A transfer device and inkjet printing system for display panel processing

By designing a transfer device in the sealed box in the display panel processing, the automatic transfer of the substrate is achieved by using a linear drive module and a transfer mechanism, the problem of manual transfer is solved, the automation and accuracy of the substrate processing is improved, and efficient and smooth Processing process.

CN117509129BActive Publication Date: 2025-01-10WUHAN NATIONAL INNOVATION TECHNOLOGY OPTOELECTRONICS EQUIPMENT CO LTD
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Patent Information

Application Number
CN202311764004.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-12-20
Publication Date
2025-01-10
Estimated Expiration
2043-12-20

AI Technical Summary

Technical Problem

In the prior art, manual transfer substrates are difficult to be delivered to different processing equipment, resulting in low fluency and automation of substrate processing, and low transfer accuracy and efficiency.

Method used

A transfer device for display panel processing is designed, including a sealed box, a transfer mechanism and a linear drive module. Through the linear drive module and a transfer mechanism, the substrate is driven to move and rotate in the length direction in the sealed box, thereby realizing the automation of the substrate. Transfer and maintain a suitable process atmosphere environment through the atmosphere control mechanism.

Benefits of technology

It improves the degree of automation and efficiency of substrate processing, ensures accurate transfer of substrates at different locations, and enhances processing fluency and quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present application relates to a transfer device and inkjet printing system for display panel processing, the transfer device includes a sealed box, and a plurality of side walls of the sealed box are provided with a connecting structure; a transfer mechanism, which includes a lifting component, a rotating component and a transfer component, the transfer component is used to support a substrate, the transfer component is installed at the rotating end of the rotating component, and is driven by the rotating component to rotate in a horizontal plane, the rotating component is installed at the lifting end of the lifting component, and the lifting component drives the transfer component and the transfer component to move in a vertical direction; a linear drive module, the linear drive module is installed on the bottom surface of the sealed box, and is connected to the transfer mechanism to drive the transfer mechanism to move along the length direction of the sealed box. The present application utilizes a linear drive module and a transfer mechanism to transfer a substrate, so as to facilitate the automatic delivery of the substrate to different positions in the sealed box, and the smoothness of the substrate transfer processing is better, the degree of automation of the substrate processing is improved, and the processing efficiency of the substrate is improved.
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Description

Technical Field

[0001] The present application relates to the technical field of display panel processing, and in particular to a transfer device and an inkjet printing system for display panel processing. Background Art

[0002] Inkjet printing technology has broad application prospects in manufacturing fields such as information, energy, medical care, and national defense. In recent years, it has been increasingly used in flexible devices such as OLED, RFID, thin-film solar cells, wearable flexible devices, PCB, smart skin, and LED direct display fields.

[0003] After the panel is inkjet printed, it needs to be vacuum dried and baked to ensure that the ink material forms a uniform film on the glass substrate. When printing, vacuum drying, curing, and baking, the substrate must be in a clean gas environment without water and oxygen to prevent water and oxygen in the environment from corroding the substrate and dissolving the ink, so as to ensure the printing quality of the substrate.

[0004] In the related art, a glove box is provided, and the box of the printing device, the drying equipment, the curing equipment and the baking equipment are provided in the glove box or connected to the glove box. The glove box has a glove assembly for manual operation by a technician, and the technician manually transfers the substrate in the glove box through the glove assembly. In this way, the substrate can be continuously kept in the atmosphere required by the process during the processing and circulation process, and the processing time required to restore the atmosphere can be saved.

[0005] Due to the location and layout requirements of substrate processing equipment, each device needs to be connected to different sides of the glove box to make reasonable use of space. It is difficult for technicians to send substrates to different processing equipment through the glove assembly. In addition, manual transfer of substrates not only has a low degree of automation, but also has low transfer accuracy and efficiency, and poor smoothness of the substrate processing process. Summary of the invention

[0006] The embodiments of the present application provide a transfer device and an inkjet printing system for display panel processing to solve the technical problems in the related art of manually transferring substrates, making it difficult to deliver the substrates to different processing equipment, and also causing the substrate processing to have poor smoothness and automation, and low transfer accuracy and efficiency.

[0007] In a first aspect, a transfer device for display panel processing is provided, comprising:

[0008] A sealed box, wherein a plurality of side walls of the sealed box are provided with a communication structure, and the communication structure is used to connect an external processing device with the sealed box;

[0009] A transfer mechanism, the transfer mechanism comprising a lifting assembly, a rotating assembly and a transfer assembly, the transfer assembly being used to support the substrate, the transfer assembly being mounted at the rotating end of the rotating assembly and being driven by the rotating assembly to rotate in a horizontal plane, the rotating assembly being mounted at the lifting end of the lifting assembly, and the lifting assembly driving the transfer assembly and the transfer assembly to move in a vertical direction;

[0010] A linear drive module is installed on the inner bottom surface of the sealing box and is drivingly connected to the transfer mechanism to drive the transfer mechanism to move along the length direction of the sealing box.

[0011] In some embodiments, the transfer mechanism includes multiple transfer components, and the multiple transfer components are all installed at the rotating end of the rotating component; the transfer component includes:

[0012] A support rod group, the support rod group is rotatably connected to the rotating end of the rotating assembly, and the support rod group includes a plurality of support fingers in the same horizontal plane;

[0013] A finger rotation drive assembly is installed at the rotating end of the rotating assembly, and the finger rotation drive assembly is drivingly connected to the support rod group to drive the support rod group to rotate in a horizontal plane; wherein, multiple groups of support fingers of the support rod group are spaced apart in the vertical direction.

[0014] In some embodiments, the transfer assembly further includes a negative pressure adsorption device, the top surfaces of the supporting fingers are each provided with a plurality of adsorption holes, and the adsorption end of the negative pressure adsorption device is connected to the plurality of adsorption holes to form a negative pressure between the substrate and the supporting fingers.

[0015] In some embodiments, the lifting assembly includes:

[0016] A mounting base plate, the mounting base plate being mounted on a driving end of the linear drive module;

[0017] A lifting seat, the rotating assembly is installed on the lifting seat;

[0018] A rotating arm group, the rotating arm group comprising a first rotating arm and a second rotating arm, one end of the first rotating arm and one end of the second rotating arm are hinged, and the other end of the first rotating arm and the other end of the second rotating arm are respectively hinged to the mounting base plate and the lifting seat;

[0019] A lifting drive assembly, wherein the lifting drive assembly is drivingly connected to the first rotating arm and the second rotating arm to drive the first rotating arm and the second rotating arm to rotate synchronously toward or away from each other;

[0020] A connecting rod group, the connecting rod group includes a first connecting rod, a second connecting rod and a connecting plate, the connecting plate is rotatably connected to the rotating shaft, the first connecting rod is arranged in parallel with the first rotating arm, and the two ends of the first connecting rod are respectively hinged to the mounting base plate and the connecting plate, the second connecting rod is arranged in parallel with the second rotating arm, and the two ends of the second connecting rod are respectively hinged to the connecting plate and the lifting seat; wherein, with the rotation of the first rotating arm and the second rotating arm, the lifting seat moves in the vertical direction.

[0021] In some embodiments, the lifting drive assembly includes:

[0022] a first lifting driving member, the first lifting driving member being mounted on the second rotating arm and drivingly connected to the first rotating arm to drive the first rotating arm to rotate relative to the second rotating arm;

[0023] The second lifting drive member is installed on the installation base plate and is drivingly connected to the second rotating arm to drive the second rotating arm to rotate relative to the installation base plate.

[0024] In some embodiments, the transfer device for display panel processing further includes an atmosphere control mechanism, the atmosphere control mechanism is used to adjust the gas environment in the sealed box to the gas environment required by the process, and the atmosphere control mechanism includes:

[0025] A suction member, the suction member is connected to the sealed box to extract gas inside the sealed box;

[0026] an inflatable member, the inflatable member being in communication with the sealed box so as to fill the sealed box with an inert gas;

[0027] A purifier is connected to the sealed box to extract and remove water oxygen in the sealed box.

[0028] In some embodiments, the transfer device for display panel processing further includes a plurality of airbag assemblies, wherein the airbag assemblies include:

[0029] A capsule body connected to the inner wall of the sealed box;

[0030] An inflation and deflation component is communicated with the sac to inflate the sac or extract gas from the sac.

[0031] In some embodiments, the airbag assembly further comprises a plurality of groups of elastic binding members, the plurality of groups of elastic binding members correspond one-to-one to the plurality of airbag bodies, and the elastic binding members comprise:

[0032] A plurality of elastic ropes, both ends of which are fixed to the inner wall of the sealed box, and the plurality of elastic ropes are all wound around the bladder; wherein, after the bladder is deflated, the elastic ropes bind the bladder to the inner wall of the sealed box.

[0033] In some embodiments, a buffer assembly is further included, the buffer assembly is connected to the sealing box through the communication structure, and the buffer assembly includes:

[0034] A buffer box, the buffer box is connected with the sealing box through the connecting structure, and a sealing door body is provided at the connecting port between the buffer box and the sealing box;

[0035] An auxiliary atmosphere control mechanism is communicated with the buffer box to adjust the gas environment in the buffer box.

[0036] The beneficial effects of the technical solution provided by this application include:

[0037] The embodiment of the present application provides a transfer device for display panel processing. After the substrate enters the sealed box through the connecting structure, the linear drive module drives the rotating mechanism to receive the substrate. Due to the arrangement of the linear drive module, the lifting assembly and the rotating assembly, the transfer assembly can be driven to move along the length direction of the sealed box, rotate in the horizontal plane, and lift and lower in the sealed box. The transfer assembly receives the substrate, and the substrate can be automatically sent to different positions in the sealed box, and it is convenient to send the substrate to the connecting structure on different sides of the sealed box to send the substrate to different processing equipment. Through the transfer flexibility of the substrate, it is possible to support multiple processing equipment to be reasonably arranged on multiple sides of the sealed box, so as to facilitate more reasonable use of space. In addition, by receiving and transferring the substrate through the transfer mechanism, the automation level of substrate processing is higher, the substrate transfer processing is smoother, and the transfer accuracy is also higher, thereby improving the processing efficiency and processing quality of the substrate.

[0038] In a second aspect, an inkjet printing system is provided, comprising the transfer device for display panel processing as described above.

[0039] Another embodiment of the present application provides an inkjet printing system. Since the inkjet printing system includes the above-mentioned transfer device for display panel processing, the beneficial effects of the inkjet printing system are consistent with the beneficial effects of the above-mentioned transfer device for display panel processing, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0041] Figure 1 A schematic diagram of a transfer device for display panel processing provided in an embodiment of the present application;

[0042] Figure 2 A partial schematic diagram of a transfer device for display panel processing provided in an embodiment of the present application;

[0043] Figure 3 A schematic diagram of a transfer mechanism provided in an embodiment of the present application;

[0044] Figure 4 A partial schematic diagram of a linear drive module provided in an embodiment of the present application;

[0045] Figure 5 A front view of the transfer mechanism provided in an embodiment of the present application;

[0046] Figure 6 A schematic diagram of a transfer mechanism and a linear drive module provided in an embodiment of the present application;

[0047] Figure 7 An internal side view of a sealed box provided in an embodiment of the present application;

[0048] Figure 8 This is a top view of the interior of the sealed box provided in an embodiment of the present application.

[0049] In the figure: 1, sealing box; 1a, connecting structure; 2, transfer mechanism; 21, lifting assembly; 211, mounting base; 212, lifting seat; 213, rotating arm group; 2131, first rotating arm; 2132, second rotating arm; 214, lifting drive assembly; 2141, first lifting drive member; 2142, second lifting drive member; 215, connecting rod group; 2151, first connecting rod; 2152, second connecting rod; 2153, connecting plate; 22, rotating assembly; 221, rotating seat; 222 , rotation drive assembly; 23, transfer assembly; 231, support rod group; 2311, support finger; 2312, support frame; 232, finger rotation drive assembly; 3, linear drive module; 31, slide rail; 32, sliding plate; 33, linear drive assembly; 331, gear; 332, rack; 333, linear drive member; 4, atmosphere control mechanism; 5, airbag assembly; 51, capsule; 52, elastic binding member; 6, buffer assembly; 61, buffer box; 62, auxiliary atmosphere control mechanism; 7, cache assembly. DETAILED DESCRIPTION

[0050] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0051] The embodiment of the present application provides a transfer device and inkjet printing system for display panel processing. The transfer device uses a linear drive module and a transfer mechanism to transfer substrates, which is convenient for automatically delivering substrates to different positions in a sealed box. The smoothness of substrate transfer processing is better, the degree of automation of substrate processing is improved, and the processing efficiency of substrates is improved. The present application solves the technical problems in the related art that manually transferring substrates makes it difficult to deliver substrates to different processing equipment, the smoothness and automation of substrate processing are poor, and the transfer accuracy and efficiency are also low.

[0052] A transfer device for display panel processing includes a sealed box 1, a transfer mechanism 2 and a linear drive module 3. The transfer mechanism 2 and the linear drive module 3 are both arranged in the sealed box 1 and are used to transfer substrates in the sealed box 1 to improve the smoothness of the substrate processing flow process, improve the degree of automation of processing substrates, and improve the processing efficiency of substrates.

[0053] Reference Figure 1 and Figure 2 , wherein a plurality of side walls of the sealed box 1 are provided with a connecting structure 1a, the connecting structure 1a allows the substrate to enter and exit the sealed box 1, and the external processing equipment is connected to the sealed box 1 through the connecting structure 1a, so as to transfer the substrate from the sealed box 1 to the processing equipment. The connecting structure 1a includes a connecting port, which is suitable for the substrate to pass through.

[0054] Reference Figure 1 and Figure 2 Specifically, the transfer device for display panel processing also includes a buffer component 6, which is connected to the sealing box 1 through a connecting structure 1a. The substrate is loaded into the sealing box 1 through the buffer component 6, or the substrate is unloaded from the sealing box 1 through the buffer component 6.

[0055] Reference Figure 1 and Figure 2The buffer assembly 6 includes a buffer box 61 and an auxiliary atmosphere control mechanism 62. The buffer box 61 is fixed on the outer wall of the sealed box 1 and is in communication with the sealed box 1. A sealed door body is provided at the position where the buffer box 61 is in communication with the sealed box 1, and an automatic door is provided on the side wall of the buffer box 61 away from the sealed box 1. The auxiliary atmosphere control mechanism 62 is in communication with the buffer box 61 to adjust the gas environment in the buffer box 61 so that the gas environment in the buffer box 61 is adjusted to be consistent with the gas environment in the sealed box 1 and suitable for the process requirements of substrate processing.

[0056] The auxiliary atmosphere control mechanism 62 includes an exhaust machine, an inflator and a purifier.

[0057] The automatic door and the sealed door body are not opened at the same time. The sealed door body is closed, the automatic door is opened, the substrate is sent to the buffer box 61, and the automatic door is closed. The auxiliary atmosphere control mechanism 62 adjusts the gas environment in the buffer box 61 to the gas environment consistent with the sealed box 1 and suitable for the process requirements of substrate processing, and then the sealed door body is opened. At this time, the transfer mechanism 2 transfers the substrate from the buffer box 61 to the sealed box 1.

[0058] After the auxiliary atmosphere control mechanism 62 adjusts the gas environment in the buffer box 61 to be consistent with the gas environment in the sealed box 1 and suitable for the process requirements of substrate processing, the automatic door is closed, the sealed door body is opened, the transfer mechanism 2 sends the substrate to the buffer box 61, closes the sealed door body, and then opens the automatic door to facilitate the removal of the processed substrate from the sealed box 1.

[0059] With this arrangement, when the substrate is loaded into or taken out of the sealed box 1, the gas environment in the sealed box 1 will not be destroyed due to the arrangement of the buffer assembly 6, and there is no need to readjust the gas environment in the sealed box 1, which saves a lot of time, facilitates continuous processing of the substrate, and improves processing efficiency.

[0060] It should be noted that the gas environment in the processing equipment of each substrate is in the gas environment state required by the processing technology, so when the substrate flows between the sealing box 1 and the processing equipment, the gas environment state in the sealing box 1 will not be damaged.

[0061] Reference Figure 1 Optionally, the transfer device for display panel processing further includes a cache component 7, which is used to cache multiple substrates. The cache component 7 includes a storage box, which is connected to the sealed box 1 through a connecting structure 1a. Storage cells are arranged in the vertical direction in the storage box, and each storage cell is used to cache the substrate.

[0062] In this way, multiple substrates are stored in the storage box, which facilitates the transfer mechanism 2 to directly take and place the substrates in the storage box. The transfer mechanism 2 takes out the unprocessed substrates from the storage box and temporarily stores the processed substrates in the storage box. This can greatly reduce the number of times the sealed box 1 is opened to take and place the substrates, reduce the number of times the gas environment in the buffer box 61 is adjusted, and improve the substrate processing efficiency.

[0063] Reference Figure 3 and Figure 4 The transfer mechanism 2 is driven by the linear drive module 3 to move in the length direction of the sealed box 1. After receiving the substrate, the transfer mechanism 2 is driven by the linear drive module 3 to flow in the sealed box 1 along the length direction of the sealed box 1.

[0064] Reference Figure 3 and Figure 4 Specifically, the linear drive module 3 includes a slide rail 31, a slide plate 32 and a linear drive assembly 33. The length direction of the slide rail 31 is consistent with the length direction of the sealed box 1, and is arranged on the inner bottom surface of the sealed box 1 and is arranged near the middle of the inner bottom surface of the sealed box 1 in the width direction. The slide plate 32 is slidably arranged on the slide rail 31, and the linear drive assembly 33 is used to drive the slide plate 32 to slide on the slide rail 31. The transfer mechanism 2 is installed on the slide plate 32, which can drive the transfer mechanism 2 and the substrate to move in the length direction of the sealed box 1.

[0065] Reference Figure 3 and Figure 4 Specifically, the linear drive assembly 33 includes a gear 331, a rack 332 and a linear drive member 333. The rack 332 is mounted on the slide rail 31, and the length direction of the rack 332 is consistent with the length direction of the slide rail 31. The gear 331 is rotatably connected to the sliding plate 32, and the gear 331 is meshed with the rack 332. The linear drive member 333 is drivingly connected to the gear 331 to drive the gear 331 to rotate. By driving the gear 331 to rotate, the gear 331 rolls on the rack 332 to drive the sliding plate 32 to slide on the slide rail 31. In this embodiment, the linear drive member 333 includes a servo motor.

[0066] With this arrangement, the substrate can be transferred in the longitudinal direction of the sealed box 1 .

[0067] In other embodiments, the linear drive assembly 33 includes a screw mechanism or a linear motor.

[0068] Reference Figure 3 , Figure 5 and Figure 6, wherein the transfer mechanism 2 includes a lifting assembly 21, a rotating assembly 22 and a transfer assembly 23. The transfer assembly 23 is used to support the substrate, and the transfer assembly 23 is installed at the rotating end of the rotating assembly 22, and is driven by the rotating assembly 22 to rotate in the horizontal plane. The rotating assembly 22 is installed at the lifting end of the lifting assembly 21, and the lifting assembly 21 drives the rotating assembly 22 and the transfer assembly 23 to move in the vertical direction.

[0069] In this arrangement, after the substrate is supported by the transfer assembly 23, the substrate can be rotated and lifted in the horizontal plane under the action of the rotating assembly 22 and the lifting assembly 21. In addition, under the action of the linear drive module 3, the substrate can also move along the length direction of the sealed box 1. Therefore, the substrate can be driven to most positions in the sealed box 1, which is convenient for transferring the substrate to the processing equipment connected to different positions of the sealed box 1. The circulation flexibility and smoothness of the substrate are improved, the degree of automation of substrate processing is improved, and the processing efficiency of the substrate is improved.

[0070] Since the substrate is transferred through the transfer mechanism 2 and the linear drive module 3, the consistency of each substrate transfer is easier to control and the accuracy of the substrate transfer position is also higher, so as to support high-precision processing of the substrate by the processing equipment and improve the processing quality of the substrate.

[0071] In addition, in this embodiment, the transfer device for display panel processing can meet the processing flow of large-size substrates. It can meet the substrate processing flow requirements of G4.5 equipment and G6 equipment. Among them, the size of the substrate processed by the G4.5 equipment is 730mm×920mm, and the size of the substrate processed by the G6 equipment is 1500mm×1850mm. It should be noted that when large-size substrates are transferred, higher requirements are placed on the flow stability of the substrates. Manual transfer of substrates can easily cause uneven force on the substrates, causing deformation or even cracking, and the accuracy of manual transfer is more difficult to guarantee than that of small-size substrates.

[0072] Reference Figure 3 , Figure 5 and Figure 6 , wherein the rotating assembly 22 includes a rotating drive assembly 222 and a rotating seat 221. The rotating seat 221 is rotatably connected to the lifting end of the lifting assembly 21, the rotating drive assembly 222 is integrated in the lifting end of the lifting assembly 21, and the rotating drive assembly 222 is drivingly connected to the rotating seat 221 to drive the rotating seat 221 to rotate in a horizontal plane. The transfer assembly 23 is installed on the rotating seat 221 to rotate in a horizontal plane with the rotating seat 221. After the transfer assembly 23 receives the substrate, as the transfer assembly 23 rotates, it is convenient to change the length direction of the substrate, so as to facilitate the substrate to be sent to the processing equipment located at different side walls of the sealing box 1. In this embodiment, the rotating drive assembly 222 includes a servo motor or a belt transmission mechanism.

[0073] Reference Figure 3 , Figure 5 and Figure 6 Optionally, in this embodiment, the transfer mechanism 2 includes multiple transfer components 23, each of which is rotatably connected to the rotating base 221, and each of which can rotate in a horizontal plane relative to the rotating base 221. Preferably, two transfer components 23 are provided.

[0074] In this arrangement, one of the two transfer assemblies 23 can receive unprocessed substrates, and the other can receive processed substrates, so that the processed substrates in the processing equipment can be taken out in sequence and then the unprocessed substrates can be sent to the processing equipment, thereby improving the transfer efficiency of the substrates. By rotating the transfer assemblies 23 and the rotating seat 221, the relative positions of the two transfer assemblies 23 can be adjusted, and interference can be avoided when the two transfer assemblies 23 take and send substrates.

[0075] Reference Figure 3 , Figure 5 and Figure 6 Specifically, the transfer assembly 23 includes a support rod group 231 and a finger rotation drive assembly 232. The support rod group 231 is used to support the substrate. The support rod group 231 is rotatably connected to the rotating seat 221. The support rod group 231 can rotate together with the rotating seat 221, and can also rotate independently in a horizontal plane relative to the rotating seat 221. The support rod group 231 includes a support frame 2312 and a plurality of support fingers 2311. The plurality of support fingers 2311 are in the same horizontal plane, and the plurality of support fingers 2311 are fixed to the support frame 2312. The support frame 2312 is rotatably connected to the rotating seat 221. The finger rotation drive assembly 232 is installed on the rotating seat 221 and is drivingly connected to the support frame 2312 to drive the support frame 2312 and the support fingers 2311 to rotate together in a horizontal plane. In this embodiment, the finger rotation drive assembly 232 includes a belt transmission mechanism.

[0076] The plurality of supporting fingers 2311 are parallel to each other and arranged at intervals, and the plurality of supporting fingers 2311 are used to support the substrate. The substrate is supported by the plurality of supporting fingers 2311, and the substrate is subjected to a more uniform force, and the rotation process of the substrate is more stable.

[0077] Reference Figure 3 , Figure 5 and Figure 6 Furthermore, the supporting fingers 2311 of the plurality of supporting rod groups 231 are arranged at intervals in the vertical direction. By utilizing the space in the vertical direction, the integration of the two transfer assemblies 23 is improved, and when the supporting fingers 2311 of the two transfer assemblies 23 are rotated to the upper and lower settings, the two transfer assemblies 23 occupy a smaller space in the sealed box 1.

[0078] Furthermore, the transfer assembly 23 further includes a negative pressure adsorption device (not shown in the figure), and a plurality of adsorption holes are provided on the top surfaces of the support fingers 2311. The adsorption ends of the negative pressure adsorption device are connected to the plurality of adsorption holes to form a negative pressure between the substrate and the support fingers 2311. In this embodiment, the negative pressure adsorption device includes a vacuum generator.

[0079] With this arrangement, when the substrate is rotated, the substrate is adsorbed on the supporting finger 2311, and the mechanical vibration generated during the transfer is not easy to cause the substrate to shift relative to the supporting finger 2311. The substrate is more stably located on the supporting finger 2311, and the substrate is also easier to be accurately delivered to the processing position in the processing equipment.

[0080] Reference Figure 3 , Figure 5 and Figure 6 , wherein the lifting assembly 21 includes a mounting base plate 211 , a lifting seat 212 , a rotating arm assembly 213 , a lifting drive assembly 214 and a connecting rod assembly 215 .

[0081] Reference Figure 3-Figure 6 The mounting base plate 211 is mounted on the driving end of the linear drive module 3. In this embodiment, the mounting base plate 211 is fixed on the sliding plate 32 to drive the lifting assembly 21 to move in the length direction of the sealing box 1 through the linear drive module 3. The lifting seat 212 is the lifting end of the lifting assembly 21. The top surface of the lifting seat 212 is horizontally arranged, and the rotating assembly 22 is mounted on the top surface of the lifting seat 212 to move up and down with the lifting seat 212.

[0082] Reference Figure 5 and Figure 6 The rotating arm group 213 includes a first rotating arm 2131 and a second rotating arm 2132. One end of the first rotating arm 2131 and one end of the second rotating arm 2132 are hinged, and the other end of the first rotating arm 2131 and the other end of the second rotating arm 2132 are hinged to the mounting base 211 and the lifting seat 212 respectively.

[0083] Reference Figure 5 and Figure 6 The lifting drive assembly 214 is driven and connected to the first rotating arm 2131 and the second rotating arm 2132 to drive the first rotating arm 2131 and the second rotating arm 2132 to rotate synchronously toward or away from each other. As the first rotating arm 2131 and the second rotating arm 2132 rotate synchronously, the angle between the first rotating arm 2131 and the second rotating arm 2132 changes to change the height of the lifting seat 212.

[0084] Reference Figure 5 and Figure 6The connecting rod group 215 includes a first connecting rod 2151, a second connecting rod 2152 and a connecting plate 2153. The first connecting rod 2151 is arranged in parallel with the first rotating arm 2131, and the two ends of the first connecting rod 2151 are respectively hinged to the mounting base 211 and the connecting plate 2153. The second connecting rod 2152 is arranged in parallel with the second rotating arm 2132, and the two ends of the second connecting rod 2152 are respectively hinged to the connecting plate 2153 and the lifting seat 212.

[0085] With such a configuration, as the lifting drive assembly 214 drives the first rotating arm 2131 and the second rotating arm 2132 to rotate, the first connecting rod 2151 and the second connecting rod 2152 rotate together, and drive the lifting seat 212 to rotate accordingly. When the lifting seat 212 is lifted or lowered, the first connecting rod 2151 and the second connecting rod 2152 assist in driving the lifting seat 212 to rotate, thereby ensuring that the top surface of the lifting seat 212 is maintained in a horizontal state. Therefore, when the rotating assembly 22 and the transfer assembly 23 are lifted or lowered along with the lifting seat 212, they will not deflect relative to the horizontal plane, and the substrate is maintained in a horizontal state.

[0086] In addition, the lifting assembly 21 adopts this structure, and the lifting assembly 21 occupies less space. When the lifting seat 212 is at the lowest position, the first rotating arm 2131 and the second rotating arm 2132 are in a folded state, and the space occupied by the sealing box 1 is relatively small.

[0087] Reference Figure 5 and Figure 6 Specifically, the lifting drive assembly 214 includes a first lifting drive member 2141 and a second lifting drive member 2142. The first lifting drive member 2141 is installed on the second rotating arm 2132 and is drivingly connected to the first rotating arm 2131 to drive the first rotating arm 2131 to rotate relative to the second rotating arm 2132. The second lifting drive member 2142 is installed on the mounting base 211 and is drivingly connected to the second rotating arm 2132 to drive the second rotating arm 2132 to rotate relative to the mounting base 211. In this embodiment, the first lifting drive member 2141 and the second lifting drive member 2142 include a servo motor belt transmission mechanism.

[0088] The first lifting driving member 2141 and the second lifting driving member 2142 are coordinated and controlled so that the first rotating arm 2131 and the second rotating arm 2132 are synchronously rotated toward or away from each other, thereby realizing the lifting and lowering of the lifting seat 212 .

[0089] Reference Figure 1 The transfer device for display panel processing further includes an atmosphere control mechanism 4, which is used to adjust the gas environment in the sealed box 1 to the gas environment required by the process. The gas environment required by the process is a water-oxygen-free and inert gas environment to prevent the substrate surface from being corroded.

[0090] The atmosphere control mechanism 4 includes an exhaust component, an inflator, and a purifier. The exhaust component is connected to the sealed box 1 to extract the gas inside the sealed box 1, the inflator is connected to the sealed box 1 to fill the sealed box 1 with inert gas, and the purifier is connected to the sealed box 1 to extract and remove water and oxygen in the sealed box 1. In this embodiment, the exhaust component includes an exhaust fan, the inflator includes an inflator, and the purifier includes a purifier.

[0091] Before processing the substrate, the atmosphere control mechanism 4 is first used to adjust the gas environment in the sealed box 1 to the gas environment required by the process. Specifically, the air in the sealed box 1 is first extracted by the vacuum component, and at the same time, an inert gas is filled into the sealed box 1 by the filling component, preferably nitrogen. Due to the water and oxygen components in the gas in the sealed box 1, it is difficult to replace the air in the sealed box 1 with an inert gas. Therefore, after the vacuum component and the filling component have worked for a period of time, they are suspended, and the water and oxygen in the sealed box 1 are removed by a purifier. After that, the vacuum component and the filling component work again to replace the air in the sealed box 1 with an inert gas, and the water and oxygen in the sealed box 1 are also removed, so that the gas environment in the sealed box 1 can be adjusted to the gas environment required by the process.

[0092] Reference Figure 7 and Figure 8 , wherein the transfer device for display panel processing further includes a plurality of airbag components 5, and the airbag components 5 include a capsule 51 and an inflation and deflation component (not shown in the figure). The plurality of capsules 51 are connected to the inner wall of the sealed box 1, and the inner bottom surface, the inner top surface and the plurality of inner side walls of the sealed box 1 are all distributed with a plurality of capsules 51, and the capsules 51 are arranged away from the connecting structure 1a. The inflation and deflation component is connected to the capsule 51 to inflate the capsule 51 or extract the gas in the capsule 51. In this embodiment, the inflation and deflation component includes a vacuum pump and an inflator.

[0093] With this arrangement, before processing the substrate, when adjusting the gas environment in the sealed box 1, the capsule 51 is inflated to fill the space in the sealed box 1, so as to reduce the volume of the remaining space in the sealed box 1. At this time, when the purifier removes water and oxygen in the sealed box 1, the time for removing water and oxygen in the sealed box 1 is also greatly reduced due to the significant reduction in the space in the sealed box 1. Generally, the capsule 51 can occupy 20%-30% of the space in the sealed box 1, and the time required for removing water and oxygen can also be saved by 20%-30%. The time required for adjusting the gas environment in the sealed box 1 can be shortened by 1-2 hours, which greatly improves the efficiency of the preparation work before substrate processing.

[0094] Reference Figure 7 and Figure 8Furthermore, in the present embodiment, when adjusting the gas environment in the sealed box 1, when the supporting fingers 2311 of the two groups of transfer assemblies 23 are rotated to the upper and lower settings, the space occupied by the two groups of transfer assemblies 23 in the sealed box 1 is reduced, and at the same time, the rotating arm group 213 of the lifting assembly 21 is in a folded state, and the lifting seat 212 is in the lowest position, so as to fully reduce the space occupied by the transfer mechanism 2 in the sealed box 1, thereby leaving a large amount of space for the capsule 51, so that the capsule 51 can fill the remaining space in the sealed box 1 as much as possible, thereby reducing the space occupied by the gas in the sealed box 1.

[0095] Reference Figure 7 and Figure 8 Further, the airbag assembly 5 also includes a plurality of sets of elastic binding members 52, and the plurality of sets of elastic binding members 52 correspond to the plurality of capsules 51 one by one. The elastic binding members 52 include a plurality of elastic ropes. Both ends of the elastic ropes are fixed to the inner wall of the sealing box 1, and the plurality of elastic ropes are all wound around the capsules 51.

[0096] With this arrangement, after the bladder 51 is deflated, the elastic rope binds the bladder 51 to the inner wall of the sealed box 1, thereby substantially reducing the space in the sealed box 1 occupied by the bladder 51 in the uninflated state, thereby preventing the bladder 51 from interfering with the normal transfer of the substrate.

[0097] The embodiment of the present application provides a transfer device for display panel processing. After the substrate enters the sealed box 1 through the connecting structure 1a, the linear drive module 3 drives the rotating mechanism to receive the substrate. Due to the arrangement of the linear drive module 3, the lifting component 21 and the rotating component 22, the transfer component 23 can be driven to move along the length direction of the sealed box 1, rotate in the horizontal plane, and move up and down in the sealed box 1. The transfer component 23 receives the substrate, and the substrate can be automatically sent to different positions in the sealed box 1, and it is convenient to send the substrate to the connecting structure 1a on different sides of the sealed box 1, so as to send the substrate to different processing equipment. Through the transfer flexibility of the substrate, it is possible to support multiple processing equipment to be reasonably arranged on multiple sides of the sealed box 1, so as to facilitate more reasonable use of space. In addition, by receiving and transferring the substrate through the transfer mechanism 2, the automation degree of substrate processing is higher, the substrate transfer processing is smoother, the transfer accuracy is also higher, and the processing efficiency and processing quality of the substrate are improved.

[0098] Another embodiment of the present application provides an inkjet printing system. Since the inkjet printing system includes the above-mentioned transfer device for display panel processing, the beneficial effects of the inkjet printing system are consistent with the beneficial effects of the above-mentioned transfer device for display panel processing, which will not be repeated here.

[0099] In the description of the present application, it should be noted that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0100] It should be noted that, in this application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0101] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.

Claims

1. A transfer device for display panel processing, characterized in that: It includes: A sealed box, wherein a plurality of side walls of the sealed box are provided with a communication structure, and the communication structure is used to connect an external processing device with the sealed box; A transfer mechanism, wherein the transfer mechanism comprises a lifting assembly, a rotating assembly and a plurality of transfer assemblies, wherein the transfer assembly is used to support the substrate, wherein the plurality of transfer assemblies are mounted on the rotating end of the rotating assembly and driven by the rotating assembly to rotate in a horizontal plane, wherein the rotating assembly is mounted on the lifting end of the lifting assembly, and the lifting assembly drives the transfer assembly and the transfer assembly to move in a vertical direction; The transfer assembly includes a support rod group and a finger rotation drive assembly, the support rod group is rotatably connected to the rotating end of the rotating assembly, and the support rod group includes a plurality of support fingers in the same horizontal plane; the finger rotation drive assembly is installed at the rotating end of the rotating assembly, and the finger rotation drive assembly is drivably connected to the support rod group to drive the support rod group to rotate in the horizontal plane; wherein the plurality of groups of support fingers of the support rod group are spaced apart in the vertical direction; The lifting assembly comprises: a mounting base plate, the mounting base plate is mounted on the driving end of the linear drive module; a lifting seat, the rotating assembly is mounted on the lifting seat; a rotating arm group, the rotating arm group comprises a first rotating arm and a second rotating arm, one end of the first rotating arm is hinged to one end of the second rotating arm, and the other end of the first rotating arm and the other end of the second rotating arm are respectively hinged to the mounting base plate and the lifting seat; a lifting drive assembly, the lifting drive assembly is drivingly connected to both the first rotating arm and the second rotating arm to drive the first rotating arm and the second rotating arm to rotate synchronously close to or away from each other; a connecting rod group, the connecting rod group comprises a first connecting rod, a second connecting rod and a connecting plate, the connecting plate is rotatably connected to the rotating shaft, the first connecting rod is arranged in parallel with the first rotating arm, and the two ends of the first connecting rod are respectively hinged to the mounting base plate and the connecting plate, the second connecting rod is arranged in parallel with the second rotating arm, and the two ends of the second connecting rod are respectively hinged to the connecting plate and the lifting seat; wherein, with the rotation of the first rotating arm and the second rotating arm, the lifting seat moves in the vertical direction; A linear drive module is installed on the inner bottom surface of the sealing box and is drivingly connected to the transfer mechanism to drive the transfer mechanism to move along the length direction of the sealing box.

2. The transfer device for display panel processing according to claim 1, characterized in that: The transfer assembly also includes a negative pressure adsorption device. The top surfaces of the supporting fingers are each provided with a plurality of adsorption holes. The adsorption end of the negative pressure adsorption device is connected to the plurality of adsorption holes to form a negative pressure between the substrate and the supporting fingers.

3. The transfer device for display panel processing according to claim 2, characterized in that: The lifting drive assembly comprises: a first lifting driving member, the first lifting driving member being mounted on the second rotating arm and drivingly connected to the first rotating arm to drive the first rotating arm to rotate relative to the second rotating arm; The second lifting drive member is installed on the installation base plate and is drivingly connected to the second rotating arm to drive the second rotating arm to rotate relative to the installation base plate.

4. The transfer device for display panel processing according to claim 1, characterized in that: It also includes an atmosphere control mechanism, which is used to adjust the gas environment in the sealed box to the gas environment required by the process, and the atmosphere control mechanism includes: A suction member, the suction member is connected to the sealed box to extract gas inside the sealed box; an inflatable member, the inflatable member being in communication with the sealed box so as to fill the sealed box with an inert gas; A purifier is connected to the sealed box to extract and remove water oxygen in the sealed box.

5. The transfer device for display panel processing according to claim 4, characterized in that: Also included are a plurality of airbag assemblies, the airbag assemblies comprising: A capsule body connected to the inner wall of the sealed box; An inflation and deflation component is communicated with the sac to inflate the sac or extract gas from the sac.

6. The transfer device for display panel processing according to claim 5, characterized in that: The airbag assembly further includes a plurality of groups of elastic binding parts, the plurality of groups of elastic binding parts correspond to the plurality of airbag bodies one by one, and the elastic binding parts include: A plurality of elastic ropes, both ends of which are fixed to the inner wall of the sealing box, and the plurality of elastic ropes are wound around the bag body; wherein, After the bladder is deflated, the elastic rope binds the bladder to the inner wall of the sealed box.

7. The transfer device for display panel processing according to claim 1, characterized in that: It also includes a buffer component, which is connected to the sealing box through the communication structure, and the buffer component includes: A buffer box, the buffer box is connected with the sealing box through the connecting structure, and a sealing door body is provided at the connecting port between the buffer box and the sealing box; An auxiliary atmosphere control mechanism is communicated with the buffer box to adjust the gas environment in the buffer box.

8. An inkjet printing system, characterized in that: It comprises a transfer device for display panel processing as claimed in any one of claims 1 to 7.

Citation Information

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