Spectrometer

By using the design of the incoming light components to match the spectrometer and combining the use of lens modules and detectors, the problems of complex structure, limited wavelength resolution and slow measurement speed of the existing spectrometer are solved, and high efficiency is achieved. Fast spectral measurements.

CN117629405BActive Publication Date: 2025-02-07SHANGHAI JIGUANG OPTOELECTRONICS TECH CO LTD
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Patent Information

Application Number
CN202311598460.4
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-11-27
Publication Date
2025-02-07
Estimated Expiration
2043-11-27

AI Technical Summary

Technical Problem

Existing spectrometers have shortcomings in the complex structure, limited wavelength resolution and slow measurement speed.

Method used

A spectrometer is designed to match the specular reflection surface by matching the light-entry member, so that part of the detected light is reflected by the specular surface and interferes with the other part, and then received by the detector after focusing through the lens module to achieve high-wavelength resolution measurement.

Benefits of technology

High wavelength resolution under the same volume is achieved, and the use of moving parts is avoided. It has a simple structure, fast measurement speed and low manufacturing cost.

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Abstract

A spectrometer comprises: a light incident component, configured to receive and transmit detection light, and introduce the detection light beam into the spectrometer; a mirror reflection surface, arranged parallel to the optical axis of the light incident component and spaced a predetermined distance from the light incident component, configured to mirror reflect a first light beam in the detection light output by the light incident component, the first light beam interfering with a second light beam in the detection light, wherein the second light beam is not reflected by the mirror reflection surface; a lens module, arranged on the travel path of the first light beam and the second light beam, configured to converge the first light beam and the second light beam; and a detector, arranged on a side of the lens module away from the light incident component and the mirror reflection surface, configured to receive an interference light signal of the first light beam and the second light beam and generate an electrical signal.
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Description

Technical Field

[0001] The present disclosure relates to the technical field of spectrometers, and in particular to a spectrometer. Background Art

[0002] A spectrometer, also known as a spectrometer, is a device that uses photomultiplier tubes, CCD sensors and other light detectors to measure the intensity of different wavelength positions in the spectrum. It consists of an entrance slit, a dispersion system, an imaging system and an exit slit or sensor. The electromagnetic radiation of the radiation source is separated into the required wavelength or wavelength region by a dispersion element, and the intensity is measured at the selected wavelength (or scanning a certain band). Conventional grating spectrometers usually require large-area gratings, complex optical path designs, complex structures, and the wavelength resolution is limited by the structural size of the instrument. The Fourier transform spectrometer uses a different principle from the traditional grating spectrometer and can achieve high wavelength resolution measurements, but because it requires mechanical scanning of interference signals under different optical path differences, the measurement speed is slow. Summary of the invention

[0003] The present disclosure provides a spectrometer, comprising:

[0004] A light input component configured to receive and transmit the detection light and introduce the detection light beam into the spectrometer;

[0005] a mirror reflection surface, arranged parallel to the optical axis of the light incident component and spaced a predetermined distance from the light incident component, configured to reflect a first light beam in the detection light output by the light incident component, the first light beam interfering with a second light beam in the detection light, wherein the second light beam is not reflected by the mirror reflection surface;

[0006] a lens module, disposed on a path of the first light beam and the second light beam, and configured to converge the first light beam and the second light beam; and

[0007] The detector is arranged on a side of the lens module away from the light incident component and the mirror reflection surface, and is configured to receive the interference light signal of the first light beam and the second light beam and generate an electrical signal.

[0008] In some embodiments, the lens module comprises:

[0009] a first lens, wherein a first optical axis of the first lens is parallel to the mirror reflection surface, and an entrance pupil plane of the first lens is spaced a first distance from the light entrance component;

[0010] The second lens is arranged on a side of the first lens away from the light incident component, a second optical axis of the second lens is coaxial with the first optical axis, and an exit pupil plane of the second lens is spaced a second distance from the detector.

[0011] In some embodiments, the detector includes a photodetector, and the electrical signal generated by the photodetector and the spectral radiation brightness of the detection light satisfy the following formula:

[0012]

[0013] I(λ) represents the spectral radiation brightness of the light beam with a wavelength of λ in the detection light, I(x) represents the electrical signal on the pixel at the photodetector x, C represents the instrument constant, h represents the predetermined distance between the light incident component and the mirror reflection surface, and f2 represents the second distance.

[0014] In some embodiments, the first lens comprises a first plano-convex lens, the convex surface of the first plano-convex lens faces the light incident component; and

[0015] The second lens includes a second plano-convex lens, which is arranged on a side of the first plano-convex lens away from the light incident component and is arranged in parallel with the first plano-convex lens, and the convex surface of the second plano-convex lens faces away from the light incident component.

[0016] A first focal length of the first plano-convex lens is equal to the first distance, a second focal length of the second plano-convex lens is equal to the second distance, and the first focal length is equal to the second focal length.

[0017] In some embodiments, the spectrometer further comprises:

[0018] The linear polarizer is disposed between the first lens and the second lens, and is configured to allow polarized light having a polarization direction parallel to the paper surface and perpendicular to the mirror reflection surface to pass through, and absorb polarized light having a polarization direction perpendicular to the paper surface.

[0019] In some embodiments, the spectrometer further comprises:

[0020] The third lens is disposed at the output end of the light incident component and is configured to reduce the divergence angle of the detection light output by the light incident component.

[0021] In some embodiments, the output end of the light incident component is located at the bright point of the third lens, and is configured to reduce the aberration of the detection light output by the light incident component.

[0022] In some embodiments, the third lens includes a hemispherical portion and a cylindrical portion, the end surface of the cylindrical portion away from the hemispherical portion faces the output end of the light incident component, and the third lens satisfies the following relationship:

[0023]

[0024] Wherein, d represents the height of the cylindrical portion, r represents the radius of the hemispherical portion, and n represents the refractive index of the third lens.

[0025] In some embodiments, the first lens comprises a first plano-convex lens, the convex surface of the first plano-convex lens faces the light incident component; and

[0026] The second lens includes a second plano-convex lens, which is arranged on a side of the first plano-convex lens away from the light incident component and is arranged in parallel with the first plano-convex lens, and the convex surface of the second plano-convex lens faces away from the light incident component.

[0027] The first focal length of the first plano-convex lens is equal to the second distance, and the second focal length of the second plano-convex lens is equal to the second distance.

[0028] The second distance and the first distance satisfy the following relationship:

[0029]

[0030] Wherein, f1 represents the first distance, f2 represents the second distance, r represents the radius of the hemispherical part, and n represents the refractive index of the third lens.

[0031] In some embodiments, the light incident component includes an optical fiber or a slit.

[0032] Compared with the related art, the embodiments of the present disclosure have at least the following technical effects:

[0033] The spectrometer disclosed in the present invention adopts a light input component to match a mirror reflection surface so that a part of the detection light output by the light input component is reflected by the mirror reflection surface and interferes with another part of the detection light, and is received and detected by the detection after being focused by a lens group. Compared with a grating spectrometer, the spectrometer disclosed in the present invention has a high wavelength resolution under the same volume limit; compared with a Fourier transform spectrometer, the spectrometer disclosed in the present invention has no moving parts, a simple structure and a fast measurement speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The drawings herein are incorporated into the specification and constitute a part of the specification, showing embodiments consistent with the present disclosure, and together with the specification, are used to explain the principles of the present disclosure. Obviously, the drawings described below are only some embodiments of the present disclosure, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0035] Figure 1 A schematic diagram of the structure of a spectrometer provided in some embodiments of the present disclosure;

[0036] Figure 2 for Figure 1 A schematic diagram of the structure of the middle lens module;

[0037] Figure 3A schematic diagram of the structure of a spectrometer provided in some other embodiments of the present disclosure;

[0038] Figure 4 for Figure 3 Schematic diagram of the structure of the third lens shown in . DETAILED DESCRIPTION

[0039] In order to more clearly explain the purpose, technical solutions and advantages of the present disclosure, the embodiments of the present disclosure will be described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present disclosure. It should be understood that the following description of the embodiments is intended to explain and illustrate the overall concept of the present disclosure, and should not be understood as a limitation on the present disclosure. In the specification and the drawings, the same or similar figure numbers refer to the same or similar parts or components. For the sake of clarity, the drawings are not necessarily drawn to scale, and some well-known parts and structures may be omitted in the drawings.

[0040] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. The wording "one" or "an" does not exclude multiple. "Including" or "comprising" and similar words mean that the elements or objects appearing in front of the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right", "top" or "bottom" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly. When an element is said to be located "on" or "under" another element, the element can be "directly" located "on" or "under" another element, or there can be an intermediate element.

[0041] In this field, conventional grating spectrometers usually require large-area gratings and complex optical path designs, such as complex collimation systems and focusing systems. They are complex in structure and difficult to manufacture, and usually have moving components that are easily damaged and have poor reliability.

[0042] In order to overcome the above-mentioned problems, the present disclosure provides a spectrometer, comprising: a light incident component, configured to receive and transmit detection light, and introduce the detection light beam into the spectrometer; a mirror reflection surface, arranged in parallel with the light incident component and spaced a predetermined distance from the light incident component, configured to mirror-reflect a first light beam in the detection light output by the light incident component, the first light beam interfering with a second light beam in the detection light, wherein the second light beam is not reflected by the mirror reflection surface; a lens module, arranged on the travel paths of the first light beam and the second light beam, configured to converge the first light beam and the second light beam; and a detector, arranged on a side of the lens module away from the light incident component and the mirror reflection surface, configured to receive interference light signals of the first light beam and the second light beam and generate an electrical signal.

[0043] The spectrometer in the present disclosure adopts a light input component to match the mirror reflection surface so that a part of the detection light output by the light input component is reflected by the mirror reflection surface and interferes with another part of the detection light, and is received and detected by the detection after being focused by the lens group. The spectrometer in the present disclosure has no moving parts, a simple structure and a low manufacturing cost.

[0044] The spectrometer in the present disclosure is described in detail below.

[0045] Figure 1 A schematic diagram of the structure of a spectrometer provided in some embodiments of the present disclosure, Figure 1 is a cross-sectional schematic diagram. Figure 1 As shown, some embodiments of the present disclosure provide a spectrometer 100 , which includes a light incident component 10 , a mirror reflection surface 20 , a lens module 30 and a detector 40 .

[0046] The light input component 10 is configured to receive and transmit the detection light, and introduce the detection light beam into the spectrometer. The detection light is introduced into the spectrometer from the outside of the spectrometer. The detection light is, for example, emitted by an external light source, or reflected by an external object. The detection light output by the light input component 10 is, for example, a slit light beam. In other embodiments, the detection light output by the light input component 10 can also be the circular end face of a single-mode optical fiber, which is constrained into a slit light beam by a slit. In other embodiments, the detection light output by the light input component 10 can also be a point light beam.

[0047] The mirror reflection surface 20 is arranged parallel to the light incident component 10 and is spaced a predetermined distance d from the light incident component 10. The mirror reflection surface 20 is configured to reflect the first light beam L1 in the detection light output by the light incident component, and the first light beam L1 interferes with the second light beam L2 in the detection light, wherein the second light beam is not reflected by the mirror reflection surface 20. The mirror reflection surface 20 is, for example, a surface on which a metal reflection layer with high reflectivity is evaporated, and the surface roughness is extremely small, and the light incident on the mirror reflection surface 20 is substantially mirror reflected without loss.

[0048] Since the first light beam L1 and the second light beam L2 are both derived from the detection light outputted by the light input component 10 at the same time, the first light beam L1 and the second light beam L2 have the same vibration frequency and the same vibration direction. After the first light beam L1 is reflected by the mirror reflection surface 20, its transmission path is substantially parallel to the transmission path of the second light beam L2, the phase difference between the two is constant, and the two meet the interference condition.

[0049] The first light beam L1 can be regarded as a light beam output by the light incident component 10 relative to the image of the mirror reflection surface 20. At this time, it can be considered that the light incident component 10 and the image of the mirror reflection surface 20 form double-slit interference.

[0050] In some embodiments of the present disclosure, the first light beam L1 and the second light beam L2 refer to light of any wavelength in the detection light. The detection light may include light of multiple wavelengths. For any wavelength of light, interference can be formed by utilizing the cooperation between the light incident component 10 and the mirror reflection surface 20.

[0051] The lens module 30 is disposed on the travel path of the first light beam L1 and the second light beam L2, and is configured to converge the first light beam L1 and the second light beam L2. The lens module 30, for example, includes a lens or a lens group with a converging function, so that the interference fringes formed by the interference of the first light beam L1 and the second light beam L2 are formed on the focal plane of the lens module 30, and the interference fringes formed by the interference of the first light beam L1 and the second light beam L2 are prevented from being formed far away, resulting in an oversized size of the spectrometer.

[0052] The detector 40 is disposed on a side of the lens module 30 away from the light incident component 10 and the mirror reflection surface 20, and is configured to receive the interference light signal of the first light beam L1 and the second light beam L2 and generate an electrical signal. The detector 40 is, for example, a photodetector, whose photosensitive surface receives the interference light signal of the first light beam L1 and the second light beam L2, i.e., interference fringes, and the detector 40 converts the received interference light signal into an electrical signal. Based on the electrical signal generated by the detector 40, the distribution of the light intensity of each wavelength in the detection light can be determined.

[0053] The spectrometer in the embodiment of the present disclosure adopts a light incident component to match the mirror reflection surface so that a part of the detection light output by the light incident component is reflected by the mirror reflection surface and interferes with another part of the detection light, and is received and detected by the detection after being focused by the lens group. The spectrometer in the embodiment of the present disclosure has no moving parts, a simple structure and a low manufacturing cost.

[0054] In some embodiments, Figure 2 for Figure 1 The schematic diagram of the structure of the lens module. Figure 1 and Figure 2As shown, the lens module 30 includes a first lens 31 and a second lens 32. The first optical axis of the first lens 31 is parallel to the mirror reflection surface 20, and the entrance pupil plane of the first lens is spaced apart from the light input component 10 by a first distance f1. Specifically, the first lens 31 faces the light output direction of the light input component 10, and the entrance pupil plane of the first lens is spaced apart from the output end of the light input component 10 by a first distance f1 in a direction parallel to the mirror reflection surface 20.

[0055] The second lens 32 is arranged on the side of the first lens 31 away from the light incident component 10, the second optical axis of the second lens 32 is coaxial with the first optical axis of the first lens 31, and the exit pupil plane of the second lens 32 is spaced a second distance f2 from the detector 40. Specifically, the first lens 31 and the second lens 32 are arranged side by side, and the optical axes of the two are coaxial, and the exit pupil plane of the second lens 32 is spaced a second distance f2 from the photosensitive surface of the detector 40 in a direction parallel to the mirror reflection surface 20.

[0056] The lens module 30 composed of the first lens 31 and the second lens 32 forms interference fringes formed by the interference of the first light beam L1 and the second light beam L2 on the focal plane of the lens module 30, while avoiding the interference fringes formed by the interference of the first light beam L1 and the second light beam L2 from being formed far away, which would cause the size of the spectrometer to be too large.

[0057] In some embodiments, the detector 40 includes a photodetector, and the electrical signal generated by the photodetector and the spectral radiation brightness of the detection light satisfy the following formula:

[0058] I(λ) represents the spectral radiation brightness of the light beam with a wavelength of λ in the detection light, I(x) represents the electrical signal on the pixel at the photodetector x, C represents the instrument constant, h represents the predetermined distance between the light incident component and the mirror reflection surface, and f2 represents the second distance. The instrument constant C is related to the index of the specific optical device, such as the transmittance of the lens, the response of the detector, etc., and can be determined by the calibration process.

[0059] According to the electrical signal generated by the detector 40, the intensity of the optical signal of the detection light at different positions of the sensor can be determined, and then through the relationship between the electrical signal and the optical signal described in the above formula, the spectral radiation brightness of any wavelength light beam can be obtained, that is, the distribution of each wavelength light beam in the detection light can be determined.

[0060] In some embodiments, Figure 1 and Figure 2As shown, the first lens 31 includes a first plano-convex lens, hereinafter also referred to as the first plano-convex lens 31, and the convex surface of the first plano-convex lens 31 faces the light incident component 10. The second lens 32 includes a second plano-convex lens, hereinafter also referred to as the second plano-convex lens 32, the second plano-convex lens 32 is arranged on the side of the first plano-convex lens 31 away from the light incident component 10, and is arranged in parallel with the first plano-convex lens 31, the convex surface of the second plano-convex lens 32 is facing away from the light incident component 10, that is, the convex surface of the second plano-convex lens 32 faces the photosensitive surface of the detector 40.

[0061] The first focal length of the first plano-convex lens 31 is equal to the first distance f1, the second focal length of the second plano-convex lens is equal to the second distance f2, and the first focal length is equal to the second focal length. In this case, the first distance f1 is equal to the second distance f2. For example, the first plano-convex lens 31 and the second plano-convex lens 32 are completely the same plano-convex lenses, and the two planes are arranged opposite to each other, such as Figure 2 shown.

[0062] In this design, the output end of the light input component 10 is arranged on the focal plane of the first plano-convex lens 31, and the photosensitive surface of the detector 40 is arranged on the focal plane of the first plano-convex lens 31. With this design, based on the mutual symmetry of the two plano-convex lenses, the aberration of the imaging system composed of the two lenses can be reduced, especially the coma.

[0063] Specifically, in some embodiments, the first distance f1 is, for example, 200 mm, the second distance f2 is, for example, 200 mm, and h is, for example, 0.5 mm. At this time, the electrical signal generated by the photodetector and the spectral radiation brightness of the detection light satisfy the following relationship:

[0064]

[0065] The integral is the integral of all pixels of the detector, and the instrument constant C is determined by calibration.

[0066] In some embodiments, Figure 1 As shown, the spectrometer 100 further includes a linear polarizer 50, which is disposed between the first lens 31 and the second lens 32 and is configured to allow polarized light having a polarization direction parallel to the paper surface and perpendicular to the mirror reflection surface to pass through, and absorb polarized light having a polarization direction perpendicular to the paper surface. Figure 1 The polarized light parallel to the Y direction in the XY coordinate plane passes through, and the polarized light perpendicular to the Y direction is blocked and absorbed. Figure 1Polarized light in the XY coordinate plane. After being reflected by the mirror reflection surface, the polarized light in two polarization directions will produce a relative phase difference, which will cause the interference fringes formed by the two polarized lights to not overlap. In order to avoid this phenomenon, the linear polarizer 50 only allows light in one polarization direction to pass through to ensure accurate detection.

[0067] Figure 3 A schematic diagram of the structure of a spectrometer provided in some other embodiments of the present disclosure, Figure 3 is a cross-sectional schematic diagram. Figure 3 As shown, some embodiments of the present disclosure provide a spectrometer 100 , which includes a light incident component 10 , a mirror reflection surface 20 , a lens module 30 , a detector 40 and a third lens 60 .

[0068] The light input component 10 is configured to receive and transmit the detection light, and introduce the detection light beam into the spectrometer. The detection light is introduced into the spectrometer from the outside of the spectrometer. The detection light is, for example, emitted by an external light source, or reflected by an external object. The detection light output by the light input component 10 is, for example, a slit light beam. In other embodiments, the detection light output by the light input component 10 can also be the circular end face of a single-mode optical fiber, which is constrained into a slit light beam by a slit. In other embodiments, the detection light output by the light input component 10 can also be a point light beam.

[0069] The mirror reflection surface 20 is arranged parallel to the light incident component 10 and is spaced a predetermined distance d from the light incident component 10. The mirror reflection surface 20 is configured to reflect the first light beam L1 in the detection light output by the light incident component, and the first light beam L1 interferes with the second light beam L2 in the detection light, wherein the second light beam is not reflected by the mirror reflection surface 20. The mirror reflection surface 20 is, for example, a surface on which a metal reflection layer with high reflectivity is evaporated, and the surface roughness is extremely small, and the light incident on the mirror reflection surface 20 is substantially mirror reflected without loss.

[0070] Since the first light beam L1 and the second light beam L2 are both derived from the detection light outputted by the light input component 10 at the same time, the first light beam L1 and the second light beam L2 have the same vibration frequency and the same vibration direction. After the first light beam L1 is reflected by the mirror reflection surface 20, its transmission path is substantially parallel to the transmission path of the second light beam L2, the phase difference between the two is constant, and the two meet the interference condition.

[0071] The first light beam L1 can be regarded as a light beam outputted by the light incident component 10 relative to the image of the mirror reflecting surface 20 . At this time, it can be considered that the light incident component 10 and the image of the mirror reflecting surface 20 form double-slit interference.

[0072] In some embodiments of the present disclosure, the first light beam L1 and the second light beam L2 refer to light of any wavelength in the detection light. The detection light may include light of multiple wavelengths. For any wavelength of light, interference can be formed by utilizing the cooperation between the light incident component 10 and the mirror reflection surface 20.

[0073] like Figure 3 As shown, the spectrometer 100 further includes a third lens 60, which is disposed at the output end of the light input component 10 and is configured to reduce the divergence angle of the detection light output by the light input component 10 without losing light intensity. The third lens 60 is, for example, a converging lens, which can reduce the divergence angle of the output end of the light input component 10 to 1 / 2 to 1 / 3 of the original.

[0074] The lens module 30 is disposed on the travel path of the first light beam L1 and the second light beam L2, and is configured to converge the first light beam L1 and the second light beam L2. The lens module 30, for example, includes a lens or a lens group with a converging function, so that the interference fringes formed by the interference of the first light beam L1 and the second light beam L2 are formed on the focal plane of the lens module 30, and the interference fringes formed by the interference of the first light beam L1 and the second light beam L2 are prevented from being formed far away, resulting in an oversized size of the spectrometer.

[0075] The detector 40 is disposed on a side of the lens module 30 away from the light incident component 10 and the mirror reflection surface 20, and is configured to receive the interference light signal of the first light beam L1 and the second light beam L2 and generate an electrical signal. The detector 40 is, for example, a photodetector, whose photosensitive surface receives the interference light signal of the first light beam L1 and the second light beam L2, i.e., interference fringes, and the detector 40 converts the received interference light signal into an electrical signal. Based on the electrical signal generated by the detector 40, the distribution of the light intensity of each wavelength in the detection light can be determined.

[0076] The spectrometer in the embodiment of the present disclosure adopts a light incident component to match the mirror reflection surface so that a part of the detection light output by the light incident component is reflected by the mirror reflection surface and interferes with another part of the detection light, and is received and detected by the detection after being focused by the lens group. The spectrometer in the embodiment of the present disclosure has no moving parts, a simple structure and a low manufacturing cost.

[0077] In some embodiments, Figure 3 As shown, the output end 11 of the light incident component 10 is located at the bright point of the third lens 60 and is configured to reduce the aberration of the detection light output by the light incident component 10 .

[0078] Figure 4 for Figure 3 The schematic diagram of the structure of the third lens shown in Figure 4As shown, the third lens 60 includes a hemispherical portion 61 and a cylindrical portion 62, and the end surface of the cylindrical portion 62 away from the hemispherical portion 61 faces the output end 11 of the light input component 10. The radius of the hemispherical portion 61 is the same as the radius of the cylindrical portion 62, and the two are an integral structure. The arc surface of the hemispherical portion 61 faces the lens module 30.

[0079] The third lens 60 satisfies the following relationship:

[0080]

[0081] Wherein, d represents the height of the cylindrical portion, r represents the radius of the hemispherical portion, and n represents the refractive index of the third lens.

[0082] With this design, the output end 11 of the light input component 10 is located at the bright point of the third lens 60, which can reduce the spherical aberration and coma generated by the third lens.

[0083] In some embodiments, Figure 3 The lens module also uses Figure 2 The structure of the lens module. Figures 2 to 4 As shown, the lens module 30 includes a first lens 31 and a second lens 32. The first optical axis of the first lens 31 is parallel to the mirror reflection surface 20, and the entrance pupil plane of the first lens is spaced apart from the light input component 10 by a first distance f1. Specifically, the first lens 31 faces the light output direction of the light input component 10, and the entrance pupil plane of the first lens is spaced apart from the output end of the light input component 10 by a first distance f1 in a direction parallel to the mirror reflection surface 20.

[0084] The second lens 32 is arranged on the side of the first lens 31 away from the light incident component 10, the second optical axis of the second lens 32 is coaxial with the first optical axis of the first lens 31, and the exit pupil plane of the second lens 32 is spaced a second distance f2 from the detector 40. Specifically, the first lens 31 and the second lens 32 are arranged side by side, and the optical axes of the two are coaxial, and the exit pupil plane of the second lens 32 is spaced a second distance f2 from the photosensitive surface of the detector 40 in a direction parallel to the mirror reflection surface 20.

[0085] The lens module 30 composed of the first lens 31 and the second lens 32 forms interference fringes formed by the interference of the first light beam L1 and the second light beam L2 on the focal plane of the lens module 30, while avoiding the interference fringes formed by the interference of the first light beam L1 and the second light beam L2 from being formed far away, which would cause the size of the spectrometer to be too large.

[0086] In some embodiments, Figures 2 to 4As shown, the first lens 31 includes a first plano-convex lens, hereinafter also referred to as the first plano-convex lens 31, and the convex surface of the first plano-convex lens 31 faces the light incident component 10. The second lens 32 includes a second plano-convex lens, hereinafter also referred to as the second plano-convex lens 32, the second plano-convex lens 32 is arranged on the side of the first plano-convex lens 31 away from the light incident component 10, and is arranged in parallel with the first plano-convex lens 31, the convex surface of the second plano-convex lens 32 is facing away from the light incident component 10, that is, the convex surface of the second plano-convex lens 32 faces the photosensitive surface of the detector 40.

[0087] The first focal length of the first plano-convex lens is equal to the second distance f2, the second focal length of the second plano-convex lens is equal to the second distance f2, and the second distance and the first distance satisfy the following relationship:

[0088]

[0089] Among them, f1 represents the first distance between the entrance pupil plane of the first lens and the light entrance component, f2 represents the second distance between the exit pupil plane of the second lens and the photosensitive surface of the detector in a direction parallel to the mirror reflection surface, r represents the radius of the hemispherical part, and n represents the refractive index of the third lens.

[0090] For example, the first plano-convex lens 31 and the second plano-convex lens 32 are completely the same plano-convex lenses, and the two planes are arranged opposite to each other. Figure 2 As shown. With such a design, the virtual image generated by the output end of the light input component 10 after passing through the third lens is set on the focal plane of the first plano-convex lens 31, and the photosensitive surface of the detector 40 is set on the focal plane of the first plano-convex lens 31. With this design, based on the mutual symmetry of the two plano-convex lenses, the aberration of the imaging system composed of the two lenses, especially the coma, can be reduced.

[0091] In some embodiments, the detector 40 includes a photodetector, and the electrical signal generated by the photodetector and the spectral radiation brightness of the detection light satisfy the following formula:

[0092]

[0093] I(λ) represents the spectral radiation brightness of the light beam with a wavelength of λ in the detection light, I(x) represents the electrical signal on the pixel at the photodetector x, C represents the instrument constant, h represents the predetermined distance between the light incident component and the mirror reflection surface, and f2 represents the second distance. The instrument constant C is related to the index of the specific optical device, such as the transmittance of the lens, the response of the detector, etc., and can be determined by the calibration process.

[0094] As mentioned above, Figure 3 The structure of the embodiment shown is Figure 1The structures of the embodiments shown are similar, except that, compared with Figure 1 In the embodiment shown, a third lens is added, which further reduces the first distance f1 between the entrance pupil plane of the first lens and the light entrance component while ensuring the detection effect, so that the size of the spectrometer can be further reduced.

[0095] In some embodiments, a standard light source with known spectral distribution, such as a blackbody light source with a certain temperature, can be used to illuminate the light-incoming component 10. In this case, I(λ) is known, and the instrument constant C can be determined by measuring the light intensity distribution on the detector using the following formula.

[0096]

[0097] In some embodiments, the light incident component 10 includes an optical fiber or a slit, and the slit is, for example, a single slit. The detection light output by the light incident component 10 is, for example, a light beam passing through the slit, and the slit is, for example, perpendicular to the XY plane.

[0098] In summary, the spectrometer provided in the present invention adopts a light incident component to match the mirror reflection surface so that a part of the detection light output by the light incident component is reflected by the mirror reflection surface and interferes with another part of the detection light, and is received and detected by the detection after being focused by the lens group. The spectrometer in the present invention does not need to set moving parts, spectroscopic devices, diffraction gratings and other components, and has a simple structure and low manufacturing cost.

[0099] Finally, it should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other. For the system or device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part description.

[0100] The above embodiments are only used to illustrate the technical solutions of the present disclosure, rather than to limit them. Although the present disclosure has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present disclosure.

Claims

1. A spectrometer, characterized in that: include: A light input component configured to receive and transmit the detection light and introduce the detection light into the spectrometer; a mirror reflection surface, arranged parallel to the optical axis of the light incident component and spaced a predetermined distance from the light incident component, configured to reflect a first light beam in the detection light output by the light incident component, the first light beam interfering with a second light beam in the detection light, wherein the second light beam is not reflected by the mirror reflection surface; A lens module, disposed on a path of the first light beam and the second light beam, and configured to converge the first light beam and the second light beam; as well as The detector is arranged on a side of the lens module away from the light incident component and the mirror reflection surface, and is configured to receive the interference light signal of the first light beam and the second light beam and generate an electrical signal. The light incident component includes an optical fiber or a slit, and the detection light output by the light incident component has a divergence angle.

2. The spectrometer according to claim 1, wherein: The lens module comprises: a first lens, wherein a first optical axis of the first lens is parallel to the mirror reflection surface, and an entrance pupil plane of the first lens is spaced a first distance from the light entrance component; The second lens is arranged on a side of the first lens away from the light incident component, a second optical axis of the second lens is coaxial with the first optical axis, and an exit pupil plane of the second lens is spaced a second distance from the detector.

3. The spectrometer according to claim 2, wherein: The detector includes a photodetector, and the electrical signal generated by the photodetector and the spectral radiation brightness of the detection light satisfy the following formula: I(λ) represents the spectral radiation brightness of the light beam with a wavelength of λ in the detection light, I(x) represents the electrical signal on the pixel at the photodetector x, C represents the instrument constant, h represents the predetermined distance between the light incident component and the mirror reflection surface, and f2 represents the second distance.

4. The spectrometer according to claim 2 or 3, wherein: The first lens comprises a first plano-convex lens, the convex surface of the first plano-convex lens faces the light incident component; and The second lens includes a second plano-convex lens, which is arranged on a side of the first plano-convex lens away from the light incident component and is arranged in parallel with the first plano-convex lens, and the convex surface of the second plano-convex lens faces away from the light incident component. A first focal length of the first plano-convex lens is equal to the first distance, a second focal length of the second plano-convex lens is equal to the second distance, and the first focal length is equal to the second focal length.

5. The spectrometer according to claim 2 or 3, wherein: The spectrometer also includes: The linear polarizer is disposed between the first lens and the second lens, and is configured to allow polarized light having a polarization direction parallel to the paper surface and perpendicular to the mirror reflection surface to pass through, and absorb polarized light having a polarization direction perpendicular to the paper surface.

6. The spectrometer according to claim 2 or 3, wherein: The spectrometer also includes: The third lens is disposed at the output end of the light incident component and is configured to reduce the divergence angle of the detection light output by the light incident component.

7. The spectrometer according to claim 6, wherein: The output end of the light incident component is located at the bright point of the third lens, and is configured to reduce the aberration of the detection light output by the light incident component.

8. The spectrometer according to claim 6, wherein: The third lens includes a hemispherical portion and a cylindrical portion, the end surface of the cylindrical portion away from the hemispherical portion faces the output end of the light incident component, and the third lens satisfies the following relationship: Wherein, d represents the height of the cylindrical portion, r represents the radius of the hemispherical portion, and n represents the refractive index of the third lens.

9. The spectrometer according to claim 7, wherein: The first lens comprises a first plano-convex lens, the convex surface of the first plano-convex lens faces the light incident component; and The second lens includes a second plano-convex lens, which is arranged on a side of the first plano-convex lens away from the light incident component and is arranged in parallel with the first plano-convex lens, and the convex surface of the second plano-convex lens faces away from the light incident component. The first focal length of the first plano-convex lens is equal to the second distance, and the second focal length of the second plano-convex lens is equal to the second distance. The second distance and the first distance satisfy the following relationship: Wherein, f1 represents the first distance, f2 represents the second distance, r represents the radius of the hemispherical part, and n represents the refractive index of the third lens.

Citation Information

Patent Citations

  • Interferometer and spatial interference fourier transform spectrometer

    US8830475B1