Probe grinding device and method

Abstract

The present invention discloses a probe grinding device and method, belonging to the field of probe processing technology, the grinding device comprises an outer box, a bearing platform is provided on the top of the outer box, a hydraulic rod is connected to the bottom of the bearing platform, a through slot is provided in the middle of the bearing platform, a grinding disc is provided inside the through slot, a rotating motor is connected to the bottom of the grinding disc, a countersink is provided around the upper end surface of the bearing platform, a suction cup is provided in the countersink, a photoelectric sensor is provided on the inner wall of the through slot, the photoelectric sensor is used to control the hydraulic rod, the suction cup comprises a bottom cover provided with the bottom of the countersink, a gasket is provided above the bottom cover, the gasket is located above the countersink, a straight pipe is connected to the center of the bottom of the gasket, the straight pipe passes through the top of the bottom cover and is slidably connected, a piston is connected to the outside of the end of the straight pipe, the piston is matched with the inner wall of the bottom cover, and the countersink is externally connected to an air pump. The present invention can realize stable grinding of the probe and collect debris in a centralized manner, the overall structure is simple, and it is easy to clean.

Description

Technical Field

[0001] The invention relates to the technical field of probe processing, and in particular to a probe grinding device and method. Background Art

[0002] Probes are widely used to inspect the performance of semiconductor elements formed on flat panel display devices including liquid crystal display devices and plasma display panels or on wafers. Probe cards are used to electrically connect an inspection device that performs the functions required in the inspection of the inspected object and the inspected object, and include a collection of probes that are in direct contact with the inspected object. As for simple bar-shaped linear probes, since the shape is simple, it is easy to manage the accuracy, and the reproducibility of the product during production is good. On the other hand, it can be easily produced using photoetching processes, photolithography processes, or press molds, and therefore the scope of use is gradually expanding.

[0003] Among them, the probe card, as a test interface, has been widely used in chip testing before packaging. During the test, the probes on the probe card are directly in contact with the pads or bumps on the chip to bring out the chip signal, and then cooperate with peripheral test instruments and software control to achieve the purpose of automated measurement. When the probe card is in use, it is necessary to ensure that the contact working end of each needle tip is located on the same plane, so it is necessary to achieve this through grinding. The existing grinding equipment is manually driven, with high work intensity, low efficiency, and the grinding effect cannot be guaranteed; on the other hand, the probe on the probe card will produce grinding debris during the grinding process, and the debris is easy to adhere to the probe card. If it is not cleaned, it is likely to affect the installation and use performance of the probe card.

[0004] The Korean invention patent with application number KR1020080082505 discloses a polishing device for a probe card needle, which has a support frame, which is installed inside a main body. A clamp is provided on the top of the support frame, and the clamp has a through hole. The probe card can be installed on the clamp. The clamp is provided with multiple fixing units for fixing the position of the probe card. A chuck drive device is also provided in the support frame, and the grinding end of the chuck drive device can penetrate the through hole to achieve cyclic grinding of the probe on the probe card. In this invention, the grinding process of the probe card is carried out in a horizontal state, which reduces the deviation caused by gravity, and also facilitates the operator to observe with the naked eye and confirm the grinding progress. However, there is still some room for technical improvement in this invention. The grinding debris will fall to the bottom of the support frame, making it difficult to clean the debris in time. At the same time, the debris attached to the probe card cannot be processed in time, affecting the overall efficiency of the probe card processing. Summary of the invention

[0005] The object of the present invention is to provide a probe grinding device and method which are easy to operate and have good grinding effect.

[0006] In order to solve the above technical problems, the present invention specifically provides the following technical solutions:

[0007] The probe grinding device comprises: an outer box, a bearing platform is provided on the top of the outer box, a hydraulic rod is connected to the bottom of the bearing platform, a through slot is provided in the middle of the bearing platform, a grinding disc is provided inside the through slot, a rotating motor is connected to the bottom of the grinding disc, a countersunk hole is provided around the upper end surface of the bearing platform, and a suction cup is provided in the countersunk hole. The bearing platform is loaded with a probe card so that the probe of the probe card is located inside the through slot, and the hydraulic rod can adjust the lifting and lowering of the bearing platform to control the height of the grinding disc relative to the through slot, thereby realizing the height position adjustment of the grinding disc and the probe, so that the grinding disc can reach a suitable height to grind the end of the probe. Since the grinding disc is kept inside the through slot to grind the end of the probe, the debris generated by the grinding will be blocked by the inner wall of the through slot during the outward splashing process, which on the one hand reduces the distribution range of the debris to achieve relative concentration of the debris, which is helpful for cleaning and preventing accidental damage by debris, and on the other hand avoids debris from damaging the probe card, thereby improving processing safety. The suction cup provided on the bearing platform is used to stabilize the position of the probe card, which is helpful for improving grinding accuracy.

[0008] Preferably, a photoelectric sensor is provided on the inner wall of the through slot, and the photoelectric sensor is used to control the hydraulic rod. When the hydraulic column is shortened and the probe is close to the grinding disc, the photoelectric sensor detects the relative distance between the grinding disc and the probe on the inner side of the through slot, and further controls the telescopic stroke of the hydraulic rod to ensure that the grinding disc forms precise grinding on the end of the probe, realizes automatic control, improves grinding accuracy, and facilitates operation.

[0009] Preferably, the suction cup includes a bottom cover arranged at the bottom of the countersunk hole, a gasket is arranged above the bottom cover, the gasket is located above the countersunk hole, a straight tube is connected to the center of the bottom of the gasket, the straight tube passes through the top of the bottom cover and is slidably connected, a piston is connected to the outer side of the end of the straight tube, the piston is matched with the inner wall of the bottom cover, and the countersunk hole is externally connected to an air pump. The probe card on the support platform contacts the gasket to avoid scratches caused by relative sliding between the probe card and the support platform, which affects the quality of the product. Under the suction action of the air pump, the gas in the space below the piston can be continuously sucked, resulting in a close fit between the probe card and the gasket, while forming a closure of the space above the gasket, achieving stable adsorption of the probe card on the gasket, reducing the possibility of probe card deviation, and improving grinding stability, thereby improving the effect of probe grinding;

[0010] During the air pumping process, the piston moves downward in the bottom cover, so that the space above the piston increases. Since the gas mass in the upper space is constant, a negative pressure cavity is formed in the upper space. The negative pressure cavity helps to absorb the vibration interference transmitted to the probe card during the grinding process of the grinding disk, helps to protect the probe card from wear, and also improves the positioning stability of the probe card, further enhancing the grinding effect.

[0011] Since the suction cup is arranged around the bearing platform, the bearing platform can load and position probe cards of different sizes, thereby improving the adaptability of the device.

[0012] Preferably, the countersunk hole is provided with air holes through it downwards, and a ring-shaped tube is provided at the bottom of the support platform to connect the air holes, and the ring-shaped tube is connected to the air pump. When the air pump starts the suction function, the gas in each countersunk hole and the air hole is evenly sucked through the ring-shaped tube to balance the gas flow rate in each air hole, which helps to maintain the height consistency of each gasket to ensure the horizontality of the probe card after installation and improve the grinding accuracy.

[0013] Preferably, a collecting groove is provided on the inner wall of the through groove, and the collecting groove is an annular groove. A ventilation groove is provided between the collecting groove and any air hole, and a filter is provided in the collecting groove, and the filter is used to cover the opening of the ventilation groove on the collecting groove. During the grinding process, the grinding disc rotates continuously to grind the probe tip and generate debris. The debris splashing outward can be blocked by the through groove and enter the collecting groove, so that the debris is concentrated and the cleaning difficulty is reduced;

[0014] During grinding, the air pump maintains suction so that the probe card is adsorbed by the suction cup. When the gas in the countersunk hole flows to the air pump through the air hole and the annular tube, the external gas enters the ventilation groove through the collection groove under the action of air pressure, and converges into the air hole and enters the annular tube to be sucked by the air pump. The gas entering the collection groove can carry the flying debris and concentrate it in the collection groove, thereby improving the debris collection capacity and greatly reducing the possibility of debris falling after contacting the inner wall of the through groove. At the same time, the gas entering the collection groove can also adsorb the debris attached to the grinding surface of the probe card, forming self-cleaning during the processing, eliminating the cleaning step of the probe card after processing, and improving the overall processing efficiency.

[0015] The airflow entering the ventilation groove can also promote the airflow inside the groove to achieve heat dissipation of the grinding disc and the probe, thereby improving the durability of the grinding disc and the probe and reducing maintenance costs;

[0016] Since the upper surface of the grinding disc will be worn and produce fine chips during grinding, the airflow entering the ventilation groove can also promote the fine chips on the surface of the grinding disc to fall into the collection groove, ensuring the smooth surface of the grinding disc and improving the grinding quality of the probe.

[0017] The setting of the filter screen intercepts the debris and prevents the debris from entering the ventilation groove and clogging the air holes. After the grinding is completed, the collected debris can be taken out by removing the elastic filter screen, which reduces the difficulty and cost of manual cleaning and improves work efficiency.

[0018] Preferably, an annular elastic sheet is provided on the inner wall of the through slot, the outer side of the elastic sheet is fixed to the bottom of the collecting slot, the inner side of the elastic sheet is inclined upward toward the center, and a retaining ring is provided on the outer edge of the upper end of the elastic sheet, with the end of the retaining ring facing into the collecting slot. The elastic sheet is located above the grinding disc in the initial state, and when the hydraulic rod drives the bearing platform to descend relative to the grinding disc, the grinding disc can contact and squeeze the inner side of the elastic sheet, causing the elastic sheet to deform until the grinding disc passes through and reaches above the elastic sheet, at which time the elastic sheet recovers and forms a barrier at the bottom of the through slot, collecting the debris and fine chips falling from between the through slot and the grinding disc and guiding them to the collecting slot, further improving the collection effect and preventing the debris from contaminating the outside and the inside;

[0019] After grinding is completed, the hydraulic rod extends and drives the supporting platform to rise. The grinding disc will move downward relative to the elastic sheet. During this period, the grinding disc squeezes the elastic sheet, and the inner side of the elastic sheet bends downward. At this time, the retaining ring blocks the debris to prevent the elastic sheet from shaking after deformation and causing the debris to fall.

[0020] Preferably, the support platform is symmetrically provided with a clamping member, which includes a base fixed to the upper end of the support platform, a handle hinged on the base, an extension arm vertically connected to one side of the handle, and a clamping head installed on the extension arm. By swinging the handle on the base, the clamping head on the extension arm can swing and press down the upper end surface of the probe card to form the top positioning of the probe card, thereby preventing the longitudinal jump of the probe card from affecting the grinding.

[0021] Preferably, the clamping member also includes a collar, and the collar is symmetrically provided with slots on the inner side, and the slots are provided correspondingly to the handle. A baffle is connected around the collar, and the baffle is an elastic plate, and adjacent baffles are provided in coordination. Since the handle is hinged, when the grinding disc keeps rotating and contacts the probe, the probe card is subjected to an upward force, which may cause the handle to swing at the hinge. The collar is installed by correspondingly engaging the handle with the slots of the collar. At this time, the handle cannot swing due to the constraint of the collar, thereby tightening the posture of each clamping head and improving the positioning stability.

[0022] The baffle on the collar shields and covers the upper end surface of the probe card. The elastic baffle can block and weaken the kinetic energy of external falling objects, thereby reducing the possibility of damage to the probe card.

[0023] Preferably, the outer box has a receiving groove, the receiving groove is connected to the top and one side of the outer box, and the hydraulic rod and the rotary motor are arranged in the receiving groove. Since the receiving groove is connected to the side, it is convenient for the operator to observe the grinding progress from the side, and it is also convenient to install and remove the internal components of the outer box, thereby improving the convenience of operation.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] The method of grinding the probe card with the grinding disc on the inner side of the through groove can effectively reduce the pollution caused by debris and the damage to the probe card, reduce the waste cost and cleaning cost; the photoelectric sensor on the inner side of the through groove can detect and accurately control the relative height between the grinding disc and the probe, realize the automation of operation, and improve the grinding efficiency; the setting of the suction cup can position the probe card to prevent its movement from affecting the grinding effect; the air pump suction forms a vacuum negative pressure chamber, which can fully absorb the vibration interference caused by grinding, improve the stability of the probe card, and help improve the grinding accuracy; the surrounding setting of the suction cup improves the adaptability of the device to different probe cards; the setting of the ventilation groove makes The airflow can carry debris into the collection slot, improving the debris collection capacity and facilitating cleaning; the airflow entering the collection slot forms the self-cleaning of the grinding disc and improves the grinding accuracy; the airflow entering the collection slot promotes the gas flow in the through slot, forms heat dissipation and improves durability; the airflow causes the debris attached to the probe card to fall off, saving cleaning work, reducing costs and improving efficiency; the elastic sheet assists in debris collection and further simplifies cleaning work; the clamping piece positions the top of the probe card to prevent the probe card from bouncing and affecting grinding; the ring positions the handle to improve the top clamping effect; the baffle protects the top of the probe card to prevent accidental damage. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the implementation methods of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the implementation methods or the description of the prior art. Obviously, the drawings in the following description are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0027] Figure 1 It is the overall schematic diagram of the probe grinding device;

[0028] Figure 2 It is a schematic diagram of the structure of the bearing platform;

[0029] Figure 3 is a cross-sectional schematic diagram of the load-bearing platform;

[0030] Figure 4 is a schematic cross-sectional view of a suction cup;

[0031] Figure 5 It is a schematic diagram of the annular tube structure;

[0032] Figure 6 It is a cross-sectional schematic diagram of the carrier platform and the grinding disc;

[0033] Figure 7 for Figure 6 A magnified schematic diagram of the middle A area;

[0034] Figure 8 It is a schematic diagram of the structure of the clamping part.

[0035] Figure numbers: outer box 1; supporting platform 2; through groove 20; countersunk hole 21; air hole 22; ventilation groove 23; hydraulic rod 3; grinding disc 4; photoelectric sensor 5; suction cup 6; bottom cover 60; gasket 61; straight pipe 62; piston 63; top cover 65; spring 66; annular tube 7; collecting tank 8; filter screen 80; elastic sheet 81; retaining ring 82; clamping piece 9; base 90; handle 91; extension arm 92; clamping head 93; collar 94; slot 95; baffle 96. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] The following first describes the concepts involved in the present application in conjunction with the accompanying drawings. It should be noted that the following description of each concept is only to make the content of the present application easier to understand, and does not limit the scope of protection of the present application; at the same time, the embodiments and features in the embodiments of the present application can be combined with each other in the absence of conflict. The present application will be described in detail with reference to the accompanying drawings and in conjunction with the embodiments.

[0038] See attached Figure 1 -Attached Figure 2 The probe grinding device comprises: an outer box 1, a bearing platform 2 is arranged on the top of the outer box 1, a hydraulic rod 3 is connected to the bottom of the bearing platform 2, a through groove 20 is arranged in the middle of the bearing platform 2, a grinding disc 4 is arranged inside the through groove 20, a rotating motor is connected to the bottom of the grinding disc 4, a countersunk hole 21 is arranged around the upper end surface of the bearing platform 2, and a suction cup 6 is arranged in the countersunk hole 21.

[0039] It should be noted that a mounting plate is arranged at the bottom of the outer box 1, the hydraulic rod 3 and the rotating motor are arranged at the upper end of the mounting plate, there are multiple hydraulic rods 3 and they are symmetrically arranged at the bottom of the supporting platform 2, and the rotating motor is arranged in the middle of the inner side of the multiple hydraulic rods 3.

[0040] A controller for controlling the hydraulic rod 3 and the rotary motor is arranged in the outer box 1 . A control panel is arranged on one side of the outer box 1 . An operator issues instructions to the controller through the control panel to control the hydraulic rod 3 .

[0041] A power source is also provided in the outer box 1, and the power source is used to supply power to the hydraulic rod 3 and the rotating motor.

[0042] The carrier 2 is loaded with a probe card so that the probe of the probe card is located inside the through slot 20. The hydraulic rod 3 can adjust the lifting and lowering of the carrier 2 to control the height of the grinding disc 4 relative to the through slot 20, thereby realizing the height position adjustment of the grinding disc 4 and the probe, so that the grinding disc 4 can reach a suitable height to grind the end of the probe. Since the grinding disc 4 is kept on the inside of the through slot 20 to grind the end of the probe, the debris generated by the grinding will be blocked by the inner wall of the through slot 20 during the outward splashing process. On the one hand, the distribution range of the debris is reduced to achieve relative concentration of the debris, which is helpful for cleaning and preventing accidental injury from debris. On the other hand, it avoids debris from damaging the probe card, thereby improving processing safety. The suction cup 6 provided on the carrier 2 is used to stabilize the position of the probe card, which helps to improve the grinding accuracy.

[0043] A photoelectric sensor 5 is disposed on the inner wall of the through slot 20 , and the photoelectric sensor 5 is used to control the hydraulic rod 3 .

[0044] When the hydraulic column is shortened and the probe approaches the grinding disc 4, the photoelectric sensor 5 detects the relative distance between the grinding disc 4 and the probe on the inner side of the through slot 20, and further controls the telescopic stroke of the hydraulic rod 3 to ensure that the grinding disc 4 accurately grinds the end of the probe, thereby realizing automatic control, improving grinding accuracy, and facilitating operation.

[0045] See attached Figure 3 -Attached Figure 4 The suction cup 6 includes a bottom cover 60 arranged at the bottom of the countersunk hole 21, a gasket 61 is arranged above the bottom cover 60, and the gasket 61 is located above the countersunk hole 21. A straight tube 62 is connected to the bottom center of the gasket 61. The straight tube 62 passes through the top of the bottom cover 60 and is slidably connected. A piston 63 is connected to the outer side of the end of the straight tube 62. The piston 63 is matched with the inner wall of the bottom cover 60, and the countersunk hole 21 is externally connected to an air pump. The probe card on the support platform 2 contacts with the gasket 61 to avoid scratches caused by relative sliding between the probe card and the support platform 2, which affects the quality of the product. Under the suction action of the air pump, the gas in the space below the piston 63 can be continuously sucked, resulting in a close fit between the probe card and the gasket 61, while forming a closure of the space above the gasket 61, achieving stable adsorption of the probe card on the gasket 61, reducing the possibility of probe card deviation, and improving grinding stability, thereby improving the effect of probe grinding;

[0046] During the air pumping process, the piston 63 moves downward in the bottom cover 60, so that the space above the piston 63 increases. Since the mass of the gas in the upper space is constant, a negative pressure cavity is formed in the upper space. The negative pressure cavity helps to absorb the vibration interference transmitted to the probe card during the grinding process of the grinding disk 4, helps to protect the probe card from wear, and also improves the positioning stability of the probe card, further enhancing the grinding effect.

[0047] Since the suction cup 6 is disposed around the carrier platform 2, the carrier platform 2 can load and position probe cards of different sizes, thereby improving the adaptability of the device.

[0048] A top cover 65 is provided between the gasket 61 and the bottom cover 60 . The top cover 65 is fixed to the straight tube 62 . The top cover 65 is sleeved on the outer side of the bottom cover 60 . The top cover 65 is matched with the outer side wall of the bottom cover 60 . A spring 66 is provided between the top cover 65 and the bottom cover 60 . The spring 66 is sleeved on the straight tube 62 .

[0049] When the air pump is pumping, the piston 63 carries the straight tube 62 and the gasket 61 downward, causing the top cover 65 connected to the straight tube 62 to move downward. At this time, the top cover 65 is close to the bottom cover 60 to squeeze the spring 66. The spring 66 can limit the downward movement distance of the gasket 61, ensuring that the gasket 61 remains at a certain height above the upper end surface of the carrier 2, reducing the transmission of vibration to the probe card, which is beneficial to reducing the impact on grinding by reducing the jitter of the probe card.

[0050] The cooperation between the top cover 65 and the bottom cover 60 ensures the verticality of the gasket 61, avoids the gasket 61 tilting and causing the entire probe card to shift, resulting in the probes being unable to be ground in parallel, and prevents the probes from being scrapped due to different lengths.

[0051] When the air pump stops pumping, the gas under the piston 63 flows back, and at the same time, the spring 66 recovers its deformation to cause the top cover 65 to bounce upward away from the bottom cover 60, so that the gasket 61 connected to the straight tube 62 bounces upward with the probe card. The bouncing process helps to shake off the debris attached to the probe card, improves the cleanliness of the probe card, and realizes self-cleaning.

[0052] The setting of the spring 66 ensures that the gasket 61 can rebound upward after the probe card is taken out, preventing the gasket 61 from being overly deformed under pressure and being stuck in the countersunk hole 21, thereby losing the ability to absorb and support the probe card.

[0053] See attached Figure 5 The countersunk hole 21 is penetrated downward to form an air hole 22, and an annular tube 7 connecting the air holes 22 is provided at the bottom of the supporting platform 2, and the annular tube 7 is connected to the air pump.

[0054] When the air pump starts the suction function, the gas in each countersunk hole 21 and air hole 22 is evenly sucked through the annular tube 7 to balance the gas flow rate in each air hole 22, which helps to maintain the consistent height of each gasket 61 to ensure the horizontality of the probe card after installation and improve the grinding accuracy.

[0055] See attached Figure 6 -Attached Figure 7The inner wall of the through groove 20 is provided with a collecting groove 8, which is an annular groove. A ventilation groove 23 is provided between the collecting groove 8 and any air hole 22. A filter screen 80 is provided in the collecting groove 8, and the filter screen 80 is used to cover the opening of the ventilation groove 23 on the collecting groove 8. During the grinding process, the grinding disc 4 continuously rotates to grind the probe tip and generate debris. The debris splashing outward can be blocked by the through groove 20 and enter the collecting groove 8, so that the debris is concentrated and the cleaning difficulty is reduced;

[0056] During grinding, the air pump maintains suction so that the probe card is adsorbed by the suction cup 6. When the gas in the countersunk hole 21 flows to the air pump through the air hole 22 and the annular tube 7, under the action of air pressure, the external gas enters the ventilation groove 23 through the collection groove 8, and converges into the air hole 22 to enter the annular tube 7 and is sucked by the air pump. The gas entering the collection groove 8 can carry the flying debris and concentrate it in the collection groove 8, thereby improving the debris collection capacity and greatly reducing the possibility of debris falling after contacting the inner wall of the through groove 20; at the same time, the gas entering the collection groove 8 can also adsorb the debris attached to the grinding surface of the probe card, forming self-cleaning during the processing, eliminating the cleaning step of the probe card after processing, and improving the overall processing efficiency.

[0057] The airflow entering the ventilation groove 23 can also promote the airflow inside the through groove 20, thereby achieving heat dissipation for the grinding disc 4 and the probe, improving the durability of the grinding disc 4 and the probe, and reducing maintenance costs;

[0058] During grinding, the upper surface of the grinding disc 4 will be worn and produce fine chips. The airflow entering the ventilation groove 23 can also promote the fine chips on the surface of the grinding disc 4 to fall into the collecting groove 8, ensuring the smooth surface of the grinding disc 4 and improving the grinding quality of the probe.

[0059] The filter screen 80 is provided to intercept the debris and prevent the debris from entering the ventilation groove 23 and blocking the air hole 22. After the grinding is completed, the collected debris can be taken out by removing the elastic filter screen 80, which reduces the difficulty and cost of manual cleaning and improves work efficiency.

[0060] An annular elastic sheet 81 is provided on the inner wall of the through groove 20. The outer side of the elastic sheet 81 is fixed to the bottom of the collecting groove 8. The inner side of the elastic sheet 81 is inclined upward toward the center. A retaining ring 82 is provided on the outer edge of the upper end of the elastic sheet 81. The end of the retaining ring 82 faces the inside of the collecting groove 8.

[0061] The elastic sheet 81 is initially located above the grinding disc 4. When the hydraulic rod 3 drives the carrier 2 to descend relative to the grinding disc 4, the grinding disc 4 can contact and squeeze the inner side of the elastic sheet 81, causing the elastic sheet 81 to deform until the grinding disc 4 passes through and reaches the top of the elastic sheet 81. At this time, the elastic sheet 81 recovers and forms a barrier at the bottom of the through groove 20, collecting and guiding the debris and fine debris falling from between the through groove 20 and the grinding disc 4 to the collecting groove 8, further improving the collection effect and preventing the debris from contaminating the outside and the inside.

[0062] After grinding is completed, the hydraulic rod 3 extends to drive the supporting platform 2 to rise, and the grinding disc 4 will move downward relative to the elastic sheet 81. During this period, the grinding disc 4 squeezes the elastic sheet 81, and the inner side of the elastic sheet 81 bends downward and deforms. At this time, the retaining ring 82 blocks the debris to prevent the elastic sheet 81 from shaking after deformation, causing the debris to fall.

[0063] See attached Figure 8 A clamping member 9 is symmetrically provided on the supporting platform 2. The clamping member 9 includes a base 90 fixed to the upper end of the supporting platform 2. A handle 91 is hinged on the base 90. An extension arm 92 is vertically connected to one side of the handle 91. The extension arm 92 is equipped with a clamping head 93.

[0064] By swinging the handle 91 on the base 90, the clamping head 93 on the extension arm 92 can be swung and press down the upper end surface of the probe card to form a top positioning of the probe card and prevent the longitudinal jump of the probe card from affecting the grinding.

[0065] It should be noted that the bottom end of the pressing head is a rubber head.

[0066] It should be noted that the extension arm has a locking groove on the inner side, and multiple clamping heads can be installed in the installation groove. The clamping head includes a mounting column and a locking bolt. The mounting column can adjust the position in the locking groove and is fixed in the position in the locking groove by the locking bolt.

[0067] The above-mentioned adjustable position and configurable quantity of the clamping head facilitate the clamping head to clamp probe cards of different sizes from above, thereby improving adaptability.

[0068] The clamping member 9 also includes a collar 94, which is symmetrically provided with a card slot 95 on the inner side, and the card slot 95 is provided corresponding to the handle 91. A baffle 96 is connected around the collar 94, and the baffle 96 is an elastic plate, and adjacent baffles 96 are provided in coordination. Since the handle 91 is hinged, when the grinding disc 4 keeps rotating and contacts the probe, the probe card is subjected to an upward force, which may cause the handle 91 to swing at the hinge. The collar 94 is installed by correspondingly engaging the card slots 95 of the collar 94 with the handle 91. At this time, the handle 91 is constrained by the collar 94 and cannot swing, thereby tightening the posture of each clamping head 93 and improving the positioning stability.

[0069] The baffle 96 on the collar 94 shields and covers the upper end surface of the probe card. The elastic baffle 96 can block and weaken the kinetic energy of external falling objects, thereby reducing the possibility of damage to the probe card.

[0070] The outer box 1 has a receiving groove, which is connected to the top and one side of the outer box 1. The hydraulic rod 3 and the rotary motor are arranged in the receiving groove. Since the receiving groove is connected to the side, it is convenient for the operator to observe the grinding progress from the side, and it is also convenient to install and remove the internal components of the outer box 1, thereby improving the convenience of operation.

[0071] The probe grinding device and the probe grinding method thereof have the following specific steps:

[0072] Step 1: Place the probe card with the probe side facing downward on the carrier 2;

[0073] Step 2: Press the probe card, start the air pump to fix the suction cup 6 to the probe card, then press the top of the probe card by the pressing member 9, and install the collar 94 on the handle 91;

[0074] Step 3: Manually control the hydraulic rod 3 to bring the grinding disc 4 close to the probe to a suitable position, and then the photoelectric sensor 5 adjusts the height position of the grinding disc 4 relative to the probe through the hydraulic rod 3;

[0075] Step 4: Start the rotating motor, the photoelectric sensor 5 continues to control the hydraulic rod 3, and the grinding disc 4 rotates to grind the probe;

[0076] Step 5: After grinding is completed, turn off the rotating motor, turn off the air pump, raise the support platform 2 via the hydraulic rod 3, remove the collar 94, swing the handle 91, and take out the probe card.

[0077] The embodiments and / or implementation methods described above are only used to illustrate the preferred embodiments and / or implementation methods for realizing the technology of the present invention, and are not intended to limit the implementation methods of the technology of the present invention in any form. Any technical personnel in this field may make slight changes or modifications to other equivalent embodiments without departing from the scope of the technical means disclosed in the content of the present invention, but they should still be regarded as technologies or embodiments that are essentially the same as the present invention.

[0078] This article uses specific examples to illustrate the principles and implementation methods of this application. The description of the above embodiments is only used to help understand the method and its core ideas of this application. The above is only the preferred implementation method of this application. It should be pointed out that due to the limitations of textual expression and the objective existence of infinite specific structures, ordinary technicians in this technical field can make several improvements, modifications or changes without departing from the principles of this application, and can also combine the above technical features in an appropriate manner; these improvements, modifications, changes or combinations, or the direct application of the concept and technical solution of the invention to other occasions without improvement, should be regarded as the scope of protection of this application.

Claims

1. Probe grinding device, including: An outer box (1), wherein a bearing platform (2) is provided on the top of the outer box (1). The invention is characterized in that: a hydraulic rod (3) is connected to the bottom of the bearing platform (2); a through slot (20) is provided in the middle of the bearing platform (2); a grinding disc (4) is provided inside the through slot (20); a rotating motor is connected to the bottom of the grinding disc (4); a countersunk hole (21) is provided around the upper end surface of the bearing platform (2); a suction cup (6) is provided in the countersunk hole (21); The suction cup (6) comprises a bottom cover (60) arranged at the bottom of the countersunk hole (21), a gasket (61) is arranged above the bottom cover (60), the gasket (61) is located above the countersunk hole (21), a straight pipe (62) is connected to the center of the bottom of the gasket (61), the straight pipe (62) passes through the top of the bottom cover (60) and the two are slidably connected, a piston (63) is connected to the outer side of the end of the straight pipe (62), the piston (63) is arranged in cooperation with the inner wall of the bottom cover (60), and the countersunk hole (21) is externally connected to an air pump; The countersunk hole (21) is provided with air holes (22) extending downwardly therethrough, and an annular tube (7) communicating with each of the air holes (22) is provided at the bottom of the support platform (2), and the annular tube (7) is connected to the air pump; The inner wall of the through groove (20) is provided with a collecting groove (8), the collecting groove (8) being an annular groove, a ventilation groove (23) being provided between the collecting groove (8) and any of the air holes (22), a filter screen (80) being provided in the collecting groove (8), the filter screen (80) being used to cover an opening of the ventilation groove (23) on the collecting groove (8); An annular elastic sheet (81) is provided on the inner wall of the through groove (20), the outer side of the elastic sheet (81) is fixed to the bottom of the collecting groove (8), the inner side of the elastic sheet (81) is inclined upward toward the center, and a retaining ring (82) is provided on the outer edge of the upper end of the elastic sheet (81), the end of the retaining ring (82) faces the inside of the collecting groove (8).

2. The probe grinding device according to claim 1, characterized in that: A photoelectric sensor (5) is provided on the inner wall of the through slot (20), and the photoelectric sensor (5) is used to control the hydraulic rod (3).

3. The probe grinding device according to claim 1, characterized in that: A clamping member (9) is symmetrically arranged on the bearing platform (2), and the clamping member (9) comprises a base (90) fixed to the upper end of the bearing platform (2), a handle (91) is hinged on the base (90), an extension arm (92) is vertically connected to one side of the handle (91), and a clamping head (93) is installed on the extension arm (92).

4. The probe grinding device according to claim 3 is characterized in that: The clamping member (9) further comprises a collar (94), wherein the collar (94) is symmetrically provided with a clamping groove (95) on its inner side, wherein the clamping groove (95) is provided corresponding to the handle (91), and a baffle plate (96) is connected around the collar (94), wherein the baffle plate is an elastic plate, and adjacent baffle plates (96) are provided in coordination with each other.

5. The probe grinding device according to claim 1, characterized in that: The outer box (1) has a receiving groove, the receiving groove is connected to the top and one side of the outer box (1), and the hydraulic rod (3) and the rotating motor are arranged in the receiving groove.

6. A probe grinding method, using the probe grinding device according to claim 2, characterized by the following steps: Step 1: placing the probe card with the probe side facing downward on the carrier (2); Step 2: Pressing the probe card tightly and fixing the probe card via the suction cup (6); Step 3: the photoelectric sensor (5) adjusts the height position of the grinding disc (4) relative to the probe through the hydraulic rod (3); Step 4: starting the rotating motor, so that the grinding disc (4) rotates to grind the probe; Step 5: After grinding is completed, the rotating motor is turned off, the support platform (2) is raised by the hydraulic rod (3), and the probe card is taken out.

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