Rotor for a planar drive system and planar drive system

Abstract

The invention relates to a rotor (100) for a planar drive system (1), the rotor having a housing (110) and at least one magnet assembly (114). The housing (110) has a housing base (111) and a cover (112). The magnet assembly (114) is arranged in a recess (113) of the housing base (111). The cover (112) is mounted on the housing base (111) in such a way that the housing (110) is fluid-tight, the cover (112) covers the recess (113), and the magnet assembly (114) is arranged in an interior (115) of the fluid-tight housing (110). The invention also relates to a method for producing such a rotor (100) and a planar drive system (1) having such a rotor (100).

Description

Technical Field

[0001] The invention relates to a rotor for a planar drive system and a planar drive system having such a rotor. The invention also relates to a method for producing such a rotor. Background Art

[0002] This patent application claims the priority of German patent application DE 10 2021 112 269.4, the disclosure content of which is incorporated herein by reference.

[0003] Planar drive systems can be used in particular in automation technology, in particular in manufacturing technology, handling technology and process technology. With the help of planar drive systems, movable elements of devices or machines can be moved or positioned in at least two linearly independent directions. The planar drive system can include a permanently excited planar electromagnetic motor with a planar stator and a rotor, which can be moved on the stator in at least two directions.

[0004] In a planar electromagnetic motor with permanent magnet excitation, a driving force is applied to the rotor so that the energized coil group of the stator unit interacts magnetically with the drive magnets of the multiple magnet assemblies of the rotor. A planar drive system with a rectangular and longitudinally extending coil group and a rectangular and longitudinally extending magnet assembly of the rotor is known from the prior art. For example, such a planar drive system is described in the open document DE 10 2017 131 304 A1. With such a planar drive system, linear and translational motions of the rotor can be achieved in particular. This means that, with the help of such a planar drive system, the rotor can freely move parallel to the stator surface above the stator surface and move perpendicular to the stator surface at least at a different spacing from the stator surface, wherein a rectangular and longitudinally extending coil group is arranged below the stator surface. In addition, such a planar drive system can flip the rotor to a certain angle and rotate it to a certain angle. The last-mentioned movement can be performed at any point on the stator surface. The rotor can especially rotate out of the normal position at a maximum of 20°.

[0005] The rotor of a planar drive system typically has a housing matrix into which a magnet assembly is inserted. It can be provided that the magnet assembly is bonded to the housing matrix. It can be provided that the planar drive system should be used in an aggressive fluid or in a sensitive environment. Here, a sensitive environment can particularly include a clean room or a clean room-type environment or also a vacuum chamber. If the rotor is to be used in an aggressive environment, such as, for example, in a water-based liquid, such as water, acid or alkali, or in an organic solvent, it may occur that the liquid erodes the adhesive used to bond the magnet assembly to the housing matrix and thus causes damage or destruction of the rotor in a medium to long term. If the rotor is to be used in a clean room or in a vacuum, it may occur that the adhesive used to bond the magnet assembly to the housing matrix is ​​discharged and thus contaminates the clean room or cannot achieve the required vacuum quality when used in a vacuum, particularly in an ultra-high vacuum. Summary of the invention

[0006] The object of the present invention is to provide a rotor for a planar drive system, which rotor can be used in aggressive media on the one hand and in sensitive environments on the other hand. Another object of the present invention is to provide a method for manufacturing such a rotor. Another object of the present invention is to provide a planar drive system having such a rotor.

[0007] These objects are achieved by a rotor, a planar drive system and a method for producing a rotor according to the independent claims. Advantageous developments are given in the dependent claims.

[0008] A rotor for a planar drive system has a housing and at least one magnet assembly. Here, the magnet assembly can be constructed as a Halbach array as described in the public document DE 10 2017 131 304 A1. Similarly, as described in the public document, four such magnet assemblies can be arranged to enable the rotor to be driven in two directions. The housing of the rotor includes a housing base and a cover. The magnet assembly, or if there are multiple magnet assemblies, all magnet assemblies are arranged in a recess of the housing base. The cover is mounted on the housing base so that the housing is constructed in a fluid-tight manner and the cover covers the recess. A magnet assembly or multiple magnet assemblies are arranged in the interior of the fluid-tight housing.

[0009] By arranging the magnet assembly inside the fluid-tight housing, it can be achieved that when the rotor is used in an aggressive environment, the aggressive fluid does not penetrate into the fluid-tight housing and therefore cannot erode the adhesive that may be used to bond the magnet assembly to the housing matrix. In addition, when the magnet assembly is arranged inside the fluid-tight housing, the aggressive fluid cannot erode the magnet assembly itself. If the rotor is to be used in a sensitive environment, it can be achieved through a fluid-tight housing that the magnet assembly or the adhesive used to bond the magnet assembly to the housing matrix cannot reach the area outside the fluid-tight housing. It can be achieved that, for example, the required purity can be achieved in a clean room and the required vacuum quality can be achieved in a vacuum. In particular, when used in a vacuum, the magnet assembly or the adhesive used to bond the magnet assembly to the housing matrix can exhaust and therefore permanently provide contaminants, so that, for example, ultra-high vacuum cannot be achieved. Here, the cover can be constructed as non-magnetic, wherein this can especially mean that the cover is not ferromagnetic, but diamagnetic or paramagnetic.

[0010] In one embodiment of the rotor, the cover has a relative magnetic permeability of less than ten, in particular less than two and preferably less than 1.01.

[0011] In one embodiment of the rotor, the cover weakens the magnetic field of the magnet assembly outside the housing by a maximum of 25%. Preferably, the weakening is a maximum of 10% and particularly preferably a maximum of 5%. If necessary, the cover can also be designed so that the magnetic field of the magnet assembly is substantially not weakened at all, i.e., by a maximum of 1%. This allows the rotor to continue to operate in the planar drive system, because the magnetic field of the magnet assembly is still strong enough outside the fluid-tight housing of the rotor that the stator magnetic field of the planar drive system can continue to act on the rotor.

[0012] In one embodiment, the housing base and the cover are made of metal. The cover and the housing base are laser welded. In particular, it can be provided that the housing base and the cover are made of stainless steel, aluminum or an aluminum alloy. The welded connection can usually be formed in a fluid-tight, i.e. gas-tight or liquid-tight manner, so that on the one hand, when the rotor is running in the liquid, the liquid cannot reach the interior of the housing, and on the other hand, when the rotor is running in a clean room or in a vacuum, the liquid or gas cannot leave the interior of the housing. In order to weld the cover to the housing base, it has proven to be advantageous to use a laser welding method. The laser welding method is particularly suitable because the laser radiation is not affected by the very strong magnetic field of the magnet assembly and therefore targeted and fluid-tight welding is possible. On the contrary, for example, when using an electric welding method, the electrons used in the process are deflected by the magnetic field of the magnet assembly, and this cannot ensure that the welded connection can be fluid-tight.

[0013] In one embodiment, the cover comprises a metal sheet. The metal sheet thickness is between 0.05 and 0.5 mm. Preferably, the metal sheet thickness is between 0.09 and 0.11 mm, in particular 0.1 mm. These metal sheet thicknesses are well suited for laser welding, so that a metal cover having these metal sheet thicknesses can be well welded to the housing base. This metal sheet thickness is particularly advantageous when stainless steel is used as the material for the cover. The housing base can also be made of stainless steel. In addition, the housing base and the cover can also be made of aluminum or an aluminum alloy. In addition, the housing base and the cover can be made of different materials, for example stainless steel for the housing base and aluminum for the cover.

[0014] In one embodiment, the housing base and / or the cover comprises plastic. The cover and the housing base are laser welded. In particular, a plastic cover with a metal housing base or a metal cover with a plastic base can also be laser welded.

[0015] In one embodiment, the laser welded connection between the housing base and the cover is arranged circumferentially in the edge region of the housing. This can mean that the housing base has a flat bottom side, wherein the recess in which the magnet assembly is arranged originates from the flat bottom side. The cover is placed onto the flat bottom side and then fixed circumferentially to the housing base by a laser welded connection.

[0016] In one embodiment, the interior of the fluid-tight housing is at least partially evacuated. This can be advantageous in particular when the rotor is to be used within a vacuum.

[0017] In one embodiment, the evacuation device is mounted on the housing. The evacuation device comprises a welded or brazed tube. With the tube, for example, a negative pressure can be generated inside the housing and then the tube can be squeezed with the help of pliers or a press and welded and separated at this point. In this way, the interior of the housing can be evacuated.

[0018] In one embodiment, the interior of the fluid-tight housing is at least partially filled with a potting compound. This can be used, for example, to fill areas in the recess in which no magnet assembly or magnet assemblies are arranged before the cover is installed.

[0019] In one embodiment, the interior of the fluid-tight housing is cast without bubbles with a PU casting compound. PU casting compounds are particularly well suited for casting housings. In one embodiment, the interior of the fluid-tight housing is water-free. This makes it possible, in particular, to use the rotor in sensitive environments, such as, for example, clean rooms or in a vacuum. Another advantage of the water-free interior is that the rotor can be easily cleaned if it is used in an aggressive environment, since cleaning with water and subsequent heating of the rotor to above 100° C. to dry it are easily possible, for example. If there are water molecules inside the rotor, these evaporate when heated to above 100° C., which can result in an overpressure inside the rotor. This can lead to damage to the cover.

[0020] In one embodiment, the magnet assembly is capable of interacting with the stator magnetic field and thereby is capable of driving the rotor.

[0021] In order to produce the rotor, first a housing base body with a recess can be provided. In this case, the housing base body can have a flat underside, from which the recess originates. Subsequently, at least one magnet assembly can be arranged in the recess. Of course, multiple magnet assemblies can also be arranged in the recess. Next, the cover is mounted on the housing base body in such a way that the housing formed by the housing base body and the cover is constructed in a fluid-tight manner and the magnet assembly is arranged inside the fluid-tight housing. In this case, the housing base body and the cover can have the properties described further above.

[0022] In one embodiment of the method, the housing main body and the cover are made of metal. The cover and the housing main body are laser welded.

[0023] In one embodiment of the method, the rotor is in a vacuum during the installation of the cover. As a result, the interior of the fluid-tight housing is water-free. In addition, the method can simultaneously achieve that the interior of the housing is evacuated.

[0024] In one embodiment of the method, the rotor is heated to above 100° C. before or during the installation of the cover. As a result, the interior of the fluid-tight housing also becomes water-free. In particular, the rotor can be heated before the cover unit is installed and all water from the housing base and the magnet assembly can be evaporated. After the cover is placed, it can be laser welded to the housing base, so that a rotor with a fluid-tight housing and a water-free interior can be produced.

[0025] The present invention also includes a planar drive system having at least one stator module, wherein the stator module includes at least one stator unit having at least one coil assembly. The coil assembly can be energized and is configured to generate a stator magnetic field on the stator surface due to energization. The planar drive system also has a rotor according to the present invention. The rotor can move on the stator surface by means of the interaction between the stator magnetic field of the magnet assembly and the rotor magnetic field. The planar drive system also includes a separation device, wherein the separation device is arranged above the stator surface. The stator module is arranged on a first side of the separation device and the rotor is arranged on a second side of the separation device.

[0026] The separation device is particularly advantageous when the rotor is to be used in an aggressive or sensitive environment. If the rotor is to be used in an aggressive environment, the aggressive environment can be spatially separated from the stator module by means of the separation device and damage to the stator module can thus be avoided. If the rotor is to be used in a sensitive area, the separation device makes it possible to arrange the stator unit outside the sensitive area and possible exhaust of the stator unit does not lead to contamination of the sensitive area. This makes it possible in particular to use the rotor in a clean room or in a vacuum.

[0027] In one embodiment, the isolating device is non-magnetic. Since the isolating device is non-magnetic, the stator magnetic field can interact with the rotor on the second side and is not completely shielded by the isolating device.

[0028] In one embodiment of the planar drive system, the isolating device has a relative magnetic permeability of less than ten, in particular less than two and preferably less than 1.01. The isolating device is thus diamagnetic or paramagnetic, and the stator magnetic field can interact with the rotor on the second side and is not completely shielded by the isolating device.

[0029] In one embodiment of the planar drive system, the thickness of the isolating device is between 0.5 mm and 1 mm. This allows the stator module to be reliably separated from corrosive media or sensitive areas, and also prevents the stator magnetic field from being completely shielded by the isolating device even if the isolating device is non-metallic.

[0030] In one embodiment of the planar drive system, the separating device is part of a working housing. The rotor can move in the working housing.

[0031] The working housing can include a liquid tank, for example. The liquid tank can be formed from a separator and side walls and can be open at the top. Alternatively, the liquid tank can also be completely closed. This makes it possible for the stator module to be arranged outside the liquid tank and for the stator module itself not to have a fluid-tight design. In this case, it can be provided that the working housing is designed in a fluid-tight manner.

[0032] In addition, the working housing can close the clean room and can thus also be configured to be fluid-tight. In this case, the stator module can also be arranged outside the clean room, so that contamination from the stator module within the clean room can be avoided.

[0033] In one embodiment of the planar drive system, the working housing includes a first vacuum chamber. The rotor can thus move inside the first vacuum chamber and the stator module is separated from the first vacuum chamber by means of a separation device. Therefore, exhaust of components of the stator module does not impair the vacuum quality in the first vacuum chamber.

[0034] In one embodiment of the planar drive system, the stator module is arranged in the second vacuum chamber. The separation device separates the first vacuum chamber from the second vacuum chamber. This structural scheme is therefore particularly advantageous because the separation device is relatively thin when necessary, as in the preferred structural scheme described above with a thickness between 0.5 mm and 1 mm. If only the first vacuum chamber is provided, the negative pressure existing in the first vacuum chamber may cause the separation device to collapse into the first vacuum chamber and be damaged thereby. If the stator module is arranged in the second vacuum chamber and the second vacuum chamber is separated from the first vacuum chamber by means of the separation device, both the first vacuum chamber and the second vacuum chamber can be evacuated. The force acting on the separation device is then significantly smaller, so that on the one hand, exhaust of components of the stator module into the first vacuum chamber can be avoided and on the other hand, damage to the separation device can be avoided.

[0035] In one embodiment of the planar drive system, the compensating valve is arranged between the first vacuum chamber and the second vacuum chamber. The compensating valve is arranged to compensate for the pressure difference between the first vacuum chamber and the second vacuum chamber when the pressure difference is greater than 5 mbar. The above-mentioned preferred material thickness of the separating device is stable to a pressure difference of 5 mbar in any case. The compensating valve can compensate for sudden pressure differences and thus avoid damage to the separating device.

[0036] In one embodiment of the planar drive system, the compensation valve is configured as an overpressure valve. In one embodiment of the planar drive system, the compensation valve is configured as a controlled valve. The valve control unit is connected to a first pressure sensor of the first vacuum chamber and a second pressure sensor of the second vacuum chamber. The internal pressure of the first vacuum chamber can be measured by means of the first pressure sensor. The internal pressure of the second vacuum chamber can be measured by means of the second pressure sensor. If the difference in the internal pressure is greater than 5 mbar, the controlled valve can be opened and pressure compensation between the first vacuum chamber and the second vacuum chamber can be achieved thereby.

[0037] In one embodiment, the stator module is connected to a vacuum feedthrough. The vacuum feedthrough is arranged to provide data connection and power connection to the stator module from outside the second vacuum chamber.

[0038] In one embodiment of the planar drive system, the vacuum feedthrough includes a circuit board. The circuit board is part of the wall of the second vacuum chamber. The circuit board also includes pins for current feedthrough and channels for data connection. To this end, the circuit board can, for example, have corresponding sockets on both sides, wherein the respective connectors of the corresponding sockets are connected by means of channels, and a conventional network cable is used inside the second vacuum chamber to connect the socket inside the second vacuum chamber to the stator module, and a conventional network cable is used outside the second vacuum chamber to connect the socket to the control unit. The pins for current feedthrough are thicker here so that the current required for generating the stator magnetic field can be provided.

[0039] In one specific embodiment, a thermal connection is established between the stator module and a wall of the second vacuum chamber in order to dissipate waste heat from the stator module.

[0040] In one embodiment of the planar drive system, the first vacuum chamber can be evacuated by means of a backing pump and a turbo pump. In particular, it can be provided that the backing pump is connected to the turbo pump and to the second vacuum chamber, and the turbo pump is connected to the first vacuum chamber. If the backing pump is now activated, the backing pump evacuates the first vacuum chamber and the second vacuum chamber. When the negative pressure in the first vacuum chamber and the second vacuum chamber is less than 5 mbar, the turbo pump connected to the first vacuum chamber can then be activated. Thus, an ultra-high vacuum can be generated in the first vacuum chamber by means of a turbo pump. Only the vacuum of the backing pump exists in the second vacuum chamber. Despite the resulting pressure difference, the separation device is stable enough to withstand the pressure difference, thereby providing an effective system for a planar drive system having a rotor running in a vacuum. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] The invention is further explained with reference to the accompanying drawings. Here, it is shown:

[0042] Figure 1 An isometric view of the rotor is shown;

[0043] Figure 2 Shown before cover is installed Figure 1 A bottom view of the rotor;

[0044] Figure 3 Shown after installing the cover Figure 1 and Figure 2 The rotor;

[0045] Figure 4 Shown by Figures 1 to 3 The cross section of the rotor;

[0046] Figure 5 Show Figures 1 to 4 A magnified view of the laser welding area of ​​the rotor;

[0047] Figure 6showing a cross section of another rotor;

[0048] Figure 7 An isometric view of another rotor is shown;

[0049] Figure 8 Shown by Figure 7 The cross section of the rotor;

[0050] Fig. 9 showing a cross section of another rotor;

[0051] Fig.10 showing a cross section of another rotor;

[0052] Fig.11 A planar drive system is shown;

[0053] Fig.12 Another planar drive system is shown;

[0054] Fig.13 Another planar drive system is shown;

[0055] Fig.14 Another planar drive system is shown;

[0056] Fig.15 A vacuum feedthrough for a planar drive system is shown;

[0057] Fig.16 showing a cross section of a lock chamber for a planar drive system;

[0058] Fig.17 Another planar drive system is shown;

[0059] Fig.18 Another planar drive system is shown;

[0060] Fig.19 Shown in top view Fig.18 Planar drive system;

[0061] Fig. 20 Another planar drive system is shown;

[0062] Fig.21 Another planar drive system is shown;

[0063] Fig. 22 Another planar drive system is shown;

[0064] Fig.23 Another planar drive system is shown;

[0065] Fig.24 Shown in top view Fig.23 Planar drive system; and

[0066] Fig.25 Another planar drive system is shown. DETAILED DESCRIPTION

[0067] Figure 1 An isometric view of a rotor 100 with a housing 110 is shown. The housing 110 has a fastening device 101 to which a payload of the rotor 100 can be fastened. The fastening device 101 can include a blind hole or a threaded hole for this purpose, in order to lock the payload on the rotor 100 or to screw it to the rotor. In addition, the housing 110 has a through hole 102 in the center. Figure 1 In FIG. 1 , the rotor 100 is shown so that the upper side 103 of the rotor can be seen and the lower side of the rotor 100 opposite to the upper side 103 cannot be seen. Figure 1 It is also possible to configure the rotor 100 without a through-opening 102. Furthermore, the fastening device 101 can also be arranged differently or be omitted completely.

[0068] The rotor 100 is provided for operation in a planar drive system, which may include stator modules, which may each generate a stator magnetic field and may interact with a magnet assembly arranged in the rotor 100. Thus, the rotor 100 may be moved as part of a planar drive.

[0069] Figure 2 Show Figure 1 104 of the rotor 100. The rotor 100 has a housing base 111. Starting from the bottom side 104, the housing base 111 has a recess 113, in which four magnet assemblies 114 are arranged. The magnet assemblies 114 are designed here as so-called Halbach arrays, which have a total of five differently magnetized areas. The four magnet assemblies 114 are arranged around the recess 102. The arrangement of the magnet assemblies 114 can also be similar to that in Figure 2 In particular, the number of magnet assemblies 114 may not be four, and in particular only one magnet assembly 114 may be provided. In addition, the magnet assembly 114 may vary in its geometric dimensions. With the change in the dimensions of the magnet assembly 114, the dimensions of the rotor 100 may change.

[0070] If Figure 1 and 2 If the rotor 100 shown in FIG. 1 is used in an aggressive medium or in a sensitive area, it may occur that the aggressive medium erodes the magnet assembly 114 or in Figure 2An adhesive (not shown) is used to firmly bond the magnet assembly 114 in the recess 113. Furthermore, when the rotor 100 is to be moved in a sensitive area, it may happen that the magnet assembly 114 or the adhesive used to fix the magnet assembly 114 is degassed and contaminates the sensitive area. The sensitive area may be a clean room or a vacuum. To solve this problem, the rotor 100 can be closed in a fluid-tight manner with a cover.

[0071] Figure 3 The view of the underside 104 is shown after the installation of the cover 112. The rotor 100 can be closed in a fluid-tight manner by means of the cover 112, which is also part of the housing 110 like the housing base body 111. The housing 110 is therefore designed to be fluid-tight.

[0072] Therefore, the rotor 100 for a planar drive system has a housing 110 and at least one magnet assembly 114. The housing 110 has a housing base 111 and a cover 112. The magnet assembly 114 is arranged in a recess 113 of the housing base 111. The cover 112 is mounted on the housing base 114 in such a way that the housing 110 is constructed in a fluid-tight manner, the cover 112 covers the recess 113 and the magnet assembly 114 is arranged inside the fluid-tight housing 110.

[0073] The cover 112 can be configured so that the magnetic field of the magnet assembly 114 exists outside the housing 110. This means that the magnetic field of the magnet assembly 114 is also available outside the rotor 100 to drive the rotor 100 in the planar drive system, and the magnetic field of the magnet assembly 114 is not completely shielded by the cover 112.

[0074] Since housing 110 is designed to be fluid-tight by means of cover 112, when rotor 100 is used in an aggressive environment, it can be achieved that liquids, such as water, acids, bases or organic solvents, can no longer attack magnet assembly 114 or the adhesive by means of which magnet assembly 114 is fixed within rotor 100. If rotor 100 is used in sensitive areas, such as in a clean room or in a vacuum, it can be achieved that neither magnet assembly 114 nor the adhesive used to fix magnet assembly 114 can be contaminated.

[0075] The cover 112 can in particular be nonmagnetic. Furthermore, the cover 112 can be paramagnetic or diamagnetic and have a relative magnetic permeability of less than ten, in particular less than two and preferably less than 1.01.

[0076] Figure 4 The cover 112 is shown after it has been fixed to the housing base 111. Figures 1 to 3The cross section of the rotor 100 is shown in FIG. 1 . The interior 115 of the housing 110 is closed in a fluid-tight manner by means of the cover 112 . The magnet assembly 114 is arranged in the interior 115 of the housing 110 .

[0077] In one embodiment, the cover 112 weakens the magnetic field of the magnet assembly 114 outside the housing 110 by at most 25%. In particular, the cover 112 weakens the magnetic field of the magnet assembly 114 by at most 10%. Particularly preferred is a cover 112 that does not weaken the magnetic field of the magnet assembly 114 substantially at all, i.e., by at most 1%. Such a rotor 100 can be well used in a planar drive system 1.

[0078] In one embodiment, the housing base body 111 and the cover 112 are made of metal. The cover 112 and the housing base body 111 are laser welded here. Here, the housing base body 111 and the cover 112 can be made of stainless steel, for example.

[0079] In one embodiment, the laser welded connection 116 between the housing base body 111 and the cover 112 is arranged circumferentially in an edge region 117 of the housing 111. The laser welded connection 116 can surround the entire housing 110 of the rotor 100. In addition, Figure 4 It is also shown that in the region of the through-opening 102 a laser welded connection 116 is likewise formed in order to connect the cover 112 to the housing main body 111 also in the region of the through-opening 102 .

[0080] Figure 5 An enlarged view of the laser welded connection 116 is shown. The cover 112 is laser welded to the housing base 111. This is achieved by directing the laser at the cover 112 and thereby creating a melt zone in the cover 112 and the housing base 111. Figure 5 In the region of the laser welded connection 116 shown in dashed lines in FIG. 1 , a mixture of the materials of the housing base body 111 and the cover 112 is arranged, wherein the mixture is produced in such a way that the laser melts the materials of the housing base body 111 and the cover 112 and the melt solidifies again after the laser is switched off and thereby forms a fluid-tight connection between the housing base body 111 and the cover 112. The mounting of the cover 112 on the housing base body 111 by means of a laser welding method is technically advantageous because the magnetic field of the magnet assembly 114 has no effect on the laser radiation. If an electric welded connection is to be produced, the electrons used in this case would be deflected accordingly by the magnetic field of the magnet assembly 114 and thus a fluid-tight housing 110 could not be reliably produced.

[0081] In one embodiment, the cover 112 comprises a metal plate. The metal plate thickness 118, ie the thickness of the metal plate of the cover 112, is between 0.05 mm and 0.5 mm. The metal plate thickness 118 is preferably between 0.09 and 0.11 mm, and in particular 0.1 mm.

[0082] Figure 6 A cross section of another rotor 100 is shown, which is substantially as in Figures 1 to 5 100 is constructed like the rotor described in . Only the through hole 102 is not provided, the recess 113 is guided on the entire housing base 111, and the magnet unit 114 is arranged in the recess 113. The interior 115 of the housing 110 is arranged between the magnet units 114, and the interior 115 is separated from the surrounding fluid of the rotor 100 by means of the cover 112 in a sealed manner. In order to use such a rotor 100, as in Figure 6 As shown in , it can be advantageous that the interior 115 of the rotor is either at least partially evacuated, in particular when the rotor 100 is to be used in a vacuum, or it can be provided that a casting compound 119 is arranged in the interior 115 of the housing 110, thereby avoiding cavities within the housing 110. In one embodiment, the casting compound 119 is a PU casting compound, wherein the interior 115 of the fluid-tight housing 110 is cast without bubbles using the PU casting compound. By casting with the casting compound 119, for example, it can be achieved that if the rotor 100 is to be used in a vacuum, there are no cavities filled with air in the interior of the rotor 100 and thus no overpressure is generated in the interior of the rotor 100 when the environment of the rotor 100 is evacuated, which could cause the cover 112 to rupture. The casting compound 119 can be used to seal in particular other cavities of the housing base 110, for example adjacent to the magnet assembly 114.

[0083] Figure 7 An isometric view of another rotor 100 is shown, wherein unless differences are described below Figure 7 The rotor 100 corresponds to Figure 1 The rotor 100 has a fluid-tight housing 110, which can be as shown in Figures 1 to 5 In addition, Figure 6 As shown, the through hole 102 can be omitted. In addition, the rotor 100 has a vacuum device 130 mounted on the housing 110. With the help of the vacuum device 130, a negative pressure can be generated inside the housing 110. The fluid-tight housing 110 can therefore be at least partially, especially completely, evacuated. Here, the vacuum device 130 can include a welded or brazed pipe or be constructed in the form of a valve. In particular, a pump can be connected to the vacuum device 130 to at least partially evacuate the interior 115 of the housing 110. Evacuating the interior 115 of the housing 110 is possible, in particular, not only for a rotor 100 cast with a casting material 119 but also for a rotor 100 without a casting material 119.

[0084] Figure 8 Show Figure 7The cross section of the rotor 100 is shown in FIG. 1 . The evacuation device 130 comprises a tube 131 which is led to the interior 115 of the housing 110. The interior 115 of the housing 110 can be evacuated by means of the tube 131. After evacuation, the tube 131 can be brazed or welded so that a negative pressure is permanently present within the housing 110.

[0085] Figure 7 and Figure 8 The evacuation device 130 of the exemplary embodiment is arranged on the upper side 103 of the rotor, wherein alternatively other locations may also be provided for arranging the evacuation device 130 .

[0086] Fig. 9 A cross section of another embodiment of a rotor 100 is shown, which corresponds to Figure 7 and 8 In this embodiment, a vacuum device 130, which is again configured as a tube 131, is arranged on the side 105 of the rotor 100. The soldered area 132 is formed to close the tube 131 after the vacuuming. The welded area can also be configured similarly.

[0087] Fig.10 A cross section of another embodiment of a rotor 100 is shown, which corresponds to Fig. 9 In this embodiment, the rotor has a through hole 102, and a vacuum device 130, which is in turn configured as a tube 131, is arranged in the through hole 102 of the rotor 100. The soldered area 132 is formed to close the tube 131 after evacuation. The welded area can also be configured similarly.

[0088] In one embodiment, it is provided that the interior 115 of the fluid-tight housing 110 is water-free. As a result, the rotor 100 can be cleaned with water after use in an aggressive environment and, after cleaning with water, can be heated to over 100° C. for drying without any water molecules being present in the interior 115 of the housing 110 which could be converted into a gaseous state during such heating and could cause the cover 112 to rupture.

[0089] To manufacture in Figures 1 to 10 The rotor described in the above can be applied to the method described below. First, a housing base 111 having a recess 113 is provided. Subsequently, the magnet assembly is arranged in the recess 113. Figures 1 to 10As shown, a plurality of magnet assemblies 114 are provided. An adhesive can be used to fix the magnet assemblies 114 in the recesses 113 of the housing base 111. Subsequently, the cover 112 is mounted on the housing base 111 in such a way that the housing 110 formed by the housing base 111 and the cover 112 is designed to be fluid-tight and the magnet assemblies 114 are arranged in the interior 115 of the fluid-tight housing.

[0090] In one exemplary embodiment of the method, the housing main body 111 and the cover 112 are formed of metal. The cover 112 and the housing main body 111 are laser welded.

[0091] In order to be able to provide the interior 115 of the housing 110 in a water-free manner, it can be provided that the rotor 100 is in a vacuum during the installation of the cover 112, and the interior of the fluid-tight housing is therefore water-free. In addition, the method can also be used to simultaneously evacuate the interior 115 of the housing 110. As a further alternative for producing a water-free interior 115 of the housing 110, the rotor 100 is heated to above 100° C. before and / or during the installation of the cover 112, and all water from the housing base 111 and the magnet assembly 114 is thus evaporated. These two variants can of course also be combined, i.e., for example, the rotor is first heated to above 100° C. and arranged in a vacuum at the same time, and then laser welding is performed within a vacuum at a temperature above or below 100° C.

[0092] Fig.11 The cross section of a planar drive system 1 is shown, which has two stator modules 10, each of which has two stator units 11. Each stator unit 11 has at least one coil assembly 12. The coil assemblies can be energized and are arranged to generate a stator magnetic field on a stator surface 13 due to the energization. The planar drive system 1 also has a rotor 100, which can be combined with Figures 1 to 10 The planar drive system also has a separation device 20. The separation device 20 is arranged on the stator surface 13, wherein the stator module 10 is arranged on the first side 21 of the separation device 20. The rotor 100 is arranged on the second side 22 of the separation device 20. The separation device 20 can be constructed as non-magnetic. In addition, the separation device 20 can have a relative magnetic permeability of less than ten, in particular less than two, and preferably less than 1.01, and is therefore diamagnetic or paramagnetic.

[0093] exist Fig.11, two stator modules 10 are shown. Of course, another number of stator modules 10 can also be provided, for example one stator module 10 or more than two stator modules 10. In addition, only one rotor 100 is shown, but a plurality of rotors 100 can also be provided. Therefore, in particular, the stator module 10 and the rotor 100 are arranged on different sides 21, 22 of the separation device 20, so that the separation device 20 separates the rotor 100 from the stator module 10. The stator magnetic field of the stator module 10 can be reached by the separation device 100 and thus interact with the rotor magnetic field of the magnet assembly 114 of the rotor 100 and thus drive the rotor 100 accordingly, in particular when the separation device 20 is non-magnetic, diamagnetic or paramagnetic.

[0094] In one embodiment, the thickness 23 of the separator 20 is between 0.5 mm and 1 mm. The separator 20 can be made of plastic, glass or metal, for example. In particular, if the separator 20 is metallic, it can be made of stainless steel.

[0095] exist Fig.11 , the separating device 20 is also shown as part of the working housing 30. The working housing 30 has an interior area 31 in which the rotor 100 can move. In particular, the working housing 30 can include a liquid tank, wherein, for example, aggressive liquids based on water (i.e., for example, acids or bases) can be arranged in the interior area 31 of the working housing 30 and, as described above, cannot reach the interior of the rotor 100 due to the fluid-tight housing 110 of the rotor 100. Organic solvents can also be arranged in the interior area 31 of the working housing 30. For this purpose, the working housing 30 can be completely closed or can also be open at the top.

[0096] In addition, the working housing 100 can include a clean room area, and thus the inner area 31 of the working housing 30 can be configured to have a predetermined, pure environment. The stator module 10 is separated from the inner area 31 of the working housing 30 by the separation device 20, and contaminants of the stator module 10 cannot reach the inner area 31 of the working housing 30. Therefore, the movement of the rotor 100 in the clean room is possible.

[0097] Fig.12 A cross section of another planar drive system 1 is shown, unless a distinction is made between this planar drive system 1 and Fig.11 The planar drive system 1 of FIG. 1 is constructed in the same manner. The working housing 30 includes a first vacuum chamber 41 . Therefore, the rotor 100 can move in the first vacuum chamber 41 . The stator module 10 is arranged outside the first vacuum chamber 41 .

[0098] Optionally, but also Fig.12, the stator module 10 is arranged inside the second vacuum chamber 42. The separation device 20 separates the first vacuum chamber 41 from the second vacuum chamber 42. The chamber wall 43 surrounds both the first vacuum chamber 41 and the second vacuum chamber 42. Through this structure, it is possible to configure the separation device 20 thinly, that is, for example, the thickness is in the range between 0.5 mm and 1 mm. If only the first vacuum chamber 41 is provided, the separation device 20 may collapse into the first vacuum chamber 41 due to its small thickness. This situation can be avoided by arranging the stator module 20 in the second vacuum chamber 42.

[0099] Thus, such an arrangement of the planar drive system 1 within the first vacuum chamber 41 and the second vacuum chamber 42 enables the rotor 100 to move under vacuum within the first vacuum chamber 41. This can be particularly advantageous if the planar drive system 1 is applied to move a substrate in a vacuum, for example during semiconductor manufacturing. In addition, by arranging the separation device 20 between the first vacuum chamber 41 and the second vacuum chamber 42, it can be achieved that the separation device 20 has a smaller thickness than the chamber wall 43, without the risk of the separation device 20 collapsing into the first vacuum chamber 41.

[0100] Fig.13 A planar drive system 1 is shown, which corresponds to Fig.12 The planar drive system 1 is similar to the planar drive system 1, but the planar drive system is expanded with other components. The fore-stage pump 51 is connected to the turbo pump 52. In addition, the fore-stage pump 51 is connected to the second vacuum chamber 42. The turbo pump 52 is connected to the first vacuum chamber 41. If a vacuum is now to be provided in the first vacuum chamber 41 and the second vacuum chamber 42, the fore-stage pump 51 can be operated first. As a result, the first vacuum chamber 41 is directly evacuated by the turbo pump 52 and the second vacuum chamber 42. In addition, if the pressure in the first vacuum chamber 41 is small enough, the turbo pump 52 can be additionally operated to produce an ultra-high vacuum in the first vacuum chamber 41. The second vacuum chamber 42 does not need to be evacuated with the help of a turbo pump, because the vacuum in the second vacuum chamber 42 is only used to prevent the collapse of the separation device 20. Therefore, the negative pressure in the second vacuum chamber 42 achieved by the fore-stage pump 51 is sufficient. Instead of the backing pump 51 and the turbo pump 52, another system can also be used in which both vacuum chambers 41, 42 are evacuated by means of one vacuum pump and the first vacuum chamber 41 is evacuated by means of a high vacuum pump or an ultra-high vacuum pump. In addition, it can be provided that the second vacuum chamber 42 is evacuated using another backing pump (not shown) and the backing pump 51 is not connected to the second vacuum chamber 42.

[0101] In one embodiment, if Fig.13 As shown, the compensation valve 53 is arranged between the first vacuum chamber 41 and the second vacuum chamber 42. Fig.13In the embodiment of the present invention, the compensation valve 53 is arranged between the connection parts of the vacuum pumps 51, 52 and the vacuum chambers 41, 42. The compensation valve 53 is configured to compensate the pressure difference between the first vacuum chamber and the second vacuum chamber when the pressure difference is greater than 5 mbar.

[0102] In one embodiment, the compensation valve 53 is designed as an overpressure valve which can have, for example, a diaphragm which breaks at an overpressure or at a pressure difference of more than 5 mbar and is therefore used for pressure compensation between the first vacuum chamber 41 and the second vacuum chamber 42 .

[0103] The compensation valve 53 can also be configured as a controlled valve. In this case, the valve control unit 54 is connected to the compensation valve 53 and the first pressure sensor 55 of the first vacuum chamber 41 and the second pressure sensor 56 of the second vacuum chamber 42. The signals of the first pressure sensor 55 and the second pressure sensor 56 can be compared by the valve control unit 54, and when there is a pressure difference greater than 5 mbar, the compensation valve 53 can be opened accordingly to provide pressure compensation. Of course, other pressure differences can also be selected, wherein the pressure difference can be affected in particular by the stability of the separation device 20 and the thickness of the separation device 20.

[0104] A vacuum feedthrough 57 is further arranged on the second vacuum chamber 42 . The stator module 10 is connected to the vacuum feedthrough 57 , wherein the vacuum feedthrough 57 is configured to provide data connection and power supply to the stator module 10 from outside the second vacuum chamber 42 .

[0105] Fig.14 The planar drive system 1 is shown, and unless otherwise described below it corresponds to Fig.13 Planar drive system 1. In this embodiment, only the compensation valve 53 is directly connected to the first vacuum chamber 41 and the second vacuum chamber 42, rather than through the connection with the vacuum pumps 51, 52.

[0106] Fig.15An enlarged schematic diagram of a vacuum feedthrough 57 is shown. The vacuum feedthrough 57 includes a circuit board 60. The circuit board 60 has a pin 61 for current feedthrough and a channel 62 for data connection. The channel 62 is connected to the sockets 63 on both sides of the circuit board 60. The circuit board 60 is fixed to the chamber wall 43 by means of a seal 64 and thus forms a part of the chamber wall 43 of the second vacuum chamber 42. Therefore, in particular, the circuit board 60 is a part of the wall of the second vacuum chamber 42. Here, the circuit board 60 and the seal 64 are arranged on the side of the chamber wall 43 facing away from the second vacuum chamber 42, because automatic or supporting sealing can be performed based on vacuum by this arrangement. However, it is also possible to arrange the circuit board 60 and the seal 64 on the side of the chamber wall 43 facing the second vacuum chamber 42. A conventional network cable can be plugged into the socket 63 and used for data connection with the stator module 10. The current for powering the stator module 10 can be provided by means of the pin 61. By means of such a vacuum feedthrough 57 based on a circuit board 60, an easily manufactured vacuum feedthrough can be provided which meets the requirements for the vacuum in the second vacuum chamber 42, since no ultra-high vacuum is required in the vacuum feedthrough. Therefore, conventional technology for the vacuum feedthrough 57 can be used and it is not necessary to use expensive ceramic feedthroughs.

[0107] Fig.16 A vacuum lock 44 is shown, by means of which the rotor 100 can be introduced from outside the vacuum into the vacuum. Three stator modules 10 are shown, wherein one of the stator modules 10 is arranged in a second vacuum chamber 42 with a first vacuum chamber 41 located thereon, which is separated from the second vacuum chamber by means of a separation device 20. The first vacuum chamber 41 is separated from a third vacuum chamber 45 by means of a first door 47. The third vacuum chamber 45 is separated from a fourth vacuum chamber 46 by means of a separation device 20, in which the stator module 10 is likewise arranged. The third vacuum chamber 45 is separated from an outer region 49 by means of a second door 48, in which the stator module 10 is likewise arranged. The rotor 100 can be moved from the outer region 49 into the third vacuum chamber 45 when the first door 47 between the first vacuum chamber 41 and the third vacuum chamber 45 is closed and the second door 48 between the third vacuum chamber 45 and the outer region 49 is open. Now, after the rotor 100 has entered the third vacuum chamber 45 and the second door 48 has been closed, the third vacuum chamber 45 and the fourth vacuum chamber 46 can be evacuated. Then, the first door 47 between the first vacuum chamber 41 and the third vacuum chamber 45 can be opened, and the rotor 100 can be moved into the first vacuum chamber 41. In this case, the gaps existing between the stator modules 10 can be overcome by the rotor 100.

[0108] A similar arrangement can also be provided if the working housing 30 should include a clean room instead of a vacuum chamber. In this case, the lower area for the stator module does not have to be sealed, and it is sufficient to provide an area similar to the first vacuum chamber 41 and the third vacuum chamber 45 for introducing the rotor 100 into the clean room.

[0109] Fig.17 The planar drive system 1 is shown, which has two stator modules 10, a rotor 100 and a separation device 20 between the stator module 10 and the rotor 100. The separation device 20 is in turn part of a working housing 30, wherein a liquid 200 is located in the working housing 30. In this case, the liquid 200 can be aggressive, in particular, towards the magnet unit 114 or towards the adhesive that firmly bonds the magnet unit 114 in the rotor 100, so that it can be sensible to seal the housing 110 of the rotor 100 in a fluid-tight manner, such as with the rotor 100. Figures 1 to 10 Constructed as described.

[0110] Fig.18 FIG. 1 shows a planar drive system 1 in which the working housing 30 is likewise filled with a liquid 200. In this case, the planar drive system 1 corresponds essentially to Fig.17 The planar drive system 1 of FIG. 3 is shown in FIG. 1 . The working housing 30 is completely closed in this case. The first liquid flow 201 moves in the working housing 30 . The rotor 100 has a guide plate 203 .

[0111] Fig.19 Show Fig.18 1. The rotor 100 is rotatably configured as described in other applications of the applicant. The first liquid flow 201 can be deflected by the guide plate 203 and a second liquid flow 202 with another direction can be generated thereby. By making the rotor 100 movable flexibly inside the working housing 30, the liquid flow inside the working housing 30 can be influenced. It should be noted that at any point above the stator surface 13, the rotor can be rotated up to 20° from the stationary position. In certain rotational positions, each of which contains the meeting point of four stator units 11, the rotor 100 can also be fully rotated.

[0112] Fig. 20 The planar drive system 1 is shown, and unless otherwise described below it corresponds to Fig.17Planar drive system 1. Object 210 is arranged in working housing 30. Rotor 100 includes collecting device 211, by means of which objects 210 suspended or moving in liquid 200 can be collected. Here, objects 210 can cover a wide range of objects 210 from fish to dirt, etc. Since rotor 100 can be moved to any position, an object collection system can be provided. To this end, collecting device 211 can include a screen, a bucket, a collection container and / or a filter. In addition, a sensor (not shown) can be provided to detect object 210.

[0113] Fig.21 The planar drive system 1 is shown, and unless otherwise described below it corresponds to Fig.17 A planar drive system 1 of the present invention. A pump 220 is arranged on the rotor 100, by means of which an object 210 present in the liquid 200 can be pumped out of the liquid 200 and moved to the outside of the working container 30 via a hose 221. It can be provided that the pump 220 is supplied with energy from outside the working container 30 by means of a cable or by means of a battery. It can also be provided that an impeller with a generator is arranged on the rotor, and the generator is used to supply electrical energy to the pump 220. It can also be provided that the impeller on the rotor 100 directly drives the pump 220. The drive can then be carried out in the following manner, that is, the movement of the rotor 100 in the liquid 200 causes the movement of the impeller and thus drives the pump 220.

[0114] Fig. 22 Another planar drive system 1 is shown, which corresponds to Fig.17 Planar drive system 1. With Fig.17 In contrast, the working housing 30 is not completely but only partially filled with the liquid 200. By a movement of the rotor 100, for example perpendicularly to the stator surface 13, or by a tilting of the rotor 100 from a rest position, wave impacts of the liquid 200 can be generated.

[0115] Fig.23 The planar drive system 1 is shown, and unless otherwise described below it corresponds to Fig.17 The planar drive system 1 of the present invention. The rotor 100 has an impeller 230 which can rotate at a rotational position at the contact points of the four stator units 11 by rotating the rotor 100 at said position. Thus, the liquid 200 can be stirred by the rotation of the rotor 100 and the impeller 230. By the possibility of individually controlling the rotor 100, any desired mixing paths can be generated.

[0116] Fig.24 Show Fig.231. The rotor 100 is rotated from its resting position. The rotor 10 is rotatably designed as described in other applications of the applicant. Since the rotor 10 can be moved flexibly in the working housing 30, the liquid flow in the working housing 30 can be influenced. It should be noted that at any point above the stator surface 13, the rotor can be rotated up to 20° from the resting position. In certain rotational positions, which each contain the meeting point of four stator units 11, the rotor 10 can also be completely rotated.

[0117] Fig.25 A cross section of another planar drive system 1 is shown. In this embodiment, two stator modules 10 are also arranged, which have a rotor 100 arranged above the stator module 10. The separating device 20 is part of the product 240 to be processed or inspected in this embodiment. A wall of the product is guided between the stator module 10 and the rotor 100. A measuring or processing head 241 is arranged on the rotor 100, with which the product 240 can be inspected or processed.

[0118] Reference numerals list

[0119] 1 Planar drive system

[0120] 10 Stator module

[0121] 11 Stator unit

[0122] 12 Coil assembly

[0123] 13 Stator surface

[0124] 20 Separation device

[0125] 21 First side

[0126] 22 Second side

[0127] 23 Thickness

[0128] 30 Working shell

[0129] 31 Internal Area

[0130] 41 First Vacuum Chamber

[0131] 42 Second Vacuum Chamber

[0132] 43 Room wall

[0133] 44 Vacuum Gate

[0134] 45 The third vacuum chamber

[0135] 46 Fourth Vacuum Chamber

[0136] 47 First Gate

[0137] 48 Second Gate

[0138] 49 External Area

[0139] 51 Foreline pump

[0140] 52 Turbine Pump

[0141] 53 Compensation valve

[0142] 54 Valve control unit

[0143] 55 First pressure sensor

[0144] 56 Second pressure sensor

[0145] 57 Vacuum feedthrough

[0146] 60 Circuit Board

[0147] 61 pins

[0148] 62 channels

[0149] 63 Socket

[0150] 64 Seals

[0151] 100 Rotors

[0152] 101 Fixtures

[0153] 102 Through Hole

[0154] 103 upper side

[0155] 104 Lower side

[0156] 105 Side

[0157] 110 Housing

[0158] 111 Shell base

[0159] 112 Cover

[0160] 113 concavity

[0161] 114 Magnet Assembly

[0162] 115 Interior

[0163] 116 Laser welding connection

[0164] 117 Marginal Area

[0165] 118 Metal sheet thickness

[0166] 119 Castable

[0167] 130 Vacuum pump

[0168] 131 tubes

[0169] 132 Brazing area

[0170] 200 Liquid

[0171] 201 First Liquid Flow

[0172] 202 Second liquid flow

[0173] 203 Guide plate

[0174] 210 Objects

[0175] 211 Collection Device

[0176] 220 Pump

[0177] 221 Hose

[0178] 230 Impeller

[0179] 240 Products

[0180] 241 Measuring or processing head

Claims

1. A rotor (100) for a planar drive system (1), the rotor having a housing (110) and at least one magnet assembly (114), wherein: The housing (110) comprises a housing base (111) and a cover (112), wherein the magnet assembly (114) is arranged in a recess (113) of the housing base (111), wherein the cover (112) is mounted on the housing base (111) in such a way that the housing (110) is designed to be fluid-tight, the cover (112) covers the recess (113), and the magnet assembly (114) is arranged in an interior (115) of the fluid-tight housing (110), wherein the cover (112) and the housing base (111) are laser welded, and wherein The housing base (111) and the cover (112) are made of metal. or The housing main body (111) and the cover (112) include plastic.

2. The rotor (100) according to claim 1, wherein: The cover (112) is non-magnetic.

3. The rotor (100) according to claim 1 or 2, wherein: The cover (112) has a relative magnetic permeability of less than ten, in particular less than two and preferably less than 1.

01.

4. The rotor (100) according to any one of claims 1 to 3, wherein: The cover (112) weakens the magnetic field of the magnet assembly (114) outside the housing (110) by at most 25 percent, in particular by at most 10 percent.

5. The rotor (100) according to any one of claims 1 to 4, wherein the housing base (111) and the cover (112) are made of metal, wherein: The cover (112) comprises a metal plate, wherein the metal plate has a thickness between 0.05 and 0.5 mm, preferably between 0.09 and 0.11 mm, and in particular 0.1 mm.

6. The rotor (100) according to any one of claims 1 to 5, wherein: A laser welded connection (116) between the housing base body (111) and the cover (112) is arranged circumferentially in an edge region (117) of the housing (110).

7. The rotor (100) according to any one of claims 1 to 6, wherein: The interior (115) of the fluid-tight housing (110) is at least partially evacuated.

8. The rotor (100) according to claim 7, wherein: A vacuum device (130) is mounted on the housing (110), wherein the vacuum device (130) includes a welded or brazed tube (131).

9. The rotor (100) according to any one of claims 1 to 8, wherein: The interior (115) of the fluid-tight housing (110) is at least partially filled with a casting compound.

10. The rotor (100) according to claim 9, wherein: The interior (115) of the fluid-tight housing (110) is cast in a bubble-free manner with a PU casting compound.

11. The rotor (100) according to any one of claims 1 to 10, wherein: The interior (115) of the fluid-tight housing (110) is water-free.

12. The rotor (100) according to any one of claims 1 to 11, wherein: The magnet assembly (114) is capable of interacting with the stator magnetic field and thereby driving the rotor (100).

13. A planar drive system (1) having at least one stator module (10), wherein: The stator module (10) has at least one stator unit (11), the stator unit having at least one coil assembly (12), wherein the coil assembly (12) can be energized and is configured to generate a stator magnetic field above a stator surface (13) due to the energization, wherein the planar drive system (1) also has a rotor (100) according to any one of claims 1 to 12, wherein the rotor (100) can be moved above the stator surface (13) by means of an interaction between the stator magnetic field of the magnet assembly (114) and the rotor magnetic field, wherein the planar drive system (1) also has a separation device (20), wherein the separation device (20) is arranged above the stator surface (13), wherein the stator module (10) is arranged on a first side (21) of the separation device (20), and the rotor (100) is arranged on a second side (22) of the separation device (20).

14. The planar drive system (1) according to claim 13, wherein: The separation device (20) is non-magnetic.

15. The planar drive system (1) according to claim 13 or 14, wherein: The separating device (20) has a relative magnetic permeability of less than ten, in particular less than two and preferably less than 1.

01.

16. The planar drive system (1) according to any one of claims 13 to 15, wherein: The thickness of the separation device (20) is between 0.5 mm and 1 mm.

17. The planar drive system (1) according to any one of claims 13 to 16, wherein the separating device (20) is part of a working housing (30), wherein the rotor (100) is movable within the working housing (30).

18. The planar drive system (1) according to claim 17, wherein: The working housing (30) comprises a first vacuum chamber (41).

19. The planar drive system (1) according to claim 18, wherein: The stator module (10) is arranged in a second vacuum chamber (42), wherein the separation device (20) separates the first vacuum chamber (41) from the second vacuum chamber (42).

20. The planar drive system (1) according to claim 19, wherein: A compensation valve (53) is arranged between the first vacuum chamber (41) and the second vacuum chamber (42), wherein the compensation valve (53) is configured to compensate for the pressure difference between the first vacuum chamber (41) and the second vacuum chamber (42) when the pressure difference is greater than 5 mbar.

21. The planar drive system (1) according to claim 20, wherein: The compensation valve (53) is designed as a pressure relief valve.

22. The planar drive system (1) according to claim 21, wherein: The compensation valve (53) is designed as a controlled valve, wherein a valve control (54) is connected to a first pressure sensor (55) of the first vacuum chamber (41) and to a second pressure sensor (56) of the second vacuum chamber (42).

23. The planar drive system (1) according to any one of claims 19 to 22, wherein: The stator module (10) is connected to a vacuum feedthrough (57), wherein the vacuum feedthrough (57) is configured to provide data connection and power supply to the stator module (10) from outside the second vacuum chamber (42).

24. The planar drive system (1) according to claim 23, wherein: The vacuum feedthrough (57) comprises a circuit board (60), wherein the circuit board (60) is part of the wall of the second vacuum chamber (42), wherein the circuit board (60) comprises pins (61) for current feedthrough and channels (62) for data connection.

25. The planar drive system (1) according to any one of claims 18 to 24, wherein: The first vacuum chamber (41) can be evacuated by means of a backing pump (51) and a turbo pump (52).

26. A method for producing a rotor (100) according to any one of claims 1 to 12 for a planar drive system (1) according to any one of claims 13 to 25, the method comprising the following steps: - providing a housing base (111) having a recess (113); - arranging at least one magnet assembly (114) in the recess (113); - mounting the cover (112) on the housing base (111) in such a way that the housing (110) formed by the housing base (111) and the cover (112) is designed to be fluid-tight and the magnet assembly (114) is arranged in the interior (115) of the fluid-tight housing (110), in, The housing base (111) and the cover (112) are made of metal. or The housing base (111) and the cover (112) are made of plastic. And wherein the cover (112) and the housing base (111) are laser welded.

27. The method according to claim 26, wherein: The rotor (100) is in a vacuum during installation of the cover (112) and therefore the interior (115) of the fluid-tight housing (110) is water-free.

28. The method according to claim 26 or 27, wherein: The rotor (100) is heated to above 100 degrees Celsius before and / or during installation of the cover (112) and the interior (115) of the fluid-tight housing (110) is therefore water-free.

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