning can be achieved, for example, by pulsating compressed air from a rotating nozzle or by a flat jet nozzle. This is suitable, for example, for patterned components. Electrostatic charges can be eliminated by ionization, so that electrostatic attraction can be eliminated. Compressed air-assisted ionization provided by a flat nozzle has proven to be particularly advantageous. The extraction duct can in particular be integral. Such cleaning units can have a compact design for narrow working widths. These can also be used for retrofitting existing production facilities.

[0077] In a preferred embodiment, the cleaning unit may take the form of the STATIK-AIR product line from Dr. Escherich GmbH of Munich. This provides contact-free surface cleaning while eliminating electrostatic charges and removing disruptive dust and material particles. An integrated extraction duct is provided for clean room applications.

[0078] The individual foils / films (especially heat-resistant isostatic foils / films (e.g. temperature range of about 250° C.), such as PTFE films, FKM films, silicone films, PFA films, PI films, aluminum foils, graphite films, etc.) preferably do not adhere to each other due to the positive and negative charges. The foils / films can actually be deionized in this way. This can ensure that only the top foil / film is removed from the foil / film stack by the foil / film transfer tool.

[0079] In a preferred embodiment, height measurement and / or thickness measurement can be used to determine whether two foils / films have been picked up. Height measurement or thickness measurement can, for example, be in the form of transparency measurement, wherein, it can be determined by determining the optical transparency of one or more foils / films picked up to determine whether only one foil / film has been picked up. Alternatively, the thickness of the foil / film can be mechanically measured, particularly downstream of a cleaning station, and before the foil / film is placed on a manufacturing workpiece carrier or on one or more assemblies, to check whether the foil / film is reliably separated. This can be achieved by, for example, a scanning tip on the surface of a foil / film stack. This makes the thickness measurement system for covering all shapes, materials and thicknesses of the foil / film. In particular, opaque and transparent foils / films can therefore be checked. In this way, even with thick balanced foil / film, in other words, separation inspection can also be performed for highly balanced foils / films (such as silicon pads or reflective foils / films).

[0080] In a preferred embodiment, the first foil / film transfer tool may be designed to remove the top and / or bottom foil / film from the foil / film stack and insert it into the cleaning device, while the second foil / film transfer tool is designed to remove the foil / film from the cleaning unit and place it on a manufacturing workpiece carrier with electronic components and / or workpieces.

[0081] The subject of the invention is also a foil / film separation unit for the system according to the invention, preferably for a foil / film transfer unit. It is proposed to include a stripping unit for separating at least one foil / film from an electronic component and / or a workpiece. Therefore, the foil / film separation unit is preferably inserted or arranged in the unloading station. The foil / film is preferably separated after passing through the manufacturing station, i.e. after the sintering process has been carried out in the sintering facility. In the case of a welding system, a foil / film is usually not required.

[0082] In a preferred embodiment, the foil / film separation unit can be moved relative to the manufacture workpiece carrier, wherein, the stripping element can be placed below the foil / film, particularly below the independent foil / film element, and the retaining element is located above the foil / film, particularly above the independent foil / film element, so that the foil / film is separated from the electronic component and / or the workpiece. Preferably, the manufacture workpiece carrier is first moved to the appropriate working position in the unloading station. The foil / film is preferably designed as an independent foil / film, that is, it is designed as an independent foil / film element, and the independent foil / film is stored on the foil / film stack and has been trimmed to match the shape of the workpiece receiving area of ​​the manufacture workpiece carrier. This can be reused, saving material costs. Then, the stripping element can be used to lift and separate the foil / film or the independent foil / film element from the substrate (i.e. from the workpiece or the electronic component). The stripping element can be designed as, for example, a kind of slider, which passes through the entire width of the foil / film or the independent foil / film element. In order to facilitate the lifting of the foil / film and the arrangement of the stripping element below the foil / film, for example, a similar suction element can be used at the front end to lift the foil / film. When the stripping element is arranged below the foil / film, the retaining element is preferably placed above the foil / film so as to guide the foil / film between the stripping element and the retaining element. The retaining element can be designed identically to the stripping element in its geometry and shape. Therefore, the retaining element preferably extends over the entire width of the foil / film so that the foil / film can be guided between the stripping element and the retaining element. If the foil / film separation unit is now moved relative to the manufacture workpiece carrier, the foil / film is separated from the workpiece or electronic component over the entire length of the manufacture workpiece carrier. At the same time, the workpiece or component is retained on the manufacture workpiece carrier by the stripping element. The stripping element and the retaining element can be kept in place in the corresponding edge regions using a retaining structure, wherein the retaining structure can be moved along the working position. For this reason, the track element can be arranged outside the conveying unit, for example, in the working position, and the retaining structure can be moved along these elements.

[0083] In a preferred embodiment, the manufacturing workpiece carrier is movable relative to the foil / film separation unit, wherein the manufacturing workpiece carrier may be movable and the foil / film separation unit may be fixed. In such an embodiment, the manufacturing workpiece carrier is preferably moved on the conveying unit while the foil / film separation unit remains in a fixed position. This also allows the foil / film to be separated from the manufacturing workpiece carrier.

[0084] Optional embodiment can comprise the contact element that can contact with at least one foil / film, wherein, foil / film can be picked up by the clamping element in the zone in front of the contact element, and can be removed from electronic assembly and / or workpiece by manufacturing the movement of workpiece carrier in the direction of clamping element.Especially, clamping element clamps foil / film when manufacturing workpiece carrier moves.Manufacturing workpiece carrier preferably moves in the direction of clamping element, makes to manufacture workpiece carrier actually pass below the clamping element, and foil / film is kept and is separated from manufacturing workpiece carrier simultaneously.It is also conceivable that in the process that foil / film is separated from manufacturing workpiece carrier, clamping element is removed, to keep the separated end of foil / film to be tightened.

[0085] In a preferred embodiment, the contact element can be designed as a roller, wherein the rolling motion of the roller on the surface of the foil / film can be carried out by the motion of the manufacturing workpiece carrier and when in contact with the foil / film. This allows the foil / film to be separated from the manufacturing workpiece carrier with a workpiece or assembly in a controlled manner. At the same time, the movement of the workpiece or assembly relative to the manufacturing workpiece carrier can be prevented. The contact element or roller preferably extends over the entire width of the foil / film or over the entire area where the workpiece / assembly is arranged on the manufacturing workpiece carrier. In other words, the roller can be designed as a drum or pressure roller, which ensures that the assembly or workpiece is positioned on the manufacturing workpiece carrier during the separation of the foil / film. In a preferred embodiment, the roller can be suitable for the arrangement of the workpiece or assembly on the manufacturing workpiece carrier. The roller can, for example, form a negative impression with a recessed area and a raised area, wherein the recessed area is arranged in the roller at those points where the workpiece or assembly is located when rolling on the manufacturing workpiece carrier. On the contrary, the raised area is arranged in the place where the roller does not contact the workpiece or assembly (because the foil / film is arranged between the roller and the workpiece or assembly, the roller will not really contact the workpiece or assembly). This ensures that a precise fitting position of the roller is achieved when rolling on the manufacturing workpiece carrier.

[0086] In a preferred embodiment, the rollers can extend over the width of several workpiece carriers in order to separate several foils / films from several workpiece carriers simultaneously.

[0087] In order to facilitate the separation of the foil / film from the production workpiece carrier, in particular to ensure that the foil / film is clamped by the clamping element, a foil / film lifter can be provided. The foil / film lifter can form a stop against which the foil / film moves when the production workpiece carrier on the transport unit moves. As a result, the end of the foil / film that is in contact with the foil / film lifter is slightly lifted and can be picked up more easily by the clamping element behind the foil / film lifter.

[0088] In a preferred embodiment, the foil / membrane separation unit can be arranged in the unloading station. Preferably, the foil / membrane separation unit is integrated in the working position where the foil / membrane is to be separated from the manufacturing workpiece carrier. In this case, the contact element, the foil / membrane lifter and the clamping element can be arranged in this working position.

[0089] In addition, the subject of the present invention is a manufacturing workpiece carrier with at least two workpieces for use in a system according to the present invention, in particular with a foil / film transfer unit according to the present invention. It is proposed that at least two workpieces are arranged one above the other on a manufacturing workpiece carrier. In such an embodiment, at least two workpieces are preferably arranged directly one above the other, wherein at least two workpieces are separated from each other only by a foil / film. Preferably, the workpieces arranged one above the other have the same design at least in terms of the shape and circumferential size of the geometry of the workpiece. In other words, this means that in particular two workpieces of equal size are arranged one above the other. In the sintering method, this makes it possible to manufacture two workpieces arranged one above the other in the sintering operation, wherein the two workpieces are separated from each other by at least one foil / film and therefore do not adhere to each other. Therefore, it is possible to manufacture two separated workpieces in a space- and time-saving manner.

[0090] In a preferred embodiment, the foil / membrane can be arranged between at least two workpieces. The foil / membrane is used in particular to separate the two workpieces during the sintering process. The foil / membrane can be designed as a single foil / membrane. It is also possible to arrange more than one foil / membrane between the workpieces, wherein these foils / membranes can be designed as protective foils / membranes and / or pressure equalizing foils / membranes.

[0091] In a preferred embodiment, at least three workpieces can be arranged one above the other on a production workpiece carrier. In such an embodiment, three workpieces arranged one above the other can be sintered simultaneously. For this purpose, in particular, at least one foil / film is arranged between each workpiece in order to separate the workpieces from each other.

[0092] In a preferred embodiment, the foil / membrane can be arranged below the bottom workpiece. This enables the sintered workpiece to be selectively separated from the fabricated workpiece carrier.

[0093] In a preferred embodiment, a plurality of first workpieces are arranged adjacent to one another on a production workpiece carrier, and a plurality of second workpieces are arranged above the first workpieces on the production workpiece carrier. Preferably, the first workpieces and the second workpieces are arranged in each case directly one above the other, wherein the respective first workpiece matches the respective second workpiece in terms of its geometry, in particular its circumferential shape. During the sintering process and the pressure thereby exerted on each workpiece, the respective first workpiece and the respective second workpiece can support one another. The sintering process can thereby be optimized for each production workpiece carrier.

[0094] The workpiece carrier according to the invention can be used at different locations within a sintering system. The loading and unloading of the workpiece carrier with at least two workpieces arranged one above the other can be manual or automatic. For example, multiple grippers can be used for loading and unloading. Robots with separate gripping elements, in particular in combination with suction elements, can also grip the workpieces individually.

[0095] The invention further relates to a method for connecting electronic components and / or for producing workpieces, in particular for production line production.

[0096] It is proposed that the pre-manufacturing of electronic components and / or workpieces is performed by a multi-gripper, by means of which at least two electronic components and / or workpieces are placed simultaneously on a manufacturing workpiece carrier in a loading station. This is done as a preparation for processing (in particular joining) in a manufacturing station, which in particular comprises a preheating module, a welding or sintering module as a joining module, and / or a cooling module.

[0097] It is proposed that the manufacturing workpiece carrier is moved in an automated manner from the loading station to at least the manufacturing station. In a further step, the manufacturing workpiece carrier is returned in an automated manner to the loading station, in particular bypassing the manufacturing station. Bypassing the manufacturing station is not to be understood as a spatial bypass, but rather as a functional bypass. This is to be understood as already described with respect to the system. In addition, it is conceivable that the manufacturing workpiece carrier is not guided to the loading station after passing the manufacturing station, but to the unloading station.

[0098] Alternatively, the transport workpiece carrier can be used as a manufacturing workpiece carrier, which means that no transfer of components between various workpiece carrier types is required and a return transport of the manufacturing workpiece carrier can be dispensed with.

[0099] The same features and advantages apply to the method described with reference to the system according to the invention. The method according to the invention enables an automated, in particular fully automated, process for the production of connected electronic components and / or workpieces. Furthermore, manual checking of individual method steps may not be necessary. In this way, a clean room, preferably an ISO 5 clean room, may be provided.

[0100] The method can be used, for example, to form welded joints or sintered joints between electronic components and / or workpieces. Such sintered joints can be an alternative to conventional welded joints and are used in particular in power electronics. With regard to sintered joints, reference should be made to the description associated with the system.

[0101] In order to provide a production line, the proposed method can be performed continuously and repeatedly. In this way, multiple electronic components and / or workpieces can be applied to the method. In particular, multiple manufacturing workpiece carriers can be pre-manufactured or loaded in the loading station at preferably the same time intervals.

[0102] Typically, the transport workpiece carrier can be used as a production workpiece carrier, wherein a separate transport system for returning the production workpiece carrier to the beginning of the system can be omitted.

[0103] In a preferred embodiment of the method, during pre-manufacturing at the loading station, the electronic components and / or workpieces can be transferred from a component-specific conveying workpiece carrier to a system-specific manufacturing workpiece carrier by a multi-gripper in an automated manner. To this end, the conveying workpiece carrier is preferably moved into the loading station so that the transfer is performed inside the loading station under controlled conditions. Then, after the electronic components and / or workpieces have passed through the manufacturing station, the same conveying workpiece carrier can be used to pick up the electronic components and / or workpieces again. The transfer of the electronic components and / or workpieces from the manufacturing workpiece carrier to the conveying workpiece carrier can be performed in the unloading station. The manufacturing workpiece carrier can accommodate components from multiple conveying workpiece carriers.

[0104] In a preferred embodiment of the method, after the electronic components and / or workpieces have passed through the manufacturing station (in particular before the manufacturing workpiece carrier automatically returns from the loading station to the unloading station), the electronic components and / or workpieces can be unloaded from the manufacturing workpiece carrier to the transport workpiece carrier by means of a multi-gripper in the unloading station. Preferably, the manufacturing workpiece carriers can reach the unloading station in particular at equal time intervals and be unloaded in each case. The electronic components and / or workpieces can be unloaded from the manufacturing workpiece carrier to one transport workpiece carrier or to a plurality of transport workpiece carriers.

[0105] In another preferred embodiment, at least one automatic attachment of at least one processing cover (in particular placing at least one mask and / or at least one foil / film on the electronic component and / or the workpiece) can be performed during pre-manufacturing. The processing cover can be a mask or a cover mask, which can be placed in an automated manner on the electronic component and / or the workpiece arranged on the manufacturing workpiece carrier. The processing cover can be attached using an automated device or an automated robot. The processing cover can here preferably be reciprocated or shifted between a parking position (in particular for intermediate storage of the processing cover) and a position on the manufacturing workpiece carrier. In addition, the features described with respect to the system also apply.

[0106] In a preferred embodiment of the method, a mask can be placed in an automated manner as a first processing cover on an electronic component and / or a workpiece arranged on a manufacturing workpiece carrier in a first working position in a loading station. In addition, a heat-resistant foil / film can be placed in an automated manner as a second processing cover on a mask in a second working position in a loading station, in particular for a sintering process. It is also conceivable not to provide a mask. Optionally, another balancing foil / film can be placed in place in addition. Then, in particular in a third working position, the foil / film can be fixed in place in an automated manner with a mask and a manufacturing workpiece carrier (preferably with a retaining frame, in particular a retaining ring). With regard to advantages and further features, reference should be made to the description relating to the system.

[0107] In a preferred embodiment, the working positions can be arranged in the reverse order in the unloading station and performed in the reverse order. Since the same steps that are also performed in the loading station are in particular performed complementarily in the unloading station, the two modules can preferably have the same design but mirror each other. If the manufactured component carrier is returned to the inlet of the system together with the component after passing through the system, the loading station can also be used as an unloading station at the same time.

[0108] In a preferred embodiment, the return of the manufacturing workpiece carrier can be carried out in a plane arranged below, above or adjacent to the horizontal plane in which the manufacturing workpiece carrier and the manufacturing station during loading and / or unloading are arranged. Preferably, the return is achieved using a lifting unit with an underfloor conveyor, wherein the manufacturing workpiece carrier is moved vertically downward or upward by a lifting unit by one level and then conveyed by the underfloor conveyor in the direction of the unloading station.

[0109] In a preferred embodiment, the manufacturing workpiece carrier can be returned by the first conveyor unit and the transport workpiece carrier can be arranged on a further conveyor unit, which is moved in an automated manner, wherein the first conveyor unit and the further conveyor unit can be moved independently of each other, in particular bypassing the manufacturing station. Bypassing the manufacturing station is to be understood as bypassing in the manner already described for the system. In addition, the same advantages apply as have already been described for the system.

[0110] In a preferred embodiment, the transport workpiece carrier can accommodate one electronic component and / or one workpiece, and the manufacturing workpiece carrier can accommodate more than two, preferably more than five, in particular seven or more, in particular twenty-four or more electronic components and / or workpieces. Thus, the manufacturing workpiece carrier can be paused at a certain position in the loading station during loading and / or unloading until the transport unit has completely loaded the manufacturing workpiece carrier with electronic components and / or workpieces.

[0111] In the process of joining under process atmosphere (for example vacuum sintering or vacuum welding or diffusion welding in process atmosphere), processing times are required to establish and release the required vacuum or process atmosphere, which leads to time lags in the production line. The time lags are caused by the opening and closing of the airtight airlocks, the accumulation and release of the process atmosphere in one or more process chambers, and by heating and cooling operations. It is also possible to achieve a high productivity of the remaining part of the production line by collecting a large number of workpieces in one workpiece carrier, wherein a relatively time-consuming welding or sintering method under process atmosphere can also simultaneously connect a large number of workpieces in parallel thereto. In addition, the conveying workpiece carrier can accommodate more than one electronic component and / or more than one workpiece. As a result, the manufacturing cycle time can be increased, especially in the case of production line. Another conveying unit can have a higher conveying speed for transporting the conveying workpiece carrier than the first conveying unit of the manufacturing workpiece carrier, especially if the manufacturing workpiece carrier accommodates components from multiple conveying workpiece carriers.

[0112] In a preferred embodiment, foil / film can be placed on a manufacturing workpiece carrier with electronic components and / or workpieces as a processing cover in a loading station, wherein the foil / film can be both a new foil / film and a foil / film that has been used in a previous operation of the method. This allows the foil / film that has been used to be reused to save material. The foil / film can be returned to the loading station from the unloading station to be reused, particularly to be transferred back to the loading station and reused there together with the manufacturing workpiece carrier. The foil / film can also be directly placed on the foil / film stack after removal, wherein, once a complete foil / film stack has accommodated a given number of foils / films, it can be returned to the loading station. This can be done using a displacement unit, which is preferably parallel to the movement path of the manufacturing workpiece carrier between the loading station, the manufacturing station and the particularly unloading station. The foil / film that has been used can preferably be cleaned by a cleaning unit before next use.

[0113] It is also conceivable that not a single foil / film is placed on the workpiece carrier, but one foil / film piece per workpiece or group of workpieces on the workpiece carrier, i.e. a plurality of individual foil / film pieces. The foil / film pieces can be placed one after the other or simultaneously on a plurality of workpieces and removed again in the unloading station.

[0114] In a preferred embodiment, foil / film transfer tool can be used to remove foil / film from foil / film stacking, and foil / film is placed on electronic components and / or workpieces, wherein, foil / film stacking gradually moves upward in the direction of the top of foil / film stacking, so that foil / film transfer tool can reach corresponding top foil / film. The features and advantages already described about the system according to the present invention and foil / film transfer unit are applicable to foil / film transfer tool after necessary modifications. Preferably, automatically check that only one foil / film or a predetermined number of foils / films are removed in the process of removal. For example, this can be achieved optically by measuring the transparency of the foil / film removed or the foil / film stacking removed and comparing it with a reference transparency value. Alternatively or additionally, the thickness of the foil / film removed or the foil / film stacking removed can be determined. In this way, it can be ensured that the correct foil / film is removed on the one hand, and only one or a desired number of foils / films are removed on the other hand. The thickness of any type of foil / film can be measured reliably and quickly using a high-precision digital sensor probe. This can be used independently of the color and for transparent or opaque foils / films and also in the case of wrinkled or flat foils / films. For example, the measuring position can be determined in this way at the periphery and the foil / film stack height can be determined before and after removal, or the thickness of the foil / film on a reference plane can be determined. For example, a sensor probe with a precision of 1 μm can be used, such as the Keyence GT2 digital sensor probe. When using a sensor probe, high precision or high repeatability can be presented. If the object for measurement must not be scratched under any circumstances, softer models or different shaft tips can be used. A long life of more than 20 million cycles for long-term use, as well as automatic calculation using multiple sensor probes are possible.

[0115] In a preferred embodiment, the foil / film stack can be moved upwards by a travel distance of 5 mm to 15 mm, in particular 10 mm, after a given number of foils / films have been moved again, wherein the foil / film stack is moved upwards, in particular after 5 to 10 foils / films have been removed. Thus, the foil / film transfer tool can selectively clamp the respective top foil / film of the foil / film stack even if the foil / film stack has a different number of foils / films over a period of time.

[0116] In a preferred embodiment, the foil / film can be automatically cleaned by a cleaning unit before being placed on a manufacturing workpiece carrier with electronic components and / or workpieces. Preferably, each foil / film can be supplied to the cleaning unit before being placed on a manufacturing workpiece carrier with electronic components and / or workpieces. For this purpose, the cleaning unit is preferably located in an enclosed space, in particular a clean room, in which the method is performed.

[0117] In a preferred embodiment, the foil / film can be electrostatically discharged in the cleaning unit, and then the contaminants can be removed by blowing out the contaminants using compressed air and / or negative pressure. The cleaning unit can, for example, perform non-contact surface cleaning. This advantageously removes contaminants from three-dimensional or patterned surfaces. For example, contaminants can be removed by pulsating and highly turbulent air flows. In particular, positive and negative charges can be introduced into the foil / film using compressed air and / or negative pressure down to vacuum and / or in particular with this smooth ionized air. This can advantageously further help prevent individual foils / films from adhering to each other.

[0118] In a preferred embodiment, at least two or more foils / film stacks can be arranged adjacent to each other, wherein, once the first foil / film stack or previous foil / film stack no longer comprises any foil / film, the second foil / film stack or another foil / film stack just moves to the position of the first foil / film stack or previous foil / film stack, thereby ensuring uninterrupted process. Various foils / film stacks can also accommodate different foils / films for different workpieces, thereby making it possible to produce different workpieces for each workpiece carrier assembly line. When removing foil / film from the first foil / film stack, the second foil / film stack can be refilled, or vice versa. A foil / film stack can for example comprise the foil / film that is enough to use the method to produce or manufacture within 24 hours. Other time periods or foil / film stacks of different sizes are also conceivable. It can also be conceivable that the predetermined order of different foils / films is synchronously included in a foil / film stack with the planned processing order of for example different workpieces.

[0119] In a preferred embodiment of the method, the foil / membrane can be removed in the unloading station by the foil / membrane separation unit according to the invention. For the method according to the invention with a foil / membrane separation unit, the same features and advantages as described with respect to the embodiment of the foil / membrane separation unit apply.

[0120] In a preferred embodiment of the method, at least the correct alignment of the position of the components and / or workpieces in the manufacturing workpiece carrier can be optically detected and recorded. To this end, a kind of inspection tool can be provided, which can detect the exact position and alignment of the workpiece in the manufacturing workpiece carrier by using at least one inspection camera, and correct it in combination with an automated robot. The automated robot that performs the insertion or position correction of the workpiece in the manufacturing workpiece carrier can be corrected using a detection device. When the workpiece is transferred from the conveying workpiece carrier to the manufacturing workpiece carrier in particular, the rotational alignment and the exact position can be checked and corrected. This is because when connecting workpieces, in particular by sintering or diffusion welding, accurate alignment is essential and can be ensured and recorded by an optical inspection tool. To this end, one or more optical reference marks can be provided on the manufacturing workpiece carrier for simplified inspection by the inspection tool.

[0121] Furthermore, the subject of the invention is a method for loading and unloading a workpiece carrier, in particular for loading a workpiece carrier according to the invention with a stack of workpieces or a level of workpieces. It is proposed that the method comprises the following steps: loading the workpiece carrier with at least one first workpiece or a first level of workpieces, subsequently placing a foil / membrane and / or a pressure pad or a balancing foil / membrane on the first workpiece or the first level of workpieces, subsequently further loading at least one second workpiece or a second level of workpieces above the foil / membrane or the pressure pad or the balancing foil / membrane and above the already arranged first workpiece, subsequently placing another foil / membrane and / or a pressure pad or a balancing foil / membrane on the second workpiece or the second level of workpieces. The steps described can be repeated as often as necessary so that a plurality of workpieces can be arranged one above the other. By this method, a plurality of workpieces arranged one above the other can be sintered in a jointed manner, thereby saving time and costs.

[0122] Advantageously, the foil / membrane can first be placed on the workpiece carrier before loading. Separating foils can also be arranged above and below each pressure pad or equalizing foil / membrane. The pressure pads or equalizing foil / membrane can also consist of silicon or a compressible, heat-resistant and compressible material. When pressure and temperature are applied, parts of the pads may adhere to the workpiece carrier and / or the workpiece and contaminate them. To prevent this, the contact surfaces of the pressure pads with the workpiece carrier and / or the workpiece can be protected by foil / membrane.

[0123] In another embodiment of the method, a centering device can be arranged in the loading station, wherein the centering device performs alignment and centering of the manufacturing workpiece carrier. This enables precise alignment of the manufacturing workpiece carrier with the workpiece / component.

[0124] In the unloading station, the steps for loading the multilayer sintered stack of workpieces can be mutatis mutandis in the opposite direction for unloading. In this way, first the foil / film and / or the pressure pad or the equalizing foil / film can be removed from the upper stack of workpieces of the production workpiece carrier, and then the upper workpiece or the upper horizontal workpiece can be removed. After this, another foil / film and / or another pressure pad or another equalizing foil / film can be removed, and another workpiece or another horizontal workpiece can be removed from the production workpiece carrier until the entire workpiece carrier has been emptied.

[0125] In a preferred embodiment of the method, the different steps can be performed at any two working positions within the loading station of the system according to the invention. The manufacturing workpiece carrier is reciprocated between the two working positions, in particular by a transfer unit. In particular, the loading of the manufacturing workpiece carrier with at least one workpiece is carried out at the first working position, and the foil / film is placed at the second working position. When performing the method according to the invention, the manufacturing workpiece carrier can be reciprocated between the two working positions in order to alternately place at least one workpiece and at least one foil / film.

[0126] In a preferred embodiment of the method, before placing the first foil / film and / or pressure pad or balancing foil / film, a plurality of first workpieces can be arranged adjacent to each other on the manufacturing workpiece carrier. In a subsequent step, a plurality of second workpieces can be placed on the first foil / film or pressure pad or balancing foil / film, wherein the second workpieces are arranged directly above the first workpiece so that during the sintering process, i.e. when pressure is applied, the workpieces support each other. In a so-called stacking arrangement, layers of a plurality of workpieces, preferably separated by foils / films and / or pressure pads or balancing foils / films, can be deposited on the workpiece carrier one layer above another, thereby greatly reducing time and costs. The foils / films and / or pressure pads or balancing foils / films can be arranged between the layers of the workpieces. The transfer and stacking of the layers of the workpieces is conveniently performed using a multi-gripper.

[0127] In a preferred embodiment of the loading method, before placing the foil / film, an alignment of at least the first workpiece, in particular several workpieces and preferably all clamped workpieces can be performed by the multi-gripper and / or the alignment unit, so that at least one workpiece / component is aligned in a horizontal plane transversely and / or longitudinally to the axis of the multi-gripper. The alignment by the multi-gripper can be performed, for example, by means of clamping elements, as described with respect to the device. Furthermore, the alignment unit can be designed as described with respect to the device.

[0128] In another preferred embodiment of the loading method, the alignment of the manufacturing workpiece carrier or the substrate of the manufacturing workpiece carrier accommodated in the conveying frame can be performed by means of a centering device. Thus, before loading the manufacturing workpiece carrier, the manufacturing workpiece carrier or the substrate accommodated in the conveying frame of the manufacturing workpiece carrier can be accurately aligned. This serves to accurately align the position of the manufacturing workpiece carrier or the substrate relative to the conveying unit or the displacement unit of the conveying unit.

[0129] The two loading methods described above serve for the precise and correctly positioned alignment and positioning of the workpieces or electronic components on the manufacturing workpiece carrier. This is essential for further processing in a subsequent manufacturing station. Thus, pressing operations can be carried out in manufacturing stations with several pressure plungers, such as sintering or diffusion welding methods, in which the precise positioning and alignment of the components or workpieces relative to the pressure plungers is essential for the quality of the connection. The alignment of the workpiece on the manufacturing workpiece carrier and the further alignment of the manufacturing workpiece carrier or the substrate comprised therein relative to the transfer unit or the displacement unit of the transfer unit ensure the subsequent alignment of the workpiece or electronic component relative to the pressure plungers in the loading station.

[0130] In general, it can be said that the advantages according to the invention can be achieved with all different versions used, in particular, in sintering or welding systems.

[0131] Firstly, by using at least one multi-gripper, in particular at least one multi-gripper of four, a time-saving and cost-saving transfer of workpieces or electronic components can be achieved. The multi-gripper can be used in a loading station and / or an unloading station. In particular, the multi-gripper is used at least in the loading station to transfer the workpieces or electronic components from the transport workpiece carrier to the manufacturing workpiece carrier. The same or another multi-gripper can advantageously be used in the unloading station for unloading.

[0132] Furthermore, for the foil / membrane transfer unit according to the invention and / or for the foil / membrane separation unit according to the invention, the placement, removal and cleaning of the foil / membrane can be improved by time-saving placement and removal and by cost-saving reuse of the foil / membrane. Devices and methods for cutting the foil / membrane on at least one roller can also be used to assist this.

[0133] Using the foil / membrane separation unit and other methods for foil / membrane removal according to the present invention, foil / membrane removal can be achieved by peeling, in particular by sintering foil / membrane removal, and adhesion to substrates (such as workpieces and / or electronic components) or jamming to each other can be prevented.

[0134] The stack loading according to the invention of a plurality of workpieces and / or electronic components one above the other to form a processing stack of workpieces or electronic assemblies also results in a saving of time and material.

[0135] These aforementioned embodiments can be used or implemented individually or in combination in the system discussed according to the present invention. Therefore, the system according to the present invention can be used to achieve the respective features and advantages. Therefore, a joint invention overall concept is proposed.

[0136] The features and advantages described also apply to the system according to the invention, the foil / film transfer unit according to the invention and the method according to the invention. In this case, these features can be combined in different ways. BRIEF DESCRIPTION OF THE DRAWINGS

[0137] Further advantages are revealed by the drawings and the description of the drawings. The drawings show practical examples of the invention. The drawings, the description and the claims contain a plurality of features in combination. A person skilled in the art will also advantageously consider these features individually and combine them into meaningful further combinations.

[0138] In the figure:

[0139] Figure 1 An embodiment of a system according to the invention for connecting electronic components and / or for manufacturing a workpiece having a plurality of modules is shown;

[0140] Figure 2 The plan view shows Figure 1 The system in

[0141] Figure 3 An embodiment of a module of the system according to the invention is shown, the module being designed as a loading station;

[0142] Figure 4 The plan view shows Figure 3 Module in, the plan view showing different working positions and another embodiment of the conveying unit;

[0143] Figure 5 Shows Figure 4 Flow chart of the different possible work steps in a loading station;

[0144] Figure 6 An embodiment of a module of the system according to the invention is shown, the module being designed as an unloading station;

[0145] Figure 7 The plan view shows Figure 6 Module in, the plan view showing different working positions and embodiments of the conveying and lifting units;

[0146] Figure 8 Shows Figure 7 Flow chart of the different possible working steps in the unloading station;

[0147] Fig. 9 An embodiment of a foil / film transfer unit according to the invention with two foil / film transfer tools is shown, and two foil / film stacks are shown;

[0148] Fig.10 The plan view shows Fig. 9 Foil / film transfer unit in;

[0149] Fig.11 Shows Fig.10 Flow chart of different possible working steps in a foil / film transfer unit;

[0150] Fig.12 An embodiment of a height equalization system for a foil / film stack and a foil / film transfer tool is shown;

[0151] Fig.13 Another embodiment of a loading station with a foil / film transfer unit and an optical inspection unit is shown in plan view;

[0152] Fig.14 Another embodiment of an unloading station with an optical inspection unit is shown;

[0153] Fig.15a , Fig.15b An embodiment of a manufacturing workpiece carrier with optical reference marks is shown in plan view;

[0154] Fig.16 A perspective view of a manufacturing workpiece carrier in combination with a workpiece, a process cover and a holding frame is shown;

[0155] Fig.17 Another embodiment of a system for connecting an electronic assembly having a plurality of modules and / or for manufacturing a workpiece according to the present invention is shown;

[0156] Fig.18 The previous view shows Fig.17 The system in

[0157] Fig.19 A further embodiment of a module of the system according to the invention is shown, which module is designed as a loading station;

[0158] Fig. 20 The plan view shows Fig.19 The module in the figure shows the different working positions;

[0159] Fig.21 Another embodiment of a module of the system according to the invention is shown, which module is designed as an unloading station;

[0160] Fig. 22 The plan view shows Fig.21 The module in the figure shows the different working positions;

[0161] Fig.23 Another embodiment of a loading station for a sintering process is shown;

[0162] Fig.24 Another embodiment of an unloading station for a sintering process is shown;

[0163] Fig.25 An embodiment of a foil / membrane separation unit is shown;

[0164] Fig.26 Shows Fig.25 Another view of an embodiment of;

[0165] Fig. 27 Another embodiment of a foil / membrane separation unit is shown;

[0166] Fig.28 Shows Fig. 27 Another view of an embodiment of;

[0167] Fig.29 An embodiment of a contact element is shown;

[0168] Fig.30 Shows Fig.29 Another view of an embodiment of;

[0169] Fig.31 Another embodiment of a foil / membrane separation unit is shown;

[0170] Fig.32 Another embodiment of a foil / membrane separation unit is shown;

[0171] Fig.33 An embodiment of a multi-holder is shown;

[0172] Fig.34 An embodiment of manufacturing a workpiece carrier is shown;

[0173] Fig.35 Another embodiment of a multi-holder is shown;

[0174] Fig.36 Another embodiment of a multi-holder is shown;

[0175] Fig.37 Shows Fig.36 Another view of an embodiment of;

[0176] Fig.38 An embodiment of a loading station with multiple grippers is shown;

[0177] Fig.39 An embodiment of an unloading station is shown;

[0178] Fig.40 An embodiment of a manufacturing workpiece carrier having workpieces or electronic components mounted one above the other is shown;

[0179] Fig.41 Another embodiment of a manufacturing workpiece carrier having workpieces or electronic components mounted one above the other is shown;

[0180] Fig.42 Another embodiment of a manufacturing workpiece carrier having workpieces or electronic components mounted one above the other is shown;

[0181] Fig.43 shows a portion of an embodiment of a loading station with multiple grippers and an alignment unit;

[0182] Fig.44 An embodiment of a multi-gripper is shown during operation;

[0183] Fig.45 shows a cross-sectional representation through a gripper arm of a multi-gripper;

[0184] Fig.46 A portion of an embodiment having multiple grippers and an alignment unit loading station is shown;

[0185] Fig.47showing a portion of a multi-gripper with an alignment unit;

[0186] Fig.48 A portion of a loading station with a centering device is shown;

[0187] Fig.49 shows a plan view of a loading station with a centering device;

[0188] Fig.50 A cross-sectional representation through a loading station with a centering device is shown;

[0189] Fig.51 Another view of the loading station with the centering device is shown;

[0190] Fig.52 Shows Fig.51 A view without a workpiece carrier;

[0191] Fig.53 A detailed view of the centering device is shown;

[0192] Fig.54 Another detailed view of the centering device is shown;

[0193] In the drawings, the same or similar components are denoted by the same reference numerals. DETAILED DESCRIPTION

[0194] Figure 1 An embodiment of a system 10 for connecting electronic components 12 and / or workpieces 14 according to the present invention is shown. The system 10 has a plurality of modules 16. Such a system 10 can, for example, form a sintering or welding system 10a. In this case, as previously mentioned, sintering can be understood as the manufacture or transformation of materials under high pressure and high temperature, as well as the connection of multiple elements during the connection process. Using such a system 10, for example, heat-resistant sintered joints or welded joints can be produced. In this embodiment, the system 10 shows five modules 16. The first module 16 is designed as a loading station 18. This is followed by a manufacturing station 21 having, for example, a preheating module, a sintering module and a cooling module. The module 16 at the right-hand end of the system 10 is designed as an unloading station 20. In order to form a clean room, in particular an ISO 5 clean room, the system is preferably designed as a closed room and / or gastight. Therefore, the modules 16 are preferably connected to each other, but are protected from external influences in a common housing.

[0195] Figure 2 The plan view shows Figure 110 in FIG. The individual chambers of the module 16 are visible therein. The system 10 is generally of elongated design so that a manufacturing workpiece carrier 22 with an electronic component 12 and / or a workpiece 14 can be passed through the system 10 in one direction, in particular in a straight line or on a straight path. The electronic component 12 and / or the workpiece 14 can be provided to the system 10, for example, from the side of the system 10 on the left in the figure. The electronic component 12 and / or the workpiece 14 can then be removed from the system 10 again on the side of the system 10 on the right in the figure.

[0196] Figure 3 A module 16 of a system 10 according to the invention is shown, which is designed as a loading station 18. The housing of the loading station 18 is shown as being open at the front. The individual working positions 26 of the loading station 18 can thus be distinguished. The working positions 26 are arranged at an upper or middle level E1 inside the loading station 18. Below the level E1, an underfloor conveying unit 60 of a conveying unit 24 located at the level E2 can be seen. This allows the manufacturing workpiece carrier 22 to return. This means that the manufacturing workpiece carrier 22 passes through the working position 26 in a direction opposite to the conveying direction of the conveying unit 24. In the figure, a lifting unit 25 of the conveying unit 24 is shown at the level E1. It is connected to the underfloor conveying unit 60. The lifting unit 25 can be used to convey the manufacturing workpiece carrier 22 from the lower level E2 (the underfloor conveying unit 60 is arranged on E2) to the upper level E1 (the working position 26 is arranged on E1). The lifting unit 25 can convey the manufacturing workpiece carrier 22 by moving from the level E1 to the level E2 or from the level E2 to the level E1. In the present embodiment, the lifting unit 25 is arranged at the working position 26c. Therefore, the workpiece carrier 22 can be guided to the working position 26c. In a different embodiment, the workpiece carrier 22 can be returned to any desired working position 26a-26d by the lifting unit 25. Thus, a closed conveying loop of the workpiece carrier 22 through the manufacturing station 21 is set.

[0197] Figure 4 Shows Figure 3 , which shows different working positions 26 and has an embodiment of a second transfer unit 42. The upper level E1 is shown in plan view. Figure 3 and Figure 4 As can be seen in FIG. 1 , the working positions 26 a - 26 d are arranged at this upper level E1 .

[0198] At the working position 26a, the electronic component 12 and / or the workpiece 14 is placed on the manufacturing workpiece carrier 22 by means of the transport workpiece carrier 44. This can also be referred to as pre-manufacturing in relation to the method 100. The electronic component 12 and / or the workpiece 14 can be transferred from the transport workpiece carrier 44 located on the second conveying unit 42 to the manufacturing workpiece carrier 22 using an automated robot 46 (in particular a robotic arm 47). The second conveying unit 42 can be located inside the system 10, but moves independently of the working position 26, and in particular moves independently of the loading station 18. In this way, the second conveying unit 42 can be moved in an automated manner, for example, from the loading station 18 to the unloading station 20 (not shown in this figure), in order to pick up the electronic component 12 and / or the workpiece 14 there again. The second conveying unit 42 can pick up one or more electronic components 12 and / or workpieces 14. The second conveying unit 42 comprises a lifting unit 61, by which an empty transport workpiece carrier 44 can be lowered from the first conveying level E1 to the second conveying level E2. Here, an empty transport workpiece carrier 44 can be moved through the system 10 up to the unloading station 20, bypassing the gas-tight system module 16, in order to pick up a workpiece 14 there again from the production workpiece carrier 22. For this purpose, the unloading station 20 can have a further lifting unit 61 for lifting the transport workpiece carrier from level E2 to level E1.

[0199] In addition, at the working position 26a, a processing cover 62 (particularly a mask 28) is set in place. The processing cover 62 may have an opening so that a sintered joint or a sol joint may be produced at a selected position of the opening. The processing cover 62 may initially be located at a parking position 29. The processing cover 62 may be moved in an automated manner from this parking position 29 arranged next to the working position 26a to a manufacturing workpiece carrier 22 having an electronic component 12 and / or a workpiece 14. This may be achieved, for example, by a type of track and a gripper or frame controlled in an automated manner. The processing cover 62 may also be placed by an automated robot 46. In this case, the automated robot 46 may be identical to the automated robot 46 for placing the electronic component 12 and / or the workpiece 14. In addition, a second and independent automated robot 47 (not shown) may be used. Once these steps have been performed, the manufacturing workpiece carrier 22 having the electronic component 12 and / or the workpiece 14 and the processing cover 62 may be moved in an automated manner to the next working position 26b. This may be accomplished by a displacement unit, such as a type of conveyor belt.

[0200] In this embodiment, the foil / film 30 is placed in the working position 26b on the already partially prefabricated manufacturing workpiece carrier 22. The foil / film 30 can also be positioned in a type of parking position next to the working position 26a before being moved to the working position 26b. This can also be achieved by rails with grippers or by another type of attachment device. Then, another prefabricated manufacturing workpiece carrier 22 with the foil / film 30 is moved in an automated manner to the next working position 26c.

[0201] In the working position 26c, the foil / film 30 is fixed to the production workpiece carrier 22 by means of a retaining ring 52. This is also done in an automated manner, for example by means of a computer-controlled actuator device or by means of another automated robot 46. The lifting unit 25 of the transfer unit 24 can also be seen in the working position 26c. The lifting unit 25 can return the production workpiece carrier 22 with the attached foil / film 30 and the process cover 62 from another module 16 (e.g. an unloading station 20) to the loading station 18 at the working position 26c. It is also conceivable that the production workpiece carrier 22 is returned by the transfer unit 24 to another working position 26 (not shown here).

[0202] The working position 26 d serves as a buffer position, in which further steps are required before the manufactured workpiece carrier 22 is moved in an automated manner into another module 16 , in particular a manufacturing station 21 .

[0203] The workpiece carrier 22 can be moved to Figure 4 The lift is moved to a level E2 below the level shown and returned to at least one of the working positions 26a-26d by means of the lifting unit 25 and the underfloor transfer unit 60 (not visible in this plan view).

[0204] Figure 5 Shows Figure 41 to 13 of the method 100 in the loading station 18 in the embodiment of the possible sequence of the individual working steps 1 to 13. In step 1, the manufacturing workpiece carrier 22 is initially taken out of the underfloor conveyor 60 of the unloading station 20 by the lifting unit 25. During the return process, the processing cover 62 and the retaining ring 52 can be arranged on the manufacturing workpiece carrier 22. Therefore, in step 1, the manufacturing workpiece carrier 22 can first be guided to the working position 26c. For example, the execution of all working steps in step 1 may take 19 seconds. In step 2, the retaining ring 52 can finally be removed at the working position 26c. For example, this may take 4 seconds. In step 3, the manufacturing workpiece carrier 22 can be transferred from the working position 26c to the working position 26a, for example, taking 15 seconds. In step 4, the processing cover 62 can finally be clamped in an automated manner and placed to the side of the parking position 29. For example, this may take 4 seconds. In step 5, the electronic component 12 and / or the workpiece 14 can be placed in the manufacturing workpiece carrier 22 using the automated robot 46. In this case, seven electronic components 12 and / or workpieces 14 can be moved every five seconds. Therefore, for example, the execution of the work step falling under step 5 may take 35 seconds. In step 6, the second conveyor unit 42 can be moved to the unloading station 20 in an automated manner. For example, this can also be done, for example, under the floor, in particular, taking 100 seconds. In step 7, the processing cover 62 can be placed back on the manufacturing workpiece carrier 22, for example, taking 4 seconds. In step 8, the manufacturing workpiece carrier 22 can be moved from the working position 26a to the working position 26b, for example, taking 7 seconds. In step 9, the foil / film 30 (particularly the heat-resistant foil / film) can be placed on the manufacturing workpiece carrier 22, for example, taking 4 seconds. In step 10, the manufacturing workpiece carrier 22 can be moved from the working position 26b to the working position 26c, for example, in particular, taking 7 seconds. In step 11, the retaining ring 52 can be placed back on the manufacturing workpiece carrier 22, for example, in particular, taking 4 seconds. In step 12, the workpiece carrier 22 can be moved from the working position 26c to the working position 26d, for example, in particular, taking 7 seconds. The working position 26d can constitute a buffer position. In step 13, the workpiece carrier 22 can finally be transferred from the working position 26d to another module 16, such as a preheating module of the manufacturing station 21. For example, this can be done within a time range of 10 seconds. Therefore, the total time for performing steps 1 to 13 can reach 80 seconds to 120 seconds, for example, in particular 100 seconds to 110 seconds. It should be understood that the performance may also take different times, wherein the time may be longer or shorter. Preferably, the time for performing steps 6 and 13 is not added to the total, because these steps can be performed in parallel with performing steps 1 to 5 and 7 to 12.

[0205] Figure 6Module 16 of system 10 according to the invention is shown, which module 16 is designed as an unloading station 20. The working position 26 of the unloading station 20 is connected to Figure 3 The working positions 26a-26d of the loading station 18 are arranged in the reverse order. Also shown is an upper level E1 in which the working positions 26a-26d are arranged, and a lower level E2 for returning the workpiece carriers 22, in particular using an underfloor transfer unit 60. The unloading station 20 can operate in a functionally complementary manner to the loading station 18.

[0206] Figure 7 Shows Figure 6 1 , a plan view of the module 16 in the upper level E1, showing the different working positions 26, and an embodiment of the second transfer unit 42. The working positions 26a-26d are mirrored, i.e. functionally complementary, arrangements to the working positions 26a-26d in the loading station 18. Thus, the working steps which are successively carried out in the loading station 18 can be carried out in a relative sequence in the unloading station 20. A further lifting unit 61 lifts the empty transfer workpiece carriers which have been transferred from the loading station 18 to the unloading station 20 from the level E2 to the level E1, where the processed workpieces 14 are transferred from the manufacturing workpiece carriers 22 by the automation robot 62.

[0207] Figure 8 A possible sequence of different working steps according to an embodiment of the method 100 of the present invention is shown. Figure 7The unloading station 20 of the manufacturing process is carried out in steps 1 to 16. In step 1, the manufacturing workpiece carrier 22 is moved from the manufacturing station 21 (in particular, the module 16 designed as a cooling module) to the unloading station 20. This can be carried out in an automated manner and, for example, takes 10 seconds. The manufacturing workpiece carrier 22 is then located in the working position 26d, which can be designed as a buffer station. In step 2, the manufacturing workpiece carrier 22 can be transferred from the working position 26d to the working position 26c, for example, taking 7 seconds. In step 3, the retaining ring 52 can be removed in an automated manner. The retaining ring 52 can be lifted, for example, which particularly takes 4 seconds. In step 4, the manufacturing workpiece carrier 22 can be moved from the working position 26c to the working position 26b, for example, taking 7 seconds. In step 5, the processing cover 62 on the manufacturing workpiece carrier 22 can be clamped, for example, by a holding unit, which particularly takes 3 seconds. Subsequently or in parallel, in step 6, the foil / film 30 (in particular the PDFE film) can be clamped and pulled out, which particularly takes 4 seconds. This can be realized by, for example, foil / film transfer tool 34. In step 7, the processing cover 62 can be finally released, which particularly takes 3 seconds. In step 8, the manufacturing workpiece carrier 22 can be transferred from the working position 26b to the working position 26a, particularly in an automated manner and, for example, takes 7 seconds. In step 9, the processing cover 62 can be finally clamped and placed in the parking position 29 on the side, which particularly takes 4 seconds. In step 10, the electronic components 12 and / or workpieces 14 can be transferred to the conveying workpiece carrier 44 from the manufacturing workpiece carrier 22 using an automated robot 46. In this case, seven electronic components 12 and / or workpieces 14 can be moved once every five seconds, for example, particularly within a time of 35 seconds. In step 11, the processing cover 62 can be finally placed back on the manufacturing workpiece carrier 22. This can also be completed in the working position 26a and, for example, takes 4 seconds. In step 12, the manufacturing workpiece carrier 22 can be transferred from the working position 26a to the working position 26c. This can preferably be carried out in an automated manner and, for example, takes 14 seconds. In this working position 26c, the retaining ring 52 can be placed back on the manufacturing workpiece carrier 22 in step 13, which in particular takes 4 seconds. Then, in step 14, the manufacturing workpiece carrier 22 can be transferred from the working position 26c to the working position 26d, which in particular takes 7 seconds. Subsequently, the manufacturing workpiece carrier 22 can be placed on the conveying unit 24 in step 15, in particular by means of the lifting unit 25 on the underfloor conveying unit 60. This can take, for example, 19 seconds. In step 16, the manufacturing workpiece carrier 22 can finally be transferred again to the loading station 18 by means of the underfloor conveying unit 60. The manufacturing workpiece carrier 22 can be returned to the working position 26c of the loading station 18, in which the retaining ring 52 can first be removed. The subsequent method 100 (in particular with steps 1 to 13) is already Figure 5The following is explained on the basis of

[0208] Fig. 9 An embodiment of a foil / film transfer unit 32 according to the invention is shown, which has two foil / film transfer tools 34 and two foil / film stacks 36. Using the foil / film transfer tools 34, the top foil / film 30 can be removed from the top 54 of the foil / film stack 36 in each case. The top 54 serves as a removal surface 56. The foil / film stack 36 is designed in each case as a foil / film magazine 38.

[0209] If the first foil / film storehouse 38 (left side in the figure) is empty, the second foil / film storehouse 38 can be moved to the position of the first foil / film storehouse 38. The second foil / film storehouse 38 can accommodate the same foil / film, but can also accommodate the foil / film of other types. In this way, a continuous process can be ensured. When the foil / film 30 is removed from the second foil / film storehouse 38, the first foil / film storehouse 38 can be refilled. The foil / film transfer unit 32 (particularly the foil / film transfer unit 32 with foil / film transfer tool 34 and foil / film storehouse 38) can be for example converted into any existing system. In addition, the putting down and / or removal of the foil / film 30 in the working position 26b of the loading station 18 and / or unloading station 20 of the system 10 of the present invention can be performed by such foil / film transfer unit 32.

[0210] Fig. 9 A cleaning unit 48 is also shown. One foil / film 30 is initially removed from a first foil / film magazine 38 by a first film transfer tool 34a and placed on the cleaning unit 48. Once the foil / film 30 has been cleaned, the foil / film 30 is removed from the cleaning unit 48 by a second foil / film transfer tool 34b and placed on a production workpiece carrier 22. The cleaning unit 48 may be a linear cleaning unit 64 or may be a surface cleaning system operating without contact. In the case of the system 10 according to the invention or the method 100 according to the invention, the foil / film 30 may be provided by the cleaning unit 48, in particular Figure 3 and Figure 4 The working position 26c of the loading station 18 in FIG.

[0211] The foil / film stack 36 can be pushed vertically upward by the foil / film lifting unit 40. In this way, the top foil / film 30 of the foil / film stack 36 can be located at substantially the same position in any case. This enables the foil / film transfer tool 34a to reliably remove the top foil / film 30 of the foil / film stack 36, regardless of the quantity of the foil / film 30 included in the foil / film stack 36. In addition, the foil / film transfer tool 34 can include a height equalization system 50, by which the position difference of the top foil / film 30 in the foil / film stack 36 can be equalized. The foil / film transfer tool 34 can be designed to, for example, have a gripper, wherein the foil / film 30 can be pneumatically and / or picked up by vacuum, particularly using a vacuum nozzle. In this way, the foil / film 30 can be particularly advantageously placed and cleaned in an automatic, particularly fully automatic manner. Manual intervention for placing or removing the foil / film 30 is unnecessary, so that a clean room, particularly an ISO 5 clean room, is particularly advantageously provided.

[0212] Fig.10 Shows Fig. 9 4. The plan view of the foil / film transfer unit 32 in FIG. The same parts are marked with the same reference numerals, so there is no need to process in more detail. This view advantageously shows that two foil / film stacks 36 are located next to the cleaning unit 48. In the upper part of the figure, i.e., next to the cleaning unit 48, foil / film transfer tool 34b can be used to place foil / film 30 on the manufacturing workpiece carrier 22 with electronic components 12 and / or workpieces 14 (not shown in the figure). Therefore, if the cleaning unit 48 is arranged in the loading station 18, then in the upper part of the figure, the manufacturing workpiece carrier 22 can be located next to the cleaning unit 48. In order to ensure that only one foil / film is removed, and it is the correct foil / film, a mechanical thickness measurement system (such as a high-precision sensor probe) can be used to check at position 3 to determine the thickness of the removed foil / film. Regardless of the type of foil / film, it can be determined whether one or more foils / films have been removed. In this case, the foil / film probe can determine the film thickness at the peripheral area so that the processing related area is not affected, such as for sintering.

[0213] Fig.11 Shows Fig.104. The present invention relates to a possible sequence of different working steps 1 to 13 of the foil / film transfer unit 32 in FIG. In step 1, an individual foil / film 30 can be removed from the foil / film stack 36 at position 1 and placed on the foil / film carrier 66 at position 2. In step 2, the foil / film carrier 66 can travel with the foil / film 30 from position 2 to position 3 through the cleaning unit 48. In step 3, the foil / film 30 can finally be placed on the manufacturing workpiece carrier 22 (not shown) located in position 4. In step 4, the foil / film carrier 66, which is now free of the foil / film 30, can be moved back to position 2 from position 3 again. In the fifth step, steps 1 to 4 can be repeated. In step 6, the foil / film stack 36 located at position 1 can be lifted. This can be done using the foil / film lifting unit 40. For example, after using 10 foils / films 30, or once the position of the top foil / film 30 has dropped by, for example, 10mm, the foil / film lifting unit 40 can, for example, move the complete foil / film stack 36 upwards by corresponding 10mm. Other height differences can be directly balanced by a height equalization system 50 at the foil / film transfer tool 34, for example, by a vacuum nozzle holder. In step 7, the foil / film stack 36 at position 6 can be refilled or filled. The foil / film stack 36 is preferably designed as a foil / film bin 38. Supplementation can be carried out during the ongoing operation of the foil / film transfer unit 32 or system 10 in particular. In step 8, the empty foil / film bin 38 at position 1 can be moved to position 5. In step 9, the foil / film bin 38 at position 6 that is now refilled can be moved to position 1. In step 10, another foil / film bin 38 at position 5 can finally be refilled during the ongoing operation. In step 11, the foil / film bin 38 that is emptied once more and is located at position 1 can be moved to position 6. In step 12, the now refilled foil / membrane magazine 38 may be moved from position 5 to position 1. In step 13, steps 5 to 12 may be repeated. Steps 1 to 13 as shown may be part of a method 100 according to the invention.

[0214] Fig.12 A height equalization system 50 of the foil / film stack 36 and the foil / film transfer tool 34 is shown. In this case, using the tolerance range of the foil / film transfer tool 34 and the travel distance of the foil / film stack 36, it can be ensured that in each case only the top foil / film 30 on the removal surface 56 of the foil / film stack 36 is picked up by the foil / film transfer tool 34. In this illustration, the height equalization system 50 is visible in the form of a vacuum nozzle holder. The vacuum nozzle holder can, for example, equalize a spring compensation of 10 mm to 30 mm, in particular 20 mm.

[0215] It goes without saying that the shown embodiments of the system 10 , the foil / film transfer unit 32 and the method 100 may be combined with one another, such that different embodiments of the foil / film transfer unit 32 may be combined with different embodiments of the system 10 or the method 100 , for example.

[0216] Fig.13 Shows Figure 4 Another embodiment of the loading station 18 is shown, in which the Fig.10 The foil / film transfer unit 32 is shown. To avoid repetition, reference is made to Figure 4 and Fig.10 Description regarding the same figure numbers in .

[0217] exist Fig.13 In the loading station in , a rectangular production workpiece carrier 22 with a capacity for twelve workpieces 14 is used, on which a cover mask 28 can be placed in the working position 26a and a cover foil / film 30 can be placed in the working position 26b.

[0218] At the entrance to the loading station 18, a stacking bin 68 for manufacturing workpiece carriers 22 is arranged, from which empty manufacturing workpiece carriers 22 can be removed or stored, at least when initially loading the system 10, or at the end of manufacturing. The automated robot 46 transfers the workpieces 14 from the transport workpiece carriers 44 to the manufacturing workpiece carriers 22 by means of the gripper arms 47, so that workpieces from twelve transport workpiece carriers 44 can be gathered in one manufacturing workpiece carrier 22. In this respect, the system can operate in a cycle that is twelve times slower than a conventional production line.

[0219] An inspection camera 70a which detects the rotational position and the X / Y positioning of the workpiece 14 on the transport workpiece carrier 44 is arranged above the lifting unit 61. With this information, the rotating arm 47 of the automation robot 46 can pick up the workpiece 14 and set it down in the exact rotational position and X / Y alignment on the manufacturing workpiece carrier 22. To this end, a further inspection camera 26b is aligned above the working position 26a on the manufacturing workpiece carrier 22 located there, which controls the exact placement position for the automation robot 46 and ensures the correct alignment of the workpiece 14 on the manufacturing workpiece carrier 22.

[0220] Fig.14 The associated unloading station 20 is shown. Fig.13 As another embodiment 20, this is also similar to Figure 7Using an inspection camera 70c above the work position 26a and another inspection camera 70d above the lifting unit 61, the optical inspection tool detects the rotational position and X / Y alignment of the workpiece 14 on the manufacturing workpiece carrier 22 and can accurately transfer the rotation and position of the workpiece to the transport workpiece carrier 44.

[0221] Fig.15a A plan view of an embodiment of an insert for a manufacturing workpiece carrier 22 with an optical reference mark 72 for an optical inspection tool is shown. The insert for the manufacturing workpiece carrier 22 can accommodate seven workpieces 14 in a matrix arrangement. Fastening elements 76 (e.g. recesses or pins) are provided for fastening in the tray-like frame of the manufacturing workpiece carrier 22. In the peripheral area of ​​the insert, a form-fitting edge portion 74 is provided for a correctly positioned form-fitting insertion in the frame of the manufacturing workpiece carrier 22.

[0222] The manufacturing workpiece carrier 22 has two optical reference marks 72 which are detected by the optical inspection tool and enable alignment of the manufacturing workpiece carrier even at a low resolution of the inspection camera 70 or under difficult lighting conditions. Fig.15b The detail in FIG. 7 shows an optical reference mark 72. This is composed of a series of concentric contours, in this case concentric rings. Their defined spacing and width enable accurate identification of the X / Y placement, and the position of the two reference marks 72 on the manufacturing workpiece carrier 22 relative to each other enables the rotational position of the manufacturing workpiece carrier 22 to be determined.

[0223] at last, Fig.16 Yes Fig.15a A perspective view of the combination of the frame and insert of the manufacturing workpiece carrier 22 with the workpieces accommodated therein is shown. These workpieces are covered by a process cover 62 in the form of a mask 28 for a vacuum sintering process and connected to the manufacturing workpiece carrier 22 by a retaining ring 52. Subsequently, a foil / film 30 may also be put in place for covering and optionally also fixed in place by a retaining ring 52. The foil / film 30 prevents the elastic sintering pad from adhering to the workpiece surface, for example during sintering.

[0224] Fig.17A further embodiment of a system 10 according to the invention for connecting an electronic component 12 having a plurality of modules and / or for manufacturing a workpiece 14 is shown. The system 10 has a plurality of modules 16. Such a system 10 can, for example, form a welding system 10a. Using such a system 10, for example, heat-resistant welded joints can be produced. In the present embodiment, the system 10 has three modules 16. The first module 16 is designed as a loading station 18. Connected to this is a manufacturing station 21. The module 16 at the right-hand end of the system 10 is designed as an unloading station 20. In order to form a clean room, in particular an ISO 5 clean room, the system is preferably designed as a closed room and / or gas-tight. Therefore, the modules 16 are preferably connected to one another, but are protected from external influences in a common housing. With reference to Figure 1 Unlike the embodiment of the present invention, the modules 16 are not directly connected to one another, but are connected via a plurality of conveying units 24. At the different levels E1, E2, the connection is preferably formed in each case as a closed room and / or a unit of airtight design, within which the conveying units 24 operate. One of the conveying units 24 can, for example, form an underfloor conveying unit 60.

[0225] Fig.18 Shows Fig.17 Front view of the system. The various connection areas between the modules 16 in which the transport unit 24 operates can be seen. Figure 1 and Figure 2 The embodiments are different, according to Fig.17 and Fig.18 The embodiment of can be specifically designed as a welding system. Figure 1 and Figure 2 The difference of the system is that in the welding system, the working position of the foil / film transfer unit 32 designed for placing the foil / film can be omitted. In a further aspect, according to Fig.17 and Fig.18 The embodiments can be combined with Figure 1 and Figure 2 The embodiment matches.

[0226] Fig.19Another embodiment of a module 16 of a system 10 according to the invention is shown, which module is designed as a loading station 18. The loading station 18 is shown without a housing so that the interior is visible. In this figure, a lifting unit 25 of a transfer unit 24 is shown at level E1. This is connected to an underfloor transfer unit 60 arranged at level E2, below level E1. The lifting unit 25 can be used to transfer a manufacturing workpiece carrier 22 from the lower level E2 (underfloor transfer unit 60 is arranged at E2) to the upper level E1 (working position 26 is arranged at E1). The lifting unit 25 can transfer the manufacturing workpiece carrier 22 by transferring it from level E1 to level E2 or from level E2 to level E1. This operation has been combined with Figure 3 Described in detail. Figure 3 The embodiments are different, according to Fig.19 The embodiment shows a method for Fig.17 and Fig.18 The loading station 18 of the welding system. In such an embodiment, the foil / film transfer unit can be omitted.

[0227] Fig. 20 Shows Fig.19 16, showing different working positions. In working position 26a, electronic components 12 and / or workpieces 14 are placed on manufacturing workpiece carrier 22. This can also be referred to as pre-manufacturing in connection with method 100. Electronic components 12 and / or workpieces 14 can be transferred to manufacturing workpiece carrier 22 using an automated robot 46, in particular a robot arm 47. This can also be achieved by overhead mounting. Figure 4 The embodiments are different, according to Fig. 20 The embodiment of has no working position 26b for placing the foil / film. Fig. 20 The embodiment of the invention particularly shows a welding system. Behind the working position 26a, a further production station 21 can be arranged, for example in the form of a conveyor belt, which serves as a buffer or buffer station. In the upper part of the figure, a second conveyor unit 42 is arranged, which has a lifting unit 61. An underfloor conveyor unit 60 is arranged at this second conveyor unit 42, on which a conveying workpiece carrier 44 is arranged. In a further embodiment, in addition to the foil / film transfer unit 32, the example can have a conveyor unit according to the invention. Figure 4 Similar features of the embodiments.

[0228] Fig.21 Another embodiment of a module 16 of a system 10 according to the invention is shown, which module 16 is designed as an unloading station 20. The unloading station 20 is shown without a housing, so that the interior is visible. In this figure, a lifting unit 25 of a conveying unit 24 is shown at level E1. This is connected to an underfloor conveying unit 60 arranged at level E2, below level E1.

[0229] Fig. 22 yes Fig.21 1 , a plan view of the module 16 in FIG. 1 , showing the working position 26 a. A further manufacturing station 21 is arranged upstream of the working position 26, which manufacturing station 21 can be designed as a cooling station, for example. Using a robot arm 47, the workpiece 14 can be transferred from the working position 26 a to the second transfer unit 42. The second transfer unit 42 comprises a lifting unit 61 for transferring the transfer workpiece carrier 44. In addition, a bin 78 is included that can accommodate empty transfer workpiece carriers 44.

[0230] Fig.23 and Fig.24 Two further embodiments of loading station 18 and unloading station 20 are shown as additional modules 16 of system 10. Generally speaking, these are similar in their functional procedures and structure. Fig.13 and Fig.14 The loading station 18 and the unloading station 20 described in detail correspond to each other.

[0231] Fig.23 One possible operating sequence for the loading station 18, when using a single top foil / membrane 30 for sintering the joint, is as follows:

[0232] - First, the manufacturing workpiece carrier 22 can be lifted from the underfloor transfer unit 60 to the working level at position 26c using the lifting unit 25;

[0233] - thereafter, a plurality of workpieces 14 , for example 10 to 14, in particular 12 DCB PCBs (directly bonded copper printed circuit boards), are transferred from the transport workpiece carrier 44 into the manufacturing workpiece carrier 22 by means of a robot arm 47 of an automation robot 46 ;

[0234] - the filled production workpiece carrier 22 is then moved from the position 26 c to the position 26 b ;

[0235] The retaining ring 52 which has been stored on the production workpiece carrier 22 can then be transferred to the parking position 29 ;

[0236] A foil / film 30 (e.g. a PTFE film for a sintering process) is removed as top foil / film from a foil / film stack 35 from a foil / film transfer unit 32, cleaned by a foil / film cleaning unit 48 and then placed on a filled production workpiece carrier 22;

[0237] - thereafter, the retaining ring 52 from the parking position 29 is placed and fastened on the production workpiece carrier 22 to secure the foil / film 30 in place;

[0238] - Subsequently, the workpiece carrier 22 is moved into a preheating module in preparation for the sintering process.

[0239] Alternatively, if a bottom foil / film 30 and a top foil / film 30 are used, the bottom foil / film 30 can be placed first on the manufacturing workpiece carrier 22 after the retaining ring 29 has entered the parking position 52 after the manufacturing workpiece carrier 22 has been lifted from the underfloor transfer unit 60 to the position 26 b, and then the filling of the workpieces 14 in the position 26 c is carried out.

[0240] Fig.24 The unloading station 20 in FIG. 1 , which is located sequentially after the sintering module 21 to achieve flow production, can be operated in a mirrored manner and performs the following work steps when the top foil / film 30 is used for sintering the joint:

[0241] - introducing the manufacturing workpiece carrier 22 from the manufacturing station 21 (for example from the cooling module 16) into the unloading station 20;

[0242] - lifting the retaining ring 52 and bringing it into the parking position 29 at the position 26 b of the unloading station 20 ;

[0243] - gripping and pulling the foil / film 30 from the filled production workpiece carrier 22 by means of a foil / film transfer tool 34 ;

[0244] - Returning the retaining ring 52 from the parking position 29 to the production workpiece carrier 22;

[0245] - moving the production workpiece carrier 22 from the position 26b to the position 26c;

[0246] - transferring the workpiece 14 from the production workpiece carrier 22 to the transport workpiece carrier 44 by means of the robot arm 47, wherein each transfer operation requires less than 6 seconds, in particular 5.5 seconds;

[0247] The manufacturing workpiece carrier 22 is moved by means of the lifting unit 25 onto the underfloor transfer unit 60 for return to the loading station 18 .

[0248] When using a bottom foil / film 30 and a top foil / film 30 , the bottom foil / film 30 may be pulled out by the automated robot 46 after the manufacturing workpiece carrier 22 is moved from the position 26 b to the position 26 c .

[0249] During the return transfer from the loading station 20 to the unloading station 18, the used foil / film can be placed on the manufacturing workpiece carrier 22, transferred back and placed back on the foil / film stack 36, or placed on another foil / film stack in the unloading station 20, which can be manually transferred back to the loading station 18 for reuse.

[0250] Once the used foil / film 30 has been removed, in the unloading station 20 the cleaning unit 48 or a second cleaning unit may have performed a cleaning of the foil / film 30 in the unloading station 20 .

[0251] Fig.25 An embodiment of a foil / film separation unit 84 is shown. The foil / film separation unit 84 has a contact element 92 in the form of a roller 96. The foil / film 30 arranged above the workpiece carrier 22 is held on the surface of the workpiece carrier 22 with the workpiece 14 with the contact element 92. In this embodiment, the contact element 92 is designed as a roller 96 and can roll on the surface of the foil / film 30 during the relative movement (in the direction indicated by the arrow) of the workpiece carrier 22 relative to the foil / film separation unit 84. Once the foil / film 30 has passed the contact element 92 during the relative movement of the workpiece carrier 22, the contact element 92 can be clamped using the clamping element 94 and pulled upward, i.e., moved away from the workpiece carrier 22. This allows the foil / film 30 to be removed from the workpiece carrier 22 with the workpiece 14 in a controlled manner. The foil / film separation unit 84 can be arranged at the working position 26 of the unloading station 20, wherein the workpiece carrier 22 can be moved relative to the foil / film separation unit 84, in particular, by the conveying unit 24. This allows the foil / membrane separation unit 84 to remain in a fixed position. The foil / membrane 30 can be pulled out upwards by pivoting the clamping element 94 .

[0252] Fig.26 Shows Fig.25 Another view of the embodiment in FIG. As can be seen from this view, a foil / film lifter 98 is arranged in the area in front of the contact element 92, through which the foil / film 30 is guided. Therefore, the foil / film 30 is allowed to be clamped by the clamping element 94 in a simplified manner. The lifting of the foil / film 30 can also be assisted, for example, by an airflow of compressed or inhaled air arranged in front of the foil / film lifter 98. Such an airflow can, for example, lift the foil / film 30 between the contact element 92 and the foil / film lifter 98, so that the foil / film 30 can pass through the foil / film lifter 98. It is also conceivable that the foil / film 30 can also be lifted by mechanical contact with the foil / film lifter 98, and therefore protrude upward. Since the foil / film 30 is pressed downward by the contact element 92 behind the foil / film lifter 98 (on the left side of the foil / film lifter 98 in the figure), the foil / film 30 can be separated from the manufacturing workpiece carrier 22 in a controlled manner. In another embodiment, this operation can be controlled by the inspection camera 70.

[0253] Fig. 27 Another embodiment of a foil / membrane separation unit 84 is shown. Fig.26 In addition, a clamping element 94 is shown, which fixes the foil / film 30 in a clamping manner above the foil / film lifter 98. As soon as the foil / film 30 is in contact with the foil / film lifter 98, the clamping element 94 can be pivoted or moved in the direction of the foil / film 30 or in the direction of the production workpiece carrier 22. This can be controlled, for example, by means of an inspection camera 70.

[0254] Fig.28 Shows Fig. 27 . Once the clamping element 94 clamps the foil / film 30, the clamping element 94 is preferably moved upwards at the same time (in the direction of the arrow in the illustration), while the production workpiece carrier 22 is moved horizontally (in the direction of the arrow in the figure), in particular by the transfer unit 24. In particular, both movements are carried out at the same speed. This allows a continuous separation of the foil / film 30 from the production workpiece carrier 22. Fig.28 The working position of the unloading station 20 is shown by way of example. The gripping element 94 is located above the transfer unit 24. The contact element 92 is preferably arranged parallel to the surface of the production workpiece carrier 22 and extends in particular transversely to the direction of movement of the transfer unit 24.

[0255] Fig.29 An embodiment of a contact element 92 is shown. In such an embodiment, the contact element 92 has the form of a roller 96 and is provided with a recessed area 96a and a raised area 96b, such as Fig.30 As shown. The roller 96 can set the negative of the contour of the workpiece 14 on the workpiece carrier 22. If the workpiece carrier 22 is moved under the roller 96, in particular by the transfer unit 24, the roller 96 rotates above the foil / film 30 (not shown) and the workpiece 14 arranged below and the workpiece carrier 22 arranged below. The area with the recessed area 96a is in contact with the workpiece 14 here, and the area with the raised area 96b is in contact with the gap arranged therebetween and in particular can be directly in contact with the workpiece carrier 22. Such a roller can actually be set in a form opposite to the contour of the workpiece 14 on the workpiece carrier 22, so that the contact element 92 is precisely guided onto the production workpiece carrier 22. In addition, even if the production workpiece carrier 20 with the workpiece 14 arranged thereon forms an uneven surface, the pressing of the foil / film 30 (not shown) can be ensured.

[0256] Fig.30 Shows Fig.29 Another view of the embodiment in which the alternating arrangement of recessed areas 96a and raised areas 96b can be identified.

[0257] Fig.31Another embodiment of a foil / film separation unit 84 is shown. The latter has a stripping unit 86, which has a stripping element 88 and a holding element 90. In the present embodiment, the stripping element 88 and the holding element 90 are mounted on a holding structure and can be moved relative to the conveying unit 24. The holding structure can be guided along a track element. In such an embodiment, the stripping unit 86 can be optionally moved relative to the manufacturing workpiece carrier 22 with the foil / film 30, wherein, in particular, the stripping unit 86 moves while the manufacturing workpiece carrier 22 remains stationary. Preferably, the stripping element 88 itself is inserted below the foil / film 30, while the holding element 90 is arranged above the foil / film 30. The foil / film 30 can thus be guided between the stripping element 88 and the holding element 90 and separated from the manufacturing workpiece carrier 22 with the workpiece 14. The workpiece 14 is simultaneously held on the manufacturing workpiece carrier 22 by the stripping element 88.

[0258] Fig.32 A further embodiment of a foil / film separation unit 84 is shown. It can be seen here that the stripping element 28 and the holding element 90 are arranged slightly offset one above the other so that the foil / film 30 can be guided between the stripping element 28 and the holding element 90. The stripping unit 86 can be moved relatively quickly in order to remove the foil / film 33 from the production workpiece carrier 22. In the embodiment shown, the holding structure is held in a linear unit 85 and can therefore be moved parallel to the transport unit 24.

[0259] Fig.33 An embodiment of a multi-gripper 80 is shown. In this embodiment, the multi-gripper 80 has four gripper arms 82 arranged along a line. Two external gripper arms 83 can move along a virtual line (shown by two arrows) so that the distance between two internal gripper arms 82 and two external gripper arms 83 can be changed. In the area of ​​the arrow, a pneumatically driven slide (particularly a small slide) can be provided, which enables the two external gripper arms 83 to move. In particular, all four gripper arms 82 can be pneumatically controlled and, for example, designed as parallel grippers. In order to pick up a workpiece 14 or an electronic component 12, a socket can be provided on each gripper arm 82. The socket can be composed of two gripper elements, which can clampably fix a workpiece 14 or an assembly 12 from both sides. The telescopic and / or pivotable part can be telescopically and / or pivotally arranged on the basic element of the multi-gripper 80. This allows the gripper arms 82, 83 to move relative to each other and relative to the basic element. In this embodiment, the multi-gripper 80 has a linear base element.

[0260] Fig.34An embodiment of manufacturing a workpiece carrier 22 is shown. Four workpieces 14 or electronic components 12 arranged thereon can be clamped simultaneously using the illustrated multi-gripper 80. Due to the pneumatic control, not only can the workpieces 14 or electronic components 12 arranged on the virtual line be clamped, placed or lifted, but also the workpieces 14 or electronic components 12 arranged in other ways can be grasped, clamped, placed or lifted.

[0261] Fig.35 Another embodiment of a multi-gripper 80 is shown. In this embodiment, a pneumatic system is identifiable.

[0262] Fig.36 There is shown another embodiment of a multi-gripper 80. The multi-gripper 80 has two gripper arms 82 which can pivot relative to each other. Fig.37 Shows Fig.36 Another view of the embodiment of the invention.

[0263] Fig.38 An embodiment of a loading station 18 having a multi-gripper 80 is shown. With the aid of the flexible multi-gripper 80, multiple workpieces 14 or electronic components 12 can be removed from multiple transport workpiece carriers 44 and placed on the manufacturing workpiece carrier 22 at the same time. As can be seen from the figure, the transport workpiece carriers 44 are arranged adjacent to each other along a virtual line. Using the multi-gripper 80, at least four workpieces 14 or electronic components 12 can be removed from such an arrangement and placed on the workpiece carrier 22 in any arrangement. For other aspects shown, please refer to Fig.13 .

[0264] Fig.39 An embodiment of an unloading station 20 is shown. In this embodiment, no multi-gripper 80 is arranged on the automated robot 96. Therefore, the workpieces 14 or electronic components 12 are transferred individually from the manufacturing workpiece carrier 22 to the transport workpiece carrier 44. It is also conceivable that Fig.38 As shown in the loading station 18, multiple grippers 80 can also be used in the unloading station 20. For other aspects shown, please refer to Fig.14 .

[0265] Fig.40An embodiment of a manufacturing workpiece carrier 22 with workpieces 14 arranged one above the other is shown. In this embodiment, three first workpieces 14 are arranged below a first foil / film 30. Directly above the first three workpieces 14, three second workpieces 14 are placed above the foil / film 30, wherein a pressure pad or a balancing foil / film may be additionally included. Another foil / film 30 is arranged above the second workpiece 14. The first workpiece 14 and the second workpiece 14 are arranged directly one above the other so that the first workpiece 14 and the second workpiece 14 can support each other during the sintering process. In particular, the perimeter and geometry of the first workpiece match the perimeter and geometry of the second workpiece so that the first workpiece and the second workpiece can support each other over their entire width. The foil / film 30 and / or the pressure pad or the balancing foil / film may be arranged between the layers of the workpiece 14. The workpieces 14 do not stick to each other and are prevented from getting stuck by the foil / film 30 arranged between the workpieces 14. The foil / film 30 used may be designed as a protective foil / film or a pressure balancing foil / film. The workpiece 14 may advantageously be transferred using a multi-gripper 80 .

[0266] Fig.41 A further embodiment of a production workpiece carrier 22 is shown with workpieces 14 arranged one above the other. Fig.40 Unlike the illustration, a further foil / film is arranged below the first workpiece 14 to protect the workpiece carrier from sticking to the pressure pad. The further foil / film can be designed as a protective foil / film or a pressure equalization foil / film.

[0267] Fig.42 Another embodiment of a production workpiece carrier 22 with workpieces 14 arranged one above the other is shown. In order to hold the bottom foil / film during unloading and removal of the foil / film 30, a vacuum nozzle unit 99 can be attached, which is attached to the foil / film 30 through a channel 99a and sucks the foil / film 30.

[0268] For the manufacturing workpiece carrier 22 shown with the workpieces 14 arranged one above the other, different foil / film thicknesses and materials can be used. For example, PTFE or PFA can be used as a protective foil / film. A thicker equalizing foil / film can be placed on it. Then another protective foil / film can be placed on it, and then the workpiece can be placed. Optionally, a mask (not shown) can also be used for sintering.

[0269] Fig.43 A portion of an embodiment of a loading station 18 is shown, with a multi-gripper 80 and an alignment unit 112. The multi-gripper 80 and the alignment elements of the alignment unit 112 enable the precise transfer, i.e., gripping and aligned placement of workpieces / components from a transport workpiece carrier to a manufacturing workpiece carrier. This operation is described below. When the following refers to workpieces, this must also be understood to be electronic components.

[0270] The workpieces 14 are initially picked up from the transport workpiece carrier 44 using a multi-gripper 80. Each workpiece 14 is held by a gripper arm 82. This is achieved by using gripper elements, which will be described in more detail in conjunction with the following figures.

[0271] Fig.44 An embodiment of a multi-gripper 80 is shown in operation. In the embodiment shown, each gripper arm 82 picks up one workpiece 14 from a transport workpiece carrier 44. The different gripper arms 82 are arranged on the multi-gripper 80 along the longitudinal axis L. Preferably, the gripper arms 82 can be moved relative to each other along the longitudinal axis L, as explained in more detail in the previously described figures. In order to pick up more workpieces 14 from the transport workpiece carrier 44, the complete multi-gripper 80 is moved along the transverse axis Q so that the next row of workpieces 14 can be picked up.

[0272] Fig.45 A cross-sectional representation through a gripper arm 82 of a multi-gripper 80 is shown. Two gripper elements 110 are arranged on two opposite sides of the gripper arm 82 and hold a workpiece 14. The gripper elements 110 also hold the workpiece 14 at two opposite lateral edges, so that the workpiece 14 is held in a clamped manner. In the embodiment shown, the gripper elements 110 are arranged on a lateral axis Q. In another embodiment, the gripper elements 110 can also be arranged opposite to each other. Fig.44 The first alignment of the workpiece 14 can be achieved by the clamping element 110, because a surface contact is formed between the clamping element 110 and the workpiece 14. Therefore, the workpiece 14 is aligned at least in the longitudinal axis L or the transverse axis Q.

[0273] Fig.46 A portion of an embodiment of a loading station 22 with a multi-gripper 80 and an alignment unit 112 in operation is shown. In the illustrated case, the multi-gripper 80 is arranged directly above the alignment unit 112. Thus, the gripping elements of the alignment unit 112 can contact the workpiece 14, as described below. This enables a further alignment of the workpiece 14 on the longitudinal axis L or on the transverse axis Q. Preferably, a first alignment of the workpiece 14 on the longitudinal axis is achieved by the multi-gripper 80 and its gripping elements 110, and a further alignment of the workpiece 14 along the transverse axis Q is achieved by the alignment unit 112, wherein the longitudinal axis L and the transverse axis Q are arranged in a horizontal plane.

[0274] In an embodiment not shown, the alignment unit 112 can be designed as a kind of stop edge, against which the multi-gripper 80 comes into contact with the workpiece 14. The contact of the workpiece 14 with the edge designed to be straight also allows alignment of the workpiece 14 held on the multi-gripper 80. In particular, those lateral edges of the workpiece 14 that are not in contact with the clamping elements should come into contact with the stop edge.

[0275] Fig.47 A section of a multi-gripper 80 is shown with an alignment unit 112. In the embodiment shown, it can be seen that the workpiece 14 is in contact with the clamping elements 110 of the gripper arms 82 or with the clamping elements 124 of the alignment unit 112 on all four side edges. The workpiece 14 can thus be precisely aligned in two axes L and Q. The parallel clamping by the clamping elements 110 enables the workpiece 14 to be centered in the longitudinal direction relative to the multi-gripper 80.

[0276] In other words, the workpiece 14 is centered and aligned in the longitudinal direction along the longitudinal axis L by means of the multi-gripper 80 as a type of parallel gripper. The workpiece 14 can optionally be aligned transversely to the longitudinal axis, i.e. in the direction of the transverse axis Q, by means of a 90°-rotated parallel gripper 124 of the alignment unit 112. By such a process, the workpiece 14 is centered on the multi-gripper 80 and can be placed precisely in the production workpiece carrier 22.

[0277] After the workpiece 14 is gripped by the multi-gripper 80 and centered by the alignment unit 112 , the workpiece 14 may be transferred to the loading station 18 using the robot arm 47 .

[0278] Fig.48 A portion of a loading station 18 with a centering device 116 is shown. The manufacturing workpiece carrier 22 shown comprises a conveying frame 122 and a base plate 138 movably inserted therein. The conveying frame 122 has a substantially circular recess in which the base plate 138 is accommodated. The base plate 136 integrated in the manufacturing workpiece carrier 22 should preferably be precisely centered and aligned relative to the conveying frame 122 to ensure that the workpiece 14 is accurately placed in the socket and preferably for accurately positioning the accommodated workpiece 14 relative to the pressure plunger in the manufacturing station 21 during the subsequent pressing process. To this end, the manufacturing workpiece carrier 22 or the base plate 138 accommodated therein can be aligned using the centering device 114. The centering device 114 comprises, for example, a centering plate 116, on which the base plate 138 of the manufacturing workpiece carrier 22 is movably mounted. This enables the base plate 138 of the manufacturing workpiece carrier 22 to be moved relative to the centering plate 116 and the conveying frame 122. The centering plate 116 can, for example, be designed to be circular and be lifted relative to the frame elements arranged around it. This causes the centering plate 116 to move.

[0279] Fig.49A plan view of a loading station 18 is shown with a centering device 114. In this embodiment, the centering device 114 has two pins 120, against which a base plate 138 of a production workpiece carrier 22 can rest. The production workpiece carrier 22 is pressed against the pins 120 and thereby centered using a contact element 128, which can be designed in particular as an eccentric.

[0280] Fig.50 A cross section through a loading station 18 with a centering device 114 is shown. In this figure, a centering plate 116 is recognizable below the production workpiece carrier 22. A pressing element 130 has a mechanism for controlling below the centering plate 116. A lifting unit 118 is recognizable, which enables the lifting and lowering of the centering plate 116. A transport frame 122 is arranged around the centering plate 116 as a frame element, relative to which a base plate 136 is aligned and is a partial element of the production workpiece carrier 22.

[0281] Fig.51 A further view of the loading station 18 with the centering device 116 is shown. Fig.52 Shows Fig.51 1 without the workpiece carrier 22. It can be seen that the pin 120 is arranged on a kind of ledge 126 of the centering plate 116. The pressing element 130 also has a contact element 128 designed as a kind of pin. However, the contact element 128 can be moved relative to the centering plate 116. This allows a relative displacement of a substrate 138 of the production workpiece carrier 22 relative to the centering plate 116 and the conveying frame 122. The figure also shows three supports 132, which can be designed, for example, as ball bearing-type supports, so that the substrate 138 is mounted so as to be rotatable and displaced by the centering plate 116 in order to be aligned in the conveying frame 122.

[0282] Fig.53 A detailed view of the centering device 114 is shown. A pin 120 is arranged on a centering plate 116. In this embodiment, the centering plate 116 has a ledge 126 on which the pin 120 is arranged. Different embodiments are also conceivable. For example, the pin 120 can be arranged at another position on the edge of the centering plate 116. The pressing element has a contact element 128, which is also designed as a pin. Different embodiments are conceivable here, for example in the form of a square protrusion or an oval protrusion. The centering plate 116 can be moved upwards and downwards using the lifting unit 118.

[0283] Fig.54A further detailed view of the centering device 114 is shown. In this embodiment, a leveling element 134 can be seen for alignment of the centering plate 116. The pressing element has a pneumatic cylinder 136, which serves to press and center the pressing element (i.e. in this embodiment of the contact element 128) on a base plate 138 of the production workpiece carrier 22 accommodated in the transport frame 122.

[0284] During further processing in the manufacturing station 21, precise alignment and positioning of the workpiece 14 or the electronic component is achieved by alignment of the workpiece 14 or the electronic component during transfer from the conveying workpiece carrier 44 to the manufacturing workpiece carrier 22 and preferably a previously performed alignment of the manufacturing workpiece carrier 22 or the substrate 138 relative to the conveying frame 122 of the manufacturing workpiece carrier 22.

[0285] The embodiments shown for the multiple grippers 80 can of course be combined as desired with the embodiments shown for the centering device 114 and / or the alignment unit 112. In particular, different multiple grippers 80 can be combined with different numbers of gripper arms 82 or differently arranged and designed gripper elements 110.

[0286] Reference numerals list

[0287] 10 System

[0288] 10a Sintering or welding system

[0289] 12 Electronic components

[0290] 14 Workpiece

[0291] 16 Modules

[0292] 18 Loading Station

[0293] 20 Unloading Station

[0294] 21 Manufacturing Station

[0295] 22 Manufacturing workpiece carriers

[0296] 24 Transmission Unit

[0297] 25 Lifting Unit

[0298] 26 Work Position

[0299] 26a-26d working position

[0300] 28 Mask

[0301] 29 Parking position

[0302] 30 Foils / membranes / separate foils / membrane elements / balancing foils / membranes (pressure pads)

[0303] 32 Foil / Film Transfer Units

[0304] 34 Foil / Film Transfer Tools

[0305] 34a, 34b Foil / Film Transfer Tools

[0306] 36 individual foil / membrane elements Foil / membrane stacks

[0307] 38 foil / film bin

[0308] 40 Foil / Film Lifting Units

[0309] 42 Second transmission unit

[0310] 44 Workpiece carrier for transport

[0311] 46 Automation Robot

[0312] 47 Robotic Arm

[0313] 48 Cleaning Units

[0314] 50 Height Balance System

[0315] 52 Retaining ring

[0316] 54 Top

[0317] 56 Remove Surface

[0318] 58 Displacement Unit

[0319] 60 Underfloor transfer unit

[0320] 61 Lifting Unit

[0321] 62 Handle Cover

[0322] 64 linear units

[0323] 66 Foil / Film Carrier

[0324] 68 Manufacturing stacking bins for workpiece carriers

[0325] 70 Check Camera

[0326] 72 optical reference marks

[0327] 74 Form-fitting edge section

[0328] 76 Fastening elements

[0329] 78 Warehouse

[0330] 80 Multi Gripper

[0331] 82 Gripper Arm

[0332] 83 External gripper arm

[0333] 84 Foil / Membrane Separation Unit

[0334] 85 Linear Unit

[0335] 86 Stripping unit

[0336] 88 Stripping Components

[0337] 90 Holding element

[0338] 92 Contact elements

[0339] 94 Clamping elements

[0340] 96 Rollers

[0341] 96a recess

[0342] 96b Raised area

[0343] 98 Foil / Film Lifter

[0344] 99 Vacuum nozzle unit

[0345] Channel 99a

[0346] 100 Methods

[0347] 110 Clamping element

[0348] 112 Alignment Unit

[0349] 114 Centering device

[0350] 116 Centering plate

[0351] 118 lifting unit

[0352] 120 Pins

[0353] 122 Manufacturing of transport frames for workpiece carriers

[0354] 124 Clamping elements

[0355] 126 Wall Shelf

[0356] 128 Contact elements

[0357] 130 Pressing element

[0358] 132 Support

[0359] 134 Leveling element

[0360] 136 Pneumatic Cylinder

[0361] 138 Manufacturing a substrate for a workpiece carrier

[0362] E1 Upper Level

[0363] E2 Lower Level

[0364] L Longitudinal axis

[0365] Q Horizontal axis

Claims

1. A sintering or welding system (10, 10a) for connecting electronic components (12) and / or for manufacturing workpieces (14), comprising a plurality of modules (16) for connecting the electronic components (12) and / or for manufacturing the workpieces (14), wherein: At least one module (16) is designed as a loading station (18) and one module (16) is designed as an unloading station (20), or one module is designed as a loading station (18) and is designed as an unloading station (20), wherein at least one other module (16) is designed as a manufacturing station (21) and is provided with a manufacturing workpiece carrier (22) for accommodating the electronic component (12) and / or the workpiece (14), the manufacturing workpiece carrier (22) being movable in an automated manner from the loading station (18) via the manufacturing station (21) to the unloading station (20) by means of a transfer unit (24), and wherein , a multi-gripper (80) is provided, through which at least two electronic components (12) and / or the workpieces (14) can be placed simultaneously on the manufacturing workpiece carrier (22), characterized in that the multi-gripper (80) has at least two gripper arms (82), each gripper arm (82) is designed to pick up an electronic component (12) and / or a workpiece (14), and the gripper arm (82) can be used to align at least one electronic component (12) and / or at least one workpiece (14) in a transverse or longitudinal direction to the axis of the multi-gripper (80).

2. The system (10) according to claim 1, characterized in that The multi-gripper (80) has four gripper arms (82), each of which is designed to pick up one electronic component (12) and / or one workpiece (14).

3. The system (10) according to claim 2, characterized in that At least one gripper arm (82) is pneumatically controlled such that the at least one gripper arm (82) is movable and / or pivotable relative to at least one other gripper arm (82).

4. The system (10) according to claim 1, characterized in that The multi-gripper (80) has four gripper arms (82) arranged parallel to each other along a line, wherein two outer gripper arms are movable along the line such that the two outer gripper arms move relative to the two inner gripper arms.

5. The system (10) according to claim 1, characterized in that The manufacturing station (21) comprises at least one further module (16) which is a welding module and / or a sintering module.

6. The system (10) according to claim 1, characterized in that One module (16) is designed as a loading station (18), and one module (16) is designed as an unloading station (20), wherein the loading station (18) is arranged upstream of the manufacturing station (21), and the unloading station (20) is arranged downstream of the manufacturing station (21), and the conveying unit (24) conveys the electronic component (12) and / or the workpiece (14) from the unloading station (20) back to the loading station (18).

7. The system (10) according to claim 1, characterized in that At least one automated robot (46) is arranged in the loading station (18) and / or the unloading station (20) for guiding the multi-gripper (80), by means of which at least two electronic components (12) and / or workpieces (14) can be placed in an automated manner and simultaneously transferred from a workpiece carrier (44) to the manufacturing workpiece carrier (22) in the loading station (18).

8. The system (10) according to claim 2, characterized in that At least one gripper arm (82) has at least two gripping elements (110) for picking up an electronic component (12) and / or a workpiece (14), which enable alignment of the electronic component (12) and / or the workpiece (14) in an axis.

9. The system (10) according to claim 1, characterized in that An alignment unit (112) is included, wherein the alignment unit (112) realizes the alignment of the electronic component (12) and / or the workpiece (14) picked up by the multi-gripper (80) on an axis parallel to and / or transverse to the multi-gripper (80).

10. The system (10) according to claim 9, characterized in that The alignment unit (112) enables the electronic component (12) and / or the workpiece (14) to be aligned on an axis transverse to the alignment by the clamping element (110).

11. The system (10) according to claim 1, characterized in that A centering device (114) is provided in the loading station (18) for aligning and / or centering the manufacturing workpiece carrier (22) or a substrate (138) of the manufacturing workpiece carrier (22) accommodated in a conveying frame (122), wherein the device realizes horizontal and / or vertical alignment and / or centering of the manufacturing workpiece carrier (22) before accommodating the electronic component (12) and / or the workpiece (14).

12. The system (10) according to claim 11, characterized in that The centering device (114) comprises a centering plate (116) and / or a lifting unit (118).

13. The system (10) according to claim 12, characterized in that At least one protrusion or pin (120) is provided on the centering plate (116), and the at least one protrusion or pin (120) can contact a stopper on the manufacturing workpiece carrier (22), so that the manufacturing workpiece carrier (22) can be aligned and / or centered relative to the centering plate (116) in a horizontal plane.

14. The system (10) according to claim 7, characterized in that A further transport unit (42) is provided for accommodating the transport workpiece carrier (44), and the further transport unit (42) is movable from the loading station (18) to the unloading station (20) independently of the module (16).

15. The system (10) according to claim 1, characterized in that The loading station (18) is configured to attach a process cover (62) to the electronic component (12) and / or the workpiece (14), and / or the unloading station (20) is configured to remove the process cover (62) from the electronic component (12) and / or the workpiece (14).

16. The system (10) according to claim 1, characterized in that The loading station (18) and / or the unloading station (20) comprises at least two working positions, wherein the manufacturing workpiece carrier (22) can be moved in an automated manner from one working position to an adjacent working position.

17. The system (10) according to claim 15, characterized in that The loading station (18) comprises three working positions connected to each other by a displacement unit (58), and the processing cover (62) comprises a first processing cover and a second processing cover, wherein, in the first working position, the electronic component (12) and / or the workpiece (14) can be placed in an automated manner by an automated robot (46), and the mask (28) can be placed in an automated manner on the electronic component (12) and / or the workpiece (14) by the automated robot (46) as the first processing cover; in the second working position, the foil / film (30) can be placed in an automated manner on the mask (28) by the automated robot (46) as the second processing cover; and in the third working position, the closing of the manufacturing workpiece carrier (22) and the foil / film (30) is automatically performed by the automated robot (46).

18. The system (10) according to claim 4, characterized in that The loading station (18) and the unloading station (20) are mirror images of each other.

19. The system (10) according to claim 1, characterized in that The conveying unit (24) for conveying the manufacturing workpiece carrier (22) comprises a lifting unit (25) and an underfloor conveying unit (60), wherein a movement path of the underfloor conveying unit (60) is arranged within the system (10).

20. The system (10) according to claim 1, characterized in that An optical inspection unit comprising at least one inspection camera (70a, 70b, 70c, 70d) is arranged in the loading station (18) and / or the unloading station (20) and is capable of detecting and recording the correct alignment of the component (12) and / or the workpiece (14) in the manufacturing workpiece carrier (22).

21. The system (10) according to claim 1, characterized in that The foil / film transfer unit (32) comprises at least one foil / film transfer tool (34) which is designed for automatically attaching the foil / film (30) as a process cover (62) in the loading station (18).

22. The system (10) according to claim 21, characterized in that The foil / film transfer unit (32) comprises at least one foil / film stack (36) which is designed as a foil / film silo (38) and has a removal surface (56) for a top foil / film (30) at the top (54).

23. The system (10) according to claim 22, characterized in that The foil / film stack (36) has a foil / film lifting unit (40) which is able to gradually lift the foil / film stack (36) towards the top (54).

24. The system (10) according to claim 21, characterized in that A cleaning unit (48) is included for cleaning the top and / or bottom foil / film (30) prior to transfer onto the electronic component (12) and / or the workpiece (14).

25. The system (10) according to claim 24, characterized in that The cleaning unit (48) comprises a linear cleaning unit or a surface cleaning system designed for non-contact operation.

26. The system (10) according to claim 24, characterized in that A first foil / film transfer tool (34a) is designed to remove a top foil / film (30) from the foil / film stack (36) and to insert the top foil / film (30) into the cleaning unit (48), and a second foil / film transfer tool (34b) is designed to remove the foil / film (30) from the cleaning unit (48) and to place the foil / film (30) on the manufacturing workpiece carrier (22) having the electronic component (12) and / or the workpiece (14).

27. The system (10) of claim 1, further comprising a foil / membrane separation unit (84), characterized in that It comprises a stripping unit (86) for separating at least one foil / film (30) from the electronic component (12) and / or the workpiece (14).

28. The system (10) according to claim 27, characterized in that The foil / film separation unit (84) is movable relative to the production workpiece carrier (22), wherein a stripping element (88) can be placed below the foil / film (30) and a retaining element (90) is located above the foil / film (30) so that the foil / film (30) is separated from the electronic component (12) and / or the workpiece (14).

29. The system (10) according to claim 27, characterized in that The production workpiece carrier (22) is movable relative to the foil / film separating unit (84), wherein the production workpiece carrier (22) is movable and the foil / film separating unit (84) is stationary.

30. The system (10) according to claim 27, characterized in that It comprises a contact element (92) capable of coming into contact with the at least one foil / film (30), wherein the foil / film (30) can be picked up by a clamping element (94) in the area in front of the contact element (92) and can be removed from the electronic component (12) and / or the workpiece (14) by moving the manufacturing workpiece carrier (22) in the direction of the clamping element (94).

31. The system (10) according to claim 30, characterized in that The contact element (92) is designed as a roller (96), wherein a rolling movement of the roller (96) on the surface of the foil (30) can be carried out by a movement of the production workpiece carrier (22) and in contact with the foil (30).

32. The system (10) according to claim 27, characterized in that The system (10) is arranged in the unloading station (20).

33. The system (10) of claim 1, further comprising a manufacturing workpiece carrier (22), the manufacturing workpiece carrier (22) having at least two workpieces (14), characterized in that: The at least two workpieces (14) are arranged one above the other on the production workpiece carrier (22).

34. The system (10) according to claim 33, characterized in that A foil / film (30) is arranged between the at least two workpieces (14) arranged on top of each other on the manufacturing workpiece carrier (22).

35. The system (10) according to claim 33, characterized in that At least three workpieces (14) are arranged one above the other on the production workpiece carrier (22).

36. The system (10) according to claim 33, characterized in that A foil / film (30) is arranged below a bottom workpiece (14) located on the manufacturing workpiece carrier (22).

37. A method (100) for connecting electronic components (12) and / or for manufacturing workpieces (14) using a system according to any of the preceding claims, characterized by the following steps: - pre-manufacturing of electronic components (12) and / or workpieces (14) by means of a multi-gripper (80), by means of which at least two electronic components (12) and / or workpieces (14) are simultaneously placed on a manufacturing workpiece carrier (22) in a loading station (18); - the manufacturing workpiece carrier (22) is automatically moved from the loading station (18) to at least one manufacturing station (21); - The production workpiece carrier (22) is automatically returned to the loading station (18).

38. The method (100) of claim 37, wherein: During pre-manufacturing in the loading station (18), the electronic component (12) and / or the workpiece (14) is transferred from a transport workpiece carrier (44) to the manufacturing workpiece carrier (22) by means of the multi-gripper (80) in an automated manner.

39. The method (100) of claim 38, wherein: After the electronic component (12) and / or the workpiece (14) passes through the manufacturing station (21), the electronic component (12) and / or the workpiece (14) is unloaded from the manufacturing workpiece carrier (22) to the transport workpiece carrier (44) in an unloading station (20) by a multi-gripper (80).

40. The method (100) of claim 37, wherein: During pre-manufacturing, at least one automated attachment of at least one process cover (62) is performed on the electronic component (12) and / or the workpiece (14).

41. The method (100) according to claim 40, characterized in that In the loading station (18): - in a first working position, a mask (28) is placed in an automated manner as a first process cover on the electronic component (12) and / or the workpiece (14), the electronic component (12) and / or the workpiece (14) being arranged on the manufacturing workpiece carrier (22); - In a second working position, at least one foil / film (30) is placed in an automated manner on the mask (28) as a second process cover.

42. The method (100) according to claim 37, characterized in that The working positions are arranged in the reverse order in the unloading station (20) and are performed in the reverse order.

43. The method (100) according to claim 37, characterized in that The return of the manufacturing workpiece carrier (22) occurs below, above or near a plane in which the manufacturing workpiece carrier (22) is arranged during loading and / or unloading.

44. The method (100) according to claim 37, characterized in that The manufacturing workpiece carrier (22) is returned via a conveying unit (24), the conveying unit (24) being a first conveying unit, and the conveying workpiece carrier (44) is arranged on another conveying unit (42), wherein the first conveying unit and the another conveying unit (42) are movable independently of each other.

45. The method (100) according to claim 44, characterized in that The transport workpiece carrier (44) accommodates one electronic component (12) and / or one workpiece (14), and the manufacturing workpiece carrier (22) accommodates more than two electronic components (12) and / or workpieces (14), so that during loading and / or unloading, the manufacturing workpiece carrier (22) pauses at a position in the loading station (18) until the transport unit (42) has completely loaded the manufacturing workpiece carrier (22) with electronic components (12) and / or workpieces (14).

46. ​​The method (100) according to claim 37, characterized in that A foil / film (30) is placed in the loading station (18) on the manufacturing workpiece carrier (22) having the electronic component (12) and / or the workpiece (14) as a processing cover (62), wherein the foil / film (30) is a new foil / film (30) or a foil / film (30) that has already been used in a previous pass of the method (100).

47. The method (100) according to claim 46, characterized in that The foil / film (30) is removed from the foil / film stack (36) using a foil / film transfer tool (34) and the foil / film (30) is placed on the electronic component (12) and / or the workpiece (14), wherein the foil / film stack (36) is gradually moved upwards in the direction of the top (54) of the foil / film stack (36) so that the respective top foil / film (30) can be reached with the foil / film transfer tool (34).

48. The method (100) according to claim 47, characterized in that After a given number of foils / films (30) have been removed, the foil / film stack (36) is moved upwards by a travel distance of 5 mm to 15 mm.

49. The method (100) according to claim 46, characterized in that Before the foil / film (30) is placed on the production workpiece carrier (22) with the electronic component (12) and / or the workpiece (14), the foil / film (30) is automatically cleaned by a cleaning unit (48).

50. The method (100) according to claim 49, characterized in that The foil / membrane (30) is electrostatically discharged in the cleaning unit (48) and subsequently contaminants are removed by blowing them out with compressed air and / or negative pressure.

51. The method (100) of claim 46, characterized in that At least two foil / film stacks (36) are arranged adjacent to one another, wherein as soon as the first foil / film stack no longer contains any foil / film (30), the second foil / film stack is moved to the position of the first foil / film stack, thereby ensuring a continuous process.

52. The method (100) of claim 46, using a system according to any one of claims 27 to 32, characterized in that The foil / membrane (30) is removed in the unloading station (20) by a foil / membrane separation unit (84).

53. The method according to claim 47, characterized in that The correct positional alignment of the component (12) and / or the workpiece (14) is optically detected and recorded at least in the production workpiece carrier (22).

54. A method for loading a manufacturing workpiece carrier (22) of the system (10) according to claim 34, comprising the steps of: - loading the production workpiece carrier (22) with at least one first workpiece, - placing a foil / film (30) and / or a pressure pad on said first workpiece, - further loading at least one second workpiece above the foil / film (30) and above the already arranged first workpiece, - Placing a further foil / film (30) and / or a further pressure pad on the second workpiece.

55. A method for unloading a manufacturing workpiece carrier (22) of a system (10) according to any one of claims 34 to 36, comprising at least the following steps: - remove the top foil / membrane (30) and / or top pressure pad, - removing the top workpiece or the top horizontal workpiece from the production workpiece carrier (22); - removing the further foil / membrane (30) and / or the further pressure pad, - Removing at least one further workpiece or another level of workpieces from the production workpiece carrier (22).

56. A method for loading a manufacturing workpiece carrier (22) of a system (10) according to any one of claims 1 to 36, wherein: At least a first workpiece is aligned by the multi-gripper (80) and / or by an alignment unit (112) such that the at least one workpiece is aligned in a horizontal area plane transversely and / or longitudinally to an axis of the multi-gripper (80).

57. A method for loading a manufacturing workpiece carrier (22) of a system (10) according to claim 56, wherein: The alignment of the manufacturing workpiece carrier (22) or further alignment of a base plate (138) of the manufacturing workpiece carrier (22) accommodated in a transport frame (122) is performed by means of a centering device (114).

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