A Fizeau imaging module and a demodulation system including the module

Abstract

The present disclosure relates to a Fizeau imaging module and a demodulation system including the module. The Fizeau imaging module includes a housing, a light guide component and a conversion component. The housing is configured to couple the light guide component and the conversion component. The light guide component includes a conduction device and an optical device. A measuring light beam is incident on the conversion component after propagating through the conduction device and the optical device inside the housing. The conduction device is configured to receive the measuring light beam from the outside and incident the measuring light beam on the optical device. The optical device is configured to incident the measuring light beam on the conversion component and diverge the measuring light beam along the direction in which the optical device points to the conversion component. The housing has a gradually expanding structure that expands along the direction in which the optical device points to the conversion component. The gradually expanding structure matches the diverging measuring light beam. The conversion component is configured to receive the measuring light beam and convert the optical signal corresponding to the measuring light beam into an electrical signal. According to the present disclosure, the volume of the Fizeau imaging module can be reduced.

Description

Technical Field

[0001] The present disclosure relates to the field of core electronic industries, and in particular to a Fizeau imaging module and a demodulation system including the module. Background Art

[0002] Fiber Fabry-Perot sensors have the advantages of being resistant to electromagnetic interference, high temperature resistance, small size, high sensitivity and fast response speed. They are widely used in fields such as coal mine exploration, oil well monitoring and aerospace, and can measure parameters such as temperature, pressure or vibration. Specifically, the fiber Fabry-Perot sensor can be placed in the environment to be measured. When the measured quantity of the environment to be measured changes, the cavity length of the Fabry-Perot cavity in the fiber optic Fabry-Perot sensor will change, and the parameters corresponding to the measurement beam reflected by the fiber optic Fabry-Perot sensor will also change. By receiving the measurement beam and analyzing and processing the parameters corresponding to the measurement beam, the changes in the measured quantity can be known. In order to facilitate the analysis and processing of the parameters corresponding to the measurement beam, it is usually necessary to first convert the optical signal corresponding to the measurement beam into an electrical signal.

[0003] The prior art converts optical signals into electrical signals through a photoelectric module in the demodulation system of the optical fiber Fabry-Perot sensor. In the photoelectric module, a traditional optical lens first shapes the measuring beam into linear light, and then guides the measuring beam to a CCD (Charge Coupled Device). The CCD receives the measuring beam and converts the optical signal corresponding to the measuring beam into an electrical signal.

[0004] However, the photoelectric modules of the prior art are relatively large in size and will occupy a large space in actual use. In particular, if multiple points are to be monitored simultaneously in the environment to be tested, multiple photoelectric modules are required, which will occupy a larger space. Summary of the invention

[0005] The present disclosure is made in view of the above situation, and its purpose is to provide a Fizeau imaging module capable of reducing the volume and a demodulation system including the module.

[0006] To this end, a first aspect of the present disclosure provides a Fizeau imaging module, comprising a shell, a light guide component and a conversion component, wherein the shell is configured to couple the light guide component and the conversion component, the light guide component comprises a conduction device and an optical device, a measuring light beam is incident on the conversion component after propagating through the conduction device and the optical device inside the shell, the conduction device is configured to receive the measuring light beam from the outside and incident on the optical device, the optical device is configured to incident on the conversion component and cause the measuring light beam to diverge in a direction in which the optical device points to the conversion component, the shell has a gradually expanding structure that expands in a direction in which the optical device points to the conversion component, the gradually expanding structure matches the divergent measuring light beam, and the conversion component is configured to receive the measuring light beam and convert an optical signal corresponding to the measuring light beam into an electrical signal.

[0007] In the present disclosure, the measuring light beam is incident on the conversion component after being propagated through the conducting device and the optical device. In this process, the measuring light beam diverges in the direction of the conversion component pointed by the optical device under the action of the optical device. The divergent measuring light beam can make the optical image of the measuring light beam on the conversion component clearer, thereby facilitating the conversion component to accurately convert the optical signal corresponding to the measuring light beam into an electrical signal. In addition, the housing has a gradually expanding structure that matches the divergent measuring light beam, thereby reducing the volume of the Fizeau imaging module. When multiple Fizeau imaging modules are used, the space occupied by the multiple Fizeau imaging modules can be saved to a certain extent by reasonably setting the layout of the multiple Fizeau imaging modules.

[0008] In addition, in the Fizeau imaging module involved in the first aspect of the present disclosure, optionally, the optical device is configured to make the measuring light beam in the same first plane diverge along the direction in which the optical device points to the conversion component, and to make the measuring light beam in the same second plane focus on the first plane along the direction in which the optical device points to the conversion component, the first plane is orthogonal to the second plane, and the conversion component includes a plurality of photosensitive units, the connecting line of the plurality of photosensitive units is in the first plane, and the plurality of photosensitive units receive the measuring light beam focused on the first plane. In this case, it is convenient for a plurality of photosensitive units to receive the focused measuring light beam on the same first plane, and then the area of ​​the photosensitive surface of the plurality of photosensitive units as a whole can be reduced, which can be helpful to further reduce the volume of the Fizeau imaging module. In addition, the focusing of the measuring light beam in the same second plane can enhance the optical image of the measuring light beam received by the photosensitive surface of a single photosensitive unit, thereby further improving the accuracy of converting the optical signal corresponding to the measuring light beam into an electrical signal.

[0009] In addition, in the Fizeau imaging module involved in the first aspect of the present disclosure, optionally, the optical device has a metasurface; and / or, the optical device includes a diffractive optical element. In this case, compared with a conventional optical lens, the optical device with a metasurface can be smaller in volume and lighter in weight; in addition, the diffractive optical element can retain the portion that causes the measurement beam to refract in the lens and remove the portion that causes the measurement beam to propagate in a straight line in the lens, that is, compared with a conventional optical lens, when the same focusing or divergence effect needs to be achieved, the diffractive optical element can be smaller in volume and lighter in weight, thereby improving the lightweight degree of the Fizeau imaging module and further reducing the volume of the Fizeau imaging module.

[0010] In addition, in the Fizeau imaging module involved in the first aspect of the present disclosure, optionally, the shell includes a first side wall, a second side wall, a third side wall and a fourth side wall connected in sequence, the first side wall and the third side wall are arranged opposite to each other, the second side wall and the fourth side wall are arranged opposite to each other, and in the direction from the second side wall to the fourth side wall, the distance between the first side wall and the third side wall increases to form the gradually expanding structure. In this case, by defining the positional relationship between the multiple side walls to form the gradually expanding structure, the layout of the multiple Fizeau imaging modules can be better arranged when multiple Fizeau imaging modules are used.

[0011] In addition, in the Fizeau imaging module involved in the first aspect of the present disclosure, optionally, the optical device includes a first optical element, the first optical element is configured to transmit a divergent measuring light beam, the conductive device and the first optical element are arranged on the second side wall, the conversion component is arranged on the fourth side wall, and the measuring light beam is incident on the first optical element through the conductive device and is transmitted to the conversion component through the first optical element. In this case, the measuring light beam is directly transmitted to the conversion component through the first optical element, which can reduce the number of components of the optical device used, thereby improving the lightweight degree of the Fizeau imaging module.

[0012] In addition, in the Fizeau imaging module involved in the first aspect of the present disclosure, optionally, the optical device includes a first optical element and a second optical element, the first optical element is configured to transmit a divergent measuring light beam, the second optical element is configured to reflect the measuring light beam, the transmission device, the first optical element and the conversion component are arranged on the fourth side wall, the second optical element is arranged on the second side wall, the measuring light beam is incident on the first optical element through the transmission device and is transmitted to the second optical element through the first optical element, and then reflected to the conversion component through the second optical element. In this case, the measuring light beam is transmitted to the second optical element through the first optical element, and then reflected to the conversion component through the second optical element, which enables the measuring light beam to propagate in multiple dimensions, enables the Fizeau imaging module not to be too long in a single dimension, and thus enables the structure of the Fizeau imaging module to be more uniformly distributed in space.

[0013] In addition, in the Fizeau imaging module involved in the first aspect of the present disclosure, optionally, the first optical element is configured to make the measuring light beam in the same first plane diverge along the direction from which the first optical element points to the conversion component, and the central axes of the conductive device, the first optical element and the conversion component are in the first plane and coincide with each other. In this case, the first optical element makes the measuring light beam diverge in the first plane, and when the measuring light beam reaches the specified divergence requirement through the first optical element, the propagation path of the measuring light beam can be minimized, which can help to further reduce the volume of the Fizeau imaging module.

[0014] In addition, in the Fizeau imaging module involved in the first aspect of the present disclosure, optionally, the first optical element is configured to make the measuring light beam in the same first plane diverge along the direction from the first optical element to the second optical element, and the line connecting the center of the conductive device and the center of the first optical element, the line connecting the center of the first optical element and the center of the second optical element, and the line connecting the center of the second optical element and the center of the conversion component are in the first plane and do not overlap. In this case, when the second optical element receives the divergent measuring light beam from the first optical element and reflects the divergent measuring light beam to the conversion component, the divergence of the measuring light beam can be further increased, thereby when the measuring light beam reaches the specified divergence requirement through the first optical element and the second optical element, the space occupied by the Fizeau imaging module in the direction from the second optical element to the conversion component can be reduced.

[0015] In addition, in the Fizeau imaging module involved in the first aspect of the present disclosure, optionally, the light guide assembly includes an adjustment device, and the adjustment device is configured to adjust the angle at which the measuring light beam is incident on the optical device. Thereby, it is possible to facilitate the conversion assembly to receive the measuring light beam and improve the accuracy of the conversion assembly in converting the optical signal corresponding to the measuring light beam into the electrical signal.

[0016] The second aspect of the present disclosure provides a demodulation system, which includes the Fizeau imaging module described in the first aspect of the present disclosure. In this case, the demodulation system includes the Fizeau imaging module involved in the present disclosure, thereby reducing the volume of the demodulation system.

[0017] According to the present disclosure, a Fizeau imaging module with a reduced volume and a demodulation system including the module can be provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present disclosure will now be explained in further detail by way of example only with reference to the accompanying drawings, in which:

[0019] Figure 1 is a structural block diagram showing the Fizeau imaging module involved in the example of the present disclosure.

[0020] Figure 2A is a schematic diagram showing an explosion of a Fizeau imaging module involved in the first embodiment of the present disclosure; Figure 2B It is a schematic diagram showing the layout of multiple Fizeau imaging modules when the shell involved in the example of the present disclosure has a gradually expanding structure.

[0021] Figure 3A is a schematic diagram showing the divergence of measurement beams in the same first plane involved in the example of the present disclosure; Figure 3B is a schematic diagram showing the focusing of the measurement beams in the same second plane involved in the example of the present disclosure.

[0022] Figure 4 Schematic diagram showing the structure of the diffractive optical element involved in the example of the present disclosure.

[0023] Figure 5 It is a schematic diagram showing the comparison between a diffractive optical element for achieving a focusing effect and a traditional optical lens.

[0024] Fig. 6A is a schematic top view showing a metasurface involved in an example of the present disclosure; Figure 6B Schematic diagram showing the three-dimensional structure of the metasurface involved in the example of the present disclosure.

[0025] Figure 7 Schematic diagram showing the structure of the conversion component involved in the example of the present disclosure.

[0026] Fig. 8A is an exploded schematic diagram showing a Fizeau imaging module involved in a second embodiment of the present disclosure; Figure 8B is a schematic diagram showing the Fizeau imaging module involved in the second embodiment of the present disclosure at another viewing angle.

[0027] Fig. 9 is a block diagram showing a module of a demodulation system involved in the example of the present disclosure.

[0028] Description of reference numerals:

[0029] 1…demodulation system, 10…Fizeau imaging module, 110…housing, 1110…first side wall, 1120…second side wall, 1130…third side wall, 1140…fourth side wall, 1150…first mounting area, 1160…second mounting area, 120…light guide assembly, 1210…conduction device, 1211…first conduction element, 1212…second conduction element, 1220…optical device, 1221…first optical element, 1222…second optical element, 130…conversion assembly, 1310…enhancing device, 1311…first semi-transparent and semi-reflective mirror, 1312…second semi-transparent and semi-reflective mirror, 1313…pad, 1320…photosensitive unit, 20…transmitting module, 30…optical fiber Fabry-Perot sensor, 40…processing module, P1…first plane, P2…second plane. DETAILED DESCRIPTION

[0030] Hereinafter, the preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, the same symbols are assigned to the same components, and repeated descriptions are omitted. In addition, the accompanying drawings are only schematic diagrams, and the ratio of the dimensions of the components or the shapes of the components may be different from the actual ones.

[0031] In addition, the subheadings and the like involved in the following description of the present disclosure are not intended to limit the content or scope of the present disclosure, but are merely used as a reminder for reading. Such subheadings should neither be understood as being used to divide the content of the article, nor should the content under the subheading be limited to the scope of the subheading.

[0032] The present disclosure provides a Fizeau imaging module, which can be used to convert an optical signal corresponding to a measurement light beam into an electrical signal. Through the present disclosure, the volume of the Fizeau imaging module can be reduced.

[0033] The measurement beam involved in the present disclosure may refer to a beam containing information of a measured parameter. The measured parameter involved in the present disclosure may refer to parameters such as temperature, pressure, or vibration. In some examples, the measured parameter may be measured by an optical fiber Fabry-Perot sensor. The information of the measured parameter may be contained in the measurement beam reflected by the optical fiber Fabry-Perot sensor.

[0034] The Fizeau imaging module involved in the present disclosure may also be referred to as an optoelectronic module, an optoelectronic device, or an optoelectronic component, etc. The Fizeau imaging module involved in the present disclosure may be applicable to any application scenario where an optical signal needs to be converted into an electrical signal.

[0035] The present disclosure also provides a demodulation system, which can be used to demodulate the measurement beam reflected by the fiber Fabry-Perot multi-cavity sensor. In some examples, the demodulation system can include the Fizeau imaging module involved in the present disclosure. Thus, the volume of the demodulation system can be reduced.

[0036] The demodulation system involved in the present disclosure can also be called a demodulation system of an optical fiber Fabry-Perot sensor or a demodulation system based on optical sensing, etc. The demodulation system involved in the present disclosure can be applied to any application scenario where the measurement beam reflected by the optical fiber Fabry-Perot multi-cavity sensor needs to be demodulated to obtain information of the measured parameter.

[0037] Hereinafter, the Fizeau imaging module and demodulation system involved in the present disclosure will be described in detail with reference to the accompanying drawings.

[0038] Figure 1 is a block diagram showing the structure of the Fizeau imaging module 10 involved in the example of the present disclosure.

[0039] See also Figure 1 In some examples, the Fizeau imaging module 10 may include a housing 110 . The housing 110 may constitute a basic structure of the Fizeau imaging module 10 .

[0040] See also Figure 1 In some examples, the Fizeau imaging module 10 may include a light guide component 120. The light guide component 120 may be configured to receive a measurement light beam from the outside.

[0041] See also Figure 1 In some examples, the Fizeau imaging module 10 may include a conversion component 130. In some examples, the light guide component 120 may be configured to guide the measurement beam to the conversion component 130. The conversion component 130 may be configured to receive the measurement beam from the light guide component 120 and convert an optical signal corresponding to the measurement beam into an electrical signal.

[0042] In some examples, the housing 110 may be configured to couple the light guide component 120 and the conversion component 130. Thus, the overall structure of the Fizeau imaging module 10 can be easily formed.

[0043] In some examples, the housing 110 can couple the light guide assembly 120 and the conversion assembly 130 by any method such as bonding, clamping, or screwing. In some examples, the housing 110 can carry the light guide assembly 120 and the conversion assembly 130 .

[0044] Figure 2A1 is a schematic diagram showing an explosion of the Fizeau imaging module 10 involved in the first embodiment of the present disclosure; Figure 2B is a schematic diagram showing the layout of multiple Fizeau imaging modules 10 when the housing 110 involved in the example of the present disclosure has a gradually expanding structure. Figure 2A The first plane P1 which will be described later is also shown. In addition, it should be noted that in order to more clearly illustrate the overall structure of the Fizeau imaging module 10, Figure 2A Some components that may affect observation are omitted, but this should not be understood as the Fizeau imaging module 10 only including the components shown in the figure.

[0045] In some examples, the housing 110 may have a gradually expanding structure. The gradually expanding structure may be a structure that expands from one end (hereinafter referred to as the starting end) to the other end (hereinafter referred to as the ending end). That is, the cross section of the gradually expanding structure may increase from the starting end toward the ending end.

[0046] In some examples, the gradually expanding structure can expand in the direction of the optical device 1220 (described later) pointing to the conversion component 130. In other words, the end end can be close to the conversion component 130. In addition, the position of the starting end of the gradually expanding structure can be determined according to the propagation path of the measurement beam in the Fizeau imaging module 10.

[0047] In some examples, housing 110 may include a plurality of side walls. Figure 2A In some examples, the plurality of side walls may include a first side wall 1110, a second side wall 1120, a third side wall 1130, and a fourth side wall 1140 connected in sequence. In some examples, the first side wall 1110 and the third side wall 1130 may be disposed opposite to each other. The second side wall 1120 and the fourth side wall 1140 may be disposed opposite to each other.

[0048] In some examples, the gradually diverging structure may expand in a direction from the second sidewall 1120 to the fourth sidewall 1140 .

[0049] See also Figure 2A In some examples, along the direction from the second side wall 1120 to the fourth side wall 1140, the distance between the first side wall 1110 and the third side wall 1130 can be increased to form a gradually expanding structure. In this case, by defining the positional relationship between the plurality of side walls to form a gradually expanding structure, it is possible to better set the layout of the plurality of Fizeau imaging modules 10 when using the plurality of Fizeau imaging modules 10 (see Figure 2B ).

[0050] See also Figure 2A In some examples, the housing 110 may include a first mounting area 1150 . At least a portion of the light guide assembly 120 may be disposed in the first mounting area 1150 .

[0051] In some examples, the first mounting area 1150 may be formed on the second sidewall 1120 .

[0052] See also Figure 2A In some examples, the light guide assembly 120 may include a conductive device 1210. The conductive device 1210 may be configured to receive a measurement beam from the outside. The outside referred to in the present disclosure may refer to the outside of the Fizeau imaging module 10. In some examples, the conductive device 1210 may receive a measurement beam reflected by the optical fiber Fabry-Perot sensor 30.

[0053] In some examples, the conductive device 1210 may be disposed in the first mounting area 1150 . In this case, the conductive device 1210 can be disposed in the second sidewall 1120 by being disposed in the first mounting area 1150 , so that the conductive device 1210 can be coupled to the housing 110 .

[0054] In some examples, the first mounting area 1150 may be formed outside the second sidewall 1120. Thus, it is possible to facilitate the conductive device 1210 to receive a measurement beam from the outside.

[0055] In some examples, the conductive device 1210 may include a first conductive element 1211 (see Figure 2A ). The first conductive element 1211 may transmit a measuring beam received from the outside.

[0056] In some examples, the first conductive element 1211 may be disposed in the first mounting area 1150. Thus, the first conductive element 1211 can be disposed in the second sidewall 1120 by being disposed in the first mounting area 1150. In some examples, the first mounting area 1150 may include a first opening for disposing the first conductive element 1211.

[0057] In some examples, the first conductive element 1211 may be an optical fiber. Further, the first conductive element 1211 may be a single-mode optical fiber or a multi-mode optical fiber.

[0058] In some examples, conductive device 1210 may include a second conductive element 1212 (see Figure 2A ). The second conductive element 1212 can fix the first conductive element 1211 to the housing 110 .

[0059] In some examples, when the first conducting element 1211 is an optical fiber, the second conducting element 1212 may be an optical fiber ceramic ferrule. Further, the second conducting element 1212 may be any one of a Ferrule Connector (FC), a Lucent Connector (LC), a Subscriber Connector (SC), and a SubMiniature version A (SMA).

[0060] See also Figure 2A In some examples, the light guide assembly 120 may include an optical device 1220. In some examples, the optical device 1220 may be used to receive the measurement beam transmitted by the conductive device 1210. In other words, the conductive device 1210 may be configured to direct the measurement beam to the optical device 1220. In some examples, the first conductive element 1211 may direct the measurement beam to the optical device 1220.

[0061] In some examples, the optical device 1220 may be configured to transmit the measuring beam to the conversion component 130. In some examples, the measuring beam may be transmitted through the conductive device 1210 and the optical device 1220 inside the housing 110 and then be incident to the conversion component 130.

[0062] In addition, the optical device 1220 may use any method to allow the measuring beam to be incident on the conversion component 130 . In some examples, the optical device 1220 may be configured to transmit the measuring beam to the conversion component 130 .

[0063] In some examples, the optical device 1220 may include a first optical element 1221 (see Figure 2A ). The first optical element 1221 can be configured to transmit the divergent measurement beam. In some examples, the first optical element 1221 can receive the measurement beam from the conductive device 1210.

[0064] In some examples, the first optical element 1221 may be disposed on the second sidewall 1120. In some examples, the first optical element 1221 may be disposed on the inner side of the second sidewall 1120 (see Figure 2A ).

[0065] In some examples, the first optical element 1221 may be connected to an end of the conductive device 1210 that is close to the interior of the housing 110 .

[0066] In some examples, the transmission device 1210 and the first optical element 1221 may be disposed on the second side wall 1120. The conversion assembly 130 may be disposed on the fourth side wall 1140. The measuring beam may be incident on the first optical element 1221 via the transmission device 1210 and transmitted to the conversion assembly 130 via the first optical element 1221. In this case, the measuring beam is directly transmitted to the conversion assembly 130 via the first optical element 1221, which can reduce the number of components of the optical device 1220 used, thereby improving the lightweight degree of the Fizeau imaging module 10.

[0067] In some examples, the light guide assembly 120 may include an adjustment device. The adjustment device may be configured to adjust the angle at which the measuring light beam is incident on the optical device 1220. Thus, it is possible to facilitate the conversion assembly 130 to receive the measuring light beam and improve the accuracy of the conversion assembly 130 in converting the optical signal corresponding to the measuring light beam into the electrical signal. In some examples, the adjustment device may be configured to adjust the angle at which the measuring light beam is incident on the first optical element 1221. In some examples, the adjustment device may be configured to adjust the angle at which the measuring light beam is incident on the first optical element 1221 via the first conductive element 1211.

[0068] In some examples, the regulating device may act on the first conductive element 1211. In the present disclosure, the regulating device acting on the first conductive element 1211 may mean that the regulating device drives the first conductive element 1211 to move or the regulating device applies pressure to the first conductive element 1211.

[0069] In some examples, the adjustment device can be disposed in the first mounting area 1150. In some examples, the first mounting area 1150 can include a second opening for disposing the adjustment device.

[0070] In some examples, the adjustment device can be movably disposed in the first installation area 1150. For example, the adjustment device can be rotatably disposed in the first installation area 1150.

[0071] In some examples, the second opening may be in communication with the first opening. Thus, it is possible to facilitate the adjustment device to act on the first conductive element 1211 to adjust the angle at which the measuring light beam is incident on the first optical element 1221 via the first conductive element 1211 .

[0072] In some examples, the adjusting device may be a high-precision threaded workpiece, and the first mounting area 1150 may have a high-precision threaded hole matching the threaded workpiece. In the present disclosure, high precision may refer to a sufficiently small pitch of the thread.

[0073] Figure 3A is a schematic diagram showing the divergence of the measurement beams in the same first plane P1 involved in the example of the present disclosure; Figure 3Bis a schematic diagram showing the focusing of the measurement beams on the same second plane P2 involved in the example of the present disclosure. Figure 3A is shown from a perspective orthogonal to the first plane P1, Figure 3B It is shown from a perspective orthogonal to the second plane P2.

[0074] In some examples, the optical device 1220 may be configured to cause the measurement beam to diverge along the direction in which the optical device 1220 points to the conversion component 130. In the first embodiment of the present disclosure, the direction in which the optical device 1220 points to the conversion component 130 may refer to the direction in which the first optical element 1221 points to the conversion component 130. In some examples, the gradually expanding structure may match the diverging measurement beam. Specifically, along the direction in which the optical device 1220 points to the conversion component 130, the gradually expanding structure may be expanded and the measurement beam may be divergent. In addition, the gradually expanding structure may not block the diverging measurement beam.

[0075] In some examples, the optical device 1220 can be configured to make the measurement beam in the same first plane P1 diverge along the direction from the optical device 1220 to the conversion component 130. In some examples, the first optical element 1221 can be configured to make the measurement beam in the same first plane P1 diverge along the direction from the first optical element 1221 to the conversion component 130. Figure 3A In some examples, after being transmitted through the first optical element 1221 , the measuring light beam in the same first plane P1 may diverge in a direction from the first optical element 1221 to the conversion component 130 , thereby forming a divergent measuring light beam.

[0076] In some examples, the optical device 1220 can be configured to focus the measurement beam in the same second plane P2 along the direction from the optical device 1220 to the conversion component 130. In some examples, the first optical element 1221 can be configured to focus the measurement beam in the same second plane P2 along the direction from the first optical element 1221 to the conversion component 130. Figure 3B In some examples, after being transmitted through the first optical element 1221 , the measuring light beam in the same second plane P2 can be focused along the direction of the first optical element 1221 pointing to the conversion component 130 to form a focused measuring light beam.

[0077] See also Figure 3B In some examples, the measuring beam in the same second plane P2 can be focused on the first plane P1 along the direction of the optical device 1220 pointing to the conversion component 130.

[0078] In some examples, the first plane P1 may be orthogonal to the second plane P2 , thereby facilitating the design of components of the optical device 1220 .

[0079] In some examples, there may be a plurality of first planes P1 , and the plurality of first planes P1 may be parallel to each other.

[0080] In some examples, there may be a plurality of second planes P2, and each second plane P2 may be orthogonal to the first plane P1.

[0081] It should be understood that in the present disclosure, the same first plane P1 and the same second plane P2 are not limiting. In some examples, the optical device 1220 can be configured to focus the measurement beams in the same first plane P1 along the direction from the optical device 1220 to the conversion component 130. Alternatively, the optical device 1220 can be configured to diverge the measurement beams in the same second plane P2 along the direction from the optical device 1220 to the conversion component 130.

[0082] The present disclosure is not limited thereto. In some examples, the optical device 1220 may also be configured to cause the measuring light beam arranged in a ring shape to diverge in a direction in which the optical device 1220 points to the conversion component 130 .

[0083] Figure 4 Schematic diagram showing the structure of the diffractive optical element involved in the example of the present disclosure.

[0084] Figure 5 FIG. 1 is a schematic diagram showing a comparison between a diffractive optical element for achieving a focusing effect and a traditional optical lens. It can be understood that according to Figure 5 It is also not difficult to derive the structure of the diffractive optical element for achieving the divergence effect.

[0085] In some examples, optical device 1220 may include a diffractive optical element (see Figure 4 ). In this case, compared to a conventional optical lens, the diffractive optical element can retain the portion that causes the measuring beam to be refracted in the lens and remove the portion that causes the measuring beam to propagate in a straight line in the lens (see Figure 5 ), that is, compared with a traditional optical lens, when the same focusing or diverging effect needs to be achieved, the volume of the diffractive optical element can be smaller and the mass can be lighter, thereby improving the lightweight degree of the Fizeau imaging module 10 and further reducing the volume of the Fizeau imaging module 10.

[0086] See also Figure 4 In some examples, the diffractive optical element may include a concave-convex stepped structure 1223 .

[0087] In some examples, the diffractive optical element can be processed by an overlay process. Specifically, a concave and convex step-shaped structure 1223 can be formed on the mask material by using reactive ion etching (RIE etching). In this case, when the measuring beam passes through the step-shaped structure 1223, it can pass through areas of different thicknesses, thereby causing different optical paths of the measuring beam, which can further cause the phase of the measuring beam to change, thereby achieving focusing and / or divergence of the measuring beam.

[0088] In some examples, the stepped structure 1223 may be a 4-step stepped structure 1223. In other words, the number of steps of the stepped structure 1223 may be 4. In this case, the diffractive optical element can satisfy the function of focusing and / or diverging the measurement beam while reducing the difficulty of the process.

[0089] In some examples, the mask material may be chromium. In some examples, the parameters of RIE etching may be set as follows: the RF source power may be 1250 watts (W). The bias RF power may be 550 W. The volume flow rate of argon may be 40 square centimeters (40 cm2) per minute. 2 The volume flow rate of trifluoromethane can be 90 cm 2 In this case, the verticality of the step-shaped structure 1223 can be guaranteed to be above 85 degrees, and the roughness of the etched surface can also be guaranteed to be less than 50 nanometers (nm).

[0090] In some examples, the first optical element 1221 may be a diffractive optical element.

[0091] Fig. 6A is a schematic top view showing a metasurface involved in an example of the present disclosure; Figure 6B Schematic diagram showing the three-dimensional structure of the metasurface involved in the example of the present disclosure.

[0092] In some examples, the optical device 1220 can have a metasurface. In some examples, the metasurface can have an array of optical antennas with sub-wavelength dimensions and spacing (see Fig. 6A and Figure 6B ). In other words, the antennas in the optical antenna array can have sub-wavelength sizes and spacings. In this case, due to the spacing inside the optical antenna array, the optical device 1220 with the metasurface can be smaller in size and lighter in weight than a conventional optical lens, thereby improving the portability of the Fizeau imaging module 10 and further reducing the volume of the Fizeau imaging module 10. In addition, compared to an optical diffraction element, the metasurface can reduce the influence on the propagation direction of the measurement beam.

[0093] In some examples, the optical antenna array of the metasurface may have columnar antennas 1224 of different radii. In some examples, the optical antenna array of the metasurface may have columnar antennas 1224 of different heights. In some examples, the optical antenna array of the metasurface may have columnar antennas 1224 of different radii and heights. In this case, when the measurement beam passes through the columnar antennas 1224 of different radii and heights in the optical antenna array, the optical antenna array can make the optical path of the measurement beam in the metasurface different, so that the optical antenna array can adjust the phase of the measurement beam, thereby achieving focusing and / or divergence of the measurement beam.

[0094] In some examples, first optical element 1221 may have a metasurface.

[0095] In some examples, the optical device 1220 may have a metasurface; and / or, the optical device 1220 may include a diffractive optical element. In this case, compared with a conventional optical lens, the optical device 1220 having a metasurface can be smaller in size and lighter in weight; in addition, the diffractive optical element can retain the portion that causes the measurement beam to refract in the lens and remove the portion that causes the measurement beam to propagate in a straight line in the lens, that is, compared with a conventional optical lens, when the same focusing or diverging effect needs to be achieved, the diffractive optical element can be smaller in size and lighter in weight, thereby improving the portability of the Fizeau imaging module 10 and further reducing the volume of the Fizeau imaging module 10.

[0096] In some examples, first optical element 1221 may have a metasurface; and / or, first optical element 1221 may be a diffractive optical element.

[0097] As described above, in some examples, the Fizeau imaging module 10 may include a conversion component 130 .

[0098] Return to see Figure 2A In some examples, the housing 110 may include a second mounting area 1160 . In some examples, the second mounting area 1160 may be formed on the fourth sidewall 1140 .

[0099] In some examples, at least a portion of the conversion assembly 130 may be disposed in the second mounting area 1160. In this case, the conversion assembly 130 can be disposed in the fourth side wall 1140 by being disposed in the second mounting area 1160, so that the conversion assembly 130 can be coupled to the housing 110. In some examples, the second mounting area 1160 may include a third opening for disposing the conversion assembly 130.

[0100] In some examples, the second mounting area 1160 may be formed on the outer side of the fourth side wall 1140 . Thus, the conversion assembly 130 can reduce the influence on the optical path of the measuring light beam inside the housing 110 .

[0101] In some examples, the central axes of the conductive device 1210, the first optical element 1221, and the conversion component 130 may be in the first plane P1 and coincide with each other (see Figure 2A In this case, the first optical element 1221 makes the measuring beam diverge in the first plane P1. When the measuring beam reaches the specified divergence requirement through the first optical element 1221, the propagation path of the measuring beam can be minimized, which can be helpful to further reduce the volume of the Fizeau imaging module 10.

[0102] Figure 7 is a schematic diagram showing the structure of the conversion component 130 involved in the example of the present disclosure.

[0103] in, Figure 7 The dashed line with an arrow shown schematically depicts the measuring beam.

[0104] In some examples, conversion assembly 130 may include enhancement device 1310. Enhancement device 1310 may be configured to enhance an optical signal corresponding to the measurement beam.

[0105] In some examples, the conversion component 130 may include a plurality of photosensitive units 1320 ( Figure 7 One of the photosensitive units 1320 is schematically indicated. In some examples, the photosensitive unit 1320 can receive the measurement beam. In some examples, the photosensitive unit 1320 can receive the focused measurement beam. In some examples, the photosensitive unit 1320 can convert the optical image of the measurement beam on the photosensitive surface into an electrical signal corresponding to the optical image. The photosensitive surface can be the surface on which the photosensitive unit 1320 receives the optical image of the measurement beam.

[0106] In some examples, the measuring beam may pass through the enhancement device 1310 and be incident on the photosensitive surface of the photosensitive unit 1320 .

[0107] See also Figure 7 In some examples, the enhancement device 1310 may include a first semi-transparent mirror 1311 and a second semi-transparent mirror 1312. One end of the first semi-transparent mirror 1311 and the second semi-transparent mirror 1312 may be joined, and the other end may have a predetermined distance. In this case, a wedge-tip interference structure can be formed in the enhancement device 1310, and when the measurement beam passes through the enhancement device 1310, the measurement beam can interfere, thereby enhancing the information carried by the measurement beam.

[0108] In some examples, the wavelength range of the measurement beam allowed by the first semi-transparent mirror 1311 and the second semi-transparent mirror 1312 may be 300nm to 1100nm. For example, the wavelength of the measurement beam allowed by the first semi-transparent mirror 1311 and the second semi-transparent mirror 1312 may be 300nm, 400nm, 600nm, 800nm ​​or 1100nm.

[0109] In some examples, the first semi-transparent mirror 1311 and the second semi-transparent mirror 1312 may be two glass sheets, and the opposite sides of the two glass sheets may be coated with a semi-transparent and semi-reflective film.

[0110] In some examples, the flatness and finish of the glass sheet can be less than 0.05 microns.

[0111] In some examples, the material of the glass sheet may include borosilicate.

[0112] In some examples, a spacer 1313 of a predetermined thickness may be provided at one end of the first semi-transparent mirror 1311 and the second semi-transparent mirror 1312. Thus, a predetermined distance may be provided at one end of the first semi-transparent mirror 1311 and the second semi-transparent mirror 1312.

[0113] In some examples, the predetermined thickness may be any value between 0 micrometers and 100 micrometers. For example, the predetermined thickness may be 0 micrometers, 20 micrometers, 50 micrometers, 80 micrometers, or 100 micrometers.

[0114] In some examples, the plurality of photosensitive units 1320 may be arranged in an array. In other words, the plurality of photosensitive units 1320 may be arranged in multiple rows and columns. In this case, if the measurement light beam in the same second plane P2 is not focused along the direction from the optical device 1220 to the conversion component 130, the plurality of photosensitive units 1320 arranged in an array can still receive the light image of almost all the measurement light beams, thereby improving the integrity of the information carried by the received measurement light beams.

[0115] As described above, in some examples, the measurement beams in the same first plane P1 may diverge in the direction from the optical device 1220 to the conversion component 130 , and the measurement beams in the same second plane P2 may be focused on the first plane P1 in the direction from the optical device 1220 to the conversion component 130 .

[0116] In some examples, the connection line of multiple photosensitive units 1320 can be in the first plane P1. In other words, multiple photosensitive units 1320 can be arranged linearly in the first plane P1. In some examples, multiple photosensitive units 1320 can receive a measurement light beam focused on the first plane P1. In this case, it is convenient for multiple photosensitive units 1320 to receive the focused measurement light beam on the same first plane P1, and then the area of ​​the overall photosensitive surface of the multiple photosensitive units 1320 can be reduced, which can help to further reduce the volume of the Fizeau imaging module 10. In addition, the focusing of the measurement light beam in the same second plane P2 can enhance the optical image of the measurement light beam received by the photosensitive surface of a single photosensitive unit 1320, thereby further improving the accuracy of converting the optical signal corresponding to the measurement light beam into an electrical signal.

[0117] In some examples, the conversion component 130 may include an image sensor. The photosensitive unit 1320 may be a CCD (Charge-coupled Device) element on the image sensor.

[0118] Fig. 8A is an exploded schematic diagram showing a Fizeau imaging module 10 involved in a second embodiment of the present disclosure; Figure 8B FIG. 1 is a schematic diagram showing the Fizeau imaging module 10 according to the second embodiment of the present disclosure at another viewing angle. Figure 8B Parts or lines may be omitted and may affect the observation.

[0119] See also Figure 8B In the second embodiment of the present disclosure, the optical device 1220 may include the aforementioned first optical element 1221. The contents of the first optical element 1221 may be referred to above and will not be repeated here.

[0120] See also Fig. 8A In some examples, the first mounting area 1150 may be formed on the fourth sidewall 1140 . In this case, the conductive device 1210 can be disposed on the fourth sidewall 1140 by being disposed on the first mounting area 1150 , so that the conductive device 1210 can be coupled to the housing 110 .

[0121] In some examples, the first mounting area 1150 may be formed outside the fourth sidewall 1140. Thus, it is possible to facilitate the conductive device 1210 to receive the measurement beam from the outside.

[0122] In addition, the contents regarding the conductive device 1210 in the first embodiment of the present disclosure are also applicable to the second embodiment of the present disclosure and will not be repeated here.

[0123] In the second embodiment of the present disclosure, when the first conducting element 1211 is an optical fiber and the second conducting element 1212 is an optical fiber ceramic ferrule, the incident angle of the optical fiber ceramic ferrule can be the arctangent value of the numerical aperture of the optical fiber. In other words, the incident angle of the optical fiber incident on the first optical element 1221 for the measurement beam can be the arctangent value of the numerical aperture of the optical fiber. Thus, the incident angle of the measurement beam can be made more appropriate.

[0124] It should be noted that the first optical element 1221 involved in the second embodiment of the present disclosure is arranged at a different position from the first optical element 1221 involved in the first embodiment. In the second embodiment of the present disclosure, the first optical element 1221 may be arranged on the inner side of the fourth side wall 1140. Thus, it is convenient to make the measuring light beam diverge and / or focus inside the housing 110 after passing through the first optical element 1221.

[0125] In the second embodiment of the present disclosure, the optical device 1220 may include a second optical element 1222 (see Fig. 8A ). The second optical element 1222 may be configured to reflect the measuring beam. In some examples, the second optical element 1222 may receive the measuring beam from the first optical element 1221. In the second embodiment of the present disclosure, the direction in which the optical device 1220 points to the conversion component 130 may refer to the direction in which the second optical element 1222 points to the conversion component 130.

[0126] In some examples, the transmission device 1210, the first optical element 1221, and the conversion component 130 may be disposed on the fourth side wall 1140. In some examples, the second optical element 1222 may be disposed on the second side wall 1120. In some examples, the measurement beam may be incident on the first optical element 1221 through the transmission device 1210, and transmitted through the first optical element 1221 to the second optical element 1222, and then reflected from the second optical element 1222 to the conversion component 130. In this case, the measurement beam is transmitted from the first optical element 1221 to the second optical element 1222, and then reflected from the second optical element 1222 to the conversion component 130, so that the measurement beam can propagate in multiple dimensions, so that the Fizeau imaging module 10 is not too long in a single dimension, so that the structure of the Fizeau imaging module 10 can be more uniformly distributed in space.

[0127] In some examples, the second optical element 1222 can be disposed on the second side wall 1120 (see Fig. 8A In some examples, the second optical element 1222 may be disposed inside the second sidewall 1120. Thus, the convenience of the second optical element 1222 receiving the measuring beam transmitted by the first optical element 1221 inside the housing 110 and reflecting the measuring beam to the conversion component 130 can be improved.

[0128] In some examples, the second optical element 1222 may be a reflector. In this case, the measuring light beam propagating from the fourth side wall 1140 toward the second side wall 1120 can be reflected by the second optical element 1222 and then propagated from the second side wall 1120 toward the fourth side wall 1140, so that the conversion component 130 disposed on the fourth side wall 1140 can receive the measuring light beam and convert the optical signal corresponding to the measuring light beam into an electrical signal.

[0129] In the second embodiment of the present disclosure, the first optical element 1221 may be configured to make the measuring light beam in the same first plane P1 diverge in the direction from the first optical element 1221 to the second optical element 1222. The line connecting the center of the transmission device 1210 and the center of the first optical element 1221, the line connecting the center of the first optical element 1221 and the center of the second optical element 1222, and the line connecting the center of the second optical element 1222 and the center of the conversion component 130 may be in the first plane P1 and not overlap. In this case, when the second optical element 1222 receives the divergent measuring light beam from the first optical element 1221 and reflects the divergent measuring light beam to the conversion component 130, the divergence degree of the measuring light beam can be further increased, thereby when the measuring light beam reaches the specified divergence requirement through the first optical element 1221 and the second optical element 1222, the space occupied by the Fizeau imaging module 10 in the direction from the second optical element 1222 to the conversion component 130 can be reduced.

[0130] In addition, the contents regarding the conversion assembly 130 in the first embodiment of the present disclosure are also applicable to the second embodiment of the present disclosure and will not be repeated here.

[0131] In the Fizeau imaging module 10 of the present disclosure, the measuring light beam is incident on the conversion component 130 after being propagated through the conducting device 1210 and the optical device 1220. In this process, the measuring light beam is diverged in the direction of the optical device 1220 pointing to the conversion component 130 under the action of the optical device 1220. The diverged measuring light beam can make the optical image of the measuring light beam on the conversion component 130 clearer, thereby facilitating the conversion component 130 to accurately convert the optical signal corresponding to the measuring light beam into an electrical signal. In addition, the housing 110 has a gradually expanding structure that matches the divergent measuring light beam, thereby reducing the volume of the Fizeau imaging module 10. When multiple Fizeau imaging modules 10 are used, the space occupied by multiple Fizeau imaging modules 10 can be saved to a certain extent by reasonably setting the layout of the multiple Fizeau imaging modules 10.

[0132] As described above, the present disclosure also relates to a demodulation system 1, which may include the Fizeau imaging module 10 involved in the present disclosure.

[0133] Fig. 9 is a block diagram showing a module of a demodulation system 1 according to an example of the present disclosure.

[0134] For some examples, see Fig. 9 , the demodulation system 1 may include a transmitting module 20 .

[0135] In some examples, the transmitting module 20 may be used to transmit a measuring light beam.

[0136] In some examples, the transmitting module 20 may be a broadband light source. Further, the transmitting module 20 may be an ASE (Amplified Spontaneous Emission) broadband light source, an SLED (Super luminescent LED) broadband light source, or an SLD (Superluminescent diode) broadband light source.

[0137] For some examples, see Fig. 9 , the demodulation system 1 may include an optical fiber Fabry-Perot sensor 30. The optical fiber Fabry-Perot sensor 30 may measure the measured parameter. In some examples, the measuring beam emitted by the transmitting module 20 may be incident on the optical fiber Fabry-Perot sensor 30. The optical fiber Fabry-Perot sensor 30 may reflect the incident measuring beam. In some examples, under the effect of the measured parameter, the measuring beam reflected by the optical fiber Fabry-Perot sensor 30 may carry information of the measured parameter.

[0138] For some examples, see Fig. 9 The demodulation system 1 may include a Fizeau imaging module 10. The contents of the Fizeau imaging module 10 may be found in the foregoing description and will not be described in detail herein.

[0139] For some examples, see Fig. 9 The demodulation system 1 may include a processing module 40. The processing module 40 may analyze and process the electrical signal obtained after the optical signal corresponding to the measuring light beam is converted by the Fizeau imaging module 10. Thus, the measuring light beam reflected by the optical fiber Fabry-Perot sensor 30 may be demodulated to obtain information of the measured parameter.

[0140] In some examples, the processing module 40 may include a signal processing circuit board. The signal processing circuit board may be coupled to the Fizeau imaging module 10. In some examples, the signal processing circuit board may be bonded to the Fizeau imaging module 10.

[0141] In addition, in the present disclosure, the demodulation system 1 may include a transmitting module 20, a fiber Fabry-Perot sensor 30, a Fizeau imaging module 10, and a processing module 40. In this case, the demodulation system 1 includes the Fizeau imaging module 10 involved in the present disclosure, thereby reducing the volume of the demodulation system 1.

[0142] Although the present disclosure is specifically described above in conjunction with the accompanying drawings and embodiments, it is to be understood that the above description does not limit the present disclosure in any form. Those skilled in the art may modify and change the present disclosure as needed without departing from the essential spirit and scope of the present disclosure, and these modifications and changes all fall within the scope of the present disclosure.

Claims

1. A Fizeau imaging module, characterized in that: The invention comprises a shell, a light guide component and a conversion component, wherein the shell is configured to couple the light guide component and the conversion component, the light guide component comprises a conduction device and an optical device, a measuring light beam is incident on the conversion component after propagating through the conduction device and the optical device inside the shell, the conduction device is configured to receive the measuring light beam from the outside and to incident the measuring light beam on the optical device, the optical device is configured to incident the measuring light beam on the conversion component and to diverge the measuring light beam along the direction in which the optical device points to the conversion component, the shell has a gradually expanding structure that expands along the direction in which the optical device points to the conversion component, the gradually expanding structure matches the diverging measuring light beam, the conversion component is configured to receive the measuring light beam and convert the optical signal corresponding to the measuring light beam into an electrical signal, the optical device has a metasurface, and / or the optical device comprises a diffractive optical element.

2. The Fizeau imaging module according to claim 1, characterized in that: The optical device is configured to make the measuring light beam in the same first plane diverge along the direction from which the optical device points to the conversion component, and to make the measuring light beam in the same second plane focus on the first plane along the direction from which the optical device points to the conversion component, the first plane is orthogonal to the second plane, the conversion component includes a plurality of photosensitive units, a line connecting the plurality of photosensitive units is in the first plane, and the plurality of photosensitive units receive the measuring light beam focused on the first plane.

3. The Fizeau imaging module according to claim 1, characterized in that: The shell includes a first side wall, a second side wall, a third side wall and a fourth side wall which are connected in sequence, the first side wall and the third side wall are arranged opposite to each other, the second side wall and the fourth side wall are arranged opposite to each other, and in the direction from the second side wall to the fourth side wall, the distance between the first side wall and the third side wall increases to form the gradually expanding structure.

4. The Fizeau imaging module according to claim 3, characterized in that: The optical device includes a first optical element configured to transmit a divergent measuring light beam. The conductive device and the first optical element are arranged on the second side wall. The conversion component is arranged on the fourth side wall. The measuring light beam is incident on the first optical element through the conductive device and is transmitted to the conversion component through the first optical element.

5. The Fizeau imaging module according to claim 3, characterized in that: The optical device includes a first optical element and a second optical element, the first optical element is configured to transmit a divergent measuring light beam, the second optical element is configured to reflect the measuring light beam, the conductive device, the first optical element and the conversion component are arranged on the fourth side wall, the second optical element is arranged on the second side wall, the measuring light beam is incident on the first optical element through the conductive device, is transmitted to the second optical element through the first optical element, and is then reflected to the conversion component through the second optical element.

6. The Fizeau imaging module according to claim 4, characterized in that: The first optical element is configured to make the measuring light beam in the same first plane diverge along the direction from the first optical element to the conversion component. The central axes of the transmission device, the first optical element and the conversion component are in the first plane and coincide with each other.

7. The Fizeau imaging module according to claim 5, characterized in that: The first optical element is configured to make the measuring light beam in the same first plane diverge along the direction from the first optical element to the second optical element, and the line connecting the center of the transmission device and the center of the first optical element, the line connecting the center of the first optical element and the center of the second optical element, and the line connecting the center of the second optical element and the center of the conversion component are in the first plane and do not overlap.

8. The Fizeau imaging module according to claim 1, characterized in that: The light guide assembly includes an adjustment device configured to adjust an angle at which the measuring light beam is incident on the optical device.

9. A demodulation system, characterized in that: The demodulation system comprises the Fizeau imaging module as claimed in any one of claims 1 to 8.

Images