Vacuum coating equipment

Abstract

The present application discloses a vacuum coating device, comprising: a vacuum chamber; an exhaust mechanism connected to the vacuum chamber; a planetary rotating mechanism arranged at the top of the vacuum chamber for mounting a substrate; an evaporation source arranged at the bottom of the vacuum chamber; a heating mechanism arranged in the vacuum chamber and located on the same side of the substrate as the evaporation source, and the heating mechanism is located below the planetary rotating mechanism; the heating mechanism comprises a bracket, a halogen lamp, two first electrodes and at least two wiring banks; the bracket is fixedly arranged on the wall of the vacuum chamber; the halogen lamp is installed on the bracket, and the position and angle of the halogen lamp relative to the bracket are adjustable; each wiring bank is connected to the halogen lamp through a first wire; the two first electrodes are respectively connected to different wiring banks through a second wire, which is used to lead the power supply outside the vacuum chamber to the wiring bank. The vacuum coating device provided in this specification has a high heating efficiency of the heating mechanism, rapid heat transfer, and a prolonged service life of the planetary rotating mechanism.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, and in particular to a vacuum coating device. Background Art

[0002] During the coating process of the vacuum coating equipment, the substrate temperature will affect the quality and density of the film layer. Therefore, within the range that the substrate and the equipment can withstand, the temperature of the substrate surface needs to be increased as much as possible to improve the quality of the film layer.

[0003] Under existing technical conditions, such as Figure 1 and Figure 2 In the vacuum coating equipment 100' shown, the substrate 50' is placed on the upper layer of an umbrella-shaped coating frame 60', and a hole 61' is opened on the coating frame 60'. The heating source (usually a heating wire 10') is arranged above the coating frame 60' to increase the temperature of the substrate 50' by radiating the back side of the substrate 50' (that is, the side of the substrate 50' facing the heating source, roughly the upper surface of the substrate 50').

[0004] This heating method can meet the requirements of heating the substrate 50' on the ordinary round umbrella-shaped coating frame 60'. However, when the vacuum coating equipment 100' needs to use a coating frame 60' (i.e., the planetary rotating mechanism 40') with higher requirements, such as Figure 3 As shown, the heating wire 10' on the top of the vacuum coating equipment 100' needs to heat the entire planetary rotating mechanism 40' before radiating heat to the substrate 50' at the end of the planetary rotating mechanism 40'. For the substrate 50' installed on a 2-level or even 3-level planetary rotating mechanism 40', the heat radiated by the top heating source is mainly blocked by the planetary rotating mechanism 40', so the heating efficiency is low. At the same time, this will also cause the temperature of the planetary rotating mechanism 40' to rise, causing the planetary rotating mechanism 40' to work in poor condition, thereby shortening the life of the planetary rotating mechanism 40'. Summary of the invention

[0005] In view of the deficiencies in the prior art, an object of this specification is to provide a vacuum coating device, whose heating mechanism has high heating efficiency, rapid heat transfer, and extended life of the planetary rotating mechanism.

[0006] To achieve the above-mentioned purpose, the embodiment of this specification provides a vacuum coating device, including:

[0007] Vacuum chamber;

[0008] an exhaust mechanism in communication with the vacuum chamber, for evacuating the vacuum chamber;

[0009] A planetary rotating mechanism disposed at the top of the vacuum chamber, for mounting a substrate;

[0010] An evaporation source disposed at the bottom of the vacuum chamber, for coating the substrate;

[0011] A heating mechanism is used to heat the substrate; the heating mechanism is arranged in the vacuum chamber and is located on the same side of the substrate as the evaporation source, and the heating mechanism is located below the planetary rotation mechanism; the heating mechanism includes a bracket, a halogen lamp, two first electrodes and at least two terminal blocks; the bracket is fixedly arranged on the wall of the vacuum chamber; the halogen lamp is installed on the bracket, and the position and angle of the halogen lamp relative to the bracket are adjustable; each of the terminal blocks is connected to the halogen lamp through a first wire; the two first electrodes are respectively connected to different terminal blocks through a second wire, which is used to lead the power supply outside the vacuum chamber to the terminal blocks.

[0012] As a preferred embodiment, the halogen lamp is connected to the bracket via an adjustment block; the adjustment block is connected to the bracket, and the adjustment block can move relative to the bracket along the axial direction of the bracket, and can rotate relative to the bracket around the axis of the bracket.

[0013] As a preferred embodiment, the halogen lamp is connected to the adjustment block via a frame, and the frame is connected to the adjustment block; the adjustment block is provided with a first mounting protrusion, and the extension direction of the first mounting protrusion is perpendicular to the axial direction of the bracket; the frame is provided with a first mounting hole for the first mounting protrusion to pass through, and the frame can rotate around the axis of the first mounting protrusion relative to the adjustment block, so as to adjust the illumination angle of the halogen lamp.

[0014] As a preferred embodiment, baffles corresponding to the two ends of the halogen lamp are provided at both ends of the frame, and through holes for the first wire to pass through are provided on the baffles; and one of the first wires is connected to each of the two ends of the halogen lamp;

[0015] A second mounting protrusion is provided on a side of the halogen lamp facing the frame, and the extension direction of the second mounting protrusion is the same as the extension direction of the first mounting protrusion; the frame is provided with a second mounting hole for the second mounting protrusion to pass through, and the halogen lamp can rotate relative to the frame around the axis of the second mounting protrusion.

[0016] As a preferred implementation, a first anti-fouling glass is provided on a side of the halogen lamp facing away from the frame, for protecting the surface of the halogen lamp; the first anti-fouling glass is in a flat plate shape.

[0017] As a preferred embodiment, a lampshade is provided on the side of the first anti-fouling glass facing away from the halogen lamp, and the lampshade holds the first anti-fouling glass and the halogen lampshade in the frame; mesh holes are provided on the lampshade to allow the irradiation light of the halogen lamp to pass through.

[0018] As a preferred embodiment, the halogen lamp includes a halogen lamp tube, and a second anti-fouling glass and insulating ceramics respectively located on both sides of the halogen lamp tube, wherein the insulating ceramics are arranged close to the adjustment block; the insulating ceramics and the second anti-fouling glass surround the halogen lamp tube in a combined area; a reflective plate is provided on the side of the insulating ceramics away from the halogen lamp tube for reflecting light from the lower half of the halogen lamp.

[0019] As a preferred embodiment, the halogen lamp also includes a lamp holder and a clamp, the clamp connects the second anti-fouling glass, insulating ceramics, reflective plate and lamp holder; second electrodes are provided at both ends of the lamp holder; one end of the halogen lamp tube is connected to one end of the second electrode through an electrode locking screw, and the other end of the second electrode and the first wire are connected through a wire locking screw.

[0020] As a preferred embodiment, the first electrode passes through the bottom plate of the vacuum chamber, and the first electrode and the bottom plate are sealed by a sealing ring and fastened by a nut; both sides of the terminal block are fixedly mounted on the bottom plate through insulating seats respectively; one end of the bracket is fixedly mounted on the bottom plate.

[0021] As a preferred implementation, the bracket extends in a vertical direction, and there are multiple brackets; each bracket is provided with multiple halogen lamps.

[0022] Beneficial effects:

[0023] The vacuum coating equipment provided in this embodiment is arranged in a vacuum chamber with the heating mechanism on the same side of the substrate as the evaporation source, so that the heating mechanism is located below the planetary rotating mechanism, thereby reducing the heat radiation received by the planetary rotating mechanism, improving the working condition of the planetary rotating mechanism, and extending the life of the planetary rotating mechanism. In addition, the heating mechanism includes a bracket, a halogen lamp, two first electrodes, and at least two wiring banks, and the position and angle of the halogen lamp relative to the bracket are adjustable, thereby improving the heating efficiency of the heating mechanism and accelerating the heat transfer of the heating mechanism.

[0024] With reference to the following description and the accompanying drawings, the specific embodiments of the present invention are disclosed in detail, indicating the manner in which the principles of the present invention can be adopted. It should be understood that the embodiments of the present invention are not limited in scope thereby.

[0025] Features described and / or illustrated with respect to one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0026] It should be emphasized that the term “include / comprises” when used herein refers to the presence of features, integers, steps or components, but does not exclude the presence or addition of one or more other features, integers, steps or components. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative labor.

[0028] Figure 1 It is a structural schematic diagram of a vacuum coating device in the prior art;

[0029] Figure 2 for Figure 1 The enlarged view of point A in the middle;

[0030] Figure 3 It is a structural schematic diagram of another vacuum coating equipment in the prior art;

[0031] Figure 4 A schematic structural diagram of a vacuum coating device provided in this embodiment;

[0032] Figure 5 A schematic diagram of an exploded structure of a heating mechanism provided in this embodiment;

[0033] Figure 6 A schematic diagram of the structure of a halogen lamp provided in this embodiment;

[0034] Figure 7 A schematic structural diagram of another vacuum coating device provided in this embodiment.

[0035] Description of reference numerals:

[0036] 100', vacuum coating equipment; 10', heating wire; 40', planetary rotating mechanism; 50', substrate; 60', coating frame; 61', hole;

[0037] 100, vacuum coating equipment; 10, heating mechanism; 20, vacuum chamber; 201, bottom plate; 202, sealing ring; 203, nut; 204, electrode sheath; 205, wire clamp; 206, insulating seat; 30, exhaust mechanism; 40, planetary rotating mechanism; 50, substrate;

[0038] 1. Bracket; 2. Halogen lamp; 21. Second mounting protrusion; 22. Halogen lamp tube; 23. Second anti-fouling glass; 24. Insulating ceramics; 25. Reflector; 26. Lamp holder; 27. Second electrode; 271. Insulating ceramics; 272. Ceramic locking screw; 273. Electrode locking screw; 274. Wire locking screw; 28. Clamp; 3. First electrode; 4. Terminal block; 5. First wire; 6. Second wire; 7. Adjustment block; 71. First mounting protrusion; 72. Accommodating portion; 73. Locking piece; 8. Frame; 81. First mounting hole; 82. Baffle; 83. Through hole; 9. First anti-fouling glass; 11. Lampshade; 111. Mesh. DETAILED DESCRIPTION

[0039] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0040] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on the other element or there may be another element centered thereon. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be another element centered thereon at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0042] See also Figures 4 to 7 The embodiment of the present application provides a vacuum coating device 100 , including a vacuum chamber 20 , an exhaust mechanism 30 , a planetary rotating mechanism 40 , an evaporation source (not shown) and a heating mechanism 10 .

[0043] Among them, Figure 7 As shown, the exhaust mechanism 30 is connected to the vacuum chamber 20 and is used to evacuate the vacuum chamber 20. Figure 4 and Figure 7As shown, the planetary rotating mechanism 40 is arranged at the top of the vacuum chamber 20 for mounting the substrate 50. The planetary rotating mechanism 40 may include a revolution rotating component and a rotation rotating component, which is a common structure in the art and will not be described in detail in this application. The evaporation source is arranged at the bottom of the vacuum chamber 20 for coating the substrate 50.

[0044] The heating mechanism 10 is used to heat the substrate 50. The heating mechanism 10 is disposed in the vacuum chamber 20 and is located on the same side of the substrate 50 as the evaporation source. The heating mechanism 10 is located below the planetary rotating mechanism 40. Figure 4 As shown, the heating mechanism 10 includes a bracket 1, a halogen lamp 2, two first electrodes 3 and at least two wiring banks 4. The bracket 1 is fixedly arranged on the wall of the vacuum chamber 20. The halogen lamp 2 is mounted on the bracket 1, and the position and angle of the halogen lamp 2 relative to the bracket 1 are adjustable, so as to better heat the substrate 50. The two first electrodes 3 are respectively connected to different wiring banks 4 through second wires 6, which are used to lead the power outside the vacuum chamber 20 to the wiring banks 4. Each wiring bank 4 is connected to the halogen lamp 2 through a first wire 5, and the wiring bank 4 conducts the power introduced by the first electrode 3 to the halogen lamp 2, so that the halogen lamp 2 can work normally and light up as a heating source.

[0045] The vacuum coating device 100 provided in this embodiment is arranged such that the heating mechanism 10 is located below the planetary rotating mechanism 40 by arranging the heating mechanism 10 in the vacuum chamber 20 and being located on the same side of the substrate 50 as the evaporation source, thereby reducing the heat radiation received by the planetary rotating mechanism 40, improving the working condition of the planetary rotating mechanism 40, and extending the life of the planetary rotating mechanism 40. In addition, the heating mechanism 10 includes a bracket 1, a halogen lamp 2, two first electrodes 3, and at least two wiring banks 4, and the position and angle of the halogen lamp 2 relative to the bracket 1 are adjustable, thereby improving the heating efficiency of the heating mechanism 10 and accelerating the heat transfer of the heating mechanism 10.

[0046] like Figure 5 As shown, the first electrode 3 passes through the bottom plate 201 of the vacuum chamber 20, and the first electrode 3 and the bottom plate 201 are sealed by a sealing ring 202 and fastened by a nut 203. The portion of the first electrode 3 outside the vacuum chamber 20 can be covered with an electrode sheath 204 and connected with a wire clamp 205, which is used to connect to a power source.

[0047] The terminal block 4 shunts the current introduced by the first electrode 3 in the vacuum chamber 20. The two sides of the terminal block 4 insulate the current between the terminal block 4 and the vacuum chamber 20 through the insulating seat 206, and are fixedly mounted on the bottom plate 201. The bottom end of the bracket 1 is fixedly mounted on the bottom plate 201.

[0048] In this embodiment, the heating mechanism 10 can lead the power supply outside the vacuum chamber 20 to the wiring bank 4 through the first electrode 3, and multiple halogen lamps 2 can be connected through the wiring bank 4. Specifically, in order to achieve a better heating effect, the number of brackets 1 is set to be multiple, and each bracket 1 is provided with multiple halogen lamps 2.

[0049] In this embodiment, if Figure 5 As shown, the halogen lamp 2 is connected to the bracket 1 through the adjustment block 7. The adjustment block 7 is connected to the bracket 1, and the adjustment block 7 can move relative to the bracket 1 along the axis direction of the bracket 1, and can rotate relative to the bracket 1 around the axis of the bracket 1.

[0050] Specifically, the adjustment block 7 is provided with a receiving portion 72 for the bracket 1 to pass through. The bracket 1 extends in the vertical direction and is preferably cylindrical, which is convenient for adjusting the adjustment block 7. The receiving portion 72 can be in the shape of a circular hole and extends in the vertical direction. The diameter of the circular hole can be slightly larger than the outer diameter of the bracket 1 to facilitate the movement and adjustment of the adjustment block 7. After the position adjustment of the adjustment block 7 is completed, the locking member 73 can be used to fix the relative position of the adjustment block 7 and the bracket 1; when the position of the adjustment block 7 needs to be adjusted, the locking member 73 is loosened, and the adjustment block 7 can be moved up and down along the bracket 1 or rotated around the bracket 1. The locking member 73 can be a nut.

[0051] like Figure 5 As shown, the halogen lamp 2 is connected to the adjustment block 7 through the frame 8, and the frame 8 is connected to the adjustment block 7. The adjustment block 7 is provided with a first mounting protrusion 71, and the extension direction of the first mounting protrusion 71 is perpendicular to the axial direction of the bracket 1, that is, the first mounting protrusion 71 extends in the horizontal direction. The frame 8 is provided with a first mounting hole 81 for the first mounting protrusion 71 to pass through, and the frame 8 can rotate relative to the adjustment block 7 around the axis of the first mounting protrusion 71, which is used to adjust the irradiation angle of the halogen lamp 2, so that the halogen lamp 2 just faces the substrate 50 for irradiation, and can more effectively heat the substrate 50 installed on the planetary rotating mechanism 40. After the first mounting protrusion 71 passes through the first mounting hole 81, the frame 8 can rotate around the horizontal direction; after the angle adjustment of the frame 8 is completed, the frame 8 and the adjustment block 7 can be fixed using fasteners such as nuts.

[0052] Specifically, baffles 82 corresponding to the two ends of the halogen lamp 2 are provided at both ends of the frame 8 in the horizontal direction, and the lower ends of the two baffles 82 are connected by a connecting plate, and the halogen lamp 2 is installed in a U-shaped space surrounded by the two baffles 82 and the connecting plate. Through holes 83 for the first wire 5 to pass through are provided on the baffle 82, and one first wire 5 is connected to each end of the halogen lamp 2. Since the number of halogen lamps 2 can be multiple, the number of through holes 83 on each baffle 82 can be set to multiple.

[0053] Preferably, the side of the halogen lamp 2 facing the frame 8 is provided with a second mounting protrusion 21, and the extension direction of the second mounting protrusion 21 is the same as the extension direction of the first mounting protrusion 71. The frame 8 is provided with a second mounting hole (not shown) for the second mounting protrusion 21 to pass through, and the halogen lamp 2 can rotate relative to the frame 8 around the axis of the second mounting protrusion 21 to further adjust the irradiation angle of the halogen lamp 2, so that the adjustment range of the irradiation angle of the halogen lamp 2 is expanded. Multiple groups of halogen lamps 2 can be matched to adjust the irradiation range, and the irradiation angles of the halogen lamps 2 on each bracket 1 can be the same or different.

[0054] Specifically, the second mounting hole is arranged on the connecting block on the upper surface of the connecting plate, and the first mounting hole 81 is arranged on the connecting block on the lower surface of the connecting plate. The second mounting hole and the first mounting hole 81 can be symmetrically arranged relative to the connecting plate or staggered.

[0055] like Figure 5 As shown, a first anti-fouling glass 9 is provided on the side of the halogen lamp 2 away from the frame 8, which is used to cover the halogen lamp 2 to prevent the surface of the halogen lamp 2 from being contaminated by the film material and affecting the heating efficiency. The first anti-fouling glass 9 is in a flat plate shape.

[0056] Preferably, a lampshade 11 is provided on the side of the first anti-fouling glass 9 away from the halogen lamp 2, and the lampshade 11 covers the first anti-fouling glass 9 and the halogen lamp 2 in the frame 8 to prevent the workpiece from falling and damaging the halogen lamp 2. A mesh 111 is provided on the lampshade 11 to allow the irradiation light of the halogen lamp 2 to pass through.

[0057] like Figure 6 As shown, the halogen lamp 2 includes a halogen lamp tube 22, and a second anti-fouling glass 23 and a heat-insulating ceramic 24 respectively located on both sides of the halogen lamp tube 22. The heat-insulating ceramic 24 and the second anti-fouling glass 23 are both semi-circular, and the heat-insulating ceramic 24 and the second anti-fouling glass 23 surround the halogen lamp tube 22 in the enclosed area. The heat-insulating ceramic 24 is arranged close to the adjustment block 7, that is, the heat-insulating ceramic 24 is located below the halogen lamp tube 22, and the second anti-fouling glass 23 is located above the halogen lamp tube 22. A reflector 25 is provided on the side of the heat-insulating ceramic 24 facing away from the halogen lamp tube 22 (i.e., the lower side) for reflecting the light of the lower half of the halogen lamp 2.

[0058] The halogen lamp 2 further includes a lamp holder 26 and a clamp 28, through which the second anti-fouling glass 23, the heat-insulating ceramic 24, the reflector 25 and the lamp holder 26 are connected. The heat-insulating ceramic 24 can prevent the heat of the lamp holder 26 from being directly transferred to the second anti-fouling glass 23 and causing the glass to melt. The lamp holder 26 is provided with a second electrode 27 at both ends, and the second electrode 27 is connected to the lamp holder 26 through an insulating ceramic 271 and a ceramic locking screw 272. In order to make the second electrode 27 and the lamp holder 26 more firmly connected, two sets of insulating ceramics 271 and ceramic locking screws 272 can be provided. One end of the halogen lamp tube 22 is connected to one end of the second electrode 27 through an electrode locking screw 273, and the other end of the second electrode 27 and the first wire 5 are connected through a wire locking screw 274.

[0059] It should be noted that, in the description of this specification, the terms "first", "second", etc. are only used for descriptive purposes and to distinguish similar objects. There is no order of precedence between the two, and they cannot be understood as indicating or implying relative importance. In addition, in the description of this specification, unless otherwise specified, the meaning of "plurality" is two or more.

[0060] Any numerical value cited herein includes all values ​​of lower and upper values ​​that increase by one unit from the lower limit to the upper limit, and there is at least a two-unit interval between any lower value and any higher value. For example, if the value of the quantity of a component or a process variable (such as temperature, pressure, time, etc.) is stated to be from 1 to 90, preferably from 20 to 80, and more preferably from 30 to 70, the purpose is to illustrate that values ​​such as 15 to 85, 22 to 68, 43 to 51, 30 to 32 are also explicitly listed in the specification. For values ​​less than 1, one unit is appropriately considered to be 0.0001, 0.001, 0.01, 0.1. These are merely examples that are intended to be clearly expressed, and it can be considered that all possible combinations of numerical values ​​listed between the lowest value and the highest value are clearly stated in the specification in a similar manner.

[0061] Unless otherwise indicated, all ranges include the endpoints and all numbers between the endpoints. "About" or "approximately" used with a range applies to both endpoints of the range. Thus, "about 20 to 30" is intended to cover "about 20 to about 30", including at least the specified endpoints.

[0062] All articles and references disclosed, including patent applications and publications, are incorporated herein by reference for all purposes. The term "consisting essentially of..." to describe a combination should include the identified elements, ingredients, parts or steps and other elements, ingredients, parts or steps that do not substantially affect the basic novel characteristics of the combination. The use of the terms "comprising" or "including" to describe a combination of elements, ingredients, parts or steps herein also contemplates embodiments that consist essentially of these elements, ingredients, parts or steps. By using the term "may", it is intended to indicate that any attribute described that "may" include is optional.

[0063] Multiple elements, ingredients, parts or steps can be provided by a single integrated element, ingredient, part or step. Alternatively, a single integrated element, ingredient, part or step can be divided into separate multiple elements, ingredients, parts or steps. The disclosure "one" or "an" used to describe an element, ingredient, part or step is not intended to exclude other elements, ingredients, parts or steps.

[0064] It should be understood that the above description is for illustration and not for limitation. Many embodiments and many applications beyond the examples provided will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of the present teachings should not be determined with reference to the above description, but should be determined with reference to the appended claims and the full scope of equivalents possessed by such claims. For the purpose of comprehensiveness, all articles and references, including disclosures of patent applications and publications, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein in the preceding claims is not intended to be a waiver of the subject matter, nor should it be considered that the inventors did not consider the subject matter to be part of the disclosed inventive subject matter.

Claims

1. A vacuum coating device, characterized in that: include: Vacuum chamber; an exhaust mechanism in communication with the vacuum chamber, for evacuating the vacuum chamber; A planetary rotating mechanism disposed at the top of the vacuum chamber, for mounting a substrate; An evaporation source disposed at the bottom of the vacuum chamber, for coating the substrate; A heating mechanism for heating the substrate; the heating mechanism is arranged in the vacuum chamber and is located on the same side of the substrate as the evaporation source, and the heating mechanism is located below the planetary rotating mechanism; the heating mechanism comprises a bracket, a halogen lamp, two first electrodes and at least two wiring banks; the bracket is fixedly arranged on the wall of the vacuum chamber; the halogen lamp is installed on the bracket, and the position and angle of the halogen lamp relative to the bracket are adjustable; each of the wiring banks is connected to the halogen lamp through a first wire; the two first electrodes are respectively connected to different wiring banks through a second wire, which is used to lead the power supply outside the vacuum chamber to the wiring banks; The halogen lamp is connected to the bracket through an adjustment block; the halogen lamp is connected to the adjustment block through a frame, and the frame is connected to the adjustment block; the adjustment block is connected to the bracket, and the adjustment block can move relative to the bracket along the axis direction of the bracket, and can rotate relative to the bracket around the axis of the bracket; the adjustment block is provided with a first mounting protrusion, and the extension direction of the first mounting protrusion is perpendicular to the axial direction of the bracket; the frame is provided with a first mounting hole for the first mounting protrusion to pass through, and the frame can rotate relative to the adjustment block around the axis of the first mounting protrusion, so as to adjust the illumination angle of the halogen lamp; A first anti-fouling glass is provided on one side of the halogen lamp away from the frame, for protecting the surface of the halogen lamp; the first anti-fouling glass is in a flat plate shape; A lampshade is provided on the side of the first anti-fouling glass away from the halogen lamp, and the lampshade holds the first anti-fouling glass and the halogen lampshade in the frame; mesh holes are provided on the lampshade to allow the irradiation light of the halogen lamp to pass through; The halogen lamp comprises a halogen lamp tube, and a second anti-fouling glass and a heat-insulating ceramic respectively located on both sides of the halogen lamp tube, wherein the heat-insulating ceramic is arranged close to the adjusting block; the heat-insulating ceramic and the second anti-fouling glass surround the halogen lamp tube within the enclosed area thereof; a reflector is arranged on a side of the heat-insulating ceramic away from the halogen lamp tube, for reflecting light from the lower half of the halogen lamp; The halogen lamp also includes a lamp holder and a clamp, the clamp connects the second anti-fouling glass, insulating ceramics, a reflective plate and the lamp holder; second electrodes are provided at both ends of the lamp holder; one end of the halogen lamp tube is connected to one end of the second electrode through an electrode locking screw, and the other end of the second electrode and the first wire are connected through a wire locking screw.

2. The vacuum coating equipment according to claim 1, characterized in that: The two ends of the frame are provided with baffles corresponding to the two ends of the halogen lamp, and the baffles are provided with through holes for the first wire to pass through; the two ends of the halogen lamp are respectively connected with one of the first wires; A second mounting protrusion is provided on a side of the halogen lamp facing the frame, and the extension direction of the second mounting protrusion is the same as the extension direction of the first mounting protrusion; the frame is provided with a second mounting hole for the second mounting protrusion to pass through, and the halogen lamp can rotate relative to the frame around the axis of the second mounting protrusion.

3. The vacuum coating equipment according to claim 1, characterized in that: The first electrode passes through the bottom plate of the vacuum chamber, and the first electrode and the bottom plate are sealed by a sealing ring and fastened by a nut; both sides of the terminal block are fixedly mounted on the bottom plate through insulating seats respectively; one end of the bracket is fixedly mounted on the bottom plate.

4. The vacuum coating equipment according to claim 1, characterized in that: The bracket extends in a vertical direction, and there are multiple brackets; each bracket is provided with multiple halogen lamps.

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