A low-loss silicon oxide optical waveguide growth device

Abstract

The present invention discloses a low-loss silicon oxide optical waveguide growth device, and relates to the technical field of silicon oxide growth. The present invention uses a melting deposition method to stack silicon raw materials for forming. The method has simpler process steps, and can also improve growth efficiency, and provide a sufficient amount of wafer substrates for silicon oxide optical waveguides; through the provided sealing component, it can effectively ensure that the silicon oxide optical waveguide wafer substrate is not disturbed by the external environment during the production process, so that the inside of the optical waveguide is purer, thereby reducing propagation loss and improving overall performance; through the cooperation of the sealing component and the rotating and pulling component, the tops of the two closed state sealing covers can be automatically sealed without active control, which can reduce the number of steps in the entire growth process.

Description

Technical Field

[0001] The invention relates to the technical field of silicon oxide growth, in particular to a low-loss silicon oxide optical waveguide growth device. Background Art

[0002] With the rapid development of communication technology, the requirements for optical waveguides are becoming more and more stringent. Silicon oxide optical waveguides are optical waveguides made of silicon oxide materials. They are optical devices used to transmit optical signals. They have the advantages of high refractive index and easy preparation and integration. Therefore, they are widely used in the fields of optical communication, optical sensing and optical computing.

[0003] The growth efficiency of silicon oxide waveguides will directly affect the construction speed of communication base stations. During the production process of silicon oxide waveguides, the production efficiency of silicon cylinders directly affects the overall production efficiency of silicon oxide waveguides. Therefore, it is necessary to develop a silicon oxide waveguide silicon wafer substrate production equipment with simple process, low cost and short preparation cycle to meet the needs of the rapid development of today's communication technology. Summary of the invention

[0004] In order to overcome the defects of the above-mentioned prior art, the present invention provides the following technical solutions: a low-loss silicon oxide optical waveguide growth device, comprising a growth table, on which a sealing assembly is fixedly installed, the sealing assembly comprising two symmetrically arranged sealing covers, both sealing covers are fixedly provided with sealing cover brackets, both sealing cover brackets are slidably arranged on the main support frame, and an air suction port is provided on the sealing cover for connecting with a negative pressure pump to form a vacuum environment between the two sealing covers. It should be noted that the sealing table plate is slidably matched with the growth table, and a through hole with the same shape as the sealing table plate is provided on the growth table, and the sealing table plate slides in the through hole. The sealing table plate can slide slightly in the through hole (the upper and lower edges of the through hole have limiting protrusions to control the sliding range of the sealing table plate), and the purpose is to allow the sealing table plate to slide in the through hole when the inside of the sealing cover is under negative pressure. The bottom of the sealing cover can be tightly attached to form a complete enclosed space; a rotation and pulling assembly is fixedly installed on the main support frame, and the rotation and pulling assembly includes a driving pipe, and a fixed base is fixedly installed on the bottom end of the driving pipe. A spline screw is provided with a coaxial thread on the fixed base, and a lifting spline gear for driving the spline screw to rotate is provided on the surface of the spline screw through a spline sliding, and the lifting spline gear is rotatably arranged on the fixed base (it cannot be axially displaced under the restriction of one of the supporting partitions); an adaptation assembly is also provided on the growth platform, and the adaptation assembly includes a sealing table plate, and four parallel anti-rotation sliding rods and a threaded screw are slidingly provided on the sealing table plate, and the top ends of the anti-rotation sliding rod and the threaded screw are fixedly connected to the support platform, and a heating crucible is fixedly installed on the upper surface of the support platform through a heat insulation strip, and a heating assembly is provided on the circumferential surface of the heating crucible.

[0005] Preferably, the main support frame is fixed on the growth table, and the growth table consists of an upper and lower flat plate, and the top flat plate is provided with a through hole that slides with the sealing table plate, and the upper and lower flat plates are fixed by pillars. A main driving sealing motor is also fixedly installed on the main support frame, and a sealing screw is fixedly installed on the output shaft of the main driving sealing motor. A C-shaped frame is threadedly sleeved on the sealing screw, and the C-shaped frame is slidably installed on the main support frame, and the two ends of the C-shaped frame are movably connected to the two sealing cover brackets through two sealing driving connecting rods, which are used to drive the two sealing covers to move relative to each other.

[0006] Preferably, a plurality of support baffles are fixedly installed on the inner wall of the driving pipe along an axial array, a through hole slidingly matched with the spline screw is opened at the axial center position of the support baffle, and air vents are also opened on the driving pipe and the support baffles. A driving motor is fixedly installed on the top of the driving pipe, and a lifting gear meshing with the lifting spline gear is rotatably installed on the fixed base, wherein the output shaft of the driving motor is fixed to the lifting gear by a driving shaft.

[0007] Preferably, a top reset rod is also slidably provided at the top of the driving pipe, and a reset plate that contacts and cooperates with the top of the spline screw is fixedly installed at the bottom end of the top reset rod at a position inside the driving pipe. The driving pipe is fixed to the main support frame through a driving pipe bracket, and a reset synchronization rod is slidably provided on the driving pipe bracket. The top of the reset synchronization rod is fixedly connected to the top of the top reset rod, and a balance ring is fixedly installed at the bottom end of the reset synchronization rod.

[0008] Preferably, the balancing ring sliding sleeve is arranged on the circumferential surface of the driving pipe, and two release pins are symmetrically arranged on the lower surface of the balancing ring, and a limiting plate is fixedly installed on the bottom end of each release pin, and a sealing ring bracket is also slidably provided on the two release pins, and a sealing ring is provided on the sealing ring bracket. The sealing ring is slidably matched with the circumferential surface of the driving pipe, and the top of the sealing cover is provided with an inclined groove chamfer that matches the sealing ring, so as to seal the top of the sealing cover.

[0009] Preferably, a spring stopper that slides with the reset synchronization rod is fixedly mounted on the circumferential surface of the drive pipe, a spring is fixedly mounted between the spring stopper and the balance ring, and the spring is arranged around the surface of the drive pipe.

[0010] Preferably, a bottom platen is fixedly mounted on the lower surface of the sealing platen, and two mutually meshing nut toothed discs and an adaptable driving gear are rotatably mounted between the bottom platen and the sealing platen, wherein the nut toothed disc is threadably matched with the threaded lead screw.

[0011] Preferably, the heating assembly is composed of a plurality of silicon-molybdenum rods, all of which are arranged in an axial array along the heating crucible, and each silicon-molybdenum rod can independently control the temperature. All of the silicon-molybdenum rods are fixed on a sealing platen through a heating assembly bracket, so that relative movement can occur between the heating crucible and the heating assembly.

[0012] Preferably, the adaptive driving gear is also fixedly mounted with a lateral gear, and both the lateral gear and the adaptive driving gear are rotatably mounted on one of the anti-rotation slide bars. An adaptive adjustment gear that meshes with the lateral gear is also rotatably mounted on the bottom table. An adaptive adjustment motor is fixedly mounted on the main support frame, and the output shaft of the adaptive adjustment motor is connected to the adaptive adjustment gear via a transmission shaft.

[0013] Compared with the prior art, the present invention has the following beneficial effects: (1) The present invention uses a melting deposition method to stack silicon raw materials. This method has simpler process steps and can also improve growth efficiency, providing a sufficient amount of wafer substrates for silicon oxide optical waveguides; (2) The present invention can effectively ensure that the silicon oxide optical waveguide wafer substrate is not disturbed by the external environment during the production process by means of the cooperation of the sealing component and the adaptation component, and can also ensure that the liquid level of the silicon raw material is always at the same position as the bottom of the solidified silicon rod, so as to solidify layer by layer, effectively ensuring that no bubbles will remain inside the solidified silicon rod, making the inside of the optical waveguide purer, thereby reducing raw material loss and improving overall performance; (3) The present invention can automatically seal the tops of the two closed sealing covers by means of the cooperation of the sealing component and the rotation and pulling component, without the need for active control, thereby reducing the steps in the entire growth process and having the advantage of a shorter preparation cycle. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0015] Figure 2 It is a schematic diagram of the main support frame structure of the present invention.

[0016] Figure 3 It is a schematic diagram of the structure of the C-shaped frame of the present invention.

[0017] Figure 4 For the present invention Figure 3 Schematic diagram of the structure at point A in the middle.

[0018] Figure 5 It is a structural schematic diagram of the sealing table of the present invention.

[0019] Figure 6 This is a schematic diagram of the structure of the driving pipeline of the present invention.

[0020] Figure 7 For the present invention Figure 6 Schematic diagram of the structure at point B in the middle.

[0021] Figure 8 For the present invention Figure 6 Schematic diagram of the structure at point C in the middle.

[0022] Fig. 9 It is a schematic diagram of the sealing cover structure of the present invention.

[0023] Fig.10 For the present invention Fig. 9 Schematic diagram of the structure at point D in the middle.

[0024] Fig.11 It is a structural schematic diagram of the heating component of the present invention.

[0025] Fig.12 It is a schematic diagram of the structure of the heating crucible of the present invention.

[0026] In the figure: 101-sealing table; 102-bottom table; 103-nut toothed disc; 104-anti-rotation slide bar; 105-threaded screw; 106-lateral gear; 107-adaptive drive gear; 108-adaptive adjustment gear; 109-transmission shaft; 110-adaptive adjustment motor; 111-heating component bracket; 112-heating component; 113-heating crucible; 114-support table; 115-insulation strip; 201-driving pipeline; 202-supporting partition; 203-driving motor; 204-driving shaft; 205-lifting gear; 206-lifting flower Key gear; 207-fixed base; 208-spline screw; 209-drive pipe bracket; 301-main support frame; 302-main drive sealing motor; 303-sealing cover bracket; 304-sealing drive connecting rod; 305-C-shaped frame; 306-sealing cover; 307-sealing screw; 308-reset synchronization rod; 309-spring limit plate; 310-top reset rod; 311-reset plate; 312-balance ring; 313-spring; 314-release slide pin; 315-limiting plate; 316-sealing ring bracket; 317-sealing ring; 4-growth table. DETAILED DESCRIPTION

[0027] The following is combined with Figure 1-Figure 12 , and further illustrate the technical solution of the present invention through specific implementation methods.

[0028] The present invention provides a low-loss silicon oxide optical waveguide growth device, including a growth table 4, on which a sealing component is fixedly installed, the sealing component including two symmetrically arranged sealing covers 306, both of which are fixedly provided with sealing cover brackets 303, both of which are slidably arranged on a main support frame 301, and an air suction port is provided on the sealing cover 306 for connecting with a negative pressure pump so that a vacuum environment is formed between the two sealing covers 306. It should be noted that a sealing table plate 101 is slidably matched with the growth table 4, a through hole with the same shape as the sealing table plate 101 is provided on the growth table 4, and the sealing table plate 101 slides in the through hole, and the sealing table plate 101 can slide slightly in the through hole (the upper and lower edges of the through hole have limiting protrusions to control the sliding range of the sealing table plate 101), and the purpose is that when the inside of the sealing cover 306 is under negative pressure, the sealing table plate 101 can be close to the bottom of the sealing cover 306 to form a complete enclosed space.

[0029] The main support frame 301 is fixed on the growth table 4. The growth table 4 consists of an upper and lower flat plate, and the top flat plate is provided with a through hole that slides with the sealing table plate 101. The upper and lower flat plates are fixed by pillars. A main driving sealing motor 302 is also fixedly installed on the main support frame 301. A sealing screw 307 is fixedly installed on the output shaft of the main driving sealing motor 302. A C-shaped frame 305 is threadedly sleeved on the sealing screw 307. The C-shaped frame 305 is slidably installed on the main support frame 301, and the two ends of the C-shaped frame 305 are movably connected to the two sealing cover brackets 303 through two sealing driving connecting rods 304, which are used to drive the two sealing covers 306 to move relative to each other.

[0030] The top of the driving pipe 201 is also slidably provided with a top reset rod 310, and the bottom end of the top reset rod 310 is located inside the driving pipe 201 and is fixedly installed with a reset plate 311 that contacts and cooperates with the top of the spline screw 208. The driving pipe 201 is fixed to the main support frame 301 through a driving pipe bracket 209, and a reset synchronization rod 308 is slidably provided on the driving pipe bracket 209. The top of the reset synchronization rod 308 is fixedly connected to the top of the top reset rod 310, and the bottom end of the reset synchronization rod 308 is fixedly installed with a balance ring 312. The balancing ring 312 is slidably sleeved on the circumferential surface of the driving pipe 201, and two release pins 314 are symmetrically arranged on the lower surface of the balancing ring 312. A limiting plate 315 is fixedly installed on the bottom end of each release pin 314, and a sealing ring bracket 316 is slidably provided on the two release pins 314. A sealing ring 317 is provided on the sealing ring bracket 316. The sealing ring 317 is slidably matched with the circumferential surface of the driving pipe 201, and the top of the sealing cover 306 is provided with an inclined groove chamfer that matches the sealing ring 317, which is used to seal the top of the sealing cover 306.

[0031] A spring stopper 309 that slidably cooperates with the reset synchronization rod 308 is also fixedly installed on the circumferential surface of the driving pipe 201 , and a spring 313 is fixedly installed between the spring stopper 309 and the balance ring 312 . The spring 313 is arranged around the surface of the driving pipe 201 .

[0032] A rotation and pulling assembly is fixedly installed on the main support frame 301, and the rotation and pulling assembly includes a driving pipe 201. A fixed base 207 is fixedly installed on the bottom end of the driving pipe 201. A spline screw 208 is coaxially threaded on the fixed base 207. A lifting spline gear 206 for driving the spline screw 208 to rotate is provided on the surface of the spline screw 208 through spline sliding. The lifting spline gear 206 is rotatably set on the fixed base 207 (it cannot be axially displaced due to the restriction of one of the supporting partitions 202). A plurality of support baffles 202 are fixedly installed on the inner wall of the driving pipe 201 in an axial array, and a through hole that slides with the spline screw 208 is opened at the axial center position of the support baffle 202. Vents are also opened on the driving pipe 201 and the support baffle 202. A driving motor 203 is fixedly installed on the top of the driving pipe 201, and a lifting gear 205 that meshes with the lifting spline gear 206 is rotatably installed on the fixed base 207, wherein the output shaft of the driving motor 203 is fixed to the lifting gear 205 via a driving shaft 204.

[0033] The growth table 4 is also provided with an adaption assembly, which includes a sealing table 101, on which four parallel anti-rotation slide bars 104 and a threaded screw 105 are slidably provided, and the top ends of the anti-rotation slide bars 104 and the threaded screw 105 are fixedly connected to a support table 114, and a heating crucible 113 is fixedly installed on the upper surface of the support table 114 through a heat insulation strip 115, and a heating assembly 112 is provided on the circumferential surface of the heating crucible 113. A bottom table 102 is also fixedly installed on the lower surface of the sealing table 101, and two mutually meshing nut toothed discs 103 and an adaption driving gear 107 are rotatably installed between the bottom table 102 and the sealing table 101, wherein the nut toothed disc 103 is threadedly matched with the threaded screw 105. The heating component 112 is composed of multiple silicon-molybdenum rods, all of which are arranged in an axial array along the heating crucible 113, and each silicon-molybdenum rod can independently control the temperature. All the silicon-molybdenum rods are fixed on the sealing table 101 through the heating component bracket 111, so that relative movement can occur between the heating crucible 113 and the heating component 112. The adaptive driving gear 107 is also fixedly mounted with a lateral gear 106. Both the lateral gear 106 and the adaptive driving gear 107 are rotatably mounted on one of the anti-rotation slide bars 104. An adaptive adjustment gear 108 meshing with the lateral gear 106 is also rotatably mounted on the bottom platen 102. An adaptive adjustment motor 110 is fixedly mounted on the main support frame 301. The output shaft of the adaptive adjustment motor 110 is connected to the adaptive adjustment gear 108 via a transmission shaft 109 (the transmission shaft 109 is made of a flexible material. When the sealing platen 101 moves slightly, the transmission shaft 109 can be slightly deformed, or the transmission shaft 109 is connected to the output shaft of the adaptive adjustment motor 110 via a coupling, which can allow the transmission shaft 109 (adaptive adjustment gear 108) to rotate while displacing in the radial direction).

[0034] The working principle of a low-loss silicon raw material optical waveguide growth device disclosed in the present invention is as follows: silicon raw material is introduced into the heating crucible 113, and a seed crystal is installed at the bottom end of the spline screw 208. The seed crystal is used to adhere to the melted silicon raw material, and the seed crystal is fixed to the spline screw 208 by means of a clamp screw or the like.

[0035] Control the main driving sealing motor 302, the output shaft of the main driving sealing motor 302 drives the sealing screw 307 to rotate, the rotation of the sealing screw 307 drives the C-shaped frame 305 to move on the main support frame 301, at this time, the C-shaped frame 305 will drive the two sealing cover brackets 303 slidingly installed on the main support frame 301 to move relative to each other through the two sealing driving connecting rods 304, buckle the two sealing covers 306, stop the main driving sealing motor 302, and pump the inside of the sealing cover 306 into a negative pressure state, at this time, the sealing platen 101 moves slightly toward the bottom of the sealing cover 306 to form a seal.

[0036] The driving motor 203 is started, and the driving motor 203 controls the lifting gear 205 to rotate. The lifting gear 205 drives the lifting spline gear 206 to rotate. The lifting spline gear 206 drives the spline screw 208 to rotate. The spline screw 208 and the fixed base 207 generate relative rotation, which will cause the spline screw 208 to move axially, and move the bottom end of the spline screw 208 to the top of the heating crucible 113, and stop the driving motor 203. In this process, due to the downward movement of the spline screw 208, the top end of the spline screw 208 is out of contact with the reset plate 311. At this time, the reset plate 311 has no support. Under the action of the elastic force of the spring 313 and gravity, the reset plate 311 and the reset synchronization rod 308 will move downward. At this time, the release slide pin 314 will also move downward with the balance ring 312. Since the balance ring 312 is fixedly connected to the bottom end of the reset synchronization rod 308, the release slide pin 314 is fixedly connected to the balance ring 312. The sealing ring bracket 316 on the sliding pin 314 will move downward, and the sealing ring 317 will be placed on the top of the sealing cover 306. Since the inside of the sealing cover 306 is in a negative pressure state, the sealing ring 317 will be adsorbed in the chamfer of the inclined groove on the top of the sealing cover 306 to form a seal. At this time, the limiting piece 315 is separated from the sealing ring bracket 316, that is, there is a gap between the upper surface of the limiting piece 315 and the lower surface of the sealing ring bracket 316, and the sliding pin 314 is released and the sealing ring bracket 316 slides relative to each other.

[0037] Start the heating component 112 to melt the silicon raw material inside the heating crucible 113. The silicon raw material is a high-purity silicon single substance. The surface temperature of the melted silicon raw material liquid needs to be at a critical temperature (the temperature above the surface of the silicon raw material liquid is lower than the melting point of the silicon raw material, and the temperature below the surface of the silicon raw material liquid is higher than the melting point of the silicon raw material liquid). At this time, the drive motor 203 is controlled again to extend the seed crystal at the bottom end of the spline screw 208 into the silicon raw material liquid, and then the drive motor 203 is controlled in reverse to move the spline screw 208 upward. The spline screw 208 will rotate during the upward movement, and the spline screw 208 drives the seed crystal to rotate while moving upward, and the silicon raw material liquid attached to the seed crystal will adhere to the seed crystal. When it moves above the surface of the silicon raw material liquid, the temperature of the silicon raw material liquid will decrease, thereby causing the silicon raw material liquid to solidify on the seed crystal. By analogy, as the seed crystal moves upward, more and more liquid silicon raw material will condense on the seed crystal and form a cylindrical shape. As the volume of the condensed silicon raw material liquid gradually increases, the silicon raw material liquid inside the heating crucible 113 will become less and less.

[0038] At this time, the liquid level of the silicon raw material liquid in the heating crucible 113 will drop, which will cause the temperature above the liquid level of the silicon raw material liquid to gradually increase. At this time, it is impossible to effectively condense. Therefore, it is necessary to control the adaptive adjustment motor 110. The output shaft of the adaptive adjustment motor 110 drives the adaptive adjustment gear 108 to rotate through the transmission shaft 109. The rotation of the adaptive adjustment gear 108 drives the lateral gear 106 to rotate. The lateral gear 106 rotates synchronously with the adaptive drive gear 107. The adaptive drive gear 107 drives the nut toothed disc 103 to rotate, and the nut toothed disc 103 drives the threaded disc 103 to rotate. The lead screw 105 moves axially, thereby driving the support platform 114 to move upward. The support platform 114 drives the heating crucible 113 to move upward through the insulation strip 115, thereby raising the heating crucible 113 to ensure that the height of the silicon raw material liquid level remains unchanged. Since the heating component 112 is fixed to the sealing table 101 by the heating component bracket 111, the heating position of the heating component 112 on the heating crucible 113 does not change. Combined with the movement of the heating crucible 113, it can be ensured that the temperature above the liquid surface of the silicon raw material and the temperature below the liquid surface do not change.

[0039] After all the condensation is completed, the silicon raw material liquid will form a cylindrical object at the bottom of the spline screw 208. At this time, all devices are turned off, and the temperature is waited for to drop, and the negative pressure inside the sealing cover 306 is released. Then, the two sealing covers 306 are opened through the main driving sealing motor 302, and the condensed silicon cylinder on the spline screw 208 is removed, and then it is processed into the required shape. At this time, the top of the spline screw 208 can be moved to the top again, and the reset plate 311 is lifted up to separate the sealing ring 317 from the top of the sealing cover 306. The removed silicon cylinder is processed into a silicon wafer, and after silicon oxide deposition, the surface of the silicon oxide film defines the shape and structure of the optical waveguide, and the silicon oxide part not protected by the photoresist is removed to form an optical waveguide structure.

Claims

1. A low-loss silicon oxide optical waveguide growth device, comprising a growth platform (4), characterized in that: A sealing assembly is fixedly mounted on the growth platform (4), the sealing assembly comprising two symmetrically arranged sealing covers (306), both sealing covers (306) being fixedly provided with sealing cover brackets (303), and both sealing cover brackets (303) being slidably arranged on the main support frame (301); A rotation and pulling assembly is fixedly mounted on the main support frame (301), and the rotation and pulling assembly comprises a driving pipe (201), a fixed base (207) is fixedly mounted on the bottom end of the driving pipe (201), a spline screw (208) is coaxially threadedly arranged on the fixed base (207), a lifting spline gear (206) for driving the spline screw (208) to rotate is slidingly arranged on the surface of the spline screw (208) through a spline, the lifting spline gear (206) is rotatably arranged on the fixed base (207), and a seed crystal is mounted on the bottom end of the spline screw (208); The growth platform (4) is also provided with an adaptable component, the adaptable component comprising a sealing platform (101), four parallel anti-rotation slide bars (104) and a threaded lead screw (105) are slidably provided on the sealing platform (101), the top ends of the anti-rotation slide bars (104) and the threaded lead screw (105) are fixedly connected to a support platform (114), a heating crucible (113) is fixedly mounted on the upper surface of the support platform (114) via a heat insulation strip (115), silicon raw material is added into the heating crucible (113), and a heating component (112) is provided on the circumferential surface of the heating crucible (113); The main support frame (301) is fixed on the growth platform (4), and a main driving sealed motor (302) is also fixedly mounted on the main support frame (301). A sealing screw (307) is fixedly mounted on the output shaft of the main driving sealed motor (302). A C-shaped frame (305) is threadedly sleeved on the sealing screw (307). The C-shaped frame (305) is slidably mounted on the main support frame (301), and two ends of the C-shaped frame (305) are movably connected to the two sealing cover brackets (303) via two sealing driving connecting rods (304).

2. A low-loss silicon oxide optical waveguide growth device according to claim 1, characterized in that: A plurality of support baffles (202) are fixedly installed on the inner wall of the driving pipe (201) in an axial array, and a through hole for slidingly cooperating with a spline screw (208) is provided at the axial center position of the support baffle (202). Vents are also provided on the driving pipe (201) and the support baffle (202). A driving motor (203) is fixedly installed on the top of the driving pipe (201), and a lifting gear (205) meshing with a lifting spline gear (206) is rotatably installed on the fixed base (207), wherein the output shaft of the driving motor (203) and the lifting gear (205) are fixed via a driving shaft (204).

3. A low-loss silicon oxide optical waveguide growth device according to claim 2, characterized in that: The top end of the driving pipe (201) is also slidably provided with a top reset rod (310), and the bottom end of the top reset rod (310) is located inside the driving pipe (201) and is fixedly provided with a reset plate (311) that contacts and cooperates with the top of the spline screw rod (208). The driving pipe (201) is fixed to the main support frame (301) via a driving pipe bracket (209), and a reset synchronization rod (308) is slidably provided on the driving pipe bracket (209), the top end of the reset synchronization rod (308) is fixedly connected to the top end of the top reset rod (310), and the bottom end of the reset synchronization rod (308) is fixedly provided with a balance ring (312).

4. A low-loss silicon oxide optical waveguide growth device according to claim 3, characterized in that: The balancing ring (312) is slidably sleeved on the circumferential surface of the driving pipe (201); two release sliding pins (314) are symmetrically arranged on the lower surface of the balancing ring (312); a limit plate (315) is fixedly installed on the bottom end of each release sliding pin (314); and a sealing ring bracket (316) is slidably arranged on the two release sliding pins (314); a sealing ring (317) is arranged on the sealing ring bracket (316); the sealing ring (317) is slidably matched with the circumferential surface of the driving pipe (201); and a top end of the sealing cover (306) is provided with an inclined groove chamfer that matches the sealing ring (317).

5. A low-loss silicon oxide optical waveguide growth device according to claim 4, characterized in that: A spring stopper (309) that slidably cooperates with the reset synchronization rod (308) is also fixedly mounted on the circumferential surface of the drive pipe (201); a spring (313) is fixedly mounted between the spring stopper (309) and the balance ring (312); the spring (313) is disposed around the surface of the drive pipe (201).

6. The low-loss silicon oxide optical waveguide growth device according to claim 5, characterized in that: A bottom platen (102) is also fixedly mounted on the lower surface of the sealing platen (101), and two mutually meshing nut toothed discs (103) and an adaptable driving gear (107) are rotatably mounted between the bottom platen (102) and the sealing platen (101), wherein the nut toothed disc (103) is threadably matched with the threaded lead screw (105).

7. The low-loss silicon oxide optical waveguide growth device according to claim 6, characterized in that: The heating component (112) is composed of a plurality of silicon-molybdenum rods, all of which are arranged in an axial array along the heating crucible (113), and each silicon-molybdenum rod can independently control the temperature, and all of the silicon-molybdenum rods are fixed to the sealing table (101) through a heating component bracket (111), so that relative movement can occur between the heating crucible (113) and the heating component (112).

8. The low-loss silicon oxide optical waveguide growth device according to claim 7, characterized in that: The adaptable driving gear (107) is also fixedly mounted with a lateral gear (106); the lateral gear (106) and the adaptable driving gear (107) are both rotatably mounted on one of the anti-rotation slide bars (104); an adaptable adjusting gear (108) meshing with the lateral gear (106) is also rotatably mounted on the bottom table (102); an adaptable adjusting motor (110) is fixedly mounted on the main support frame (301); and an output shaft of the adaptable adjusting motor (110) is connected to the adaptable adjusting gear (108) via a transmission shaft (109).

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